ATE513625T1 - Lithographiedrucksystem - Google Patents
LithographiedrucksystemInfo
- Publication number
- ATE513625T1 ATE513625T1 AT07754579T AT07754579T ATE513625T1 AT E513625 T1 ATE513625 T1 AT E513625T1 AT 07754579 T AT07754579 T AT 07754579T AT 07754579 T AT07754579 T AT 07754579T AT E513625 T1 ATE513625 T1 AT E513625T1
- Authority
- AT
- Austria
- Prior art keywords
- printing system
- lithograph printing
- nano
- lithograph
- template
- Prior art date
Links
- 238000000034 method Methods 0.000 abstract 1
- 238000001127 nanoimprint lithography Methods 0.000 abstract 1
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/0002—Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C43/00—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
- B29C43/003—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor characterised by the choice of material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C59/00—Surface shaping of articles, e.g. embossing; Apparatus therefor
- B29C59/02—Surface shaping of articles, e.g. embossing; Apparatus therefor by mechanical means, e.g. pressing
- B29C59/022—Surface shaping of articles, e.g. embossing; Apparatus therefor by mechanical means, e.g. pressing characterised by the disposition or the configuration, e.g. dimensions, of the embossments or the shaping tools therefor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y40/00—Manufacture or treatment of nanostructures
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
- G03F7/70808—Construction details, e.g. housing, load-lock, seals or windows for passing light in or out of apparatus
- G03F7/70841—Constructional issues related to vacuum environment, e.g. load-lock chamber
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C43/00—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
- B29C43/02—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles
- B29C43/021—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles characterised by the shape of the surface
- B29C2043/023—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles characterised by the shape of the surface having a plurality of grooves
- B29C2043/025—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles characterised by the shape of the surface having a plurality of grooves forming a microstructure, i.e. fine patterning
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C43/00—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
- B29C43/32—Component parts, details or accessories; Auxiliary operations
- B29C43/58—Measuring, controlling or regulating
- B29C2043/5833—Measuring, controlling or regulating movement of moulds or mould parts, e.g. opening or closing, actuating
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C43/00—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
- B29C43/02—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles
- B29C43/021—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles characterised by the shape of the surface
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US78877906P | 2006-04-03 | 2006-04-03 | |
PCT/US2007/008075 WO2007123805A2 (en) | 2006-04-03 | 2007-04-02 | Lithography imprinting system |
Publications (1)
Publication Number | Publication Date |
---|---|
ATE513625T1 true ATE513625T1 (de) | 2011-07-15 |
Family
ID=38625508
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AT07754579T ATE513625T1 (de) | 2006-04-03 | 2007-04-02 | Lithographiedrucksystem |
Country Status (8)
Country | Link |
---|---|
US (1) | US7462028B2 (de) |
EP (1) | EP2001602B1 (de) |
JP (2) | JP4536148B2 (de) |
KR (1) | KR20080114681A (de) |
CN (1) | CN101405087A (de) |
AT (1) | ATE513625T1 (de) |
TW (1) | TWI432311B (de) |
WO (1) | WO2007123805A2 (de) |
Families Citing this family (76)
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US20040132301A1 (en) * | 2002-09-12 | 2004-07-08 | Harper Bruce M. | Indirect fluid pressure imprinting |
US6986815B2 (en) * | 2003-01-08 | 2006-01-17 | General Electric Company | Flow system flush process |
US6951173B1 (en) * | 2003-05-14 | 2005-10-04 | Molecular Imprints, Inc. | Assembly and method for transferring imprint lithography templates |
JP2005045168A (ja) * | 2003-07-25 | 2005-02-17 | Tokyo Electron Ltd | インプリント方法およびインプリント装置 |
JP4313109B2 (ja) * | 2003-08-01 | 2009-08-12 | 明昌機工株式会社 | 高精度プレス機 |
JP2005101201A (ja) * | 2003-09-24 | 2005-04-14 | Canon Inc | ナノインプリント装置 |
US7090716B2 (en) * | 2003-10-02 | 2006-08-15 | Molecular Imprints, Inc. | Single phase fluid imprint lithography method |
WO2005079512A2 (en) * | 2004-02-19 | 2005-09-01 | Capital One Financial Corporation | Data card |
KR100558754B1 (ko) * | 2004-02-24 | 2006-03-10 | 한국기계연구원 | Uv 나노임프린트 리소그래피 공정 및 이 공정을수행하는 장치 |
US7316554B2 (en) * | 2005-09-21 | 2008-01-08 | Molecular Imprints, Inc. | System to control an atmosphere between a body and a substrate |
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2007
- 2007-04-02 US US11/695,263 patent/US7462028B2/en active Active
- 2007-04-02 AT AT07754579T patent/ATE513625T1/de not_active IP Right Cessation
- 2007-04-02 CN CNA2007800099833A patent/CN101405087A/zh active Pending
- 2007-04-02 EP EP07754579A patent/EP2001602B1/de active Active
- 2007-04-02 JP JP2009504231A patent/JP4536148B2/ja active Active
- 2007-04-02 WO PCT/US2007/008075 patent/WO2007123805A2/en active Application Filing
- 2007-04-02 KR KR1020087017591A patent/KR20080114681A/ko not_active Application Discontinuation
- 2007-04-03 TW TW096111836A patent/TWI432311B/zh active
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Also Published As
Publication number | Publication date |
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TWI432311B (zh) | 2014-04-01 |
EP2001602B1 (de) | 2011-06-22 |
CN101405087A (zh) | 2009-04-08 |
EP2001602A2 (de) | 2008-12-17 |
TW200744830A (en) | 2007-12-16 |
JP2010179655A (ja) | 2010-08-19 |
US7462028B2 (en) | 2008-12-09 |
WO2007123805A3 (en) | 2007-12-27 |
JP4536148B2 (ja) | 2010-09-01 |
WO2007123805A2 (en) | 2007-11-01 |
JP4917159B2 (ja) | 2012-04-18 |
KR20080114681A (ko) | 2008-12-31 |
EP2001602A4 (de) | 2009-04-01 |
US20070275114A1 (en) | 2007-11-29 |
JP2009532245A (ja) | 2009-09-10 |
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