CN100378944C - 基板保持用具、基板处理装置、基板检查装置及使用方法 - Google Patents

基板保持用具、基板处理装置、基板检查装置及使用方法 Download PDF

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Publication number
CN100378944C
CN100378944C CNB2004100382055A CN200410038205A CN100378944C CN 100378944 C CN100378944 C CN 100378944C CN B2004100382055 A CNB2004100382055 A CN B2004100382055A CN 200410038205 A CN200410038205 A CN 200410038205A CN 100378944 C CN100378944 C CN 100378944C
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CN
China
Prior art keywords
substrate
described substrate
fluid layer
butt
base board
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CNB2004100382055A
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English (en)
Chinese (zh)
Other versions
CN1551327A (zh
Inventor
大田黑竜
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hoya Corp
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Hoya Corp
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Publication date
Application filed by Hoya Corp filed Critical Hoya Corp
Publication of CN1551327A publication Critical patent/CN1551327A/zh
Application granted granted Critical
Publication of CN100378944C publication Critical patent/CN100378944C/zh
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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    • A—HUMAN NECESSITIES
    • A41—WEARING APPAREL
    • A41B—SHIRTS; UNDERWEAR; BABY LINEN; HANDKERCHIEFS
    • A41B9/00—Undergarments
    • A41B9/001—Underpants or briefs
    • A—HUMAN NECESSITIES
    • A41—WEARING APPAREL
    • A41B—SHIRTS; UNDERWEAR; BABY LINEN; HANDKERCHIEFS
    • A41B2400/00—Functions or special features of shirts, underwear, baby linen or handkerchiefs not provided for in other groups of this subclass
    • A41B2400/38—Shaping the contour of the body or adjusting the figure
    • A—HUMAN NECESSITIES
    • A41—WEARING APPAREL
    • A41B—SHIRTS; UNDERWEAR; BABY LINEN; HANDKERCHIEFS
    • A41B2400/00—Functions or special features of shirts, underwear, baby linen or handkerchiefs not provided for in other groups of this subclass
    • A41B2400/44—Donning facilities
    • A—HUMAN NECESSITIES
    • A41—WEARING APPAREL
    • A41B—SHIRTS; UNDERWEAR; BABY LINEN; HANDKERCHIEFS
    • A41B2400/00—Functions or special features of shirts, underwear, baby linen or handkerchiefs not provided for in other groups of this subclass
    • A41B2400/60—Moisture handling or wicking function
    • A—HUMAN NECESSITIES
    • A41—WEARING APPAREL
    • A41B—SHIRTS; UNDERWEAR; BABY LINEN; HANDKERCHIEFS
    • A41B2500/00—Materials for shirts, underwear, baby linen or handkerchiefs not provided for in other groups of this subclass

Landscapes

  • Engineering & Computer Science (AREA)
  • Textile Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Jigs For Machine Tools (AREA)
CNB2004100382055A 2003-05-14 2004-05-13 基板保持用具、基板处理装置、基板检查装置及使用方法 Expired - Fee Related CN100378944C (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2003136427A JP4268447B2 (ja) 2003-05-14 2003-05-14 基板保持具、基板処理装置、基板検査装置及びこれらの使用方法
JP136427/2003 2003-05-14

Publications (2)

Publication Number Publication Date
CN1551327A CN1551327A (zh) 2004-12-01
CN100378944C true CN100378944C (zh) 2008-04-02

Family

ID=33526396

Family Applications (1)

Application Number Title Priority Date Filing Date
CNB2004100382055A Expired - Fee Related CN100378944C (zh) 2003-05-14 2004-05-13 基板保持用具、基板处理装置、基板检查装置及使用方法

Country Status (4)

Country Link
JP (1) JP4268447B2 (ja)
KR (1) KR100809648B1 (ja)
CN (1) CN100378944C (ja)
TW (1) TWI242634B (ja)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100830053B1 (ko) * 2007-03-29 2008-05-16 주식회사 피앤드엠 비접촉식 기판 반송용 척
KR100849084B1 (ko) * 2007-05-22 2008-07-30 위아무역주식회사 러빙 스테이지 상의 글라스기판 정렬장치
JP2010040788A (ja) * 2008-08-05 2010-02-18 Olympus Corp リフト装置、及び、基板検査装置
CN102014361B (zh) 2009-09-07 2014-02-19 华为技术有限公司 一种认证授权计费会话更新方法、装置和系统
KR101190967B1 (ko) 2009-12-22 2012-10-12 크루셜엠스 주식회사 휴대폰 케이스용 양면테이프 자동화 연속 공급 및 부착시스템
CN202257028U (zh) * 2011-09-13 2012-05-30 深圳市华星光电技术有限公司 Lcd曝光平台装置及曝光系统
KR101412114B1 (ko) 2012-11-20 2014-06-26 리노정밀(주) 검사 장치
KR101716803B1 (ko) 2014-12-18 2017-03-15 이채갑 프로브 장치
JP6018659B2 (ja) * 2015-02-27 2016-11-02 株式会社日本製鋼所 雰囲気形成装置および浮上搬送方法
JP6874314B2 (ja) * 2016-09-30 2021-05-19 株式会社ニコン 物体保持装置、露光装置、フラットパネルディスプレイの製造方法、及びデバイス製造方法
CN108766901B (zh) * 2018-06-26 2020-07-31 上海华力微电子有限公司 检测晶圆工作台平坦度的方法
KR20210040684A (ko) * 2019-10-04 2021-04-14 (주)포인트엔지니어링 마이크로 led 디스플레이 제조장치 및 마이크로 led 디스플레이 제조방법
KR102378017B1 (ko) 2020-06-19 2022-03-25 리노정밀(주) 커넥터 지그 및 이러한 커넥터 지그의 도선 접속 장치 및 접속 방법
KR20220086749A (ko) 2020-12-16 2022-06-24 리노정밀(주) 검사가 용이한 기판 검사 장치

Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6325916A (ja) * 1986-07-17 1988-02-03 Sharp Corp 気相成長装置
JPH028121A (ja) * 1988-06-22 1990-01-11 Hitachi Electron Eng Co Ltd ウエハ搬送装置
JPH05299492A (ja) * 1992-04-17 1993-11-12 Nachi Fujikoshi Corp ウエハの位置決め装置
JPH0620904A (ja) * 1992-07-03 1994-01-28 Seiko Epson Corp 座標測定装置
JPH07124837A (ja) * 1993-10-29 1995-05-16 Nachi Fujikoshi Corp 板ガラスの位置決め方法及び装置
JPH0846017A (ja) * 1994-07-29 1996-02-16 Sony Corp 基板の位置決め装置および位置決め方法
JPH0961111A (ja) * 1995-08-28 1997-03-07 Nikon Corp パターン座標測定方法および装置
JP2000216208A (ja) * 1999-01-20 2000-08-04 Hitachi Ltd 外観検査方法および装置ならびに半導体装置の製造方法
JP2000232148A (ja) * 1999-02-10 2000-08-22 Tabai Espec Corp 平板状ワークの位置決め装置

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06340333A (ja) * 1993-05-31 1994-12-13 Hitachi Ltd 気流搬送装置
JP3691146B2 (ja) * 1996-02-06 2005-08-31 東芝機械株式会社 Ｘｙステージ及び平板状の被検査物の検査方法
JPH11165868A (ja) * 1997-12-06 1999-06-22 Horiba Ltd 板状部材保持装置
JP2000062951A (ja) * 1998-08-19 2000-02-29 Daiichi Shisetsu Kogyo Kk 搬送装置
TWI368757B (en) * 2003-04-30 2012-07-21 Olympus Corp Device for floating a substrate

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6325916A (ja) * 1986-07-17 1988-02-03 Sharp Corp 気相成長装置
JPH028121A (ja) * 1988-06-22 1990-01-11 Hitachi Electron Eng Co Ltd ウエハ搬送装置
JPH05299492A (ja) * 1992-04-17 1993-11-12 Nachi Fujikoshi Corp ウエハの位置決め装置
JPH0620904A (ja) * 1992-07-03 1994-01-28 Seiko Epson Corp 座標測定装置
JPH07124837A (ja) * 1993-10-29 1995-05-16 Nachi Fujikoshi Corp 板ガラスの位置決め方法及び装置
JPH0846017A (ja) * 1994-07-29 1996-02-16 Sony Corp 基板の位置決め装置および位置決め方法
JPH0961111A (ja) * 1995-08-28 1997-03-07 Nikon Corp パターン座標測定方法および装置
JP2000216208A (ja) * 1999-01-20 2000-08-04 Hitachi Ltd 外観検査方法および装置ならびに半導体装置の製造方法
JP2000232148A (ja) * 1999-02-10 2000-08-22 Tabai Espec Corp 平板状ワークの位置決め装置

Also Published As

Publication number Publication date
KR20040098586A (ko) 2004-11-20
TWI242634B (en) 2005-11-01
JP2004342771A (ja) 2004-12-02
CN1551327A (zh) 2004-12-01
TW200506315A (en) 2005-02-16
JP4268447B2 (ja) 2009-05-27
KR100809648B1 (ko) 2008-03-05

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C06 Publication
PB01 Publication
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SE01 Entry into force of request for substantive examination
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CP02 Change in the address of a patent holder

Address after: Japan Tokyo 160-8347 Shinjuku Shinjuku six chome 10 No. 1

Patentee after: HOYA Corporation

Address before: Tokyo, Japan

Patentee before: HOYA Corporation

CF01 Termination of patent right due to non-payment of annual fee
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20080402

Termination date: 20170513