SE9904517D0 - Anordning och metod vid tillverkning av strukturer - Google Patents

Anordning och metod vid tillverkning av strukturer

Info

Publication number
SE9904517D0
SE9904517D0 SE9904517A SE9904517A SE9904517D0 SE 9904517 D0 SE9904517 D0 SE 9904517D0 SE 9904517 A SE9904517 A SE 9904517A SE 9904517 A SE9904517 A SE 9904517A SE 9904517 D0 SE9904517 D0 SE 9904517D0
Authority
SE
Sweden
Prior art keywords
main part
cavity
structures
medium
another
Prior art date
Application number
SE9904517A
Other languages
English (en)
Other versions
SE9904517L (sv
SE515607C2 (sv
Inventor
Babak Heidari
Original Assignee
Babak Heidari
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Babak Heidari filed Critical Babak Heidari
Priority to SE9904517A priority Critical patent/SE515607C2/sv
Publication of SE9904517D0 publication Critical patent/SE9904517D0/sv
Priority to AT00983631T priority patent/ATE335223T1/de
Priority to CNB008169896A priority patent/CN1260615C/zh
Priority to US10/149,072 priority patent/US7195734B2/en
Priority to AU20362/01A priority patent/AU2036201A/en
Priority to DE60029827T priority patent/DE60029827T2/de
Priority to JP2001544087A priority patent/JP3862216B2/ja
Priority to EP00983631A priority patent/EP1244939B1/en
Priority to PCT/SE2000/002417 priority patent/WO2001042858A1/en
Publication of SE9904517L publication Critical patent/SE9904517L/sv
Publication of SE515607C2 publication Critical patent/SE515607C2/sv
Priority to HK03104958.9A priority patent/HK1052750B/zh

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/0002—Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y40/00—Manufacture or treatment of nanostructures
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41M—PRINTING, DUPLICATING, MARKING, OR COPYING PROCESSES; COLOUR PRINTING
    • B41M1/00—Inking and printing with a printer's forme
    • B41M1/06—Lithographic printing
SE9904517A 1999-12-10 1999-12-10 Anordning och metod vid tillverkning av strukturer SE515607C2 (sv)

Priority Applications (10)

Application Number Priority Date Filing Date Title
SE9904517A SE515607C2 (sv) 1999-12-10 1999-12-10 Anordning och metod vid tillverkning av strukturer
PCT/SE2000/002417 WO2001042858A1 (en) 1999-12-10 2000-12-04 Device and method in connection with the production of structures
AU20362/01A AU2036201A (en) 1999-12-10 2000-12-04 Device and method in connection with the production of structures
CNB008169896A CN1260615C (zh) 1999-12-10 2000-12-04 用于纹理制作的装置与方法
US10/149,072 US7195734B2 (en) 1999-12-10 2000-12-04 Device and method in connection with the production of structures
AT00983631T ATE335223T1 (de) 1999-12-10 2000-12-04 Vorrichtung und verfahren in zusammenhang mit der herstellung von strukturen
DE60029827T DE60029827T2 (de) 1999-12-10 2000-12-04 Vorrichtung und verfahren in zusammenhang mit der herstellung von strukturen
JP2001544087A JP3862216B2 (ja) 1999-12-10 2000-12-04 構造物の製造に関する装置および方法
EP00983631A EP1244939B1 (en) 1999-12-10 2000-12-04 Device and method in connection with the production of structures
HK03104958.9A HK1052750B (zh) 1999-12-10 2003-07-09 用於紋理製作的裝置與方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
SE9904517A SE515607C2 (sv) 1999-12-10 1999-12-10 Anordning och metod vid tillverkning av strukturer

Publications (3)

Publication Number Publication Date
SE9904517D0 true SE9904517D0 (sv) 1999-12-10
SE9904517L SE9904517L (sv) 2001-06-11
SE515607C2 SE515607C2 (sv) 2001-09-10

Family

ID=20418070

Family Applications (1)

Application Number Title Priority Date Filing Date
SE9904517A SE515607C2 (sv) 1999-12-10 1999-12-10 Anordning och metod vid tillverkning av strukturer

Country Status (10)

Country Link
US (1) US7195734B2 (sv)
EP (1) EP1244939B1 (sv)
JP (1) JP3862216B2 (sv)
CN (1) CN1260615C (sv)
AT (1) ATE335223T1 (sv)
AU (1) AU2036201A (sv)
DE (1) DE60029827T2 (sv)
HK (1) HK1052750B (sv)
SE (1) SE515607C2 (sv)
WO (1) WO2001042858A1 (sv)

Families Citing this family (153)

* Cited by examiner, † Cited by third party
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WO2001042858A1 (en) 2001-06-14
ATE335223T1 (de) 2006-08-15
EP1244939B1 (en) 2006-08-02
DE60029827T2 (de) 2007-02-22
CN1409832A (zh) 2003-04-09
JP3862216B2 (ja) 2006-12-27
DE60029827D1 (de) 2006-09-14
US7195734B2 (en) 2007-03-27
US20030159608A1 (en) 2003-08-28
EP1244939A1 (en) 2002-10-02
HK1052750B (zh) 2006-09-22
AU2036201A (en) 2001-06-18

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