ATE378129T1 - Barrierschichten auf einem substrat enthaltenden laminat - Google Patents

Barrierschichten auf einem substrat enthaltenden laminat

Info

Publication number
ATE378129T1
ATE378129T1 AT01922271T AT01922271T ATE378129T1 AT E378129 T1 ATE378129 T1 AT E378129T1 AT 01922271 T AT01922271 T AT 01922271T AT 01922271 T AT01922271 T AT 01922271T AT E378129 T1 ATE378129 T1 AT E378129T1
Authority
AT
Austria
Prior art keywords
substrate
barrier layers
laminate containing
containing barrier
polymer
Prior art date
Application number
AT01922271T
Other languages
English (en)
Inventor
Gordon Graff
Mark Gross
Ming Shi
Michael Hall
Peter Martin
Eric Mast
Original Assignee
Battelle Memorial Institute
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Battelle Memorial Institute filed Critical Battelle Memorial Institute
Application granted granted Critical
Publication of ATE378129T1 publication Critical patent/ATE378129T1/de

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05DPROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D1/00Processes for applying liquids or other fluent materials
    • B05D1/60Deposition of organic layers from vapour phase
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B27/00Layered products comprising a layer of synthetic resin
    • B32B27/06Layered products comprising a layer of synthetic resin as the main or only constituent of a layer, which is next to another layer of the same or of a different material
    • B32B27/08Layered products comprising a layer of synthetic resin as the main or only constituent of a layer, which is next to another layer of the same or of a different material of synthetic resin
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B27/00Layered products comprising a layer of synthetic resin
    • B32B27/28Layered products comprising a layer of synthetic resin comprising synthetic resins not wholly covered by any one of the sub-groups B32B27/30 - B32B27/42
    • B32B27/281Layered products comprising a layer of synthetic resin comprising synthetic resins not wholly covered by any one of the sub-groups B32B27/30 - B32B27/42 comprising polyimides
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B27/00Layered products comprising a layer of synthetic resin
    • B32B27/28Layered products comprising a layer of synthetic resin comprising synthetic resins not wholly covered by any one of the sub-groups B32B27/30 - B32B27/42
    • B32B27/286Layered products comprising a layer of synthetic resin comprising synthetic resins not wholly covered by any one of the sub-groups B32B27/30 - B32B27/42 comprising polysulphones; polysulfides
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B27/00Layered products comprising a layer of synthetic resin
    • B32B27/32Layered products comprising a layer of synthetic resin comprising polyolefins
    • B32B27/325Layered products comprising a layer of synthetic resin comprising polyolefins comprising polycycloolefins
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B27/00Layered products comprising a layer of synthetic resin
    • B32B27/34Layered products comprising a layer of synthetic resin comprising polyamides
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B27/00Layered products comprising a layer of synthetic resin
    • B32B27/36Layered products comprising a layer of synthetic resin comprising polyesters
    • B32B27/365Layered products comprising a layer of synthetic resin comprising polyesters comprising polycarbonates
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B7/00Layered products characterised by the relation between layers; Layered products characterised by the relative orientation of features between layers, or by the relative values of a measurable parameter between layers, i.e. products comprising layers having different physical, chemical or physicochemical properties; Layered products characterised by the interconnection of layers
    • B32B7/04Interconnection of layers
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B7/00Layered products characterised by the relation between layers; Layered products characterised by the relative orientation of features between layers, or by the relative values of a measurable parameter between layers, i.e. products comprising layers having different physical, chemical or physicochemical properties; Layered products characterised by the interconnection of layers
    • B32B7/04Interconnection of layers
    • B32B7/12Interconnection of layers using interposed adhesives or interposed materials with bonding properties
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K50/00Organic light-emitting devices
    • H10K50/80Constructional details
    • H10K50/84Passivation; Containers; Encapsulations
    • H10K50/844Encapsulations
    • H10K50/8445Encapsulations multilayered coatings having a repetitive structure, e.g. having multiple organic-inorganic bilayers
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2307/00Properties of the layers or laminate
    • B32B2307/40Properties of the layers or laminate having particular optical properties
    • B32B2307/41Opaque
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2307/00Properties of the layers or laminate
    • B32B2307/40Properties of the layers or laminate having particular optical properties
    • B32B2307/412Transparent
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2307/00Properties of the layers or laminate
    • B32B2307/70Other properties
    • B32B2307/724Permeability to gases, adsorption
    • B32B2307/7242Non-permeable
    • B32B2307/7244Oxygen barrier
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2307/00Properties of the layers or laminate
    • B32B2307/70Other properties
    • B32B2307/724Permeability to gases, adsorption
    • B32B2307/7242Non-permeable
    • B32B2307/7246Water vapor barrier
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2323/00Polyalkenes
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2369/00Polycarbonates
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2377/00Polyamides
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2457/00Electrical equipment
    • B32B2457/20Displays, e.g. liquid crystal displays, plasma displays
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/80Constructional details
    • H10K59/87Passivation; Containers; Encapsulations
    • H10K59/873Encapsulations
    • H10K59/8731Encapsulations multilayered coatings having a repetitive structure, e.g. having multiple organic-inorganic bilayers
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00Stock material or miscellaneous articles
    • Y10T428/31504Composite [nonstructural laminate]
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00Stock material or miscellaneous articles
    • Y10T428/31504Composite [nonstructural laminate]
    • Y10T428/31507Of polycarbonate
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00Stock material or miscellaneous articles
    • Y10T428/31504Composite [nonstructural laminate]
    • Y10T428/31533Of polythioether
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00Stock material or miscellaneous articles
    • Y10T428/31504Composite [nonstructural laminate]
    • Y10T428/31652Of asbestos
    • Y10T428/31667Next to addition polymer from unsaturated monomers, or aldehyde or ketone condensation product
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00Stock material or miscellaneous articles
    • Y10T428/31504Composite [nonstructural laminate]
    • Y10T428/31678Of metal
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00Stock material or miscellaneous articles
    • Y10T428/31504Composite [nonstructural laminate]
    • Y10T428/31721Of polyimide
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00Stock material or miscellaneous articles
    • Y10T428/31504Composite [nonstructural laminate]
    • Y10T428/31855Of addition polymer from unsaturated monomers
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00Stock material or miscellaneous articles
    • Y10T428/31504Composite [nonstructural laminate]
    • Y10T428/31855Of addition polymer from unsaturated monomers
    • Y10T428/31935Ester, halide or nitrile of addition polymer
AT01922271T 2000-04-20 2001-03-06 Barrierschichten auf einem substrat enthaltenden laminat ATE378129T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US09/553,191 US6492026B1 (en) 2000-04-20 2000-04-20 Smoothing and barrier layers on high Tg substrates

