WO2015141513A1 - 塗布装置、塗布方法、及びディスプレイ用部材の製造方法 - Google Patents

塗布装置、塗布方法、及びディスプレイ用部材の製造方法 Download PDF

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Publication number
WO2015141513A1
WO2015141513A1 PCT/JP2015/056887 JP2015056887W WO2015141513A1 WO 2015141513 A1 WO2015141513 A1 WO 2015141513A1 JP 2015056887 W JP2015056887 W JP 2015056887W WO 2015141513 A1 WO2015141513 A1 WO 2015141513A1
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Prior art keywords
coating
nozzle
coating liquid
flow path
valve
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PCT/JP2015/056887
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English (en)
French (fr)
Japanese (ja)
Inventor
善章 冨永
諭 圓崎
和幸 獅野
阿部　哲也
Original Assignee
東レ株式会社
東レエンジニアリング株式会社
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Application filed by 東レ株式会社, 東レエンジニアリング株式会社 filed Critical 東レ株式会社
Priority to CN201580027268.7A priority Critical patent/CN106413915B/zh
Publication of WO2015141513A1 publication Critical patent/WO2015141513A1/ja

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    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/0005—Production of optical devices or components in so far as characterised by the lithographic processes or materials used therefor
    • G03F7/0007—Filters, e.g. additive colour filters; Components for display devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
    • B05C11/10—Storage, supply or control of liquid or other fluent material; Recovery of excess liquid or other fluent material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
    • B05C11/10—Storage, supply or control of liquid or other fluent material; Recovery of excess liquid or other fluent material
    • B05C11/1047—Apparatus or installations for supplying liquid or other fluent material comprising a buffer container or an accumulator between the supply source and the applicator
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/20—Filters
    • G02B5/22—Absorbing filters
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/16—Coating processes; Apparatus therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
    • B05C11/10—Storage, supply or control of liquid or other fluent material; Recovery of excess liquid or other fluent material
    • B05C11/1039—Recovery of excess liquid or other fluent material; Controlling means therefor

Definitions

  • the present invention relates to a coating apparatus and a coating method for forming a coating film on the surface of a member to be coated, and a method for manufacturing a member for a display performed using the coating method.
  • the color liquid crystal display is composed of a color filter, a TFT array substrate, and the like.
  • Manufacturing of these color filters and TFT array substrates includes a step of applying a coating liquid (liquid material) to a substrate as a member to be coated and drying it to form a coating film.
  • a coating liquid liquid material
  • a black photoresist material is applied on the entire surface of a glass substrate and dried to form a black coating film.
  • lattice form with a photolithographic technique the coating film of the photoresist material of red, blue, and green is formed in order by the same method between grating
  • a slit coater is used as a coating apparatus for forming such a coating film on a member to be coated.
  • the slit coater is provided with a nozzle having a slit-like elongated discharge port. After the nozzle discharge port is placed close to the member to be coated with a certain clearance, the nozzle and the member to be coated are relatively connected to each other. While moving in the direction at a constant speed, the coating liquid is discharged from the discharge port of the nozzle to the member to be coated. Thereby, the coating film of a fixed film thickness can be formed on a to-be-coated member.
  • a high-quality product for example, a high-quality color filter
  • a piston pump also referred to as a syringe pump
  • a piston pump that can make the flow rate of the coating liquid constant with high accuracy is used (see, for example, Patent Document 1).
  • the coating liquid to the nozzle is kept constant using the piston pump and the coating liquid is “constantly discharged” from the nozzle to the coated member that moves at a constant speed, a small area where the coating starts and ends.
  • the film thickness in an area is a so-called defective film thickness that differs from the film thickness in the middle coating area by more than an allowable value. This is because a bead, which is a reservoir of the coating solution, is constantly present in the gap between the nozzle outlet and the coated member while the middle region of the coated member is being coated.
  • the application of a stable film thickness is maintained by the bead of (1)
  • the application start area since the application is performed while forming the bead with the application liquid discharged from the nozzle, the flow rate for application is insufficient until the bead formation is completed, resulting in a defective film thickness.
  • the coating end region even if the discharge of the coating liquid from the nozzle is stopped, the coating is applied until the bead that gradually shrinks is completely destroyed, resulting in a defective film thickness.
  • Patent Document 2 in order to realize this surplus discharge, which is named “positive pulse”, a displacement piston is provided in the nozzle, and a constant flow rate of coating liquid is sent to the nozzle by a pump, and the displacement piston is quickly moved by a certain distance. By operating, the coating liquid in the nozzle is pushed out by a certain amount.
  • JP 2000-334355 A Japanese Patent Laid-Open No. 4-61958
  • the present invention provides a constant flow rate discharge of the coating liquid from the nozzle in the coating start area so that coating with a small defective film thickness area and a uniform film thickness and a high quality product area can be performed at high speed and with high productivity.
  • the present invention provides a coating apparatus and a coating method capable of instantaneously and excessively discharging a coating liquid in an amount necessary for bead formation, and a method for manufacturing a display member using the coating method.
  • the coating apparatus supplies a nozzle for discharging a coating liquid to a member to be coated, a moving means for relatively moving the nozzle and the member to be coated, and a coating liquid to the nozzle.
  • a tank connected to the nozzle via a flow path and a pressurizing means for pressurizing the coating liquid in the tank and feeding the coating liquid to the nozzle. 2 supply means.
  • the supply means when starting the application, sends out the coating liquid at a constant flow rate to the nozzle by a liquid feeder for forming a coating film having a constant film thickness, and in addition, the pressurizing means Since the coating liquid can be pressurized and sent out at an excessively high speed, it is possible to discharge the coating liquid from the nozzle in a much shorter time, that is, instantaneously compared to the case of the conventional displacement piston. In addition, since the application is performed while the nozzle and the member to be coated are relatively moved in one direction by the moving means, the discharge port of the nozzle can be obtained only by stopping the supply of the coating liquid to the nozzle at the end of the application.
  • the coating liquid which becomes a bead remains between the coating member and the coating member, and the defective film thickness region in the coating finish region does not become small.
  • the decompression means can instantaneously suck the coating liquid in the nozzle in accordance with the end of coating, the nozzle outlet and the member to be coated The bead (coating liquid) remaining during the period can be sucked into the nozzle and destroyed instantaneously. For this reason, it is possible to reduce the defective film thickness region in the coating end region.
  • the tank can be configured to be connected to a flow path from the nozzle included in the first supply means to the liquid feeder.
  • the first supply A part of the flow path connected to the nozzle of the means is also used as the flow path from the tank to the nozzle of the second supply means.
