JP2002503556A - 素子製造方法 - Google Patents

素子製造方法

Info

Publication number
JP2002503556A
JP2002503556A JP2000531864A JP2000531864A JP2002503556A JP 2002503556 A JP2002503556 A JP 2002503556A JP 2000531864 A JP2000531864 A JP 2000531864A JP 2000531864 A JP2000531864 A JP 2000531864A JP 2002503556 A JP2002503556 A JP 2002503556A
Authority
JP
Japan
Prior art keywords
conductive
ridge
dimensional structure
row
processing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2000531864A
Other languages
English (en)
Japanese (ja)
Inventor
マルティン，ハンス，ゲラン，エヴァルト
エーマン，ペル，オーヴェ
Original Assignee
オーミク アクティエ ボラーグ
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by オーミク アクティエ ボラーグ filed Critical オーミク アクティエ ボラーグ
Publication of JP2002503556A publication Critical patent/JP2002503556A/ja
Pending legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00436—Shaping materials, i.e. techniques for structuring the substrate or the layers on the substrate
    • B81C1/00444—Surface micromachining, i.e. structuring layers on the substrate
    • B81C1/0046—Surface micromachining, i.e. structuring layers on the substrate using stamping, e.g. imprinting
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/10—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
    • G01J5/12—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors using thermoelectric elements, e.g. thermocouples
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
    • G01N21/3504—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light for analysing gases, e.g. multi-gas analysis
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/36—Mechanical coupling means
    • G02B6/3628—Mechanical coupling means for mounting fibres to supporting carriers
    • G02B6/3684—Mechanical coupling means for mounting fibres to supporting carriers characterised by the manufacturing process of surface profiling of the supporting carrier
    • G02B6/3696—Mechanical coupling means for mounting fibres to supporting carriers characterised by the manufacturing process of surface profiling of the supporting carrier by moulding, e.g. injection moulding, casting, embossing, stamping, stenciling, printing, or with metallic mould insert manufacturing using LIGA or MIGA techniques
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4201—Packages, e.g. shape, construction, internal or external details
    • G02B6/4219—Mechanical fixtures for holding or positioning the elements relative to each other in the couplings; Alignment methods for the elements, e.g. measuring or observing methods especially used therefor
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N10/00—Thermoelectric devices comprising a junction of dissimilar materials, i.e. devices exhibiting Seebeck or Peltier effects
    • H10N10/01—Manufacture or treatment
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N10/00—Thermoelectric devices comprising a junction of dissimilar materials, i.e. devices exhibiting Seebeck or Peltier effects
    • H10N10/80—Constructional details
    • H10N10/81—Structural details of the junction
    • H10N10/817—Structural details of the junction the junction being non-separable, e.g. being cemented, sintered or soldered
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W99/00—Subject matter not provided for in other groups of this subclass
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/02—Sensors
    • B81B2201/0214—Biosensors; Chemical sensors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/01—Suspended structures, i.e. structures allowing a movement
    • B81B2203/0136—Comb structures
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C2201/00—Manufacture or treatment of microstructural devices or systems
    • B81C2201/03—Processes for manufacturing substrate-free structures
    • B81C2201/034—Moulding
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/36—Mechanical coupling means
    • G02B6/3628—Mechanical coupling means for mounting fibres to supporting carriers
    • G02B6/3648—Supporting carriers of a microbench type, i.e. with micromachined additional mechanical structures
    • G02B6/3652—Supporting carriers of a microbench type, i.e. with micromachined additional mechanical structures the additional structures being prepositioning mounting areas, allowing only movement in one dimension, e.g. grooves, trenches or vias in the microbench surface, i.e. self aligning supporting carriers
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4201—Packages, e.g. shape, construction, internal or external details
    • G02B6/4219—Mechanical fixtures for holding or positioning the elements relative to each other in the couplings; Alignment methods for the elements, e.g. measuring or observing methods especially used therefor
    • G02B6/4228—Passive alignment, i.e. without a detection of the degree of coupling or the position of the elements
    • G02B6/423—Passive alignment, i.e. without a detection of the degree of coupling or the position of the elements using guiding surfaces for the alignment
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4201—Packages, e.g. shape, construction, internal or external details
    • G02B6/4246—Bidirectionally operating package structures

