ATE551777T1 - Elastische oberflächenwellenvorrichtung - Google Patents

Elastische oberflächenwellenvorrichtung

Info

Publication number
ATE551777T1
ATE551777T1 AT07740994T AT07740994T ATE551777T1 AT E551777 T1 ATE551777 T1 AT E551777T1 AT 07740994 T AT07740994 T AT 07740994T AT 07740994 T AT07740994 T AT 07740994T AT E551777 T1 ATE551777 T1 AT E551777T1
Authority
AT
Austria
Prior art keywords
electrode
silicon oxide
disposed
oxide film
surface acoustic
Prior art date
Application number
AT07740994T
Other languages
English (en)
Inventor
Kenji Nishiyama
Takeshi Nakao
Michio Kadota
Original Assignee
Murata Manufacturing Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co filed Critical Murata Manufacturing Co
Application granted granted Critical
Publication of ATE551777T1 publication Critical patent/ATE551777T1/de

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02543—Characteristics of substrate, e.g. cutting angles
    • H03H9/02559—Characteristics of substrate, e.g. cutting angles of lithium niobate or lithium-tantalate substrates

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
AT07740994T 2006-04-24 2007-04-04 Elastische oberflächenwellenvorrichtung ATE551777T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2006118949 2006-04-24
PCT/JP2007/057558 WO2007125734A1 (ja) 2006-04-24 2007-04-04 弾性表面波装置

Publications (1)

Publication Number Publication Date
ATE551777T1 true ATE551777T1 (de) 2012-04-15

Family

ID=38655269

Family Applications (1)

Application Number Title Priority Date Filing Date
AT07740994T ATE551777T1 (de) 2006-04-24 2007-04-04 Elastische oberflächenwellenvorrichtung

Country Status (6)

Country Link
US (1) US7569972B2 (de)
EP (1) EP2012428B1 (de)
JP (1) JP4636179B2 (de)
CN (1) CN101421922B (de)
AT (1) ATE551777T1 (de)
WO (1) WO2007125734A1 (de)

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4636178B2 (ja) * 2006-04-24 2011-02-23 株式会社村田製作所 弾性表面波装置
WO2009078089A1 (ja) * 2007-12-17 2009-06-25 Fujitsu Limited 弾性波素子、通信モジュール、および通信装置
JP2013145932A (ja) * 2010-05-07 2013-07-25 Murata Mfg Co Ltd 弾性表面波装置及びその製造方法
WO2012090873A1 (ja) * 2010-12-28 2012-07-05 京セラ株式会社 弾性波素子およびそれを用いた弾性波装置
CN103329437B (zh) * 2011-01-18 2016-03-16 株式会社村田制作所 弹性表面波滤波器装置
CN103314529A (zh) * 2011-01-24 2013-09-18 埃普科斯股份有限公司 表面声波滤波器
JP2012160979A (ja) * 2011-02-01 2012-08-23 Taiyo Yuden Co Ltd 弾性波デバイス及びその製造方法
JP2012169760A (ja) * 2011-02-10 2012-09-06 Murata Mfg Co Ltd 弾性表面波装置
JP5671713B2 (ja) * 2011-03-04 2015-02-18 スカイワークス・パナソニック フィルターソリューションズ ジャパン株式会社 弾性波デバイス
CN104868873A (zh) * 2015-05-27 2015-08-26 上海交通大学 一种多层复合结构声表面波器件基底
US10707905B2 (en) 2015-06-23 2020-07-07 Skyworks Solutions, Inc. Wideband multiplexer for radio-frequency applications
KR101989470B1 (ko) * 2015-07-06 2019-06-14 가부시키가이샤 무라타 세이사쿠쇼 탄성파 장치
WO2017068877A1 (ja) 2015-10-23 2017-04-27 株式会社村田製作所 弾性波装置、高周波フロントエンド回路及び通信装置
WO2017068838A1 (ja) * 2015-10-23 2017-04-27 株式会社村田製作所 弾性波フィルタ装置
KR102115177B1 (ko) * 2015-10-23 2020-05-26 가부시키가이샤 무라타 세이사쿠쇼 탄성파 장치
KR102280381B1 (ko) 2016-12-20 2021-07-22 가부시키가이샤 무라타 세이사쿠쇼 탄성파 장치, 고주파 프론트 엔드 회로 및 통신 장치
CN110521118B (zh) * 2017-04-17 2023-04-28 株式会社村田制作所 弹性波装置、高频前端电路以及通信装置
JP7080671B2 (ja) * 2018-02-27 2022-06-06 ＮＤＫ ＳＡＷ ｄｅｖｉｃｅｓ株式会社 弾性表面波デバイス
US11835414B2 (en) * 2018-12-05 2023-12-05 Murata Manufacturing Co., Ltd. Passive pressure sensor with a piezoelectric diaphragm and a non-piezoelectric substrate

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS568259Y2 (de) * 1976-10-18 1981-02-23
JPS5548572Y2 (de) * 1979-11-01 1980-11-13
JPS60124109A (ja) * 1983-12-09 1985-07-03 Clarion Co Ltd 表面弾性波素子
US5923231A (en) * 1994-08-05 1999-07-13 Kinseki Limited Surface acoustic wave device with an electrode insulating film and method for fabricating the same
US5815900A (en) * 1995-03-06 1998-10-06 Matsushita Electric Industrial Co., Ltd. Method of manufacturing a surface acoustic wave module
JP3470031B2 (ja) * 1997-12-22 2003-11-25 京セラ株式会社 弾性表面波装置の製造方法
JP3411908B2 (ja) * 1999-11-30 2003-06-03 ティーディーケイ株式会社 弾性表面波装置およびその製造方法
JP3885824B2 (ja) * 2003-10-03 2007-02-28 株式会社村田製作所 弾性表面波装置
JP3894917B2 (ja) * 2003-11-12 2007-03-22 富士通メディアデバイス株式会社 弾性境界波デバイス及びその製造方法
JP2005354430A (ja) * 2004-06-10 2005-12-22 Epson Toyocom Corp 弾性表面波変換器及びそれを用いた弾性表面波デバイス
KR100856217B1 (ko) * 2006-02-28 2008-09-03 후지쓰 메디아 데바이스 가부시키가이샤 탄성 경계파 소자, 공진기 및 필터
JP4636178B2 (ja) * 2006-04-24 2011-02-23 株式会社村田製作所 弾性表面波装置

Also Published As

Publication number Publication date
US20090009028A1 (en) 2009-01-08
JP4636179B2 (ja) 2011-02-23
EP2012428A4 (de) 2010-11-17
JPWO2007125734A1 (ja) 2009-09-10
CN101421922A (zh) 2009-04-29
WO2007125734A1 (ja) 2007-11-08
US7569972B2 (en) 2009-08-04
EP2012428B1 (de) 2012-03-28
EP2012428A1 (de) 2009-01-07
CN101421922B (zh) 2011-03-23

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