WO2016021723A1 - 接続端子 - Google Patents
接続端子 Download PDFInfo
- Publication number
- WO2016021723A1 WO2016021723A1 PCT/JP2015/072555 JP2015072555W WO2016021723A1 WO 2016021723 A1 WO2016021723 A1 WO 2016021723A1 JP 2015072555 W JP2015072555 W JP 2015072555W WO 2016021723 A1 WO2016021723 A1 WO 2016021723A1
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- WO
- WIPO (PCT)
- Prior art keywords
- end portion
- contact
- base end
- connection terminal
- tongue piece
- Prior art date
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Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01R—ELECTRICALLY-CONDUCTIVE CONNECTIONS; STRUCTURAL ASSOCIATIONS OF A PLURALITY OF MUTUALLY-INSULATED ELECTRICAL CONNECTING ELEMENTS; COUPLING DEVICES; CURRENT COLLECTORS
- H01R13/00—Details of coupling devices of the kinds covered by groups H01R12/70 or H01R24/00 - H01R33/00
- H01R13/02—Contact members
- H01R13/22—Contacts for co-operating by abutting
- H01R13/24—Contacts for co-operating by abutting resilient; resiliently-mounted
- H01R13/2407—Contacts for co-operating by abutting resilient; resiliently-mounted characterized by the resilient means
- H01R13/2421—Contacts for co-operating by abutting resilient; resiliently-mounted characterized by the resilient means using coil springs
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
- G01R1/06716—Elastic
- G01R1/06722—Spring-loaded
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
- G01R1/06733—Geometry aspects
- G01R1/0675—Needle-like
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/073—Multiple probes
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01R—ELECTRICALLY-CONDUCTIVE CONNECTIONS; STRUCTURAL ASSOCIATIONS OF A PLURALITY OF MUTUALLY-INSULATED ELECTRICAL CONNECTING ELEMENTS; COUPLING DEVICES; CURRENT COLLECTORS
- H01R13/00—Details of coupling devices of the kinds covered by groups H01R12/70 or H01R24/00 - H01R33/00
- H01R13/02—Contact members
- H01R13/22—Contacts for co-operating by abutting
- H01R13/24—Contacts for co-operating by abutting resilient; resiliently-mounted
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01R—ELECTRICALLY-CONDUCTIVE CONNECTIONS; STRUCTURAL ASSOCIATIONS OF A PLURALITY OF MUTUALLY-INSULATED ELECTRICAL CONNECTING ELEMENTS; COUPLING DEVICES; CURRENT COLLECTORS
- H01R13/00—Details of coupling devices of the kinds covered by groups H01R12/70 or H01R24/00 - H01R33/00
- H01R13/02—Contact members
- H01R13/22—Contacts for co-operating by abutting
- H01R13/24—Contacts for co-operating by abutting resilient; resiliently-mounted
- H01R13/2464—Contacts for co-operating by abutting resilient; resiliently-mounted characterized by the contact point
- H01R13/2471—Contacts for co-operating by abutting resilient; resiliently-mounted characterized by the contact point pin shaped
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/04—Housings; Supporting members; Arrangements of terminals
- G01R1/0408—Test fixtures or contact fields; Connectors or connecting adaptors; Test clips; Test sockets
- G01R1/0416—Connectors, terminals
Definitions
- the present invention relates to a connection terminal used for connection between electric circuit boards and the like.
- an electrical connection between the inspection target and a signal processing device that outputs an inspection signal is used.
- a probe unit that accommodates a plurality of contact probes as connection terminals is used.
- the probe unit can be applied to highly integrated and miniaturized inspection objects by narrowing the pitch between contact probes with the progress of high integration and miniaturization of semiconductor integrated circuits and liquid crystal panels in recent years. Possible technologies are progressing.
- a contact probe that electrically connects the semiconductor integrated circuit and the circuit board by making contact with the electrode of the semiconductor integrated circuit and the electrode of the circuit board that outputs a test signal at both ends.
- the contact probe disclosed in Patent Document 1 includes a first plunger that contacts an electrode of a semiconductor integrated circuit, a second plunger that contacts an electrode of a circuit board that outputs an inspection signal, and a first and second plunger that can be expanded and contracted. And a coil spring connected to the.
- the first base end portion of the first plunger is accommodated in the substantially cylindrical second base end portion of the second plunger, and the first base end portion and the second base end portion are accommodated.
- the electrical continuity is ensured by sliding with the part.
- the first and second proximal ends extend along the longitudinal direction of the first and second plungers, respectively.
- the contact probe disclosed in Patent Document 1 has a problem that the contact resistance is not stable because the first and second base ends are simply in sliding contact.
- it is necessary to match the diameter of the outer periphery of the first base end portion and the diameter of the inner periphery of the second base end portion with high accuracy, and it is difficult to manufacture and assemble.
- the present invention has been made in view of the above, and an object of the present invention is to provide a connection terminal capable of stabilizing contact resistance with a simple configuration.
- connection terminal is a conductive connection terminal having a needle shape that can expand and contract along the longitudinal direction, and is in contact with an electrode to be contacted.
- a first plunger having a first tip, a first base extending from the first tip, a second tip contacting the contact target electrode, and a second base extending from the second tip.
- the first and second tip portions are connected so that the central axes of the two are substantially parallel to each other and can be extended and contracted along the longitudinal direction. Characterized by comprising a Le spring, the.
- connection terminal includes a first contact member that contacts one of the two contact objects, a second contact member that contacts the other contact object of the two contact objects,
- a connection terminal having a coil spring that is capable of inserting a part of the first and second contact members therein and biasing the first and second contact members in an axial direction; Is provided with a first distal end portion and a first proximal end portion, and the second contact member is a second distal end portion, and a tongue piece portion that is in contact with the outer periphery of the first proximal end portion at the inner periphery, It is provided with.
- the connecting terminal according to the present invention is the above-mentioned invention, wherein the radius of curvature of at least the distal end side of the tongue piece is the first base in a state where the first base end and the tongue piece are not in contact with each other. It is smaller than the diameter of the end portion.
- the tongue piece is in contact with the first base end with elasticity.
- a surface of the tongue piece portion that contacts the first base end portion has a shape along an outer peripheral surface of the first base end portion.
- connection terminal is a conductive connection terminal that can be expanded and contracted along the longitudinal direction, and a first distal end portion that contacts one of the electrodes to be contacted, and a first proximal end portion
- a second contact that includes: a first contact member having a second contact portion that is in contact with the other of the electrodes to be contacted; and a plurality of tongue pieces that are capable of contacting the first base end portion.
- connection terminal according to the present invention is characterized in that, in the above-mentioned invention, the elastic member and the load applying means are formed of one coil spring formed by winding a wire.
- connection terminal according to the present invention is the coil spring according to the above invention, wherein the load applying means applies a load in a direction in contact with the outer periphery of the first base end portion to the plurality of tongue pieces. It is a tightening member of any one of a ring, an O-ring and a cylindrical member.
