JP5392959B2 - 半導体デバイスおよび半導体デバイスを形成する方法 - Google Patents
半導体デバイスおよび半導体デバイスを形成する方法 Download PDFInfo
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- JP5392959B2 JP5392959B2 JP2002529813A JP2002529813A JP5392959B2 JP 5392959 B2 JP5392959 B2 JP 5392959B2 JP 2002529813 A JP2002529813 A JP 2002529813A JP 2002529813 A JP2002529813 A JP 2002529813A JP 5392959 B2 JP5392959 B2 JP 5392959B2
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Description
Claims (37)
- 層中に設けられたドリフト領域を備えた活性領域を有する電力半導体デバイスであって、前記層は、半導体基板上に設けられており、前記ドリフト領域の少なくとも一部の下側の前記半導体基板の少なくとも一部が除去されて、前記ドリフト領域の前記少なくとも一部が、前記層の、その下側の半導体基板が除去された部分によって形成される膜中に設けられており、前記膜の頂部表面が、前記膜に直接的または間接的に接続されて、ドリフト領域を亘って横方向に電圧を印加することができる高電圧端子を含む複数の電気端子を有しているところの電力半導体デバイスであって、前記膜に前記高電圧端子が設けられており、使用時に、ドリフト領域の前記少なくとも一部は、前記デバイスの電気端子の両端間に電圧が印加されると、完全に、または実質的に完全に可動電荷キャリアが消滅し、電位線は、前記膜の前記頂部表面および底部表面に対して実質的に直角をなしており、そして、前記電位線は、前記ドリフト領域の少なくとも一部を横方向に実質的に一様に広がっていることを特徴とする電力半導体デバイス。
- 前記ドリフト領域の一部のみが前記膜中に設けられた、請求項1に記載のデバイス。
- 前記ドリフト領域の全体が前記膜中に設けられた、請求項1または2に記載のデバイス。
- 前記ドリフト領域を取り囲む少なくとも1つの分離層を備えた、請求項1から3のいずれか1つに記載のデバイス。
- 前記少なくとも1つの分離層が、前記膜中に設けられて、前記膜の前記頂部表面から前記膜の前記底部表面へ拡張している、請求項4に記載のデバイス。
- 前記ドリフト領域を取り囲む、前記膜の外側に設けられた少なくとも1つの分離層を備えた、請求項1から5のいずれか1つに記載のデバイス。
- 前記少なくとも1つの分離層が、電気絶縁材によって提供される、請求項4から6のいずれか1つに記載のデバイス。
- 前記少なくとも1つの分離層が、重くドープされた半導体層によって提供され、前記半導体層は、使用に際してバイアスされて、逆バイアスされた接合、または、順方向バイアス・レベル未満にバイアスされた接合を提供する、請求項4から7のいずれか1つに記載のデバイス。
- 少なくとも1つの追加電力デバイスをさらに備え、前記追加電力デバイスは、少なくとも一部が前記膜上に設けられたドリフト領域を有している、請求項1から8のいずれか1つに記載のデバイス。
- 少なくとも1つの低電圧デバイスをさらに備えた、請求項1から9のいずれか1つに記載のデバイス。
- 前記少なくとも1つの低電圧デバイスが前記膜中に設けられた、請求項10に記載のデバイス。
- 前記少なくとも1つの低電圧デバイスが前記膜の外側に設けられた、請求項10に記載のデバイス。
- 前記少なくとも1つの低電圧デバイスが、他の膜中に設けられた、請求項12に記載のデバイス。
- 少なくとも1つの分離層を備え、前記分離層は、隣接するデバイス間を電気分離する、請求項9から13のいずれか1つに記載のデバイス。
- 前記分離層が他の膜上に配置される、請求項14に記載のデバイス。
- 前記膜の前記底部表面に隣接した電気絶縁熱伝導層を備えた、請求項1ないし15のいずれか1つに記載のデバイス。
- 前記膜が、電気絶縁層上に設けられた半導体層を備えた、請求項1ないし16のいずれか1つに記載のデバイス。
- 前記膜の下側に設けられた、機械的に強化された電気絶縁層を備えた、請求項1ないし17のいずれか1つに記載のデバイス。
- ドリフト層が不均一ドーピング・プロフィールを有する、請求項1から18のいずれか1つに記載のデバイス。
- 前記デバイスの高電圧端子側の前記ドリフト領域のドーピング濃度が比較的高く、そして、前記デバイスの低電圧端子側の前記ドリフト領域のドーピング濃度が比較的低い、請求項19に記載のデバイス。
- 前記ドリフト領域の前記ドーピング濃度が、前記ドリフト領域の一方の側から他方の側に向かって直線的に変化する、請求項19または20に記載のデバイス。
- 前記ドリフト領域が、交互に配列され、かつ、互いに接触している、伝導形式が交番する少なくとも2つの半導体層を備えた、請求項1ないし21のいずれか1つに記載のデバイス。
