WO2016117072A1 - 半導体装置およびその製造方法 - Google Patents
半導体装置およびその製造方法 Download PDFInfo
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- WO2016117072A1 WO2016117072A1 PCT/JP2015/051648 JP2015051648W WO2016117072A1 WO 2016117072 A1 WO2016117072 A1 WO 2016117072A1 JP 2015051648 W JP2015051648 W JP 2015051648W WO 2016117072 A1 WO2016117072 A1 WO 2016117072A1
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- wire
- semiconductor chip
- circuit unit
- electrode
- pad
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Definitions
- the present invention relates to a semiconductor device and a manufacturing method thereof, and can be suitably used for a semiconductor device in which an electrode of a semiconductor chip and an external terminal are connected by a wire and a manufacturing method thereof, for example.
- a semiconductor chip is mounted on a die pad, a pad electrode of the semiconductor chip and a lead as an external terminal are electrically connected via a wire, and they are resin-sealed to manufacture a semiconductor device in the form of a semiconductor package. be able to.
- Patent Document 1 discloses a technique related to a semiconductor integrated device in which a lead frame and a pad are connected by a wire.
- Patent Document 2 discloses a technique related to a semiconductor package in which electrode pads of a semiconductor chip and corresponding inner leads are electrically connected by a plurality of bonding wires.
- JP 2007-324291 A Japanese Unexamined Patent Publication No. 2011-1000082
- a semiconductor device electrically connects a semiconductor chip, a first external terminal disposed around the semiconductor chip, a first electrode of the semiconductor chip, and the first external terminal. And a second wire that electrically connects the second electrode of the semiconductor chip and the first external terminal, and a sealing body that seals them with a resin.
- the semiconductor chip includes a first internal circuit, a second internal circuit, and a switch circuit unit, and the second electrode is electrically connected to the second internal circuit, and the second internal circuit and the second electrode Can be transmitted between them.
- the switch circuit unit includes a first state in which signals can be transmitted between the first internal circuit and the first electrode, and signal transmission between the first internal circuit and the first electrode. The switch circuit portion is fixed to the second state during the operation of the semiconductor device.
- a method of manufacturing a semiconductor device includes: (a) preparing a semiconductor chip including a first internal circuit, a second internal circuit, a memory circuit unit, and a switch circuit unit; A step of mounting the semiconductor chip on the chip mounting portion.
- the method for manufacturing a semiconductor device further includes (c) electrically connecting a first electrode of the semiconductor chip and a first external terminal disposed around the chip mounting portion via a first wire, Electrically connecting the second electrode of the chip and the first external terminal via a second wire; (d) sealing the semiconductor chip, the first wire, and the second wire with a resin; And a step of forming a resin sealing portion.
- the method for manufacturing a semiconductor device further includes (e) a step of storing first information in the memory circuit portion of the semiconductor chip.
- the second electrode is electrically connected to the second internal circuit, and a signal can be transmitted between the second internal circuit and the second electrode.
- the switch circuit unit includes a first state in which signals can be transmitted between the first internal circuit and the first electrode, and signal transmission between the first internal circuit and the first electrode. This is a circuit capable of setting a possible second state. Then, after the step (e), based on the first information stored in the memory circuit, the switch circuit unit is fixed in the second state during the operation of the semiconductor device.
- the manufacturing yield of semiconductor devices can be improved. Alternatively, the manufacturing cost of the semiconductor device can be reduced. Alternatively, the manufacturing yield of the semiconductor device can be improved and the manufacturing cost of the semiconductor device can be reduced.
- FIG. 26 is a circuit block diagram showing a circuit configuration when a semiconductor package is manufactured using the semiconductor chip of FIG. 25.
- FIG. 26 is a circuit block diagram showing a circuit configuration when a semiconductor package is manufactured using the semiconductor chip of FIG. 25.
- FIG. 26 is a circuit block diagram showing a circuit configuration when a semiconductor package is manufactured using the semiconductor chip of FIG. 25.
- FIG. 29 it is explanatory drawing which shows the structural example of the area
- FIG. 1 It is a top view which shows the resin sealing process in the semiconductor device manufacturing process which is one Embodiment. It is the elements on larger scale which expanded a part of FIG. It is a plane perspective view of the semiconductor device which is other embodiments. It is sectional drawing of the semiconductor device which is other embodiment.
- hatching may be omitted even in a cross-sectional view for easy understanding of the drawings. Further, even a plan view may be hatched to make the drawing easy to see.
- FIG. 1 is a top view of a semiconductor device PKG according to an embodiment of the present invention
- FIGS. 2 to 4 are plan perspective views of the semiconductor device PKG
- FIG. 5 is a cross-sectional view of the semiconductor device PKG. is there.
- FIG. 2 shows a plan perspective view of the upper surface side of the semiconductor device PKG when the sealing portion MR is seen through.
- 3 is a plan perspective view of the upper surface side of the semiconductor device PKG when the wire BW is further seen through (omitted) in FIG. 2
- FIG. 4 is a further perspective view of the semiconductor chip CP in FIG.
- FIG. 2 A plan perspective view of the upper surface side of the semiconductor device PKG when (omitted) is shown. 2 to 4, the position of the outer periphery of the sealing portion MR is indicated by a dotted line. Further, the cross section of the semiconductor device PKG at the position of the line AA in FIGS. 1 to 4 substantially corresponds to FIG.
- the semiconductor device (semiconductor package) PKG of the present embodiment shown in FIGS. 1 to 5 is a semiconductor device in the form of a resin-encapsulated semiconductor package, and here is a semiconductor device in the form of QFP (Quad Flat Package). .
- QFP Quad Flat Package
- a semiconductor device PKG of the present embodiment shown in FIGS. 1 to 5 includes a semiconductor chip CP, a die pad DP on which the semiconductor chip CP is mounted, a plurality of leads LD formed of a conductor, and a plurality of semiconductor chips CP.
- the sealing portion (sealing resin portion, sealing body) MR as a sealing body is made of, for example, a resin material such as a thermosetting resin material, and may include a filler.
- the sealing portion MR can be formed using an epoxy resin containing a filler.
- a biphenyl thermosetting resin to which a phenolic curing agent, silicone rubber, filler, or the like is added is used as a material for the sealing portion MR for the purpose of reducing stress. May be.
- Sealing portion MR has upper surface MRa that is one main surface, lower surface MRb that is the main surface opposite to upper surface MRa, and side surfaces MRc1, MRc2, MRc3, and MRc4 that intersect upper surface MRa and lower surface MRb. is doing. That is, the appearance of the sealing portion MR is a thin plate surrounded by the upper surface MRa, the lower surface MRb, and the side surfaces MRc1, MRc2, MRc3, MRc4. In plan view, each side surface MRc1, MRc2, MRc3, MRc4 of the sealing part MR can also be regarded as a side of the sealing part MR.
- the planar shape of the upper surface MRa and the lower surface MRb of the sealing portion MR is formed, for example, in a rectangular shape, and the corners of the rectangle (planar rectangle) can be rounded. In addition, an arbitrary corner can be dropped from the four corners of the rectangle (planar rectangle).
- the planar shape of the upper surface MRa and the lower surface MRb of the sealing portion MR is rectangular, the planar shape intersecting with the thickness of the sealing portion MR is rectangular.
- the side surface MRc1 and the side surface MRc3 face each other
- the side surface MRc2 and the side surface MRc4 face each other
- the side surface MRc1 and the side surfaces MRc2 and MRc4 intersect each other.
- the side surface MRc3 and the side surfaces MRc2 and MRc4 intersect each other.
- the plurality of leads (lead portions, external terminals) LD are made of a conductor, and are preferably made of a metal material such as copper (Cu) or a copper alloy.
- Each of the plurality of leads LD is sealed in the sealing portion MR, and the other part protrudes from the side surface of the sealing portion MR to the outside of the sealing portion MR.
- a portion of the lead LD positioned in the sealing portion MR is referred to as an inner lead portion
- a portion of the lead LD positioned outside the sealing portion MR is referred to as an outer lead portion.
- the semiconductor device PKG of the present embodiment has a structure in which a part (outer lead part) of each lead LD protrudes from the side surface of the sealing part MR.
- the following description is based on this structure.
- a configuration in which each lead LD hardly protrudes from the side surface of the sealing portion MR and a part of each lead LD is exposed on the lower surface MRb of the sealing portion MR QFN type configuration. Etc. can also be adopted.
- the plurality of leads LD included in the semiconductor device PKG are arranged around the semiconductor chip CP, and are therefore arranged around the die pad DP.
- the plurality of leads LD included in the semiconductor device PKG include a plurality of leads LD disposed on the side surface MRc1 side of the sealing portion MR and a plurality of leads LD disposed on the side surface MRc2 side of the sealing portion MR.
- the outer lead portion of each lead LD protrudes outside the sealing portion MR from the side surface of the sealing portion MR.
- each lead LD is bent so that the lower surface in the vicinity of the end of the outer lead portion is positioned substantially on the same plane as the lower surface MRb of the sealing portion MR.
- the outer lead portion of the lead LD functions as an external connection terminal portion (external terminal) of the semiconductor device PKG. Therefore, the lead LD can be regarded as an external terminal of the semiconductor device PKG.
- the die pad (chip mounting portion, tab) DP is a chip mounting portion for mounting the semiconductor chip CP.
- the planar shape of the die pad DP is formed in a rectangular shape, for example.
- the semiconductor chip CP is disposed on the die pad DP, the sealing portion MR seals the die pad DP and the semiconductor chip CP mounted thereon, and the plurality of leads LD are disposed around the die pad DP. .
- the die pad DP is sealed in the sealing portion MR, and the die pad DP is not exposed on the lower surface MRb of the sealing portion MR, but the lower surface of the die pad DP is exposed on the lower surface MRb of the sealing portion MR. It can be done.
- the die pad DP is made of a conductor and is preferably made of a metal material such as copper (Cu) or a copper alloy. It is more preferable if the die pad DP and the plurality of leads LD constituting the semiconductor device PKG are formed of the same material (the same metal material). As a result, a lead frame in which the die pad DP and the plurality of leads LD are coupled can be easily manufactured, and the semiconductor device PKG using the lead frame can be easily manufactured.
- a metal material such as copper (Cu) or a copper alloy.
- the suspension leads TL are integrally formed at the four corners of the rectangle that constitutes the planar shape of the die pad DP.
- Each suspension lead TL is integrally formed with the die pad DP using the same material as the die pad DP.
- a suspension lead TL is integrally formed at each of the four corners of the outer edge of the die pad DP, and the end of each suspension lead TL opposite to the side connected to the die pad DP is a planar rectangular sealing portion MR.
- the inside of the sealing portion MR extends until reaching the four corners (corner portions).
- the suspension lead TL has a portion protruding from the sealing portion MR after the formation of the sealing portion MR, and cut surfaces (end surfaces) generated by cutting the suspension lead TL are exposed at the four corner side surfaces of the sealing portion MR. ing.
- the semiconductor chip CP On the upper surface of the die pad DP, the semiconductor chip CP is mounted with its front surface (upper surface) facing upward and its rear surface (lower surface) facing the die pad DP. The back surface of the semiconductor chip CP is bonded and bonded to the upper surface of the die pad DP via a bonding material (bonding material layer, bonding layer) BD.
- the semiconductor chip CP is sealed in the sealing portion MR and is not exposed from the sealing portion MR.
- the bonding material BD a conductive bonding material or an insulating bonding material can be used.
- a paste-type adhesive, a film-like adhesive sheet, or solder can be used.
- the semiconductor chip CP is manufactured by, for example, forming various semiconductor elements or semiconductor integrated circuits on the main surface of a semiconductor substrate (semiconductor wafer) made of single crystal silicon or the like and then separating the semiconductor substrate into each semiconductor chip by dicing or the like. It is a thing.
- the semiconductor chip CP has a rectangular (quadrangle) planar shape that intersects its thickness.
- a plurality of pad electrodes (pads, bonding pads, terminals) PD are formed on the surface of the semiconductor chip CP.
- the “pad electrode” may be simply referred to as “pad”.
- the main surface on the side where the plurality of pad electrodes PD are formed out of the two main surfaces located on the opposite sides is referred to as the surface of the semiconductor chip CP.
- the main surface facing the die pad DP is referred to as the back surface of the semiconductor chip CP.
- the surface of the semiconductor chip CP has a rectangular planar shape having sides (chip sides) SD1, SD2, SD3, SD4. Note that, on the surface of the semiconductor chip CP, the side SD1 and the side SD3 face each other, the side SD2 and the side SD4 face each other, the side SD1 and the side SD3 are parallel to each other, and the side SD2 and the side SD4 In parallel, the side SD1 is orthogonal to the sides SD2 and SD4, and the side SD3 is orthogonal to the sides SD2 and SD4.
- the side SD1 is a side along the side surface MRc1 of the sealing portion MR
- the side SD2 is a side along the side surface MRc2 of the sealing portion MR
- the side SD3 is the side of the sealing portion MR.
- the side is along the side surface MRc3
- the side SD4 is a side along the side surface MRc4 of the sealing portion MR.
- the side SD1 of the semiconductor chip CP faces a plurality of leads LD (inner lead portions) arranged on the side surface MRc1 side of the sealing portion MR, and the side SD2 of the semiconductor chip CP is the sealing portion MR. It faces a plurality of leads LD (inner lead portions thereof) arranged on the side surface MRc2.
- the side SD3 of the semiconductor chip CP faces a plurality of leads LD (inner lead portions) arranged on the side surface MRc3 side of the sealing portion MR, and the side SD4 of the semiconductor chip CP is sealed. It faces a plurality of leads LD (inner lead portions thereof) arranged on the side surface MRc4 side of the portion MR.
- the plurality of pad electrodes PD of the semiconductor chip CP and the plurality of leads LD are electrically connected via the plurality of wires BW, respectively.
- the plurality of pad electrodes PD arranged along the side SD1 are provided with a plurality of wires BW on the plurality of leads LD arranged on the side surface MRc1 side of the sealing portion MR. Are electrically connected to each other. Further, on the surface of the semiconductor chip CP, the plurality of pad electrodes PD arranged along the side SD2 are respectively connected to the plurality of leads LD arranged on the side surface MRc2 side of the sealing portion MR via the plurality of wires BW. Electrically connected.
- the plurality of pad electrodes PD arranged along the side SD3 are respectively connected to the plurality of leads LD arranged on the side surface MRc3 side of the sealing portion MR via the plurality of wires BW. Electrically connected. Further, on the surface of the semiconductor chip CP, the plurality of pad electrodes PD arranged along the side SD4 are respectively connected to the plurality of leads LD arranged on the side surface MRc4 side of the sealing portion MR via the plurality of wires BW. Electrically connected.
- the wire (bonding wire) BW is a conductive connecting member, and more specifically, a conductive wire. Since the wire BW is made of metal, it can also be regarded as a metal wire (metal thin wire). As the wire BW, a gold (Au) wire, a copper (Cu) wire, an aluminum (Al) wire, or the like can be suitably used.
- a gold (Au) wire is a wire that is relatively soft and easily generates a wire flow described later, if this embodiment is applied when a gold (Au) wire is used as the wire BW, the effect is Especially big.
- Each wire BW is sealed in the sealing portion MR and is not exposed from the sealing portion MR.
- the connection location of the wire BW is an inner lead portion located in the sealing portion MR.
- the semiconductor chip CP is designed as a common semiconductor chip for manufacturing a plurality of semiconductor packages having different numbers of pins, as will be described later.
- the number of leads LD included in the semiconductor device PKG is smaller than the number of pad electrodes PD included in the semiconductor chip CP.
- FIGS. 2 and 3 correspond to the case of FIG. 28 described later, not the case of FIG. 26 described later. Therefore, the plurality of pad electrodes PD of the semiconductor chip CP shown in FIG. 2 and FIG. 3 are a mixture of effective pads and invalid pads (unused pads).
- Each lead LD of the semiconductor device PKG is electrically connected to one of the pad electrodes PD included in the semiconductor chip CP via a wire BW. That is, one end of each wire BW is connected to the pad electrode PD of the semiconductor chip CP, and the other end is connected to the lead LD (inner lead portion thereof), whereby the pad electrode PD and the lead LD are connected to the wire BW. It is electrically connected via.
- Each effective pad among the plurality of pad electrodes PD of the semiconductor chip CP is electrically connected to each lead LD via a wire BW.
- each invalid pad (unused pad) of the plurality of pad electrodes PD of the semiconductor chip CP may not be connected to the wire BW, but at least one invalid pad is connected to the lead LD via the wire BW. Electrically connected. That is, in the pad electrode PD, the wire BW is always connected to the effective pad, but the wire BW may or may not be connected to the invalid pad. In this form, the wire BW is connected to at least one of the invalid pads of the semiconductor chip CP.
