CN100508380C - 弹性边界波装置及其制造方法 - Google Patents
弹性边界波装置及其制造方法 Download PDFInfo
- Publication number
- CN100508380C CN100508380C CNB2004100904093A CN200410090409A CN100508380C CN 100508380 C CN100508380 C CN 100508380C CN B2004100904093 A CNB2004100904093 A CN B2004100904093A CN 200410090409 A CN200410090409 A CN 200410090409A CN 100508380 C CN100508380 C CN 100508380C
- Authority
- CN
- China
- Prior art keywords
- substrate
- dielectric film
- film
- wave device
- thickness
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/25—Constructional features of resonators using surface acoustic waves
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/0222—Details of interface-acoustic, boundary, pseudo-acoustic or Stonely wave devices
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
- H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
- H03H3/08—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of resonators or networks using surface acoustic waves
Abstract
Description
Claims (3)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2003382346 | 2003-11-12 | ||
JP2003382346A JP3894917B2 (ja) | 2003-11-12 | 2003-11-12 | 弾性境界波デバイス及びその製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1617443A CN1617443A (zh) | 2005-05-18 |
CN100508380C true CN100508380C (zh) | 2009-07-01 |
Family
ID=34463751
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNB2004100904093A Expired - Fee Related CN100508380C (zh) | 2003-11-12 | 2004-11-12 | 弹性边界波装置及其制造方法 |
Country Status (5)
Country | Link |
---|---|
US (1) | US7224101B2 (zh) |
EP (1) | EP1538748A3 (zh) |
JP (1) | JP3894917B2 (zh) |
KR (1) | KR100593354B1 (zh) |
CN (1) | CN100508380C (zh) |
Families Citing this family (55)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2004254291A (ja) * | 2003-01-27 | 2004-09-09 | Murata Mfg Co Ltd | 弾性表面波装置 |
EP1696562A4 (en) * | 2003-12-16 | 2010-07-07 | Murata Manufacturing Co | ACOUSTIC LIMIT WAVE DEVICE |
DE102004045181B4 (de) * | 2004-09-17 | 2016-02-04 | Epcos Ag | SAW-Bauelement mit reduziertem Temperaturgang und Verfahren zur Herstellung |
JP2006279609A (ja) * | 2005-03-29 | 2006-10-12 | Fujitsu Media Device Kk | 弾性境界波素子、共振子およびラダー型フィルタ |
KR100638821B1 (ko) | 2005-05-19 | 2006-10-27 | 삼성전기주식회사 | 표면탄성파 소자 및 그 제조방법 |
WO2006123585A1 (ja) * | 2005-05-20 | 2006-11-23 | Murata Manufacturing Co., Ltd. | 弾性境界波装置 |
US7619347B1 (en) | 2005-05-24 | 2009-11-17 | Rf Micro Devices, Inc. | Layer acoustic wave device and method of making the same |
JP2008235950A (ja) | 2005-05-26 | 2008-10-02 | Murata Mfg Co Ltd | 弾性境界波装置 |
WO2007007475A1 (ja) * | 2005-07-13 | 2007-01-18 | Murata Manufacturing Co., Ltd. | 弾性波フィルタ装置 |
WO2007007462A1 (ja) * | 2005-07-14 | 2007-01-18 | Murata Manufacturing Co., Ltd. | 弾性境界波装置及びその製造方法 |
JP4001157B2 (ja) * | 2005-07-22 | 2007-10-31 | 株式会社村田製作所 | 弾性境界波装置 |
US20080292608A1 (en) * | 2005-11-07 | 2008-11-27 | Irm Llc | Compounds and Compositions as Ppar Modulators |
DE102005055870A1 (de) * | 2005-11-23 | 2007-05-24 | Epcos Ag | Elektroakustisches Bauelement |
DE102005055871A1 (de) * | 2005-11-23 | 2007-05-24 | Epcos Ag | Elektroakustisches Bauelement |
CN100527613C (zh) * | 2006-02-28 | 2009-08-12 | 富士通媒体部品株式会社 | 弹性边界波器件、谐振器以及滤波器 |
ATE551777T1 (de) * | 2006-04-24 | 2012-04-15 | Murata Manufacturing Co | Elastische oberflächenwellenvorrichtung |
