EP2835218B1 - Chemical mechanical polishing fastening fixture and fastening base - Google Patents
Chemical mechanical polishing fastening fixture and fastening base Download PDFInfo
- Publication number
- EP2835218B1 EP2835218B1 EP13179742.5A EP13179742A EP2835218B1 EP 2835218 B1 EP2835218 B1 EP 2835218B1 EP 13179742 A EP13179742 A EP 13179742A EP 2835218 B1 EP2835218 B1 EP 2835218B1
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- EP
- European Patent Office
- Prior art keywords
- face
- protruded
- fastening
- buckling
- annular substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 239000000126 substance Substances 0.000 title claims description 23
- 238000005498 polishing Methods 0.000 title claims description 22
- 239000000758 substrate Substances 0.000 claims description 49
- 239000004734 Polyphenylene sulfide Substances 0.000 claims description 6
- 229920000069 polyphenylene sulfide Polymers 0.000 claims description 6
- 239000000853 adhesive Substances 0.000 description 22
- 230000001070 adhesive effect Effects 0.000 description 22
- 235000012431 wafers Nutrition 0.000 description 15
- 238000004519 manufacturing process Methods 0.000 description 5
- 239000004065 semiconductor Substances 0.000 description 4
- 239000004033 plastic Substances 0.000 description 3
- 229920003023 plastic Polymers 0.000 description 3
- 229910001220 stainless steel Inorganic materials 0.000 description 3
- 239000010935 stainless steel Substances 0.000 description 3
- 239000002184 metal Substances 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/27—Work carriers
- B24B37/30—Work carriers for single side lapping of plane surfaces
- B24B37/32—Retaining rings
Definitions
- the disclosure relates to a wafer fastening fixture, and particularly to a chemical mechanical polishing fastening fixture and fastening base.
- Wafer fastening fixtures are essentially basic tools during manufacturing the semiconductor and are applied for loading the wafers, so that the wafers are moved, processing chemical procedures and so forth conveniently during semiconductor manufacturing process.
- FIG. 1 is a conventional wafer fastening fixture provided by the semiconductor apparatus manufacturers.
- the conventional wafer fastening fixture includes a fastening base 10 and a fastening ring 20.
- the fastening base 10 is made of stainless steel and is disposed on a semiconductor processing equipments.
- the fastening ring 20 is made of high level plastics and provided for loading the wafer.
- the fastening ring 20 is attached onto the fastening base 10 via adhesives; however, since the attaching face 11 of the fastening base 10 is flat, once the adhesives fails to attach the fastening ring 20 with the fastening base 10, the fastening ring 20 and the fastening base 10 are separated.
- US 2004/219870A1 discloses a two part retaining ring made of two generally annual portions. One portion has depressions and the other portion has projections that extend into the depressions when the two portions are brought together.
- the projections can have a cross section with two outwardly sloped sides. However, the projections cannot be abutted against the depression when the upper ring is connected with the lower ring.
- a retaining ring assembly for use in chemical mechanical polishing that includes an annular plastic retaining ring portion defining an annular projection thereon, an annular metal backing defining an annular channel therein for receiving the projection and a pair of elongated spring members concentrically disposed about the annular projection on the retaining ring.
- the channel in the backing is sized so as to receive the annular projection on the retaining ring and spring members therein upon the retaining ring being urged against the backing whereupon the spring members bear against the projection on the retaining ring and portions of the annular backing so as to releasable secure the retaining ring to the backing such that the retaining ring can be replaced upon becoming worn during use and the metal backing can be reused.
- the projections cannot be abutted against the depression when the retaining ring portion is connected with the backing ring portion.
- the conventional wafer fastening fixture has to be renewed frequently due to the issue mentioned above so that the manufacturing cost of the wafer is increased.
- the wafer fastening fixtures with low quality will damage the wafer.
- the structure of the wafer fastening fixture has to be improved so as to possess high stability and sustainability for significantly reducing the manufacturing cost of the wafer.
- the disclosure proposes a chemical mechanical polishing fastening fixture which is easy to be assembled, easy to be manufactured, as well as possess high stability and sustainability, so that the manufacturing cost of wafer can be reduced.
- One concept of the disclosure provides a chemical mechanical polishing fastening fixture.
- the chemical mechanical polishing fastening fixture includes a fastening base and a fastening ring.
- the fastening base includes an annular substrate having a first combining face and a plurality of protruded blocks annularly aligned on the first combining face. Each protruded block is made of polyphenylene sulfide and includes a first buckling face.
- the first buckling face is tilted from a root portion thereof toward an outer side of the protruded block along a plane radially extending from the annular substrate.
- the fastening ring has a second combing face and a plurality of first grooves.
- the first grooves arc annularly aligned on the second combining face.
- Parts of a flange of each first groove are constituted of a second buckling face, and the second buckling face is tilted from a root portion thereof toward the second combining face.
- the fastening base and the fastening ring are rotated counterclockwise respectively along the circumference thereof, so that the first buckling face of the protruded block is buckled with the second buckling face of the first groove.
- Another concept of the disclosure provides a fastening base of a chemical mechanical polishing fastening fixture.
- the fastening base is provided to combine with a fastening ring so as to form the chemical mechanical polishing fastening fixture.
- the fastening ring has a second combining face and a plurality of first grooves.
- the first grooves are annularly aligned on the second combining face. Parts of a flange of each first groove are constituted of a second buckling face.
- the second buckling face is tilted from a root portion thereof toward the second combining face.
- the fastening base includes an annular substrate having a first combining face and a plurality of protruded blocks annularly aligned on the first combining face.