- the tongue piece portion is divided by a slit extending in an axial direction of the second contact member from the end portion of the tongue piece portion toward the second tip portion.
- the slit extends to at least a position where the load of the tongue piece is applied.
- the tongue piece portion is divided by a slit extending in the axial direction of the second connection member from the tip of the tongue piece portion, and the slit is at least a tongue piece. It extends over the position where the said load of the part is applied.
- the length of the tongue piece in the axial direction is such that the first and second contact members can slide relative to each other in the axial direction. It is characterized by being longer than the length.
- connection terminal in the above invention, a hollow space extending from a hollow space formed by the plurality of tongue pieces is formed at the second tip portion, and the second contact member has a plan view. It is characterized by having a substantially U shape.
- connection terminal according to the present invention is characterized in that, in the above invention, at least one of the first and second contact members has a plate shape.
- the coil spring has a rectangular cross section in a direction perpendicular to the longitudinal direction of the wire.
- the coil spring is made of an insulating material or a material obtained by subjecting a conductive material to insulation treatment.
- connection terminal according to the present invention is a conductive connection terminal that can be expanded and contracted along the longitudinal direction, and is in a direction away from each other from the first tip portion that contacts the electrode to be contacted.
- a first contact member having a first base end portion having a plurality of branch portions extending; a second tip portion in contact with an electrode to be contacted; and a cylindrical shape that is in contact with the plurality of branch portions.
- a second contact member having two base ends, and a coil spring capable of extending and contracting the first and second contact members along the longitudinal direction are provided.
- the contact resistance can be stabilized with a simple configuration.
- FIG. 1 is a perspective view showing the configuration of the probe unit according to the first embodiment of the present invention.
- FIG. 2 is a partial cross-sectional view showing a configuration of a main part of the probe unit according to the first embodiment of the present invention.
- FIG. 3 is a schematic diagram illustrating a configuration of a main part of the contact probe according to the first embodiment of the present invention.
- FIG. 4 is a schematic diagram illustrating a configuration of a main part of the contact probe according to the first embodiment of the present invention.
- FIG. 5 is a partial cross-sectional view showing the configuration of the main part of the probe unit at the time of inspection of the semiconductor package according to the first embodiment of the present invention, and shows a state in which the contact probe is connected to the circuit board and the semiconductor package. It is.
- FIG. 1 is a perspective view showing the configuration of the probe unit according to the first embodiment of the present invention.
- FIG. 2 is a partial cross-sectional view showing a configuration of a main part of the probe unit according to
- FIG. 6 is a partial cross-sectional view showing a configuration of a contact probe according to a modification of the first embodiment of the present invention.
- FIG. 7 is a schematic diagram illustrating a configuration of a main part of the contact probe according to the modification of the first embodiment of the present invention.
- FIG. 8 is a schematic diagram illustrating a configuration of a main part of the contact probe according to the modification of the first embodiment of the present invention.
- FIG. 9 is a schematic diagram illustrating a configuration of a main part of the contact probe according to the modification of the first embodiment of the present invention.
- FIG. 10 is a partial cross-sectional view showing the configuration of the contact probe according to the second embodiment of the present invention.
- FIG. 11 is a schematic diagram illustrating a configuration of a main part of the contact probe according to the second embodiment of the present invention.
- FIG. 12 is a distribution diagram showing the distribution of the number of tests with respect to the resistance values of the contact probe according to the second embodiment of the present invention and the comparative structure.
- FIG. 13 is a fragmentary sectional view which shows the structure of the contact probe concerning the modification 1 of Embodiment 2 of this invention.
- FIG. 14 is a partial cross-sectional view showing the configuration of the contact probe according to the second modification of the second embodiment of the present invention.
- FIG. 15 is a cross-sectional view showing the configuration of the contact probe according to the second modification of the second embodiment of the present invention.
- FIG. 16 is sectional drawing which shows the structure of the contact probe concerning the modification 3 of Embodiment 2 of this invention.
- FIG. 17 is a partial cross-sectional view showing the configuration of the contact probe according to the third embodiment of the present invention.
- FIG. 18 is a perspective view showing the configuration of the connection terminal according to the fourth embodiment of the present invention.
- FIG. 19 is an exploded perspective view showing the configuration of the connection terminal according to the fourth embodiment of the present invention.
- FIG. 1 is a perspective view showing the configuration of the probe unit according to the first embodiment of the present invention.
- a probe unit 1 shown in FIG. 1 is a device that is used when an electrical characteristic test is performed on a semiconductor integrated circuit 100 that is an object to be tested, and a circuit that outputs a test signal to the semiconductor integrated circuit 100 and the semiconductor integrated circuit 100. This is an apparatus for electrically connecting the substrate 200.
- the probe unit 1 is composed of a conductive contact probe 2 (hereinafter simply referred to as “probe 2”) that comes into contact with each electrode of the semiconductor integrated circuit 100 and the circuit board 200, which are two different contact bodies at both ends in the longitudinal direction (axis N0).
- probe 2 a conductive contact probe 2
- the semiconductor integrated circuit 100 provided around the probe holder 3 and in contact with the plurality of probes 2 at the time of inspection.
- a holder member 4 that suppresses the occurrence of displacement.
- the probe 2 corresponds to the connection terminal of the present invention.
- FIG. 2 is a partial cross-sectional view showing the configuration of the main part of the probe unit according to the first embodiment, and shows the detailed configuration of the probe 2 accommodated in the probe holder 3.
- the probe 2 shown in FIG. 2 is formed using a conductive material.
- the probe 2 contacts the electrode of the circuit board 200 provided with the inspection circuit, and the conductive material. And is provided between the first plunger 21 and the second plunger 22 and extends and contracts the first plunger 21 and the second plunger 22.
- a coil spring 23 that is freely connected. When the probe 2 contacts the semiconductor integrated circuit 100, the coil spring 23 expands and contracts in the axial direction, so that the impact on the connection electrode of the semiconductor integrated circuit 100 is reduced, and the semiconductor integrated circuit 100 and the circuit board 200 are reduced. Apply load.
- FIG. 3 is a schematic diagram illustrating the configuration of the main part of the contact probe according to the first embodiment, and is a diagram illustrating the configuration of the first plunger 21.
- the first plunger 21 includes a distal end portion 21a having a tapered distal end shape, a flange portion 21b extending from the proximal end side of the distal end portion 21a and having a diameter larger than the diameter of the distal end portion 21a, and the distal end of the flange portion 21b.
- the boss 21c extends from an end different from the side connected to the portion 21a and has a smaller diameter than the diameter of the flange 21b, and extends from the end of the boss 21c different from the side connected to the flange 21b.
- a proximal end portion 21d extending in a semi-cylindrical shape having a smaller width than the diameter of the portion 21c.
- the distal end portion 21a, the flange portion 21b, and the boss portion 21c constitute a first distal end portion
- the proximal end portion 21d constitutes a first proximal end portion.
- the first plunger 21 has a distal end portion 21a, a flange portion 21b, and a boss portion 21c on the same axis (axis N1), and a proximal end portion 21d extends along the axis N1.