EP2023485A4 (en) * | 2006-05-30 | 2010-02-03 | Murata Manufacturing Co | RAND SOUND WAVE DEVICE |
JP4943787B2 (ja) * | 2006-09-13 | 2012-05-30 | 太陽誘電株式会社 | 弾性波デバイス、共振器およびフィルタ |
JP4947055B2 (ja) * | 2006-09-25 | 2012-06-06 | 株式会社村田製作所 | 弾性境界波装置 |
WO2008038506A1 (fr) * | 2006-09-27 | 2008-04-03 | Murata Manufacturing Co., Ltd. | Dispositif d'onde acoustique limite |
WO2008044411A1 (fr) * | 2006-10-12 | 2008-04-17 | Murata Manufacturing Co., Ltd. | Dispositif à ondes limites élastiques |
US7408286B1 (en) * | 2007-01-17 | 2008-08-05 | Rf Micro Devices, Inc. | Piezoelectric substrate for a saw device |
US8490260B1 (en) | 2007-01-17 | 2013-07-23 | Rf Micro Devices, Inc. | Method of manufacturing SAW device substrates |
WO2008087836A1 (ja) * | 2007-01-19 | 2008-07-24 | Murata Manufacturing Co., Ltd. | 弾性境界波装置の製造方法 |
WO2008108215A1 (ja) * | 2007-03-06 | 2008-09-12 | Murata Manufacturing Co., Ltd. | 弾性境界波装置 |
DE102007012383B4 (de) | 2007-03-14 | 2011-12-29 | Epcos Ag | Mit geführten akustischen Volumenwellen arbeitendes Bauelement |
DE102007012384A1 (de) * | 2007-03-14 | 2008-09-18 | Epcos Ag | Mit geführten akustischen Wellen arbeitendes Bauelement und Verfahren zur Herstellung des Bauelements |
WO2009054121A1 (ja) * | 2007-10-23 | 2009-04-30 | Panasonic Corporation | 弾性境界波装置 |
JP4995923B2 (ja) * | 2007-11-19 | 2012-08-08 | 太陽誘電株式会社 | 弾性境界波デバイス、およびそれを用いた通信機 |
JP4943462B2 (ja) * | 2009-02-27 | 2012-05-30 | 太陽誘電株式会社 | 弾性波デバイス、デュープレクサ、通信モジュール、通信装置、弾性波デバイスの製造方法 |
JPWO2010122993A1 (ja) * | 2009-04-22 | 2012-10-25 | 株式会社村田製作所 | 弾性境界波装置及びその製造方法 |
US8044553B2 (en) | 2010-02-22 | 2011-10-25 | Triquint Semiconductor, Inc. | Temperature compensated surface acoustic wave device and method having buried interdigital transducers for providing an improved insertion loss and quality factor |
CN103891138B (zh) * | 2011-09-30 | 2016-12-07 | 株式会社村田制作所 | 弹性波装置 |
US9275853B2 (en) * | 2013-07-29 | 2016-03-01 | Applied Materials, Inc. | Method of adjusting a transistor gate flat band voltage with addition of AL203 on nitrided silicon channel |
FR3042648B1 (fr) * | 2015-10-20 | 2018-09-07 | Soitec Silicon On Insulator | Dispositif a ondes acoustiques de surface et procede de fabrication associe |
JP6993400B2 (ja) * | 2017-02-22 | 2022-01-13 | 株式会社村田製作所 | 弾性表面波素子 |
US11936358B2 (en) | 2020-11-11 | 2024-03-19 | Murata Manufacturing Co., Ltd. | Transversely-excited film bulk acoustic resonator with low thermal impedance |
US10911023B2 (en) | 2018-06-15 | 2021-02-02 | Resonant Inc. | Transversely-excited film bulk acoustic resonator with etch-stop layer |
US10790802B2 (en) | 2018-06-15 | 2020-09-29 | Resonant Inc. | Transversely excited film bulk acoustic resonator using rotated Y-X cut lithium niobate |
US11206009B2 (en) | 2019-08-28 | 2021-12-21 | Resonant Inc. | Transversely-excited film bulk acoustic resonator with interdigital transducer with varied mark and pitch |
US11146232B2 (en) | 2018-06-15 | 2021-10-12 | Resonant Inc. | Transversely-excited film bulk acoustic resonator with reduced spurious modes |
US20220116015A1 (en) | 2018-06-15 | 2022-04-14 | Resonant Inc. | Transversely-excited film bulk acoustic resonator with optimized electrode thickness, mark, and pitch |