  • the liquid feeder is connected to a first flow path extending from the nozzle, and the tank is connected to an independent second flow path different from the first flow path extending from the nozzle. It can also be set as the structure which is. In this case, at the start of coating, the supply of the coating liquid to the nozzle for constant flow discharge using the first supply means and the supply of the coating liquid to the nozzle for excess discharge using the second supply means are completely performed. Since it can be performed without mutual interference in another separate flow path, the responsiveness is improved, and the excessive discharge of the coating liquid in a shorter time can be easily realized.
  • the tank is connected to a flow path between the nozzle and the liquid feeder included in the first supply means via a joint, and the joint is disposed inside the first
  • An angle of 5 to 75 degrees is formed with respect to the first joint flow path from the connection point between the first joint flow path connected to the flow path of the one supply means and the first joint flow path.
  • a second joint flow path extending toward the liquid feeder side of the flow path of the first supply means and connected to the second supply means, and further from the joint to the first 1
  • a valve for supplying and stopping the coating liquid from both the liquid feeder and the tank to the nozzle is arranged at a position where the flow path length is 50 mm or less on the nozzle side of the flow path of the supply means. It can be set as a structure.
  • the application liquid can be delivered from both the liquid feeder and the tank at an extra high speed in a very short time, so the application liquid is pulsed from the nozzle in an extremely short time. It is possible to discharge excessively. For this reason, it is possible to further reduce the defective film thickness region in the coating start region.
  • the second supply means is provided in a flow path between the tank and the nozzle, and is a supply for starting and stopping the feeding of the coating liquid in the tank to the nozzle. It preferably has a stop valve. In this case, when the supply stop valve is opened, the coating liquid is instantaneously fed to the nozzle, and instantaneous surplus discharge becomes possible.
  • the second supply means further includes a suction means provided in a flow path between the supply stop valve and the nozzle to suck the coating liquid in the flow path. It is preferable.
  • the supply stop valve is opened in a state where the coating liquid in the tank is pressurized at a higher pressure, and the coating liquid can be sent to the nozzle in a shorter time, but it is sent out in excess of the required amount.
  • the suction means sucks the coating liquid, the excess amount is removed, and as a result, it is possible to perform excessive discharge from the nozzle in a shorter time.
  • the liquid feeder of the first supply means continues to the operation of feeding the coating liquid to the nozzle at a constant flow rate.
  • the present invention is a method of applying a coating liquid to a member to be coated using the coating apparatus according to any one of (1) to (6), wherein the first The supply of the coating liquid to the nozzle is started by the second supply means in accordance with the start of supplying the coating liquid to the nozzle by the supply means, and after a predetermined time, the second supply means supplies the nozzle to the nozzle.
  • the application start step for stopping the supply of the coating liquid and starting the application, the application intermediate step for continuing the supply of the application liquid at a constant flow rate by the first supply means, and the application liquid by the first supply means
  • the application end step of starting the suction of the coating liquid in the nozzle by the decompression means, stopping the suction after a predetermined time, and ending the application to the member to be coated. It is characterized by. According to the present invention, it is possible to achieve the same operational effects as the application device of (1), and in the application start process, it is possible to instantaneously perform excessive discharge from the nozzle to form a bead, In the coating end process, it is possible to instantaneously destroy the bead and finish the coating.
  • the display member is produced from the member to be coated using the coating method described in (7) to (9).
  • the coating method used in the present invention as described above, in the coating start step, it is possible to instantaneously perform excessive discharge from the nozzle to form a bead, and in the coating end step, start coating of the member.
  • the defective film thickness region in the region and the coating end region can be reduced even during high-speed coating, and a high-quality display member can be manufactured with high productivity and at low cost.
  • the coating apparatus and the coating method of the present invention in addition to the constant flow rate discharge of the coating liquid from the nozzle in the coating start region of the member to be coated, the amount of coating liquid necessary for bead formation is instantaneously and excessively discharged.
  • the bead can be instantaneously broken by sucking the coating liquid into the nozzle even in the coating end region. For this reason, the defective film thickness area in the coating start area and the coating end area of the coated member is made very small, and the high-quality product area with a uniform film thickness is increased, thereby increasing the coating speed and shortening the tact time. Thus, it can be easily realized even when productivity is increased.
  • the manufacturing method of the present invention since the display member is manufactured using the above-described excellent coating method, a high-quality display member can be manufactured with high productivity and low cost.
  • FIG. 1 is a schematic diagram illustrating a schematic configuration of a coating apparatus 1 of the present invention.
  • the coating apparatus 1 is an apparatus that applies a coating liquid 2 to the surface of a substrate W that is a member to be coated, and a coating film M1 and a coating film M2 are formed on the substrate W by the coating liquid 2.
  • the coating apparatus 1 moves the nozzle 5 for discharging the coating liquid 2 to the substrate W, the supply means 10 for supplying the coating liquid 2 to the nozzle 5, and one or both of the nozzle 5 and the substrate W in the horizontal direction.
  • the moving means 8 to be moved and the pressure reducing means 40 to suck the coating liquid 2 in the nozzle 5 are provided.
  • the coating apparatus 1 includes a control device 4 including a computer.
  • the control device 4 includes each mechanism (moving means 8, supply means 10 including each valve, and decompression including each valve) included in the coating apparatus 1. The operation control of the means 40) is performed.
  • FIG. 14 is an explanatory view for explaining the configuration of the coating apparatus 1, wherein (a) is a view seen from the front, and (b) is a view seen from the side.
  • the nozzle 5 has a manifold 6 extending in the longitudinal direction (Y direction) perpendicular to the paper surface and a discharge flow path 7 connected to the manifold 6.
  • the manifold 6 is an enlarged space for accumulating the coating liquid 2 supplied from the supply means 10, distributing it uniformly in the longitudinal direction, and sending it to the discharge flow path 7.
  • the discharge flow path 7 is applied to the substrate W. This is a flow path for discharging the liquid 2.
  • the end of the discharge flow path 7 opposite to the manifold 6 side is a discharge port 7a for the coating liquid 2, and the coating liquid 2 is discharged from the discharge port 7a.
  • the discharge channel 7 may be a long and narrow slit-shaped channel or a channel composed of a plurality of holes. In the case of the slit shape, a planar coating film M is formed, and a plurality of holes are formed. In some cases, a striped coating M is formed.
  • the moving means 8 includes a stage 3 for fixing the substrate W by suction or the like, a linear motor 8a for moving the stage 3, and a guide member 8b for guiding the stage 3 in the X direction. .
  • the moving means 8 can move the stage 3 on which the substrate W is placed on the nozzle 5 in one direction (X direction).
  • the stage 3 may be fixed and the nozzle 5 side may move in the horizontal direction with respect to the stage 3.
