ATE335223T1 - Vorrichtung und verfahren in zusammenhang mit der herstellung von strukturen - Google Patents

Vorrichtung und verfahren in zusammenhang mit der herstellung von strukturen

Info

Publication number
ATE335223T1
ATE335223T1 AT00983631T AT00983631T ATE335223T1 AT E335223 T1 ATE335223 T1 AT E335223T1 AT 00983631 T AT00983631 T AT 00983631T AT 00983631 T AT00983631 T AT 00983631T AT E335223 T1 ATE335223 T1 AT E335223T1
Authority
AT
Austria
Prior art keywords
main part
cavity
structures
medium
production
Prior art date
Application number
AT00983631T
Other languages
English (en)
Inventor
Babak Heidari
Original Assignee
Obducat Ab
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Obducat Ab filed Critical Obducat Ab
Application granted granted Critical
Publication of ATE335223T1 publication Critical patent/ATE335223T1/de

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/0002—Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y40/00—Manufacture or treatment of nanostructures
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41M—PRINTING, DUPLICATING, MARKING, OR COPYING PROCESSES; COLOUR PRINTING
    • B41M1/00—Inking and printing with a printer's forme
    • B41M1/06—Lithographic printing

Landscapes

  • Engineering & Computer Science (AREA)
  • Nanotechnology (AREA)
  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Theoretical Computer Science (AREA)
  • Mathematical Physics (AREA)
  • Manufacturing & Machinery (AREA)
  • Shaping Of Tube Ends By Bending Or Straightening (AREA)
  • Manufacturing Of Electrical Connectors (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Combinations Of Printed Boards (AREA)
  • Apparatuses And Processes For Manufacturing Resistors (AREA)
  • Glass Compositions (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
AT00983631T 1999-12-10 2000-12-04 Vorrichtung und verfahren in zusammenhang mit der herstellung von strukturen ATE335223T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
SE9904517A SE515607C2 (sv) 1999-12-10 1999-12-10 Anordning och metod vid tillverkning av strukturer

Publications (1)

Publication Number Publication Date
ATE335223T1 true ATE335223T1 (de) 2006-08-15

Family

ID=20418070

Family Applications (1)

Application Number Title Priority Date Filing Date
AT00983631T ATE335223T1 (de) 1999-12-10 2000-12-04 Vorrichtung und verfahren in zusammenhang mit der herstellung von strukturen

Country Status (10)

Country Link
US (1) US7195734B2 (de)
EP (1) EP1244939B1 (de)
JP (1) JP3862216B2 (de)
CN (1) CN1260615C (de)
AT (1) ATE335223T1 (de)
AU (1) AU2036201A (de)
DE (1) DE60029827T2 (de)
HK (1) HK1052750B (de)
SE (1) SE515607C2 (de)
WO (1) WO2001042858A1 (de)

Families Citing this family (153)

* Cited by examiner, † Cited by third party
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EP1244939A1 (de) 2002-10-02
AU2036201A (en) 2001-06-18
US7195734B2 (en) 2007-03-27
SE515607C2 (sv) 2001-09-10
WO2001042858A1 (en) 2001-06-14
US20030159608A1 (en) 2003-08-28
CN1260615C (zh) 2006-06-21
DE60029827T2 (de) 2007-02-22
SE9904517D0 (sv) 1999-12-10
DE60029827D1 (de) 2006-09-14
HK1052750A1 (en) 2003-09-26
HK1052750B (zh) 2006-09-22
EP1244939B1 (de) 2006-08-02
JP3862216B2 (ja) 2006-12-27
SE9904517L (sv) 2001-06-11
CN1409832A (zh) 2003-04-09
JP2003516644A (ja) 2003-05-13

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