Publications (1)

Publication Number Publication Date
ATE378129T1 true ATE378129T1 (de) 2007-11-15

Family

ID=24208472

Family Applications (1)

Application Number Title Priority Date Filing Date
AT01922271T ATE378129T1 (de) 2000-04-20 2001-03-06 Barrierschichten auf einem substrat enthaltenden laminat

Country Status (9)

Country Link
US (1) US6492026B1 (de)
EP (1) EP1284835B1 (de)
JP (3) JP2003531745A (de)
CN (1) CN100365759C (de)
AT (1) ATE378129T1 (de)
AU (1) AU2001249090A1 (de)
DE (1) DE60131390T2 (de)
TW (1) TW575615B (de)
WO (1) WO2001082336A2 (de)

Families Citing this family (101)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20040241454A1 (en) * 1993-10-04 2004-12-02 Shaw David G. Barrier sheet and method of making same
CA2353506A1 (en) 1998-11-02 2000-05-11 3M Innovative Properties Company Transparent conductive oxides for plastic flat panel displays
US6228434B1 (en) 1998-12-16 2001-05-08 Battelle Memorial Institute Method of making a conformal coating of a microtextured surface
US8853696B1 (en) 1999-06-04 2014-10-07 Semiconductor Energy Laboratory Co., Ltd. Electro-optical device and electronic device
US7198832B2 (en) 1999-10-25 2007-04-03 Vitex Systems, Inc. Method for edge sealing barrier films
US6413645B1 (en) * 2000-04-20 2002-07-02 Battelle Memorial Institute Ultrabarrier substrates
US6573652B1 (en) 1999-10-25 2003-06-03 Battelle Memorial Institute Encapsulated display devices
US20100330748A1 (en) 1999-10-25 2010-12-30 Xi Chu Method of encapsulating an environmentally sensitive device
US6866901B2 (en) 1999-10-25 2005-03-15 Vitex Systems, Inc. Method for edge sealing barrier films
US6762124B2 (en) * 2001-02-14 2004-07-13 Avery Dennison Corporation Method for patterning a multilayered conductor/substrate structure
JP4147008B2 (ja) * 2001-03-05 2008-09-10 株式会社日立製作所 有機el素子に用いるフィルム及び有機el素子
TW564471B (en) 2001-07-16 2003-12-01 Semiconductor Energy Lab Semiconductor device and peeling off method and method of manufacturing semiconductor device
JP2003109773A (ja) * 2001-07-27 2003-04-11 Semiconductor Energy Lab Co Ltd 発光装置、半導体装置およびそれらの作製方法
JP5057619B2 (ja) 2001-08-01 2012-10-24 株式会社半導体エネルギー研究所 半導体装置の作製方法
TW554398B (en) * 2001-08-10 2003-09-21 Semiconductor Energy Lab Method of peeling off and method of manufacturing semiconductor device
US7351300B2 (en) 2001-08-22 2008-04-01 Semiconductor Energy Laboratory Co., Ltd. Peeling method and method of manufacturing semiconductor device
TW594947B (en) 2001-10-30 2004-06-21 Semiconductor Energy Lab Semiconductor device and method of manufacturing the same
TWI264121B (en) * 2001-11-30 2006-10-11 Semiconductor Energy Lab A display device, a method of manufacturing a semiconductor device, and a method of manufacturing a display device
US6853785B2 (en) 2001-12-14 2005-02-08 3M Innovative Properties Co. Index modulation in glass using a femtosecond laser
JP2003282238A (ja) * 2002-03-25 2003-10-03 Pioneer Electronic Corp 有機エレクトロルミネッセンス表示パネル及び製造方法
US8900366B2 (en) 2002-04-15 2014-12-02 Samsung Display Co., Ltd. Apparatus for depositing a multilayer coating on discrete sheets
US8808457B2 (en) 2002-04-15 2014-08-19 Samsung Display Co., Ltd. Apparatus for depositing a multilayer coating on discrete sheets
US20040166335A1 (en) * 2002-08-06 2004-08-26 O'regan Marie B. Laminated polymer with integrated lighting, sensors and electronics
US6933051B2 (en) * 2002-08-17 2005-08-23 3M Innovative Properties Company Flexible electrically conductive film
US6929864B2 (en) 2002-08-17 2005-08-16 3M Innovative Properties Company Extensible, visible light-transmissive and infrared-reflective film and methods of making and using the film
US7215473B2 (en) * 2002-08-17 2007-05-08 3M Innovative Properties Company Enhanced heat mirror films
US8691371B2 (en) * 2002-09-11 2014-04-08 General Electric Company Barrier coating and method
US7015640B2 (en) 2002-09-11 2006-03-21 General Electric Company Diffusion barrier coatings having graded compositions and devices incorporating the same
US8704211B2 (en) * 2004-06-30 2014-04-22 General Electric Company High integrity protective coatings