  • the nozzle 5 can be moved in the vertical direction (the Z direction in FIG. 14A) by the elevating mechanism 9, thereby adjusting a gap amount G up to the clearance between the discharge port 7 a of the nozzle 5 and the substrate W. can do.
  • the lifting mechanism 9 includes a motor 9a whose operation is controlled by the control device 4 (see FIG. 1), a screw shaft 9b rotated by the motor 9a, and a nut unit 9c screwed to the screw shaft 9b.
  • the nozzle 5 is fixed to the nut unit 9c, and the nut unit 9c moves up and down along the screw shaft 9b by forward and reverse rotation of the screw shaft 9b, thereby moving the nozzle 5 up and down.
  • the discharge port 7a of the nozzle 5 is brought close to the substrate W by the lifting mechanism 9 to create a gap G, and the nozzle 3 is moved while moving the stage 3 on which the substrate W is placed in one direction (X direction) at a constant speed V.
  • the coating liquid 2 When the coating liquid 2 is discharged from the discharge port 7a at the constant flow rate Q, a bead B is first formed between the discharge port 7a of the nozzle 5 and the substrate W, and then the bead B starts as the substrate W moves.
  • the coating liquid 2 having the thickness T can be formed by applying the coating liquid 2.
  • the coating liquid 2 is intermittently discharged from the discharge port 7a of the nozzle 5 while the single substrate W and the nozzle 5 are relatively moved in one direction. Intermittent application can be performed. Thereby, as shown in FIG.
  • a plurality of independent coating films M1 and M2 are formed on the substrate W along the moving direction.
  • the stage 3 moves in one direction, and when all the coating operations are completed, the stage 3 moves in the opposite direction and returns to the initial state.
  • the supply unit 10 includes a first supply unit 61 and a second supply unit 62.
  • the first supply means 61 includes a flow path 11 connected to the nozzle 5 (manifold 6), and a pump 12 as a liquid feeder that sends the coating liquid 2 to the nozzle 5 (manifold 6) through the flow path 11.
  • the second supply unit 62 includes an intermediate tank 13 that is a tank for storing the coating liquid 2 and a pressurizing unit 14.
  • the flow path 11 is mainly composed of resin piping (resin tube), and the flow path 11 includes a joint for connecting each device.
  • piping which comprises the flow path 11 may be metal other than resin.
  • the pump 12 is a constant capacity pump having a function of feeding the coating liquid 2 to the nozzle 5 at a constant flow rate.
  • the pump 12 of this embodiment is a syringe pump having the same structure as a syringe.
  • the intermediate tank 13 constituting the second supply means 62 is connected to the flow path 11 between the nozzle 5 and the pump 12 of the first supply means 61 at the position of the joint portion 19a.
  • the intermediate tank 13 is connected to the flow path 11 via the intermediate valve 15.
  • the intermediate valve 15 is included in the second supply means 62 and is provided in a flow path between the intermediate tank 13 and the nozzle 5.
  • the intermediate valve 15 together with the downstream valve 17 described later is disposed in the intermediate tank 13.
  • the pressurizing unit 14 includes a pressurizer that supplies compressed air to the intermediate tank 13, and the internal pressure of the intermediate tank 13 can be increased by the compressed air.
  • the pressurizing means 14 pressurizes the coating liquid 2 in the intermediate tank 13 and, with the intermediate valve 15 and the downstream valve 17 open, sends the coating liquid 2 in the intermediate tank 13 to the nozzle 5 by this pressurization ( Can be pumped).
  • the intermediate valve 15 is closed, the feeding of the coating liquid 2 in the intermediate tank 13 is stopped.
  • the pressurizing means 14 can arbitrarily set the pressure to pressurize.
  • the flow rate at which the coating liquid 2 in the intermediate tank 13 is sent to the nozzle 5 can be determined by the magnitude of this pressure.
  • the rise to a constant flow rate is quick (rise time is short).
  • a downstream valve 17 is provided on the downstream side of the joint portion 19a with the intermediate tank 13 and the joint portion 19b with the pump 12 in the flow path 11, that is, on the nozzle 5 side.
  • the coating liquid 2 can be supplied from both the pump 12 and the intermediate tank 13 to the nozzle 5, and when the downstream valve 17 is closed, the supply of the coating liquid 2 can be stopped.
  • the supply means 10 of this embodiment further includes an upstream tank 16 that stores the coating liquid 2, and the nozzle 5 and the upstream tank 16 are connected by the flow path 11.
  • An upstream valve 18 and a filter 20 are provided on the upstream tank 16 side of the flow path 11.
  • the upstream tank 16 is provided with a pressurizing means 16 a similar to the intermediate tank 13, and the coating liquid 2 can be replenished to the pump 12 and the intermediate tank 13.
  • the flow path length from the discharge flow path 7 to the intermediate tank 13 of the nozzle 5 is configured to be shorter than the flow path length from the discharge flow path 7 to the upstream side tank 16. It is configured to be shorter than the channel length up to 12.
  • the coating liquid 2 is sent from the nozzle 5 (discharge flow path 7) by sending the coating liquid 2 to the nozzle 5 at a constant flow rate Q by the pump 12.
  • Constant flow discharge can be performed at a flow rate Q.
  • the pressurizing means 14 included in the second supply means 62 pressurizes the coating liquid 2 in the intermediate tank 13, and as will be described later, the discharge of the coating liquid 2 from the nozzle 5.
  • “excess discharge” in which the coating liquid 2 is discharged excessively can be performed.
  • the decompression means 40 of this embodiment includes a suction pump 41 as a decompression unit that performs the suction operation of the coating liquid 2 inside the nozzle 5 (manifold 6), and an adjuster 46 that can freely adjust the decompression force (suction force). And a decompression flow path 42 connecting the nozzle 5 (manifold 6) and the suction pump 41, and a plurality (two) of first decompression valves 43 and second decompression valves 44.
  • the first decompression valve 43 and the second decompression valve 44 are provided in series in the middle of the single decompression flow path 42.
  • the control device 4 performs opening / closing control of the first pressure reducing valve 43 and the second pressure reducing valve 44, and will be described in detail later.
  • the adjuster 46 is composed of, for example, a vacuum pressure setter (vacuum regulator) or a pressure adjusting valve, and the pressure reducing force can be freely set by an electric signal.
  • a vacuum pressure setter vacuum regulator
  • a pressure adjusting valve By changing the decompression force, the suction flow rate of the coating liquid in the nozzle 5 can be adjusted.
  • the suction flow rate of the coating liquid 2 in the nozzle 5 is higher when the decompression force is set higher.
  • FIGS. 2 to 5 show a coating operation (coating method) by the coating apparatus 1 when two (two surfaces) coating films M, that is, the coating films M1 and M2 are formed on the substrate W by intermittent coating.
