AU748969B2 - A method of producing a detector belonging to a gas sensor, and a detector produced in accordance with the method - Google Patents

A method of producing a detector belonging to a gas sensor, and a detector produced in accordance with the method Download PDF

Info

Publication number
AU748969B2
AU748969B2 AU26493/99A AU2649399A AU748969B2 AU 748969 B2 AU748969 B2 AU 748969B2 AU 26493/99 A AU26493/99 A AU 26493/99A AU 2649399 A AU2649399 A AU 2649399A AU 748969 B2 AU748969 B2 AU 748969B2
Authority
AU
Australia
Prior art keywords
detector
conductive
ridges
metal
ridge
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
AU26493/99A
Other languages
English (en)
Other versions
AU2649399A (en
Inventor
Hans Goran Evald Martin
Per Ove Ohman
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Publication of AU2649399A publication Critical patent/AU2649399A/en
Application granted granted Critical
Publication of AU748969B2 publication Critical patent/AU748969B2/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00436—Shaping materials, i.e. techniques for structuring the substrate or the layers on the substrate
    • B81C1/00444—Surface micromachining, i.e. structuring layers on the substrate
    • B81C1/0046—Surface micromachining, i.e. structuring layers on the substrate using stamping, e.g. imprinting
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/10—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
    • G01J5/12—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors using thermoelectric elements, e.g. thermocouples
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
    • G01N21/3504—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light for analysing gases, e.g. multi-gas analysis
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/36—Mechanical coupling means
    • G02B6/3628—Mechanical coupling means for mounting fibres to supporting carriers
    • G02B6/3684—Mechanical coupling means for mounting fibres to supporting carriers characterised by the manufacturing process of surface profiling of the supporting carrier
    • G02B6/3696—Mechanical coupling means for mounting fibres to supporting carriers characterised by the manufacturing process of surface profiling of the supporting carrier by moulding, e.g. injection moulding, casting, embossing, stamping, stenciling, printing, or with metallic mould insert manufacturing using LIGA or MIGA techniques
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4201—Packages, e.g. shape, construction, internal or external details
    • G02B6/4219—Mechanical fixtures for holding or positioning the elements relative to each other in the couplings; Alignment methods for the elements, e.g. measuring or observing methods especially used therefor
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N10/00—Thermoelectric devices comprising a junction of dissimilar materials, i.e. devices exhibiting Seebeck or Peltier effects
    • H10N10/01—Manufacture or treatment
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N10/00—Thermoelectric devices comprising a junction of dissimilar materials, i.e. devices exhibiting Seebeck or Peltier effects
    • H10N10/80—Constructional details
    • H10N10/81—Structural details of the junction
    • H10N10/817—Structural details of the junction the junction being non-separable, e.g. being cemented, sintered or soldered
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W99/00—Subject matter not provided for in other groups of this subclass
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/02—Sensors
    • B81B2201/0214—Biosensors; Chemical sensors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/01—Suspended structures, i.e. structures allowing a movement
    • B81B2203/0136—Comb structures
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C2201/00—Manufacture or treatment of microstructural devices or systems
    • B81C2201/03—Processes for manufacturing substrate-free structures
    • B81C2201/034—Moulding
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/36—Mechanical coupling means
    • G02B6/3628—Mechanical coupling means for mounting fibres to supporting carriers
    • G02B6/3648—Supporting carriers of a microbench type, i.e. with micromachined additional mechanical structures
    • G02B6/3652—Supporting carriers of a microbench type, i.e. with micromachined additional mechanical structures the additional structures being prepositioning mounting areas, allowing only movement in one dimension, e.g. grooves, trenches or vias in the microbench surface, i.e. self aligning supporting carriers
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4201—Packages, e.g. shape, construction, internal or external details
    • G02B6/4219—Mechanical fixtures for holding or positioning the elements relative to each other in the couplings; Alignment methods for the elements, e.g. measuring or observing methods especially used therefor
    • G02B6/4228—Passive alignment, i.e. without a detection of the degree of coupling or the position of the elements
    • G02B6/423—Passive alignment, i.e. without a detection of the degree of coupling or the position of the elements using guiding surfaces for the alignment
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4201—Packages, e.g. shape, construction, internal or external details
    • G02B6/4246—Bidirectionally operating package structures

