WO2022185467A1 - 塗布装置及び塗布方法 - Google Patents

塗布装置及び塗布方法 Download PDF

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Publication number
WO2022185467A1
WO2022185467A1 PCT/JP2021/008371 JP2021008371W WO2022185467A1 WO 2022185467 A1 WO2022185467 A1 WO 2022185467A1 JP 2021008371 W JP2021008371 W JP 2021008371W WO 2022185467 A1 WO2022185467 A1 WO 2022185467A1
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WO
WIPO (PCT)
Prior art keywords
coating
nozzles
coated
bar
coating device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2021/008371
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English (en)
French (fr)
Japanese (ja)
Inventor
直美 信田
勝之 内藤
穣 齊田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Toshiba Energy Systems and Solutions Corp
Original Assignee
Toshiba Corp
Toshiba Energy Systems and Solutions Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Toshiba Energy Systems and Solutions Corp filed Critical Toshiba Corp
Priority to PCT/JP2021/008371 priority Critical patent/WO2022185467A1/ja
Priority to EP21925103.0A priority patent/EP4302882A4/en
Priority to JP2022548670A priority patent/JP7362936B2/ja
Priority to CN202180016238.1A priority patent/CN115315318B/zh
Priority to US17/819,378 priority patent/US12420304B2/en
Publication of WO2022185467A1 publication Critical patent/WO2022185467A1/ja
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D1/00—Processes for applying liquids or other fluent materials
    • B05D1/26—Processes for applying liquids or other fluent materials performed by applying the liquid or other fluent material from an outlet device in contact with, or almost in contact with, the surface
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
    • B05C11/02—Apparatus for spreading or distributing liquids or other fluent materials already applied to a surface ; Controlling means therefor; Control of the thickness of a coating by spreading or distributing liquids or other fluent materials already applied to the coated surface
    • B05C11/021—Apparatus for spreading or distributing liquids or other fluent materials already applied to the surface of an elongated body, e.g. a wire, a tube
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C13/00—Means for manipulating or holding work, e.g. for separate articles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
    • B05C5/02—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
    • B05C5/027—Coating heads with several outlets, e.g. aligned transversally to the moving direction of a web to be coated
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C9/00—Apparatus or plant for applying liquid or other fluent material to surfaces by means not covered by any preceding group, or in which the means of applying the liquid or other fluent material is not important
    • B05C9/02—Apparatus or plant for applying liquid or other fluent material to surfaces by means not covered by any preceding group, or in which the means of applying the liquid or other fluent material is not important for applying liquid or other fluent material to surfaces by single means not covered by groups B05C1/00 - B05C7/00, whether or not also using other means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D1/00—Processes for applying liquids or other fluent materials
    • B05D1/28—Processes for applying liquids or other fluent materials performed by transfer from the surfaces of elements carrying the liquid or other fluent material, e.g. brushes, pads, rollers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D1/00—Processes for applying liquids or other fluent materials
    • B05D1/40—Distributing applied liquids or other fluent materials by members moving relatively to surface
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C1/00—Apparatus in which liquid or other fluent material is applied to the surface of the work by contact with a member carrying the liquid or other fluent material, e.g. a porous member loaded with a liquid to be applied as a coating
    • B05C1/04—Apparatus in which liquid or other fluent material is applied to the surface of the work by contact with a member carrying the liquid or other fluent material, e.g. a porous member loaded with a liquid to be applied as a coating for applying liquid or other fluent material to work of indefinite length
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C1/00—Apparatus in which liquid or other fluent material is applied to the surface of the work by contact with a member carrying the liquid or other fluent material, e.g. a porous member loaded with a liquid to be applied as a coating
    • B05C1/04—Apparatus in which liquid or other fluent material is applied to the surface of the work by contact with a member carrying the liquid or other fluent material, e.g. a porous member loaded with a liquid to be applied as a coating for applying liquid or other fluent material to work of indefinite length
    • B05C1/08—Apparatus in which liquid or other fluent material is applied to the surface of the work by contact with a member carrying the liquid or other fluent material, e.g. a porous member loaded with a liquid to be applied as a coating for applying liquid or other fluent material to work of indefinite length using a roller or other rotating member which contacts the work along a generating line
    • B05C1/0804—Apparatus in which liquid or other fluent material is applied to the surface of the work by contact with a member carrying the liquid or other fluent material, e.g. a porous member loaded with a liquid to be applied as a coating for applying liquid or other fluent material to work of indefinite length using a roller or other rotating member which contacts the work along a generating line the material being applied without contact with the roller
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D2201/00—Polymeric substrate or laminate
    • B05D2201/02—Polymeric substrate
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D2252/00—Sheets
    • B05D2252/02—Sheets of indefinite length
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D7/00—Processes, other than flocking, specially adapted for applying liquids or other fluent materials to particular surfaces or for applying particular liquids or other fluent materials
    • B05D7/02—Processes, other than flocking, specially adapted for applying liquids or other fluent materials to particular surfaces or for applying particular liquids or other fluent materials to macromolecular substances, e.g. rubber
    • B05D7/04—Processes, other than flocking, specially adapted for applying liquids or other fluent materials to particular surfaces or for applying particular liquids or other fluent materials to macromolecular substances, e.g. rubber to surfaces of films or sheets