- FIG. 4 is a schematic diagram illustrating a configuration of a main part of the contact probe according to the first embodiment, and is a diagram illustrating a configuration of the second plunger 22.
- the second plunger 22 includes a distal end portion 22a having a tapered distal end shape, a flange portion 22b extending from the proximal end side of the distal end portion 22a and having a diameter larger than the diameter of the distal end portion 22a, and the distal end of the flange portion 22b.
- the boss portion 22c extends from an end portion on a side different from the side continuous with the portion 22a, and has a diameter smaller than the diameter of the flange portion 22b, and extends from an end portion on a side different from the side continuous with the flange portion 22b of the boss portion 22c. And a base end portion 22d extending in a flat plate shape having a smaller width than the diameter of the boss portion 22c. In the second plunger 22, at least the base end portion 22d has elasticity.
- the distal end portion 22a, the flange portion 22b, and the boss portion 22c constitute a second distal end portion
- the proximal end portion 22d constitutes a second proximal end portion.
- the second plunger 22 has a distal end portion 22a, a flange portion 22b, and a boss portion 22c on the same axis (axis N2), and an axis N10 (center axis) in the extending direction of the base end portion 22d is inclined with respect to the axis N2. Then cross.
- the coil spring 23 is formed by winding a wire at a predetermined pitch, and at least the base end portions 21d and 22d are inserted into the coil spring 23.
- the coil spring 23 is connected so that the axis N1 of the first plunger 21 and the axis N2 of the second plunger 22 substantially coincide.
- the first plunger 21 and the second plunger 22 are connected by the coil spring 23 in a state where the shaft N1 and the shaft N2 are located on the same shaft N0.
- the coil spring 23 may be joined to the first plunger 21 and / or the second plunger 22 by soldering.
- Examples of the wire used for the coil spring 23 include a material made of metal or resin. This material may have conductivity, may be insulative, or may be obtained by subjecting a conductive material to insulation treatment.
- the first plunger 21 and the second plunger 22 are movable in the axial direction by the expansion and contraction action of the coil spring 23.
- the probe 2 is held by the probe holder 3, and a part of the base end portion 22 d of the second plunger 22 is not attached to the first plunger 21 in a state where an external load (excluding gravity) is not applied (see FIG. 2). It is in contact with the base end 21d.
- the base end portion 22d is inclined (intersect) with the axis N2 with respect to the axis N2, so that the base end portion 22d is in pressure contact with the base end portion 21d (relative to the base end portion 21d). In this state, a load in a direction substantially orthogonal to the axis N0 is applied.
- the probe holder 3 is formed using an insulating material such as resin or machinable ceramic, and the formation positions of the holder holes 33 and 34 are determined according to the wiring pattern of the semiconductor integrated circuit 100.
- FIG. 5 is a partial cross-sectional view showing the configuration of the main part of the probe unit at the time of inspection of the semiconductor package according to the first embodiment, and shows a state in which the contact probe is connected to the circuit board and the semiconductor package. .
- the tip 21a contacts the electrode 201 of the circuit board 200 as shown in FIG.
- the coil spring 23 is compressed along the longitudinal direction.
- the first plunger 21 and the second plunger 22 move in a direction in which they approach each other, whereby the proximal end portion 22d applies a load in the radial direction to the contact surface of the proximal end portion 21d. And slides on the contact surface (for example, in the direction of the arrow in FIG. 2).
- the tip 22a comes into contact with the connection electrode 101, and the coil spring 23 is further compressed along the longitudinal direction (axis N0) by the contact load from the semiconductor integrated circuit 100.
- the coil spring 23 is compressed, the base end portion 22d further slides on the contact surface while being pressed against the contact surface of the base end portion 21d.
- the base end portion 22d having elasticity and intersecting the axis N10 in the extending direction with an inclination with respect to the axis N2 extends along the axis N1. Since sliding is performed with respect to the base end portion 21d, when conducting the inspection signal through the probe, the contact pressure between the base end portion 21d and the base end portion 22d is increased, and the contact state is stabilized.
- the contact resistance between the plungers can be stably reduced with a simple configuration, and the resistance value of the probe (whole) can be reduced.
- the base end portion 22d has been described as having elasticity.
- the second plunger 22 may be integrally formed (the same material).
- only the base end portion 22d may be formed using an elastic material.
- the elasticity of the base end portion 22d is not specified in size, and may be as weak as a metal springback, and may be sufficient if the contact surfaces are in contact with each other even if a little pressure is applied.
- connection electrode has been described as having a flat plate shape, but a flat plate lead used in QFP (Quad Flat Package) or the like may be used.
- FIG. 6 is a partial cross-sectional view showing a configuration of a contact probe according to a modification of the first embodiment of the present invention.
- the base end portions 21d and 22d have been described as having a flat plate shape.
- the base end portions of the first and second plungers have shapes corresponding to the contact surfaces of each other. I am doing.
- the probe 2a shown in FIG. 6 is formed using a conductive material, and is formed using a first plunger 210 that contacts an electrode of the circuit board 200 and a conductive material, and contacts a connection electrode of the semiconductor integrated circuit 100. And a coil spring 23 provided between the first plunger 210 and the second plunger 220 to connect the first plunger 210 and the second plunger 220 in a telescopic manner.
- the first plunger 210, the second plunger 220, and the coil spring 23 constituting the probe 2a have the same axis.
- FIG. 7 is a schematic diagram illustrating the configuration of the main part of the contact probe according to the modification of the first embodiment of the present invention, and is a diagram illustrating the configuration of the first plunger 210.
- the first plunger 210 according to this modification has a base end portion 21e extending in a columnar shape instead of the base end portion 21d of the first plunger 21 described above.
- FIG. 8 is a schematic diagram illustrating the configuration of the main part of the contact probe according to the modification of the first embodiment, and is a diagram illustrating the configuration of the second plunger 220.
- FIG. 9 is a schematic diagram showing the configuration of the main part of the contact probe according to the modification of the first embodiment, and is a view seen from the base end portion 22e side of the second plunger 220 in the axis N2 direction.
- the second plunger 220 has a base end 22e (second base end) extending from the end 22a, the flange 22b, the boss 22c, and the end of the boss 22c that is different from the end connected to the flange 22b. And having.
- at least the base end portion 22e has elasticity.
- the base end portion 22e functions as a tongue piece portion of the present invention.
- the second plunger 220 intersects with an axis N11 (center axis) in the extending direction of the base end portion 22e inclined at least with respect to an axis N2 parallel to the center axis of the tip end portion 22a.
- the axis N11 is, for example, a straight line that passes through the center of gravity of the base end portion 22e and is parallel to the extending direction.
- the base end portion 22e has an inner peripheral surface having an R shape substantially equal to the R shape formed by the outer periphery of the base end portion 21e.
- the base end portion 22e has a shape in which a flat plate is bent in a direction orthogonal to the axis N11, and the R shape (curvature) of the curved form is the R shape (curvature) of the outer peripheral side surface of the base end portion 21e. It is equal to.