US11323096B2 (en) | 2018-06-15 | 2022-05-03 | Resonant Inc. | Transversely-excited film bulk acoustic resonator with periodic etched holes |
US11916539B2 (en) | 2020-02-28 | 2024-02-27 | Murata Manufacturing Co., Ltd. | Split-ladder band N77 filter using transversely-excited film bulk acoustic resonators |
US11349452B2 (en) | 2018-06-15 | 2022-05-31 | Resonant Inc. | Transversely-excited film bulk acoustic filters with symmetric layout |
US11888463B2 (en) | 2018-06-15 | 2024-01-30 | Murata Manufacturing Co., Ltd. | Multi-port filter using transversely-excited film bulk acoustic resonators |
US11264966B2 (en) | 2018-06-15 | 2022-03-01 | Resonant Inc. | Solidly-mounted transversely-excited film bulk acoustic resonator with diamond layers in Bragg reflector stack |
US11909381B2 (en) | 2018-06-15 | 2024-02-20 | Murata Manufacturing Co., Ltd. | Transversely-excited film bulk acoustic resonators with two-layer electrodes having a narrower top layer |
US10998882B2 (en) | 2018-06-15 | 2021-05-04 | Resonant Inc. | XBAR resonators with non-rectangular diaphragms |
US11876498B2 (en) | 2018-06-15 | 2024-01-16 | Murata Manufacturing Co., Ltd. | Transversely-excited film bulk acoustic resonator with multiple diaphragm thicknesses and fabrication method |
US11901878B2 (en) | 2018-06-15 | 2024-02-13 | Murata Manufacturing Co., Ltd. | Transversely-excited film bulk acoustic resonators with two-layer electrodes with a wider top layer |
US11967945B2 (en) | 2018-06-15 | 2024-04-23 | Murata Manufacturing Co., Ltd. | Transversly-excited film bulk acoustic resonators and filters |
US10826462B2 (en) | 2018-06-15 | 2020-11-03 | Resonant Inc. | Transversely-excited film bulk acoustic resonators with molybdenum conductors |
WO2020186261A1 (en) * | 2019-03-14 | 2020-09-17 | Resonant Inc. | Transversely-excited film bulk acoustic resonator with half-lambda dielectric layer |
US11811391B2 (en) | 2020-05-04 | 2023-11-07 | Murata Manufacturing Co., Ltd. | Transversely-excited film bulk acoustic resonator with etched conductor patterns |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3435789B2 (ja) | 1993-03-15 | 2003-08-11 | 松下電器産業株式会社 | 表面弾性波素子 |
WO1996004713A1 (fr) * | 1994-08-05 | 1996-02-15 | Japan Energy Corporation | Dispositif a ondes acoustiques de surface et procede de production |
JPH09107264A (ja) * | 1995-10-11 | 1997-04-22 | Toyo Commun Equip Co Ltd | チャネル波局部閉じ込め型圧電振動子およびフィルタ |
US5838089A (en) * | 1997-02-18 | 1998-11-17 | Kobe Steel Usa Inc. | Acoustic wave devices on diamond with an interlayer |
DE69836719T2 (de) * | 1997-05-08 | 2007-10-04 | Kabushiki Kaisha Toshiba, Kawasaki | Elastische oberflächenwellenvorrichtung und verfahren zu deren herstellung |
JPH11340268A (ja) | 1998-05-28 | 1999-12-10 | Sony Corp | 半導体装置の製造方法 |
US6566983B2 (en) * | 2000-09-02 | 2003-05-20 | Lg Electronics Inc. | Saw filter using a carbon nanotube and method for manufacturing the same |
FR2837636B1 (fr) * | 2002-03-19 | 2004-09-24 | Thales Sa | Dispositif a ondes acoustiques d'interface en tantalate de lithium |
WO2003088483A1 (fr) * | 2002-04-15 | 2003-10-23 | Matsushita Electric Industrial Co., Ltd. | Dispositif a ondes acoustiques de surface, appareil de communication mobile et capteur mettant tous deux en oeuvre ledit dispositif |
-
2003
