WO2015107971A1 - 下段部材の固定装置およびこれを備えた流体制御装置 - Google Patents
下段部材の固定装置およびこれを備えた流体制御装置 Download PDFInfo
- Publication number
- WO2015107971A1 WO2015107971A1 PCT/JP2015/050340 JP2015050340W WO2015107971A1 WO 2015107971 A1 WO2015107971 A1 WO 2015107971A1 JP 2015050340 W JP2015050340 W JP 2015050340W WO 2015107971 A1 WO2015107971 A1 WO 2015107971A1
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- WIPO (PCT)
- Prior art keywords
- hole
- support member
- fixing
- diameter
- fluid control
- Prior art date
Links
- 239000012530 fluid Substances 0.000 title claims abstract description 44
- 239000007787 solid Substances 0.000 claims description 16
- 230000002093 peripheral effect Effects 0.000 claims description 6
- 125000006850 spacer group Chemical group 0.000 description 29
- 229920003002 synthetic resin Polymers 0.000 description 4
- 239000000057 synthetic resin Substances 0.000 description 4
- 239000000047 product Substances 0.000 description 3
- 239000002184 metal Substances 0.000 description 2
- 229910000831 Steel Inorganic materials 0.000 description 1
- 230000004323 axial length Effects 0.000 description 1
- 239000013066 combination product Substances 0.000 description 1
- 229940127555 combination product Drugs 0.000 description 1
- 239000012141 concentrate Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005489 elastic deformation Effects 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
Images
Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16B—DEVICES FOR FASTENING OR SECURING CONSTRUCTIONAL ELEMENTS OR MACHINE PARTS TOGETHER, e.g. NAILS, BOLTS, CIRCLIPS, CLAMPS, CLIPS OR WEDGES; JOINTS OR JOINTING
- F16B21/00—Means for preventing relative axial movement of a pin, spigot, shaft or the like and a member surrounding it; Stud-and-socket releasable fastenings
- F16B21/06—Releasable fastening devices with snap-action
- F16B21/08—Releasable fastening devices with snap-action in which the stud, pin, or spigot has a resilient part
- F16B21/086—Releasable fastening devices with snap-action in which the stud, pin, or spigot has a resilient part the shank of the stud, pin or spigot having elevations, ribs, fins or prongs intended for deformation or tilting predominantly in a direction perpendicular to the direction of insertion
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16B—DEVICES FOR FASTENING OR SECURING CONSTRUCTIONAL ELEMENTS OR MACHINE PARTS TOGETHER, e.g. NAILS, BOLTS, CIRCLIPS, CLAMPS, CLIPS OR WEDGES; JOINTS OR JOINTING
- F16B5/00—Joining sheets or plates, e.g. panels, to one another or to strips or bars parallel to them
- F16B5/06—Joining sheets or plates, e.g. panels, to one another or to strips or bars parallel to them by means of clamps or clips
- F16B5/0607—Joining sheets or plates, e.g. panels, to one another or to strips or bars parallel to them by means of clamps or clips joining sheets or plates to each other
- F16B5/0621—Joining sheets or plates, e.g. panels, to one another or to strips or bars parallel to them by means of clamps or clips joining sheets or plates to each other in parallel relationship
- F16B5/0642—Joining sheets or plates, e.g. panels, to one another or to strips or bars parallel to them by means of clamps or clips joining sheets or plates to each other in parallel relationship the plates being arranged one on top of the other and in full close contact with each other
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K27/00—Construction of housing; Use of materials therefor
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K27/00—Construction of housing; Use of materials therefor
- F16K27/003—Housing formed from a plurality of the same valve elements
Definitions
- the present invention provides, for example, a support member used in a fluid control apparatus assembled by fixing a plurality of joints (block joints) on a support member and fixing a fluid control device so as to straddle these joints.
- the present invention relates to a fixing device that fixes a block joint (lower member) disposed between a fluid control device (upper member) and a support member, and also relates to a fluid control device including the fixing device.