- the first plunger 210 and the second plunger 220 are movable in the axial direction by the expansion and contraction action of the coil spring 23.
- the base end portion 22e is in contact with the base end portion 21e because the axis N11 is inclined (intersected) with respect to the axis N2. A state in which a load in a substantially perpendicular direction is applied).
- the coil spring 23 is compressed by an external load, the base end portion 22e slides on the contact surface while elastically contacting the contact surface of the base end portion 21e.
- the R shape (curvature) on the inner peripheral surface of the base end portion 22e is described as being equal to the R shape (curvature) of the outer peripheral side surface of the base end portion 21e.
- the radius of curvature at least on the inner peripheral surface of the base end portion 22e may be smaller than the diameter formed by the outer periphery of the base end portion 21e. If the radius of curvature of the inner peripheral surface of the base end portion 22e is smaller than the diameter formed by the outer periphery of the base end portion 21e, the base end portion 22e is in the base end when the base end portion 21e contacts the base end portion 22e. Since the outer periphery of the portion 21e is engaged with and in contact with the outer periphery of the portion 21e, the pressure contact state between the base end portion 21e and the base end portion 22e can be further ensured.
- FIG. 10 is a partial cross-sectional view showing the configuration of the contact probe according to the second embodiment of the present invention.
- one base end is described as being in pressure contact with the other base end.
- one base end is the other base end. A part of Go.
- the probe 5 according to the second embodiment is formed using a conductive material, and when the semiconductor integrated circuit 100 (see FIG. 1) is inspected, the probe 5 contacts the electrode of the circuit board 200 provided with the inspection circuit.
- 51 and a coil spring 53 that couples the second plunger 52 in a telescopic manner.
- the first plunger 51, the second plunger 52, and the coil spring 53 constituting the probe 5 have the same axis.
- the coil spring 53 functions as the elastic member and load adding means of the present invention.
- the first plunger 51 has no shape equivalent to that of the first plunger 210 described above, and has the tip 51a, the flange 51b, the boss 51c, and the tip 21a, the flange 21b, the boss 21c and the base 21e having the same shape. It has a base end 51d.
- the coil spring 53 also has the same shape as the coil spring 23 described above.
- the second plunger 52 includes a distal end portion 52a having a tapered distal end shape, a flange portion 52b extending from the proximal end side of the distal end portion 52a and having a diameter larger than the diameter of the distal end portion 52a, and the distal end of the flange portion 52b.
- a tongue piece group 52c comprising a plurality of tongue pieces (a first tongue piece part 521 and a second tongue piece part 522) extending from an end part different from the side connected to the part 52a and surrounding the base end part 51d; On the same axis (axis N0). In the second plunger 52, at least the tongue piece group 52c has elasticity.
- FIG. 11 is a schematic view showing the configuration of the main part of the contact probe according to the second embodiment, and is a view seen from the distal end side of the tongue piece group 52c of the second plunger 52 in the axis N0 direction.
- the first tongue piece portion 521 and the second tongue piece portion 522 have a maximum diameter smaller than the diameter of the flange portion 52b among the diameters formed by the outer edges of the two tongue pieces.
- the diameter formed by the inner edges of the two tongue pieces is the diameter of the outer periphery of the base end portion 51d as long as the tongue piece portion contacts the first base end portion with slight elasticity after assembly of the probe. They may be equivalent, small, or large.
- description will be made assuming that there are two tongue pieces, but it may have three or more tongue pieces.
- first tongue piece 521 and the second tongue piece 522 has a stepped shape and has rotational symmetry with the axis N0 as the rotation axis, thereby suppressing the inclination of the second plunger 52 with respect to the first plunger 51.
- the first tongue piece portion 521 includes a first boss portion 521a extending from an end portion on a different side from the side continuous with the tip portion 52a of the flange portion 52b, and the first boss portion 521a from the first boss portion 521a.
- a first extending portion 521b having a thickness in a direction orthogonal to the axis N0 and smaller than the thickness of the first boss portion 521a.
- the second tongue piece 522 has a second boss 522a and a second extension 522b.
- the first extending portion 521b and the second extending portion 522b surround a part (front end side) of the base end portion 51d on the inner peripheral surface.
- the shape formed by the inner peripheral surfaces of the first tongue piece 521 and the second tongue piece 522 is preferably a shape along the outer peripheral surface of the base end 51d. Contact resistance can be reduced because the shape which the inner peripheral surface of the 1st tongue piece part 521 and the 2nd tongue piece part 522 makes
- the first tongue piece portion 521 and the second tongue piece portion 522 are divided into two tongue pieces by, for example, drilling with a drill having a diameter corresponding to the base end 51d and then grooving with a rotary cutter or the like. It is formed by doing.
- the coil spring 53 connects the first plunger 51 and the second plunger 52 by press-fitting into the outer edge formed by the first boss part 521a and the second boss part 522a and by press-fitting into the boss part 51c.
- the first boss portion 521a and the second boss portion 522a are tightened by press-fitting the coil spring 53, and the diameter formed by the outer edge is reduced.
- the diameter of the outer edge formed by the first boss portion 521a and the second boss portion 522a is reduced, the first extending portion 521b and the second extending portion 522b are also moved to the inner peripheral side. Thereby, the diameter which the inner peripheral surface of the 1st extension part 521b and the 2nd extension part 522b makes is reduced. For this reason, the 1st extension part 521b and the 2nd extension part 522b will be in the state which press-contacted to the outer peripheral surface of the base end part 51d, respectively.
- a first tongue piece 521 and a second tongue piece 522 are formed by forming a slit. This slit extends from the end of the tongue piece group 52c on the side different from the flange portion 52b side to at least a tightening position by the coil spring 53 (a position where a load is applied by the coil spring 53).
- the first plunger 51 and the second plunger 52 are movable in the axial direction by the expansion and contraction action of the coil spring 53.
- a state in which the first extending portion 521b and the second extending portion 522b are pressed against the base end portion 51d by the tightening force of the coil spring 53 (a state in which a load in a direction substantially orthogonal to the axis N0 is applied to the base end portion 51d)
- the coil spring 53 is compressed by a load from the outside, the first extending portion 521b and the second extending portion 522b are pressed against the contact surface of the base end portion 51d while moving on the contact surface.
- the second plunger 52 is produced by, for example, forming a distal end portion, a flange portion, a boss portion, and a base end portion like the first plunger 51 and then cutting the boss portion and the extension portion using a drill or a cutter. can do.
- the second plunger 52 is manufactured integrally by the above-described method, it is formed using a material having elasticity and conductivity.
- FIG. 12 is a distribution diagram showing the distribution of the number of tests with respect to the resistance values of the contact probe according to the second embodiment and the comparative structure which is a conventional structure.
- the distribution diagram shown in FIG. 12 is a probe 5 (structure of the present application) in which the vertical axis is the number (test number), the horizontal axis is the resistance value, and the first boss portion 521a and the second boss portion 522a are tightened by press-fitting of the coil spring 53. ) And a comparison probe (comparison structure) without tightening by the coil spring 53 is shown.