Definitions

  • An embodiment of the present invention relates to a coating device and a coating method.
  • a coating device that applies liquid using a coating bar.
  • a coating apparatus capable of forming a uniform coating film is desired.
  • the embodiment of the present invention provides a coating device and a coating method capable of forming a uniform coating film.
  • a coating device includes a coating bar that can face a member to be coated, and a plurality of nozzles that can supply liquid toward the coating bar.
  • the number of the plurality of nozzles is 3 or more.
  • At least part of the surface of the coating bar has an arithmetic mean roughness Ra of 0.5 ⁇ m or more and 10 ⁇ m or less.
  • FIGS. 1(a) and 1(b) are schematic diagrams illustrating the coating apparatus according to the first embodiment.
  • FIG. 2 is a schematic side view illustrating the coating device according to the first embodiment.
  • 3(a) and 3(b) are graphs illustrating characteristics of the coating apparatus.
  • FIG. 4 is a schematic diagram illustrating the coating device according to the first embodiment.
  • FIG. 5 is a schematic diagram illustrating the coating device according to the first embodiment.
  • FIGS. 1(a) and 1(b) are schematic diagrams illustrating the coating apparatus according to the first embodiment.
  • FIG. 1(a) is a top view.
  • FIG. 1(b) is a side view. In FIG. 1(b), some elements are omitted to make the drawing easier to see.
  • FIG. 2 is a schematic side view illustrating the coating device according to the first embodiment.
  • a coating device 110 includes a coating bar 10 and multiple nozzles 21 .
  • a plurality of nozzles 21 may be included in the nozzle portion 20 .
  • the coating bar 10 can face the member 80 to be coated.
  • the plurality of nozzles 21 can face the coating bar 10. As shown in FIG. As shown in FIG. 2 , multiple nozzles 21 can supply liquid 84 toward coating bar 10 .
  • the plurality of nozzles 21 are arranged along the first direction.
  • the first direction is, for example, the Y-axis direction.
  • One direction perpendicular to the Y-axis direction is defined as the X-axis direction.
  • a direction perpendicular to the Y-axis direction and the X-axis direction is defined as the Z-axis direction.
  • the application bar 10 extends, for example, along the Y-axis direction.
  • a meniscus 84M of the liquid 84 can be formed between the member 80 to be coated and the coating bar 10.
  • a coating film 85 of the liquid 84 is formed on the member 80 to be coated by the meniscus 84 ⁇ /b>M coming into contact with the member 80 to be coated.
  • solidifying eg, drying
  • a desired film solid film
  • the number of multiple nozzles 21 is 3 or more. Thereby, the coating film 85 having a large area can be stably formed.
  • the number of nozzles 21 is six. In embodiments, the number may be any integer greater than or equal to three.
  • the surface 10F of the coating bar 10 is provided with unevenness.
  • the unevenness can be formed by a technique such as sandblasting, for example.
  • the arithmetic mean roughness Ra of the unevenness can be controlled by controlling the conditions for forming the unevenness.
  • the maximum height Rz of the unevenness can be controlled.
  • conditions for forming irregularities include, for example, at least one of the size of particles used (for example, average diameter), the type of particles, and the treatment time.
  • the arithmetic mean roughness Ra of the surface 10F of the coating bar 10 is, for example, 0.5 ⁇ m or more and 10 ⁇ m or less. It has been found that this can reduce unevenness in the thickness of the coating film 85 to be formed.
  • the surface 10F of the coating bar 10 is provided with unevenness having an appropriate roughness, thereby improving the wettability of the surface 10F. This is considered to be the reason why the coating film 85 having a uniform thickness can be easily obtained.
  • FIG. 3(a) and 3(b) are graphs illustrating characteristics of the coating apparatus.
  • the horizontal axis of FIG. 3(a) is the arithmetic mean roughness Ra of the surface 10F of the coating bar 10.
  • the horizontal axis of FIG. 3B is the maximum height Rz of the irregularities on the surface 10F of the coating bar 10.
  • the vertical axis of these figures is the thickness unevenness Dz of the solid film obtained by the coating film 85 .
  • the thickness unevenness Dz is the relative standard deviation (%).
  • small thickness unevenness Dz is obtained when the arithmetic mean roughness Ra is in the range of approximately 3 ⁇ m or more and approximately 8 ⁇ m or less. Practically, when the arithmetic mean roughness Ra is 0.5 ⁇ m or more and 10 ⁇ m or less, a small thickness unevenness Dz is obtained. When the arithmetic mean roughness Ra is less than 0.5 ⁇ m, the thickness unevenness Dz is large. If the arithmetic mean roughness Ra is greater than 10 ⁇ m, the coating bar 10 will easily become dirty. If the arithmetic mean roughness Ra is greater than 10 ⁇ m, cleaning the coating bar 10 becomes difficult. Arithmetic mean roughness Ra is, for example, preferably 2 ⁇ m or more and 6 ⁇ m or less.
  • the tips of the two nozzles 21 are on one straight line.
