WO2016063465A1 - 状態検出センサ - Google Patents
状態検出センサ Download PDFInfo
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- WO2016063465A1 WO2016063465A1 PCT/JP2015/005026 JP2015005026W WO2016063465A1 WO 2016063465 A1 WO2016063465 A1 WO 2016063465A1 JP 2015005026 W JP2015005026 W JP 2015005026W WO 2016063465 A1 WO2016063465 A1 WO 2016063465A1
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- heat flux
- sensor
- heat
- flux sensor
- state detection
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
- G01K7/00—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements
- G01K7/02—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using thermoelectric elements, e.g. thermocouples
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
- G01K3/00—Thermometers giving results other than momentary value of temperature
- G01K3/08—Thermometers giving results other than momentary value of temperature giving differences of values; giving differentiated values
- G01K3/14—Thermometers giving results other than momentary value of temperature giving differences of values; giving differentiated values in respect of space
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
- G01K17/00—Measuring quantity of heat
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
- G01K17/00—Measuring quantity of heat
- G01K17/06—Measuring quantity of heat conveyed by flowing media, e.g. in heating systems e.g. the quantity of heat in a transporting medium, delivered to or consumed in an expenditure device
- G01K17/08—Measuring quantity of heat conveyed by flowing media, e.g. in heating systems e.g. the quantity of heat in a transporting medium, delivered to or consumed in an expenditure device based upon measurement of temperature difference or of a temperature
- G01K17/20—Measuring quantity of heat conveyed by flowing media, e.g. in heating systems e.g. the quantity of heat in a transporting medium, delivered to or consumed in an expenditure device based upon measurement of temperature difference or of a temperature across a radiating surface, combined with ascertainment of the heat transmission coefficient
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
- G01K3/00—Thermometers giving results other than momentary value of temperature
- G01K3/08—Thermometers giving results other than momentary value of temperature giving differences of values; giving differentiated values
Definitions
- the present disclosure relates to a state detection sensor that detects the state of an object.
- the abnormality determination apparatus includes a state detection sensor having a temperature sensor that detects the temperature of the upper surface of the object and a temperature sensor that detects the temperature of the lower surface of the object. Note that the object is subject to convection due to heat generation. Then, the abnormality determination device determines abnormal heat generation of the object based on a temperature difference between the temperature of the upper surface of the object and the temperature of the lower surface.
- the temperature sensor is exposed to the outside air and is easily affected by a temperature change caused by the outside air. For this reason, the above-described state detection sensor has a problem that the temperature (state) of the object cannot be detected accurately depending on the state of the outside air. And in the abnormality determination apparatus using such a state detection sensor, since the temperature (state) of an object cannot be accurately detected by the state detection sensor, it is possible to accurately determine the abnormality of the object. There is a problem that it may not be possible.
- This indication aims at providing the state detection sensor which can control that a detection accuracy falls regardless of the state of outside air in view of the above-mentioned point.
- the present disclosure is a state detection sensor that outputs a sensor signal according to a state of an object, and a first heat flux sensor that outputs a first sensor signal according to a passing heat flux. And a second heat flux sensor that outputs a second sensor signal corresponding to the passing heat flux, a thermal buffer having a predetermined heat capacity, and a heat radiator having a predetermined heat capacity, the object side To the first heat flux sensor, the heat buffer, the second heat flux sensor, and the heat radiating body, and the first heat flux sensor corresponds to the heat flux between the object and the heat buffer.
- a signal is output and a 2nd heat flux sensor provides the state detection sensor which outputs the 2nd sensor signal according to the heat flux between a thermal buffer and a thermal radiator.
- the first heat flux sensor, the heat buffer having a predetermined heat capacity, the second heat flux sensor, and the heat radiator having a predetermined heat capacity are sequentially arranged from the object side. For this reason, it can suppress that the change of external air influences a 1st, 2nd heat flux sensor by discharge
- prescribed heat capacity is arrange
- the heat flux passing through the heat flux sensor becomes equal to the heat flux passing through the second heat flux sensor and abnormal heat generation occurs in the object, the heat flux passes through the first heat flux sensor instantaneously.
- the heat flux and the heat flux passing through the second heat flux sensor are different (see FIGS. 7A and 7B). Therefore, according to the present disclosure, it is possible to output a sensor signal corresponding to the state of the object regardless of the state of the outside air, and it is possible to suppress a decrease in detection accuracy.
- FIG. 4 is a sectional view taken along line IV-IV in FIG. 3.
- FIG. 5 is a sectional view taken along line VV in FIG. 3.
- FIG. 5 shows the manufacturing process of the 1st heat flux sensor shown in FIG. It is a figure which shows the heat flux which passes a 1st, 2nd heat flux sensor in case a blade part is normal.
- the cutting device S1 includes a blade portion 1 and a pair of first and second jigs 2 and 3.
- the blade portion 1 is fixed to the support member 4.
- the first jig 2 has a main body 2a and three holding portions 2b protruding from the main body 2a in the same direction (only two are shown in FIG. 1), and three holding portions 2b.
- the workpiece 10 is sandwiched.
- the second jig 3 is disposed on the opposite side of the workpiece 10 from the side held by the first jig 2 so as to fix the workpiece 10 together with the first jig 2.
- the workpiece 10 is fixed by the first and second jigs 2 and 3, and the direction along the protruding direction of the holding portion 2b of the first jig 2 is the center of the main body 2a.
- the workpiece 10 is cut by bringing the workpiece 10 into contact with the blade portion 1 while rotating the workpiece 10 together with the first and second jigs 2 and 3 around the passing axial direction L.
- the abnormality determination device S2 includes a state detection sensor (state detection device) 20 and a control unit (control device) 30, and the state detection sensor 20 is attached to the blade portion 1.
- the state detection sensor 20 includes first and second heat flux sensors 20 a and 20 b, a thermal buffer 21 a, and a radiator 22.
- first and second heat flux sensors 20a and 20b First, the configuration of the first and second heat flux sensors 20a and 20b will be described with reference to FIGS. Since the first and second heat flux sensors 20a and 20b have the same configuration, the first heat flux sensor 20a will be described as an example, but the reference numerals in parentheses in FIGS. This corresponds to the sign of the heat flux sensor 20b.
- each of the first heat flux sensors 20a is formed by integrating an insulating base material 100, a front surface protection member 110, and a back surface protection member 120, and the first, The second interlayer connection members 130 and 140 are alternately connected in series.
- the surface protection member 110 is omitted for easy understanding.
- the insulating base material 100 is composed of a planar rectangular thermoplastic resin film represented by polyetheretherketone (PEEK), polyetherimide (PEI), and liquid crystal polymer (LCP).
