ATE48708T1 - Verfahren zum erzeugen von negativen bildern in einer photolackschicht. - Google Patents
Verfahren zum erzeugen von negativen bildern in einer photolackschicht.Info
- Publication number
- ATE48708T1 ATE48708T1 AT85870142T AT85870142T ATE48708T1 AT E48708 T1 ATE48708 T1 AT E48708T1 AT 85870142 T AT85870142 T AT 85870142T AT 85870142 T AT85870142 T AT 85870142T AT E48708 T1 ATE48708 T1 AT E48708T1
- Authority
- AT
- Austria
- Prior art keywords
- layer
- photosensitive resin
- silicon compound
- portions
- irradiated portions
- Prior art date
Links
- 238000000034 method Methods 0.000 title abstract 2
- 229920002120 photoresistant polymer Polymers 0.000 title abstract 2
- 239000011347 resin Substances 0.000 abstract 5
- 229920005989 resin Polymers 0.000 abstract 5
- 150000003377 silicon compounds Chemical class 0.000 abstract 4
- 125000000524 functional group Chemical group 0.000 abstract 2
- 229920000642 polymer Polymers 0.000 abstract 2
- 230000015572 biosynthetic process Effects 0.000 abstract 1
- 239000003795 chemical substances by application Substances 0.000 abstract 1
- 239000011248 coating agent Substances 0.000 abstract 1
- 238000000576 coating method Methods 0.000 abstract 1
- 150000001875 compounds Chemical class 0.000 abstract 1
- 238000001020 plasma etching Methods 0.000 abstract 1
- 230000005855 radiation Effects 0.000 abstract 1
- 239000000126 substance Substances 0.000 abstract 1
- 239000000758 substrate Substances 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/08—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/26—Processing photosensitive materials; Apparatus therefor
- G03F7/265—Selective reaction with inorganic or organometallic reagents after image-wise exposure, e.g. silylation
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/022—Quinonediazides
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Inorganic Chemistry (AREA)
- Organic Chemistry (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Electromagnetism (AREA)
- Chemical & Material Sciences (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Photosensitive Polymer And Photoresist Processing (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Silver Salt Photography Or Processing Solution Therefor (AREA)
- Pharmaceuticals Containing Other Organic And Inorganic Compounds (AREA)
- Acyclic And Carbocyclic Compounds In Medicinal Compositions (AREA)
- Compounds Of Unknown Constitution (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB848427149A GB8427149D0 (en) | 1984-10-26 | 1984-10-26 | Resist materials |
EP85870142A EP0184567B1 (de) | 1984-10-26 | 1985-10-24 | Verfahren zum Erzeugen von negativen Bildern in einer Photolackschicht |
Publications (1)
Publication Number | Publication Date |
---|---|
ATE48708T1 true ATE48708T1 (de) | 1989-12-15 |
Family
ID=10568805
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AT85870142T ATE48708T1 (de) | 1984-10-26 | 1985-10-24 | Verfahren zum erzeugen von negativen bildern in einer photolackschicht. |
Country Status (11)
Country | Link |
---|---|
EP (1) | EP0184567B1 (de) |
JP (2) | JPS61107346A (de) |
KR (1) | KR940004423B1 (de) |
AT (1) | ATE48708T1 (de) |
CA (1) | CA1275846C (de) |
DE (1) | DE3574788D1 (de) |
GB (1) | GB8427149D0 (de) |
IE (1) | IE56708B1 (de) |
IL (1) | IL76702A (de) |
MY (1) | MY100941A (de) |
SU (1) | SU1498400A3 (de) |
Families Citing this family (36)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4810601A (en) * | 1984-12-07 | 1989-03-07 | International Business Machines Corporation | Top imaged resists |
CA1267378A (en) * | 1984-12-07 | 1990-04-03 | Jer-Ming Yang | Top imaged and organosilicon treated polymer layer developable with plasma |
US4908298A (en) * | 1985-03-19 | 1990-03-13 | International Business Machines Corporation | Method of creating patterned multilayer films for use in production of semiconductor circuits and systems |
US4782008A (en) * | 1985-03-19 | 1988-11-01 | International Business Machines Corporation | Plasma-resistant polymeric material, preparation thereof, and use thereof |