- connection relationship among the pad electrode PD, the wire BW, and the lead LD of the semiconductor chip CP will be described in detail later.
- FIG. 6 is a process flow diagram showing manufacturing steps of the semiconductor device PKG shown in FIGS.
- FIG. 7 is a process flow diagram showing details of the assembly step of step S4 in the process flow of FIG. 8 to 19 are plan views or cross-sectional views for explaining the manufacturing process of the semiconductor device PKG.
- a semiconductor wafer (semiconductor substrate) SW is prepared (step S1 in FIG. 6).
- the semiconductor wafer SW is made of, for example, single crystal silicon and has, for example, a substantially circular planar shape.
- a wafer process is performed on the semiconductor wafer SW (step S2 in FIG. 6).
- various semiconductor elements or semiconductor integrated circuits are generally formed on the main surface or surface layer portion of the semiconductor wafer SW, and a wiring structure including one or more wiring layers is formed on the semiconductor wafer SW.
- the wafer process is also called a pre-process.
- FIG. 8 corresponds to a plan view of the semiconductor wafer SW at the stage where the wafer process of step S2 is completed
- FIG. 9 corresponds to a cross-sectional view of the main part of the semiconductor wafer SW at the stage where the wafer process of step S2 is completed. is doing.
- the main surface of the semiconductor wafer SW is composed of a plurality of semiconductor chip regions (semiconductor element formation regions, unit integrated circuit regions) CPR and a scribe region (scribe) between the semiconductor chip regions CPR.
- the semiconductor chip regions CPR correspond to regions that become individual semiconductor chips (corresponding to the semiconductor chips CP) when the semiconductor wafer SW is diced in a dicing process described later, and are two-dimensionally formed on the main surface of the semiconductor wafer SW. In general, they are arranged (arranged) side by side (in an array).
- Each semiconductor chip region CPR has the same dimensions (planar shape) and structure as each other, and each has a rectangular planar shape.
- the scribe region SCB is a region sandwiched between adjacent semiconductor chip regions CPR, that is, a region between the semiconductor chip regions CPR, and exists in a lattice pattern with respect to the main surface of the semiconductor wafer SW.
- the region surrounded by the scribe region SCB corresponds to the semiconductor chip region CPR.
- FIG. 9 shows a semiconductor integrated circuit region CR as a region where semiconductor elements, interlayer insulating films, and wiring layers are formed on the semiconductor wafer SW, that is, a region where a semiconductor integrated circuit is formed.
- a protective film (insulating film, passivation film) PA for surface protection is formed on the semiconductor integrated circuit region CR.
- the semiconductor integrated circuit region CR and the protective film PA are formed in each semiconductor chip region CPR of the semiconductor wafer SW and are not formed in the scribe region SCB.
- the protective film PA is provided with an opening, and the pad electrode PD is exposed from the opening.
- the pad electrode PD is formed on the uppermost wiring layer of the multilayer wiring structure formed on the main surface of the semiconductor wafer SW.
- each semiconductor chip region CPR a plurality of pad electrodes PD are arranged along the outer periphery of the semiconductor chip region CPR, and a wiring layer (internal wiring layer) or the like is formed on the semiconductor integrated circuit formed in the semiconductor chip region CPR. It is electrically connected via.
- step S2 a semiconductor integrated circuit is formed in each semiconductor chip region CPR on the main surface of the semiconductor wafer SW. That is, in step S2, a semiconductor element (for example, a transistor element), an interlayer insulating film and a wiring layer, that is, a semiconductor integrated circuit region CR are formed in each semiconductor chip region CPR on the main surface of the semiconductor wafer SW, and a protective film PA is further formed. It is formed. Accordingly, step S2 can be regarded as a step of forming a semiconductor integrated circuit in each of a plurality of semiconductor chip regions CPR of the semiconductor wafer SW that will be semiconductor chips later.
- the protective film PA is formed in the semiconductor chip region CPR but is preferably not formed in the scribe region SCB, so that the semiconductor wafer SW can be easily cut in a dicing process of the semiconductor wafer SW described later. it can.
- each semiconductor chip region CPR has the same configuration, and each semiconductor chip region CPR has a circuit configuration similar to the circuit configuration of the semiconductor chip CP shown in FIG. That is, each semiconductor chip region CPR includes a plurality of pad electrodes PD and an input / output circuit unit 1 described later, a control circuit unit 2 described later, a decoder circuit unit 3 described later, and a memory circuit described later. Part 4 and an internal circuit part 5 to be described later.
- a probe test (wafer test) is performed using the pad electrode PD in each semiconductor chip region CPR (step S3 in FIG. 6).
- the probe test in step S3 is a test (inspection) performed before the semiconductor wafer SW is cut in a dicing process described later, and is a test performed on the semiconductor wafer SW, and thus can be regarded as a wafer test.
- each semiconductor chip region CPR of the semiconductor wafer SW can be performed by the test process of step S3. Specifically, in each semiconductor chip region CPR of the semiconductor wafer SW, a test probe (probe needle, probe) is applied to the exposed pad electrode PD to conduct an electrical test of each semiconductor chip region CPR.
- a test probe probe needle, probe
- the probe test can be omitted, but it is more preferable to perform it.
- step S4 in FIG. 6 an assembly process of the semiconductor device PKG is performed (step S4 in FIG. 6). Specifically, the assembly process of step S4 can be performed as follows (steps S4a to S4f).
- Step S4a the semiconductor wafer SW is diced (cut), and the semiconductor wafer SW is separated (divided) into individual semiconductor chips.
- Step S4a the dicing blade rotated at a high speed is run along the scribe area SCB from the front side of the semiconductor wafer SW while the back surface of the semiconductor wafer SW is fixed to the dicing sheet.
- the semiconductor wafer SW is cut (diced) along the scribe region SCB.
- the semiconductor wafer SW is separated (divided) into individual semiconductor chip regions CPR by dicing, and each semiconductor chip region CPR becomes an individual semiconductor chip.
- the separated semiconductor chip corresponds to the semiconductor chip CP, and is used in a die bonding process to be performed later. In this way, a semiconductor chip (CP) is obtained from each semiconductor chip region CPR of the semiconductor wafer SW.
- step S4b a die bonding step of the semiconductor chip CP is performed, and the semiconductor chip CP is mounted and bonded to the die pad DP of the lead frame LF via the bonding material BD as shown in FIGS. 7 step S4b).
- the semiconductor chip CP is placed on the upper surface of the die pad DP with the bonding material BD so that the front surface side where the pad electrode PD of the semiconductor chip CP is formed faces upward and the back surface of the semiconductor chip faces the upper surface of the die pad DP.
- step S4b the back surface of the semiconductor chip CP is bonded to the upper surface of the die pad DP via the bonding material BD.
- FIG. 10 corresponds to a plan view at the stage where the die bonding process of step S4b is completed
- FIG. 11 substantially corresponds to a cross-sectional view taken along line AA of FIG.
- the lead frame LF integrally includes a frame frame (not shown), a plurality of leads LD coupled to the frame frame, and a die pad DP coupled to the frame frame via a plurality of suspension leads TL. Have.
- step S4c a wire bonding step is performed (step S4c in FIG. 7).
- the plurality of pad electrodes PD of the semiconductor chip CP and the plurality of leads LD of the lead frame LF are electrically connected via the plurality of wires BW, respectively.
- Each wire BW has one end connected to the pad electrode PD of the semiconductor chip CP and the other end connected to the lead LD of the lead frame LF.
- FIG. 12 corresponds to a plan view at the stage where the wire bonding process of step S4c is completed
- FIG. 13 substantially corresponds to a cross-sectional view taken along line AA of FIG.
- wires BW1, BW3, BW4, and BW5 shown in FIGS. 28 and 31 to be described later are also formed. That is, the pad electrode PD1 and the lead LD1 are electrically connected via the wire BW1, the pad electrode PD2 and the lead LD3 are electrically connected via the wire BW5, and the pad electrode PD3 and the lead LD3 are electrically connected to the wire BW3.
- the pad electrode PD4 and the lead LD4 are electrically connected through the wire BW4.
- FIG. 14 corresponds to a plan view at the stage where the molding process of step S4d is completed, and FIG. 15 substantially corresponds to a cross-sectional view taken along line AA of FIG.
- step S4d can be performed as follows (FIGS. 16 and 17).
- 16 and 17 are explanatory diagrams of the molding process, and a cross section corresponding to FIG. 15 is shown.
- the lead frame LF that has been subjected to the wire bonding process in step S4c is disposed on the mold (lower mold) KG1, as shown in FIG. 16, the lead frame LF is molded with the mold KG1 and the mold. (Upper mold) Fix and clamp (clamp) with KG2. At this time, the outer lead part of the lead LD is sandwiched between the upper surface of the mold KG1 and the lower surface of the mold KG2, but the inner leads of the die pad DP, the semiconductor chip CP, the wire BW, and the lead LD are the molds KG1, KG2. In the cavity CAV. Then, the resin injection gate (injection port, corresponding to the gate GT in FIG.
- the resin material MR1 is made of, for example, a resin material such as a thermosetting resin material, and may include a filler.
- a resin material such as a thermosetting resin material
- an epoxy resin containing a filler can be used as the resin material MR1.
- the resin material MR1 introduced into the cavities CAV of the molds KG1 and KG2 is cured by heating or the like.
- the sealing portion MR is formed by the cured resin material MR1. Thereafter, the molds KG1 and KG2 are released, and the lead frame LF on which the sealing portion MR is formed is taken out. Thereby, the structure shown in FIGS. 14 and 15 is obtained.
- step S4d the molding process of step S4d can be performed.
- the formed sealing portion MR has a resin injection mark GTK (see FIG. 14).
- This resin injection mark GTK is a resin injection gate (injection port) when the resin material MR1 for forming the sealing portion MR is injected into the cavity CAV of the molds KG1 and KG2 in the molding process of step S4d. It corresponds to the mark of.
- the formation position of the resin injection mark GTK in the sealing portion MR is the position of the resin material MR1 when the resin material MR1 is injected into the cavities CAV of the molds KG1 and KG2 in order to form the sealing portion MR. This corresponds to the injection position (position of the gate for resin injection).
- the leads LD and the suspension leads TL are cut at predetermined positions outside the sealing portion MR. Then, it is separated from the frame of the lead frame LF (step S4e in FIG. 7).
- step S4f in FIG. 7 corresponds to a plan view at the stage where the lead processing step of step S4f is completed
- FIG. 19 substantially corresponds to the cross-sectional view taken along the line AA of FIG.
- step S4a As described above, by performing steps S4a to S4f, the assembly process of the semiconductor device PKG in step S4 is performed. In this way, the semiconductor device PKG is manufactured.
- step S5 a test (inspection) of the semiconductor device PKG is performed (step S5 in FIG. 6).
- various tests are performed, and if there is a defective product, it is selected and removed.
- the test process in step S5 can be performed, for example, by inserting the lead LD, which is an external terminal of the semiconductor device PKG, into a test socket and performing an electrical test.
- semiconductor devices for example, general-purpose microcomputer products require many types of semiconductor package products according to customer needs and applications.
- semiconductor chip included in the semiconductor package product is changed for each type of semiconductor package product, it is necessary to prepare the same number of semiconductor chip types as the number of semiconductor package products. Therefore, the manufacturing cost of the semiconductor chip and the semiconductor package using the semiconductor chip is increased.
- a common semiconductor chip corresponding to the semiconductor chip CP.
- a 100-pin semiconductor package product, a 144-pin semiconductor package product, a 176-pin semiconductor package product, and a 224-pin semiconductor package product are manufactured using a common semiconductor chip.
- the number of pins of the semiconductor package corresponds to the number of external terminals (for example, leads) included in the semiconductor package.
- the pads of the common chip are matched to the number of pins of the semiconductor package product having the largest number of pins.
- the number of (corresponding to the pad electrode PD) is designed.
- 224 pads of the common chip are effective pads.
- a common chip is used. These 224 pads are a mixture of valid pads and invalid pads (unused pads).
- Effective pads in the common chip are electrically connected to external terminals (leads) via wires.
- the effective pad in the common chip is a pad capable of transmitting signals to / from the outside of the common chip (for example, a mother board on which the semiconductor package product is mounted or other semiconductor package products).
- the invalid pad in the common chip is forced into a state (invalid state or off state) in which signal transmission to the outside (outside the common chip) is forcibly forced by a circuit in the common chip. ing.
- the common chip is used except for manufacturing a semiconductor package product having the maximum number of pins (here, 224 pins).
- An invalid pad (unused pad) is generated in the 224 pads.
- a molding process for resin-sealing the semiconductor chip, the wires, and the external terminals is performed. Specifically, after the wire bonding step, the semiconductor chip, the wire, and the external terminal are arranged in the cavity of the mold (corresponding to the molds KG1 and KG2), and then the mold is inserted in the cavity. By injecting a resin material (corresponding to the resin material MR1) and curing the injected resin material, a resin sealing portion (corresponding to the sealing portion MR) is formed. The semiconductor chip and the wire and a part of the external terminal are sealed and protected by the resin sealing portion.
- a resin material corresponding to the resin material MR1
- a resin sealing portion corresponding to the sealing portion MR
- the resin material for molding When the resin material for molding is injected into the cavity of the mold for molding, the injected resin material collides with the wire and deforms the wire, and the deformed wire comes into contact with the adjacent wire. There is a possibility.
- the phenomenon that the resin material injected into the cavity of the mold die collides with the wire and deforms the wire is hereinafter referred to as “wire flow”.
- the wire flow is generated when the resin material injected into the cavity of the mold die collides with the wire at high speed, and the wire flow is more likely to occur as the speed of the resin material at the time of collision increases.
- the resin material hardens while the wire flow occurs and the adjacent wires are in contact with each other, the adjacent wires are short-circuited, so it is necessary to remove them by inspection after manufacturing the semiconductor package.
- the manufacturing yield is lowered, and the manufacturing cost of the semiconductor package is increased.
- FIG. 20 and FIG. 21 are plan views schematically showing a main part of a wire bonding process when a semiconductor package product is manufactured using a common chip.
- FIG. 20 corresponds to the case where a 224-pin semiconductor package product is manufactured using a common chip having 224 pads
- FIG. 21 shows a common chip having 224 pads. It corresponds to the case where a 100-pin semiconductor package product is manufactured. Even when a 144-pin or 176-pin semiconductor package product is manufactured, the basic concept is the same as FIG.
- some of the 224 pads (corresponding to the pad electrode PD) of the common chip are shown.
- the ten pads P1 to P10 shown are all valid pads, and the corresponding leads (corresponding to the leads LD, not shown in FIG. 20) are respectively connected to the wires W1 (corresponding to the wires BW). ) Is connected through.
- the corresponding leads corresponding to the above leads LD, FIG.
- wires W1 are not connected to each other via wires W1 (corresponding to the wire BW), but the four pads P4, P5, P6, P7, and P8 are invalid pads and have no corresponding leads.
- the wire is not connected. That is, since the number of leads (number of pins) is smaller in the case of FIG. 21 than in the case of FIG. 20, an invalid pad (unused pad) is generated in the pad of the common chip. .
- the pads P1 to P10 of the common chip are all effective pads and are connected to the corresponding leads via the wires W1, the interval between the adjacent wires W1 is relatively small. Yes.
- the wire flow is unlikely to occur. This is because the resin material injected into the cavity of the mold proceeds along the resin traveling direction YG1 indicated by the arrow in FIG. 20 and sequentially collides with the ten wires W1 connected to the pads P1 to P10. This is because the momentum of progress weakens every time it collides with the wire W1, so that the speed of the resin material does not have to be so high when it collides with any of the wires W1, and the wire W1 is difficult to deform.
- P1, P2, P3, P9, and P10 are effective pads and are connected to the corresponding leads via wires W1, respectively, but pads P4 to P8 are invalid pads (unused). Since no corresponding lead exists, the wire is not connected. For this reason, in the case of FIG. 21, among the five wires W1 connected to the pads P1, P2, P3, P9, and P10, between the wire W1a connected to the pad P9 and the wire W1b connected to the pad P3. The interval is considerably larger. When the resin sealing process is performed in such a state, a wire flow is likely to occur in the wire W1b connected to the pad P3. This will be described with reference to FIG. FIG. 22 is an explanatory diagram when the resin sealing step is performed in the state of FIG.
- the resin material injected into the cavity of the mold proceeds along the resin traveling directions YG1, YG2, and YG3 in FIG. 21, and is applied to the five wires W1 connected to the pads P1, P2, P3, P9, and P10. Collisions in order.
- the resin material flowing toward the wire W1b connected to the pad P3 after colliding with the wire W1a connected to the pad P9 collides with the wire W1b because the distance from the wire W1a to the wire W1b is large.