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Engineering & Computer Science (AREA)
  • Optics & Photonics (AREA)
  • Manufacturing & Machinery (AREA)
  • Analytical Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Micromachines (AREA)
  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
  • Optical Measuring Cells (AREA)
  • Optical Couplings Of Light Guides (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
  • Transition And Organic Metals Composition Catalysts For Addition Polymerization (AREA)
AU26493/99A 1998-02-17 1999-02-04 A method of producing a detector belonging to a gas sensor, and a detector produced in accordance with the method Ceased AU748969B2 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
SE9800462A SE521415C2 (sv) 1998-02-17 1998-02-17 Metod för att framställa en gassensortillhörig detektor, samt en detektor framställd enligt metoden
SE9800462 1998-02-17
PCT/SE1999/000145 WO1999041592A1 (en) 1998-02-17 1999-02-04 A method of producing a detector belonging to a gas sensor, and a detector produced in accordance with the method

Publications (2)

Publication Number Publication Date
AU2649399A AU2649399A (en) 1999-08-30
AU748969B2 true AU748969B2 (en) 2002-06-13

Family

ID=20410206

Family Applications (2)

Application Number Title Priority Date Filing Date
AU26493/99A Ceased AU748969B2 (en) 1998-02-17 1999-02-04 A method of producing a detector belonging to a gas sensor, and a detector produced in accordance with the method
AU26494/99A Abandoned AU2649499A (en) 1998-02-17 1999-02-04 A method of component manufacture

Family Applications After (1)

Application Number Title Priority Date Filing Date
AU26494/99A Abandoned AU2649499A (en) 1998-02-17 1999-02-04 A method of component manufacture

Country Status (10)

Country Link
US (1) US6372542B1 (https=)
EP (2) EP1057006B1 (https=)
JP (2) JP2002503556A (https=)
CN (1) CN1174237C (https=)
AT (1) ATE497156T1 (https=)
AU (2) AU748969B2 (https=)
CA (2) CA2320920A1 (https=)
DE (1) DE69943160D1 (https=)
SE (1) SE521415C2 (https=)
WO (2) WO1999041592A1 (https=)