- PEEK polyetheretherketone
- PEI polyetherimide
- LCP liquid crystal polymer
- first and second via holes 101 and 102 of the present embodiment have a cylindrical shape with a constant diameter from the front surface 100a to the back surface 100b of the insulating base material 100, but from the front surface 100a to the back surface 100b. You may be made into the taper shape where a diameter becomes small toward it. Moreover, it may be made into the taper shape where a diameter becomes small toward the surface 100a from the back surface 100b, and you may be made into the square cylinder shape.
- a first interlayer connection member 130 is disposed in the first via hole 101, and a second interlayer connection member 140 is disposed in the second via hole 102.
- the first and second interlayer connection members 130 and 140 are alternately arranged on the insulating base material 100.
- the first and second interlayer connection members 130 and 140 are made of different conductive metals so as to exhibit the Seebeck effect.
- the first interlayer connecting member 130 includes a metal compound (solid-sintered) in which a powder of a Bi—Sb—Te alloy constituting P-type maintains a crystal structure of a plurality of metal atoms before sintering. Sintered alloy).
- the second interlayer connecting member 140 is made of a metal compound obtained by solid-phase sintering so that Bi-Te alloy powder constituting N-type maintains the crystal structure of a plurality of metal atoms before sintering.
- the electromotive voltage can be increased by using a metal compound that is solid-phase sintered so as to maintain a predetermined crystal structure as the first and second interlayer connection members 130 and 140.
- FIG. 3 is not a cross-sectional view, but the first and second interlayer connection members 130 and 140 are hatched for easy understanding.
- a surface protection member composed of a planar rectangular thermoplastic resin film represented by polyether ether ketone (PEEK), polyether imide (PEI), and liquid crystal polymer (LCP) on the surface 100a of the insulating substrate 100 110 is arranged.
- the surface protection member 110 has the same size as the planar shape of the insulating base material 100, and has a plurality of conductive surface patterns (a plurality of conductive patterns) in which a copper foil or the like is patterned on the side 110a facing the insulating base material 100. Are formed so as to be separated from each other.
- Each surface pattern 111 is appropriately electrically connected to the first and second interlayer connection members 130 and 140, respectively.
- first and second layers of each set 150 are shown.
- the connection members 130 and 140 are connected to the same surface pattern 111. That is, the first and second interlayer connection members 130 and 140 of each set 150 are electrically connected via the surface pattern 111.
- one first interlayer connection member 130 and one second interlayer connection member 140 that are adjacent along the longitudinal direction of the insulating base material 100 (the left-right direction in FIG. 4) are formed into a set 150. ing.
- a back surface protection member composed of a planar rectangular thermoplastic resin film represented by polyether ether ketone (PEEK), polyether imide (PEI), and liquid crystal polymer (LCP). 120 is arranged.
- the back surface protection member 120 has the same size as the planar shape of the insulating base material 100, and has a plurality of back surface patterns (a plurality of conductive patterns) in which a copper foil or the like is patterned on one surface 120 a facing the insulating base material 100. Are formed so as to be separated from each other.
- Each back pattern 121 is appropriately electrically connected to the first and second interlayer connection members 130 and 140, respectively.
- the first interlayer connection member 130 of one set 150 and the second interlayer connection member 140 of the other set 150 are connected to the same back surface pattern 121. That is, the first and second interlayer connection members 130 and 140 are electrically connected via the same back surface pattern 121 across the set 150.
- the first and second interlayer connection members 130 and 140 adjacent to each other along the direction orthogonal to the longitudinal direction are the same at the outer edge of the insulating base material 100.
- the back surface pattern 121 is connected. More specifically, the adjacent first and second interlayer connection members 130 and 140 are the same on the back so that those connected in series via the front surface pattern 111 and the back surface pattern 121 are folded back in the longitudinal direction of the insulating substrate 100. It is connected to the pattern 121.
- the above is the basic configuration of the first heat flux sensor 20a in the present embodiment.
- the configuration of the second heat flux sensor 20b is the same as that of the first heat flux sensor 20a.
- the first and second via holes 201 and 202 are formed in a cylindrical shape having a constant diameter from the front surface 200a to the back surface 200b of the insulating base 200.
- a first interlayer connection member 230 is disposed in the first via hole 201, and a second interlayer connection member 240 is disposed in the second via hole 202.
- the surface protection member 210 has the same size as the planar shape of the insulating base material 200, and a plurality of surface patterns 211 patterned with copper foil or the like on one surface 210a facing the insulating base material 200 are separated from each other. Is formed.
- Each surface pattern 211 is appropriately electrically connected to the first and second interlayer connection members 230 and 240, respectively.
- the back surface protection member 220 has the same size as the planar shape of the insulating base material 200, and a plurality of back surface patterns 221 patterned with copper foil or the like on the one surface 220 a side facing the insulating base material 200 are separated from each other. Is formed.
- Each back pattern 221 is electrically connected to the first and second interlayer connection members 230 and 240 as appropriate. 4, when one adjacent first interlayer connection member 230 and one second interlayer connection member 240 are set as a set 250, the first and second interlayer connection members 230 of each set 250, 240 is connected to the same surface pattern 211.
- the first and second heat flux sensors 20a and 20b output a sensor signal (electromotive voltage) corresponding to the heat flux passing through the first and second heat flux sensors 20a and 20b in the thickness direction. This is because when the heat flux changes, the electromotive voltage generated in the first and second interlayer connection members 130 and 140 alternately connected in series changes.
- the thickness direction of the first and second heat flux sensors 20a and 20b is the stacking direction of the insulating base material 100, the surface protection member 110, and the back surface protection member 120, and is orthogonal to the plane of the insulating base material 100. It is a direction.
- the manufacturing method of the first heat flux sensor 20a will be described with reference to FIGS. 6 (a) to 6 (h).
- the manufacturing method of the second heat flux sensor 20b is the same as that of the first heat flux sensor 20a.
- an insulating substrate 100 is prepared, and a plurality of first via holes 101 are formed by a drill, a laser, or the like.
- each first via hole 101 is filled with a first conductive paste 131.
- a method (apparatus) for filling the first via hole 101 with the first conductive paste 131 the method (apparatus) described in Japanese Patent Application No. 2010-50356 (Japanese Patent Laid-Open No. 2011-187619) by the present applicant is adopted. Good.
- the insulating base material 100 is arranged on a holding table (not shown) with the suction paper 160 therebetween so that the back surface 100b faces the suction paper 160. Then, the first conductive paste 131 is filled into the first via hole 101 while the first conductive paste 131 is melted. As a result, most of the organic solvent of the first conductive paste 131 is adsorbed by the adsorption paper 160, and the alloy powder is placed in close contact with the first via hole 101.
- the adsorbing paper 160 may be made of a material that can absorb the organic solvent of the first conductive paste 131, and general high-quality paper or the like is used.