US20040229051A1 (en) 2003-05-15 2004-11-18 General Electric Company Multilayer coating package on flexible substrates for electro-optical devices
US20050181212A1 (en) * 2004-02-17 2005-08-18 General Electric Company Composite articles having diffusion barriers and devices incorporating the same
WO2004040648A1 (ja) 2002-10-30 2004-05-13 Semiconductor Energy Laboratory Co., Ltd. 半導体装置および半導体装置の作製方法
DE10255822B4 (de) * 2002-11-29 2004-10-28 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verfahren zum Bedampfen bandförmiger Substrate mit einer transparenten Barriereschicht aus Aluminiumoxid
KR20050111311A (ko) * 2002-12-20 2005-11-24 이화이어 테크놀로지 코포레이션 후막 유전체 전자발광 디스플레이를 위한 장벽 층
US7229703B2 (en) * 2003-03-31 2007-06-12 Dai Nippon Printing Co. Ltd. Gas barrier substrate
US7018713B2 (en) 2003-04-02 2006-03-28 3M Innovative Properties Company Flexible high-temperature ultrabarrier
US7648925B2 (en) 2003-04-11 2010-01-19 Vitex Systems, Inc. Multilayer barrier stacks and methods of making multilayer barrier stacks
JP4617086B2 (ja) * 2003-09-26 2011-01-19 大日本印刷株式会社 難燃性フィルム及びそれを用いた住宅用内装材、電気製品又は印刷用フィルム
US7635525B2 (en) * 2003-09-30 2009-12-22 Fujifilm Corporation Gas barrier laminate film and method for producing the same
US7297414B2 (en) * 2003-09-30 2007-11-20 Fujifilm Corporation Gas barrier film and method for producing the same
JP4233433B2 (ja) * 2003-11-06 2009-03-04 シャープ株式会社 表示装置の製造方法
JP4313221B2 (ja) * 2004-02-17 2009-08-12 富士フイルム株式会社 ガスバリアフィルム
US20050202263A1 (en) * 2004-03-09 2005-09-15 Jonathan Sargent Barrier layer to prevent the loss of additives in an underlying layer
US20050228465A1 (en) * 2004-04-09 2005-10-13 Christa Harris Thermal device for activatable thermochemical compositions
JP2006007624A (ja) * 2004-06-28 2006-01-12 Dainippon Printing Co Ltd ガスバリア性フィルム、並びにこれを用いたディスプレイ用基板及びカラーフィルタ
KR100615229B1 (ko) * 2004-06-29 2006-08-25 삼성에스디아이 주식회사 박막 트랜지스터, 상기 박막 트랜지스터를 구비한 평판디스플레이 장치 및 상기 박막 트랜지스터의 제조방법
US20060063015A1 (en) * 2004-09-23 2006-03-23 3M Innovative Properties Company Protected polymeric film
JP4716773B2 (ja) * 2005-04-06 2011-07-06 富士フイルム株式会社 ガスバリアフィルムとそれを用いた有機デバイス
US20060240275A1 (en) * 2005-04-25 2006-10-26 Gadkaree Kishor P Flexible display substrates
US20070020451A1 (en) * 2005-07-20 2007-01-25 3M Innovative Properties Company Moisture barrier coatings
US20070040501A1 (en) 2005-08-18 2007-02-22 Aitken Bruce G Method for inhibiting oxygen and moisture degradation of a device and the resulting device
US7722929B2 (en) 2005-08-18 2010-05-25 Corning Incorporated Sealing technique for decreasing the time it takes to hermetically seal a device and the resulting hermetically sealed device
US7829147B2 (en) 2005-08-18 2010-11-09 Corning Incorporated Hermetically sealing a device without a heat treating step and the resulting hermetically sealed device
US7767498B2 (en) 2005-08-25 2010-08-03 Vitex Systems, Inc. Encapsulated devices and method of making
US20080006819A1 (en) * 2006-06-19 2008-01-10 3M Innovative Properties Company Moisture barrier coatings for organic light emitting diode devices
US7678701B2 (en) * 2006-07-31 2010-03-16 Eastman Kodak Company Flexible substrate with electronic devices formed thereon
US7977170B2 (en) * 2006-10-03 2011-07-12 Eastman Kodak Company Flexible substrate with electronic devices and traces
US8115326B2 (en) 2006-11-30 2012-02-14 Corning Incorporated Flexible substrates having a thin-film barrier
EP2125361B1 (de) 2006-12-28 2019-01-23 3M Innovative Properties Company Keimbildungsschicht zur ausbildung dünner metallschichten
BRPI0721301A2 (pt) * 2006-12-29 2014-03-25 3M Innovative Properties Co Método para cura de filmes contendo alcóxido metálico
BRPI0720867A2 (pt) * 2006-12-29 2014-03-04 3M Innovative Properties Company. Método para fabricação de filmes inorgânicos ou híbridos inorgânicos/orgânicos
US8241713B2 (en) * 2007-02-21 2012-08-14 3M Innovative Properties Company Moisture barrier coatings for organic light emitting diode devices
KR20090126273A (ko) * 2007-03-28 2009-12-08 다우 코닝 코포레이션 실리콘 및 탄소를 함유하는 장벽층의 롤투롤 플라즈마 화학 기상 증착법
JP5296343B2 (ja) * 2007-07-31 2013-09-25 住友化学株式会社 バリア層つき基板、表示素子および表示素子の製造方法
