WO2009078089A1 - 弾性波素子、通信モジュール、および通信装置 - Google Patents

弾性波素子、通信モジュール、および通信装置 Download PDF

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Publication number
WO2009078089A1
WO2009078089A1 PCT/JP2007/074221 JP2007074221W WO2009078089A1 WO 2009078089 A1 WO2009078089 A1 WO 2009078089A1 JP 2007074221 W JP2007074221 W JP 2007074221W WO 2009078089 A1 WO2009078089 A1 WO 2009078089A1
Authority
WO
WIPO (PCT)
Prior art keywords
wave device
elastic wave
communication module
communication
communication apparatus
Prior art date
Application number
PCT/JP2007/074221
Other languages
English (en)
French (fr)
Inventor
Suguru Warashina
Takashi Matsuda
Shogo Inoue
Yoshio Satoh
Original Assignee
Fujitsu Limited
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Limited filed Critical Fujitsu Limited
Priority to CN200780100421XA priority Critical patent/CN101796724B/zh
Priority to KR1020107003558A priority patent/KR101087438B1/ko
Priority to PCT/JP2007/074221 priority patent/WO2009078089A1/ja
Priority to JP2009546103A priority patent/JP4943514B2/ja
Publication of WO2009078089A1 publication Critical patent/WO2009078089A1/ja
Priority to US12/711,753 priority patent/US7977848B2/en

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Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02543—Characteristics of substrate, e.g. cutting angles
    • H03H9/02574—Characteristics of substrate, e.g. cutting angles of combined substrates, multilayered substrates, piezoelectrical layers on not-piezoelectrical substrate
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/125—Driving means, e.g. electrodes, coils
    • H03H9/145—Driving means, e.g. electrodes, coils for networks using surface acoustic waves
    • H03H9/14538—Formation
    • H03H9/14541—Multilayer finger or busbar electrode
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/42—Piezoelectric device making

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)

Abstract

　本発明の弾性波素子は、圧電基板１４と、圧電基板１４上に形成された櫛歯型の電極１３と、電極１３を被覆するように形成されたＳｉＯ2膜１２とを備えた弾性波素子であって、ＳｉＯ2膜１２上に形成された変位調整膜１１を備え、変位調整膜１１は、ＳｉＯ2膜１２を形成する物質よりも音速が遅い物質で形成されたものである。この構成により、不要波を抑えることができるとともに、温度特性を向上させることができる。また、このような弾性波素子を通信モジュール及び通信装置に搭載することで、信頼性を向上させることができる。
PCT/JP2007/074221 2007-12-17 2007-12-17 弾性波素子、通信モジュール、および通信装置 WO2009078089A1 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
CN200780100421XA CN101796724B (zh) 2007-12-17 2007-12-17 弹性波元件、通信组件、以及通信装置
KR1020107003558A KR101087438B1 (ko) 2007-12-17 2007-12-17 탄성파 소자, 통신 모듈, 및 통신 장치
PCT/JP2007/074221 WO2009078089A1 (ja) 2007-12-17 2007-12-17 弾性波素子、通信モジュール、および通信装置
JP2009546103A JP4943514B2 (ja) 2007-12-17 2007-12-17 弾性波素子、通信モジュール、および通信装置
US12/711,753 US7977848B2 (en) 2007-12-17 2010-02-24 Planar surface acoustic wave device, communication module, and communication apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2007/074221 WO2009078089A1 (ja) 2007-12-17 2007-12-17 弾性波素子、通信モジュール、および通信装置

Related Child Applications (1)

Application Number Title Priority Date Filing Date
US12/711,753 Continuation US7977848B2 (en) 2007-12-17 2010-02-24 Planar surface acoustic wave device, communication module, and communication apparatus

Publications (1)

Publication Number Publication Date
WO2009078089A1 true WO2009078089A1 (ja) 2009-06-25

Family

ID=40795215

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2007/074221 WO2009078089A1 (ja) 2007-12-17 2007-12-17 弾性波素子、通信モジュール、および通信装置

Country Status (5)

Country Link
US (1) US7977848B2 (ja)
JP (1) JP4943514B2 (ja)
KR (1) KR101087438B1 (ja)
CN (1) CN101796724B (ja)
WO (1) WO2009078089A1 (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011130006A (ja) * 2009-12-15 2011-06-30 Taiyo Yuden Co Ltd 弾性波素子、通信モジュール、通信装置
WO2017187724A1 (ja) * 2016-04-27 2017-11-02 株式会社村田製作所 弾性波装置