  • This straight line is, for example, along the direction in which the application bar 10 extends.
  • the relative positions between each of the two nozzles 21 and the coating bar 10 are easy to make uniform. Therefore, the appropriate range of the degree of unevenness (for example, the arithmetic mean roughness Ra) of the surface 10F of the coating bar 10 is relatively wide.
  • the number of multiple nozzles 21 is 3 or more. Thereby, a coating film 85 having a large area is obtained.
  • the number of the plurality of nozzles 21 is 3 or more, it becomes difficult to uniform the relative positions between each of the plurality of nozzles 21 and the coating bar 10 .
  • the thickness unevenness Dz can be effectively reduced by the arithmetic mean roughness Ra within an appropriate range.
  • a film of the liquid 84 can be stably formed on the surface of the coating bar 10 by, for example, a capillary effect with the arithmetic mean roughness Ra within an appropriate range. It is believed that this results in a small thickness unevenness Dz.
  • a small thickness unevenness Dz is obtained in the range where the maximum height Rz is approximately 10 ⁇ m or more and approximately 30 ⁇ m or less. Practically, when the maximum height Rz is 5 ⁇ m or more and 50 ⁇ m or less, a small thickness unevenness Dz is obtained. If the maximum height Rz is less than 5 ⁇ m, for example, the capillary effect tends to be small. If the maximum height Rz is greater than 50 ⁇ m, for example, the coating bar 10 is likely to be contaminated. If the maximum height Rz is greater than 50 ⁇ m, for example, the coated member 80 is likely to be damaged.
  • the unevenness of the coating bar 10 may be formed by sandblasting, for example.
  • Sandblasting can form uniform unevenness on the curved surface of the coating bar 10 .
  • oxidation of the surface 10F of the coating bar 10 is promoted.
  • the application bar 10 contains metal, for example.
  • the coating bar 10 includes, for example, at least one selected from the group consisting of stainless steel, titanium and aluminum. If the applicator bar 10 comprises stainless steel, high durability is likely to be obtained. If the applicator bar 10 comprises stainless steel, it is easier to keep costs down.
  • the surface 10F of the coating bar 10 may contain oxide.
  • Surface 10F may include, for example, aluminum oxide. For example, it becomes easier to obtain good wettability.
  • the contact angle of water on the surface 10F of the application bar 10 is, for example, less than 90 degrees.
  • the highly hydrophilic surface 10F makes it easier to obtain a more uniform coating film 85 .
  • the contact angle may be 50 degrees or less.
  • the contact angle may be 10 degrees or less.
  • the plurality of nozzles 21 may be in contact with the application bar 10.
  • the positions of at least some of the plurality of nozzles 21 are higher than the position of the coating bar 10 .
  • the influence of gravity makes it easier to obtain a more stable meniscus 84M.
  • multiple nozzles 21 may contact the coating bar 10 from above the coating bar 10 .
  • the surface 10F of the coating bar 10 includes a first area 10a, a second area 10b and a third area 10c.
  • the first region 10a is located between the second region 10b and the third region 10c in the first direction (eg, Y-axis direction) in which the plurality of nozzles 21 are arranged.
  • the first area 10 a is an area facing the plurality of nozzles 21 .
  • the second area 10b and the third area 10c are areas that do not face the plurality of nozzles 21 .
  • the second region 10b and the third region 10c may include, for example, the ends of the coating bar 10 in the Y-axis direction.
  • the arithmetic mean roughness Ra in the first region 10a is 0.5 ⁇ m or more and 10 ⁇ m or less.
  • the arithmetic mean roughness Ra in the second region 10b and the third region 10c is less than 0.5 ⁇ m or greater than 10 ⁇ m.
  • a small thickness unevenness Dz can be obtained by appropriately setting the arithmetic mean roughness Ra in the first region 10a used for coating. For example, in the second region 10b and the third region 10c corresponding to the edge, surface characteristics different from the arithmetic mean roughness Ra in the first region 10a are applied. This can prevent the liquid 84 from adhering to unnecessary portions. The usage efficiency of the liquid 84 is improved.
  • the plurality of nozzles 21 are connected to the base 22 in this example.
  • a supply pipe 25 is connected to the base 22 .
  • a liquid 84 is supplied to the base 22 via the supply pipe 25 .
  • a liquid 84 is discharged from a plurality of nozzles 21 .
  • the nozzle 21 is held by the first member 31 and the third member 33 in this example.
  • a nozzle 21 is positioned between the first member 31 and the third member 33 .
  • the third member 33 is fixed to the first member 31 by the second member 32 .
  • an elastic member 35 is provided between the third member 33 and the second member 32 .
  • the elastic member 35 facilitates stabilizing the positions of the plurality of nozzles 21 .
  • the nozzle portion 20 , the first member 31 , the second member 32 , the third member 33 and the elastic member 35 may be included in the head portion 30 .