- 前記ドリフト領域が、横方向に隣接する、伝導形式が交番する複数の半導体領域を備えた、請求項1から21のいずれか1つに記載のデバイス。
- 前記ドリフト領域が、デバイスの平面の周囲に配列された、横方向に隣接する、伝導形式が交番する複数の半導体セルを備えた、請求項1から21のいずれか1つに記載のデバイス。
- 前記ドリフト領域に隣接し、かつ、接触した成端領域を備えており、前記成端領域は、前記ドリフト領域のエッジ部分の早期降伏の影響を緩和するために設けられる、請求項1から24のいずれか1つに記載のデバイス。
- 前記成端領域の少なくとも一部が前記膜の内側に配置された、請求項25に記載のデバイス。
- 前記成端領域の少なくとも一部が前記膜の外側に配置された、請求項25に記載のデバイス。
- 前記ドリフト領域が、前記成端領域の少なくとも一部より重くドープされた、請求項25から27のいずれか1つに記載のデバイス。
- 前記ドリフト領域が、前記半導体基板より重くドープされた、請求項25から28のいずれか1つに記載のデバイス。
- ドリフト領域を備えた活性領域を有する電力半導体デバイスを形成する方法であって、
ドリフト領域を備えた活性領域を有する電力半導体デバイスを、半導体基板上に設けられた層中に形成するステップと、
前記ドリフト領域の少なくとも一部の下側の半導体基板の少なくとも一部を除去して、前記ドリフト領域の前記少なくとも一部を、前記層の、その下側の半導体基板が除去された部分によって形成される膜中に設けるステップと、
電気端子を前記膜の頂部表面に直接的または間接的に接続するように設けて、前記ドリフト領域を亘って横方向に電圧を印加することを可能にするステップと、
前記膜に高電圧端子を設けるステップと
を含む方法。
- 前記半導体基板の前記少なくとも一部がウェット・エッチングによって除去される、請求項30に記載の方法。
- 前記半導体基板の前記少なくとも一部がドライ・エッチングによって除去される、請求項30に記載の方法。
- 前記半導体基板の前記少なくとも一部が、埋込絶縁層をエッチ・ストップとして使用して除去される、請求項31または32に記載の方法。
- 少なくとも1つの半導体層が、前記膜の形成に続いて、デバイスの裏面からの注入、拡散または蒸着によって導入される、請求項30から33のいずれか1つに記載の方法。
- 前記膜内の少なくとも1つの半導体層と接触する底部端子層が、前記膜の底部に加えられる、請求項30から34のいずれか1つに記載の方法。
- 前記膜の前記底部表面に隣接する電気絶縁熱伝導層を加えるステップを含む、請求項30から34のいずれか1つに記載の方法。
- 電気絶縁熱伝導層が蒸着プロセスによって加えられる、請求項36に記載の方法。
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PCT/GB2001/004211 WO2002025700A2 (en) | 2000-09-21 | 2001-09-20 | Semiconductor device and method of forming a semiconductor device |
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DE19909105A1 (de) * | 1999-03-02 | 2000-09-14 | Siemens Ag | Symmetrischer Thyristor mit verringerter Dicke und Herstellungsverfahren dafür |
CN1233041C (zh) * | 2000-09-21 | 2005-12-21 | 剑桥半导体有限公司 | 半导体器件及其制作方法 |
GB2371922B (en) * | 2000-09-21 | 2004-12-15 | Cambridge Semiconductor Ltd | Semiconductor device and method of forming a semiconductor device |
AU2002339604A1 (en) * | 2001-11-01 | 2003-05-12 | Koninklijke Philips Electronics N.V. | Lateral soi field-effect transistor and method of making the same |
US6900501B2 (en) | 2001-11-02 | 2005-05-31 | Cree Microwave, Inc. | Silicon on insulator device with improved heat removal |
FR2834575B1 (fr) * | 2002-01-09 | 2004-07-09 | St Microelectronics Sa | Procede de modelisation et de realisation d'un circuit integre comportant au moins un transistor a effet de champ a grille isolee, et circuit integre correspondant |