Families Citing this family (36)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6911349B2 (en) * 2001-02-16 2005-06-28 Boxer Cross Inc. Evaluating sidewall coverage in a semiconductor wafer
EP2359689B1 (en) * 2002-09-27 2015-08-26 The General Hospital Corporation Microfluidic device for cell separation and use thereof
SE526006C2 (sv) * 2003-04-29 2005-06-14 Senseair Ab Behandlat tunnfilmssubstrat
WO2005057188A1 (en) * 2003-12-12 2005-06-23 Elt Inc. Gas sensor
KR100494103B1 (ko) * 2003-12-12 2005-06-10 (주)이엘티 광학적 가스 센서
US20090284745A1 (en) * 2004-10-18 2009-11-19 Seung-Hwan Yi Gas cell using two parabolic concave mirrors and method of producing gas sensor using the same
EP1874920A4 (en) * 2005-04-05 2009-11-04 Cellpoint Diagnostics DEVICES AND METHOD FOR ENRICHING AND CHANGING CIRCULATING TUMOR CELLS AND OTHER PARTICLES
JP2008543105A (ja) * 2005-06-06 2008-11-27 エヌエックスピー ビー ヴィ クロスバー回路装置の製造方法
US8921102B2 (en) 2005-07-29 2014-12-30 Gpb Scientific, Llc Devices and methods for enrichment and alteration of circulating tumor cells and other particles
SE0802069A1 (sv) 2008-09-30 2010-03-31 Senseair Ab Ett för en spektralanalys av höga gaskoncentrationer anpassat arrangemang
CA2832494C (en) 2011-04-06 2019-11-26 Ortho-Clinical Diagnostics, Inc. Assay device having rhombus-shaped projections
EP2726870B1 (en) 2011-06-29 2018-10-03 Academia Sinica The capture, purification and release of biological substance using a surface coating
US20130210036A1 (en) 2012-01-20 2013-08-15 Ortho-Clinical Diagnostics, Inc. Controlling Fluid Flow Through An Assay Device
WO2013109821A1 (en) 2012-01-20 2013-07-25 Ortho-Clinical Diagnostics, Inc. Assay device having multiplexing
KR20130085991A (ko) 2012-01-20 2013-07-30 오르토-클리니칼 다이아그노스틱스, 인코포레이티드 코너 주위의 균일한 유동을 갖는 분석 장치
BR102013001395A2 (pt) 2012-01-20 2015-11-17 Ortho Clinical Diagnostics Inc dispositivo de ensaio tendo múltiplas células de reagentes
BR102013001324A2 (pt) 2012-01-20 2015-07-28 Ortho Clinical Diagnostics Inc Dispositivo de ensaio tendo tamanho de amostra controlável e método para controlar o tamanho da amostra em um dispositivo de ensaio
DE102012203792A1 (de) * 2012-03-12 2013-09-12 Siemens Aktiengesellschaft Infrarotsensor, Wärmebildkamera und Verfahren zum Herstellen einer Mikrostruktur aus thermoelektrischen Sensorstäben
KR101358245B1 (ko) 2012-03-19 2014-02-07 연세대학교 산학협력단 수소 센서 및 수소 센서 제조 방법
CA2818332C (en) 2012-06-12 2021-07-20 Ortho-Clinical Diagnostics, Inc. Lateral flow assay devices for use in clinical diagnostic apparatus and configuration of clinical diagnostic apparatus for same
JP6328655B2 (ja) 2012-11-15 2018-05-23 オーソ・クリニカル・ダイアグノスティックス・インコーポレーテッド 反応時間を使用してアッセイを較正すること
JP6359263B2 (ja) 2012-11-15 2018-07-18 オーソ・クリニカル・ダイアグノスティックス・インコーポレーテッド 流れモニタリングに基づく、側方流動アッセイ装置の品質／プロセス制御
CA2841692C (en) 2013-02-12 2023-08-22 Zhong Ding Reagent zone deposition pattern
EP2777499B1 (en) 2013-03-15 2015-09-16 Ortho-Clinical Diagnostics Inc Rotatable fluid sample collection device
EP2778679B1 (en) 2013-03-15 2017-09-27 Ortho-Clinical Diagnostics, Inc. Rotable disk-shaped fluid sample collection device
DE102013218840A1 (de) * 2013-09-19 2015-03-19 Robert Bosch Gmbh Mikroheizplattenvorrichtung und Sensor mit einer Mikroheizplattenvorrichtung
EP3077806B1 (en) 2013-12-06 2019-09-11 Ortho Clinical Diagnostics, Inc. Assay device having a wash port
TW201623605A (zh) 2014-04-01 2016-07-01 中央研究院 用於癌症診斷及預後之方法及系統
US10031085B2 (en) 2014-07-24 2018-07-24 Ortho-Clinical Diagnostics, Inc. Point of care analytical processing system
US10073091B2 (en) 2014-08-08 2018-09-11 Ortho-Clinical Diagnostics, Inc. Lateral flow assay device
US11033896B2 (en) 2014-08-08 2021-06-15 Ortho-Clinical Diagnostics, Inc. Lateral-flow assay device with filtration flow control
US10071373B2 (en) 2014-08-08 2018-09-11 Ortho-Clinical Diagnostics, Inc. Lateral-flow assay device having flow constrictions
US10112198B2 (en) 2014-08-26 2018-10-30 Academia Sinica Collector architecture layout design
EP3298403A1 (en) 2015-05-19 2018-03-28 Ortho-Clinical Diagnostics Inc Method of improving liquid sample flow in assay device
US10107726B2 (en) 2016-03-16 2018-10-23 Cellmax, Ltd. Collection of suspended cells using a transferable membrane
DE102017217120A1 (de) * 2017-09-26 2019-03-28 Mahle International Gmbh Verfahren zum Beschichten von Substraten mit thermoelektrisch aktivem Material

