SE521415C2 - Metod för att framställa en gassensortillhörig detektor, samt en detektor framställd enligt metoden - Google Patents

Metod för att framställa en gassensortillhörig detektor, samt en detektor framställd enligt metoden

Info

Publication number
SE521415C2
SE521415C2 SE9800462A SE9800462A SE521415C2 SE 521415 C2 SE521415 C2 SE 521415C2 SE 9800462 A SE9800462 A SE 9800462A SE 9800462 A SE9800462 A SE 9800462A SE 521415 C2 SE521415 C2 SE 521415C2
Authority
SE
Sweden
Prior art keywords
conductive
detector
ridge
ridges
column
Prior art date
Application number
SE9800462A
Other languages
English (en)
Swedish (sv)
Other versions
SE9800462D0 (sv
SE9800462L (sv
Inventor
Hans Goeran Evald Martin
Per Ove Oehman
Original Assignee
Hans Goeran Evald Martin
Per Ove Oehman
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hans Goeran Evald Martin, Per Ove Oehman filed Critical Hans Goeran Evald Martin
Priority to SE9800462A priority Critical patent/SE521415C2/sv
Publication of SE9800462D0 publication Critical patent/SE9800462D0/xx
Priority to SE9800839A priority patent/SE522989C2/sv
Priority to US09/622,398 priority patent/US6372542B1/en
Priority to CA002320920A priority patent/CA2320920A1/en
Priority to DE69943160T priority patent/DE69943160D1/de
Priority to JP2000531864A priority patent/JP2002503556A/ja
Priority to PCT/SE1999/000145 priority patent/WO1999041592A1/en
Priority to CNB998051241A priority patent/CN1174237C/zh
Priority to CA002320919A priority patent/CA2320919A1/en
Priority to EP99906636A priority patent/EP1057006B1/en
Priority to AU26494/99A priority patent/AU2649499A/en
Priority to AU26493/99A priority patent/AU748969B2/en
Priority to JP2000531725A priority patent/JP4401021B2/ja
Priority to AT99906636T priority patent/ATE497156T1/de
Priority to PCT/SE1999/000146 priority patent/WO1999041772A2/en
Priority to EP99906637A priority patent/EP1057213A2/en
Publication of SE9800462L publication Critical patent/SE9800462L/xx
Publication of SE521415C2 publication Critical patent/SE521415C2/sv

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00436—Shaping materials, i.e. techniques for structuring the substrate or the layers on the substrate
    • B81C1/00444—Surface micromachining, i.e. structuring layers on the substrate
    • B81C1/0046—Surface micromachining, i.e. structuring layers on the substrate using stamping, e.g. imprinting
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/10—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
    • G01J5/12—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors using thermoelectric elements, e.g. thermocouples
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
    • G01N21/3504—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light for analysing gases, e.g. multi-gas analysis
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/36—Mechanical coupling means
    • G02B6/3628—Mechanical coupling means for mounting fibres to supporting carriers
    • G02B6/3684—Mechanical coupling means for mounting fibres to supporting carriers characterised by the manufacturing process of surface profiling of the supporting carrier
    • G02B6/3696—Mechanical coupling means for mounting fibres to supporting carriers characterised by the manufacturing process of surface profiling of the supporting carrier by moulding, e.g. injection moulding, casting, embossing, stamping, stenciling, printing, or with metallic mould insert manufacturing using LIGA or MIGA techniques
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4201—Packages, e.g. shape, construction, internal or external details
    • G02B6/4219—Mechanical fixtures for holding or positioning the elements relative to each other in the couplings; Alignment methods for the elements, e.g. measuring or observing methods especially used therefor
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N10/00—Thermoelectric devices comprising a junction of dissimilar materials, i.e. devices exhibiting Seebeck or Peltier effects
    • H10N10/01—Manufacture or treatment
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N10/00—Thermoelectric devices comprising a junction of dissimilar materials, i.e. devices exhibiting Seebeck or Peltier effects
    • H10N10/80—Constructional details
    • H10N10/81—Structural details of the junction
    • H10N10/817—Structural details of the junction the junction being non-separable, e.g. being cemented, sintered or soldered
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W99/00—Subject matter not provided for in other groups of this subclass
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/02—Sensors
    • B81B2201/0214—Biosensors; Chemical sensors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/01—Suspended structures, i.e. structures allowing a movement
    • B81B2203/0136—Comb structures
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C2201/00—Manufacture or treatment of microstructural devices or systems
    • B81C2201/03—Processes for manufacturing substrate-free structures
    • B81C2201/034—Moulding
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/36—Mechanical coupling means
    • G02B6/3628—Mechanical coupling means for mounting fibres to supporting carriers
    • G02B6/3648—Supporting carriers of a microbench type, i.e. with micromachined additional mechanical structures
    • G02B6/3652—Supporting carriers of a microbench type, i.e. with micromachined additional mechanical structures the additional structures being prepositioning mounting areas, allowing only movement in one dimension, e.g. grooves, trenches or vias in the microbench surface, i.e. self aligning supporting carriers
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4201—Packages, e.g. shape, construction, internal or external details
    • G02B6/4219—Mechanical fixtures for holding or positioning the elements relative to each other in the couplings; Alignment methods for the elements, e.g. measuring or observing methods especially used therefor
    • G02B6/4228—Passive alignment, i.e. without a detection of the degree of coupling or the position of the elements
    • G02B6/423—Passive alignment, i.e. without a detection of the degree of coupling or the position of the elements using guiding surfaces for the alignment
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4201—Packages, e.g. shape, construction, internal or external details
    • G02B6/4246—Bidirectionally operating package structures