- Patent Document 1 discloses a fixing device and a fluid control device for a lower member that are the subject of the present invention, as shown in FIG.
- the fluid control device (1) is used in semiconductor manufacturing equipment and the like, and includes a plurality of block joints (lower members) (2) (3) provided with fluid passages opened upward, and block joints (2) ( 3) Multiple fluid control devices (upper members) (4) (5) (6) (7) and block joints (2) (3) A plurality of fluid passages and fluid control devices (4), (5), (6), (7) main body (4a) (5a) (6a) Sealing part (not shown), support member (51) for supporting a plurality of block joints (2) (3), and fixing of a plurality of joint members for attaching each block joint (2) (3) to the support member (51) A bolt (52) and a plurality of fluid control device fixing bolts (8) for attaching the fluid control devices (4), (5), (6), and (7) to the block joints (2) and (3) are provided.
- the block joint (2) (3) is provided with a through hole (11) for inserting a bolt, and a cylindrical spacer (12) is fitted into the through hole (11).
- An annular elastic member (13) for urging the block joint (2) (3) downward (toward the support member (51)) is disposed on the lower surface of the flange provided at the upper end.
- the lower member fixing device (9) includes a block joint (2) (3) (that is, a through hole (51) disposed between the support member (51) and the upper member (4) (5) (6) (7). 11) A device for fixing the lower step member (2) (3)) to the support member (51), the screw hole (51a) provided in the support member (51), the bolt (52), the spacer (12) It consists of an elastic member (13) and the like.
- An object of the present invention is to provide a lower member fixing device that eliminates the need for a fixing tool and reduces the time and effort of fixing, and a fluid control device including the same.
- the fixing device for the lower member is a device for fixing the lower member with a through hole to the support member by the fixing member, and the support member is provided with a through hole for inserting the fixing member, and the lower member is penetrated.
- the hole includes a large-diameter portion that opens to the upper surface, and a small-diameter portion that continues to the lower side of the large-diameter portion and opens to the lower surface.
- the upper shaft portion inserted into the small diameter portion of the through hole of the lower member and the lower shaft portion into which the upper end portion is inserted into the through hole of the support member.
- the lower shaft portion includes the through hole of the support member.
- An engagement convex portion that engages with the lower opening edge portion and prevents the fixing member from falling off the support member is provided.
- the fixing member may be attached to the lower member first and then inserted into the through hole of the support member. With the lower member and the support member aligned, the lower member and the support member penetrate the fixing member. You may make it penetrate in both of a hole. The former is more preferable.
- the portion excluding the upper end portion of the lower shaft portion protrudes downward from the lower surface of the lower member, and the protruding portion of the lower shaft portion is supported from above. Inserted into the through hole.
- the engaging convex portion provided on the lower shaft portion is forcibly passed through the through hole of the support member.
- the engaging protrusion engages with the lower opening edge of the through hole of the support member, and the upward movement of the fixing member relative to the support member is prevented.
- the lower member is prevented from moving upward by the head of the fixing member, and the lower member is prevented from being detached from the support member. That is, the lower member can be fixed to the support member without using a bolt. Therefore, a tool for fixing such as a wrench is unnecessary, and the fixing effort can be reduced.
- the lower shaft portion includes a solid portion and a folded portion extending upward from the lower end of the solid portion, and the upper end portion of the folded portion is inserted into the through hole of the support member, and the engaging convex portion is It is preferable that the outer peripheral surface of the folded portion is provided.
- the number of folded portions is, for example, two (one pair), but is not limited thereto, and a plurality of folded portions may be formed around the solid portion.
- an engagement convex part may be formed in all the folding
- the positions of the engagement convex portions may be different for each pair of the folded portions.
- the folded portion is easily elastically deformed, and the engagement convex portion provided here facilitates the operation of forcibly passing the engagement convex portion through the through hole of the support member.
- the deformation of the folded portion becomes large, stress concentrates on the root portion of the folded portion and there is a risk of breakage, but the folded portion provided to face the side surface of the solid portion with a predetermined interval is When deformed, it comes into contact with the side surface of the solid portion, thereby preventing the folded portion from becoming greatly deformed.