- the wire W1b is deformed by colliding with the wire W1b at a considerably high speed, and a wire flow is generated in the wire W1b. If the wire W1b is deformed and comes into contact with the adjacent wire W1c, the wire W1b connected to the pad P3 and the wire W1c connected to the pad P2 are electrically short-circuited. Manufacturing yield decreases.
- the first method As an effective technique as a measure against wire flow, there is a technique of increasing the pad interval (pitch) in the semiconductor chip, and this technique is referred to as a first technique.
- the first method if the pad spacing (pitch) is increased, the spacing between adjacent wires inevitably increases. Therefore, even if a wire flow occurs and the wire is deformed, the deformed wire is adjacent to the adjacent wire. This makes it difficult to contact the wire and the wire flow is less likely to cause a short circuit of the wire. For this reason, the first method is a method for suppressing an adverse effect (a short circuit between wires) when the wire flow is generated, rather than being effective for suppressing the generation of the wire flow.
- FIG. 23 corresponds to the case where the first method is applied to the configuration of FIG.
- the distances L1, L2 between the pads P1, P2, P3 are made larger than in the case of FIG. 21, thereby the wires W1d, W1c, W1b connected to the pads P1, P2, P3.
- the intervals L3 and L4 are also larger than in the case of FIG. Therefore, in the case of FIG. 23, even if the wire flow is generated and the wire W1b is deformed, the distance L4 between the wire W1b and the wire W1c is large, so that the deformed wire W1b contacts the adjacent wire W1c. It becomes difficult. Therefore, in the case of FIG. 23, even if a wire flow occurs, it is difficult for the wires to be short-circuited with each other. Therefore, it is possible to suppress a decrease in manufacturing yield of the semiconductor device due to the wire flow.
- the first method is a method of increasing the pad interval (pitch) in the semiconductor chip
- the size of the semiconductor chip is increased.
- An increase in the size of the semiconductor chip that is, an increase in the size of the semiconductor chip leads to an increase in the size of a semiconductor package manufactured using the semiconductor chip and an increase in manufacturing cost.
- a technique in which a dummy pad is provided on a semiconductor chip and a dummy wire is connected to the dummy pad there is a technique in which a dummy pad is provided on a semiconductor chip and a dummy wire is connected to the dummy pad, and this technique is referred to as a second technique.
- the second method if a dummy pad is provided on a semiconductor chip and a dummy wire is provided on the dummy pad, the amount of wires (including dummy wires) between the dummy wires is smaller than that in the case where the dummy wires are not disposed. The interval is reduced.
- the second method is an effective method for suppressing the occurrence of wire flow.
- FIG. 24 corresponds to the case where the second method is applied to the configuration of FIG. Therefore, in FIG. 24, a dummy pad DM is provided between the pad P6 and the pad P7, and the dummy pad DM and the lead are connected by a dummy wire DW.
- the resin material that has traveled along the resin traveling direction YG1 collides with the wire W1a and then flows toward the wire W1b along the resin traveling method YG2, but from the wire W1a to the wire W1b. Since the distance is large, it is accelerated until it collides with the wire W1b, and collides with the wire W1b at a considerably high speed to deform the wire W1b.
- the second method is a method of providing a dummy pad in a semiconductor chip
- the size of the semiconductor chip is increased.
- the dummy pad DM is a pad that is simply added so that the dummy wire DW can be disposed, and is not connected to the circuit in the common chip, and is an electrically unnecessary pad, thus preventing wire flow.
- adding the dummy pad DM causes an increase in the size of the semiconductor chip, that is, an increase in the size of the semiconductor chip.
- the added dummy pad DM becomes unnecessary when a 224-pin semiconductor package is manufactured using the common chip.
- a dummy pad DM is added to the common chip so as to prevent the occurrence of wire flow
- a 224-pin semiconductor chip can be used using the common chip.
- the added dummy pad DM becomes an obstacle, and the common chip is increased in size.
- An increase in the size of the semiconductor chip that is, an increase in the size of the semiconductor chip leads to an increase in the size of a semiconductor package manufactured using the semiconductor chip and an increase in manufacturing cost.
- both the first method and the second method are effective as countermeasures against the wire flow, the size of the semiconductor chip is increased, so that it is strongly demanded in recent years to reduce the size and the size of the semiconductor package. It is against the demand for cost.
- FIG. 25 is a circuit block diagram showing a circuit configuration of the semiconductor chip CP.
- the semiconductor chip CP has an input / output circuit section (I / O circuit section, I / O buffer circuit section) 1 connected to each pad electrode PD.
- the semiconductor chip CP further includes a control circuit unit 2, a decoder circuit unit 3, a memory circuit unit 4, and an internal circuit unit 5.
- FIG. 25 for the sake of easy understanding, four pad electrodes PD and four input / output circuit portions 1 corresponding to the four pad electrodes PD are shown.
- the PD and the corresponding input / output circuit unit 1 are formed on the semiconductor chip CP.
- the semiconductor In the chip CP, 224 pad electrodes PD and an input / output circuit unit 1 corresponding to each of them are formed.
- the input / output circuit section 1 is connected to all the pad electrodes PD. For this reason, the pad electrode to which the corresponding input / output circuit unit 1 is not connected is not provided in the semiconductor chip CP.
- the dummy pad DM described above is an electrically unnecessary pad and is not connected to the input / output circuit unit 1. For this reason, the semiconductor chip CP is not formed corresponding to the above-described dummy pad DM.
- each pad electrode PD is connected to the internal circuit unit 5 via the input / output circuit unit 1 connected to the pad electrode PD. That is, the input / output circuit section 1 is interposed between each pad electrode PD and the internal circuit section 5.
- the input / output circuit unit 1 controls transmission of signals between the pad electrode PD and the internal circuit unit 5. That is, the input / output circuit unit 1 inputs a signal input from the pad electrode PD into the semiconductor chip CP to the internal circuit unit 5 through the input / output circuit unit 1 or outputs from the internal circuit unit 5. It is possible to control the output of the signal from the pad electrode PD to the outside of the semiconductor chip CP via the input / output circuit unit 1.
- the control circuit unit 2 is connected to the input / output circuit unit 1 and controls the input / output circuit unit 1. That is, the package information (information) stored in the storage circuit unit 4 is decoded by the decoder circuit unit 3, and the control circuit unit 2 controls the input / output circuit unit 1 based on the decoded package information.
- the memory circuit unit 4 is composed of a nonvolatile memory such as a flash memory, for example.
- a package code (package information) indicating the number of pins of a semiconductor package (PKG) manufactured using the semiconductor chip CP is stored in the memory circuit unit 4 of the semiconductor chip CP as package information.
- the decoder circuit unit 3 is a circuit that decodes the package code read from the storage circuit unit 4.
- the decoder circuit unit 3 decodes the package code read from the storage circuit unit 4, generates a decode signal corresponding to the number of pins indicated by the package code, and outputs the decoded signal to the control circuit unit 2.
- the control circuit unit 2 switches whether each input / output circuit unit 1 is enabled or forcibly disabled.
- the pad electrode PD connected to the input / output circuit unit 1 becomes an effective pad, and a signal input from the pad electrode PD is input to the input / output circuit.
- the signal transmitted from the internal circuit unit 5 to the internal circuit unit 5 through the unit 1 or the signal transmitted from the internal circuit unit 5 can be output from the pad electrode PD to the outside of the semiconductor chip CP through the input / output circuit unit 1. become.
- the pad electrode PD connected to the input / output circuit unit 1 becomes an invalid pad (unused) and is input from the pad electrode PD.
- a signal cannot be transmitted to the internal circuit unit 5 through the input / output circuit unit 1, and a signal from the internal circuit unit 5 cannot be output from the pad electrode PD through the input / output circuit unit 1. .
- the control circuit unit 2 is a circuit that selects / controls each control terminal (input / output enable, etc.) of the input / output circuit unit 1.
- the control circuit unit 2 receives input data or output data between the CPU (Central Processing Unit) or peripheral IP (IP core: Intellectual Property Core) included in the internal circuit unit 5 and the input / output circuit unit 1. Select a transmission path.
- the storage circuit unit 4 stores the package code, but may further store information other than the package code.
- the internal circuit unit 5 is a circuit that transmits a signal to and from a circuit outside the semiconductor chip CP via the pad electrode PD, and includes, for example, a CPU and a peripheral IP.
- the internal circuit unit 5 may include a plurality of circuit units (circuit blocks).
- FIG. 25 shows four pad electrodes PD1, PD2, PD3, and PD4 as pad electrodes PD included in the semiconductor chip CP.
- the pad electrodes PD1, PD2, PD3, and PD4 are formed of the semiconductor chip CP.
- the pad electrodes PD2 and PD3 are disposed between the pad electrode PD1 and the pad electrode PD4.
- the pad electrode PD2 is closer to the pad electrode PD1
- the pad electrode PD3 is the pad electrode. It is on the side close to PD4. That is, there is a pad electrode PD2 between the pad electrode PD3 and the pad electrode PD1, and there is a pad electrode PD3 between the pad electrode PD4 and the pad electrode PD2.
- One input / output circuit unit 1 is provided for one pad electrode PD.
- the input / output circuit portion 1 provided for the pad electrode PD1 is referred to as an input / output circuit portion 1a
- the input / output circuit portion 1 provided for the pad electrode PD2 is referred to as an input / output circuit portion 1b.
- the input / output circuit unit 1 provided for the PD 3 is referred to as an input / output circuit unit 1c
- the input / output circuit unit 1 provided for the pad electrode PD4 is referred to as an input / output circuit unit 1d.
- the input / output circuit unit 1a is connected to the pad electrode PD1, and the pad electrode PD1 is connected to the internal circuit unit 5 through the input / output circuit unit 1a.
- the input / output circuit portion 1b is connected to the pad electrode PD2, and the pad electrode PD2 is connected to the internal circuit portion 5 through the input / output circuit portion 1b.
- the input / output circuit portion 1c is connected to the pad electrode PD3, and the pad electrode PD3 is connected to the internal circuit portion 5 through the input / output circuit portion 1c.
- the input / output circuit portion 1d is connected to the pad electrode PD4, and the pad electrode PD4 is connected to the internal circuit portion 5 via the input / output circuit portion 1d.
- FIGS. 27 and 28 correspond to the case where a 100-pin, 144-pin, or 176-pin semiconductor package (PKG) is manufactured. is doing.
- FIG. 27 the technical idea of the present embodiment is not applied, while in the case of FIG. 28, the technical idea of the present embodiment is applied.
- a plurality of types of semiconductor packages having different numbers of pins are manufactured using one type of semiconductor chip CP. That is, in contrast to manufacturing a plurality of types of semiconductor packages having different numbers of pins, a semiconductor chip is shared, and the common semiconductor chip corresponds to the semiconductor chip CP.
- a case where a 224-pin semiconductor package, a 176-pin semiconductor package, a 144-pin semiconductor package, and a 100-pin semiconductor package are manufactured using the semiconductor chip CP will be described as an example.
- the number of pins of a semiconductor package corresponds to the number of external terminals (here, leads LD) included in the semiconductor package.
- a semiconductor package having the maximum number of pins (here, a 224-pin semiconductor package) is selected as the common semiconductor chip CP. It corresponds to the case where it manufactured using.
- the plurality of pad electrodes PD included in the semiconductor chip CP are all effective pads and are electrically connected to the leads LD via the wires BW. This is because, among a plurality of types of semiconductor packages that can be manufactured using a common semiconductor chip CP, a pad electrode PD that the semiconductor chip CP has in accordance with a semiconductor package having the maximum number of pins (here, a 224-pin semiconductor package).
- each pad electrode PD of the semiconductor chip CP corresponds to the semiconductor package PKG.
- wires BW one end of each wire BW is connected to each pad electrode PD of the semiconductor chip CP, and the other end of each wire BW is connected to each lead LD.
- the effective pad corresponds to a pad (pad electrode) capable of inputting a signal to a circuit in the semiconductor chip CP or outputting a signal from the circuit of the semiconductor chip CP through the pad (pad electrode).
- the number of leads LD of the semiconductor package (PKG) matches the number of effective pads in the semiconductor chip CP.
- the effective pad is electrically connected to each corresponding lead LD via a wire BW.
- a circuit in the semiconductor chip CP is connected from each lead LD via the wire BW and the effective pad connected to the lead LD.
- a signal can be input to the lead LD, or a signal can be output from the circuit in the semiconductor chip CP to the lead LD via the effective pad and the wire BW connected to the effective pad.
- the four pad electrodes PD1, PD2, PD3, and PD4 shown in FIG. 26 are all effective pads, and the corresponding leads LD (LD1, LD2, LD3, and LD4) exist. That is, the lead LD1 corresponds to the pad electrode PD1, the pad electrode PD1 and the lead LD1 are electrically connected via the wire BW1, the lead LD2 corresponds to the pad electrode PD2, and the pad electrode PD2 And the lead LD2 are electrically connected through the wire BW2.
- the lead LD3 corresponds to the pad electrode PD3, the pad electrode PD3 and the lead LD3 are electrically connected via the wire BW3, the lead LD4 corresponds to the pad electrode PD4, and the pad electrode PD4 And the lead LD4 are electrically connected through the wire BW4.
- the wire BW1 corresponds to the wire BW connecting the lead LD1 and the pad electrode PD1
- the wire BW2 corresponds to the wire BW connecting the lead LD2 and the pad electrode PD2
- the wire BW3 is the lead
- the wire BW4 corresponds to the wire BW connecting the lead LD4 and the pad electrode PD4.
- a signal is transmitted between the lead LD1 and the internal circuit portion 5 of the semiconductor chip CP via the wire BW1, the pad electrode PD1, and the input / output circuit portion 1a, and the lead LD2 and the semiconductor chip CP. Signals are transmitted to and from the internal circuit section 5 via the wire BW2, the pad electrode PD2, and the input / output circuit section 1b.
- a signal is transmitted between the lead LD3 and the internal circuit portion 5 of the semiconductor chip CP via the wire BW3, the pad electrode PD3, and the input / output circuit portion 1c, and the lead LD4 and the internal circuit portion of the semiconductor chip CP. 5, signals are transmitted via the wire BW4, the pad electrode PD4, and the input / output circuit unit 1d.
- the case of FIG. 27 and the case of FIG. 28 are more than a semiconductor package having a maximum number of pins (here, a 224-pin semiconductor package) among a plurality of types of semiconductor packages that can be manufactured using a common semiconductor chip CP.
- a semiconductor package having a small number of pins here, a 176-pin, 144-pin or 100-pin semiconductor package
- the pad electrode PD included in the semiconductor chip CP includes a mixture of effective pads and invalid pads (unused pads).
- the number of pad electrodes PD included in the semiconductor chip CP is set in accordance with the semiconductor package having the maximum number of pins (here, 224 pins). This is because the number of effective pads designed and in the semiconductor chip CP is determined by the number of pins of the semiconductor package to be manufactured. If the number of pins of the semiconductor package is reduced, the total number of pad electrodes PD of the semiconductor chip CP is not changed, but the number of effective pads of the pad electrodes PD is reduced, and pad electrodes PD other than the effective pads are ineffective pads (not yet). Used pad).
- the pad electrodes PD1, PD2, PD3, and PD4 are effective pads, but the pad electrode PD2 is an ineffective pad. (Unused pad).
- the number of leads LD is small, and the number of effective pads in the semiconductor chip CP corresponds to the number of leads LD.
- the number of pad electrodes PD of the semiconductor chip CP is designed to be 224 and a 224-pin semiconductor package is manufactured using the semiconductor chip CP, all of the 224 pad electrodes PD of the semiconductor chip CP are It becomes an effective pad.
- a 176-pin semiconductor package product is manufactured using the semiconductor chip CP, 176 pad electrodes PD out of 224 pad electrodes PD of the semiconductor chip CP become effective pads, and the remaining 48 pieces.
- the pad electrode PD becomes an invalid pad.
- 144 pad electrodes PD among the 224 pad electrodes PD of the semiconductor chip CP serve as effective pads, and the remaining 80 pads.
- the pad electrode PD becomes an invalid pad.
- the pad electrode PD of the semiconductor chip CP is a mixture of valid pads and invalid pads.
- pad electrodes PD of the semiconductor chip CP effective pads (here, pad electrodes PD1, PD3, and PD4) are interposed between the pad electrode PD (effective pad) and the internal circuit unit 5 via the input / output circuit unit 1. Signal transmission is possible, and the effective pad is electrically connected to the lead LD via the wire BW. Therefore, signals are transmitted between the internal circuit portion 5 of the semiconductor chip CP and the leads LD via the wires BW, the effective pads (pad electrodes PD1, PD3, PD4) and the input / output circuit portion 1. It has become.
- the invalid pad (here, the pad electrode PD2) is configured such that the signal cannot be transmitted between the pad electrode PD (invalid pad) and the internal circuit unit 5.