- 32 probes of each structure were prepared, and each probe was measured three times.
- the stroke amount of the first plunger and the second plunger was 500 ⁇ m.
- the structure of the present application has a lower resistance value and a smaller variation in resistance value than the comparative structure.
- the average resistance value of the structure of the present application was 33.6 m ⁇ for the first time, 34.7 m ⁇ for the second time, and 35.0 m ⁇ for the third time, whereas the average resistance value of the comparative structure was 111.5 m ⁇ for the first time.
- the second time was 108.0 m ⁇
- the third time was 115.0 m ⁇ . Therefore, by adopting a structure in which the coil spring 53 is tightened and press-contacted as in the structure of the present application, a low-resistance probe with little variation between probes can be obtained.
- the first extending portion 521b and the second extending portion 522b slide while being pressed against the base end portion 51d by the tightening force of the coil spring 53. Since the contact pressure between the tongue piece group 52c (the first tongue piece portion 521b and the second tongue piece portion 522b) and the base end portion 51d is increased, the contact state is stabilized, and the plunger has a simple configuration. The contact resistance can be stably reduced, and the resistance value of the probe (the whole) can be reduced.
- the contact area between the first extending portion 521b and the second extending portion 522b and the base end portion 51d is larger than that in the first embodiment, the current that flows is increased. Can be further increased.
- the length of the axial direction of a tongue piece part is longer than the length in which the 1st plunger 51 and the 2nd plunger 52 can slide-slide relatively with respect to each other's axial direction. It is preferable. As the length of the tongue piece in the axial direction is longer, the tightening force with respect to the first plunger 51 becomes smaller due to the moment force, and the sliding friction force becomes smaller. For this reason, sliding frictional resistance does not increase and an appropriate frictional force can be generated. In addition, since the bending stress at the end of the tongue piece on the tightening portion (first boss portion 521a and second boss portion 522a) side becomes smaller as the tongue piece portion becomes longer, the thickness of the tongue piece portion can be reduced. This makes it easy to cope with the reduction in the diameter of the second plunger 52.
- the tongue piece group 52c has been described as including two tongue pieces (the first tongue piece 521 and the second tongue piece 522). You may have a tongue piece part more than a part.
- the shape formed by the inner peripheral surface of each tongue piece portion is made to be a shape along the outer peripheral surface of the base end portion 51d, so that the tongue piece portions are formed in two shapes. Stable sliding can be obtained as compared with the case of having one.
- the first plunger 51 may be supported by the coil spring 53 by press-fitting and connecting the boss portion 51c to the coil spring 53, or the first plunger 51 of the boss portion 51c.
- the diameter may be smaller than the inner diameter of the coil spring 53, and the coil spring 53 may be in contact with and supported by the flange portion 51b.
- FIG. 13 is a fragmentary sectional view which shows the structure of the contact probe concerning the modification 1 of Embodiment 2 of this invention.
- the coil diameter by winding the wire of the coil spring 53 has been described as being constant.
- the coil diameter changes. The diameters at both ends are smaller than the diameter at the center of the coil, and the degree of press-fitting is stronger than in the second embodiment.
- the probe 5a according to the first modification includes the first plunger 51 and the second plunger 52 described above, and a coil spring 53a.
- the coil diameter at one end is equal to or smaller than the diameter of the outer edge formed by the press-fitted portion (the first boss portion 521a and the second boss portion 524a) of the tongue piece group 52c, and the coil diameter at the other end is It is below the diameter of the part 51d.
- FIG. 14 is a partial cross-sectional view showing the configuration of the contact probe according to the second modification of the second embodiment of the present invention.
- FIG. 15 is a cross-sectional view illustrating a configuration of the contact probe according to the second modification of the second embodiment.
- FIG. 15 is a cross-sectional view taken along a plane that passes through the axis N0 in FIG.
- a notch groove corresponding to a space (slit) formed by a plurality of tongue pieces is formed in the tip and the flange.
- the probe 5b according to the second modification includes the first plunger 51, the coil spring 53, and the second plunger 54 described above.
- the second plunger 54 includes a distal end portion 54a having a tapered distal end shape, a flange portion 54b extending from the proximal end side of the distal end portion 54a and having a diameter larger than the diameter of the distal end portion 54a, and the distal end of the flange portion 54b.
- a tongue piece group 54c composed of a plurality of tongue pieces extending from the end on the side different from the side continuous with the portion 54a is coaxially (axis N0).
- the plurality of tongue pieces extend from the flange portion 54b in the axis N0 direction, and extend so that the distance from the opposing tongue pieces decreases toward the tip. In other words, the diameter of the substantially circle formed by the outer edges (outer circumferences) of the plurality of tongue pieces is reduced toward the tip in the extending direction. In addition, as long as it can press-contact with the base end part 51d with a some tongue piece part, you may not reduce in diameter.
- the distal end portion 54a and the flange portion 54b are provided with a hollow portion S1 formed according to an internal space formed by a plurality of tongue pieces. Further, in the second plunger 54, the internal space formed by the plurality of tongue pieces and the slit that communicates the hollow portion S1 with the outside are second from the end on the side different from the flange portion 52b side of the tongue piece group 54c.
- the tongue 54 extends in the axial direction of the plunger 54, and a plurality of tongue pieces are formed by the slits in the tongue piece group 54c.
- This slit extends from the end of the tongue piece group 54c on the side different from the flange 54b side beyond at least the tightening position by the coil spring 53 (the position where the load is applied by the coil spring 53), that is, the tip 54a and the flange. It extends to the part 54b.
- FIG. 16 is sectional drawing which shows the structure of the contact probe concerning the modification 3 of Embodiment 2 of this invention.
- the base end portion 51d has been described as having a cylindrical shape.
- the base end portion has a V shape that is divided into two directions by dividing the column into two. .
- the probe 5c according to the second modification includes the coil spring 53, the first plunger 55, and the second plunger 56 described above.
- the first plunger 55 includes a distal end portion 55a having a tapered distal end shape, a flange portion 55b extending from the proximal end side of the distal end portion 55a and having a diameter larger than the diameter of the distal end portion 55a, and the distal end of the flange portion 55b.
- a boss portion 55c extending from an end portion different from the side connected to the portion 55a and having a diameter smaller than the diameter of the flange portion 55b, and an end portion different from the side connecting to the flange portion 55b of the boss portion 55c are mutually connected.
- a base end portion 55d having two branch portions (branches 551, 552) extending in the direction of separation.
- the second plunger 56 includes a distal end portion 56a having a tapered distal end shape, a flange portion 56b extending from the proximal end side of the distal end portion 56a and having a diameter larger than the diameter of the distal end portion 56a, and the distal end of the flange portion 56b.
- the boss portion 56c has a diameter smaller than that of the flange portion 56b and extends from an end portion on a different side from the end portion of the boss portion 56c.
- a cylindrical base end portion 56d is coaxially provided.
