CN100452441C - 光传感器封装 - Google Patents
光传感器封装 Download PDFInfo
- Publication number
- CN100452441C CN100452441C CNB038246333A CN03824633A CN100452441C CN 100452441 C CN100452441 C CN 100452441C CN B038246333 A CNB038246333 A CN B038246333A CN 03824633 A CN03824633 A CN 03824633A CN 100452441 C CN100452441 C CN 100452441C
- Authority
- CN
- China
- Prior art keywords
- integrated circuit
- image sensor
- pad
- sensor devices
- effective coverage
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Classifications
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F99/00—Subject matter not provided for in other groups of this subclass
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the groups H01L21/18 - H01L21/326 or H10D48/04 - H10D48/07 e.g. sealing of a cap to a base of a container
- H01L21/56—Encapsulations, e.g. encapsulation layers, coatings
- H01L21/565—Moulds
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N23/00—Cameras or camera modules comprising electronic image sensors; Control thereof
- H04N23/50—Constructional details
- H04N23/54—Mounting of pick-up tubes, electronic image sensors, deviation or focusing coils
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
- H10F39/80—Constructional details of image sensors
- H10F39/804—Containers or encapsulations
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F77/00—Constructional details of devices covered by this subclass
- H10F77/50—Encapsulations or containers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/44—Structure, shape, material or disposition of the wire connectors prior to the connecting process
- H01L2224/45—Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
- H01L2224/45001—Core members of the connector
- H01L2224/4501—Shape
- H01L2224/45012—Cross-sectional shape
- H01L2224/45015—Cross-sectional shape being circular
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/44—Structure, shape, material or disposition of the wire connectors prior to the connecting process
- H01L2224/45—Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
- H01L2224/45001—Core members of the connector
- H01L2224/45099—Material
- H01L2224/451—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof
- H01L2224/45138—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof the principal constituent melting at a temperature of greater than or equal to 950°C and less than 1550°C
- H01L2224/45139—Silver (Ag) as principal constituent
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/44—Structure, shape, material or disposition of the wire connectors prior to the connecting process
- H01L2224/45—Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
- H01L2224/45001—Core members of the connector
- H01L2224/45099—Material
- H01L2224/451—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof
- H01L2224/45138—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof the principal constituent melting at a temperature of greater than or equal to 950°C and less than 1550°C
- H01L2224/45144—Gold (Au) as principal constituent
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/4805—Shape
- H01L2224/4809—Loop shape
- H01L2224/48091—Arched
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/00011—Not relevant to the scope of the group, the symbol of which is combined with the symbol of this group
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/181—Encapsulation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/30—Technical effects
- H01L2924/301—Electrical effects
- H01L2924/3025—Electromagnetic shielding
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
- H10F39/011—Manufacture or treatment of image sensors covered by group H10F39/12