- the input / output circuit unit 1 interposed between the invalid pad and the internal circuit unit 5 is controlled by the control circuit unit 2. Specifically, the information stored in the storage circuit unit 4 is decoded by the decoder circuit unit 3, and the control circuit unit 2 controls the input / output circuit unit 1 based on the decoded information.
- the input / output circuit unit 1 interposed between the invalid pad and the internal circuit unit 5 is controlled by the control circuit unit 2 so that signals cannot be transmitted to the internal circuit unit 5.
- the invalid pad in the semiconductor chip CP outputs a signal from a circuit in the semiconductor chip CP from the invalid pad during the operation of the semiconductor device PKG, that is, while the power supply voltage is supplied to the semiconductor device PKG.
- the signal input from the invalid pad is controlled so that it cannot be transmitted to the circuit in the semiconductor chip CP. That is, in the semiconductor chip CP, the invalid pad corresponds to a pad electrode that is controlled so that it cannot function as an input terminal or an output terminal during the operation of the semiconductor device PKG.
- package information indicating the 224-pin semiconductor package is stored in the storage circuit unit 4 of the semiconductor chip CP.
- the package information stored in the memory circuit unit 4 is decoded by the decoder circuit unit 3, and the control circuit unit 2 controls the input / output circuit unit 1 based on the decoded package information, and all the pad electrodes PD (here, pad electrodes PD1, PD2, PD3, PD4) functions as an effective pad.
- package information indicating the 100-pin semiconductor package is stored in the storage circuit unit 4 of the semiconductor chip CP.
- the package information stored in the storage circuit unit 4 is decoded by the decoder circuit unit 3, and the control circuit unit 2 controls the input / output circuit unit 1 based on the decoded package information, and some pads
- the electrode PD here, the pad electrodes PD1, PD3, PD4
- the remaining pad electrode PD here, the pad electrode PD2
- the effective pad in the semiconductor chip CP can input a signal to a circuit in the semiconductor chip CP or output a signal from the circuit of the semiconductor chip CP through the effective pad.
- the effective pad in the semiconductor chip CP is a pad to be electrically connected to the lead LD which is an external terminal, and a signal output from the effective pad is output from the lead LD to the outside of the semiconductor package, or the semiconductor chip CP. It is used to input a signal input to the lead LD from the outside of the package from the effective pad to a circuit in the semiconductor chip CP. That is, the effective pad in the semiconductor chip CP is a pad used for a signal transmission path. In other words, the effective pad is used for inputting a signal to a circuit in the semiconductor chip CP or outputting a signal from a circuit in the semiconductor chip CP. It is a pad.
- the effective pads (here, the pad electrodes PD1, PD3, PD4) of the semiconductor chip CP are respectively wired to the corresponding leads LD (LD1, LD3, LD4). They are electrically connected via BW (BW1, BW3, BW4). Specifically, the pad electrode PD1 and the lead LD1 are electrically connected via the wire BW1, the pad electrode PD3 and the lead LD3 are electrically connected via the wire BW3, and the pad electrode PD4 and the lead LD4 are electrically connected. Are electrically connected via a wire BW4.
- the signal transmission path between the leads LD1, LD3, LD4 and the internal circuit portion 5 of the semiconductor chip CP is common in the cases of FIG. 26, FIG. 27, and FIG. That is, a signal is transmitted between the lead LD1 and the internal circuit portion 5 of the semiconductor chip CP via the wire BW1, the pad electrode PD1, and the input / output circuit portion 1a. A signal is transmitted between the lead LD3 and the internal circuit portion 5 of the semiconductor chip CP via the wire BW3, the pad electrode PD3, and the input / output circuit portion 1c. A signal is transmitted between the lead LD4 and the internal circuit portion 5 of the semiconductor chip CP via the wire BW4, the pad electrode PD4, and the input / output circuit portion 1d.
- a signal is input from each lead LD (LD1, LD3, LD4) to a circuit in the semiconductor chip CP via the wire BW (BW1, BW3, BW4) connected to the lead LD and the effective pad.
- a signal can be output from the circuit in the semiconductor chip CP to the lead LD via the effective pad and the wire BW (BW1, BW3, BW4) connected to the effective pad.
- the lead LD functions as an external terminal of the semiconductor package, and between the internal circuit portion 5 of the semiconductor chip CP and each lead LD.
- signal transmission is performed via the wire BW, the effective pad (pad electrode PD), and the input / output circuit unit 1.
- the pad electrode PD2 is an effective pad, but in the case of FIG. 27 and FIG. 28, the pad electrode PD2 is an invalid pad (unused pad).
- the wire BW is not connected to the invalid pad (pad electrode PD2).
- one end of the wire BW5 is also connected to the invalid pad (pad electrode PD2).
- the other end of the wire BW5 is connected to the lead LD3. That is, in the case of FIG.
- one end of each of the two wires BW3 and BW5 is connected to the lead LD3, and the other end of one wire BW3 is the effective pad (pad electrode PD3) of the semiconductor chip CP.
- the other end of the other wire BW5 is connected to the invalid pad (pad electrode PD2) of the semiconductor chip CP.
- the wire BW5 corresponds to the wire BW connecting the lead LD3 and the pad electrode PD2.
- a path through which a signal is transmitted between the lead LD3 and the semiconductor chip CP is a path that connects the pad electrode PD3 (effective pad) of the semiconductor chip CP and the lead LD3 via the wire BW3.
- a path connecting the pad electrode PD2 (invalid pad) of the semiconductor chip CP and the lead LD3 via the wire BW5 does not function as a path for transmitting a signal between the semiconductor chip CP and the lead LD3.
- the case of FIG. 28 is that the wire BW5 for connecting the invalid pad of the semiconductor chip CP and the lead LD3 is added to the case of FIG.
- the wire BW5 does not function as a signal transmission path between the semiconductor chip CP and the lead LD3, and is electrically meaningless.
- a wire BW5 that is electrically meaningless is added as shown in FIG. That is, as compared with the case of FIG. 27, in the case of FIG. 28, the addition of the wire BW5 which is electrically meaningless can provide the effect of suppressing or preventing the occurrence of the wire flow described above.
- the resin material MR1 injected into the cavity CAV of the molds KG1 and KG2 in the resin sealing process is the resin indicated by the arrow in FIG. It proceeds along the traveling direction YG4 and collides with the wire BW1, the wire BW3, and the wire BW4 in this order. At this time, reflecting the fact that the wire BW is not connected to the pad electrode PD2 which is an invalid pad, the distance between the wire BW1 and the wire BW3 is increased, so that the wire BW1 collides with the wire BW1.
- the resin material MR1 flowing toward the wire BW3 is considerably accelerated before colliding with the wire BW3, and collides with the wire BW3 at a considerably high speed. As a result, the wire BW3 may be deformed, and a wire flow may occur in the wire BW3. This leads to a decrease in the manufacturing yield of the semiconductor package.
- the resin material MR1 injected into the cavity CAV of the molds KG1 and KG2 in the resin sealing process (the above step S4d also corresponds to the molding process) is indicated by an arrow in FIG.
- the resin travels along the resin traveling direction YG5 and collides with the wire BW1, the wire BW5, the wire BW3, and the wire BW4 in order.
- the resin material MR1 that flows toward the wire BW3 after colliding with the wire BW1 once collides with the wire BW5 arranged between the wires BW1 and BW3, and then flows toward the wire BW3 and flows into the wire BW3. Collide with W3.
- the speed of the resin material MR1 that collides with the wire BW3 in FIG. 28 is slower than the speed of the resin material MR1 that collides with the wire BW3 in FIG. For this reason, in the case of FIG. 28, the speed of the resin material MR1 at the time of the collision is reduced, so that even if the resin material MR1 collides, the wire BW3 is not easily deformed, and the occurrence of wire flow in the wire BW3 is suppressed or prevented. can do.
- the resin traveling direction is opposite to the resin traveling direction YG5.
- the resin material MR1 injected into the cavities CAV of the molds KG1 and KG2 in the resin sealing process proceeds along the resin traveling direction YG6, and the wires BW4, BW3, BW5, and wires Collisions with BW1 in order.
- the resin material MR1 flowing toward the wire BW1 after colliding with the wire BW3 once collides with the wire BW5 arranged between the wires BW3 and BW1, and then flows toward the wire BW1 Collide with W1.
- the invalid pad (pad electrode PD2) of the semiconductor chip CP and the lead LD3 are connected by the wire BW5, and the wire BW5 that does not function as a signal transmission path functions as a signal transmission path. This is used to prevent the wire flow from occurring in the wire BW3.
- the pad electrode PD2 is an invalid pad in the semiconductor chip CP.
- the pad electrode PD2 is an effective pad in the semiconductor chip CP. That is, since a plurality of types of semiconductor packages having different numbers of pins can be manufactured using the semiconductor chip CP, the pad electrode PD2 is configured to be able to switch between an effective pad and an ineffective pad. For this reason, when a 100-pin semiconductor package is manufactured using the semiconductor chip CP, even if the pad electrode PD2 is an invalid pad and is an electrically unnecessary pad, the semiconductor chip CP is used to manufacture 224. When a pin semiconductor package is manufactured, the pad electrode PD2 is an effective pad and an electrically necessary pad.
- the pad electrode PD2 is also a necessary pad in designing and manufacturing the semiconductor chip CP. For this reason, in the case of FIG. 28, the pad electrode PD2 is not provided with an unnecessary pad, but is provided as a pad necessary for design.
- the semiconductor chip CP uses the pad electrode PD2 as an effective pad.
- the semiconductor device PKG uses the pad electrode PD2 fixed to the invalid pad.
- the pad electrode PD2 is an invalid pad in the case of FIG. 28 and is electrically unnecessary, if the pad electrode PD2 is not provided in the semiconductor chip CP, a common semiconductor chip CP is used. In this case, the pad electrode PD2 cannot be deleted in the case of FIG. Therefore, in the case of FIG. 28, even if the pad electrode PD2 which is an invalid pad exists, the presence of the pad electrode PD2 does not cause an increase in the size of the semiconductor chip CP, and the semiconductor chip CP is increased in size. Not connected.
- the wire flow problem is solved by connecting the wire BW5 to the pad electrode PD2 which is an invalid pad in the case of FIG. 28. This is different from the method of providing the dummy pad DM described with reference to FIG.
- a pad not connected to a circuit in the common chip is provided as the dummy pad DM
- a 224-pin semiconductor package is manufactured using the common chip to which the dummy pad DM is added. In doing so, the added dummy pad DM becomes completely unnecessary. For this reason, the enlargement of a semiconductor chip will be invited.
- the wire flow is prevented by connecting the wire BW5 to the pad electrode PD2 of the semiconductor chip CP in the case of FIG. 28, but the common semiconductor chip CP as shown in FIG.
- the pad electrode PD2 is used as an effective pad and becomes a signal transmission path. Therefore, the pad electrode PD2 of the semiconductor chip CP is a necessary pad electrode without considering the problem of preventing the wire flow.
- the semiconductor device CP It can be said that the size of the chip CP is not increased. Therefore, in the present embodiment, the semiconductor chip CP can be downsized, the semiconductor package manufactured using the semiconductor chip CP can be downsized, and the manufacturing cost can be reduced. Can do.
- this embodiment considers manufacturing a plurality of types of semiconductor packages having different numbers of pins using a common semiconductor chip, and issues of wire flow when manufacturing a semiconductor package with the maximum number of pins.
- a semiconductor package with a small number of pins we realized that there was a problem of wire flow due to the generation of invalid pads (unused pads). It is obtained.
- an ineffective pad that is inevitably generated is used, and one end of the wire (BW5) is connected to the ineffective pad (pad electrode PD2). And the other end of the wire (BW5) is connected to the lead (LD3), thereby solving the problem of wire flow.
- the wire flow can be suppressed or prevented, so that the manufacturing yield of the semiconductor device (semiconductor package) can be improved, the semiconductor chip can be miniaturized, and the semiconductor manufactured using the semiconductor chip The size of the device (semiconductor package) can be reduced.
- the other end of the wire BW (here, the wire BW5) whose one end is connected to the invalid pad (here, the pad electrode PD2) is a lead electrically connected to the valid pad via the wire BW. It is connected to the LD (here, the lead LD3). That is, the wire flow prevention wire (here, the wire BW5) has one end connected to the invalid pad and the other end connected to the lead LD (here, the lead LD3) serving as a signal transmission path.
- the provision of the wire flow prevention wire (here, the wire BW5) not only does not need to add an unnecessary pad electrode such as the dummy pad DM but also does not need to add an unnecessary lead. .
- By eliminating unnecessary leads it is possible to reduce the size of the semiconductor package (PKG).
- a semiconductor package (PKG) can be manufactured using a general-purpose lead frame, and thus manufacturing costs can be reduced.
- each pad electrode PD of the semiconductor chip CP is included in the semiconductor chip CP. It is connected to a circuit (internal circuit unit 5), and is configured to be able to switch between a valid pad and an invalid pad.
- FIG. 29 is a circuit diagram for explaining a specific method for switching the pad electrode PD to be an effective pad or an invalid pad.
- FIG. 30 is an explanatory diagram showing a configuration example of a region RG1 surrounded by a dotted line in FIG.
- FIG. 29 is a more specific view of a part of FIG. 25. The part surrounded by a two-dot chain line in FIG. 29 is included in the control circuit unit 2 in FIG.
- the input / output circuit section 1 is connected to each pad electrode PD, and the pad electrode PD and the internal circuit section 5 are connected via the input / output circuit section 1. Since the input / output circuit unit 1 is interposed between the pad electrode PD and the internal circuit unit 5, it is possible to control signal transmission between the pad electrode PD and the internal circuit unit 5 by the input / output circuit unit 1. it can.
- the control circuit unit 2 has selection circuits (multiplexers) 2a, 2b, 2c, and 2d for each input / output circuit unit 1. Specifically, as shown in FIG. 29, a selection circuit 2a and a selection circuit 2b are connected in multiple stages between the internal circuit unit 5 and the control terminal on the output side of the input / output circuit unit 1, and the selection circuit 2b. Is provided on the side close to the input / output circuit section 1. A selection circuit 2c and a selection circuit 2d are connected in multiple stages between the internal circuit unit 5 and the input side control terminal of the input / output circuit unit 1, and the selection circuit 2d is provided on the side close to the input / output circuit unit 1. It has been.
- the selection circuit 2a receives the signal (11) from the internal circuit unit 5 and the ground potential, and one of them is output and input to the selection circuit 2b. While the selection signal is not input to the selection circuit 2a, the selection circuit 2a outputs a ground potential. When the selection signal (signal 12) is input to the selection circuit 2a, the selection circuit 2a The input signal (11) is output.
- the selection circuit 2b receives the output of the selection circuit 2a and the ground potential, one of which is output and input to the control terminal on the output side of the input / output circuit section 1. While the selection signal is not input to the selection circuit 2b, the selection circuit 2b outputs the input from the selection circuit 2a, and when the selection signal (decode signal from the decoder circuit unit 3) is input to the selection circuit 2b, The selection circuit 2b outputs a ground potential. The output of the selection circuit 2b is input to the output-side control terminal of the input / output circuit unit 1 (control terminal of the output circuit unit).
- the input / output circuit unit 1 transmits a signal from the internal circuit unit 5 to the pad electrode PD via the input / output circuit unit 1. Is in an impossible state.
- the selection circuit 2c receives the signal (14) from the internal circuit unit 5 and the ground potential, one of which is output and input to the selection circuit 2d. While the selection signal is not input to the selection circuit 2c, the selection circuit 2c outputs a ground potential. When the selection signal (signal 15) is input to the selection circuit 2c, the selection circuit 2c The input signal (14) is output.
- the selection circuit 2d receives the output of the selection circuit 2c and the ground potential, one of which is output and input to the control terminal on the input side of the input / output circuit unit 1. While the selection signal is not input to the selection circuit 2d, the selection circuit 2d outputs the input from the selection circuit 2c, and when the selection signal (decode signal from the decoder circuit unit 3) is input to the selection circuit 2d, The selection circuit 2d outputs a ground potential. The output of the selection circuit 2d is input to the input-side control terminal of the input / output circuit unit 1 (control terminal of the input circuit unit).
- the input / output circuit unit 1 transmits a signal from the internal circuit unit 5 to the pad electrode PD via the input / output circuit unit 1. Is in an impossible state.
- a signal 11 is input to the selection circuit 2a as a control signal (control signal of the input / output circuit unit 1) from a CPU or peripheral IP included in the internal circuit unit 5, and a selection signal (function selection signal).
- the signal 12 is input to the selection circuit 2a
- the signal 11 is output from the selection circuit 2a and input to the selection circuit 2b.