  • FIG. Note that “open” and “closed” in the vicinity of each valve in these drawings indicate the open / closed state of each valve. Further, when an upward arrow is written on the right side of the pump 12, it indicates that the pump 12 is operating.
  • (A1) Application preparation step (see FIG. 2A) Make preparations before starting application.
  • the downstream valve 17 is closed, the upstream valve 18 is opened, the intermediate valve 15 is opened, and the pressurizing means 16a is operated, the coating liquid 2 in the upstream tank 16 is pushed out by pressure, and the pump 12 and the intermediate tank 13 are replenished via the filter 20 (see FIG. 1).
  • the pump 12 is a syringe pump, the piston is operated to the suction side, and the syringe is filled with an amount of the coating liquid 2 that can be applied to one (two sides) or more substrates W.
  • (A2) First application start preparation step (see FIG. 2B) Preparation for coating for the coating M1 is performed.
  • the upstream valve 18 is closed.
  • the coating liquid 2 in the intermediate tank 13 is pressurized with a predetermined pressure P by the pressurizing means 14.
  • the lifting mechanism 9 is operated to lower the nozzle 5 so that the gap between the discharge port 7a of the nozzle 5 and the substrate W becomes the gap amount G.
  • the pump 12 is driven to start up, and the coating liquid 2 is sent from the pump 12 to the flow path 11 at a constant flow rate Q.
  • the applied coating liquid 2 is directed to the intermediate tank 13 against the pressure P.
  • (A3) First application start step 1 (see FIG. 2C) Application of the coating film M1 is started.
  • the pressurizing means The excess discharge of the coating liquid 2 in the intermediate tank 13 is performed by the pressurization with the pressure P of 14. As a result, the formation of the bead B is started and the application is also started.
  • the speed V is a coating speed.
  • (A4) First application start step 2 (see FIG. 3A)
  • the intermediate valve 15 is closed a predetermined time after the downstream valve 17 is opened and the application is started, and the excessive discharge from the nozzle 5 is stopped.
  • the formation of the bead B is completed and becomes a predetermined size, and since the constant flow rate discharge at the flow rate Q is performed from the nozzle 5, the film thickness of the coating film M1 reaches the film thickness T. Accordingly, the formation of the coating film M1 with the predetermined film thickness T is started from here.
  • the first pressure reducing valve 43 of the pressure reducing means 40 may be opened together with the closing of the intermediate valve 15, and the second pressure reducing valve 44 may be closed after a predetermined time.
  • the decompression force PVS at the start of coating is set by the adjuster 46 in the coating preparation step (A1). After the completion of this step (A4), the first pressure reducing valve 43 is closed for the next preparation, and then the second pressure reducing valve 44 is opened. Set to pressure PVE.
  • Second coating start preparation step (see FIG. 4A) Preparation for application of the next coating film M2 is performed. In parallel with the movement of the substrate W at the speed V, the first pressure reducing valve 43 is closed, and then the second pressure reducing valve 44 is opened. The pump 12 continues to drive.
  • (A8) Second application start step 1 (see FIG. 4B) Application of the coating film M2 is started.
  • the downstream valve 17 is opened.
  • the excess discharge of the coating liquid 2 of the intermediate tank 13 is performed by the pressurization with the pressure P of the pressurizing means 14, and the bead B is discharged.
  • the formation is started and the application is also started.
  • Second application start step 2 (see FIG. 4C)
  • the intermediate valve 15 is closed a predetermined time after the downstream side valve 17 is opened and the application is started, and the excessive discharge from the nozzle 5 is stopped.
  • the formation of the bead B is completed and becomes a predetermined size, and the film thickness of the coating film M2 reaches the film thickness T.
  • the first pressure reducing valve 43 of the pressure reducing means 40 may be opened together with the closing of the intermediate valve 15, and the second pressure reducing valve 44 may be closed after a predetermined time. As a result, excessive discharge stops in a shorter time.
  • the decompression force PVS at the start of coating is set by the adjuster 46 in the second coating start preparation step (A7).
  • the first pressure reducing valve 43 is closed, the second pressure reducing valve 44 is opened, and then the pressure reducing force PVE at the end of application is set by the adjuster 46.
  • the application liquid 2 by the pump 12 from the nozzle 5 is applied.
  • the pressurizing means 14 pressurizes the instantaneous excess discharge from the nozzle 5 of the coating liquid 2 in the intermediate tank 13, so that the bead B can be formed instantaneously, and the bead B formation is further performed. Since it is possible to shift to the steady application immediately thereafter, it is possible to reduce the defective film thickness region that does not become the film thickness T. This will be described in more detail with reference to FIG.
  • FIG. 6 is a diagram showing the change over time of the discharge flow rate of the nozzle 5 at the start of application.
  • the size of the defective film thickness region when using the decompression means 40 at the start of coating is V ⁇ t6, which can be minimized.
  • the size of the defective film thickness region determined by V ⁇ t6 can be kept very small even when the coating speed V, which is the moving speed, is increased. It becomes. That is, reducing the defective film thickness region and expanding the product region can be executed in a state where productivity is improved by high-speed coating.
  • the timing may be adjusted in accordance with the magnitude of the decompression force PVS so that the time t6 when the excessive discharge stops is minimized. Further, the time t6 until the above-described excessive discharge is stopped increases the pressure P1 of the pressurization by the pressurizing means 14 for the excessive discharge, and decreases at the start of application set by the adjuster 46 of the decompression means 40.
  • the pressure PVS can be reduced to the limit, resulting in poor results.
  • the film thickness region can be minimized. However, this adjustment is insufficient. For example, under the same operating conditions as in FIG.
  • suction time by decompression (time from opening the first decompression valve 43 to closing the second decompression valve 44) If it is long, it becomes as shown in FIG. That is, the time t7 when the excessive discharge is stopped is smaller than t6, but the discharge flow rate of the nozzle 5 is decreased from the flow rate Q without being finished, resulting in an excessive discharge, and until the flow rate Q is returned to the flow rate Q again. It takes up to a big t8. In this case, the size of the defective film thickness region is V ⁇ t8, which is larger than V ⁇ t6 when the suction time is appropriate.
  • a downstream valve 17 that is a valve and a valve that is provided in series with the downstream valve 17 and that can operate independently of the downstream valve 17 and that stops supplying the coating liquid to the nozzle 5.
  • An intermediate valve 15 is provided. Further, in order to minimize the suction time by the decompression means 40, as a decompression valve of the decompression means 40, an opening first decompression valve 43 for starting suction of the coating liquid and a first decompression valve 43.
  • a closed second pressure reducing valve 44 for stopping the suction of the coating liquid which can be operated independently from the first pressure reducing valve.