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4110653A1 (de) * 1990-07-12 1992-01-23 Landis & Gyr Betriebs Ag Thermoelektrischer wandler und verfahren zu dessen herstellung

Family Cites Families (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB849983A (en) * 1956-08-18 1960-09-28 Hartmann & Braun Ag Method and apparatus for the analysis by radiation of mixtures of gases and/or vapours
IL45788A (en) * 1974-10-04 1977-11-30 Yeda Res & Dev Thermoelectric detector
US4772790A (en) * 1986-10-14 1988-09-20 Teledyne Industries, Inc. Non-dispersive optical gas analyzer
JP3160940B2 (ja) * 1991-05-17 2001-04-25 株式会社村田製作所 サーモパイル
US5716218A (en) * 1991-06-04 1998-02-10 Micron Technology, Inc. Process for manufacturing an interconnect for testing a semiconductor die
JPH054232A (ja) * 1991-06-25 1993-01-14 Tohoku Nakatani:Kk 金型製造法
JPH0512722A (ja) * 1991-07-05 1993-01-22 Tohoku Nakatani:Kk スタンパー製造方法
JPH0614936U (ja) * 1991-10-29 1994-02-25 日本セラミック株式会社 焦電型赤外線センサ及びその電極の製造方法
US5268782A (en) * 1992-01-16 1993-12-07 Minnesota Mining And Manufacturing Company Micro-ridged, polymeric liquid crystal display substrate and display device
GB9209912D0 (en) * 1992-05-08 1992-06-24 Winslow Int Ltd Mounting arrangement for an intergrated circuit chip carrier
JP3245308B2 (ja) * 1994-08-26 2002-01-15 日本碍子株式会社 半導体装置の製造方法
JPH08225929A (ja) * 1995-02-23 1996-09-03 Matsushita Electric Ind Co Ltd レーザ・アブレーションを用いた薄膜形成法およびレーザ・アブレーション装置
JPH08306080A (ja) * 1995-04-28 1996-11-22 Sony Corp 情報記録媒体及びその成形型
JPH08306978A (ja) * 1995-05-10 1996-11-22 Hitachi Cable Ltd 酸化物薄膜の製造方法および装置
JPH0936440A (ja) * 1995-07-21 1997-02-07 Osaka Gas Co Ltd 熱電材料の作製方法
JPH09175835A (ja) * 1995-12-25 1997-07-08 Toyota Motor Corp 表面加工方法
JP2955224B2 (ja) * 1995-12-28 1999-10-04 花王株式会社 光ディスク用基板の製造方法
JPH09184803A (ja) * 1995-12-29 1997-07-15 Horiba Ltd 赤外線ガス分析計
JPH09229858A (ja) * 1996-02-20 1997-09-05 Horiba Ltd 赤外線ガス分析計
JP3376203B2 (ja) * 1996-02-28 2003-02-10 株式会社東芝 半導体装置とその製造方法及びこの半導体装置を用いた実装構造体とその製造方法
JP3716504B2 (ja) * 1996-08-05 2005-11-16 富士ゼロックス株式会社 微小構造体の製造方法および装置
GB9616809D0 (en) * 1996-08-10 1996-09-25 Eev Ltd Gas monitors
US5894108A (en) * 1997-02-11 1999-04-13 National Semiconductor Corporation Plastic package with exposed die
KR100279293B1 (ko) * 1998-09-18 2001-03-02 윤종용 마이크로 볼 그리드 어레이 패키지에 의해서 포장되는 반도체장치
KR100338983B1 (ko) * 1998-11-30 2002-07-18 윤종용 웨이퍼분리도구및이를이용하는웨이퍼분리방법
FR2787241B1 (fr) * 1998-12-14 2003-01-31 Ela Medical Sa Composant microelectronique cms enrobe, notamment pour un dispositif medical implantable actif, et son procede de fabrication
US6271048B1 (en) * 2000-10-20 2001-08-07 Unisys Corporation Process for recycling a substrate from an integrated circuit package