- the signal (decode signal) from the decoder circuit unit 3 is not input to the selection circuit 2b as a selection signal
- the signal 11 input to the selection circuit 2b is output from the selection circuit 2b and is input / output circuit unit 1
- the input / output circuit unit 1 is ready to transmit a signal from the internal circuit unit 5 to the pad electrode PD via the input / output circuit unit 1.
- a signal 13 (output signal) is transmitted from the internal circuit unit 5 to the pad electrode PD via the input / output circuit unit 1, and further, a semiconductor is connected via the wire BW and the lead LD connected to the pad electrode PD. It is output outside the device PKG. In this manner, the signal 13 (output signal) can be transmitted from the internal circuit portion 5 of the semiconductor chip CP to the pad electrode PD via the input / output circuit portion 1 and output from the pad electrode PD.
- the input is basically the same as the output. That is, in FIG. 29, a signal 14 is input to the selection circuit 2c as a control signal (control signal of the input / output circuit unit 1) from a CPU or peripheral IP included in the internal circuit unit 5, and the selection signal (function selection) When the signal 15 is input to the selection circuit 2c as a signal), the signal 14 is output from the selection circuit 2c and input to the selection circuit 2d.
- control signal of the input / output circuit unit 1 control signal of the input / output circuit unit 1
- the selection signal function selection
- the signal (decode signal) from the decoder circuit unit 3 is not input as a selection signal to the selection circuit 2d
- the signal 14 input to the selection circuit 2d is output from the selection circuit 2d and input / output circuit unit 1
- the input / output circuit unit 1 is ready to transmit signals from the pad electrode PD to the internal circuit unit 5 via the input / output circuit unit 1.
- the signal 16 (input signal) transmitted through the lead LD and the wire BW is input to the pad electrode PD and transmitted to the internal circuit unit 5 through the input / output circuit unit 1.
- the signal 16 (input signal) input from the pad electrode PD can be transmitted to the internal circuit unit 5 of the semiconductor chip CP.
- the control circuit unit 2 selects / controls the path (transmission path) of the write data from the CPU and peripheral IP included in the internal circuit unit 5, the input / output enable signal, or the read data from the pad electrode PD. Circuit.
- the selection circuits 2b and 2d are independent of whether the signals 11 and 14 are input to the selection circuits 2b and 2d.
- the ground potential is output from 2d, and the ground potential output from the selection circuits 2b and 2d is input to the output side control terminal and the input side control terminal of the input / output circuit unit 1.
- the input / output circuit unit 1 is connected between the internal circuit unit 5 and the pad electrode PD. It becomes impossible to transmit a signal through the network.
- the input / output circuit unit 1 to which the selection circuits 2b and 2d are connected is forcibly disabled, and the input / output circuit
- the pad electrode PD connected to the unit 1 becomes an invalid pad.
- the input / output circuit unit 1 to which the selection circuits 2b and 2d are connected can function as a normal input / output circuit.
- the pad electrode PD connected to the output circuit unit 1 becomes an effective pad. Therefore, according to the signal from the decoder circuit unit 3, the control circuit unit 2 can switch whether the pad electrode PD is an effective pad or an invalid pad.
- a package code (package information) indicating the number of pins of a semiconductor package manufactured using the semiconductor chip CP is stored in the storage circuit unit 4 of the semiconductor chip CP. Therefore, a package code indicating 224 pins is stored in the memory circuit portion 4 of the semiconductor chip CP used in the 224-pin semiconductor package, and the semiconductor chip CP used in the 176-pin semiconductor package is stored in the memory circuit portion 4 of the semiconductor chip CP.
- the memory circuit unit 4 stores a package code indicating 176 pins.
- the storage circuit portion 4 of the semiconductor chip CP used in the 144-pin semiconductor package stores a package code indicating 144 pins, and also stores the semiconductor chip CP used in the 100-pin semiconductor package.
- the circuit unit 4 stores a package code indicating 100 pins.
- the package code stored in the storage circuit unit 4 is, for example, an 8-bit code, but is not limited to 8 bits, and may be, for example, 2 bits or 4 bits.
- the package code stored in the storage circuit unit 4 is input to the decoder circuit unit 3 and decoded by the decoder circuit unit 3.
- the decoder circuit unit 3 outputs a signal (decode signal) corresponding to the package code input from the memory circuit unit 4 to the control circuit unit 2.
- a signal (decode signal) output from the decoder circuit unit 3 to the control circuit unit 2 is defined as pkg100.
- a signal (decode signal) output from the decoder circuit unit 3 to the control circuit unit 2 is set as pkg144.
- a signal (decode signal) output from the decoder circuit unit 3 to the control circuit unit 2 is defined as pkg176.
- the decoder circuit unit 3 When the package code indicates 224 pins, the decoder circuit unit 3 does not output signals (decode signals input to the selection circuits 2b and 2d) to the control circuit unit 2. This is because, when the package code indicates 224 pins, the input / output circuit unit to be forcibly disabled by the control circuit unit 2 in order to make all the plurality of pad electrodes PD included in the semiconductor chip CP effective pads. This is because 1 and the pad electrode PD do not exist.
- a ground potential is output from the selection circuits 2b and 2d, and the ground potential is input to the output-side control terminal and the input-side control terminal of the input / output circuit unit 1, and the input / output
- the circuit unit 1 is forcibly disabled, and the pad electrode PD connected to the input / output circuit unit 1 becomes an invalid pad.
- the pad electrode PD to which the configuration of FIG. 30A is applied becomes an effective pad when a 224-pin semiconductor package is manufactured.
- the pad electrode PD to which the configuration of FIG. 30B is applied becomes an effective pad when manufacturing any one of the 224-pin and 176-pin semiconductor packages, but either the 100-pin or the 144-pin is used. When the semiconductor package is manufactured, it becomes an invalid pad.
- the pad electrode PD to which the configuration of FIG. 30C is applied becomes an effective pad when manufacturing a semiconductor package of either 224 pins or 144 pins, but either of the 100 pins and 176 pins is used. When the semiconductor package is manufactured, it becomes an invalid pad.
- the pad electrode PD to which the configuration of FIG. 30D is applied becomes an effective pad when manufacturing a semiconductor package of either 224 pins or 100 pins, but either of 144 pins or 176 pins is used. When a semiconductor package is manufactured, it becomes an invalid pad.
- the pad electrode PD to which the configuration of FIG. 30E is applied becomes an effective pad when manufacturing any one of the 224-pin, 176-pin, and 144-pin semiconductor packages, but the 100-pin semiconductor package. When it is manufactured, it becomes an invalid pad.
- the pad electrode PD to which the configuration of FIG. 30F is applied becomes an effective pad when manufacturing any one of the 224-pin, 176-pin, and 100-pin semiconductor packages, but the 144-pin semiconductor package. When it is manufactured, it becomes an invalid pad.
- the pad electrode PD to which the configuration of FIG. 30G is applied becomes an effective pad when manufacturing any one of the 224-pin, 144-pin, and 100-pin semiconductor packages, but the 176-pin semiconductor package is used. When manufactured, it becomes an invalid pad.
- the pad electrode PD to which the configuration of FIG. 30 (h) is applied is an effective pad even when any of the semiconductor packages of 224 pins, 176 pins, 144 pins, and 100 pins is manufactured.
- the pad electrode PD shown in FIG. Any one of the eight types of configurations (a) to (h) may be applied, and the package code may be stored in the storage circuit unit 4 when the semiconductor package is manufactured.
- the package code (package information) is information (code) corresponding to the number of pins of the semiconductor package to be manufactured.
- the decoder circuit unit 3 decodes the package code stored in the storage circuit unit 4, and the control circuit unit 2 controls each input / output circuit unit 1 based on the decoded package code. Whether each pad electrode PD connected to 1 is an effective pad or an invalid pad can be set independently.
- a plurality of selection circuits connected in multiple stages are connected to each input / output circuit unit 1, and a signal (decode signal) output from the decoder circuit unit 3 is a multi-stage. It is input to the final stage selection circuit (corresponding to the selection circuit closest to the input / output circuit unit 1) among the plurality of connected selection circuits.
- the selection circuit 2a and the selection circuit 2b are connected in multiple stages between the internal circuit unit 5 and the output side of the input / output circuit unit 1, and the internal circuit unit 5 and the input / output circuit are connected.
- the selection circuit 2c and the selection circuit 2d are connected in multistage between the input side of the unit 1.
- the signal output from the decoder circuit unit 3 is input to the final selection circuit 2b among the selection circuits 2a and 2b connected in multiple stages. Yes.
- the decoder circuit unit 3 outputs the selection circuit 2d of the multistage connection to the selection circuit 2d at the final stage (side closer to the input / output circuit unit 1). Signal is input.
- the input / output circuit unit 1 when the input / output circuit unit 1 is controlled by the control circuit unit 2, the control (selection) by the signal (decoded signal) output from the decoder circuit unit 3 has the highest priority. Therefore, the input / output circuit unit 1 can be forcibly disabled by a signal (decode signal) output from the decoder circuit unit 3, and thereby the pad connected to the input / output circuit unit 1.
- the electrode PD can be forcibly set as an invalid pad.
- a package code indicating the number of pins of a semiconductor package to be manufactured is stored in the memory circuit unit 4, it should be an invalid pad among a plurality of pad electrodes PD of the semiconductor chip CP according to the package code.
- the pad electrode PD can be forcibly set as an invalid pad. Unless the package code stored in the memory circuit unit 4 is rewritten, the pad electrode PD set as an invalid pad in the semiconductor chip CP does not change as an effective pad, and is set as an effective pad in the semiconductor chip CP. The pad electrode PD does not change to an invalid pad. Further, after the package code indicating the number of pins of the semiconductor package to be manufactured is written in the memory circuit unit 4, the package code stored in the memory circuit unit 4 is not rewritten. Therefore, the pad electrode PD set as an invalid pad in the semiconductor chip CP does not change to an effective pad during the operation of the semiconductor package, and the pad electrode PD set as an effective pad in the semiconductor chip CP It does not change to an invalid pad during package operation.
- the package code (package information) is written into the memory circuit unit 4.
- the writing process is the wafer test process in step S3 or the test process in step S5. Preferably it is done.
- the package code is written to the memory circuit unit 4 in the wafer test process in step S3 or the test process in step S5 for performing an electrical test, the package code can be written easily and accurately.
- step S3 when writing the package code to the memory circuit unit 4, it is preferable to write the package code after performing the test item, but before performing the test item, It is also possible to write the package code or write the package code in the middle of the execution of the test item.
- step S5 when writing the package code to the memory circuit unit 4, it is preferable to write the package code after executing the test item, but before executing the test item.
- the package code can be written, or the package code can be written in the middle of the execution of the test item.
- the package code is written to the memory circuit unit 4 in the wafer test process in step S3
- the package code is written to the memory circuit unit 4 before cutting (dicing) the semiconductor wafer SW in step S4a. Corresponds to what to do.
- the semiconductor wafer SW After performing the wafer process in step S2 and before cutting the semiconductor wafer SW in step S4a, the semiconductor wafer SW has a plurality of semiconductor chip regions CPR, and each semiconductor chip region CPR is shown in FIG.
- the circuit configuration is similar to that of the semiconductor chip CP.
- the package code is written into the memory circuit unit 4 before the semiconductor wafer SW is cut (diced) in step S4a, the plurality of semiconductor chips are applied to the plurality of semiconductor chip regions CPR of the semiconductor wafer SW.
- the package code is written in the memory circuit unit 4 in the area CPR. At this time, the package code is written from the pad electrode PD to the memory circuit unit 4 using the pad electrode PD in the semiconductor chip region CPR.
- the package is applied to the storage circuit units 4 in a plurality (two or more, for example, about 32) of semiconductor chip regions CPR at a time. Since the code can be written, the time required for writing the package code can be shortened. Thereby, the manufacturing time of the semiconductor device PKG can be shortened. In addition, the throughput of the semiconductor device PKG can be improved, and the manufacturing cost of the semiconductor device can be reduced.
- the package code is written to the memory circuit unit 4 in the test process of step S5
- the package code is written to the memory circuit unit 4 after the resin sealing process (corresponding to step S4d). It corresponds to. That is, this corresponds to writing the package code (package information) to the memory circuit portion 4 after the sealing portion MR is formed in the step S4d.
- the test process in step S5 is performed after the assembly process in step S4 is completed.
- a package code writing process to the memory circuit unit 4 is performed after the assembly process in step S4 is completed, the package code is stored in the memory circuit unit 4 after various heating processes in the manufacturing process of the semiconductor device. Writing will be performed.
- the package code is stored in the memory circuit unit 4, it is not necessary to perform various heating processes during the manufacturing process of the semiconductor device, so that the reliability of the package code stored in the memory circuit unit 4 is further improved. Can be made.
- the process involving heating at a relatively high temperature is performed until the resin sealing process (corresponding to step S4d), and thereafter, the temperature of the semiconductor chip CP is not so high. It doesn't have to be expensive. For this reason, if a package code writing process to the memory circuit unit 4 is performed after the resin sealing process (corresponding to step S4d), the temperature of the semiconductor chip CP is stored after the package code is stored in the memory circuit unit 4.
- various heating processes during the manufacturing process of the semiconductor device can be omitted. Thereby, the reliability of the package code memorize
- an external terminal (here, lead LD) of the semiconductor device PKG can be used to write the package code from the external terminal (lead LD) to the memory circuit portion 4 in the semiconductor chip CP included in the semiconductor device PKG.
- the package code in the memory circuit unit 4 is set to an initial value before the process of writing the package code in the memory circuit unit 4 is performed.
- the initial package code can be set to 1 for all bits, for example.
- the initial package code is a package code indicating 224 pins, when a semiconductor package having a number of pins other than 224 pins (specifically, 100 pins, 144 pins, or 176 pins) is manufactured, the manufacturing is performed.
- the package code indicating the number of pins of the semiconductor package to be processed may be written into the memory circuit unit 4 in the wafer test process in step S3 or the test process in step S5.
- 224-pin, 176-pin, 144-pin, and 100-pin semiconductor packages are used as a common semiconductor chip.
- the case of manufacturing using CP has been described as an example.
- the number of pins of the semiconductor package to be manufactured is not limited to the case of 224 pins, 176 pins, 144 pins, and 100 pins, and semiconductor packages having arbitrary different numbers of pins are manufactured using a common semiconductor chip CP. It can also be applied to cases.
- the semiconductor package form of the semiconductor device PKG has been described by taking the QFP form semiconductor package as an example, but is not limited to the QFP form, and a wire is connected to the pad electrode PD of the semiconductor chip CP, and resin sealing is performed.
- the semiconductor device PKG may be a QFN type semiconductor package.
- a semiconductor package using a wiring board may be used.
- FIG. 31 is an explanatory diagram conceptually showing the semiconductor device PKG of the present embodiment.
- FIG. 31 corresponds to the configuration of FIG. 28 described above, but the configuration of FIG. That is, the switch circuit unit SW in FIG. 31 corresponds to a superordinate concept of the combination of the input / output circuit unit 1 and the control circuit unit 2 in FIG.
- the semiconductor device PKG of the present embodiment has a semiconductor chip CP and leads LD3 (first external terminals) arranged around the semiconductor chip CP.
- the semiconductor chip CP includes an internal circuit 5b (first internal circuit), an internal circuit 5c (second internal circuit), and a switch circuit unit SW.
- a pad electrode PD2 is provided on the surface (main surface) of the semiconductor chip CP. (First electrode) and pad electrode PD3 (second electrode) are formed.
- the pad electrode PD3 is electrically connected to the internal circuit 5c, and a signal can be transmitted between the internal circuit 5c and the pad electrode PD3.
- the semiconductor device PKG further electrically connects the wire BW5 (first wire) that electrically connects the pad electrode PD2 of the semiconductor chip CP and the lead LD3, and the pad electrode PD3 of the semiconductor chip CP and the lead LD3. It has a wire BW3 (second wire), and a sealing portion MR (sealing body) that seals the semiconductor chip CP, the wire BW5, and the wire BW3 with resin.
- wire BW5 first wire
- MR sealing body
- the pad electrode PD3 is electrically connected to the internal circuit 5c, and a signal can be transmitted between the internal circuit 5c and the pad electrode PD3.
- the pad electrode PD3 is an effective pad that can function as a signal input or output path. Therefore, a signal input from the lead LD3 to the pad electrode PD3 via the wire BW3 is transmitted to the internal circuit 5c, or a signal transmitted from the internal circuit 5c to the pad electrode PD is output from the pad electrode PD3.
- the signal can be transmitted to the lead LD3 via the wire BW3.
- the switch circuit unit SW has a first state in which a signal can be transmitted between the internal circuit 5b and the pad electrode PD2, and the internal circuit 5b and the pad.
- This is a circuit that can set the second state in which signal transmission to and from the electrode PD2 is impossible.
- the switch circuit unit SW is fixed to the second state. is there.