- the first conductive paste 131 is a paste obtained by adding an organic solvent such as paraffin having a melting point of 43 ° C. to a powder of Bi—Sb—Te alloy in which metal atoms maintain a predetermined crystal structure. Used. For this reason, when the first conductive paste 131 is filled, the surface 100a of the insulating substrate 100 is heated to about 43 ° C.
- a plurality of second via holes 102 are formed in the insulating base material 100 by a drill, a laser, or the like. As described above, the second via holes 102 are formed alternately with the first via holes 101 so as to form a staggered pattern together with the first via holes 101.
- the second conductive paste 141 is filled in each second via hole 102. This step can be performed in the same step as in FIG.
- the insulating substrate 100 is disposed again on the holding table (not shown) via the suction paper 160 so that the back surface 100b faces the suction paper 160, and then the second conductive paste 141 is filled in the second via hole 102. To do. As a result, most of the organic solvent of the second conductive paste 141 is adsorbed by the adsorption paper 160, and the alloy powder is placed in close contact with the second via hole 102.
- the second conductive paste 141 is a Bi-Te alloy powder in which metal atoms different from the metal atoms constituting the first conductive paste 131 maintain a predetermined crystal structure, and an organic solvent such as terpine having a melting point of room temperature. A paste made by adding is used. That is, the organic solvent constituting the second conductive paste 141 has a lower melting point than the organic solvent constituting the first conductive paste 131. And when filling the 2nd conductive paste 141, it is performed in the state by which the surface 100a of the insulating base material 100 was hold
- the state in which the organic solvent contained in the first conductive paste 131 is solidified means that the organic solvent remaining in the first via hole 101 without being adsorbed by the adsorption paper 160 in the process of FIG. That is.
- one surface 110a, 120a of the surface protection member 110 and the back surface protection member 120 facing the insulating substrate 100 is formed.
- a copper foil or the like is formed.
- the surface protection member 110 formed with a plurality of surface patterns 111 spaced apart from each other, and the back surface protection member 120 formed with a plurality of back surface patterns 121 spaced apart from each other.
- the back surface protection member 120, the insulating base material 100, and the surface protection member 110 are sequentially laminated to form a laminate 170.
- the laminated body 170 is disposed between a pair of press plates (not shown), and is pressed while being heated in a vacuum state from the upper and lower surfaces in the laminating direction. Integrate. Specifically, the first and second conductive pastes 131 and 141 are solid-phase sintered to form the first and second interlayer connection members 130 and 140, and the first and second interlayer connection members 130, The laminated body 170 is integrated by applying pressure while heating so that the front surface pattern 111 and the back surface pattern 121 are connected to each other.
- a cushioning material such as rock wool paper may be disposed between the laminate 170 and the press plate. As described above, the first heat flux sensor 20a is manufactured.
- the thermal buffer (heat storage body) 21a which is a heat conductor, is a flat plate made of a material having a predetermined heat capacity (thermal resistance), and is made of a metal such as Cu or Al. And resin.
- the heat buffer 21 a is illustrated as having the same size as the first and second heat flux sensors 20 a and 20 b, but the first and second heat flux sensors 20 a and 20 b The size of the planar shape may be different from 20b.
- the thermal buffer 21a includes the first heat flux sensor in a plane parallel to the plane of the insulating base material 100 of the first heat flux sensor 20a and the plane of the insulating base material 200 of the second heat flux sensor 20b.
- the metal plate is made of a metal such as Cu or Al.
- the heat radiator 22 has a flat plate shape made of a material having a predetermined heat capacity (thermal resistance), and is made of a metal such as Cu or Al, a resin, or the like. In the present embodiment, the material, thickness, and the like of the heat radiator 22 are appropriately adjusted so that the heat capacity is larger than the heat capacity of the heat buffer 21a.
- the radiator 22 is made larger than the planar shape of the first and second heat flux sensors 20a and 20b and the heat buffer 21a. In the present embodiment, the heat radiator 22 directly radiates heat to the surrounding outside air, but may radiate heat to another heat sink, a coolant, or the like.
- the state detection sensor 20 is arrange
- the blade portion 1 corresponds to the object of the present disclosure.
- the state detection sensor 20 is viewed from the arrangement direction (stacking direction) of the first heat flux sensor 20a, the thermal buffer 21a, the second heat flux sensor 20b, and the heat radiator 22, the second of the heat radiators 22. A portion protruding from the heat flux sensor 20 b is fixed to the blade portion 1 by being fastened to the blade portion 1 with a screw 23.
- a spacer 24 made of resin or the like is disposed between the blade portion 1 and the radiator 22 so that the blade portion 1 and the radiator 22 are separated by a predetermined distance.
- the screw 23 passes through the spacer 24 and is screwed to the blade portion 1.
- an adhesive heat transfer sheet, heat transfer paste, or the like can be used between the first heat flux sensor 20a, the heat buffer 21a, the second heat flux sensor 20b, and the heat radiating body 22.
- a heat transfer member is disposed and bonded to each other via the heat transfer member or the like.
- the first and second heat flux sensors 20a and 20b are output from the first heat flux sensor 20a when a heat flux is generated between the blade portion 1 and the radiator 22 (outside air).
- the voltage of the first sensor signal and the voltage of the second sensor signal output from the second heat flux sensor 20b are arranged to be opposite in polarity. That is, for example, when the polarity of the voltage of the first sensor signal is positive, the first and second heat flux sensors 20a and 20b are arranged so that the polarity of the voltage of the second sensor signal is negative. Yes.
- the first and second heat flux sensors 20a and 20b are arranged so that the surface protecting members 110 face each other.
- the external wiring 302 has connected the back surface pattern 121 provided in the output end 601a (refer FIG. 3) of the 1st heat flux sensor 20a to the control part 30.
- FIG. In the external wiring 301 the surface pattern 111 provided on the connection end 601b (see FIG. 3) opposite to the output end 601a of the first heat flux sensor 20a is connected to the connection end 701b (see FIG. 3) of the second heat flux sensor 20b. )
- the external wiring 303 connects the back surface pattern 221 provided at the output end 701 a opposite to the connection end 701 b of the second heat flux sensor 20 b to the control unit 30.
- the external wiring 301 is extended downward in FIG. 2, but may be extended upward in FIG.
- first and second flux sensors 20a and 20b By arranging the first and second flux sensors 20a and 20b to face each other as described above, for example, when the heat flux passes through the first heat flux sensor 20a from the back surface protection member 120 side to the surface protection member 110 side. Since the heat flux passes through the second heat flux sensor 20b from the front surface protection member 210 side to the back surface protection member 220 side, the first and second sensors output from the first and second heat flux sensors 20a and 20b. The polarity of the signal voltage is reversed.