CA1282273C (en) * | 1985-03-19 | 1991-04-02 | International Business Machines Corporation | Method of creating patterned multilayer films for use in production of semiconductor circuits and systems |
JPS61268028A (ja) * | 1985-04-08 | 1986-11-27 | インタ−ナショナル ビジネス マシ−ンズ コ−ポレ−ション | ホトレジスト中にマスク像を現像する方法 |
US4613398A (en) * | 1985-06-06 | 1986-09-23 | International Business Machines Corporation | Formation of etch-resistant resists through preferential permeation |
US4737425A (en) * | 1986-06-10 | 1988-04-12 | International Business Machines Corporation | Patterned resist and process |
EP0249457B1 (de) * | 1986-06-12 | 1991-08-21 | Matsushita Electric Industrial Co., Ltd. | Bilderzeugungsverfahren |
EP0250762B1 (de) * | 1986-06-23 | 1995-03-08 | International Business Machines Corporation | Herstellung von permeabelen polymeren Filmen oder Schichten durch Auslaugung |
JPS63165845A (ja) * | 1986-12-26 | 1988-07-09 | Toshiba Corp | パタ−ン形成方法 |
CA1286424C (en) * | 1987-01-12 | 1991-07-16 | William C. Mccolgin | Bilayer lithographic process |
NL8700421A (nl) * | 1987-02-20 | 1988-09-16 | Philips Nv | Werkwijze voor het vervaardigen van een halfgeleiderinrichting. |
US4808511A (en) * | 1987-05-19 | 1989-02-28 | International Business Machines Corporation | Vapor phase photoresist silylation process |
JPS6479743A (en) * | 1987-09-22 | 1989-03-24 | Nippon Telegraph & Telephone | Pattern forming method by dry developing |
JP2506133B2 (ja) * | 1987-11-18 | 1996-06-12 | 日本電信電話株式会社 | パタ―ン形成方法 |
US5272026A (en) * | 1987-12-18 | 1993-12-21 | Ucb S.A. | Negative image process utilizing photosensitive compositions containing aromatic fused polycyclic sulfonic acid and partial ester or phenolic resin with diazoquinone sulfonic acid or diazoquinone carboxylic acid, and associated imaged article |
GB8729510D0 (en) * | 1987-12-18 | 1988-02-03 | Ucb Sa | Photosensitive compositions containing phenolic resins & diazoquinone compounds |
JPH01186934A (ja) * | 1988-01-21 | 1989-07-26 | Toshiba Corp | パターン形成方法 |
JPH01302726A (ja) * | 1988-02-10 | 1989-12-06 | Japan Synthetic Rubber Co Ltd | 反応性イオンエッチング装置 |
JP2623309B2 (ja) * | 1988-02-22 | 1997-06-25 | ユーシービー ソシエテ アノニム | レジストパターンを得る方法 |
JP2521329B2 (ja) * | 1988-07-04 | 1996-08-07 | シャープ株式会社 | 半導体装置の製造方法 |
JPH0269746A (ja) * | 1988-08-01 | 1990-03-08 | Internatl Business Mach Corp <Ibm> | ホトレジストの形成方法、ポリマー構造体、ホトレジスト |
US5094936A (en) * | 1988-09-16 | 1992-03-10 | Texas Instruments Incorporated | High pressure photoresist silylation process and apparatus |
EP0366937A2 (de) * | 1988-10-31 | 1990-05-09 | International Business Machines Corporation | Verfahren zur Herstellung von Reliefstrukturen und Anwendung |
JPH02161432A (ja) * | 1988-12-14 | 1990-06-21 | Nec Corp | 微細パターン形成方法 |
JP2848625B2 (ja) * | 1989-03-31 | 1999-01-20 | 株式会社東芝 | パターン形成方法 |
JP2930971B2 (ja) * | 1989-06-22 | 1999-08-09 | 株式会社東芝 | パターン形成方法 |
US5139925A (en) * | 1989-10-18 | 1992-08-18 | Massachusetts Institute Of Technology | Surface barrier silylation of novolak film without photoactive additive patterned with 193 nm excimer laser |
JPH043456A (ja) * | 1990-04-19 | 1992-01-08 | Nec Corp | 能動層積層素子形成方法 |
US5061604A (en) * | 1990-05-04 | 1991-10-29 | Minnesota Mining And Manufacturing Company | Negative crystalline photoresists for UV photoimaging |
DE69208769T2 (de) * | 1991-07-31 | 1996-07-18 | Texas Instruments Inc | Hochauflösendes lithographisches Verfahren |
US5409434A (en) * | 1992-01-30 | 1995-04-25 | Toyota Jidosha Kabushiki Kaisha | Control system with failsafe for shift-by-wire automatic transmission |
KR100396559B1 (ko) * | 2001-11-05 | 2003-09-02 | 삼성전자주식회사 | 일체형 잉크젯 프린트헤드의 제조 방법 |
JP5324361B2 (ja) * | 2009-08-28 | 2013-10-23 | 東京応化工業株式会社 | 表面処理剤及び表面処理方法 |
US9868902B2 (en) | 2014-07-17 | 2018-01-16 | Soulbrain Co., Ltd. | Composition for etching |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4232110A (en) * | 1979-03-12 | 1980-11-04 | Bell Telephone Laboratories, Incorporated | Solid state devices formed by differential plasma etching of resists |
US4307178A (en) * | 1980-04-30 | 1981-12-22 | International Business Machines Corporation | Plasma develoment of resists |
JPS5723937A (en) * | 1980-07-17 | 1982-02-08 | Matsushita Electric Ind Co Ltd | Photographic etching method |