  • the configuration for holding the plurality of nozzles 21 may be modified variously.
  • the coating device 110 may include a position control section 40 .
  • the position control unit 40 can control relative positions between the plurality of nozzles 21 and the application bar 10 .
  • the position control section 40 may include a first holding section 41 and a second holding section 42, as shown in FIGS. 1(a) and 1(b).
  • the first holding part 41 holds the application bar 10 .
  • the second holding portion 42 holds the plurality of nozzles 21 .
  • the first member 31 is held by the second holding portion 42 .
  • the plurality of nozzles 21 held by the first member 31 are held by the second holding portion 42 .
  • At least one of the first holding portion 41 and the second holding portion 42 applies stress having at least one of the direction from the application bar 10 to the plurality of nozzles 21 and the direction from the plurality of nozzles 21 to the application bar 10. , the application bar 10 and/or the plurality of nozzles 21 .
  • the intervals between the multiple nozzles 21 may be variable.
  • the interval corresponds to the distance along the Y-axis direction illustrated in FIG. 1(a).
  • the coating device 110 may include first sensors 51a and 51b.
  • the first sensors 51a and 51b detect, for example, the distance between the coating bar 10 and the member 80 to be coated.
  • the coating device 110 may include a control section 70.
  • the control unit 70 obtains, for example, detection results from the first sensors 51a and 51b, and controls the position control unit 40 (for example, the first holding unit 41) based on the detection results.
  • the controller 70 appropriately controls the distance between the coating bar 10 and the member 80 to be coated.
  • the first sensors 51a and 51b include, for example, optical elements.
  • the first sensors 51a and 51b may include cameras, for example.
  • the coating device 110 may include a coated member holding portion 66.
  • the coated member holding part 66 holds the coated member 80 .
  • the coated member holding portion 66 can move the coated member 80 relative to the coating bar 10 .
  • the coated member holding section 66 is, for example, a conveying section.
  • the coated member holding portion 66 is, for example, a roller.
  • the member-to-be-coated holder 66 can convey the member-to-be-coated 80 along the direction crossing the direction of the gravity GD.
  • the direction of gravity GD is, for example, along the Z-axis direction.
  • the intersecting direction is, for example, the X-axis direction.
  • the transport direction (movement direction 88) is along the horizontal direction.
  • the extending direction of the plurality of nozzles 21 is, for example, close to the horizontal direction. Alignment is easy. For example, dripping of the liquid 84 can be suppressed.
  • FIG. 4 is a schematic diagram illustrating the coating device according to the first embodiment.
  • the coating device 110 includes a coated member holding portion 66 .
  • the coated member holding part 66 holds the coated member 80 .
  • the coated member holding portion 66 moves the coated member 80 relative to the coating bar 10 .
  • the member-to-be-coated holder 66 can convey the member-to-be-coated 80 in a direction 88a including a component opposite to the direction of the gravity GD.
  • gravity is applied to the meniscus 84M.
  • a uniform coating film 85 can be easily obtained even in high-speed coating.
  • the moving direction of the coated member 80 can be changed in various ways.
  • the angle between the direction of movement and the orientation (direction) of gravity may be ⁇ 30° or less, for example.
  • the coating device 110 may include a supply section 61.
  • the supply unit 61 can supply the liquid 84 to the multiple nozzles 21 .
  • the supply unit 61 includes, for example, a pump 61p.
  • a tank 65 is provided in which liquid 84 is stored.
  • Supply unit 61 is connected to tank 65 .
  • the supply part 61 is connected to the plurality of nozzles 21 by the supply pipes 25 .
  • a liquid 84 is supplied from the supply portion 61 to the plurality of nozzles 21 .
  • a liquid 84 is supplied from a plurality of nozzles 21 toward the coating bar 10 .
  • the supply unit 61 may include a plurality of pumps 61p.
  • the number of nozzles 21 is, for example, an integral multiple of the number of pumps 61p.
  • the number of nozzles 21 may be 12 or more.
  • the number of nozzles 21 is, for example, 12, 16, or 20.
  • the supply pipe 25 connecting the pump 61p and the plurality of nozzles 21 may have a branched structure.
  • the number of supply pipes 25 is, for example, 2, 4, or 8.
  • the liquid 84 can be stably and uniformly supplied with a small number of pumps 61p.
  • the pump 61p may include, for example, a diaphragm pump.
  • the diaphragm pump is applicable to liquids 84 containing various solvents.
  • FIG. 5 is a schematic diagram illustrating the coating device according to the first embodiment.
  • the coated member holding section 66 includes a first holding mechanism 66a and a second holding mechanism 66b.
  • the coated member 80 includes a roll film.
  • the first holding mechanism 66a holds the first portion 80a of the roll film (coated member 80).