  • the supply time and suction time cannot be reduced below the inherent operating time of the valve, but the opening valve connected in series If the closing and opening of the closing valve and the opening and closing of the closing valve are performed independently as in the present invention, the supply time and the suction time can be minimized.
  • the bead B is instantaneously destroyed by high-speed suction from the discharge port 7a of the nozzle 5 using the decompression means 40. Then, the application can be completed in an instant. As a result, it is possible to reduce the defective film thickness region that does not become the film thickness T in the application completion region.
  • the flow rate at which the bead B is sucked increases as the decompression force PVE set by the adjuster 46 increases. Therefore, if the decompression force PVE is increased, the bead B can be destroyed in a very short time, and therefore the defective film thickness region in the coating end region can be minimized.
  • the first pressure reducing valve 43 is an opening valve for starting suction
  • the second pressure reducing valve 44 is a closing valve for stopping suction. Therefore, the suction time can be minimized by operating the two valves independently and relatively. Thus, the defective film thickness region in the coating end region can be stably minimized.
  • the downstream valve 17 is closed, whereas the first pressure reducing valve 43 may be opened at the same time or before and after that. What is necessary is just to adjust so that attraction
  • the coating apparatus and the coating method of the present invention are used, the above-described excellent configuration and operation can be obtained, and therefore, the defective film thickness region in the coating start and end regions can be minimized.
  • the decompression unit 40 is used as the decompression unit at the start of coating.
  • the decompression unit 40 may be the one shown in FIGS. FIG. 7 and FIG. 8 are schematic diagrams for explaining another schematic configuration of the coating apparatus 1.
  • a start time decompression unit 50 is additionally connected to the nozzle 5 in parallel with the decompression unit 40 as a decompression unit at the start of coating with respect to the coating apparatus 1 shown in FIG. 1. That is, the coating apparatus shown in FIG. 7 has a decompression unit for suctioning the coating liquid in the nozzle 5 as a decompression unit for sucking the coating liquid at the start of coating, and a coating pressure reducing unit 50 at the end of coating.
  • a pressure reducing means 40 that is a pressure reducing means for sucking the liquid is provided independently.
  • the start time decompression means 50 has exactly the same configuration as the decompression means 40, and as a decompression section that performs the suction operation of the coating liquid 2 inside the nozzle 5 (manifold 6), the suction pump 51 and decompression force (suction force) can be freely set.
  • An adjuster 56 that can be adjusted to each other, a decompression channel 52 that connects the nozzle 5 (manifold 6) and the suction pump 51, and a plurality (two) of first decompression valves 53 and second decompression valves 54. I have.
  • the first decompression valve 53 and the second decompression valve 54 are provided in series in the middle of the single decompression flow path 52.
  • the coating method using the coating apparatus 1 shown in FIG. 7 is the coating method shown in the above steps (A1) to (A12). 1.
  • A1 In the coating preparation step, the first decompression valve 53 is closed and the second decompression valve 54 is opened for the decompression means 50 at the start, and then the suction pump 51 is actuated.
  • the decompression force PVS is set.
  • the first application start process 2 and (A9) the second application start process 2 are replaced with the following (A4 ′) first application start process 2 and (A9 ′) second application start process 2.
  • (A4 ′) First application start step 2 The intermediate valve 15 is closed a predetermined time after the downstream side valve 17 is opened and the application is started, and the first pressure reducing valve 53 of the starting pressure reducing means 50 is opened along with the closing of the intermediate valve 15, and the second time after the predetermined time.
  • the pressure reducing valve 54 is closed. As a result, excessive discharge from the nozzle 5 is stopped.
  • the first pressure reducing valve 53 is closed and the second pressure reducing valve 54 is opened for the next preparation.
  • (A9 ′) Second application start step 2 The intermediate valve 15 is closed a predetermined time after the downstream valve 17 is opened and the application is started, and the first pressure reducing valve 53 of the starting pressure reducing means 50 is opened together with the intermediate valve 15 being closed, 2 Close the pressure reducing valve 54. As a result, excessive discharge from the nozzle 5 is stopped. After the end of this step (A9 ′), the first pressure reducing valve 53 is closed, and then the second pressure reducing valve 54 is opened.
  • the effect of using the start time decompression means 50 at the start of application is exactly the same as when the decompression means 40 is used at the start of application. However, the start time decompression means 50 can be used exclusively at the start of coating.
  • the start-time decompression means 50 can be preferably applied when responsiveness is required as in high-speed application.
  • a suction unit 70 is used as a decompression unit at the start of coating. An additional connection is provided in the flow path between them.
  • the suction unit 70 is included in the second supply unit 62.
  • the suction unit 70 has the same configuration as the decompression unit 40, and can freely apply a suction force (decompression force) to the suction pump 71 as a decompression unit that performs the suction operation of the coating liquid 2 in the flow path downstream of the intermediate valve 15.
  • a suction flow path 72 connecting the flow path between the intermediate valve 15 and the nozzle 5 and the suction pump 71, a plurality of (two) first suction valves 73 and a second suction valve. 74.
  • the first suction valve 73 and the second suction valve 74 are provided in series in the middle of the single suction flow path 72.
  • the coating method using the coating apparatus 1 shown in FIG. 8 is the coating method shown in the steps (A1) to (A12) above. 1.
  • (A4 ′′) First coating start step 2 The intermediate valve 15 is closed a predetermined time after the downstream valve 17 is opened and coating is started, and the first suction valve 73 of the suction means 70 is opened together with the closing of the intermediate valve 15, and the second suction valve 74 is opened after the predetermined time. Is closed. As a result, excessive discharge from the nozzle 5 is stopped. After the completion of this step (A4 ′′), the first suction valve 73 is closed and the second suction valve 74 is opened for the next preparation.
  • (A9 ′′) Second coating start step 2 The intermediate valve 15 is closed a predetermined time after the downstream valve 17 is opened and coating is started, and the first suction valve 73 of the suction means 70 is opened together with the closing of the intermediate valve 15, and the second suction valve 74 is opened after the predetermined time. Is closed. As a result, excessive discharge from the nozzle 5 is stopped. After the completion of this step (A9 ′′), the first suction valve 73 is closed and the second suction valve 74 is opened for the next preparation.
  • the effect of using the suction means 70 at the start of coating is exactly the same as that when the decompression means 40 is used at the start of coating, except that the coating liquid is sucked from the flow path between the intermediate valve 15 and the nozzle 5. is there.
  • the suction means 70 sucks the excess discharge coating liquid that has passed through the intermediate valve 15 located on the upstream side from the nozzle 5, and therefore sucks air from the discharge port 7 a of the nozzle 5. Therefore, the applicable decompression force PVS can be set larger than that of the decompression means 40. Therefore, the suction means 70 can be preferably applied when the excessive discharge is stopped earlier than the decompression means 40 to reduce the defective film thickness region.