- 2003-11-12 JP JP2003382346A patent/JP3894917B2/ja not_active Expired - Fee Related
-
2004
- 2004-11-08 EP EP20040256898 patent/EP1538748A3/en not_active Withdrawn
- 2004-11-10 US US10/984,836 patent/US7224101B2/en active Active
- 2004-11-11 KR KR20040092009A patent/KR100593354B1/ko not_active IP Right Cessation
- 2004-11-12 CN CNB2004100904093A patent/CN100508380C/zh not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
KR100593354B1 (ko) | 2006-06-28 |
CN1617443A (zh) | 2005-05-18 |
US20050099091A1 (en) | 2005-05-12 |
EP1538748A3 (en) | 2009-02-11 |
EP1538748A2 (en) | 2005-06-08 |
JP2005150915A (ja) | 2005-06-09 |
KR20050045913A (ko) | 2005-05-17 |
JP3894917B2 (ja) | 2007-03-22 |
US7224101B2 (en) | 2007-05-29 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN100508380C (zh) | 弹性边界波装置及其制造方法 | |
US6046656A (en) | Elastic boundary wave device and method of its manufacture | |
US7213314B2 (en) | Method of forming a surface acoustic wave (SAW) filter device | |
US7331092B2 (en) | Method and manufacturing surface acoustic wave device | |
KR101069444B1 (ko) | 온도 계수가 개선된 saw 소자 | |
US8598968B2 (en) | Elastic wave element and electronic device using the same | |
JP5025963B2 (ja) | 電子部品とその製造方法及びこの電子部品を用いた電子機器 | |
WO2006120994A1 (ja) | 複合圧電基板 | |
US20220158080A1 (en) | Hybrid structure for a surface acoustic wave device | |
CN115225060A (zh) | 声表面波谐振装置及其形成方法 | |
JP4345329B2 (ja) | 弾性表面波デバイス | |
JPH10335974A (ja) | 弾性境界波素子 | |
EP1177623B1 (en) | Method of manufacturing a piezoeletric filter with an acoustic resonator situated on an acoustic reflector layer formed on a carrier substrate | |
JP4345328B2 (ja) | 弾性表面波デバイス及びその製造方法 | |
JP2022018424A (ja) | ウエハの製造方法、弾性波デバイスおよびその製造方法 | |
JPH1131942A (ja) | 弾性表面波モジュール素子及びその製造方法 | |
JP2005142902A (ja) | 弾性表面波素子用基板 | |
JP2002094355A (ja) | 表面弾性波素子及びその製造方法 | |
JP3132074B2 (ja) | ダイヤモンド弾性表面波素子 | |
JPH0590862A (ja) | 半導体複合素子およびその製造方法 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
ASS | Succession or assignment of patent right |
Owner name: TAIYO YUDEN CO., LTD. Free format text: FORMER OWNER: FUJITSU LTD. |
|
C41 | Transfer of patent application or patent right or utility model | ||
TR01 | Transfer of patent right |
Effective date of registration: 20100804 Address after: Kanagawa Co-patentee after: Taiyo Yuden Co., Ltd. Patentee after: Fujitsu Media Devices Ltd Address before: Kanagawa Co-patentee before: Fujitsu Ltd. Patentee before: Fujitsu Media Devices Ltd |
|
ASS | Succession or assignment of patent right |
Free format text: FORMER OWNER: TAIYO YUDEN CO., LTD. Owner name: TAIYO YUDEN CO., LTD. Free format text: FORMER OWNER: FUJITSU MEDIA DEVICES LTD Effective date: 20101201 |
|
C41 | Transfer of patent application or patent right or utility model | ||
COR | Change of bibliographic data |
Free format text: CORRECT: ADDRESS; FROM: KANAGAWA PREFECTURE, JAPAN TO: TOKYO, JAPAN |
|
TR01 | Transfer of patent right |
Effective date of registration: 20101201 Address after: Tokyo, Japan, Japan Patentee after: Taiyo Yuden Co., Ltd. Address before: Kanagawa Co-patentee before: Taiyo Yuden Co., Ltd. Patentee before: Fujitsu Media Devices Ltd |
|
C17 | Cessation of patent right | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20090701 Termination date: 20101112 |