  • the second holding mechanism 66b holds the second portion 80b of the roll film (coated member 80).
  • the first holding mechanism 66a and the second holding mechanism 66b are rollers, for example. Continuous application to roll film is possible.
  • At least a portion of the cross section of the coating bar 10 in a plane (for example, the XZ plane) intersecting the first direction (Y-axis direction) in which the plurality of nozzles 21 are arranged may be circular.
  • the cross section may be circular, elliptical, or trapezoidal.
  • a circular cross-section simplifies the manufacturing of the application head. When the cross section is circular, it is easy to maintain a uniform distance between the member to be coated 80 and the coating bar 10 .
  • a part of the cross section may be curved and the other part of the cross section may be straight.
  • the plurality of nozzles 21 may be needle-shaped. In acicular, the length is longer than the diameter.
  • the openings of the plurality of nozzles 21 may be substantially 90 degrees with respect to the extending direction of the plurality of nozzles 21 . In this case, even when the plurality of nozzles 21 rotate, the relative positional relationship between the openings (tips) of the plurality of nozzles 21 and the application bar 10 is less likely to change. For example, damage to the coating bar 10 caused by at least one of the plurality of nozzles 21 can be easily suppressed.
  • the length of the plurality of nozzles 21 may be, for example, 2 cm or more and 10 cm or less.
  • the inner diameters of the plurality of nozzles 21 are, for example, 0.2 or more and 2 mm or less.
  • a recovery unit that recovers the liquid 84 may be provided.
  • a drying section capable of solidifying the coating film 85 may be provided.
  • the drying section may include, for example, a heater, a blower, or an infrared irradiation section.
  • a cleaning section capable of cleaning the coating bar 10 may be provided.
  • the cleaning section may include a mechanism for spraying or projecting the solvent.
  • Solvents may include, for example, water.
  • the cleaning unit may include a mechanism for applying ultrasonic waves.
  • a film included in a solar cell may be formed by the coating device according to the embodiment.
  • the coated member 80 may be a rolled film.
  • the coated member 80 was a roll of PET film.
  • the width (length in the Y-axis direction) of the PET film is 300 mm.
  • a roll-to-roll sputtering apparatus forms a light-transmissive conductive film on a roll-shaped film.
  • the conductive film is a laminated film of ITO/Ag alloy/ITO.
  • the conductive film is patterned into a desired shape.
  • the length of one of the multiple nozzles 21 is about 50 mm.
  • the plurality of nozzles 21 comprises stainless steel.
  • Each inner diameter of the plurality of nozzles 21 is 0.8 mm.
  • a plurality of nozzles 21 are fixed to the first member 31 by the second member 32 using the third member 33 and the elastic member 35 .
  • a supply pipe 25 is connected to the bases 22 of the plurality of nozzles 21 .
  • a PEDOT/PSS aqueous dispersion is used as the liquid 84 in the experiment. From this liquid 84, for example, a hole transport layer of a solar cell can be produced.
  • the cross-sectional shape of the application bar 10 is substantially trapezoidal.
  • the cross-sectional bottom of the application bar 10 is arcuate with a curvature of 80 mm.
  • the length of the application bar 10 in the Y-axis direction is 300 mm.
  • the material of the application bar 10 is SUS303.
  • the bottom surface of the coating bar 10 and the surface next to the bottom surface are sandblasted.
  • unevenness is formed on the surface 10F of the application bar 10 .
  • the surface 10F of the coating bar 10 can have various properties.
  • various unevennesses can be formed on the surface 10F by various surface treatments.
  • the liquid 84 is applied using the application bar 10 under various conditions. Thereby, the coating film 85 is obtained.
  • the coating film 85 is dried to obtain the desired film.
  • the thickness unevenness Dz is evaluated from the absorbance distribution of the film.
  • the surface 10F of the coating bar 10 has an arithmetic mean roughness Ra of 3.2 ⁇ m.
  • the maximum height Rz of the unevenness is 20 ⁇ m.
  • Surface 10F is visually uniform.
  • the contact angle with water is about 5 degrees.
  • the thickness unevenness Dz is 10% or less.
  • the surface of the coating bar 10 is not sandblasted.
  • the arithmetic mean roughness Ra is 0.4 ⁇ m.
  • the maximum height Rz of the unevenness is 10 ⁇ m.
  • the thickness unevenness Dz is 20% or more.
  • the arithmetic mean roughness Ra is 12 ⁇ m.
  • the maximum height Rz of the unevenness is 70 ⁇ m.
  • the thickness unevenness Dz is 15% or more.
  • the coating bar 10 is easily contaminated and difficult to clean.
  • the arithmetic mean roughness Ra is 0.006 ⁇ m.
  • the maximum height Rz of the unevenness is 10 ⁇ m.
  • the thickness unevenness Dz is 30% or more.
  • the arithmetic mean roughness Ra is 4.3 ⁇ m.
  • the maximum height Rz of the unevenness is 25 ⁇ m.
  • the thickness unevenness Dz is 10% or less.
  • the material of the coating bar 10 is stainless steel.