- the fixing member may be an integral product (the head, the upper shaft portion, and the lower shaft portion are integrally formed), and a combination product of two or more parts (the lower shaft portion is replaced) (Possibly attached to the upper shaft).
- the fixing member may be made of synthetic resin or metal.
- the lower member fixing device may further include a cylindrical spacer inserted into the small diameter portion of the through hole.
- the lower member fixing device may further include an annular elastic member that biases the lower member downward.
- Both the cylindrical spacer and the annular elastic member are conventionally used. By using these, the lower member can be easily positioned (parallelized).
- the elastic member can be moved upward by being deformed, and is preferably an annular body made of rubber or synthetic resin.
- the elastic member can facilitate the leveling operation of making the upper surfaces of the lower members flush with each other, and can also absorb vibration by elastic deformation of the elastic member.
- the spacer may have no flange (cylindrical body) and may have a flange at the upper end.
- the elastic body is placed on the lower surface of the head of the fixing member and a step (a step formed at the boundary between the large diameter portion and the small diameter portion).
- the elastic body is disposed between the lower surface of the flange of the spacer and the step. The latter configuration is more preferable.
- the head and the upper shaft are both cylindrical, and a flange having a diameter larger than the diameter of the through hole of the support member is provided at the lower end of the upper shaft.
- a flange having a diameter larger than the diameter of the through hole of the support member is provided at the lower end of the upper shaft.
- at least one slit that makes it possible to reduce the outer diameter of the head is provided.
- the outer diameter of the upper and lower shaft portions may be smaller than the diameter of the small diameter portion of the through hole of the lower member, and the fixing member may be inserted into the through hole from the upper side of the lower member. If it does in this way, since it is necessary to make the diameter of the lower side shaft part in which the engagement convex part is provided small, and it becomes disadvantageous in strength, the outer diameter of the upper side and the lower side shaft part is the through hole of the support member. More preferably, the fixing member is inserted into the through hole from the lower side of the lower member. By doing so, the fixing member can be prevented from coming off from the lower member, and the engaging convex portion can be formed without being restricted by the diameter of the small diameter portion of the through hole of the lower member. This is advantageous in terms of ensuring durability.
- the head and the upper shaft are both cylindrical. And at least one slit is provided in the head and the upper shaft. It is preferable that a plurality of slits are provided in the circumferential direction so as to extend from the upper surface of the head portion to near the lower end of the shaft portion.
- the flange portion prevents the upper shaft portion provided with the slit from falling apart, and abuts the upper surface side edge portion of the through hole of the support member from above to position the fixing member relative to the support member.
- a fluid control device includes a plurality of block joints provided with fluid passages opened upward, and a plurality of fluid control devices provided with fluid passages opened downwardly leading to the fluid passages of the block joints; A plurality of seal portions interposed in the abutment surface between the fluid passage of the block joint and the fluid passage of the fluid control device, a support member for supporting the plurality of block joints, and a plurality of bolts for attaching each fluid control device to the block joint
- the block joint is a lower member, and is attached to the support member by any of the lower member fixing devices described above.
- All of the plurality of block joints may be attached to the support member by the lower member fixing device, and some of the plurality of block joints are attached to the support member by the lower member fixing device. It may be. In the latter case, the remaining part of the plurality of block joints is attached by, for example, a lower member fixing device using a bolt.
- top and bottom refer to the top and bottom of FIG. 8, but this top and bottom is for convenience, and the fixing device and the fluid control device are installed on the horizontal plane in the state shown in the figure. Sometimes installed on a vertical surface.
- the engaging protrusion engages with the lower opening edge of the through hole of the support member, so that the upward movement of the fixing member relative to the support member is prevented, and the fixing member
- the head portion of the lower member prevents the lower member from moving upward and prevents the lower member from detaching from the support member. That is, the lower member can be fixed to the support member without using a bolt. Therefore, a tool for fixing such as a wrench is unnecessary, and the fixing effort can be reduced.