- the maximum distance (distance on the distal end side) among the distances between the branch portions 551 and 552 is larger than the diameter of the internal space of the proximal end portion 56d (diameter in the direction orthogonal to the extending direction).
- the branch portions 551 and 552 are formed by, for example, dividing the base end portion formed in a columnar shape into two along the central axis direction with a blade tool or the like and then bending the base end portion so as to extend at a predetermined angle. be able to.
- the base end portion 56d may be tightened by the coil spring 53, and the pressure contact load with the branch portions 551 and 552 may be further increased. Moreover, although this modification 3 demonstrated that two branch parts were provided, you may provide three or more branch parts.
- the first plunger 55 may be supported by the coil spring 53 by press-fitting and connecting the boss portion 55c to the coil spring 53, or the diameter of the boss portion 55c. May be smaller than the inner diameter of the coil spring 53, and the coil spring 53 may be in contact with and supported by the flange portion 55b.
- the second plunger 56 may be one in which the boss portion 56 c is press-fitted into the coil spring 53, or the flange portion 56 b may be supported by the coil spring 53.
- FIG. 17 is a partial cross-sectional view showing the configuration of the contact probe according to the third embodiment of the present invention.
- the first boss portion 521a and the second boss portion 522a are tightened by press-fitting the coil spring 53.
- the probe 5d according to the third embodiment is separate from the coil spring 53b.
- the first boss portion 521a and the second boss portion 522a are tightened by the tightening member 57 provided.
- the coil spring 53b and the tightening member 57 constitute support means.
- the probe 5d according to the third embodiment includes the first plunger 51 and the second plunger 52, the coil spring 53b, and the tightening member 57 described above.
- the coil spring 53b is shorter in the axial direction of winding than the axial length of the coil spring 53 described above.
- the spring constant of the coil spring 53b may be the same as or different from that of the coil spring 53.
- the fastening member 57 is formed of a coil spring formed by winding a wire around a tight winding.
- the inner diameter formed by the wire of the fastening member 57 is smaller than the diameter formed by the outer circumferences of the first boss portion 521a and the second boss portion 522a.
- the fastening member 57 may be formed by winding a wire at a predetermined pitch.
- the fastening member 57 is press-fitted into the first boss portion 521a and the second boss portion 522a.
- the first boss portion 521a and the second boss portion 522a are tightened by press-fitting and elastically deformed to reduce the diameter in a direction in which they are close to each other and in contact with the outer periphery of the base end portion 51d.
- the first boss portion 521a and the second boss portion 522a are reduced in diameter
- the first extending portion 521b and the second extending portion 522b are also moved to the axis N0 side.
- the diameter which the inner peripheral surface of the 1st extension part 521b and the 2nd extension part 522b makes is reduced.
- the 1st extension part 521b and the 2nd extension part 522b will be in the state which press-contacted to the outer peripheral surface of the base end part 51d, respectively.
- the first extending portion 521b and the second extending portion 522b slide while being pressed against the base end portion 51d by the tightening force of the tightening member 57. Since it is made to move, the contact pressure between the tongue piece group 52c (the first extending part 521b and the second extending part 522b) and the base end part 51d is increased, and the contact state is stabilized, and the structure is simple. Contact resistance can be stabilized.
- the tightening member 57 is provided separately from the coil spring 53b, and the first boss portion 521a and the second boss portion 522a are tightened by the tightening member 57, and the coil spring 53b is tightened. Since it does not have a tightening function, the expansion and contraction of the first plunger 51 and the second plunger 52 and the tightening of the first boss part 521a and the second boss part 522a can be designed independently. .
- the tightening member 57 is described as being a coil spring, but may be a C-ring, an O-ring, or a cylindrical member. There may be.
- the tightening member is applicable if the inner periphery has a smaller diameter than the outer periphery of the first boss portion 521a and the second boss portion 522a and can be elastically deformed.
- the diameter of the coil spring may be larger than the tightening member.
- FIG. 18 is a perspective view showing the configuration of the connection terminal according to the fourth embodiment of the present invention.
- FIG. 19 is an exploded perspective view showing the configuration of the connection terminal according to the fourth embodiment of the present invention.
- the configuration of the connection terminal has been described by taking the contact probe having a substantially cylindrical shape as an example.
- the connection terminal 6 according to the fourth embodiment uses a plate-like member.
- the connection terminal 6 has a substantially flat plate-like first contact member 61 that can be electrically connected by contact with one end of the connection terminal 6, and is electrically connected by contact of the one end with the connection target.
- a substantially flat second contact member 62 that can contact the first contact member 61, and a coil spring that can support the first contact member 61 and the second contact member 62 so as to be stretchable along the longitudinal direction.
- the occupied area is large
- the two planes facing each other are the main plane
- the plane substantially orthogonal to the main plane is the side plane
- the direction orthogonal to the main plane is the plate thickness direction
- the plate thickness The direction orthogonal to the direction and the longitudinal direction is defined as the width direction.
- the first contact member 61 is formed using a conductive material.
- the first contact member 61 includes a distal end portion 61a having a plurality of convex portions having a tapered distal end shape, and a flange portion 61b extending from the proximal end side of the distal end portion 61a and having a width larger than the width of the distal end portion 61a.
- an extending portion 61c extending in a substantially prismatic shape from an end portion different from the side connected to the distal end portion 61a of the flange portion 61b, an extending portion 61c extending from an end portion different from the connecting side of the flange portion 61b of the extending portion 61c,
- a base end portion 61d having a larger width than the base end portion is coaxially provided.
- the second contact member 62 is formed using a conductive material.
- the second contact member 62 has a tapered tip shape, a tip portion 62a that is substantially U-shaped in plan view in the plate thickness direction, and two flanges that extend in the width direction from the base end of the tip portion 62a (first A tongue portion group having a flange portion 62b having a flange 621 and a second flange 622) and two tongue pieces (a first tongue piece portion 623 and a second tongue piece portion 624) extending from the proximal end of the distal end portion 62a, respectively. 62c on the same axis.
- the 2nd contact member 62 makes the substantially U shape by which the hollow space 64 was formed in planar view by the structure mentioned above.
- the first tongue piece 623 and the second tongue piece 624 have a substantially columnar shape extending in parallel with each other along the longitudinal direction.
- the distance between the 1st tongue piece part 623 and the 2nd tongue piece part 624 is comparable as the width
- the first tongue piece 623 and the second tongue piece 624 are provided at end portions on the side different from the end portion on the tip end portion 62a side, and projecting portions 623a and 624a projecting toward the facing tongue piece portions. Are formed respectively.
- the first contact member 61 and the second contact member 62 are made of a noble metal or a noble metal alloy, and are formed by cutting.
- the noble metal include gold (Au), silver (Ag), platinum (Pt), palladium (Pd), and rhodium (Rh).
- the noble metal alloy is an alloy containing any of the above-mentioned noble metals.
- the coil spring 63 is formed by winding a wire in a spiral shape.
- the diameter formed by the inner periphery of the coil spring 63 is smaller than the diameter of the circumscribed circle of the tongue piece group 62c.