JP5162179B2 (ja) * 2007-07-31 2013-03-13 住友化学株式会社 発光素子およびその製造方法並びに照明装置
US8498464B2 (en) * 2007-09-27 2013-07-30 Siemens Medical Solutions Usa, Inc. Intrinsic co-registration for modular multimodality medical imaging systems
KR101563025B1 (ko) 2007-12-28 2015-10-23 쓰리엠 이노베이티브 프로퍼티즈 컴파니 가요성 캡슐화 필름 및 그의 제조 방법
US8800138B2 (en) * 2008-02-08 2014-08-12 Carestream Health, Inc. Method for conditioning a substrate surface for forming an electronic device thereon and resultant device
US7743492B2 (en) * 2008-02-08 2010-06-29 Carestream Health, Inc. Method for forming cast flexible substrate and resultant substrate and electronic device
US9627420B2 (en) * 2008-02-08 2017-04-18 Carestream Health, Inc. Method for forming an electronic device on a flexible substrate supported by a detachable carrier
US8350451B2 (en) 2008-06-05 2013-01-08 3M Innovative Properties Company Ultrathin transparent EMI shielding film comprising a polymer basecoat and crosslinked polymer transparent dielectric layer
WO2010002755A2 (en) 2008-06-30 2010-01-07 3M Innovative Properties Company Method of making inorganic or inorganic/organic hybrid barrier films
WO2010004944A1 (en) 2008-07-10 2010-01-14 Semiconductor Energy Laboratory Co., Ltd. Light-emitting device and electronic device using the same
JP5216716B2 (ja) 2008-08-20 2013-06-19 株式会社半導体エネルギー研究所 発光装置及びその作製方法
JP5405075B2 (ja) * 2008-09-24 2014-02-05 富士フイルム株式会社 ガスバリア膜の形成方法およびガスバリア膜
US8033885B2 (en) 2008-09-30 2011-10-11 General Electric Company System and method for applying a conformal barrier coating with pretreating
JP2010093172A (ja) * 2008-10-10 2010-04-22 Fujifilm Corp 封止デバイス
JP2011003522A (ja) 2008-10-16 2011-01-06 Semiconductor Energy Lab Co Ltd フレキシブル発光装置、電子機器及びフレキシブル発光装置の作製方法
US9337446B2 (en) 2008-12-22 2016-05-10 Samsung Display Co., Ltd. Encapsulated RGB OLEDs having enhanced optical output
US9184410B2 (en) 2008-12-22 2015-11-10 Samsung Display Co., Ltd. Encapsulated white OLEDs having enhanced optical output
US8427845B2 (en) * 2009-05-21 2013-04-23 General Electric Company Electrical connectors for optoelectronic device packaging
US20100294526A1 (en) * 2009-05-21 2010-11-25 General Electric Company Hermetic electrical package
US8450926B2 (en) 2009-05-21 2013-05-28 General Electric Company OLED lighting devices including electrodes with magnetic material
US8590338B2 (en) 2009-12-31 2013-11-26 Samsung Mobile Display Co., Ltd. Evaporator with internal restriction
JP2013516789A (ja) * 2010-01-06 2013-05-13 ダウ グローバル テクノロジーズ エルエルシー エラストマー性ポリシロキサン保護層を有する耐湿分性光電池デバイス
TWI589042B (zh) 2010-01-20 2017-06-21 半導體能源研究所股份有限公司 發光裝置,撓性發光裝置,電子裝置,照明設備,以及發光裝置和撓性發光裝置的製造方法
US9000442B2 (en) * 2010-01-20 2015-04-07 Semiconductor Energy Laboratory Co., Ltd. Light-emitting device, flexible light-emitting device, electronic device, and method for manufacturing light-emitting device and flexible-light emitting device
CN102477531B (zh) * 2010-11-26 2015-03-25 鸿富锦精密工业(深圳)有限公司 被覆件及其制造方法
CN103988578B (zh) 2011-08-04 2017-07-21 3M创新有限公司 边缘受保护的阻隔组件
JP2014526985A (ja) * 2011-08-04 2014-10-09 スリーエム イノベイティブ プロパティズ カンパニー エッジの保護されたバリアー性組立品
CN104114362B (zh) 2012-02-15 2016-09-28 柯尼卡美能达株式会社 功能性膜及其制造方法、以及含有所述功能性膜的电子器件
KR102079188B1 (ko) 2012-05-09 2020-02-19 가부시키가이샤 한도오따이 에네루기 켄큐쇼 발광 장치 및 전자 기기
WO2014129519A1 (en) 2013-02-20 2014-08-28 Semiconductor Energy Laboratory Co., Ltd. Peeling method, semiconductor device, and peeling apparatus
KR102098573B1 (ko) * 2013-07-19 2020-05-27 삼성디스플레이 주식회사 표시패널 및 그 제조방법
KR102165869B1 (ko) 2013-10-21 2020-10-15 삼성디스플레이 주식회사 봉지 부재 및 이를 포함하는 표시 장치
CN105793957B (zh) 2013-12-12 2019-05-03 株式会社半导体能源研究所 剥离方法及剥离装置
WO2016014690A1 (en) 2014-07-25 2016-01-28 Kateeva, Inc. Organic thin film ink compositions and methods
US20160056414A1 (en) * 2014-08-21 2016-02-25 Universal Display Corporation Thin film permeation barrier system for substrates and devices and method of making the same
KR20180048690A (ko) 2015-08-31 2018-05-10 카티바, 인크. 디- 및 모노(메트)아크릴레이트 기초 유기 박막 잉크 조성물
CN105552247B (zh) * 2015-12-08 2018-10-26 上海天马微电子有限公司 复合基板、柔性显示装置及其制备方法
CN111788265B (zh) 2017-04-21 2024-04-23 柯狄公司 用于形成有机薄膜的组合物和技术