- This is a semiconductor chip in which the semiconductor chip CP can be used to manufacture a plurality of types of semiconductor packages, and in the semiconductor device PKG, the pad electrode PD2 functions as both a signal input path and an output path. This indicates that the pad is invalid.
- the semiconductor chip CP is not a common semiconductor chip that can be used to manufacture a plurality of types of semiconductor packages, a first state in which signals can be transmitted between the internal circuit 5b and the pad electrode PD2, It is not necessary to provide the semiconductor chip CP with the switch circuit unit SW that can set the second state in which the signal cannot be transmitted between the internal circuit 5b and the pad electrode PD2. This is because when the semiconductor device PKG is in operation, if it is fixed in the second state in which signal transmission between the internal circuit 5b and the pad electrode PD2 is impossible, the viewpoint of the circuit configuration necessary for the semiconductor device PKG. In view of this, the circuit configuration (switch circuit unit SW) capable of setting the first state in which signals can be transmitted between the internal circuit 5b and the pad electrode PD2 is considered to be an unnecessary circuit configuration for the semiconductor chip CP. Because.
- the semiconductor chip CP has the switch circuit unit SW that can set the first state in which signal transmission is possible and the second state in which signal transmission is impossible.
- the switch circuit unit SW is fixed in the second state.
- the pad electrode PD2 of the semiconductor chip CP is an invalid pad (unused pad).
- the pad electrode PD2 of the semiconductor chip CP is used as an effective pad. This suggests that a semiconductor package having the structure used was also assumed.
- both the case where the pad electrode PD2 is used as an effective pad and the case where the pad electrode PD2 is used as an invalid pad are assumed, and the type is determined using the common semiconductor chip CP.
- Different semiconductor packages can be manufactured, and the semiconductor device PKG uses the pad electrode PD2 as an invalid pad.
- the operation of the semiconductor device PKG corresponds to the time when the power supply voltage is supplied to the semiconductor device PKG, and thus the time when the power supply voltage is supplied to the semiconductor chip CP in the semiconductor device PKG. For this reason, while the power supply voltage is supplied to the semiconductor device PKG, the switch circuit unit SW is fixed in the second state.
- the semiconductor device PKG and the semiconductor chip CP therein do not operate, and a signal is input into the semiconductor chip CP and a signal is output from the semiconductor chip CP. Is not done. For this reason, in the semiconductor device PKG, no signal is transmitted between the internal circuit 5b and the pad electrode PD2 regardless of whether the power supply voltage is supplied.
- Still another of the main features of the present embodiment is that in the semiconductor device PKG, a wire BW3 that electrically connects the pad electrode PD3 (effective pad) of the semiconductor chip CP and the lead LD3 is formed. In addition, a wire BW5 that electrically connects the pad electrode PD2 (invalid pad) of the semiconductor chip CP and the lead LD3 is also formed.
- a semiconductor package having a different number of pins can be manufactured using a common semiconductor chip, and a semiconductor package having a small number of pins can be manufactured using the common semiconductor chip.
- a problem of wire flow occurs due to the generation of invalid pads (unused pads) on the semiconductor chip.
- the pad electrode PD3, which is an effective pad, and the lead LD3 are connected by a wire BW3, and the lead LD3 and the pad electrode PD2, which is an invalid pad (unused pad), are connected by a wire BW5.
- the wire BW5 By forming the wire BW5, it is possible to suppress or prevent the occurrence of wire flow when forming the sealing portion MR, compared to the case where the wire BW5 is not formed. For this reason, the manufacturing yield of the semiconductor device can be improved.
- the semiconductor chip CP can be downsized, and a semiconductor using the semiconductor chip
- the apparatus PKG can be reduced in size.
- the manufacturing cost of the PKG of the semiconductor device can be reduced.
- the lead LD3 and the pad electrode PD3 are connected by the wire BW3, and the lead LD3 and the pad electrode PD2 are connected by the wire BW5.
- the pad electrode PD2 and the wire BW5 are It does not function as a signal transmission path. That is, a signal is transmitted between the lead LD3 and the semiconductor chip CP via the pad electrode PD3 and the wire BW3, but no signal is transmitted via the pad electrode PD2 and the wire BW5.
- the semiconductor chip CP includes a memory circuit unit 4.
- the memory circuit unit 4 is electrically connected to the switch circuit unit SW, and stores information (corresponding to the package code) stored in the memory circuit unit 4. Based on this, the switch circuit unit SW is fixed in the second state in which signal transmission is impossible between the internal circuit 5b and the pad electrode PD2 (see FIGS. 28 and 31 above). Based on the information stored in the memory circuit unit 4 built in the semiconductor chip CP, the switch circuit unit SW is fixed in the second state, so that the switch circuit unit SW is always set to the second during the operation of the semiconductor device PKG. Fixing to a state can be realized easily and accurately.
- the switch circuit unit SW includes a control circuit unit 2 and an input / output circuit unit 1b (first input / output circuit unit) connected to the pad electrode PD2. Based on the information stored in the memory circuit unit 4, the control circuit unit 2 controls the input / output circuit unit 1b so that the switch circuit unit SW is in the second state (between the internal circuit 5b and the pad electrode PD2). (The second state in which signal transmission is impossible)) (see FIG. 28 and FIG. 31). Thereby, during operation of the semiconductor device PKG, it is possible to more easily and accurately realize the constant fixing of the switch circuit unit SW to the second state.
- the semiconductor chip CP further includes a decoder circuit unit 3, information stored in the memory circuit unit 4 is converted into a signal by the decoder circuit unit 3, and the signal converted by the decoder circuit unit 3 is converted into a control circuit unit. 2 and the control circuit 2 controls the input / output circuit unit 1b based on the signal input to the control circuit unit 2, so that the switch circuit unit SW is fixed in the second state (see FIG. 28 and FIG. 28). (See FIG. 31).
- a pad electrode PD1 (third electrode) is further formed on the surface (main surface) of the semiconductor chip CP, and the semiconductor device PKG includes a lead LD1 (second external terminal) disposed around the semiconductor chip CP. ) And a wire BW1 (third wire) for electrically connecting the pad electrode PD1 and the lead LD1.
- the pad electrode PD1 is electrically connected to the internal circuit 5a (third internal circuit) of the semiconductor chip CP, and signals can be transmitted between the internal circuit 5a and the pad electrode PD1. That is, the pad electrode PD1 is an effective pad.
- the pad electrode PD1, the pad electrode PD2, and the pad electrode PD3 are along the first side (any one of the sides SD1, SD2, SD3, and SD4) of the surface (main surface) of the semiconductor chip CP.
- the PD electrode 2 is disposed between the pad electrode PD1 and the pad electrode PD3.
- the wire BW5 connected to the pad electrode PD2 is the same as the wire BW1 connected to the pad electrode PD1 and the pad electrode. It is located between the wires BW3 connected to the PD3.
- the wire BW5 it is possible to suppress or prevent the occurrence of wire flow in the wire BW1 or the wire BW3 when the sealing portion MR is formed, compared to the case where the wire BW5 is not formed.
- a pad electrode PD4 (fourth electrode) is further formed on the surface (main surface) of the semiconductor chip CP, and the semiconductor device PKG includes a lead LD4 (third external terminal) disposed around the semiconductor chip CP. ) And a wire BW4 (fourth wire) for electrically connecting the pad electrode PD4 and the lead LD4.
- the pad electrode PD4 is electrically connected to the internal circuit 5d (fourth internal circuit) of the semiconductor chip CP, and signals can be transmitted between the internal circuit 5d and the pad electrode PD4. That is, the pad electrode PD4 is an effective pad.
- the pad electrodes PD1, PD2, PD3, and PD4 are arranged along the first side (any one of the sides SD1, SD2, SD3, and SD4) of the surface (main surface) of the semiconductor chip.
- the electrode 2 is disposed between the pad electrode PD1 and the pad electrode PD3, and the pad electrode PD3 is disposed between the pad electrode PD2 and the pad electrode PD4.
- the internal circuits 5a, 5b, 5c, and 5d are included in the internal circuit unit 5, but may or may not be related to each other.
- the switch circuit unit SW can be divided into switch circuit units SW1, SW2, SW3 and SW4.
- Each switch circuit unit SW1, SW2, SW3, SW4 is included in the switch circuit unit SW, and specifically, a configuration in which the control circuit unit 2 and the input / output circuit unit 1 shown in FIG. have.
- the switch circuit unit SW2 has a first state in which a signal can be transmitted between the internal circuit 5b and the pad electrode PD2, and a first state in which a signal cannot be transmitted between the internal circuit 5b and the pad electrode PD2.
- the switch circuit unit SW2 is fixed to the second state during the operation of the semiconductor device PKG. For this reason, during the operation of the semiconductor device PKG, the switch circuit unit SW2 does not enter the first state.
- the switch circuit unit SW1 has a third state in which a signal can be transmitted between the internal circuit 5a and the pad electrode PD1, and a fourth state in which a signal cannot be transmitted between the internal circuit 5a and the pad electrode PD1.
- the switch circuit unit SW1 can switch between the third state and the fourth state during the operation of the semiconductor device PKG, and is used by switching as necessary.
- the switch circuit unit SW3 has a fifth state in which a signal can be transmitted between the internal circuit 5c and the pad electrode PD3, and a signal that cannot transmit a signal between the internal circuit 5c and the pad electrode PD3.
- the switch circuit unit SW3 can switch between the fifth state and the sixth state during the operation of the semiconductor device PKG, and is used by switching as necessary.
- the switch circuit unit SW4 has a seventh state in which signals can be transmitted between the internal circuit 5d and the pad electrode PD4, and a switch circuit unit SW4 in which signals cannot be transmitted between the internal circuit 5d and the pad electrode PD4.
- the switch circuit unit SW4 can switch between the seventh state and the eighth state during the operation of the semiconductor device PKG, and is used by switching as necessary.
- the pad electrode PD2 is disposed next to the pad electrode PD1 along the first side of the surface (main surface) of the semiconductor chip CP, and the pad electrode PD3 is adjacent to the pad electrode PD2. Is disposed, the pad electrode PD is not disposed between the pad electrode PD1 and the pad electrode PD2, and the pad electrode PD is not disposed between the pad electrode PD2 and the pad electrode PD3.
- the pad electrodes PD1, PD2, PD3 of the surface (main surface) of the semiconductor chip CP are disposed, between the pad electrode PD1 and the pad electrode PD2, and between the pad electrode PD2 and the pad electrode
- a pad electrode PD is further arranged between one or both of the terminals PD3, and the pad electrode PD may be an invalid pad or an invalid pad to which the wire BW is not connected. May be.
- the sealing portion MR has a resin injection mark GTK.
- the formation position of the resin injection mark GTK in the sealing part MR is the resin when the resin material (MR1) is injected into the cavity (CAV) of the mold (KG1, KG2) in order to form the sealing part MR. This corresponds to the injection position of the material (MR1) (position of the gate GT for resin injection).
- the wire BW5 is located closer to the resin injection mark GTK than the wire BW3.
- the fact that the wire BW5 is closer to the resin injection mark GTK than the wire BW3 is that the pad electrode PD2 connected to the wire BW5 is closer to the resin injection mark GTK than the pad electrode PD2 connected to the wire BW3. Corresponds to being close.
- the fact that the wire BW5 is closer to the resin injection mark GTK than the wire BW3 is that in the resin sealing step (corresponding to step S4d) for forming the sealing portion MR, the mold (KG1, KG2)
- the resin material (MR1) for forming the sealing portion MR is injected into the cavity (CAV)
- the injected resin material (MR1) contacts the wire BW3 after contacting the wire BW5. Therefore, it is preferable that the injected resin material (MR1) contacts the wire BW3 after first contacting the wire BW5.
- the resin material MR1 for forming the sealing portion MR is injected into the cavity CAV of the molds KG1 and KG2, the injected resin material MR1 contacts the wire BW3 after first contacting the wire BW5. Assume the case of contact. This corresponds to the case where the traveling direction of the injected resin material MR1 is the resin traveling direction YG5 in FIGS. In this case, since the resin material MR1 collides with the wire BW5 and decelerates and then collides with the wire BW3, the deformation of the wire BW3 can be suppressed or prevented.
- the resin material MR1 for forming the sealing portion MR is injected into the cavity CAV of the molds KG1 and KG2, the injected resin material MR1 contacts the wire BW5 after first contacting the wire BW3.
- the traveling direction of the injected resin material MR1 is the resin traveling direction YG6 in FIGS.
- the resin material MR1 collides with the wire BW5 and decelerates and then collides with the wire BW1, the deformation of the wire BW1 can be suppressed or prevented.
- the wire BW5 may come into contact with the wire BW1. Since the wire BW5 is connected to the lead LD3 and the wire BW1 is connected to the lead LD1, the contact of the wire BW5 with the wire BW1 leads to a short circuit between the lead LD3 and the lead LD1, and thus the wire BW5 It is necessary to prevent contact with the wire BW1. That is, there is no problem that the wire BW5 contacts the wire BW3, but it is necessary to prevent the wire BW5 from contacting the wire BW1.
- the resin sealing step when the resin material MR1 collides in the order of the wire BW1, the wire BW5, and the wire BW3 (in the resin traveling direction YG5), the other end of the wire BW5 connected to the pad electrode PD2 is It is more preferable to connect to the lead LD3 instead of the lead LD1.
- the resin sealing step when the resin material MR1 collides in the order of the wire BW3, the wire BW5, and the wire BW1 (in the resin traveling direction YG6), the other end of the wire BW5 connected to the pad electrode PD2 is the lead It is more preferable to connect to the lead LD1 instead of the LD3.
- the other end of the wire BW5 whose one end is connected to the pad electrode PD2 can be connected to either the lead LD3 or the lead LD1.
- the other end of the wire BW5 whose one end is connected to the pad electrode PD2 is preferably connected to the lead LD3, and in the case of the resin traveling direction YG6, The other end of the wire BW5 whose one end is connected to the pad electrode PD2 is preferably connected to the lead LD1.
- the injected resin material (MR1) comes into contact with the wire BW5 (wire connected to the invalid pad) first among the wires BW3 and BW5 connected to the same lead LD3. It is preferable to contact the wire BW3 (wire connected to the effective pad). Therefore, in the manufactured semiconductor device PKG, of the wires BW3 and BW5 connected to the same lead LD3, the wire BW5 (wire connected to the invalid pad) is more than the wire BW3 (wire connected to the valid pad).
- the resin injection mark GTK is preferably at a position close to the resin injection mark GTK.
- the wire flow of the wire BW1 or the wire BW3 can be suppressed or prevented by providing the wire BW5, and even if the wire BW5 is deformed, a malfunction due to the wire BW5 can be prevented more accurately. Therefore, the manufacturing yield of the semiconductor device can be further improved.
- FIG. 32 is a plan view showing the resin sealing step of step S4d, and shows the same plane area as FIG.
- the arrow indicates that the resin material MR1 travels in the cavity CAV when the resin material MR1 is injected into the cavity CAV of the molds KG1, KG2 in the resin sealing step. It corresponds to.
- This traveling direction corresponds to the above-described resin traveling directions YG1, YG2, YG3, YG4, YG5, YG6.
- the resin for forming the sealing portion MR is formed in the cavity (CAV) of the mold (KG1, KG2) from the gate (resin inlet) GT provided in the mold (KG1, KG2).
- Material MR1 is injected.
- the resin material MR1 injected from the gate GT into the cavity (CAV) proceeds in the direction of the arrow in FIG. 32, fills the cavity (CAV), and then hardens the resin material MR1 by heating or the like. Then, the sealing portion MR is formed.
- FIG. 33 is a partially enlarged plan view in which a part of FIG. 32 is enlarged.
- the pad electrode PD which is an effective pad among the plurality of pad electrodes PD included in the semiconductor chip CP is indicated by a white square ( ⁇ ) and an invalid pad (not yet displayed).
- the pad electrode PD which is a used pad) is indicated by a black square ( ⁇ ).
- the wire flow preventing wires corresponding to the wire BW5 are provided at three locations, that is, the wire BW5a, the wire BW5b, and the wire BW5c.
- a plurality of pad electrodes PD are arranged along the side SD1 of the semiconductor chip CP, and the pad electrodes PD1a corresponding to the pad electrodes PD1 and the pads are arranged therein.
- a pad electrode PD2a corresponding to the electrode PD2 and a pad electrode PD3a corresponding to the pad electrode PD3 are included.
- the pad electrode PD1a and the pad electrode PD3a are effective pads, the pad electrode PD2a is an ineffective pad, and the pad electrode PD2a is disposed between the pad electrode PD1a and the pad electrode PD3a.
- the pad electrode PD1a and the lead LD1a corresponding to the lead LD1 are electrically connected via the wire BW1a corresponding to the wire BW1, and the pad electrode PD3a and the lead LD3a corresponding to the lead LD3 are connected to the wire BW3.