- FIG. 1 is a cross-sectional view showing a first embodiment of a lower member fixing device according to the present invention.
- FIG. 2 is a perspective view showing the support member and the lower member.
- FIG. 3 is a perspective view showing the support member.
- FIG. 4 is a perspective view showing a fixing member.
- FIG. 5 is a front view showing the fixing member.
- FIG. 6 is a perspective view showing the fixing member with the folded portion removed.
- FIG. 7 is a sectional view showing a second embodiment of the lower member fixing apparatus according to the present invention.
- FIG. 8 is a side view with a part cut away showing a conventional lower member fixing device and a fluid control device including the same.
- FIG. 1 to 6 show a first embodiment of a lower member fixing device of the present invention.
- the lower member fixing device (10) is a device for fixing the lower member (2) to the support member (51) by the fixing member (14).
- the fluid control device (1) shown in FIG. 52) is changed to a fixing member (14) described later.
- the support member (51), the spacer (12), and the elastic member (13) can be the same as those shown in FIG. 8, and slightly changed from those shown in FIG. 8 as necessary. You can also.
- the lower member (2) is the same as the block joint (2) shown in FIG. 8, and has a through hole (11) into which a bolt (52) has been inserted.
- the through hole (11) includes a large-diameter portion (11a) that opens to the upper surface, and a small-diameter portion (11b) that continues to the lower side of the large-diameter portion (11a) and opens to the lower surface.
- the lower member (block joint) (2) has a V-shaped fluid passage (2a) having two openings opened upward, and an opening edge of each fluid passage (2a).
- the provided seal portion storage recess (2b) and a female screw portion (2c) to which a fluid control device fixing bolt ((8) in FIG. 8) is screwed are further provided.
- the fluid passage (2a) is not shown.
- the support member (51) is a steel plate coated product having a thickness of about 2 mm.
- the support member (51) is provided with a through hole (16) as shown in FIG.
- the through hole (16) may be the one that uses the screw hole (51a) shown in FIG. 8 as it is, and does not need to be a screw hole (51a). Good.
- a cylindrical spacer (12) with a flange (12a) is fitted into the small diameter part (11b) of the through hole (11) of the lower member (2).
- the lower end of the spacer (12) is received by the support member (51), and the upper end of the spacer (12) is in the large diameter portion (11a) to receive the head (21) of the fixing member (14).
- the bottom surface of the flange (12a) of the spacer (12) and the bottom surface of the large diameter portion (11a) of the through hole (11) (the step formed at the boundary between the large diameter portion (11a) and the small diameter portion (11b)) Between them, an annular elastic member (13) for biasing the lower member (2) downward (toward the support member (51)) is interposed.
- the spacer (12) may be omitted, and the elastic member (13) is assumed to have no flange (12a) and the lower surface of the head (21) of the fixing member (14) and the through hole (11). It may be interposed between the bottom surface of the large-diameter portion (11a).
- the elastic member (13) is an annular body made of rubber or synthetic resin.
- the elastic member (13) may be provided with notches in the upper and lower portions of the outer peripheral surface thereof.
- the fixing member (14) includes a head (21) inserted into the large diameter portion (11a) of the through hole (11) and a small diameter of the through hole (11).
- the upper shaft portion (22) inserted into the portion (11b) and the lower shaft portion (23) connected to the lower end of the upper shaft portion (22).
- the head (21), the upper shaft (22) and the lower shaft (23) are integrally formed as a synthetic resin molded product.
- the fixing member (14) may be made of metal.
- the lower shaft portion (23) may be attached to the upper shaft portion (22) integral with the head portion (21) in a replaceable manner.
- the head (21) has a relatively short cylindrical shape with a large diameter
- the upper shaft portion (22) has a relatively long cylindrical shape with a small diameter
- the upper shaft portion (22) is composed of a cylindrical portion (24) and a disc-shaped flange portion (25) provided at the lower end portion thereof.