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Optics & Photonics (AREA)
  • Analytical Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Micromachines (AREA)
  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
  • Optical Measuring Cells (AREA)
  • Optical Couplings Of Light Guides (AREA)
  • Transition And Organic Metals Composition Catalysts For Addition Polymerization (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
JP2000531864A 1998-02-17 1999-02-04 素子製造方法 Pending JP2002503556A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
SE9800462A SE521415C2 (sv) 1998-02-17 1998-02-17 Metod för att framställa en gassensortillhörig detektor, samt en detektor framställd enligt metoden
SE9800462-5 1998-02-17
PCT/SE1999/000146 WO1999041772A2 (en) 1998-02-17 1999-02-04 A method of component manufacture

Publications (1)

Publication Number Publication Date
JP2002503556A true JP2002503556A (ja) 2002-02-05

Family

ID=20410206

Family Applications (2)

Application Number Title Priority Date Filing Date
JP2000531864A Pending JP2002503556A (ja) 1998-02-17 1999-02-04 素子製造方法
JP2000531725A Expired - Fee Related JP4401021B2 (ja) 1998-02-17 1999-02-04 ガス・センサに属する検出器を製作する方法およびこの方法に従って製作した検出器

Family Applications After (1)

Application Number Title Priority Date Filing Date
JP2000531725A Expired - Fee Related JP4401021B2 (ja) 1998-02-17 1999-02-04 ガス・センサに属する検出器を製作する方法およびこの方法に従って製作した検出器

Country Status (10)

Country Link
US (1) US6372542B1 (https=)
EP (2) EP1057213A2 (https=)
JP (2) JP2002503556A (https=)
CN (1) CN1174237C (https=)
AT (1) ATE497156T1 (https=)
AU (2) AU2649499A (https=)
CA (2) CA2320919A1 (https=)
DE (1) DE69943160D1 (https=)
SE (1) SE521415C2 (https=)
WO (2) WO1999041772A2 (https=)

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US20100052177A1 (en) * 2005-06-06 2010-03-04 Nxp B.V. Method for manufacturing a crossbar circuit device
US8921102B2 (en) 2005-07-29 2014-12-30 Gpb Scientific, Llc Devices and methods for enrichment and alteration of circulating tumor cells and other particles
SE0802069A1 (sv) 2008-09-30 2010-03-31 Senseair Ab Ett för en spektralanalys av höga gaskoncentrationer anpassat arrangemang
WO2012138701A1 (en) 2011-04-06 2012-10-11 Ortho-Clinical Diagnostics, Inc Assay device having rhombus-shaped projections
CN103998932B (zh) 2011-06-29 2017-06-06 中央研究院 使用表面涂层对生物物质的捕获、纯化和释放
KR20130085992A (ko) 2012-01-20 2013-07-30 오르토-클리니칼 다이아그노스틱스, 인코포레이티드 제어가능한 샘플 크기를 갖는 분석 장치
KR20130085994A (ko) 2012-01-20 2013-07-30 오르토-클리니칼 다이아그노스틱스, 인코포레이티드 다수의 시약 셀을 갖는 분석 장치
EP2618149B1 (en) 2012-01-20 2016-07-27 Ortho-Clinical Diagnostics, Inc. Assay device having uniform flow around corners
CA2802260C (en) 2012-01-20 2021-03-30 Ortho-Clinical Diagnostics, Inc. Controlling fluid flow through an assay device
WO2013109821A1 (en) 2012-01-20 2013-07-25 Ortho-Clinical Diagnostics, Inc. Assay device having multiplexing
DE102012203792A1 (de) * 2012-03-12 2013-09-12 Siemens Aktiengesellschaft Infrarotsensor, Wärmebildkamera und Verfahren zum Herstellen einer Mikrostruktur aus thermoelektrischen Sensorstäben
KR101358245B1 (ko) 2012-03-19 2014-02-07 연세대학교 산학협력단 수소 센서 및 수소 센서 제조 방법
CA2818332C (en) 2012-06-12 2021-07-20 Ortho-Clinical Diagnostics, Inc. Lateral flow assay devices for use in clinical diagnostic apparatus and configuration of clinical diagnostic apparatus for same
WO2014078679A1 (en) 2012-11-15 2014-05-22 Ortho-Clinical Diagnostics, Inc. Calibrating assays using reaction time
JP6359263B2 (ja) 2012-11-15 2018-07-18 オーソ・クリニカル・ダイアグノスティックス・インコーポレーテッド 流れモニタリングに基づく、側方流動アッセイ装置の品質／プロセス制御
CA2841692C (en) 2013-02-12 2023-08-22 Zhong Ding Reagent zone deposition pattern
EP2777499B1 (en) 2013-03-15 2015-09-16 Ortho-Clinical Diagnostics Inc Rotatable fluid sample collection device
EP2778679B1 (en) 2013-03-15 2017-09-27 Ortho-Clinical Diagnostics, Inc. Rotable disk-shaped fluid sample collection device
DE102013218840A1 (de) 2013-09-19 2015-03-19 Robert Bosch Gmbh Mikroheizplattenvorrichtung und Sensor mit einer Mikroheizplattenvorrichtung
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JPH054232A (ja) * 1991-06-25 1993-01-14 Tohoku Nakatani:Kk 金型製造法
JPH0512722A (ja) * 1991-07-05 1993-01-22 Tohoku Nakatani:Kk スタンパー製造方法
JPH08225929A (ja) * 1995-02-23 1996-09-03 Matsushita Electric Ind Co Ltd レーザ・アブレーションを用いた薄膜形成法およびレーザ・アブレーション装置
JPH08306978A (ja) * 1995-05-10 1996-11-22 Hitachi Cable Ltd 酸化物薄膜の製造方法および装置
JPH08306080A (ja) * 1995-04-28 1996-11-22 Sony Corp 情報記録媒体及びその成形型
JPH0936440A (ja) * 1995-07-21 1997-02-07 Osaka Gas Co Ltd 熱電材料の作製方法
JPH09175835A (ja) * 1995-12-25 1997-07-08 Toyota Motor Corp 表面加工方法
JPH09180271A (ja) * 1995-12-28 1997-07-11 Kao Corp 光ディスク用基板の製造方法
JPH1044255A (ja) * 1996-08-05 1998-02-17 Fuji Xerox Co Ltd 微小構造体、およびその製造方法および装置