- the first and second heat flux sensors 20a and 20b have positive voltage sensor signals when the heat flux from the back surface protection members 120 and 220 to the surface protection members 110 and 210 passes. Is arranged to output. For this reason, when the heat flux which goes to the heat radiating body 22 side from the blade part 1 side generate
- a heat flux passing through the sensor 20b from the front surface protection member 210 side to the back surface protection member 220 side is generated, a positive voltage sensor signal is output from the first heat flux sensor 20a and a negative voltage is output from the second heat flux sensor 20b. A voltage sensor signal is output.
- the above is the configuration of the state detection sensor 20 in the present embodiment.
- the control unit 30 includes a CPU, various memories constituting a storage device (storage means), peripheral devices, and the like, and is connected to a speaker (sound means), a display device (display means), and the like (not shown). .
- the first and second heat flux sensors 20a and 20b are connected, and when the first and second sensor signals are input from the first and second heat flux sensors 20a and 20b, the first and second heat flux sensors 20a and 20b are connected. Based on the second sensor signal and the threshold value stored in the storage means, it is determined whether or not abnormal heat generation has occurred in the blade portion 1.
- control unit 30 determines whether or not abnormal heat generation has occurred in the blade unit 1 by comparing the sum of the voltages of the first and second sensor signals with a threshold value.
- the operator is notified that abnormal heat generation has occurred in the blade portion 1 via a display device (display means) or a speaker (sound means).
- the abnormal heat generation in the blade portion 1 occurs when, for example, blade spillage occurs in the blade portion 1.
- the above is the configuration of the abnormality determination device S2 in the present embodiment.
- an abnormality determination method using the abnormality determination device S2 will be described.
- the heat flux passing through the first and second heat flux sensors 20a and 20b in the state detection sensor 20 and the first and second sensor signals output from the first and second heat flux sensors 20a and 20b will be described.
- the heat radiating body 22 is exposed to the outside air, but has a predetermined heat capacity as described above. For this reason, in the case of changes such as outside air, heat is accumulated and released with respect to the temperature change of the outside air in the heat radiating body 22, so that the first and second positions located on the blade portion 1 side from the heat radiating body 22. It is possible to suppress the heat flux sensors 20a and 20b from being affected by outside air.
- FIG. 8 is a diagram showing the relationship between the time of the sum of the voltage of the first sensor signal and the voltage of the second sensor signal when abnormal heat generation occurs in the blade portion 1 at time T1.
- control unit 30 determines whether or not abnormal heat generation has occurred in the blade unit 1 based on the sum of the voltage of the first sensor signal and the voltage of the second sensor signal and the threshold value. In the present embodiment, it is determined whether or not the sum of the voltage of the first sensor signal and the voltage of the second sensor signal is greater than a threshold value. If the sum is greater than the threshold value, abnormal heat generation occurs in the blade portion 1 (cutting device S1). It is determined that
- the control part 30 determines with the blade part 1 being normal.
- the control unit 30 determines that the abnormal heat generation has occurred in the blade unit 1 and notifies the operator that the abnormal heat generation has occurred in the blade unit 1 via a voice unit, a display unit, or the like.
- the first and second heat flux sensors 20a and 20b that output the first and second sensor signals corresponding to the heat flux passing in the thickness direction, A heat buffer 21a and a heat radiator 22 having a predetermined heat capacity are provided.
- the 1st heat flux sensor 20a, the thermal buffer 21a, the 2nd heat flux sensor 20b, and the heat radiator 22 are arrange
- the thermal buffer 21a is disposed between the first heat flux sensor 20a and the second heat flux sensor 20b, the first heat flux sensor is used when no abnormal heat is generated in the blade portion 1.
- the heat flux passing through 20a becomes equal to the heat flux passing through the second heat flux sensor 20b, and abnormal heat generation occurs in the blade portion 1, it instantaneously passes through the first heat flux sensor 20a.
- the heat flux and the heat flux passing through the second heat flux sensor 20b are different (see FIGS. 7A and 7B). Therefore, it can suppress that the detection accuracy which detects the state of the blade part 1 falls irrespective of the state of external air.
- the state detection sensor 20 can output highly accurate first and second sensor signals regardless of the state of the outside air.
- the determination accuracy of abnormal heat generation in the unit 1 can be improved.
- the first heat flux sensor 20a and the second heat flux sensor 20b are the first sensor signal voltage output from the first heat flux sensor 20a and the second heat flux sensor 20b.
- the two sensor signals are arranged so that their polarities are opposite to each other. For this reason, the arithmetic processing in the control part 30 can be simplified.
- the first and second via holes 101 and 102 are formed in the insulating base material 100 made of a thermoplastic resin, and the first and second interlayer connection members 130 are formed in the first and second via holes 101 and 102. , 140 are arranged to constitute the first and second heat flux sensors 20a, 20b. Therefore, it is possible to increase the density of the first and second interlayer connection members 130 and 140 by appropriately changing the number, diameter, interval, and the like of the first and second via holes 101 and 102. Thereby, an electromotive voltage can be enlarged and the high sensitivity of the 1st, 2nd heat flux sensors 20a and 20b can be achieved.
- first and second heat flux sensors 20a and 20b of the present embodiment are solid phase so that the crystal structure before sintering is maintained as the first and second interlayer connection members 130, 140, 230, and 240.
- Sintered metal compounds (Bi—Sb—Te alloy, Bi—Te alloy) are used. That is, the metal forming the first and second interlayer connection members 130, 140, 230, and 240 is a sintered alloy that is sintered in a state where a plurality of metal atoms maintain the crystal structure of the metal atoms.
- first and second heat flux sensors 20a and 20b of the present embodiment are configured such that the insulating base materials 100 and 200, the surface protection members 110 and 210, and the back surface protection members 120 and 220 are made of a thermoplastic resin. , Has flexibility. For this reason, the 1st, 2nd heat flux sensors 20a and 20b can be suitably changed according to the shape of the portion where the 1st and 2nd heat flux sensors 20a and 20b are arranged.
- abnormality determination is performed by determining whether the sum of the voltage of the first sensor signal and the voltage of the second sensor signal is greater than the threshold value.
- the abnormality determination may be performed based on a period (a period from time T2 to time T4 in FIG. 8) in which the sum of the voltage of the second sensor signal is larger than the threshold value. According to this, the case where the sum of the voltage of the first sensor signal and the voltage of the second sensor signal is instantaneously larger than the threshold due to noise or the like can be excluded, and the determination accuracy can be further improved. it can.
- the state detection sensor 20 includes a heat receiving body 25 disposed on the opposite side of the heat buffer 21a with the first heat flux sensor 20a interposed therebetween. That is, the state detection sensor 20 is provided with the heat receiving body 25 arrange
- the heat receiving body 25 has a flat plate shape made of a material having a predetermined heat capacity (thermal resistance), and is made of a metal such as Cu or Al, a resin, or the like. Yes.
- the heat receiving body 25 of the present embodiment is appropriately adjusted in material and thickness so that the heat capacity is smaller than that of the heat buffer 21a and the heat radiating body 22.