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Optics & Photonics (AREA)
  • Analytical Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Micromachines (AREA)
  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
  • Optical Measuring Cells (AREA)
  • Optical Couplings Of Light Guides (AREA)
  • Transition And Organic Metals Composition Catalysts For Addition Polymerization (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
SE9800462A 1998-02-17 1998-02-17 Metod för att framställa en gassensortillhörig detektor, samt en detektor framställd enligt metoden SE521415C2 (sv)

Priority Applications (16)

Application Number Priority Date Filing Date Title
SE9800462A SE521415C2 (sv) 1998-02-17 1998-02-17 Metod för att framställa en gassensortillhörig detektor, samt en detektor framställd enligt metoden
SE9800839A SE522989C2 (sv) 1998-02-17 1998-03-13 Metod för komponentframställning
EP99906637A EP1057213A2 (en) 1998-02-17 1999-02-04 A method of component manufacture
CA002320919A CA2320919A1 (en) 1998-02-17 1999-02-04 A method of producing a detector belonging to a gas sensor, and a detector produced in accordance with the method
EP99906636A EP1057006B1 (en) 1998-02-17 1999-02-04 A method of producing a detector arrangement including a gas sensor, and a detector arrangement produced in accordance with the method
DE69943160T DE69943160D1 (de) 1998-02-17 1999-02-04 Verfahren zur herstellung einer detektoranordnung einschliesslich eines gassensors und mit diesem verfahren hergestellte detektoranordnung
JP2000531864A JP2002503556A (ja) 1998-02-17 1999-02-04 素子製造方法
PCT/SE1999/000145 WO1999041592A1 (en) 1998-02-17 1999-02-04 A method of producing a detector belonging to a gas sensor, and a detector produced in accordance with the method
CNB998051241A CN1174237C (zh) 1998-02-17 1999-02-04 制造属于气敏传感器的检测器的方法和根据该方法制造的检测器
US09/622,398 US6372542B1 (en) 1998-02-17 1999-02-04 Method of component manufacture
CA002320920A CA2320920A1 (en) 1998-02-17 1999-02-04 A method of component manufacture
AU26494/99A AU2649499A (en) 1998-02-17 1999-02-04 A method of component manufacture
AU26493/99A AU748969B2 (en) 1998-02-17 1999-02-04 A method of producing a detector belonging to a gas sensor, and a detector produced in accordance with the method
JP2000531725A JP4401021B2 (ja) 1998-02-17 1999-02-04 ガス・センサに属する検出器を製作する方法およびこの方法に従って製作した検出器
AT99906636T ATE497156T1 (de) 1998-02-17 1999-02-04 Verfahren zur herstellung einer detektoranordnung einschliesslich eines gassensors und mit diesem verfahren hergestellte detektoranordnung
PCT/SE1999/000146 WO1999041772A2 (en) 1998-02-17 1999-02-04 A method of component manufacture

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
SE9800462A SE521415C2 (sv) 1998-02-17 1998-02-17 Metod för att framställa en gassensortillhörig detektor, samt en detektor framställd enligt metoden

Publications (3)

Publication Number Publication Date
SE9800462D0 SE9800462D0 (sv) 1998-02-17
SE9800462L SE9800462L (sv) 1999-08-18
SE521415C2 true SE521415C2 (sv) 2003-10-28

Family

ID=20410206

Family Applications (1)

Application Number Title Priority Date Filing Date
SE9800462A SE521415C2 (sv) 1998-02-17 1998-02-17 Metod för att framställa en gassensortillhörig detektor, samt en detektor framställd enligt metoden

Country Status (10)

Country Link
US (1) US6372542B1 (https=)
EP (2) EP1057213A2 (https=)
JP (2) JP2002503556A (https=)
CN (1) CN1174237C (https=)
AT (1) ATE497156T1 (https=)
AU (2) AU2649499A (https=)
CA (2) CA2320919A1 (https=)
DE (1) DE69943160D1 (https=)
SE (1) SE521415C2 (https=)
WO (2) WO1999041772A2 (https=)

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Also Published As

Publication number Publication date
WO1999041592A1 (en) 1999-08-19
WO1999041772A2 (en) 1999-08-19
SE9800462D0 (sv) 1998-02-17
EP1057213A2 (en) 2000-12-06
AU748969B2 (en) 2002-06-13
CN1297530A (zh) 2001-05-30
AU2649399A (en) 1999-08-30
CA2320919A1 (en) 1999-08-19
US6372542B1 (en) 2002-04-16
JP2002503556A (ja) 2002-02-05
ATE497156T1 (de) 2011-02-15
DE69943160D1 (de) 2011-03-10
JP4401021B2 (ja) 2010-01-20
SE9800462L (sv) 1999-08-18
CN1174237C (zh) 2004-11-03
AU2649499A (en) 1999-08-30
CA2320920A1 (en) 1999-08-19
JP2002503806A (ja) 2002-02-05
EP1057006A1 (en) 2000-12-06
EP1057006B1 (en) 2011-01-26
WO1999041772A3 (en) 1999-11-04

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