  • the pressure reducing means 40 is set to a pressure lower than the pressure in the nozzle 5 by the adjuster 46, the application liquid in the nozzle 5 can be sucked, so the adjuster 46 and the suction pump 41 are set to atmospheric pressure or positive pressure.
  • a compressed air regulator, a compressor, or the like may be used.
  • the regulator 46 and a suction pump 41 such as a vacuum pump that can set a larger negative pressure (decompression force). Needless to say.
  • the above is not limited to the decompression means 40, and the same applies to the start-time decompression means 50 and the suction means 70.
  • FIG. 9 is a schematic diagram illustrating a schematic configuration of the coating apparatus 100.
  • the coating apparatus 100 shown in FIG. 9 is exactly the same as the coating apparatus 1 shown in FIG. 1 except for the following points. 1.
  • the second supply means 62 including the intermediate tank 13 is connected to an independent second flow path 11b different from the first flow path 11a extending from the nozzle 5 (corresponding to the flow path 11 in FIG. 1). ing.
  • the pump 12 which is a liquid feeder which comprises the 1st supply means 61 is connected to the 1st flow path 11a.
  • the coating apparatus 100 includes two independent valves, an upstream intermediate valve 15a and a downstream intermediate valve 15b, as supply stop valves constituting the second supply means (in the coating apparatus 1, the supply stop valve is an intermediate valve). Only the valve 15). 3.
  • a suction unit 70 connected to the second flow path 11b on the downstream side of the downstream intermediate valve 15b is additionally provided.
  • the suction means 70 includes the suction pump 71, the adjuster 76 capable of freely adjusting the suction force (decompression force), the flow path between the downstream intermediate valve 15b and the nozzle 5, and the suction pump. 71, and a first suction valve 73 and a second suction valve 74 arranged in series with the suction flow path 72.
  • action and effect of the coating device 100 are the same as that of the coating device 1 shown in FIG.
  • the first flow path 11a is used to supply the coating liquid to the nozzle 5 for constant flow rate discharge using the first supply unit 61, and the excess discharge using the second supply unit is performed.
  • the second flow path 11 b is used to supply the coating liquid to the nozzle 5.
  • the supply of the coating liquid for discharging at a constant flow rate and the supply of the coating liquid for excessive discharge can be performed in completely different separate flow paths without mutual interference, the responsiveness of the coating apparatus 100 is improved. Thus, it is possible to easily realize the excessive discharge of the coating liquid in a shorter time than the coating apparatus 1.
  • FIG. 10 to FIG. 13 are flowcharts showing a coating operation (coating method) by the coating apparatus 100 when two coating films M1 and M2 are formed on the substrate W by intermittent coating.
  • “open” and “closed” indicate the open / closed state of each valve. Further, when an upward arrow is written on the right side of the pump 12, it indicates that the pump 12 is operating.
  • (B1) Application preparation step (see FIG. 10A)
  • the downstream valve 17 and the downstream intermediate valve 15b are closed in a state where all the flow paths such as the nozzle 5 and the first supply means 61 and the second supply means 62 constituting the supply means 10 are filled.
  • the upstream valve 18 is opened, the upstream intermediate valve 15a is opened, the pressurizing means 16a is operated, the coating liquid 2 in the upstream tank 16 is pushed out by pressure, and the pump 12 is replenished via the filter 20. .
  • the intermediate tank 13 is already replenished with a coating solution manually.
  • the suction pump 41 is operated and the regulator 46 sets the decompression force PVE at the end of application.
  • the suction means 70 also closes the first suction valve 73 and opens the second suction valve 74, and then operates the suction pump 71 to set the decompression force PVS at the start of application by the adjuster 76.
  • (B2) First application start preparation step (see FIG. 10B)
  • the coating liquid 2 in the intermediate tank 13 is pressurized with a predetermined pressure P by the pressurizing means 14.
  • the lifting mechanism 9 is operated to lower the nozzle 5 so that the gap between the discharge port 7a of the nozzle 5 and the substrate W becomes the gap amount G.
  • the pump 12 is driven and started up with the downstream valve 17 closed and the upstream valve 18 open, and the coating liquid 2 is sent from the pump 12 to the first flow path 11a at a constant flow rate Q.
  • the fed coating liquid 2 goes to the upstream tank 16.
  • (B4) First application start step 2 (see FIG. 11A)
  • the upstream side intermediate valve 15a is closed a predetermined time after the downstream side valve 17 and the downstream side intermediate valve 15b are opened to start application, and the first suction valve 73 of the suction means 70 is opened simultaneously with the closing of the upstream side intermediate valve 15a.
  • the second suction valve 74 is closed after a predetermined time. As a result, excessive discharge from the nozzle 5 is stopped.
  • the formation of the bead B is completed and becomes a predetermined size, and the constant flow rate discharge at the flow rate Q is performed from the nozzle 5, so that the film thickness of the coating film M1 reaches the film thickness T.
  • the formation of the coating film M1 with the predetermined film thickness T is started from here.
  • the operation of the suction means 70 can stop the excessive discharge in a shorter time than just closing the upstream intermediate valve 15a.
  • the first suction valve 73 is closed and the second suction valve 74 is opened for the next preparation.
  • the downstream intermediate valve 15b is closed, the upstream intermediate valve 15a is opened.
  • the constant flow rate discharge of the coating liquid 2 to the substrate W is finished (interrupted), and the bead B is sucked to the nozzle 5 through the discharge port 7a by the decompression means 40, so that the bead B is instantaneously destroyed.
  • the application is completed, and at the same time, the formation of the coating film M1 is completed.
  • the pump 12 continues to be driven regardless of the above-described operation, and continues to feed the coating liquid 2 to the upstream tank 16 at a flow rate Q by opening the upstream valve 18.
  • Second application start step 1 (see FIG. 12B) Application of the coating film M2 is started.
  • the downstream valve 17 and the downstream intermediate valve 15b are opened.
  • the upstream valve 18 is closed.
  • the excess discharge of the coating liquid 2 in the intermediate tank 13 is performed by pressurization with the pressure P of the pressurizing means 14.
  • the formation of the bead B is started and the application is also started.
  • Second application start step 2 (see FIG. 12C)
  • the downstream side valve 17 and the downstream side intermediate valve 15b are opened to start application, and after a predetermined time, the character upstream side intermediate valve 15a is closed, and the upstream side intermediate valve 15a is closed and the first suction valve 73 of the suction means 70 is closed.
  • the second suction valve 74 is closed after a predetermined time.
  • excessive discharge from the nozzle 5 is stopped.
  • the formation of the bead B is completed and becomes a predetermined size, and since the constant flow rate discharge at the flow rate Q is performed from the nozzle 5, the film thickness of the coating film M2 reaches the film thickness T. Accordingly, the formation of the coating film M2 with the predetermined film thickness T is started from here.