- the state detection sensor 20 includes the third and fourth heat flux sensors 20c and 20d in addition to the first and second heat flux sensors 20a and 20b and the heat buffer 21a. And thermal buffers 21b and 21c.
- the state detection sensor 20 includes a first heat flux sensor 20a, a heat buffer 21a, a second heat flux sensor 20b, a heat buffer 21b, a third heat flux sensor 20c, a heat buffer 21c, The four heat flux sensors 20d and the radiator 22 are arranged in this order.
- the third and fourth heat flux sensors 20c and 20d have the same configuration as the first and second heat flux sensors 20a and 20b, and receive the third and fourth sensor signals corresponding to the heat flux passing in the thickness direction. Output.
- the same reference numerals as those of the first heat flux sensor 20a are attached to the parts, and the insulating base material 200, the surface protection member 210, the surface pattern 211, the back surface protection member 220, the back surface pattern 221 and the first heat flux sensor 20d in the fourth heat flux sensor 20d.
- 1, the same reference numerals as those of the second heat flux sensor 20b are attached to the respective portions of the second interlayer connection members 230 and 240.
- the third and fourth heat flux sensors 20c and 20d are arranged so that the surface protection members 110 and 210 face each other, like the first and second heat flux sensors 20a and 20b.
- the external wiring 304 connects the back surface pattern 121 provided at the output end 601a (see FIG. 3) of the third heat flux sensor 20c to the control unit 30.
- the external wiring 305 uses the surface pattern 111 provided on the connection end 601b (see FIG. 3) opposite to the output end 601a of the third heat flux sensor 20c as the connection end 701b (see FIG. 3) of the fourth heat flux sensor 20d. ) To the surface pattern 211 provided in FIG.
- the external wiring 306 connects the back surface pattern 221 provided at the output end 701 a opposite to the connection end 701 b of the fourth heat flux sensor 20 d to the control unit 30.
- the third and fourth heat flux sensors 20c and 20d to face each other, for example, when the heat flux passes through the third heat flux sensor 20c from the back surface protection member 120 side to the surface protection member 110 side, for example. Since the heat flux passes through the fourth heat flux sensor 20d from the front surface protection member 210 side to the back surface protection member 220 side, the third and fourth sensor signals output from the third and fourth heat flux sensors 20c and 20d. The polarities of the voltages are opposite to each other.
- the thermal buffer bodies 21b and 21c have a flat plate shape made of a material having a predetermined heat capacity (thermal resistance), like the thermal buffer body 21a, such as a metal such as Cu or Al, a resin, or the like. It consists of In the present embodiment, the thermal buffers 21a to 21c are configured to have the same heat capacity.
- the thermal buffers 21a to 21c are provided as a first thermal buffer (first thermal storage body), a second thermal buffer (second thermal storage body), and a third thermal buffer (third thermal storage body), respectively. Yes.
- the control unit 30 is adapted to receive the third and fourth sensor signals in addition to the first and second sensor signals.
- the first to fourth sensor signals are input, the sum of the voltages of the first and second sensor signals and the sum of the voltages of the third and fourth sensor signals are added, and the added value and the threshold value are added. To determine whether or not abnormal heat generation has occurred in the blade portion 1.
- FIG. 11 shows an added value obtained by adding the sum of the voltages of the first and second sensor signals and the sum of the voltages of the third and fourth sensor signals when abnormal heat generation occurs in the blade portion 1 at time T11. It is a figure which shows the relationship between time and time.
- control unit 30 controls the blade unit 1 based on the addition value obtained by adding the sum of the voltages of the first and second sensor signals, the sum of the voltages of the third and fourth signals, and the threshold value. It is determined whether or not abnormal heat generation has occurred.
- the control part 30 determines with the blade part 1 being normal.
- heat due to abnormal heat is also accumulated in the heat buffers 21b and 21c in order. That is, after the heat flux passing through the first heat flux sensor 20a is increased, the heat flux passing through the second heat flux sensor 20b, the third heat flux sensor 20c, and the fourth heat flux sensor 20d is sequentially increased. That is, the difference between the heat flux passing through the first heat flux sensor 20a and the heat flux passing through the second heat flux sensor 20b from time T13 is reduced, but the heat flux passing through the third heat flux sensor 20c, Since the heat fluxes passing through the four heat flux sensors 20d are different from each other, the added value increases again from time T14.
- the added value is a value larger than the threshold during the period from time T12 to time T16.
- the state detection sensor 20 may be configured to include the first to fourth heat flux sensors 20a to 20d and the thermal buffers 21a to 21c.
- the period during which the added value is greater than the threshold becomes longer. For example, based on the period during which the added value is greater than the threshold.
- noise that instantaneously exceeds the threshold value can be excluded. For this reason, it is possible to further improve the determination accuracy.
- the state detection sensor 20 includes a first heat flux sensor 20a, a thermal buffer 21a, and a second heat flux sensor 20b arranged (stacked) in order.
- the structural bodies 40a to 40i are used, the first to ninth structural bodies 40a to 40i are provided. Specifically, the first to ninth components 40a to 40i are centered on the first component 40a, and the second to ninth components 40b to 40i are evenly arranged around the first component 40a.
- one heat radiating body 22 is disposed on the second heat flux sensor 20b of the first to ninth constituent bodies 40a to 40i. That is, in the present embodiment, the heat radiating body 22 is common to the first to ninth components 40a to 40i.
- control unit 30 receives the first and second sensor signals from the first and second heat flux sensors 20a and 20b in the first to ninth components 40a to 40i, although not particularly illustrated. ing. Then, the sum of the voltage of the first sensor signal and the voltage of the second sensor signal in the first to ninth structural bodies 40a to 40i is added, and the added value is compared with a threshold value. It is determined whether or not abnormal heat generation has occurred.
- first and second sensor signals similar to those in the first embodiment are output from the first and second heat flux sensors 20a and 20b in the first to ninth components 40a to 40i.
- the control unit 30 adds all the voltages of the first sensor signal and the second sensor signal in the first to ninth components 40a to 40i, and compares the added value with a threshold value. Thus, it is determined whether or not abnormal heat generation has occurred in the blade portion 1.
- the control part 30 determines with the blade part 1 being normal.
- the state detection sensor 20 may be configured to include the first to ninth configuration bodies 40a to 40i. And when performing abnormality determination using such a state detection sensor 20, since the value (addition value) compared with a threshold value becomes large, a threshold value itself can be enlarged. For this reason, for example, even if the voltage of the first sensor signal and the second sensor signal in the first structure 40a fluctuates due to noise, the variation as a whole is small, and the determination accuracy can be further improved. .
- the example in which the heat radiator 22 is common to the first to ninth components 40a to 40i has been described.