- H10F39/024—Manufacture or treatment of image sensors covered by group H10F39/12 of coatings or optical elements
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
- H10F39/80—Constructional details of image sensors
- H10F39/805—Coatings
Landscapes
- Engineering & Computer Science (AREA)
- Multimedia (AREA)
- Signal Processing (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Solid State Image Pick-Up Elements (AREA)
- Transforming Light Signals Into Electric Signals (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US10/282,537 | 2002-10-29 | ||
| US10/282,537 US6667543B1 (en) | 2002-10-29 | 2002-10-29 | Optical sensor package |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1692501A CN1692501A (zh) | 2005-11-02 |
| CN100452441C true CN100452441C (zh) | 2009-01-14 |
Family
ID=29735714
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB038246333A Expired - Fee Related CN100452441C (zh) | 2002-10-29 | 2003-09-30 | 光传感器封装 |
Country Status (7)
| Country | Link |
|---|---|
| US (2) | US6667543B1 (enExample) |
| JP (1) | JP4705784B2 (enExample) |
| KR (1) | KR101031394B1 (enExample) |
| CN (1) | CN100452441C (enExample) |
| AU (1) | AU2003275308A1 (enExample) |
| TW (1) | TWI233685B (enExample) |
| WO (1) | WO2004040660A1 (enExample) |
Families Citing this family (65)
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| US7002241B1 (en) | 2003-02-12 | 2006-02-21 | National Semiconductor Corporation | Packaging of semiconductor device with a non-opaque cover |
| US20050009239A1 (en) * | 2003-07-07 | 2005-01-13 | Wolff Larry Lee | Optoelectronic packaging with embedded window |
| US20060003483A1 (en) * | 2003-07-07 | 2006-01-05 | Wolff Larry L | Optoelectronic packaging with embedded window |
| US6995462B2 (en) * | 2003-09-17 | 2006-02-07 | Micron Technology, Inc. | Image sensor packages |
| US7138707B1 (en) * | 2003-10-21 | 2006-11-21 | Amkor Technology, Inc. | Semiconductor package including leads and conductive posts for providing increased functionality |
| US6905910B1 (en) * | 2004-01-06 | 2005-06-14 | Freescale Semiconductor, Inc. | Method of packaging an optical sensor |
| US7098529B1 (en) * | 2004-01-07 | 2006-08-29 | Credence Systems Corporation | System and method for packaging a semiconductor device |
| KR100673950B1 (ko) * | 2004-02-20 | 2007-01-24 | 삼성테크윈 주식회사 | 이미지 센서 모듈과 이를 구비하는 카메라 모듈 패키지 |
| US7215018B2 (en) | 2004-04-13 | 2007-05-08 | Vertical Circuits, Inc. | Stacked die BGA or LGA component assembly |
| US7705432B2 (en) * | 2004-04-13 | 2010-04-27 | Vertical Circuits, Inc. | Three dimensional six surface conformal die coating |
| JP4055762B2 (ja) * | 2004-05-25 | 2008-03-05 | セイコーエプソン株式会社 | 電気光学装置の製造方法 |
| US20050266592A1 (en) * | 2004-05-28 | 2005-12-01 | Intersil Americas, Inc. | Method of fabricating an encapsulated chip and chip produced thereby |
| US20050266602A1 (en) * | 2004-05-28 | 2005-12-01 | Intersil Americas, Inc. | Encapsulated chip and method of fabrication thereof |
| TWI333249B (en) * | 2004-08-24 | 2010-11-11 | Himax Tech Inc | Sensor package |
| US20060197201A1 (en) * | 2005-02-23 | 2006-09-07 | Hsin Chung H | Image sensor structure |
| TW200707768A (en) * | 2005-08-15 | 2007-02-16 | Silicon Touch Tech Inc | Sensing apparatus capable of easily selecting the light-sensing curve |
| US7897920B2 (en) * | 2005-09-21 | 2011-03-01 | Analog Devices, Inc. | Radiation sensor device and method |
| TWI285417B (en) * | 2005-10-17 | 2007-08-11 | Taiwan Electronic Packaging Co | Image chip package structure and packaging method thereof |
| WO2007046102A2 (en) | 2005-10-19 | 2007-04-26 | Menni Menashe Zinger | Methods for the treatment of hyperhidrosis |
| JP4382030B2 (ja) * | 2005-11-15 | 2009-12-09 | 富士通マイクロエレクトロニクス株式会社 | 半導体装置及びその製造方法 |