  • the first suction valve 73 is closed and the second suction valve 74 is opened for the next preparation.
  • FIG. 15 is a schematic diagram illustrating a schematic configuration of the coating apparatus 200.
  • the joint portion 19a of the coating apparatus 1 shown in FIG. 1 is replaced with a joint 80, and the length of the flow path from the joint 80 to the downstream valve 17 is defined by the flow path length LP. Except for this, it is exactly the same as the coating apparatus 1. This difference will be described in detail with reference to FIG.
  • FIG. 16 is an enlarged schematic view of a joint 80 which is a part of the coating apparatus 200 and a vicinity connected to the joint 80.
  • the joint 80 includes a first joint channel 81 connected to the channel 11 included in the first supply unit 61 and a second joint channel 82 connected to the second supply unit 62 inside.
  • the first joint channel 81 is included in a part of the channel 11, is connected to the liquid transmitter side connection point 83 on the pump 12 side that is the liquid transmitter of the channel 11, and is connected to the nozzle side connection point 84 on the nozzle 5 side.
  • the second joint channel 82 forms an angle ⁇ with respect to the first joint channel 81 from an internal connection point 86 that is a connection point with the first joint channel 81 (as shown in FIG. 16).
  • the second supply means connection point 85 is connected to the second supply means 62 and reaches the intermediate tank 13.
  • this joint 80 merges in the inside by the 1st joint flow path 81 connected to the flow path 11 which the 1st supply means 61 has, this 1st joint flow path 81, and the internal connection point 86, and A second joint flow path 82 connected to the flow path of the second supply means 62, and the coating liquid 2 flowing out of the intermediate tank 13 and flowing through the second joint flow path 82 flows into the first joint flow.
  • the second joint channel 82 is configured to merge with the first joint channel 81 so as to have a velocity component that is in the same direction as the flow direction of the coating liquid 2 flowing through the channel 81.
  • the downstream valve 17 is disposed on the nozzle 5 side of the flow path 11 from the joint 80 at a position separated by a predetermined flow path length LP along the flow path 11.
  • the downstream valve 17 is a valve that supplies and stops the coating liquid from both the pump 12 and the intermediate tank 13 to the nozzle 5.
  • the downstream valve 17 is provided closer to the joint 80 than the nozzle 5 between the joint 80 and the nozzle 5.
  • the downstream valve 17 (the valve body thereof) is provided closer to the joint 80 than the middle point of the flow path from the joint 80 to the nozzle 5.
  • the coating method using the coating device 200 having the above-described configuration is exactly the same as the coating method using the coating device 1 described above, but in (A3) the first coating start step 1 and (A8) the second coating start step 1 If the angle ⁇ and the flow path length LP are appropriately selected for application, further excellent actions and effects can be obtained. Therefore, (A3) first application start process 1 using the application apparatus 200 is defined as (A3 ′) first application start process 1 ′, and the action and effect of the application apparatus 200 will be described while tracing it using FIG. To do.
  • FIG. 17 is an explanatory view showing an application start operation by the application apparatus 200 corresponding to FIG.
  • the formation of the bead B is started and the application is also started.
  • the angle ⁇ is preferably 5 to 75 degrees, more preferably 15 to 60 degrees
  • the coating liquid 2 in the first joint flow path 81 of the joint 80 when the downstream valve 17 is opened, the coating liquid 2 in the first joint flow path 81 of the joint 80, The coating liquid 2 in the second joint channel 82 flows out in the same direction (that is, having a velocity component in the same direction).
  • the dispensing liquid 2 in the intermediate tank 13 due to the pressure P of the pressurizing means 14 flowing in the second joint flow path 82 is used for quantitative discharge at a flow rate Q of the coating liquid 2 by the pump 12 flowing in the first joint flow path 81.
  • the surplus flow rate Qr is reliably added instantaneously, and the flow rate of the coating liquid 2 supplied to the nozzle 5 reaches the combined flow rate (Q + Qr) in a very short time. Further, when the coating liquid 2 in the first joint flow path 81 starts to flow toward the nozzle 5, the coating liquid 2 in the second joint flow path 82 flows into the first joint flow path 81 due to the suction action due to the venturi effect. Since it is drawn and helps the flow of the coating liquid in the intermediate tank 13 by the pressure P, the coating liquid flowing in the second joint channel 82 reaches the surplus flow rate Qr in a very short time.
  • the flow rate of the coating liquid supplied to the nozzle 5 reaches the combined flow rate (Q + Qr) in a much shorter time after the downstream valve 17 is opened. Accordingly, it is possible to discharge the coating liquid from the nozzle 5 in a pulsed manner at the combined flow rate (Q + Qr). It is not practical to make the angle ⁇ smaller than the above range because the joining area becomes long in the flow path in the joint, and the joint becomes huge.
  • the angle ⁇ is larger than the above range, a part of the coating liquid in the second joint channel 82 flows so as to oppose the coating liquid 2 in the first joint channel, so that the downstream valve 17 The time until the flow rate of the coating liquid reaches the combined flow rate (Q + Qr) after the opening of the nozzle becomes longer, and excessive discharge from the nozzle 5 cannot be performed in a pulsed manner at the combined flow rate (Q + Qr).
  • the angle ⁇ is larger than 90 degrees, the coating liquid 2 in the second joint flow path 82 once flows against the coating liquid 2 in the first joint flow path and changes direction after the collision to change the direction of the nozzle 5.
  • the time for the flow rate of the coating liquid to reach the merged flow rate (Q + Qr) after the downstream side valve 17 is opened becomes considerably long, and surplus discharge can be performed only from the nozzle 5 to the trapezoidal shape at the merged flow rate (Q + Qr).
  • the coating liquid 2 can be excessively discharged from the nozzle 5 as a pulse as shown in FIG. 6C (hatched portion in FIG. 6C).
  • the trapezoidal excessive discharge means that a region corresponding to the hatched portion in FIG. 6C has a trapezoidal shape.
  • the flow path length LP when the flow path length LP is reduced, the flow path length from when the coating liquid flowing through the first joint flow path 81 and the second joint flow path 82 joins at the internal joining point 86 to the downstream valve 17 is reduced. Get smaller. Therefore, when the flow path length LP is reduced, the time from when the downstream valve 17 is opened until the coating liquid that has joined at the internal junction 86 reaches the downstream valve 17 is also reduced. That is, the time from when the downstream valve 17 is opened until the application liquid having the combined flow rate (Q + Qr) is started to be supplied from the downstream valve 17 to the nozzle 5 is shortened. This can be said that the coating liquid is supplied to the nozzle 5 with high responsiveness after the downstream valve 17 is opened.