- the first to ninth components 40a to 40i are provided with the heat radiator 22 respectively. It may be. Further, the number of the constructs 40a to 40i can be changed as appropriate.
- the first and second heat flux sensors 20a and 20b are integrated. That is, one heat flux sensor is bent so as to sandwich the thermal buffer 21a.
- the first and second heat flux sensors 20a and 20b are different from the cross section shown in FIG. 14 in that the surface pattern 111 provided on the connection end 601b (see FIG. 3) of the first heat flux sensor 20a
- the surface pattern 211 provided on the connection end 701b (see FIG. 3) of the second heat flux sensor 20b and the surface pattern 350 provided on the surface protection members 110 and 210 are directly and continuously not via the external wiring 301. It is connected.
- the first and second heat flux sensors 20a and 20b are configured by one heat flux sensor, and the first heat flux sensor 20a and the second heat flux sensor 20b are connected. Therefore, the external wiring 301 can be eliminated. Therefore, the number of parts can be reduced.
- the surface pattern (connection pattern) 350 for connecting the first and second heat flux sensors 20a and 20b only needs to be changed in patterning in the process of FIG. 6E, and the manufacturing process is complicated. It will never be.
- the first and second heat flux sensors 20a and 20b have the insulating base materials 100 and 200, the surface protection members 110 and 210, and the back surface protection members 120 and 220, respectively, made of resin. It can be bent easily.
- the cutting device S3 includes a spindle 401 that rotates in the axial direction, a bearing 402 that rotatably supports the spindle 401, a support member 403 that supports the spindle 401 and the bearing 402, and a spindle 401. And an end mill 404 having a blade portion 404a on the outer peripheral surface.
- the end mill 404 rotates with the rotation of the spindle 401, and the workpiece member 10 is cut by contacting the workpiece 10 while the blade portion 404a of the end mill 404 rotates.
- the state detection sensor 20 is arrange
- two bearings 402 are arranged, and the state detection sensor 20 is arranged in the vicinity of each bearing 402.
- the support member 403 corresponds to the object of the present disclosure.
- the state detection sensor 20 is arranged in the order of the first heat flux sensor 20a, the heat buffer 21a, the second heat flux sensor 20b, and the radiator 22 from the support member 403 side. That is, the blade portion 1 in FIG. 2 is arranged so as to be the support member 403.
- the controller 30 is not particularly illustrated in FIG. 15, the first and second sensor signals from the first and second heat flux sensors 20 a and 20 b in the state detection sensor 20 are received as in the first embodiment. It is designed to be entered.
- the abnormality determination method of this embodiment will be described.
- the workpiece 404 is cut by the blade portion 404a of the end mill 404 coming into contact with the workpiece 10; however, the blade portion 404a of the end mill 404 has a blade spill or the like.
- the friction of the bearing 402 increases sharply.
- abnormal heat generation due to friction occurs in the vicinity of the bearing 402. Therefore, as described in FIGS. 7A and 7B, the heat flux and the second heat flux sensor that instantaneously pass through the first heat flux sensor 20a.
- the heat flux passing through 20b becomes different.
- control unit 30 determines whether or not the sum of the voltage of the first sensor signal and the voltage of the second sensor signal is greater than the threshold value. If the sum is greater than the threshold value, abnormal heat generation occurs in the end mill 404 (cutting device S3). It is determined that it has occurred.
- the abnormality determination device S2 that performs abnormality determination of the cutting device S3 by using the state detection sensor 20 of the present disclosure can be configured, and the same effect as in the first embodiment can be obtained.
- the transfer device S ⁇ b> 4 includes a screw 501 having a screw portion 501 a, support members 502 provided at both ends in the axial direction of the screw 501, and a motor provided in the support member 502. 503. Further, the screw 501 is provided with a nut 504 that is paired with the screw 501 and screwed so as to be movable in the axial direction of the screw 501.
- the nut 504 has a bearing 504 a and constitutes a so-called ball screw together with the screw 501, and is connected to the base 505.
- the pedestal 505 is for mounting a device or the like to be transferred.
- the pedestal 505 has a planar rectangular shape having a longitudinal direction in a direction orthogonal to the axial direction of the screw 501 (up and down direction in FIG. 16).
- the substantially central portion is connected to the nut 504.
- slide blocks 507 that are engaged with the rail 506 and are movable along the rail 506 are provided.
- the support member 502 is omitted for easy understanding.
- the state detection sensor 20 is provided in the nut 504 and each slide block 507 in the transfer device S4.
- the nut 504 and each slide block 507 correspond to the object of the present disclosure.
- the state detection sensor 20 is arranged in the order of the first heat flux sensor 20a, the heat buffer 21a, the second heat flux sensor 20b, and the heat radiator 22 from the nut 504 and the slide block 507 side, although not particularly shown. That is, the blade portion 1 in FIG. 2 is arranged so as to be the nut 504 or the slide block 507. 16 and 17, the control unit 30 is not particularly illustrated, but the first and second heat flux sensors 20a and 20b in the state detection sensor 20 are the first and second in the state detection sensor 20 as in the first embodiment. A sensor signal is input.
- the transfer device S4 the pedestal 505 is transferred by rotating the screw 501.
- the screw 501 and the nut 504 (bearing 504a), or between the slide block 507 and the rail 506, The friction increases sharply when a foreign object is caught in the surface.
- abnormal heat generation due to friction occurs in the nut 504 and the slide block 507, and as described with reference to FIGS. 7A and 7B, the heat flux passing through the first heat flux sensor 20a and the second The heat flux passing through the heat flux sensor 20b becomes different.
- control unit 30 determines whether or not the sum of the voltage of the first sensor signal and the voltage of the second sensor signal is larger than the threshold value, and if it is larger than the threshold value, the control unit 30 notifies the nut 504 and the slide block 507 (transfer device S4 ) Is determined to have abnormal heat generation.
- the abnormality determination device S2 that performs the abnormality determination of the transfer device S4 using the state detection sensor 20 of the present disclosure can be configured, and the same effect as in the first embodiment can be obtained.
- the radiator 22 is configured by the support member 4 with respect to the first embodiment, and the other aspects are the same as those in the first embodiment, and thus the description thereof is omitted here.
- the blade portion 1 is provided between the support member 4 and the flat support member 4 made of Cu or Al having a predetermined heat capacity (thermal resistance). It is fixed with screws 23 so as to constitute a predetermined space. And in the space between the blade part 1 and the support member 4, the 1st heat flux sensor 20a, the thermal buffer 21a, and the 2nd heat flux sensor 20b are arrange
- control unit 30 is not particularly illustrated, but the first and second sensor signals from the first and second heat flux sensors 20 a and 20 b in the state detection sensor 20 are received as in the first embodiment. It is designed to be entered.
- the radiator 22 is configured by the support member 4, and the first heat flux sensor 20 a, the heat buffer 21 a, and the second heat flux sensor 20 b are disposed between the blade portion 1 and the support member 4. Even in the configuration, the same effect as in the first embodiment can be obtained.