| JP4779614B2 (ja) * | 2005-12-08 | 2011-09-28 | ヤマハ株式会社 | 半導体装置 |
| WO2008082565A1 (en) * | 2006-12-29 | 2008-07-10 | Tessera, Inc. | Microelectronic devices and methods of manufacturing such devices |
| US8723332B2 (en) * | 2007-06-11 | 2014-05-13 | Invensas Corporation | Electrically interconnected stacked die assemblies |
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| CN101740528B (zh) * | 2008-11-12 | 2011-12-28 | 力成科技股份有限公司 | 增进散热的无外引脚式半导体封装构造及其组合 |
| JP2010166021A (ja) * | 2008-12-18 | 2010-07-29 | Panasonic Corp | 半導体装置及びその製造方法 |
| CN102473697B (zh) * | 2009-06-26 | 2016-08-10 | 伊文萨思公司 | 曲折配置的堆叠裸片的电互连 |
| TWI520213B (zh) | 2009-10-27 | 2016-02-01 | 英維瑟斯公司 | 加成法製程之選擇性晶粒電絕緣 |
| TWI544604B (zh) | 2009-11-04 | 2016-08-01 | 英維瑟斯公司 | 具有降低應力電互連的堆疊晶粒總成 |
| US8742350B2 (en) | 2010-06-08 | 2014-06-03 | Avago Technologies General Ip (Singapore) Pte. Ltd. | Proximity sensor |
| US8492720B2 (en) | 2010-06-08 | 2013-07-23 | Avago Technologies General Ip (Singapore) Pte. Ltd. | Small low-profile optical proximity sensor |
| US8618620B2 (en) | 2010-07-13 | 2013-12-31 | Infineon Technologies Ag | Pressure sensor package systems and methods |
| US8743207B2 (en) | 2010-07-27 | 2014-06-03 | Flir Systems Inc. | Infrared camera architecture systems and methods |
| US20140175628A1 (en) * | 2012-12-21 | 2014-06-26 | Hua Pan | Copper wire bonding structure in semiconductor device and fabrication method thereof |
| CN205159286U (zh) | 2012-12-31 | 2016-04-13 | 菲力尔系统公司 | 用于微辐射热计真空封装组件的晶片级封装的装置 |
| US9159852B2 (en) | 2013-03-15 | 2015-10-13 | Taiwan Semiconductor Manufacturing Company, Ltd. | Image sensor device and method |
| US9368423B2 (en) | 2013-06-28 | 2016-06-14 | STATS ChipPAC Pte. Ltd. | Semiconductor device and method of using substrate with conductive posts and protective layers to form embedded sensor die package |
| CN103996687A (zh) * | 2014-06-12 | 2014-08-20 | 中国电子科技集团公司第四十四研究所 | 局部减薄背照式图像传感器结构及其封装工艺 |
| US9490195B1 (en) | 2015-07-17 | 2016-11-08 | Invensas Corporation | Wafer-level flipped die stacks with leadframes or metal foil interconnects |
| US9871019B2 (en) | 2015-07-17 | 2018-01-16 | Invensas Corporation | Flipped die stack assemblies with leadframe interconnects |
| US9825002B2 (en) | 2015-07-17 | 2017-11-21 | Invensas Corporation | Flipped die stack |
| WO2017049318A1 (en) | 2015-09-18 | 2017-03-23 | Synaptics Incorporated | Optical fingerprint sensor package |
| US9508691B1 (en) | 2015-12-16 | 2016-11-29 | Invensas Corporation | Flipped die stacks with multiple rows of leadframe interconnects |
| US10566310B2 (en) | 2016-04-11 | 2020-02-18 | Invensas Corporation | Microelectronic packages having stacked die and wire bond interconnects |
| US9595511B1 (en) | 2016-05-12 | 2017-03-14 | Invensas Corporation | Microelectronic packages and assemblies with improved flyby signaling operation |
| US9728524B1 (en) | 2016-06-30 | 2017-08-08 | Invensas Corporation | Enhanced density assembly having microelectronic packages mounted at substantial angle to board |
| IT201700030588A1 (it) | 2017-03-20 | 2018-09-20 | Federica Livieri | “composizione per uso nel trattamento dell'iperidrosi plantare predisponente alle micosi cutanee del piede” |
| EP3396329A1 (en) * | 2017-04-28 | 2018-10-31 | Sensirion AG | Sensor package |
| US10177074B1 (en) | 2017-10-04 | 2019-01-08 | Semiconductor Components Industries, Llc | Flexible semiconductor package |
| CN109346415B (zh) * | 2018-09-20 | 2020-04-28 | 江苏长电科技股份有限公司 | 封装结构选择性包封的封装方法及封装设备 |
| WO2020207830A1 (en) * | 2019-04-08 | 2020-10-15 | Ams Ag | Optical sensor including integrated diffuser |
| CN111584529A (zh) * | 2020-05-18 | 2020-08-25 | 甬矽电子(宁波)股份有限公司 | 传感器封装结构及封装方法 |