  • the flow rate Q applied by the pump 12 and the surplus flow rate Qr coating solution from the pressurizing means 14 immediately merge after the downstream valve 17 is opened.
  • a coating liquid having a flow rate (Q + Qr) is supplied from the downstream valve 17 to the nozzle 5.
  • the application liquid can be instantaneously excessively discharged from the nozzle 5 at the combined flow rate (Q + Qr), that is, the application liquid can be excessively discharged from the nozzle 5 with high responsiveness. .
  • Responsiveness of the excessive discharge of the coating liquid from the nozzle 5 with respect to the opening operation of the downstream side valve 17 is preferably a flow path length from the downstream side valve 17 to the nozzle 5 of preferably 50 mm or less, more preferably 20 mm or less. It can be made even higher. That is, after the downstream side valve 17 is opened, it is possible to excessively discharge the coating liquid from the nozzle 5 at the combined flow rate (Q + Qr) in a very short time.
  • the downstream valve 17 since the downstream valve 17 is opened, the nozzle 5 can perform an excessive discharge of the coating liquid at a constant flow rate in a pulsating manner with high responsiveness.
  • the difference in operation between the coating apparatus 200 and the coating apparatus 1 in the above-described process (A3 ′) is (A8) second coating start process 1 using the coating apparatus 200 (A8 ′) second coating start process 1 ′. But it is exactly the same.
  • the coating apparatus 1, the coating apparatus 100, and the coating method of the present invention described above form a plurality of planar or striped coating films on the surface of a substrate such as a color filter for color liquid crystal display, organic EL, and plasma display.
  • the present invention can be applied to the manufacture of various display members.
  • the defective film thickness area can be made extremely small in the coating start area and the coating end area, and the high-quality product area with a uniform film thickness can be enlarged. Since it can be realized even at high-speed coating, a high-quality display member having a uniform film thickness can be manufactured at low cost by high productivity and reduction of material loss.
  • substrate W in which the said several coating film was formed is cut
  • the applicability of the coating apparatus 1 and the coating apparatus 100 is the same for the coating apparatus 200.
  • the coating apparatus 1 and the coating apparatus 100 of the present invention are not limited to the illustrated forms, and may be in other forms within the scope of the present invention.
  • the moving means 8 only needs to be able to move the nozzle 5 and the substrate W relatively in one direction, and other configurations can be adopted, the stage 3 is fixed, and the nozzle 5 is moved to this position. The structure moved with respect to the stage 3 may be sufficient. The above configuration is similarly applied to the coating apparatus 200.
  • Example 1 In a non-alkali glass substrate having a thickness of 250 mm (width direction) ⁇ 550 mm (application direction) and a thickness of 0.7 mm, a surface area of 210 mm (width direction) ⁇ 250 mm (application direction) is spaced apart by 20 mm in the application direction.
  • Each surface area is in the center of the substrate in the width direction, and is 15 mm inside from the end of the substrate in the coating direction. That is, 20 mm on both sides in the substrate width direction (Y direction), 15 mm on both sides in the substrate application direction (X direction), and 20 mm in the center were non-product areas without stripe-shaped polyimide films. Further, between the polyimide films as the banks, an ITO transparent electrode is formed on the glass substrate as an anode, and a mixture of polyethylene dioxythiophene and polystyrene sulfonic acid as a hole injection layer is formed thereon. It was formed with a thickness of 0.1 ⁇ m.
  • R luminescent material It was decided to intermittently apply the R luminescent material by 0.07 ⁇ m in thickness after drying as an EL luminescent layer on the above surface area.
  • This R luminescent material had a solid content concentration of 2%, a viscosity of 5 mPa ⁇ s, and a wet thickness corresponding to a thickness of 0.07 ⁇ m after drying was 3.5 ⁇ m.
  • the coating device 1 shown in FIG. 1 was used as the coating device.
  • the nozzle 5 was able to form 700 stripe-shaped coating films with a pitch of 300 ⁇ m within a Y-direction length of 210 mm. Furthermore, a solenoid valve with little capacity change due to switching between opening and closing was used for each valve.
  • the coating speed V at this time was 100 mm / s, and the gap amount G up to the clearance between the substrate and the nozzle outlet 7a was 30 ⁇ m. Furthermore, the flow rate of the coating liquid supplied by the pump 12 at the time of constant flow discharge was set to 19.6 ⁇ l / s, and the pressure P of the pressurizing means 14 at the time of excessive discharge was set to 10 kPa. Further, the intermediate valve 15 was controlled to be closed 0.005 seconds after the downstream valve 17 was opened so that the time for supplying the coating liquid to the nozzle 5 by this pressure P was 0.005 seconds.
  • the pressure reducing force at the end of coating is set to ⁇ 10 kPa by the regulator 46 of the pressure reducing means 40, and the time for sucking the coating liquid in the nozzle 5 with this pressure reducing force is 0.002 seconds.
  • control was performed so that the second pressure reducing valve 44 was closed 0.002 seconds after the first pressure reducing valve 43 was opened.
  • the substrate on which the R luminescent material was intermittently applied on the first and second surfaces was vacuum-dried to reach 65 Pa in 30 seconds for 60 seconds, and then further dried on a 120 ° C. hot plate for 10 minutes.
  • both coatings on the two surfaces were 0.07 ⁇ m at 3 mm from the start of application, and the area that did not become 0.07 ⁇ m at the end of application was 3 mm. That is, in the application start region and the application end region, the size of the defective film thickness region that does not become 0.07 ⁇ m was 3 mm in the application start region and 3 mm in the application end region. In the range of 250 mm excluding 3 mm from the start and end of application occupied by these defective film thickness regions, that is, in the range where the polyimide film bank is formed, the film thickness unevenness is ⁇ 5% or less, which is very good. there were.
  • the present invention intermittently stably and accurately forms a plurality of planar and striped coatings on a surface on a substrate which is a display member such as a color filter for a color liquid crystal display, an organic EL, and a plasma display.
  • a display member such as a color filter for a color liquid crystal display, an organic EL, and a plasma display.
  • the present invention can be used for manufacturing various display members.

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PCT/JP2015/056887 2014-03-19 2015-03-10 塗布装置、塗布方法、及びディスプレイ用部材の製造方法 WO2015141513A1 (ja)

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JP6901616B2 (ja) * 2016-02-26 2021-07-14 東レ株式会社 塗布装置及び塗布方法
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JP6892466B2 (ja) 2019-02-26 2021-06-23 ファナック株式会社 吐出装置及び産業用ロボット
JP7399737B2 (ja) * 2020-02-13 2023-12-18 株式会社安川電機 塗料供給装置、ロボット、吐出制御システム、吐出制御方法、および吐出制御プログラム
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