- the lower surface of the head (21) received by the bottom surface of the large diameter portion (11a) of the through hole (11), the lower surface of the flange portion (25) is in contact with the upper surface of the support member (51).
- the length of the upper shaft portion (22) is set.
- the head (21) and the upper shaft (22) are provided with four slits (26) extending in parallel in the axial direction from the upper surface of the head (21) at equal intervals in the circumferential direction.
- Each slit (26) is provided so as to reach the upper surface of the flange portion (25), thereby reducing the outer diameter of the upper shaft portion (22), thereby reducing the outer diameter of the head portion (21). It can be made smaller.
- the diameter of the flange portion (25) of the upper shaft portion (22) is larger than the diameter of the through hole (16) of the support member (51).
- the flange portion (25) prevents the upper shaft portion (22) provided with the slit (26) from falling apart and contacts the upper side edge of the through hole (16) of the support member (51) from above.
- the fixing member (14) is positioned relative to the support member (51).
- the diameter of the flange portion (25) is a size between the inner diameter and the outer diameter of the spacer (12).
- the lower shaft portion (23) includes a solid portion (27) having a pair of flat side surfaces (27a) and a solid portion (27) so as to face each flat side surface (27a) at a predetermined interval. ) And a pair of folded portions (28) extending upward.
- Each folded portion (28) is provided on the side surface of the solid portion (27) by providing a space between each folded portion (28) and each flat side surface (27a) of the solid portion (27). It can be deformed radially inward until it abuts on (27a), and further deformation is prevented by abutting on the side surface (27a) of the solid part (27).
- a substantially cylindrical outer peripheral surface is formed by the outer peripheral surface connecting the flat side surfaces (27a) of the solid portion (27) and the outer peripheral surface of the pair of folded portions (28).
- the diameter of the lower shaft portion (23) is equal to the diameter of the through hole (16) of the support member (51).
- the upper end of the folded portion (28) is inserted into the through hole (16) of the support member (51), and the lower portion of the through hole (16) of the support member (51) is inserted into each folded portion (28).
- a hemispherical engagement protrusion (29) is provided that engages with the opening edge to prevent the fixing member (14) from moving upward.
- the fixing member (14) fixes the spacer (12) to the support member (51), and the fixing member (14) and the spacer (12) cannot move relative to the support member (51). It has become. Then, the lower member (2) receives a downward force from the spacer (12) via the elastic member (13), so that the lower surface abuts on the support member (51) and cannot move. . Since the elastic force of the rubber elastic member (13) is smaller than the hand force, by applying an upward force to the lower member (2) against this elastic force, the lower member (2) Can be lifted upwards by hand. Therefore, when the upper surface of a certain lower member (2) is low, the lower member (2) is moved upward against the elastic force of the elastic member (13) by moving the lower member (2) upward. Fine adjustment, that is, leveling can be performed.
- the head (21) and the upper shaft portion (22) of the fixing member (14) are moved.
- the lower member (2) is inserted into the through hole (11), and then the lower shaft portion (23) of the fixing member (14) is inserted into the through hole (16) of the support member (51).
- the fixing member (14) It cannot be inserted into the lower member (2) from above, and is inserted into the lower member (2) from below without the support member (51).
- the diameter of the head (21) is larger than the inner diameter of the spacer (12)
- the head (21) cannot be inserted into the through hole (11) as it is, but the slit (26)
- the diameter of the head (21) can be reduced by reducing the diameter of the upper shaft portion (22) so that the width of the slit (26) is narrowed.
- the width of the slit (26) is provided so that the head (21) can be inserted into the spacer (12) .By reducing the diameter of the head (21), the fixing member (14) is lowered. It can be inserted into the through hole (11) from the side.
- the flange portion (25) is inserted into the lower end portion of the small diameter portion (11b) of the through hole (11)
- the insertion work to the lower member (2) of the fixing member (14) is stopped.
- the head (21) expands to the original size in the large-diameter portion (11a), so that the fixing member (14) penetrates with the lower shaft portion (23) protruding downward. It is inserted into the hole (11).