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Publication number Priority date Publication date Assignee Title
DE4110653A1 (de) * 1990-07-12 1992-01-23 Landis & Gyr Betriebs Ag Thermoelektrischer wandler und verfahren zu dessen herstellung
JPH054232A (ja) * 1991-06-25 1993-01-14 Tohoku Nakatani:Kk 金型製造法
JPH0512722A (ja) * 1991-07-05 1993-01-22 Tohoku Nakatani:Kk スタンパー製造方法
JPH08225929A (ja) * 1995-02-23 1996-09-03 Matsushita Electric Ind Co Ltd レーザ・アブレーションを用いた薄膜形成法およびレーザ・アブレーション装置
JPH08306080A (ja) * 1995-04-28 1996-11-22 Sony Corp 情報記録媒体及びその成形型
JPH08306978A (ja) * 1995-05-10 1996-11-22 Hitachi Cable Ltd 酸化物薄膜の製造方法および装置
JPH0936440A (ja) * 1995-07-21 1997-02-07 Osaka Gas Co Ltd 熱電材料の作製方法
JPH09175835A (ja) * 1995-12-25 1997-07-08 Toyota Motor Corp 表面加工方法
JPH09180271A (ja) * 1995-12-28 1997-07-11 Kao Corp 光ディスク用基板の製造方法
JPH1044255A (ja) * 1996-08-05 1998-02-17 Fuji Xerox Co Ltd 微小構造体、およびその製造方法および装置

Also Published As

Publication number Publication date
WO1999041592A1 (en) 1999-08-19
WO1999041772A2 (en) 1999-08-19
SE9800462D0 (sv) 1998-02-17
EP1057213A2 (en) 2000-12-06
AU748969B2 (en) 2002-06-13
SE521415C2 (sv) 2003-10-28
CN1297530A (zh) 2001-05-30
AU2649399A (en) 1999-08-30
CA2320919A1 (en) 1999-08-19
US6372542B1 (en) 2002-04-16
ATE497156T1 (de) 2011-02-15
DE69943160D1 (de) 2011-03-10
JP4401021B2 (ja) 2010-01-20
SE9800462L (sv) 1999-08-18
CN1174237C (zh) 2004-11-03
AU2649499A (en) 1999-08-30
CA2320920A1 (en) 1999-08-19
JP2002503806A (ja) 2002-02-05
EP1057006A1 (en) 2000-12-06
EP1057006B1 (en) 2011-01-26
WO1999041772A3 (en) 1999-11-04

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