- the circumscribed circle here is a circle circumscribing the section in the section of the tongue piece group 62c whose cut surface is a plane parallel to the width direction.
- the coil spring 63 has one end abutting on the flange portion 61b to support the first contact member 61, and a tongue piece group 62c is press-fitted on the other end to abut against the flange portion 62b.
- the second contact member 62 is supported. Thereby, the extending portion 61c, the proximal end portion 61d, and the tongue piece portion group 62c are surrounded by the coil spring 63 in a state where the first contact member 61 and the second contact member 62 are engaged.
- the surface of the coil spring 63 has an insulating property.
- the insulation is ensured by coating the surface of the coil spring 63 with an insulating resin such as enamel, or using an insulating resin or ceramic, or a wire having a higher resistance than the first and second contact members. This is realized by forming a shape.
- the extending portion 61c and the base end portion 61d are inserted into a space (hollow space 64) formed by the first tongue piece 623 and the second tongue piece 624. Connect with At this time, the first tongue piece 623 and the second tongue piece 624 are in sliding contact with the base end portion 61d. Further, the base end portion 61d and the projecting portions 623a and 624a are locked to have a function of preventing the first contact member 61 and the second contact member 62 from coming off.
- the first tongue piece 623 and the second tongue piece 624 are press-fitted into the coil spring 63. At this time, the first tongue piece portion 623 and the second tongue piece portion 624 are tightened by press-fitting and elastically deformed in a direction approaching each other. When the 1st tongue piece part 623 and the 2nd tongue piece part 624 adjoin, each will be in the state which press-contacted to the outer peripheral surface of the extending
- the first tongue piece 623 and the second tongue piece 624 are slid while being pressed against the base end 61d by the tightening force of the coil spring 63. Since it moves, the contact pressure between the tongue piece group 62c (the first tongue piece portion 623 and the second tongue piece portion 624) and the base end portion 61d is increased, the contact state is stabilized, and the structure is simple. Contact resistance can be stabilized.
- the base end portion 61d and the protruding portions 623a and 624a are configured to be prevented from coming off. However, when both connecting members are press-fitted into the coil spring, these (base end portion and There may be no projection).
- the fastening member of Embodiment 3 may be provided and the 1st tongue piece part 623 and the 2nd tongue piece part 624 may be fastened by this fastening member 57.
- FIG. 4 the fastening member of Embodiment 3 may be provided and the 1st tongue piece part 623 and the 2nd tongue piece part 624 may be fastened by this fastening member 57.
- the distal end portion 61a and the flange portion 61b of the first contact member 61 may be rotated by 90 ° with respect to the tongue piece group 62c.
- each flange portion on the tip end side and the boundary wall surface between the large diameter portion and the small diameter portion of the holder hole may be tapered.
- the coil spring is described as being formed using a wire, but the wire has a circular or elliptical cross section in a direction perpendicular to the longitudinal direction of the wire. It may be a shape, or may be a rectangle. When the wire has a rectangular shape, it is possible to increase the load applied to the expansion and contraction and tightening of the first plunger (first contact member) and the second plunger (second contact member).
- first to fourth embodiments and modifications are merely examples for carrying out the present invention, and the present invention is not limited to these. Further, the present invention can form various inventions by appropriately combining a plurality of constituent elements disclosed in the respective embodiments and modifications.
- the plunger described in the first to third embodiments and the contact member of the fourth embodiment can be combined. It is obvious from the above description that the present invention can be variously modified according to specifications and the like, and that various other embodiments are possible within the scope of the present invention.
- the contact probe according to the present invention is useful for stabilizing the contact resistance with a simple configuration.
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Abstract
Description
図1は、本発明の実施の形態1にかかるプローブユニットの構成を示す斜視図である。図1に示すプローブユニット1は、検査対象物である半導体集積回路100の電気特性検査を行う際に使用する装置であって、半導体集積回路100と半導体集積回路100へ検査用信号を出力する回路基板200との間を電気的に接続する装置である。
図6は、本発明の実施の形態1の変形例にかかるコンタクトプローブの構成を示す部分断面図である。上述した実施の形態1では、基端部21d,22dが平板状をなすものとして説明したが、本変形例では、第1および第2プランジャの基端部が、互いの接触面に応じた形状をなしている。