- the lead LD1a and the lead LD3a are adjacent to each other.
- the pad electrode PD2a which is an invalid pad and the lead LD3a are electrically connected via the wire BW5a corresponding to the wire BW5. Therefore, the wire BW5a is disposed between the wire BW1a and the wire BW3a.
- the occurrence of wire flow in the wire BW3a can be suppressed or prevented. That is, since the wire BW5a is closer to the gate GT (see FIG. 32) than the wire BW3a, the resin material MR1 injected from the gate GT into the cavity CAV of the mold first contacts the wire BW5a and then contacts the wire BW3a. For this reason, the speed of the resin material MR1 when colliding with the wire BW3a can be reduced by the amount of collision with the wire BW5a. Thereby, it can suppress or prevent that wire BW3a deform
- the wire BW5a is closer to the resin injection mark GTK than the wire BW3a.
- a plurality of pad electrodes PD (invalid pads to which no wire BW is connected) are disposed between the pad electrode PD1a and the pad electrode PD2a and between the pad electrode PD2a and the pad electrode PD3a.
- interval (distance) between wire BW1a and wire BW3a is quite large. Therefore, if the wire BW5a is not formed, the speed of the resin material MR1 when colliding with the wire BW3a is considerably increased. Therefore, the effect of providing the wire BW5a and preventing the wire flow of the wire BW3a is extremely large.
- a plurality of pad electrodes PD are arranged along the side SD2 of the semiconductor chip CP.
- the pad electrodes PD1b corresponding to the pad electrodes PD1 and the pads A pad electrode PD2b corresponding to the electrode PD2 and a pad electrode PD3b corresponding to the pad electrode PD3 are included.
- the pad electrode PD1b and the pad electrode PD3b are effective pads, the pad electrode PD2b is an ineffective pad, and the pad electrode PD2b is disposed between the pad electrode PD1b and the pad electrode PD3b.
- the pad electrode PD1b and the lead LD1b corresponding to the lead LD1 are electrically connected via the wire BW1b corresponding to the wire BW1, and the pad electrode PD3b and the lead LD3b corresponding to the lead LD3 are connected to the wire BW3.
- the lead LD1b and the lead LD3b are adjacent to each other.
- the pad electrode PD2b, which is an invalid pad, and the lead LD3b are electrically connected via a wire BW5b corresponding to the wire BW5. Therefore, the wire BW5b is disposed between the wire BW1b and the wire BW3b.
- the wire BW5b is closer to the gate GT (see FIG. 32) than the wire BW3b. For this reason, by providing the wire BW5b, it is possible to suppress or prevent the wire flow from occurring in the wire BW3b for the same reason as described in relation to the wires BW5a and BW3a. Further, even if the wire BW5b is deformed toward the wire BW3b and comes into contact with the wire BW3b, it is possible to prevent an electrical failure from occurring. In the manufactured semiconductor device PKG, the wire BW5b is closer to the resin injection mark GTK than the wire BW3b.
- a plurality of pad electrodes PD are arranged along the side SD3 of the semiconductor chip CP.
- the pad electrodes PD1c corresponding to the pad electrodes PD1 and the pads A pad electrode PD2c corresponding to the electrode PD2 and a pad electrode PD3c corresponding to the pad electrode PD3 are included.
- the pad electrode PD1c and the pad electrode PD3c are effective pads, the pad electrode PD2c is an ineffective pad, and the pad electrode PD2c is disposed between the pad electrode PD1c and the pad electrode PD3c.
- the pad electrode PD1c and the lead LD1c corresponding to the lead LD1 are electrically connected via the wire BW1c corresponding to the wire BW1, and the pad electrode PD3c and the lead LD3c corresponding to the lead LD3 are connected to the wire BW3.
- the lead LD1c and the lead LD3c are adjacent to each other.
- the pad electrode PD2c, which is an invalid pad, and the lead LD3c are electrically connected via a wire BW5c corresponding to the wire BW5. Therefore, the wire BW5c is disposed between the wire BW1c and the wire BW3c.
- the wire BW5c is closer to the gate GT (see FIG. 32) than the wire BW1c. For this reason, by providing the wire BW5c, it is possible to suppress or prevent the occurrence of wire flow in the wire BW1c for the same reason as described in relation to the wires BW5a and BW3a. In the manufactured semiconductor device PKG, the wire BW5c is closer to the resin injection mark GTK than the wire BW1c.
- the wire flow preventing wires (wires BW5a, BW5b, BW5c) corresponding to the wire BW5 are provided at three locations, but the present invention is not limited to this, and one or more locations are provided. What is necessary is just to provide. Further, the wire flow preventing wire corresponding to the wire BW5 can be provided on all sides of the four sides of the semiconductor chip CP, or can be provided on some of the four sides. Further, on the side where the semiconductor chip CP is located, the wire flow preventing wire corresponding to the wire BW5 can be provided at one place, or at a plurality of places.
- the effect of preventing the wire flow is increased.
- the invalid pad in the middle of five or more consecutive invalid pads corresponds to the wire BW5. If one end of the wire is connected and the other end of the wire is connected to the lead LD, the effect of preventing the wire flow due to the provision of the wire becomes very large.
- the conductivity is not an essential condition and may be an insulator or a dielectric.
- the wire flow prevention wire corresponding to the wire BW5 also has conductivity.
- the wire flow preventing wire corresponding to the wire BW5 is formed together with the wire BW that functions as a conductive path in the wire bonding step.
- the wire flow prevention wire corresponding to the wire BW5 is preferably made of the same material as the other wires BW (BW1, BW3, BW4) that function as conductive paths, and has the same diameter. If it is, it is more preferable. Thereby, it is possible to facilitate the wire bonding process.
- a signal input from the pad electrode PD which is an effective pad is transmitted to the internal circuit unit 5, or a signal transmitted from the internal circuit unit 5 is an effective pad.
- This signal may be a power supply voltage (power supply potential) or a ground voltage (ground potential).
- a signal transmitted between the pad electrode PD3 and the internal circuit portion 5 of the semiconductor chip CP, and a signal transmitted between the pad electrode PD2 and the internal circuit portion 5 of the semiconductor chip CP. are preferably different potentials or different types.
- the semiconductor device PKG is manufactured using the lead frame.
- the semiconductor device PKG is manufactured using the wiring board.
- the semiconductor device PKG of the second embodiment manufactured using the wiring board PCB will be referred to as a semiconductor device PKG1 with reference numeral PKG1.
- FIG. 34 is a plan perspective view of the semiconductor device PKG1 of the second embodiment
- FIG. 35 is a cross-sectional view of the semiconductor device PKG1 of FIG.
- FIG. 34 shows a plan perspective view of the upper surface side of the semiconductor device PKG1 when the sealing portion MR is seen through.
- a cross section of the semiconductor device PKG1 at the position of the A1-A1 line in FIG. 34 substantially corresponds to FIG.
- the pad electrode PD that is an effective pad among the plurality of pad electrodes PD of the semiconductor chip CP is indicated by a white square ( ⁇ )
- an invalid pad A pad electrode PD which is an unused pad
- ⁇ black square
- FIG. 34 the configuration of the semiconductor device PKG1 will be described with reference to FIGS. 34 and 35.
- a semiconductor device (semiconductor package) PKG1 according to the second embodiment shown in FIGS. 34 and 35 is a semiconductor device (semiconductor package) in which a semiconductor chip CP is mounted on a wiring board PCB.
- the semiconductor device PKG1 of the second embodiment includes a semiconductor chip CP, a wiring board PCB that supports or mounts the semiconductor chip CP, a plurality of pad electrodes PD of the semiconductor chip CP, and a plurality of bonding leads BLD of the wiring board PCB.
- the semiconductor device PKG1 further includes a plurality of solder balls HB provided on the lower surface of the wiring board PCB.
- the semiconductor chip CP is mounted on the upper surface of the wiring board PCB with the front surface (main surface on the side where the pad electrode PD is formed) facing up and the back surface facing the wiring board PCB. .
- the back surface of the semiconductor chip CP is bonded and fixed to the upper surface of the wiring board PCB via the bonding material BD.
- the wiring substrate PCB includes an upper surface that is one main surface, a lower surface that is a main surface opposite to the upper surface, a plurality of bonding leads (connection terminals, electrodes) BLD formed on the upper surface, and a plurality of bonding leads (connection terminals, electrodes) formed on the lower surface.
- Land (conductive land portion) LA is a conductive land portion.
- the wiring board PCB includes an insulating base material layer (insulating substrate, core material) BS, a conductor layer formed on the upper and lower surfaces of the base material layer BS, and a conductor layer on the upper and lower surfaces of the base material layer BS. Solder resist layers SR1 and SR2 as insulating layers formed so as to cover.
- the wiring board PCB can be formed of a multilayer wiring board in which a plurality of insulating layers and a plurality of wiring layers are stacked.
- the conductor layer formed on the upper surface of the base material layer BS is patterned, includes a plurality of bonding leads BLD, and may further include wiring.
- the bonding lead BLD is a connection terminal for connecting one end of the wire BW.
- the solder resist layer SR1 is formed on the upper surface of the base material layer BS, but the bonding lead BLD is not covered with the solder resist layer SR1 and is exposed from the opening of the solder resist layer SR1.
- the conductor layer formed on the lower surface of the base material layer BS is patterned, includes a plurality of lands LA, and may further include wiring.
- the land LA is a terminal (electrode, pad) for connecting the solder ball HB.
- the solder resist layer SR2 is formed on the lower surface of the base material layer BS, but is not covered with the land LA and is exposed from the opening of the solder resist layer SR2.
- a plurality of openings are formed in the base material layer BS, and a conductive layer is formed in the openings to constitute the via wiring VH.
- the plurality of bonding leads BLD formed on the upper surface side of the wiring board PCB and the plurality of lands LA formed on the upper surface side of the wiring board PCB are respectively connected via wiring (including via wiring VH) of the wiring board PCB. Electrically connected.
- the plurality of bonding leads BLD are arranged side by side around the area where the semiconductor chip CP is mounted.
- the plurality of pad electrodes PD of the semiconductor chip CP and the plurality of bonding leads BLD on the upper surface of the wiring board PCB are electrically connected through the plurality of wires BW.
- the bonding lead BLD in the second embodiment corresponds to the wire connection portion (portion to which the wire BW is connected) of the lead LD in the first embodiment.
- the configuration and technical idea regarding the connection between the pad electrode PD of the semiconductor chip CP and the bonding lead BLD of the wiring board PCB via the wire BW are the same as those of the semiconductor chip CP in the first embodiment.
- the configuration and technical idea relating to the connection between the pad electrode PD and the lead LD via the wire BW can be applied.
- the configuration of the semiconductor chip CP in the semiconductor device PKG1 of FIGS. 34 and 35 is the same as that of the semiconductor chip CP in the semiconductor device PKG of the first embodiment. Therefore, the circuit configuration of the semiconductor chip CP and the manner in which the plurality of pad electrodes PD are arranged on the upper surface of the semiconductor chip CP (the manner in which the effective pads and the invalid pads are arranged) are described in the first embodiment and the second embodiment. And it is common. Further, the connection relationship of the plurality of wires BW included in the semiconductor device PKG1 is the same as that of the semiconductor device PKG1 of the second embodiment except that the connection destination of one end of each wire BW is not the lead LD but the bonding lead BLD.
- the wire flow preventing wires BW5a, BW5b, and BW5c shown in FIG. 33 are also provided in the semiconductor device PKG1 of the second embodiment as can be seen from FIG. 2, one end of each BW5a, BW5b, BW5c is connected to the invalid pad, and the other end of each BW5a, BW5b, BW5c is connected to the bonding lead BLD instead of the lead LD.
- Solder balls (ball electrodes, protruding electrodes) HB are connected (formed) as protruding electrodes to each land LA on the lower surface of the wiring board PCB.
- FIG. 35 corresponds to the case where the lands LA and the solder balls HB connected to the lands LA are arranged in two rows along the outer periphery of the lower surface of the wiring board PCB. It may be arranged in an array on the lower surface of the PCB.
- the solder ball HB can function as an external terminal (external connection terminal) of the semiconductor device PKG.
- each effective pad of the plurality of pad electrodes PD of the semiconductor chip CP is electrically connected to the bonding lead BLD of the wiring board PCB via the wire BW.
- the wiring board PCB is electrically connected to the lands LA of the wiring board PCB and the solder balls HB connected to the lands LA via the wiring (including the via wiring VH).
- the sealing portion (sealing resin portion, sealing body) MR is formed on the upper surface of the wiring board PCB so as to cover the semiconductor chip CP, the wire BW, and the bonding lead BLD. That is, the sealing portion MR is formed on the upper surface of the wiring board PCB, and seals and protects the semiconductor chip CP, the wire BW, and the bonding lead BLD.
- the material of the sealing portion MR is the same as that in the first embodiment.
- the manufacturing process of the semiconductor device PKG1 of FIGS. 34 and 35 can be performed as follows, for example.
- the semiconductor chip CP is mounted on the wiring board PCB via the bonding material BD and bonded.
- a wire bonding step is performed to electrically connect the plurality of pad electrodes PD of the semiconductor chip CP and the plurality of bonding leads BLD of the wiring board PCB via the plurality of wires BW.
- a resin sealing step is performed to form a sealing portion MR on the upper surface of the wiring board PCB so as to cover the semiconductor chip CP, the wires BW, and the bonding leads BLD.
- the wiring board PCB is sandwiched between molds such as the molds KG1 and KG2 (however, the shape of the cavity CAV is different from that of the first embodiment), and the semiconductor chip CP and the wire BW are placed in the mold cavity.
- a sealing material MR is formed by introducing a resin material for forming the sealing portion MR into the mold cavity from the resin injection gate of the die and curing the resin material by heating or the like. To do.
- the solder balls HB are respectively connected to the plurality of lands LA on the lower surface of the wiring board PCB. In this way, the semiconductor device PKG can be formed.
- the semiconductor device PKG1 can be manufactured by using a wiring board matrix in which a plurality of wiring boards PCB are integrally connected in an array.
- the wiring board base is cut (diced) and divided into individual wiring boards PCB, and then the solder balls HB can be connected onto the lands LA.
- the technical concept of the second embodiment is the same as that of the first embodiment.
- the second embodiment is mainly different from the first embodiment in the following points. That is, in the first embodiment, the semiconductor chip CP is mounted on the die pad DP, but in the second embodiment, the semiconductor chip CP is mounted on the wiring board PCB.
- the other end of the wire BW whose one end is connected to the pad electrode PD of the semiconductor chip CP is connected to the inner lead portion of the lead LD.
- the semiconductor chip is used.
- the other end of the wire BW having one end connected to the CP pad electrode PD is connected to the bonding lead BLD of the wiring board PCB.
- the equivalent to the lead LD in the first embodiment is the bonding lead BLD, the wiring of the wiring board PCB that electrically connects the bonding lead BLD and the land LA, the land LA, It is a combination of the solder balls HB.
- the bonding lead BLD corresponds to the wire connecting portion (portion to which the wire BW is connected) in the lead LD of the first embodiment
- the land LA and the solder ball HB are the same as those in the first embodiment. It corresponds to the outer lead portion of the lead LD.
- the wiring of the wiring board PCB that electrically connects the bonding lead BLD and the land LA corresponds to a portion connecting the wire connecting portion and the outer lead portion in the lead LD of the first embodiment.
- the lead LD can be replaced with the bonding lead BLD.
- the second embodiment also provides the wire flow prevention wires BW5a, BW5b, and BW5c shown in FIG. It is possible to suppress or prevent the occurrence of wire flow in the other wires BW.
- the technical idea described in the first embodiment is based on the semiconductor chip CP and the wire connection terminal (corresponding to the lead LD in the first embodiment and corresponding to the bonding lead BLD in the second embodiment). And can be applied to a semiconductor device (semiconductor package) in which a pad electrode PD of a semiconductor chip CP and a terminal for wire connection are connected by a wire and they are resin-sealed.