Family Cites Families (84)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3475307A (en) 1965-02-04 1969-10-28 Continental Can Co Condensation of monomer vapors to increase polymerization rates in a glow discharge
FR1393629A (fr) 1965-09-13 1965-03-26 Continental Oil Co Procédé et appareil pour enduire des feuilles en matières solides
US3607365A (en) 1969-05-12 1971-09-21 Minnesota Mining & Mfg Vapor phase method of coating substrates with polymeric coating
US4098965A (en) 1977-01-24 1978-07-04 Polaroid Corporation Flat batteries and method of making the same
JPS55129345A (en) 1979-03-29 1980-10-07 Ulvac Corp Electron beam plate making method by vapor phase film formation and vapor phase development
US4581337A (en) 1983-07-07 1986-04-08 E. I. Du Pont De Nemours And Company Polyether polyamines as linking agents for particle reagents useful in immunoassays
US5032461A (en) 1983-12-19 1991-07-16 Spectrum Control, Inc. Method of making a multi-layered article
US4842893A (en) 1983-12-19 1989-06-27 Spectrum Control, Inc. High speed process for coating substrates
EP0155823B1 (de) 1984-03-21 1989-07-26 Nihon Shinku Gijutsu Kabushiki Kaisha Beschichtung von Gegenständen mit Kunststoffilmen
US4695618A (en) 1986-05-23 1987-09-22 Ameron, Inc. Solventless polyurethane spray compositions and method for applying them
US4954371A (en) 1986-06-23 1990-09-04 Spectrum Control, Inc. Flash evaporation of monomer fluids
JP2530350B2 (ja) 1986-06-23 1996-09-04 スペクトラム コントロール,インコーポレイテッド モノマ―流体のフラッシュ蒸発
JPH07105034B2 (ja) 1986-11-28 1995-11-13 株式会社日立製作所 磁気記録体
JP2627619B2 (ja) 1987-07-13 1997-07-09 日本電信電話株式会社 有機非晶質膜作製方法
US4847469A (en) 1987-07-15 1989-07-11 The Boc Group, Inc. Controlled flow vaporizer
JPH01171856A (ja) * 1987-12-26 1989-07-06 Toray Ind Inc 金属蒸着フィルム
JP2742057B2 (ja) 1988-07-14 1998-04-22 シャープ株式会社 薄膜elパネル
JPH02183230A (ja) 1989-01-09 1990-07-17 Sharp Corp 有機非線形光学材料及びその製造方法
US5189405A (en) 1989-01-26 1993-02-23 Sharp Kabushiki Kaisha Thin film electroluminescent panel
JP2678055B2 (ja) 1989-03-30 1997-11-17 シャープ株式会社 有機化合物薄膜の製法
US5792550A (en) 1989-10-24 1998-08-11 Flex Products, Inc. Barrier film having high colorless transparency and method
US5036249A (en) 1989-12-11 1991-07-30 Molex Incorporated Electroluminescent lamp panel and method of fabricating same
US5711816A (en) 1990-07-06 1998-01-27 Advanced Technolgy Materials, Inc. Source reagent liquid delivery apparatus, and chemical vapor deposition system comprising same
US5362328A (en) 1990-07-06 1994-11-08 Advanced Technology Materials, Inc. Apparatus and method for delivering reagents in vapor form to a CVD reactor, incorporating a cleaning subsystem
JP2755844B2 (ja) 1991-09-30 1998-05-25 シャープ株式会社 プラスチック基板液晶表示素子
US5372851A (en) 1991-12-16 1994-12-13 Matsushita Electric Industrial Co., Ltd. Method of manufacturing a chemically adsorbed film
US5759329A (en) 1992-01-06 1998-06-02 Pilot Industries, Inc. Fluoropolymer composite tube and method of preparation
JP2958186B2 (ja) 1992-04-20 1999-10-06 シャープ株式会社 プラスチック基板液晶表示素子
US5427638A (en) 1992-06-04 1995-06-27 Alliedsignal Inc. Low temperature reaction bonding