  • the material of the coating bar 10 is aluminum.
  • the arithmetic mean roughness Ra is 8 ⁇ m.
  • the maximum height Rz of the unevenness is 30 ⁇ m.
  • the thickness unevenness Dz is 12% or less.
  • the second embodiment relates to a coating method.
  • the liquid 84 is applied to the coated member 80 by any coating device according to the first embodiment.
  • a uniform coating film 85 can be formed.
  • a low-cost solar cell can be obtained by forming a layer included in the solar cell by coating.
  • a roll-to-roll application provides a uniform coating.
  • a meniscus 84M is formed between the coating bar 10 and the member 80 to be coated.
  • a uniform coating film 85 can be obtained by the coating bar 10 having an appropriate surface condition.
  • Embodiments may include the following configurations (for example, technical proposals).
  • (Configuration 1) a coating bar that can face the member to be coated; a plurality of nozzles capable of supplying liquid toward the coating bar; with The number of the plurality of nozzles is 3 or more, The coating device, wherein at least a portion of the surface of the coating bar has an arithmetic mean roughness Ra of 0.5 ⁇ m or more and 10 ⁇ m or less.
  • composition 3 The coating device according to configuration 1 or 2, wherein the coating bar includes at least one selected from the group consisting of stainless steel, titanium and aluminum.
  • composition 4 The coating device according to any one of configurations 1-3, wherein the surface comprises an oxide.
  • composition 5 The coating device according to any one of configurations 1 to 4, wherein the surface has a contact angle with water of less than 90 degrees.
  • composition 6 The coating device according to any one of configurations 1 to 5, wherein a meniscus of the liquid can be formed between the member to be coated and the coating bar.
  • composition 7 The coating device according to any one of configurations 1 to 6, wherein the plurality of nozzles are in contact with the coating bar.
  • composition 8 The coating device according to any one of configurations 1 to 7, wherein at least some of the plurality of nozzles are positioned higher than the coating bar.
  • composition 9 further comprising a member-to-be-coated holding portion that holds the member to be coated and is capable of moving the member to be coated relative to the coating bar;
  • the coating apparatus according to any one of configurations 1 to 8, wherein the member-to-be-coated holding section can convey the member to be coated in a direction including a component opposite to the direction of gravity.
  • (Configuration 10) further comprising a member-to-be-coated holding portion that holds the member to be coated and is capable of moving the member to be coated relative to the coating bar;
  • the coating apparatus according to any one of configurations 1 to 8, wherein the member-to-be-coated holder is capable of conveying the member to be coated along a first direction intersecting with the direction of gravity.
  • the member to be coated includes a roll film,
  • the coated member holding part is a first holding mechanism that holds the first portion of the roll-shaped film;
  • a second holding mechanism for holding a second portion of the roll-shaped film;
  • composition 12 12.
  • composition 13 The supply unit includes a plurality of pumps, 13.
  • composition 14 14. The coating device according to any one of configurations 1 to 13, wherein the number of the plurality of nozzles is 12 or more.
  • composition 15 The coating device according to any one of configurations 1 to 14, wherein a cross section of at least part of the coating bar in a plane intersecting the first direction in which the plurality of nozzles are arranged is circular.
  • composition 16 the surface includes a first region, a second region and a third region; the first region is between the second region and the third region in the first direction in which the plurality of nozzles are arranged;
  • the arithmetic mean roughness Ra in the first region is 0.5 ⁇ m or more and 10 ⁇ m or less, 16.
  • the coating apparatus according to any one of configurations 1 to 15, wherein the arithmetic mean roughness Ra in the second region and the third region is less than 0.5 ⁇ m or greater than 10 ⁇ m.
  • composition 17 The coating device according to any one of configurations 1 to 1, further comprising a position control section capable of controlling relative positions between the plurality of nozzles and the coating bar.
  • composition 18 The position control unit a first holding portion that holds the application bar; a second holding portion that holds the plurality of nozzles; including At least one of the first holding portion and the second holding portion applies stress having at least one of a direction from the coating bar to the plurality of nozzles and a direction from the plurality of nozzles to the coating bar. , the coating bar and/or the plurality of nozzles.
  • composition 19 19. The coating device according to any one of configurations 1 to 18, wherein intervals between the plurality of nozzles are variable.
  • a coating device and coating method capable of forming a uniform coating film are provided.

