ATE545958T1 - Halbleiterbauelement und dessen herstellungsverfahren - Google Patents

Halbleiterbauelement und dessen herstellungsverfahren

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Publication number
ATE545958T1
ATE545958T1 AT01969945T AT01969945T ATE545958T1 AT E545958 T1 ATE545958 T1 AT E545958T1 AT 01969945 T AT01969945 T AT 01969945T AT 01969945 T AT01969945 T AT 01969945T AT E545958 T1 ATE545958 T1 AT E545958T1
Authority
AT
Austria
Prior art keywords
drift region
indirectly
membrane
connected directly
production process
Prior art date
Application number
AT01969945T
Other languages
English (en)
Inventor
Florin Udrea
Gehan Amaratunga
Original Assignee
Cambridge Semiconductor Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Cambridge Semiconductor Ltd filed Critical Cambridge Semiconductor Ltd
Application granted granted Critical
Publication of ATE545958T1 publication Critical patent/ATE545958T1/de

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AU2001290068B2 (en) 2006-03-02
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