- the lower shaft portion (23) of the fixing member (14) is inserted into the through hole (16) of the support member (51) from above, and the engaging convex portion (29) passes through the through hole (16).
- the flange portion (25) of the upper shaft portion (22) comes into contact with the support member (51) from the upper surface side
- the engagement convex portion (29) comes into contact with the support member (51) from the lower surface side.
- (14) is inserted into the through hole (16) of the support member (51) in a state where it cannot be pulled out from the lower side or the upper side.
- the retaining member (14) is prevented from coming off from the support member (51) and the lower member (2) from coming off from the supporting member (51) at the same time.
- the folded portion (28) is prevented from further deformation by the flat side surface (27a) of the solid portion (27). Therefore, it is possible to prevent a large force exceeding a predetermined value from acting between the folded portion (28) and the lower end portion of the solid portion (27), and the durability is excellent.
- the lower shaft portion (23) of the fixing member (14) has the through hole (16) of the supporting member (51) from the upper side to the lower side.
- the through hole (16) of the support member (51) can be inserted from the lower side to the upper side. Therefore, in FIG. 1, by lifting the lower member (2) upward, the fixing member (14) can be pulled out from the support member (51) while being attached to the lower member (2), and the fixing member (14 ) Is advantageous when it is necessary to remove the lower member (2) from the support member (51) in a situation where it cannot be removed by pushing from below.
- the shape of the engaging protrusion (29) is not limited to a hemispherical shape.
- the lower member (2) can be fixed to the support member (51) without using bolts.
- a tool such as a wrench is not required to insert the fixing member (14) into the through hole (11), and the fixing effort is greatly reduced compared to the conventional lower member fixing device using bolts. Can do.
- the lower member fixing device (10) shown in FIGS. 1 to 6 may be applied to fixing all the block joints (2) and (3) of the fluid control device (1) shown in FIG. Of course, some of the block joints (2) and (3) are fixed by the lower member fixing device using the conventional bolt (52), and the rest of the lower member fixing device (10) of the present invention is used. May be used.
- the spacer (12) is used, but the spacer (12) may be omitted.
- the embodiment is shown in FIG.
- the spacer (12) is omitted from the lower member fixing device (10) of the first embodiment, and the fixing member (15) accordingly.
- the shape has been changed.
- the fixing member (15) includes a head (21) inserted into the large-diameter portion (11a) of the through-hole (11) and a small-diameter portion of the through-hole (11) ( 11b)
- An upper shaft portion (22) inserted into the upper shaft portion (22) and a lower shaft portion (23) connected to the lower end of the upper shaft portion (22).
- the shapes of the head (21) and the upper shaft (22) are changed from those of the first embodiment, and the shape of the lower shaft (23) is the same. ing.
- the spacer (12) is omitted from the lower member fixing device (10) of the first embodiment shown in FIGS.
- the same effects as those of the first embodiment can be obtained.
- the head (21) When the spacer (12) is omitted, the head (21) has a large diameter as shown in FIG. 7, and the through-hole (16) of the support member (51) is formed as a lower member (2
- the diameters of the upper shaft portion (22) and the lower shaft portion (23) are shown in FIG. 7 so that the diameters of the upper shaft portion (22) and the lower shaft portion (23) are the same as those of the through holes (11). You may make it become a large diameter from what was shown.
- the lower member fixing device of the present invention since the lower member can be fixed to the support member without using a bolt, a fixing tool is not required and fixing time can be reduced. Therefore, the trouble at the time of installing the fluid control apparatus provided with this fixing device can be reduced.