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4110653A1 (de) * 1990-07-12 1992-01-23 Landis & Gyr Betriebs Ag Thermoelektrischer wandler und verfahren zu dessen herstellung

Also Published As

Publication number Publication date
US6372542B1 (en) 2002-04-16
SE521415C2 (sv) 2003-10-28
EP1057006A1 (en) 2000-12-06
WO1999041772A2 (en) 1999-08-19
SE9800462D0 (sv) 1998-02-17
CN1297530A (zh) 2001-05-30
CA2320920A1 (en) 1999-08-19
AU2649499A (en) 1999-08-30
CA2320919A1 (en) 1999-08-19
CN1174237C (zh) 2004-11-03
WO1999041592A1 (en) 1999-08-19
WO1999041772A3 (en) 1999-11-04
EP1057213A2 (en) 2000-12-06
DE69943160D1 (de) 2011-03-10
ATE497156T1 (de) 2011-02-15
JP4401021B2 (ja) 2010-01-20
EP1057006B1 (en) 2011-01-26
JP2002503806A (ja) 2002-02-05
AU2649399A (en) 1999-08-30
JP2002503556A (ja) 2002-02-05
SE9800462L (sv) 1999-08-18

Similar Documents

Publication Publication Date Title
AU748969B2 (en) A method of producing a detector belonging to a gas sensor, and a detector produced in accordance with the method
US8304850B2 (en) Integrated infrared sensors with optical elements, and methods
US9995628B1 (en) Fiber-optic temperature and flow sensor system and methods
JPS6140154B2 (https=)
US5831266A (en) Microbridge structure for emitting or detecting radiations and method for forming such microbridge structure
US10520355B1 (en) Fiber-optic temperature and flow sensor system and methods
EP0003271A1 (fr) Fluxmètre thermique
US10359316B1 (en) Fiber optic bolometer
EP1512114B1 (fr) Procede de fabrication de capteur d'empreinte digitale et capteur correspondant
Song et al. A polymer waveguide grating sensor integrated with a thin-film photodetector
KR20180133333A (ko) 전자기 방사선용 스펙트럼 변환 소자
ATE73931T1 (de) Mehrschichtenstruktur zur bildung einer messvorrichtung bestehend aus einer kombination eines flussmessers und eines temperaturfuehlers sowie ein verfahren zur herstellung der messvorrichtung und dieser mehrschichtenstruktur.
KR100930590B1 (ko) 뒤틀림 현상이 개선된 멤스형 적외선 센서 및 그 제조 방법
JP2007315916A (ja) 赤外線センサ
CN113447148A (zh) 一种红外焦平面探测器
CN113340457B (zh) 一种基于fbg阵列的海水表层温度密集剖面传感器
FR2664745A1 (fr) Convertisseur thermoelectrique et procede pour sa fabrication.
WO2000039563A1 (en) A method for manufacturing a calorimeter-related detector and a detector manufactured according to the method
CN113432726B (zh) 一种具有组合柱状结构的红外探测器
JP3008210B2 (ja) アレイ型サーモパイルを用いた速度検出装置及び大きさ測定装置
Godts et al. Thermoelectric infrared microsensor using suspended membranes made by silicon micromachining
TW483183B (en) Manufacture method of thermopile sensor device using combined sacrificial layer and silicon bulk etching process
Oliveira et al. Practical Applications
JP2011215160A (ja) 赤外線センサ
JP2006090822A (ja) 熱電式化学センサとその製造方法

Legal Events

Date Code Title Description
FGA Letters patent sealed or granted (standard patent)