US4396704A (en) * | 1981-04-22 | 1983-08-02 | Bell Telephone Laboratories, Incorporated | Solid state devices produced by organometallic plasma developed resists |
JPS57202533A (en) * | 1981-06-09 | 1982-12-11 | Fujitsu Ltd | Formation of pattern |
JPS57202535A (en) * | 1981-06-09 | 1982-12-11 | Fujitsu Ltd | Formation of negative resist pattern |
EP0091651B1 (de) * | 1982-04-12 | 1988-08-03 | Nippon Telegraph And Telephone Corporation | Verfahren zur Herstellung von Mikrobildern |
JPS5961928A (ja) * | 1982-10-01 | 1984-04-09 | Hitachi Ltd | パタ−ン形成方法 |
CA1248402A (en) * | 1983-09-16 | 1989-01-10 | Larry E. Stillwagon | Method of making articles using gas functionalized plasma developed layer |
JPS60501777A (ja) * | 1983-11-02 | 1985-10-17 | ヒユ−ズ・エアクラフト・カンパニ− | 二酸化ケイ素系グラフト重合リソグラフマスク |
US4552833A (en) * | 1984-05-14 | 1985-11-12 | International Business Machines Corporation | Radiation sensitive and oxygen plasma developable resist |
-
1984
- 1984-10-26 GB GB848427149A patent/GB8427149D0/en active Pending
-
1985
- 1985-10-14 IL IL76702A patent/IL76702A/xx not_active IP Right Cessation
- 1985-10-18 CA CA000493257A patent/CA1275846C/en not_active Expired - Lifetime
- 1985-10-24 EP EP85870142A patent/EP0184567B1/de not_active Expired
- 1985-10-24 DE DE8585870142T patent/DE3574788D1/de not_active Expired - Lifetime
- 1985-10-24 AT AT85870142T patent/ATE48708T1/de not_active IP Right Cessation
- 1985-10-24 JP JP60238553A patent/JPS61107346A/ja active Granted
- 1985-10-25 IE IE2643/85A patent/IE56708B1/en not_active IP Right Cessation
- 1985-10-25 SU SU853974782A patent/SU1498400A3/ru active
- 1985-10-26 KR KR1019850007981A patent/KR940004423B1/ko not_active IP Right Cessation
-
1987
- 1987-06-01 MY MYPI87000750A patent/MY100941A/en unknown
-
1988
- 1988-10-11 JP JP63255722A patent/JPH065385B2/ja not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
DE3574788D1 (de) | 1990-01-18 |
IE852643L (en) | 1986-04-26 |
JPH0220869A (ja) | 1990-01-24 |
JPH065385B2 (ja) | 1994-01-19 |
SU1498400A3 (ru) | 1989-07-30 |
JPS61107346A (ja) | 1986-05-26 |
KR940004423B1 (ko) | 1994-05-25 |
GB8427149D0 (en) | 1984-12-05 |
CA1275846C (en) | 1990-11-06 |
JPH0456979B2 (de) | 1992-09-10 |
IE56708B1 (en) | 1991-11-06 |
MY100941A (en) | 1991-05-31 |
EP0184567A1 (de) | 1986-06-11 |
IL76702A (en) | 1989-07-31 |
KR860003674A (ko) | 1986-05-28 |
IL76702A0 (en) | 1986-02-28 |
EP0184567B1 (de) | 1989-12-13 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
ATE48708T1 (de) | Verfahren zum erzeugen von negativen bildern in einer photolackschicht. | |
JPS5754317A (en) | Method and device for forming pattern | |
ATE544095T1 (de) | Verfahren zur herstellung einer druckplatte | |
JPS5569265A (en) | Pattern-forming method | |
US5266424A (en) | Method of forming pattern and method of manufacturing photomask using such method | |
KR960019542A (ko) | 전자부품의 패턴형성방법 | |
JPS6433543A (en) | Pattern forming method | |
JPS6452142A (en) | Pattern forming process and silylating apparatus | |
EP0318956A3 (de) | Positiv arbeitende Photoresistzusammensetzung und Verfahren zur Herstellung von positiven Reliefbildern | |
JPS56165325A (en) | Formation of pattern | |
JPS57100428A (en) | Method for photomechanical process | |
KR920003808B1 (ko) | 미세패턴 형성을 위한 사진식각 방법 | |
JPS57109331A (en) | Formation of resist pattern | |
JPS5574544A (en) | Photo mask correcting method | |
Blum et al. | A Study Of The Dissolution Kinetics Of A Positive Photoresist Using Organic Acids To Simulate Exposed Photoactive Compounds | |
JP2551117B2 (ja) | レジストパターン形成方法 | |
JPH02144989A (ja) | プリント回路板の処理方法 | |
JPS57109949A (en) | Photoetching method | |
JPH0611835A (ja) | パターン形成方法 | |
JPS57186329A (en) | Exposing method | |
JPS5655943A (en) | Pattern forming method | |
JPS55128831A (en) | Method of making photoresist film pattern | |
JPS57173943A (en) | Manufacture of photo mask | |
JPH07142342A (ja) | パターン形成方法及びパターン形成装置 | |
JPS6427228A (en) | Forming method for fine pattern of semiconductor element |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
RER | Ceased as to paragraph 5 lit. 3 law introducing patent treaties |