GB9215928D0 (en) 1992-07-27 1992-09-09 Cambridge Display Tech Ltd Manufacture of electroluminescent devices
US5260095A (en) 1992-08-21 1993-11-09 Battelle Memorial Institute Vacuum deposition and curing of liquid monomers
DE4232390A1 (de) 1992-09-26 1994-03-31 Roehm Gmbh Verfahren zum Erzeugen von siliciumoxidischen kratzfesten Schichten auf Kunststoffen durch Plasmabeschichtung
JPH06182935A (ja) 1992-12-18 1994-07-05 Bridgestone Corp ガスバリア性ゴム積層物及びその製造方法
BR9407741A (pt) 1993-10-04 1997-02-12 Catalina Coatings Inc Revestimento de acrilato
US5440446A (en) 1993-10-04 1995-08-08 Catalina Coatings, Inc. Acrylate coating material
US5654084A (en) 1994-07-22 1997-08-05 Martin Marietta Energy Systems, Inc. Protective coatings for sensitive materials
EP0733470A4 (de) * 1994-09-30 1997-08-27 Kanegafuchi Chemical Ind Laminierte hitzebeständige optische kunstoff-folie und verfahren zu ihrer herstellung
DE4438359C2 (de) 1994-10-27 2001-10-04 Schott Glas Behälter aus Kunststoff mit einer Sperrbeschichtung
US6083628A (en) 1994-11-04 2000-07-04 Sigma Laboratories Of Arizona, Inc. Hybrid polymer film
JP3204356B2 (ja) * 1994-12-14 2001-09-04 住友ベークライト株式会社 透明導電フイルム
US5607789A (en) 1995-01-23 1997-03-04 Duracell Inc. Light transparent multilayer moisture barrier for electrochemical cell tester and cell employing same
US5620524A (en) 1995-02-27 1997-04-15 Fan; Chiko Apparatus for fluid delivery in chemical vapor deposition systems
US5811183A (en) 1995-04-06 1998-09-22 Shaw; David G. Acrylate polymer release coated sheet materials and method of production thereof
US5771562A (en) 1995-05-02 1998-06-30 Motorola, Inc. Passivation of organic devices
US5554220A (en) 1995-05-19 1996-09-10 The Trustees Of Princeton University Method and apparatus using organic vapor phase deposition for the growth of organic thin films with large optical non-linearities
JPH08325713A (ja) 1995-05-30 1996-12-10 Matsushita Electric Works Ltd 有機質基材表面への金属膜形成方法
US5629389A (en) 1995-06-06 1997-05-13 Hewlett-Packard Company Polymer-based electroluminescent device with improved stability
US5714199A (en) * 1995-06-07 1998-02-03 Libbey-Owens-Ford Co. Method for applying a polymer powder onto a pre-heated glass substrate and the resulting article
CA2224780A1 (en) 1995-06-30 1997-01-23 Wojciech Stanislaw Gutowski Improved surface treatment of polymers
US5681615A (en) 1995-07-27 1997-10-28 Battelle Memorial Institute Vacuum flash evaporated polymer composites
JPH0959763A (ja) 1995-08-25 1997-03-04 Matsushita Electric Works Ltd 有機質基材表面への金属膜形成方法
JPH0957894A (ja) * 1995-08-29 1997-03-04 Fujimori Kogyo Kk 透明電極付き光学用シート
US5723219A (en) 1995-12-19 1998-03-03 Talison Research Plasma deposited film networks
DE19603746A1 (de) 1995-10-20 1997-04-24 Bosch Gmbh Robert Elektrolumineszierendes Schichtsystem
US5686360A (en) 1995-11-30 1997-11-11 Motorola Passivation of organic devices
US5811177A (en) 1995-11-30 1998-09-22 Motorola, Inc. Passivation of electroluminescent organic devices