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5041004B2 (ja) * 2007-10-23 2012-10-03 パナソニック株式会社 弾性境界波装置
JP6601503B2 (ja) * 2015-10-23 2019-11-06 株式会社村田製作所 弾性波装置、高周波フロントエンド回路及び通信装置
CN106098745B (zh) * 2016-06-21 2018-12-18 天津大学 一种内嵌双层膜的lnoi晶片及其制备方法
KR101953219B1 (ko) * 2016-11-24 2019-02-28 가부시키가이샤 무라타 세이사쿠쇼 탄성파 장치, 고주파 프론트 엔드 회로 및 통신 장치
KR102306240B1 (ko) * 2017-04-17 2021-09-30 가부시키가이샤 무라타 세이사쿠쇼 탄성파 장치, 고주파 프론트 엔드 회로 및 통신 장치
TWI780103B (zh) * 2017-05-02 2022-10-11 日商日本碍子股份有限公司 彈性波元件及其製造方法
CN107871813B (zh) * 2017-11-17 2020-08-11 中国电子科技集团公司第二十六研究所 一种温度补偿型声表面波器件的温度补偿层平坦化方法
CN109326709B (zh) * 2018-10-10 2022-05-13 业成科技（成都）有限公司 感测膜及其制备方法、电子装置
WO2020185543A1 (en) 2019-03-08 2020-09-17 Mevion Medical Systems, Inc. Collimator and energy degrader for a particle therapy system
KR102511788B1 (ko) 2021-03-05 2023-03-21 재단법인대구경북과학기술원 물질 계측 센서, 물질 계측 시스템 및 물질 계측 방법

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06291596A (ja) * 1992-07-08 1994-10-18 Matsushita Electric Ind Co Ltd 表面弾性波素子とその製造方法
JPH07254835A (ja) * 1994-03-15 1995-10-03 Murata Mfg Co Ltd 弾性表面波共振子フィルタ
WO2007125734A1 (ja) * 2006-04-24 2007-11-08 Murata Manufacturing Co., Ltd. 弾性表面波装置
WO2007138844A1 (ja) * 2006-05-30 2007-12-06 Murata Manufacturing Co., Ltd. 弾性波装置

Family Cites Families (11)

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JPS61136312U (ja) 1985-02-08 1986-08-25
JP3470031B2 (ja) 1997-12-22 2003-11-25 京セラ株式会社 弾性表面波装置の製造方法
WO2003088483A1 (fr) * 2002-04-15 2003-10-23 Matsushita Electric Industrial Co., Ltd. Dispositif a ondes acoustiques de surface, appareil de communication mobile et capteur mettant tous deux en oeuvre ledit dispositif
US7135805B2 (en) * 2003-04-08 2006-11-14 Nihon Dempa Kogyo Co., Ltd. Surface acoustic wave transducer
JP4337816B2 (ja) * 2003-04-18 2009-09-30 株式会社村田製作所 弾性境界波装置
US7816837B2 (en) * 2003-07-04 2010-10-19 Murata Manufacturing Co., Ltd. Surface acoustic wave sensor
JP3885824B2 (ja) 2003-10-03 2007-02-28 株式会社村田製作所 弾性表面波装置
JP4370882B2 (ja) 2003-11-11 2009-11-25 株式会社村田製作所 弾性表面波装置の周波数調整方法
JP2006238211A (ja) 2005-02-25 2006-09-07 Seiko Epson Corp 弾性表面波素子及びその製造方法
JP4636178B2 (ja) * 2006-04-24 2011-02-23 株式会社村田製作所 弾性表面波装置
JPWO2008102577A1 (ja) * 2007-02-19 2010-05-27 株式会社村田製作所 弾性表面波センサー装置

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06291596A (ja) * 1992-07-08 1994-10-18 Matsushita Electric Ind Co Ltd 表面弾性波素子とその製造方法
JPH07254835A (ja) * 1994-03-15 1995-10-03 Murata Mfg Co Ltd 弾性表面波共振子フィルタ
WO2007125734A1 (ja) * 2006-04-24 2007-11-08 Murata Manufacturing Co., Ltd. 弾性表面波装置
WO2007138844A1 (ja) * 2006-05-30 2007-12-06 Murata Manufacturing Co., Ltd. 弾性波装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011130006A (ja) * 2009-12-15 2011-06-30 Taiyo Yuden Co Ltd 弾性波素子、通信モジュール、通信装置
WO2017187724A1 (ja) * 2016-04-27 2017-11-02 株式会社村田製作所 弾性波装置

Also Published As

Publication number Publication date
CN101796724A (zh) 2010-08-04
US7977848B2 (en) 2011-07-12
JP4943514B2 (ja) 2012-05-30
JPWO2009078089A1 (ja) 2011-04-28
US20100148626A1 (en) 2010-06-17
CN101796724B (zh) 2013-06-19
KR101087438B1 (ko) 2011-11-25
KR20100041843A (ko) 2010-04-22

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