Landscapes

  • Coating Apparatus (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
PCT/JP2021/008371 2021-03-04 2021-03-04 塗布装置及び塗布方法 Ceased WO2022185467A1 (ja)

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PCT/JP2021/008371 WO2022185467A1 (ja) 2021-03-04 2021-03-04 塗布装置及び塗布方法
EP21925103.0A EP4302882A4 (en) 2021-03-04 2021-03-04 COATING APPARATUS AND METHOD
JP2022548670A JP7362936B2 (ja) 2021-03-04 2021-03-04 塗布装置及び塗布方法
CN202180016238.1A CN115315318B (zh) 2021-03-04 2021-03-04 涂敷装置及涂敷方法
US17/819,378 US12420304B2 (en) 2021-03-04 2022-08-12 Coating apparatus and coating method

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPWO2024105718A1 (https=) * 2022-11-14 2024-05-23

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IT202100013085A1 (it) * 2021-05-20 2022-11-20 Cefla Soc Cooperativa Apparato e metodo per la verniciatura a rullo di pannelli, preferibilmente pannelli fotovoltaici

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002133652A (ja) * 2000-10-24 2002-05-10 Toray Ind Inc 磁気記録媒体用ポリエステルフィルムの製造方法
JP2002144722A (ja) * 2000-11-08 2002-05-22 Mitsubishi Paper Mills Ltd 感圧複写用顕色シートおよびその製造方法
JP2009528913A (ja) * 2006-03-08 2009-08-13 富士フイルム株式会社 塗布装置
JP2016155113A (ja) * 2015-02-26 2016-09-01 株式会社東芝 塗布方法および塗布装置
JP2016155114A (ja) * 2015-02-26 2016-09-01 株式会社東芝 塗布方法および塗布装置
JP2016175033A (ja) * 2015-03-20 2016-10-06 キヤノン株式会社 フィルム洗浄装置
JP2016174992A (ja) * 2015-03-18 2016-10-06 株式会社東芝 塗布方法および塗布装置