US5684084A (en) 1995-12-21 1997-11-04 E. I. Du Pont De Nemours And Company Coating containing acrylosilane polymer to improve mar and acid etch resistance
US5955161A (en) 1996-01-30 1999-09-21 Becton Dickinson And Company Blood collection tube assembly
US5731661A (en) 1996-07-15 1998-03-24 Motorola, Inc. Passivation of electroluminescent organic devices
US5902688A (en) 1996-07-16 1999-05-11 Hewlett-Packard Company Electroluminescent display device
US5693956A (en) 1996-07-29 1997-12-02 Motorola Inverted oleds on hard plastic substrate
US5844363A (en) 1997-01-23 1998-12-01 The Trustees Of Princeton Univ. Vacuum deposited, non-polymeric flexible organic light emitting devices
US5948552A (en) 1996-08-27 1999-09-07 Hewlett-Packard Company Heat-resistant organic electroluminescent device
WO1998010116A1 (en) 1996-09-05 1998-03-12 Talison Research Ultrasonic nozzle feed for plasma deposited film networks
JPH10119170A (ja) * 1996-10-18 1998-05-12 Sumitomo Bakelite Co Ltd 可とう性積層フィルム
KR19980033213A (ko) 1996-10-31 1998-07-25 조셉제이.스위니 스퍼터링 챔버내의 미립자 물질 발생 감소 방법
US5821692A (en) 1996-11-26 1998-10-13 Motorola, Inc. Organic electroluminescent device hermetic encapsulation package
US5912069A (en) 1996-12-19 1999-06-15 Sigma Laboratories Of Arizona Metal nanolaminate composite
US5952778A (en) 1997-03-18 1999-09-14 International Business Machines Corporation Encapsulated organic light emitting device
US5872355A (en) 1997-04-09 1999-02-16 Hewlett-Packard Company Electroluminescent device and fabrication method for a light detection system
JP3290375B2 (ja) 1997-05-12 2002-06-10 松下電器産業株式会社 有機電界発光素子
US5994174A (en) * 1997-09-29 1999-11-30 The Regents Of The University Of California Method of fabrication of display pixels driven by silicon thin film transistors
US5965907A (en) 1997-09-29 1999-10-12 Motorola, Inc. Full color organic light emitting backlight device for liquid crystal display applications
US5902641A (en) 1997-09-29 1999-05-11 Battelle Memorial Institute Flash evaporation of liquid monomer particle mixture
US6224948B1 (en) 1997-09-29 2001-05-01 Battelle Memorial Institute Plasma enhanced chemical deposition with low vapor pressure compounds
EP0916394B1 (de) 1997-11-14 2004-03-10 Sharp Kabushiki Kaisha Verfahren und Einrichtung zur Hertellung von modifizierten Partikeln
JP3400324B2 (ja) * 1997-11-17 2003-04-28 住友ベークライト株式会社 導電性フィルム
US6045864A (en) 1997-12-01 2000-04-04 3M Innovative Properties Company Vapor coating method
DE19802740A1 (de) 1998-01-26 1999-07-29 Leybold Systems Gmbh Verfahren zur Behandlung von Oberflächen von Substraten aus Kunststoff
US5996498A (en) 1998-03-12 1999-12-07 Presstek, Inc. Method of lithographic imaging with reduced debris-generated performance degradation and related constructions
US5904958A (en) 1998-03-20 1999-05-18 Rexam Industries Corp. Adjustable nozzle for evaporation or organic monomers
JP4314642B2 (ja) * 1998-04-30 2009-08-19 東洋紡績株式会社 真空蒸着用材料
US6146225A (en) 1998-07-30 2000-11-14 Agilent Technologies, Inc. Transparent, flexible permeability barrier for organic electroluminescent devices
JP3577232B2 (ja) * 1999-01-22 2004-10-13 シャープ株式会社 液晶表示素子