| US11584638B2 (en) * | 2020-07-30 | 2023-02-21 | Invensense, Inc. | Reducing delamination in sensor package |
| US11747273B2 (en) * | 2020-09-28 | 2023-09-05 | Asahi Kasei Microdevices Corporation | Gas sensor |
| US20220173256A1 (en) * | 2020-12-02 | 2022-06-02 | Texas Instruments Incorporated | Optical sensor packages with glass members |
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| JPS5940566A (ja) * | 1982-08-30 | 1984-03-06 | Canon Inc | カラ−固体撮像装置の製造方法 |
| JPS61207062A (ja) * | 1985-03-12 | 1986-09-13 | Seiko Epson Corp | 固体撮像装置 |
| JPS6269674A (ja) * | 1985-09-24 | 1987-03-30 | Mitsubishi Electric Corp | 固体撮像素子およびその製造方法 |
| US4957882A (en) * | 1988-11-25 | 1990-09-18 | Mitsubishi Denki Kabushiki Kaisha | Method for manufacturing semiconductor device |
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| JPH0724287B2 (ja) * | 1987-02-12 | 1995-03-15 | 三菱電機株式会社 | 光透過用窓を有する半導体装置とその製造方法 |
| US5264393A (en) * | 1988-11-25 | 1993-11-23 | Fuji Photo Film Co., Ltd. | Solid state image pickup device and method of manufacturing the same |
| JPH065828A (ja) * | 1992-06-16 | 1994-01-14 | Sony Corp | 超小型ccdモジュール |
| JPH1197656A (ja) | 1997-09-22 | 1999-04-09 | Fuji Electric Co Ltd | 半導体光センサデバイス |
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| US6384472B1 (en) | 2000-03-24 | 2002-05-07 | Siliconware Precision Industries Co., Ltd | Leadless image sensor package structure and method for making the same |
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| JP3725012B2 (ja) * | 2000-08-17 | 2005-12-07 | シャープ株式会社 | レンズ一体型固体撮像装置の製造方法 |
| US6342406B1 (en) | 2000-11-15 | 2002-01-29 | Amkor Technology, Inc. | Flip chip on glass image sensor package fabrication method |
| JP3078617U (ja) * | 2000-12-27 | 2001-07-10 | 汎太半導體股▲ふん▼有限公司 | イメージicパッケージング構造 |
| JP4637380B2 (ja) * | 2001-02-08 | 2011-02-23 | ルネサスエレクトロニクス株式会社 | 半導体装置 |
| US6661083B2 (en) * | 2001-02-27 | 2003-12-09 | Chippac, Inc | Plastic semiconductor package |
| JP2002270803A (ja) * | 2001-03-14 | 2002-09-20 | Ricoh Co Ltd | 固体撮像装置、画像読取ユニット及び画像形成装置 |
-
2002
- 2002-10-29 US US10/282,537 patent/US6667543B1/en not_active Expired - Lifetime
-
2003
- 2003-09-30 CN CNB038246333A patent/CN100452441C/zh not_active Expired - Fee Related
- 2003-09-30 WO PCT/US2003/030866 patent/WO2004040660A1/en not_active Ceased
- 2003-09-30 KR KR1020057007422A patent/KR101031394B1/ko not_active Expired - Fee Related
- 2003-09-30 AU AU2003275308A patent/AU2003275308A1/en not_active Abandoned
- 2003-09-30 JP JP2004548338A patent/JP4705784B2/ja not_active Expired - Fee Related
- 2003-10-14 US US10/688,228 patent/US6958261B2/en not_active Expired - Lifetime
- 2003-10-21 TW TW092129160A patent/TWI233685B/zh not_active IP Right Cessation
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5940566A (ja) * | 1982-08-30 | 1984-03-06 | Canon Inc | カラ−固体撮像装置の製造方法 |
| JPS61207062A (ja) * | 1985-03-12 | 1986-09-13 | Seiko Epson Corp | 固体撮像装置 |
| JPS6269674A (ja) * | 1985-09-24 | 1987-03-30 | Mitsubishi Electric Corp | 固体撮像素子およびその製造方法 |
| US4957882A (en) * | 1988-11-25 | 1990-09-18 | Mitsubishi Denki Kabushiki Kaisha | Method for manufacturing semiconductor device |
Also Published As
| Publication number | Publication date |
|---|---|
| JP4705784B2 (ja) | 2011-06-22 |
| TW200414476A (en) | 2004-08-01 |
| TWI233685B (en) | 2005-06-01 |
| JP2006505126A (ja) | 2006-02-09 |
| US6958261B2 (en) | 2005-10-25 |
| AU2003275308A1 (en) | 2004-05-25 |
| KR101031394B1 (ko) | 2011-04-26 |
| KR20050071637A (ko) | 2005-07-07 |
| WO2004040660A1 (en) | 2004-05-13 |
| CN1692501A (zh) | 2005-11-02 |
| US20040080029A1 (en) | 2004-04-29 |
| US6667543B1 (en) | 2003-12-23 |
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