Family Cites Families (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4114964A1 (de) * 1990-05-11 1991-12-12 Tokyo Silicone Co Gebilde und verfahren zum verhindern der adhaesion einer adhaesiven substanz sowie verfahren zum verhindern der adhaesion von nichtvulkanisiertem kautschuk
DE19814689B4 (de) * 1998-04-01 2006-05-24 Voith Paper Patent Gmbh Vorrichtung zum Auftragen eines flüssigen oder pastösen Auftragsmediums auf eine laufende Materialbahn, insbesondere aus Papier oder Karton
JP2000346640A (ja) 1999-06-09 2000-12-15 Mitsubishi Electric Corp 陰極線管の機能性フィルムの検査方法
JP2001000899A (ja) 1999-06-24 2001-01-09 Teijin Ltd 塗装方法及びその装置
JP4600611B2 (ja) * 1999-10-29 2010-12-15 昭和電工株式会社 耐磨耗性撥水性塗料及び耐磨耗性撥水性表面を有する物品
JP2002045767A (ja) * 2000-08-04 2002-02-12 Mitsubishi Polyester Film Copp 塗工用バー
FR2831470A1 (fr) * 2001-10-29 2003-05-02 Usinor Procede de revetement en continu d'une bande par un film fluide en polymere reticulable
JP2005211767A (ja) * 2004-01-28 2005-08-11 Seiko Epson Corp スリットコート式塗布装置及びスリットコート式塗布方法
JP2006192622A (ja) 2005-01-12 2006-07-27 Sony Corp 液体吐出ヘッド、液体吐出装置、及び液体吐出ヘッドの製造方法
JP2007275717A (ja) * 2006-04-04 2007-10-25 Seiko Epson Corp スピンコート装置およびスピンコート方法
JP2008283098A (ja) * 2007-05-14 2008-11-20 Hoya Corp マスクブランクの製造方法及びフォトマスクの製造方法
JP6033134B2 (ja) * 2013-03-15 2016-11-30 リンテック株式会社 グリーンシート製造用剥離フィルムおよびグリーンシート製造用剥離フィルムの製造方法
JP5981599B1 (ja) * 2015-03-31 2016-08-31 株式会社東芝 塗布方法および塗布装置
JP2018069230A (ja) * 2016-10-20 2018-05-10 株式会社Sat 塗布ヘッド及び塗布装置
JP2018134576A (ja) 2017-02-21 2018-08-30 東レフィルム加工株式会社 塗布装置、塗布方法、およびそれらを用いた積層フィルムの製造方法
DE102018201684A1 (de) * 2018-02-05 2019-08-08 Tesa Se Strukturierte Walzen im Kalander - und Nachkalandrierprozess
EP4358645A3 (en) 2019-03-05 2024-06-26 Kabushiki Kaisha Toshiba Graphene-containing film, production method thereof, graphene-containing film laminate, and photoelectric conversion element
WO2021048924A1 (ja) * 2019-09-10 2021-03-18 株式会社 東芝 塗布方法、塗布バーヘッドおよび塗布装置
JP7204890B2 (ja) 2019-09-10 2023-01-16 株式会社東芝 電極の製造方法および光電変換素子の製造方法
JP7249430B2 (ja) 2020-03-02 2023-03-30 株式会社東芝 透明電極および透明電極の製造方法、ならびに透明電極を具備した光電変換素子
JP7145342B2 (ja) * 2020-03-04 2022-09-30 株式会社東芝 デバイス形成に用いることができる塗布方法および塗布装置
EP4119237B1 (en) * 2020-03-09 2025-12-24 Kabushiki Kaisha Toshiba Coating head, coating device, and coating method
CN111876670B (zh) * 2020-06-30 2021-11-09 九牧厨卫股份有限公司 一种高硬度耐刮不锈钢、不锈钢水槽及其制备方法
EP4194104A4 (en) * 2020-08-04 2024-05-29 Kabushiki Kaisha Toshiba Application apparatus and application method

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002133652A (ja) * 2000-10-24 2002-05-10 Toray Ind Inc 磁気記録媒体用ポリエステルフィルムの製造方法
JP2002144722A (ja) * 2000-11-08 2002-05-22 Mitsubishi Paper Mills Ltd 感圧複写用顕色シートおよびその製造方法
JP2009528913A (ja) * 2006-03-08 2009-08-13 富士フイルム株式会社 塗布装置
JP2016155113A (ja) * 2015-02-26 2016-09-01 株式会社東芝 塗布方法および塗布装置
JP2016155114A (ja) * 2015-02-26 2016-09-01 株式会社東芝 塗布方法および塗布装置
JP2016174992A (ja) * 2015-03-18 2016-10-06 株式会社東芝 塗布方法および塗布装置
JP2016175033A (ja) * 2015-03-20 2016-10-06 キヤノン株式会社 フィルム洗浄装置

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of EP4302882A4 *

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPWO2024105718A1 (https=) * 2022-11-14 2024-05-23
WO2024105718A1 (ja) * 2022-11-14 2024-05-23 株式会社 東芝 塗布装置、メニスカスヘッドおよび塗布方法
JP7698803B2 (ja) 2022-11-14 2025-06-25 株式会社東芝 塗布装置、メニスカスヘッドおよび塗布方法

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US12420304B2 (en) 2025-09-23
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EP4302882A1 (en) 2024-01-10
EP4302882A4 (en) 2025-01-29
CN115315318A (zh) 2022-11-08
JPWO2022185467A1 (https=) 2022-09-09

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