Also Published As

Publication number Publication date
US6492026B1 (en) 2002-12-10
AU2001249090A1 (en) 2001-11-07
JP2013056546A (ja) 2013-03-28
JP5436640B2 (ja) 2014-03-05
WO2001082336A2 (en) 2001-11-01
DE60131390T2 (de) 2008-09-25
US20020176993A1 (en) 2002-11-28
WO2001082336A3 (en) 2002-12-05
EP1284835A2 (de) 2003-02-26
JP5367531B2 (ja) 2013-12-11
JP2010058516A (ja) 2010-03-18
JP2003531745A (ja) 2003-10-28
TW575615B (en) 2004-02-11
EP1284835B1 (de) 2007-11-14
DE60131390D1 (de) 2007-12-27
CN100365759C (zh) 2008-01-30
CN1636258A (zh) 2005-07-06

Similar Documents

Publication Publication Date Title
ATE378129T1 (de) Barrierschichten auf einem substrat enthaltenden laminat
WO2002067342A3 (en) Improved barrier region for optoelectronic devices
DE60309441D1 (de) Dünnfilmbeschichtung mit einer transparenten grundierungsschicht
WO2004089620A3 (en) Flexible high-temperature ultrabarrier
ATE465427T1 (de) Transparentes substrat mit einer antireflexschicht
EP1191819A3 (de) Organische Elektrolumineszenzanzeige
EP1505354A4 (de) Kochfeld
MY140302A (en) A strip tape, a packaging container having such a strip tape, and a method of producing such a strip tape
DE50007387D1 (de) Strahlungshärtbare verbundschichtplatte oder -folie
AR030365A1 (es) Estructura de multiples capas polimerica/oxido inorganico con revestimiento superior para barrera mejorada para gas o vapor y metodo para hacerla
EP1316419A3 (de) Witterungsbeständige mehrschichtige Kunststoffartikel sowie Verfahren zu ihrer Herstellung
WO2002048783A3 (en) Stacked liquid cell
TW200508026A (en) Weatherable multilayer articles and method for their preparation
WO2003073477A3 (en) Tiered structure having a multi-layered resist stack
WO2003028903A3 (en) Method for edge sealing barrier films
TWI266396B (en) Semiconductor device
PL362970A1 (en) Glazing provided with a stack of thin layers for solar protection and/or heat insulation
WO2005037545A3 (en) Multilayer articles comprising polycarbonate and polypropylene and method for their preparation
AR032867A1 (es) Pelicula termoencogible de baja tension de contraccion
ATE323735T1 (de) Durch wärme schrumpfbare polyolefin-folie
WO2004035302A3 (ja) 透明導電性ラミネート及び表示装置
WO2009078263A1 (ja) 透明導電性フィルム及びその製造方法
WO2004018198A3 (de) Polyolefin-mehrschichtfolie, ein verfahren zur herstellung dieser folie sowie ihre verwendung
EP1142703A4 (de) Verbundmaterial und verfahren zur herstellung
GB9923598D0 (en) Optical waveguide with a multi-layer core and method of fabrication thereof

Legal Events

Date Code Title Description
RER Ceased as to paragraph 5 lit. 3 law introducing patent treaties