図10は、本発明の実施の形態2にかかるコンタクトプローブの構成を示す部分断面図である。上述した実施の形態1では、一方の基端部が他方の基端部に圧接するものとして説明したが、本実施の形態2にかかるプローブ5は、一方の基端部が他方の基端部の一部を囲繞する。
図13は、本発明の実施の形態2の変形例1にかかるコンタクトプローブの構成を示す部分断面図である。上述した実施の形態2では、コイルばね53の線材の巻回によるコイル径が一定であるものとして説明したが、本変形例1は、コイル径が変化する。コイル中央部の径に比べて両端部の径が小さくなっており、上述した実施の形態2と比して圧入度合いが強い。
図14は、本発明の実施の形態2の変形例2にかかるコンタクトプローブの構成を示す部分断面図である。図15は、本実施の形態2の変形例2にかかるコンタクトプローブの構成を示す断面図である。図15は、図14の軸N0を通過する平面を切断面とする断面図である。本変形例2では、第2プランジャにおいて、複数の舌片部により形成される空間(スリット)に応じた切欠き溝を先端部およびフランジ部に形成する。
図16は、本発明の実施の形態2の変形例3にかかるコンタクトプローブの構成を示す断面図である。上述した実施の形態2では、基端部51dが円柱状をなすものとして説明したが、本変形例3では、基端部が、円柱を2分割して2方向に分かれたV字状をなす。
図17は、本発明の実施の形態3にかかるコンタクトプローブの構成を示す部分断面図である。上述した実施の形態2では、コイルばね53の圧入により第1ボス部521aおよび第2ボス部522aを締め付けるものとして説明したが、本実施の形態3にかかるプローブ5dは、コイルばね53bとは別に設けられる締付部材57によって第1ボス部521aおよび第2ボス部522aを締め付ける。本実施の形態3では、コイルばね53bおよび締付部材57により支持手段を構成する。
図18は、本発明の実施の形態4にかかる接続端子の構成を示す斜視図である。図19は、本発明の実施の形態4にかかる接続端子の構成を示す分解斜視図である。上述した実施の形態1~3では、略円柱状をなすコンタクトプローブを例に接続端子の構成を説明したが、本実施の形態4にかかる接続端子6は、板状の部材を用いてなる。
2,2a,5,5a,5b,5c,5d コンタクトプローブ(プローブ)
3 プローブホルダ
4 ホルダ部材
6 接続端子
21,51,55,210 第1プランジャ
21a,22a,51a,52a,54a,55a,56a 先端部
21b,22b,51b,52b,54b,55b,56b フランジ部
21c,22c,51c,55c,56c ボス部
21d,22d,21e,22e,51d,55d,56d 基端部
22,52,54,56,220 第2プランジャ
23,53,53a,53b,63 コイルばね
31 第1部材
32 第2部材
33,34 ホルダ孔
52c,54c,62c 舌片部群
57 締付部材
61 第1接触部材
62 第2接触部材
100 半導体集積回路
101 接続用電極
200 回路基板
201 電極
521,632 第1舌片部
521a 第1ボス部
521b 第1延在部
522,624 第2舌片部
522a 第2ボス部
522b 第2延在部
551,552 枝部
Claims (16)
- 長手方向に沿って伸縮可能な針状をなす導電性の接続端子であって、
接触対象の電極と接触する第1先端部と、前記第1先端部から延びる第1基端部と、を有する第1プランジャと、
接触対象の電極と接触する第2先端部と、前記第2先端部から延びる第2基端部であって、当該第2基端部の中心軸を通過する直線が、前記第2先端部の中心軸を通過する直線と交差し、弾性を有し、前記第1基端部と接触する第2基端部と、を有する第2プランジャと、
線材を巻回してなり、前記第1基端部と前記第2基端部とが内部に挿通され、前記第1および第2先端部の中心軸が略平行となるように該第1および第2先端部を連結し、前記長手方向に沿って伸縮自在なコイルばねと、
を備えたことを特徴とする接続端子。 - 二つの接触対象のうちの一方の接触対象に接触する第1接触部材と、
二つの接触対象のうちの他方の接触対象に接触する第2接触部材と、
前記第1および第2接触部材の一部を内部に挿通し、前記第1および第2接触部材を軸線方向に付勢可能なコイルばねと、
を有する接続端子であって、
前記第1接触部材は、第1先端部と、第1基端部と、を備え、
前記第2接触部材は、第2先端部と、内周で前記第1基端部の外周と接触する舌片部と、を備えたことを特徴とする接続端子。 - 前記舌片部の少なくとも先端側の曲率半径は、第1基端部と前記舌片部とが非接触の状態において、前記第1基端部の径よりも小さいことを特徴とする請求項2に記載の接続端子。
- 前記舌片部は、前記第1基端部と弾性をもって接触することを特徴とする請求項3に記載の接続端子。
- 前記舌片部の前記第1基端部と接触する面は、前記第1基端部の外周面に沿った形状をなすことを特徴とする請求項2に記載の接続端子。
- 長手方向に沿って伸縮可能な導電性の接続端子であって、
接触対象の電極のうち一方の電極と接触する第1先端部と、第1基端部と、を有する第1接触部材と、
接触対象の電極のうち他方の電極と接触する第2先端部と、前記第1基端部と接触可能な複数の舌片部と、を有する第2接触部材と、
前記第1および第2接触部材を前記長手方向に沿って伸縮自在にする弾性部材と、
前記複数の舌片部に対して前記第1基端部の外周と接触する方向の荷重を加える荷重付加手段と、
を備えたことを特徴とする接続端子。 - 前記弾性部材および前記荷重付加手段は、線材を巻回してなる一つのコイルばねからなることを特徴とする請求項6に記載の接続端子。
- 前記荷重付加手段は、
前記複数の舌片部に対して前記第1基端部の外周と接触する方向の荷重を加えるコイルばね、Cリング、Oリングおよび筒状部材のいずれかの締付部材、
であることを特徴とする請求項6に記載の接続端子。 - 前記舌片部は、前記舌片部の端部から前記第2先端部に向けて前記第2接触部材の軸線方向に延びるスリットにより分割されており、
前記スリットは、少なくとも舌片部の前記荷重が加えられている位置まで延びていることを特徴とする請求項6~8のいずれか一つに記載の接続端子。 - 前記舌片部は、前記舌片部の先端から前記第2接続部材の軸線方向に延びるスリットにより分割され、
前記スリットは、少なくとも舌片部の前記荷重が加えられている位置を越えて延びていることを特徴とする請求項6~8のいずれか一つに記載の接続端子。 - 前記舌片部の軸線方向の長さは、第1および第2接触部材が互いの軸線方向に対して相対的に摺動移動可能な長さよりも長いことを特徴とする請求項6~8のいずれか一つに記載の接続端子。
- 前記第2先端部には、前記複数の舌片部のなす中空空間から延びる中空空間が形成され、
前記第2接触部材は、平面視で略U字状をなすことを特徴とする請求項6~11のいずれか一つに記載の接続端子。 - 前記第1および第2接触部材のうち、少なくとも一方が板状をなすことを特徴とする請求項6~12のいずれか一つに記載の接続端子。
- 前記コイルばねは、線材の長手方向と直交する方向の断面が矩形状をなすことを特徴とする請求項7または8に記載の接続端子。
- 前記コイルばねは、絶縁材料、もしくは導電材料に絶縁処理を施した材料からなることを特徴とする請求項7または8に記載の接続端子。
- 長手方向に沿って伸縮可能な導電性の接続端子であって、
接触対象の電極と接触する第1先端部と、前記第1先端部から互いに離れる方向に延びる複数の枝部を有する第1基端部と、を有する第1接触部材と、
接触対象の電極と接触する第2先端部と、筒状をなし、前記複数の枝部と接触可能な第2基端部と、を有する第2接触部材と、
前記第1および第2接触部材を前記長手方向に沿って伸縮自在に支持可能なコイルばねと、
を備えたことを特徴とする接続端子。
Priority Applications (8)
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US15/501,592 US10411386B2 (en) | 2014-08-08 | 2015-08-07 | Connection terminal |
CN201580042527.3A CN106574937B (zh) | 2014-08-08 | 2015-08-07 | 连接端子 |
EP15830423.8A EP3179255B1 (en) | 2014-08-08 | 2015-08-07 | Connecting terminal |
MYPI2017700402A MY186248A (en) | 2014-08-08 | 2015-08-07 | Connection terminal |
KR1020177003357A KR101869211B1 (ko) | 2014-08-08 | 2015-08-07 | 접속 단자 |
JP2016540761A JP6231690B2 (ja) | 2014-08-08 | 2015-08-07 | 接続端子 |
SG11201700936RA SG11201700936RA (en) | 2014-08-08 | 2015-08-07 | Connecting terminal |
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US (1) | US10411386B2 (ja) |
EP (1) | EP3179255B1 (ja) |
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MY (1) | MY186248A (ja) |
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PH12017500219A1 (en) | 2017-07-10 |
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CN106574937B (zh) | 2020-06-23 |
EP3179255B1 (en) | 2022-12-21 |
SG11201700936RA (en) | 2017-03-30 |
JP2017224632A (ja) | 2017-12-21 |
EP3179255A1 (en) | 2017-06-14 |
CN106574937A (zh) | 2017-04-19 |
JP6231690B2 (ja) | 2017-11-15 |
MY186248A (en) | 2021-06-30 |
JPWO2016021723A1 (ja) | 2017-05-25 |
US10411386B2 (en) | 2019-09-10 |
TWI600218B (zh) | 2017-09-21 |
PH12017500219B1 (en) | 2017-07-10 |
US20170229802A1 (en) | 2017-08-10 |
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EP3179255A4 (en) | 2018-05-02 |
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