- control unit 30 may determine the relationship between the heat flux obtained by converting the first and second sensor signals (electromotive voltage) into the heat flux and the threshold value.
- the state detection sensor 20 when attaching the state detection sensor 20 to a target object, when there exists an unevenness
- the insulation base materials 100 and 200, the surface protection members 110 and 210, and the back surface protection members 120 and 220 were demonstrated about the example comprised with a thermoplastic resin
- the insulation base materials 100 and 200 are comprised. It can also be composed of a thermosetting resin. According to this, since the thermosetting resin does not flow in the process of FIG. 6H, the first and second via holes 101, 102, 201, 202 can be prevented from being displaced in the planar direction of the stacked body 170. .
- the thermosetting resin provides a flow resistance when the thermoplastic resin flows, it is possible to suppress the thermoplastic resin from flowing out particularly at the outer edge portions of the insulating base materials 100 and 200.
- the insulating base materials 100 and 200 may be made of thermoplastic resin, and the surface protection members 110 and 210 and the back surface protection members 120 and 220 may be made of thermosetting resin, or the surface protection members 110 and 210. Any one of the back surface protection members 120 and 220 may be made of a thermosetting resin. Furthermore, the insulating base materials 100 and 200, the surface protection members 110 and 210, and the back surface protection members 120 and 220 may not be resin.
- the first and second heat flux sensors 20a and 20b are not limited to the above-described configuration, and may be any sensor that outputs a sensor signal according to the passing heat flux. Similarly, in each embodiment, the heat flux sensors 20a to 20d only need to output sensor signals according to the heat flux that passes.
- the radiator 22 has a planar shape that is substantially the same as the planar shape of the second heat flux sensor 20b, and only the back surface protection member 120 of the second heat flux sensor 20b is used. It can also be arrange
- the part which the heat radiator 22 receives to the influence of external air can be decreased, and the fluctuation
- the arrangement location of the second via holes 101, 102 is appropriately changed, and the state detection sensor 20 is passed through substantially the center of the first heat flux sensor 20a, the heat buffer 21a, and the second heat flux sensor 20b. What is necessary is just to make it fasten to the blade part 1 with the screw
- the state detection sensor 20 does not need to be screwed by the blade part 1 with the screw
- a bonding member such as a double-sided tape or an adhesive is disposed between the state detection sensor 20 and the blade portion 1 and is bonded between the first heat flux sensor 20a, the thermal buffer 21a, and the second heat flux sensor 20b. You may make it arrange
- the arrangement method of the first and second heat flux sensors 20a and 20b is changed so that the back surface protection members 120 and 220 are opposed to each other, and the back surface patterns 121 and 221 are mutually disposed. May be directly connected without using the external wiring 301.
- the above embodiments can be combined as appropriate.
- the second embodiment may be combined with the third to eighth embodiments, and the heat receiving body 25 may be provided.
- the heat receiving body 25 may be common to the first to ninth constituent bodies 40a to 40i, or the heat receiving body 25 may be the first to ninth structures. You may make it provide in each of 9th structure 40a-40i.
- the third embodiment may be combined with the fourth to eighth embodiments to include third and fourth heat flux sensors 20c and 20d and thermal buffers 21b and 21c, respectively.
- the third embodiment is combined with the fifth embodiment, for example, the first and second heat flux sensors 20a and 20b are integrated and the third and fourth heat flux sensors 20c and 20d are integrated.
- only one of the first and second heat flux sensors 20a and 20b and the third and fourth heat flux sensors 20c and 20d may be integrated.
- the fourth embodiment may be combined with the fifth to eighth embodiments to include the first to ninth constituent bodies 40a to 40i.
- the first and second heat flux sensors 20a and 20b may be integrated in each of the first to ninth structural bodies 40a to 40i.
- the first and second heat flux sensors 20a and 20b in some of the first to ninth constituent bodies 40a to 40i may be integrated.
- the fifth embodiment may be combined with the sixth to eighth embodiments so that the first and second heat flux sensors 20a and 20b are integrated.
- the external wiring 301 connects the surface pattern 111 provided at the connection end 601b of the first heat flux sensor 20a to the surface pattern 211 provided at the connection end 701b of the second heat flux sensor 20b.
- the external wiring 301 may connect the back surface pattern 121 provided at the connection end of the first heat flux sensor 20a to the back surface pattern 221 provided at the connection end of the second heat flux sensor 20b.
- the external wiring 305 in the third embodiment connects the back surface pattern 121 provided at the connection end of the third heat flux sensor 20c to the back surface pattern 221 provided at the connection end of the fourth heat flux sensor 20d. Also good.
- the first and second heat flux sensors 20a and 20b are provided at the surface pattern 111 provided at the connection end 601b of the first heat flux sensor 20a and at the connection end 701b of the second heat flux sensor 20b.
- the surface pattern 211 thus formed is directly and continuously connected by the surface pattern 350 provided on the surface protection members 110 and 210 without using the external wiring 301.
- the first heat flux sensor 20a and the second heat flux sensor 20b are electrically connected to each other by connecting them directly and continuously using the back surface pattern 450 (see FIG. 14) provided on the back surface protection members 120 and 220. May be connected.