Abstract
Description
Claims (6)
- 貫通孔付き下段部材を固定部材により支持部材に固定する装置であって、
支持部材に、固定部材挿通用の貫通孔が設けられており、
下段部材の貫通孔は、上面に開口する大径部と、大径部の下側に連なり下面に開口する小径部とからなり、
固定部材は、下段部材の貫通孔の大径部内に挿入される頭部と、下段部材の貫通孔の小径部内に挿入される上側軸部と、支持部材の貫通孔に上端部が挿入される下側軸部とからなり、
下側軸部に、支持部材の貫通孔の下側開口縁部に係合して固定部材が支持部材から脱落するのを防止する係合凸部が設けられていることを特徴とする下段部材の固定装置。 - 下側軸部は、中実部と、中実部の下端から上方にのびる折り返し部とからなり、折り返し部の上端部は、支持部材の貫通孔内に挿入されており、係合凸部は、折り返し部の外周面に設けられていることを特徴とする請求項1の下段部材の固定装置。
- 頭部、上側軸部および下側軸部は、一体に形成されていることを特徴とする請求項1または2の下段部材の固定装置。
- 下側軸部は、交換可能に上側軸部に取り付けられていることを特徴とする請求項1または2の下段部材の固定装置。
- 頭部および上側軸部がいずれも円筒状とされて、上側軸部の下端部に、支持部材の貫通孔の径よりも大きい径を有するフランジ部が設けられており、頭部および上側軸部に、頭部の外径を小さくすることを可能とするスリットが設けられていることを特徴とする請求項1から4までのいずれかに記載の下段部材の固定装置。
- 上方に開口した流体通路が設けられた複数のブロック継手と、ブロック継手の流体通路に通じている下方に開口した流体通路が設けられた複数の流体制御機器と、ブロック継手の流体通路と流体制御機器の流体通路との突き合わせ面に介在されている複数のシール部と、複数のブロック継手を支持する支持部材と、各流体制御機器をブロック継手に取り付ける複数のボルトとを備えている流体制御装置において、ブロック継手が下段部材とされて、これが請求項1から5までのいずれかに記載の下段部材の固定装置によって支持部材に取り付けられていることを特徴とする流体制御装置。
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US15/112,269 US10125803B2 (en) | 2014-01-20 | 2015-01-08 | Fixing device for lower level member and fluid control apparatus provided with the same |
KR1020167012343A KR101912025B1 (ko) | 2014-01-20 | 2015-01-08 | 하단 부재의 고정 장치 및 이것을 구비한 유체 제어 장치 |
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JP2014007466A JP6329772B2 (ja) | 2014-01-20 | 2014-01-20 | 下段部材の固定装置およびこれを備えた流体制御装置 |
JP2014-007466 | 2014-01-20 |
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US (1) | US10125803B2 (ja) |
JP (1) | JP6329772B2 (ja) |
KR (1) | KR101912025B1 (ja) |
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JP6738995B2 (ja) * | 2016-05-16 | 2020-08-12 | パナソニックIpマネジメント株式会社 | シャッターユニットおよび撮像装置 |
KR101894761B1 (ko) * | 2018-05-29 | 2018-10-18 | 주식회사 엠피디 | 튜닝 볼트를 포함하는 캐비티 필터 |
CN110821926B (zh) * | 2018-08-10 | 2022-11-22 | 康普技术有限责任公司 | 用于板状元件的紧固件以及板状元件系统 |
US11519446B2 (en) * | 2018-11-05 | 2022-12-06 | Illinois Tool Works Inc. | Fastener feedback feature |
JP7319870B2 (ja) * | 2019-08-29 | 2023-08-02 | ロベルト・ボッシュ・ゲゼルシャフト・ミト・ベシュレンクテル・ハフツング | 液圧制御ユニット、ブレーキシステム及び鞍乗型車両 |
CN114060374B (zh) * | 2020-08-07 | 2023-10-03 | 光宝电子(广州)有限公司 | 固定装置 |
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Also Published As
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JP6329772B2 (ja) | 2018-05-23 |
TWI642855B (zh) | 2018-12-01 |
JP2015135171A (ja) | 2015-07-27 |
TW201537043A (zh) | 2015-10-01 |
KR20160070180A (ko) | 2016-06-17 |
KR101912025B1 (ko) | 2018-10-25 |
US10125803B2 (en) | 2018-11-13 |
US20160333917A1 (en) | 2016-11-17 |
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