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Abstract
Description
<半導体装置(半導体パッケージ)の全体構造について>
図1は、本発明の一実施の形態である半導体装置PKGの上面図であり、図2~図4は、半導体装置PKGの平面透視図であり、図5は、半導体装置PKGの断面図である。図2には、封止部MRを透視したときの半導体装置PKGの上面側の平面透視図が示されている。また、図3は、図2において、更にワイヤBWを透視(省略)したときの半導体装置PKGの上面側の平面透視図が示され、図4は、図3において、更に半導体チップCPを透視(省略)したときの半導体装置PKGの上面側の平面透視図が示されている。なお、図2~図4では、封止部MRの外周の位置を点線で示してある。また、図1~図4のA-A線の位置での半導体装置PKGの断面が、図5にほぼ対応している。
次に、上記図1~図5に示される半導体装置PKGの製造工程について説明する。図6は、上記図1~図5に示される半導体装置PKGの製造工程を示すプロセスフロー図である。図7は、図6のプロセスフローのうち、ステップS4の組み立て工程の詳細を示すプロセスフロー図である。また、図8~図19は、半導体装置PKGの製造工程を説明するための平面図または断面図である。
次に、本発明者が行った検討の背景について説明する。
図25は、半導体チップCPの回路構成を示す回路ブロック図である。
図26~図28は、図25の半導体チップCPを用いて半導体パッケージ(PKG)を製造した場合の回路構成を示す回路ブロック図である。このうち、図26は、224ピンの半導体パッケージ(PKG)を製造した場合に対応し、図27および図28は、100ピン、144ピンまたは176ピンの半導体パッケージ(PKG)を製造した場合に対応している。なお、図27の場合は、本実施の形態の技術思想を適用しておらず、一方、図28の場合は、本実施の形態の技術思想を適用している。
次に、上述した本実施の形態の技術思想に伴う半導体装置(PKG)の主要な特徴について、図31を参照して説明する。図31は、本実施の形態の半導体装置PKGを概念的に示す説明図である。
図32は、上記ステップS4dの樹脂封止工程を示す平面図であり、上記図12と同じ平面領域が示されている。図32において、矢印で示されているのは、樹脂封止工程で金型KG1,KG2のキャビティCAV内に上記樹脂材料MR1を注入したときの、キャビティCAV内を進行する樹脂材料MR1の進行方向に対応している。この進行方向が、上述した樹脂進行方向YG1,YG2,YG3,YG4,YG5,YG6に対応している。樹脂封止工程においては、金型(KG1,KG2)に設けられたゲート(樹脂注入口)GTから、金型(KG1,KG2)のキャビティ(CAV)内に、封止部MR形成用の樹脂材料MR1を注入する。ゲートGTからキャビティ(CAV)内に注入された樹脂材料MR1は、図32の矢印の方向に進行して、キャビティ(CAV)内を充填し、その後、加熱などにより樹脂材料MR1を硬化させることで、封止部MRが形成される。
上記実施の形態1では、リードフレームを用いて半導体装置PKGを製造していたが、本実施の形態2では、配線基板を用いて半導体装置PKGを製造している。
また、図34では、上記図33と同様に、半導体チップCPが有する複数のパッド電極PDのうち、有効パッドとなっているパッド電極PDを、白抜きの四角(□)で示し、無効パッド(未使用パッド)となっているパッド電極PDを、黒塗りの四角(■)で示してある。
2 制御回路部
2a,2b,2c,2d 選択回路
2e 論理回路部
3 デコーダ回路部
4 記憶回路部
5 内部回路部
5a,5b,5c,5d 内部回路
BD 接合材
BW,BW1,BW1a,BW1b,BW1c,BW2,BW3,BW3a,BW3b,BW3c,BW4,BW5,BW5a,BW5b,BW5c ワイヤ
CAV キャビティ
CP 半導体チップ
DP ダイパッド
GT ゲート
GTK 樹脂注入痕
KG1,KG2 金型
LD,LD1,LD1a,LD1b,LD1c,LD2,LD3,LD3a,LD3b,LD3c,LD4 リード
MR 封止部
MR1 樹脂材料
PD,PD1,PD1a,PD1b,PD1c,PD2,PD2a,PD2b,PD2c,PD3,PD3a,PD3b,PD3c,PD4 パッド電極
PKG,PKG1 半導体装置(半導体パッケージ)
SW,SW1,SW2,SW3,SW4 スイッチ回路部
TL 吊りリード
Claims (13)
- 第1内部回路と第2内部回路とスイッチ回路部とを含み、第1電極と第2電極とが形成された主面を有する半導体チップと、
前記半導体チップの周囲に配置された第1外部端子と、
前記第1電極と前記第1外部端子とを電気的に接続する第1ワイヤと、
前記第2電極と前記第1外部端子とを電気的に接続する第2ワイヤと、
前記半導体チップと、前記第1ワイヤと、前記第2ワイヤと、を樹脂で封止する封止体と、
を有する半導体装置であって、
前記第2電極は、前記第2内部回路と電気的に接続され、前記第2内部回路と前記第2電極との間で信号の伝送が可能であり、
前記スイッチ回路部は、前記第1内部回路と前記第1電極との間で信号の伝送が可能な第1状態と、前記第1内部回路と前記第1電極との間で信号の伝送が不可能な第2状態と、を設定可能な回路であり、
前記半導体装置の動作中は、前記スイッチ回路部は、前記第2状態に固定されている、半導体装置。 - 請求項1記載の半導体装置において、
前記第1外部端子と前記半導体チップとの間で、前記第2電極および前記第2ワイヤを介して信号が伝送されるが、前記第1電極および前記第1ワイヤを介しては、信号は伝送されない、半導体装置。 - 請求項1記載の半導体装置において、
前記半導体チップは、記憶回路部を含み、
前記記憶回路部は、前記スイッチ回路部と電気的に接続され、
前記記憶回路部に記憶された情報に基づいて、前記スイッチ回路部は前記第2状態に固定されている、半導体装置。 - 請求項3記載の半導体装置において、
前記スイッチ回路部は、制御回路部と、前記第1電極に接続された第1入出力回路部とを含み、
前記記憶回路部に記憶された前記情報に基づいて、前記制御回路部によって前記第1入出力回路部を制御することにより、前記スイッチ回路部が前記第2状態に固定されている、半導体装置。 - 請求項4記載の半導体装置において、
前記半導体チップは、デコーダ回路部を更に含み、
前記記憶回路部に記憶された前記情報が、前記デコーダ回路部で信号に変換され、前記デコーダ回路部で変換された前記信号が、前記制御回路部に入力され、前記制御回路部に入力された前記信号に基づいて前記制御回路が前記第1入出力回路部を制御することにより、前記スイッチ回路部が前記第2状態に固定されている、半導体装置。 - 請求項1記載の半導体装置において、
前記半導体チップの前記主面に形成された第3電極と、
前記半導体チップの周囲に配置された第2外部端子と、
前記第3電極と前記第2外部端子とを電気的に接続する第3ワイヤと、
を更に有し、
前記第3電極は、前記半導体チップの第3内部回路と電気的に接続され、前記第3内部回路と前記第3電極との間で信号の伝送が可能であり、
平面視において、前記第1電極と前記第2電極と前記3電極とは、前記半導体チップの前記主面の第1辺に沿って配置され、
前記第1電極は、前記第2電極と前記第3電極との間に配置されている、半導体装置。 - 請求項6記載の半導体装置において、
前記半導体チップの前記主面に形成された第4電極と、
前記半導体チップの周囲に配置された第3外部端子と、
前記第4電極と前記第3外部端子とを電気的に接続する第4ワイヤと、
を更に有し、
前記第4電極は、前記半導体チップの第4内部回路と電気的に接続され、前記第4内部回路と前記第4電極との間で信号の伝送が可能であり、
平面視において、前記第4電極は、前記半導体チップの前記主面の前記第1辺に沿って配置され、
前記第2電極は、前記第4電極と前記第1電極との間に配置されている、半導体装置。 - 請求項7記載の半導体装置において、
前記半導体チップの主面に形成された複数の第5電極、
を更に有し、
平面視において、前記複数の第5電極は、前記半導体チップの前記主面の前記第1辺に沿って配置され、
前記複数の第5電極は、前記第1電極と前記第2電極との間、および、前記第1電極と前記第3電極との間に配置されている、半導体装置。 - 請求項1記載の半導体装置において、
前記封止体は、樹脂注入痕を有し、
前記第2ワイヤよりも前記第1ワイヤが、前記樹脂注入痕に近い位置にある、半導体装置。 - (a)第1内部回路と第2内部回路と記憶回路部とスイッチ回路部とを含み、第1電極と第2電極とが形成された主面を有する半導体チップを用意する工程、
(b)前記半導体チップをチップ搭載部上に搭載する工程、
(c)前記半導体チップの前記第1電極と前記チップ搭載部の周囲に配置された第1外部端子とを第1ワイヤを介して電気的に接続し、前記半導体チップの前記第2電極と前記第1外部端子とを第2ワイヤを介して電気的に接続する工程、
(d)前記半導体チップと、前記第1ワイヤと、前記第2ワイヤと、を樹脂で封止し、樹脂封止部を形成する工程、
(e)前記半導体チップの前記記憶回路部に第1情報を記憶させる工程、
を有し、
前記第2電極は、前記第2内部回路と電気的に接続され、前記第2内部回路と前記第2電極との間で信号の伝送が可能であり、
前記スイッチ回路部は、前記第1内部回路と前記第1電極との間で信号の伝送が可能な第1状態と、前記第1内部回路と前記第1電極との間で信号の伝送が不可能な第2状態と、を設定可能な回路であり、
前記(e)工程後、前記記憶回路に記憶された前記第1情報に基づいて、前記半導体装置の動作中は、前記スイッチ回路部は前記第2状態に固定されている、半導体装置の製造方法。 - 請求項10記載の半導体装置の製造方法において、
前記(e)工程は、前記(d)工程の後に行われる、半導体装置の製造方法。 - 請求項10記載の半導体装置の製造方法において、
前記(a)工程は、
(a1)複数のチップ領域を有する半導体ウエハを用意する工程、
(a2)前記半導体ウエハを切断して前記半導体チップを取得する工程、
を有し、
前記(a1)工程で用意された前記半導体ウエハの前記複数のチップ領域のそれぞれは、前記スイッチ回路部と、前記第1内部回路と、前記第2内部回路と、前記記憶回路部と、前記第1電極と、前記第2電極と、を有し、
前記(e)工程は、前記(a1)工程後で、前記(a2)工程前に行われる、半導体装置の製造方法。 - 請求項10記載の半導体装置の製造方法において、
前記(d)工程は、
(d1)前記半導体チップと、前記第1ワイヤと、前記第2ワイヤと、前記チップ搭載部と、前記第1外部端子の少なくも一部とを、金型のキャビティ内に配置する工程、
(d2)前記(d1)工程後、前記金型の前記キャビティ内に、前記樹脂封止部用の樹脂材料を注入する工程、
を有し、
前記(d2)工程では、前記金型の前記キャビティ内に注入された前記樹脂材料は、前記第1ワイヤに接した後に前記第2ワイヤに接する、半導体装置の製造方法。
Priority Applications (9)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201580051552.8A CN107836037B (zh) | 2015-01-22 | 2015-01-22 | 半导体器件及其制造方法 |
US15/515,799 US9917037B2 (en) | 2015-01-22 | 2015-01-22 | Semiconductor device including a first internal circuit, a second internal circuit and a switch circuit unit |
KR1020177002875A KR20170105476A (ko) | 2015-01-22 | 2015-01-22 | 반도체 장치 및 그 제조 방법 |
PCT/JP2015/051648 WO2016117072A1 (ja) | 2015-01-22 | 2015-01-22 | 半導体装置およびその製造方法 |
JP2016570414A JP6416291B2 (ja) | 2015-01-22 | 2015-01-22 | 半導体装置およびその製造方法 |
TW108108342A TWI681471B (zh) | 2015-01-22 | 2015-12-10 | 半導體裝置及其製造方法 |
TW104141442A TWI657511B (zh) | 2015-01-22 | 2015-12-10 | 半導體裝置及其製造方法 |
US15/885,336 US10128172B2 (en) | 2015-01-22 | 2018-01-31 | Semiconductor device and method for manufacturing the same |
US16/161,824 US20190051583A1 (en) | 2015-01-22 | 2018-10-16 | Semiconductor device and method for manufacturing the same |
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PCT/JP2015/051648 WO2016117072A1 (ja) | 2015-01-22 | 2015-01-22 | 半導体装置およびその製造方法 |
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US15/515,799 A-371-Of-International US9917037B2 (en) | 2015-01-22 | 2015-01-22 | Semiconductor device including a first internal circuit, a second internal circuit and a switch circuit unit |
US15/885,336 Continuation US10128172B2 (en) | 2015-01-22 | 2018-01-31 | Semiconductor device and method for manufacturing the same |
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JP (1) | JP6416291B2 (ja) |
KR (1) | KR20170105476A (ja) |
CN (1) | CN107836037B (ja) |
TW (2) | TWI657511B (ja) |
WO (1) | WO2016117072A1 (ja) |
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JP2017092212A (ja) * | 2015-11-09 | 2017-05-25 | 株式会社東芝 | 半導体装置およびその製造方法 |
US10304836B1 (en) * | 2018-07-18 | 2019-05-28 | Xerox Corporation | Protective layers for high-yield printed electronic devices |
JP7396789B2 (ja) * | 2018-08-10 | 2023-12-12 | 日東電工株式会社 | 配線回路基板、その製造方法および配線回路基板集合体シート |
JP2022034947A (ja) * | 2020-08-19 | 2022-03-04 | キオクシア株式会社 | 半導体装置およびその製造方法 |
Citations (2)
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US5780772A (en) * | 1997-01-24 | 1998-07-14 | National Semiconductor Corporation | Solution to mold wire sweep in fine pitch devices |
JP2006245063A (ja) * | 2005-02-28 | 2006-09-14 | Nec Electronics Corp | 半導体チップおよび半導体チップを搭載する半導体装置 |
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US5920227A (en) * | 1997-06-16 | 1999-07-06 | Advanced Micro Devices, Inc. | Zero current draw circuit for use during a bonding option |
JP2000216342A (ja) * | 1999-01-21 | 2000-08-04 | Mitsubishi Electric Corp | 集積回路チップおよびその未使用パッドの処理方法 |
JP3502033B2 (ja) * | 2000-10-20 | 2004-03-02 | 沖電気工業株式会社 | テスト回路 |
JP4371769B2 (ja) * | 2003-10-27 | 2009-11-25 | 株式会社ルネサステクノロジ | 半導体回路デバイス及びデータ処理システム |
JP2005159103A (ja) * | 2003-11-27 | 2005-06-16 | Renesas Technology Corp | 半導体装置およびその製造方法 |
JP4489485B2 (ja) * | 2004-03-31 | 2010-06-23 | 株式会社ルネサステクノロジ | 半導体装置 |
JP2007324291A (ja) | 2006-05-31 | 2007-12-13 | Matsushita Electric Ind Co Ltd | 半導体集積装置 |
US7485954B2 (en) * | 2006-09-07 | 2009-02-03 | Alpha And Omega Semiconductor Limited | Stacked dual MOSFET package |
JP5103245B2 (ja) * | 2008-03-31 | 2012-12-19 | ルネサスエレクトロニクス株式会社 | 半導体装置 |
JP5405785B2 (ja) * | 2008-09-19 | 2014-02-05 | ルネサスエレクトロニクス株式会社 | 半導体装置 |
JP5448727B2 (ja) | 2009-11-05 | 2014-03-19 | ルネサスエレクトロニクス株式会社 | 半導体装置及びその製造方法 |
CN101814480B (zh) * | 2010-04-16 | 2011-08-31 | 杭州矽力杰半导体技术有限公司 | 一种芯片封装结构及其封装方法 |
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2015
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- 2015-01-22 CN CN201580051552.8A patent/CN107836037B/zh active Active
- 2015-01-22 US US15/515,799 patent/US9917037B2/en active Active
- 2015-01-22 WO PCT/JP2015/051648 patent/WO2016117072A1/ja active Application Filing
- 2015-01-22 JP JP2016570414A patent/JP6416291B2/ja active Active
- 2015-12-10 TW TW104141442A patent/TWI657511B/zh active
- 2015-12-10 TW TW108108342A patent/TWI681471B/zh active
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2018
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- 2018-10-16 US US16/161,824 patent/US20190051583A1/en not_active Abandoned
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
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US5780772A (en) * | 1997-01-24 | 1998-07-14 | National Semiconductor Corporation | Solution to mold wire sweep in fine pitch devices |
JP2006245063A (ja) * | 2005-02-28 | 2006-09-14 | Nec Electronics Corp | 半導体チップおよび半導体チップを搭載する半導体装置 |
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KR20170105476A (ko) | 2017-09-19 |
US10128172B2 (en) | 2018-11-13 |
US20180204788A1 (en) | 2018-07-19 |
US20190051583A1 (en) | 2019-02-14 |
US20170309551A1 (en) | 2017-10-26 |
CN107836037B (zh) | 2020-07-17 |
TWI681471B (zh) | 2020-01-01 |
TW201639047A (zh) | 2016-11-01 |
TWI657511B (zh) | 2019-04-21 |
JP6416291B2 (ja) | 2018-11-07 |
CN107836037A (zh) | 2018-03-23 |
JPWO2016117072A1 (ja) | 2017-07-06 |
TW201929105A (zh) | 2019-07-16 |
US9917037B2 (en) | 2018-03-13 |
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