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Abstract
Description
本開示の第1実施形態について図面を参照しつつ説明する。なお、本実施形態では、本開示の状態検出センサを用いて切断装置の異常発熱(状態)を判定する異常判定装置を構成した例について説明する。
本開示の第2実施形態について説明する。本実施形態は、第1実施形態に対して第1熱流束センサ20aを挟んで熱緩衝体21aと反対側に受熱体を配置したものであり、その他に関しては第1実施形態と同様であるため、ここでは説明を省略する。
本開示の第3実施形態について説明する。本実施形態は、第1実施形態に対してさらに複数の熱流束センサと熱緩衝体を備えるものであり、その他に関しては第1実施形態と同様であるため、ここでは説明を省略する。
本開示の第4実施形態について説明する。本実施形態は、第1実施形態に対して第1、第2熱流束センサ20a、20bを複数備えるものであり、その他に関しては第1実施形態と同様であるため、ここでは説明を省略する。
本開示の第5実施形態について説明する。本実施形態は、第1実施形態に対して状態検出センサ20の構成を変更したものであり、その他に関しては第1実施形態と同様であるため、ここでは説明を省略する。
本開示の第6実施形態について説明する。本実施形態は、第1実施形態に対して切削装置の異常判定を行うようにしたものであり、その他に関しては第1実施形態と同様であるため、ここでは説明を省略する。
本開示の第7実施形態について説明する。本実施形態は、第1実施形態に対して移送装置の異常判定を行うようにしたものであり、その他に関しては第1実施形態と同様であるため、ここでは説明を省略する。
本開示の第8実施形態について説明する。本実施形態は、第1実施形態に対して放熱体22を支持部材4にて構成したものであり、その他に関しては第1実施形態と同様であるため、ここでは説明を省略する。
本開示は上記した実施形態に限定されるものではなく、本開示の範囲内において適宜変更が可能である。
Claims (11)
- 被対象物(1、403、504、507)の状態に応じたセンサ信号を出力する状態検出センサにおいて、
通過する熱流束に応じた第1センサ信号を出力する第1熱流束センサ(20a)と、
通過する熱流束に応じた第2センサ信号を出力する第2熱流束センサ(20b)と、
所定の熱容量を有する熱緩衝体(21a)と、
所定の熱容量を有する放熱体(22)と、を有し、
前記被対象物(1、403、504、507)側から前記第1熱流束センサ(20a)、前記熱緩衝体(21a)、前記第2熱流束センサ(20b)および前記放熱体(22)の順に配置され、
前記第1熱流束センサ(20a)は、前記被対象物(1、403、504、507)と前記熱緩衝体(21a)との間の前記熱流束に応じた第1センサ信号を出力し、前記第2熱流束センサ(20b)は、前記熱緩衝体(21a)と前記放熱体(22)との間の前記熱流束に応じた第2センサ信号を出力する状態検出センサ。 - 前記放熱体(22)の前記所定の熱容量は、前記熱緩衝体(21a)の前記所定の熱容量より大きい請求項1に記載の状態検出センサ。
- 所定の熱容量を有し、前記第1熱流束センサ(20a)を挟んで前記熱緩衝体(21a)と反対側に配置される受熱体(25)を備えている請求項1または2に記載の状態検出センサ。
- 前記受熱体(25)の前記所定の熱容量は、前記熱緩衝体(21a)の前記所定の熱容量より小さい請求項3に記載の状態検出センサ。
- 前記熱緩衝体(21a)は第1熱緩衝体であり、
前記状態検出センサは、
通過する熱流束に応じた第3センサ信号を出力する第3熱流束センサ(20c)と、
通過する熱流束に応じた第4センサ信号を出力する第4熱流束センサ(20d)と、
所定の熱容量を有する第2熱緩衝体(21b)と、
所定の熱容量を有する第3熱緩衝体(21c)と、を有し、
前記被対象物(1、403、504、507)側から前記第1熱流束センサ(20a)、前記第1熱緩衝体、前記第2熱流束センサ(20b)、前記第2熱緩衝体(21b)、前記第3熱流束センサ(20c)、前記第3熱緩衝体(21c)、前記第4熱流束センサ(20d)および前記放熱体(22)の順に配置されており、
前記第2熱流束センサ(20b)は前記第1熱緩衝体と前記第2熱緩衝体(21b)との間の熱流束に応じた第2センサ信号を出力し、前記第3熱流束センサ(20c)は前記第2熱緩衝体(21b)と前記第3熱緩衝体(21c)との間の熱流束に応じた第3センサ信号を出力し、前記第4熱流束センサ(20d)は前記第3熱緩衝体(21c)と前記放熱体(22)との間の熱流束に応じた第4センサ信号を出力する請求項1ないし4のいずれか1つに記載の状態検出センサ。 - 前記第1熱流束センサ(20a)、前記熱緩衝体(21a)および前記第2熱流束センサ(20b)を有する構成体(40a~40i)を複数備えている請求項1ないし5のいずれか1つに記載の状態検出センサ。
- 前記状態検出センサによる検出時に前記第1熱流束センサ(20a)を通過する熱流束と前記第2熱流束センサ(20b)を通過する熱流束とが互いに等しいときには、前記第1熱流束センサ(20a)から出力される前記第1センサ信号の電圧と、前記第2熱流束センサ(20b)から出力される前記第2センサ信号の電圧とは、絶対値が等しく、かつ、極性が反対となる請求項1ないし6のいずれか1つに記載の状態検出センサ。
- 前記第1熱流束センサ(20a)および前記第2熱流束センサ(20b)には、熱可塑性樹脂からなる絶縁基材(100、200)に該絶縁基材(100、200)の平面に直交する厚さ方向に貫通する複数の第1ビアホール(101、201)および複数の第2ビアホール(102、202)がそれぞれ形成され、
前記第1熱流束センサ(20a)および前記第2熱流束センサ(20b)のそれぞれにおいて、前記複数の第1ビアホール(101、201)には、導電性金属からなる複数の第1層間接続部材(130、230)がそれぞれ埋め込まれ、前記複数の第2ビアホール(102、202)には、前記複数の第1層間接続部材(130、230)の導電性金属とは異なる導電性金属からなる複数の第2層間接続部材(140、240)がそれぞれ埋め込まれ、前記複数の第1層間接続部材(130、230)および前記複数の第2層間接続部材(140、240)が、前記絶縁基材(100、200)の表面(100a、200a)に設けられた導電性を有する複数の表面パターン(111、211)と、前記絶縁基材(100、200)の裏面(100b、200b)に設けられた導電性を有する複数の裏面パターン(121、221)とを介して交互に直列接続されている請求項1ないし7のいずれか1つに記載の状態検出センサ。 - 前記第1熱流束センサ(20a)および前記第2熱流束センサ(20b)のそれぞれにおいて、前記複数の第1層間接続部材(130、230)を形成する導電性金属および前記複数の第2層間接続部材(140、240)を形成する前記導電性金属の少なくとも一方は、複数の金属原子が固相焼結によって当該金属原子の結晶構造を維持した状態で焼結された焼結合金である請求項8に記載の状態検出センサ。
- 前記第1熱流束センサ(20a)および前記第2熱流束センサ(20b)は、一体化されており、
前記第1熱流束センサ(20a)の前記複数の表面パターン(111)のうちの1つと、前記第2熱流束センサ(20b)の前記複数の表面パターン(211)のうちの1つとを互いに直接接続するか、または前記第1熱流束センサ(20a)の前記複数の裏面パターン(121)のうちの1つと、前記第2熱流束センサ(20b)の前記複数の裏面パターン(221)のうちの1つとを連続して直接接続することによって、前記第1熱流束センサ(20a)と、前記第2熱流束センサ(20b)とを互いに電気的に接続した請求項8または9に記載の状態検出センサ。 - 前記熱緩衝体(21a)は、前記第1熱流束センサ(20a)の前記絶縁基材(100)の平面および前記第2熱流束センサ(20b)の前記絶縁基材(200)の平面に平行な平面内において、前記第1熱流束センサ(20a)の前記絶縁基材(100)に設けられた前記複数の第1層間接続部材(130)および前記複数の第2層間接続部材(240)の全てを含む検出領域(SE)以上の範囲にわたって連続して設けられた一体の金属板である請求項8~10のいずれか1つに記載の状態検出センサ。
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