JP2005531153A (ja) * | 2002-06-26 | 2005-10-13 | ケンブリッジ セミコンダクター リミテッド | ラテラル半導体デバイス |
EP1576669A1 (en) * | 2002-12-10 | 2005-09-21 | Power Electronics Design Centre | Power integrated circuits |
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- 2001-09-20 RU RU2003111170/28A patent/RU2276429C2/ru not_active IP Right Cessation
- 2001-09-20 CA CA002423028A patent/CA2423028A1/en not_active Abandoned
- 2001-09-20 AT AT01969945T patent/ATE545958T1/de active
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- 2001-09-20 AU AU9006801A patent/AU9006801A/xx active Pending
- 2001-09-20 AU AU2001290068A patent/AU2001290068B2/en not_active Ceased
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- 2001-09-21 US US09/957,547 patent/US6703684B2/en not_active Expired - Lifetime
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2003
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- 2003-03-17 IL IL154945A patent/IL154945A/en not_active IP Right Cessation
- 2003-10-29 US US10/694,735 patent/US6900518B2/en not_active Expired - Lifetime
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2005
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Also Published As
Publication number | Publication date |
---|---|
WO2002025700A2 (en) | 2002-03-28 |
AU2001290068C1 (en) | 2002-04-02 |
US20040087065A1 (en) | 2004-05-06 |
JP2004510329A (ja) | 2004-04-02 |
US7235439B2 (en) | 2007-06-26 |
US20040084752A1 (en) | 2004-05-06 |
IL154945A (en) | 2007-09-20 |
US6900518B2 (en) | 2005-05-31 |
KR100841141B1 (ko) | 2008-06-24 |
ATE545958T1 (de) | 2012-03-15 |
CN1470073A (zh) | 2004-01-21 |
AU2001290068B2 (en) | 2006-03-02 |
ZA200302065B (en) | 2004-02-26 |
EP1319252A2 (en) | 2003-06-18 |
US20050242369A1 (en) | 2005-11-03 |
KR20030064753A (ko) | 2003-08-02 |
AU9006801A (en) | 2002-04-02 |
US20020041003A1 (en) | 2002-04-11 |
US6927102B2 (en) | 2005-08-09 |
US20050242368A1 (en) | 2005-11-03 |
CA2423028A1 (en) | 2002-03-28 |
US6703684B2 (en) | 2004-03-09 |
US7411272B2 (en) | 2008-08-12 |
EP1319252B1 (en) | 2012-02-15 |
RU2276429C2 (ru) | 2006-05-10 |
WO2002025700A3 (en) | 2002-06-06 |
CN1233041C (zh) | 2005-12-21 |
IL154945A0 (en) | 2003-10-31 |
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