- Each protruded block is made of polyphenylene sulfide and includes a first buckling face.
- the first buckling face is tilted from a root portion thereof toward an outer side of the protruded block along a plane radially extending from the annular substrate.
- the chemical mechanical polishing fastening fixture includes a fastening base and a fastening ring.
- the fastening ring includes an annular substrate having a first combining face and a plurality of protruded blocks annularly aligned on the first combining face.
- Each protruded block is made of polyphenylene sulfide and includes a first buckling face.
- the first buckling face is tilted from a root portion thereof toward an outer side of the protruded block along a plane radially extending from the annular substrate.
- the fastening base has a second combing face and a plurality of first grooves.
- the first grooves are annularly aligned on the second combining face.
- Parts of a flange of each first groove are constituted of a second buckling face, and the second buckling face is tilted from a root portion thereof toward the second combining face.
- the fastening base and the fastening ring are rotated counterclockwise respectively along the circumference thereof, so that the first buckling face of the protruded block is buckled with the second buckling face of the first groove.
- a chemical mechanical polishing fastening fixture of the disclosure includes a fastening base 100, a fastening ring 200, at least one protruded block 110 and at least one first groove 210.
- the fastening base 100 includes an annular substrate which has a first combining face 101; that is to say, the fastening base has the first combining face 101, and the first combining face 101 is an annular face.
- the fastening base 100 can be made of stainless steel.
- the first combining face 101 has a plurality of protruded blocks 110 disposed thereon, and the protruded blocks 110 are annularly aligned and can also be made of stainless steel; but embodiments of the disclosure are not limited thereto, in some embodiments, the protruded blocks 110 are made of polyphenylene sulfide (PPS).
- PPS polyphenylene sulfide
- the fastening ring 200 has a second combining face 201 and a plurality of first grooves 210 corresponding to the protruded blocks 110.
- the fastening ring 200 can be made of high level plastics.
- the fastening base 100 and the fastening ring 200 can be rotated counterclockwise respectively along the circumference thereof, so that the protruded blocks 110 are buckled with the first grooves 210, and the first combining face 101 is closely contacted with the second combining face 201.
- adhesives are applied to fasten the fastening base 100 and the fastening ring 200 securely so as to form a structure with high stability and sustainability.
- the options of the adhesive are known by skilled in the arts so as to be omitted.
- the protruded blocks 110 and the fastening base 100 can be formed integrally as a whole, or can be made separately. Several embodiments are described below.
- FIGs. 3A to 3G are partial enlarged views of the circle 6 shown in FIG. 2B for showing several embodiments of the fastening base 100 of the disclosure respectively.
- FIG. 3A is an assembled view of the fastening base 100 of the embodiment shown in FIG. 3G and presents one embodiment showing the annular substrate of the fastening base 100 and the protruded blocks 110 are manufactured separately.
- the protruded blocks 110 are secured on the annular substrate of the fastening base 100 via a plurality of screw bolts 120, and the annular substrate has a plurality of second grooves 102 to receive the protruded blocks 110 and prevent the protruded blocks 110 from shifting.
- Each protruded block 110 includes a first top face (namely, the top face of the protruded block 110), a first guiding face 111, a first inner lateral face 112, a first outer lateral face 113, a first buckling face 114 and a first through hole 115 (as shown in FIG. 3G ).
- the first buckling face 114 is tilted from the root portion (namely, the intersection portion of the first buckling face 114 and the first combining face 101) thereof toward the outer side of the protruded block 110 along a plane radially extending from the annular substrate of the fastening base 100 (but embodiments of the disclosure are not limited thereto) and formed as one reversed clamp structure.
- the first inner lateral face 112 and the first outer lateral face 113 are arc faces extending from the circumference of the fastening base 100, and the curvature radii of the first inner lateral face 112 is smaller than the curvature radii of the first outer lateral face 113.
- the first top face is the top portion of a plane constituted of the protruded block 110.
- a tilt angle of the first buckling face 114 is 30 degrees.
- the first guiding face 111 is the plane radially extending along the fastening base 100 (but embodiments of the disclosure are not limited thereto) and cooperates with the first buckling face 114 to guide the first grooves 210 to securely buckled with the protruded blocks 110.
- the first guiding face 111 is vertically disposed on the first combining face 101, but embodiments of the disclosure are not limited thereto; the first guiding face 111 can tilt from the root portion (namely, the intersection portion of the first guiding face 111 and the first combining face 101) of the first guiding face 111 toward the inner side of the protruded block 110.
- the first guiding face 111 is disposed opposite to the first buckling face 114 and is parallel to the first buckling face 114.
- FIGs. 3B to 3G shows several embodiments of the disclosure.
- FIG. 3B is a schematic view of one embodiment of the fastening base 100.
- the protruded blocks 110 are manufactured separately and are fastened on the annular substrate of the fastening base 100 via adhesives.
- the positions of the protruded blocks 110 are pre-determined on the fastening base 100, and then the adhesives are applied to fasten the protruded blocks 110 with the fastening base 100.
- the structure of the protruded blocks 110 is the same as mentioned above so as to be omitted.
- FIG. 3C is a schematic view of another embodiment of the fastening base 100.
- the protruded blocks 110 are manufactured separately, and each protruded block 110 has a protruded rod 116.
- a plurality of recessed holes 104 is disposed on the annular substrate of the fastening base 100 in advance for corresponding to the protruded rods 116. Therefore, the protruded rods 116 can be inserted into the recessed holes 104 and fastened on the annular substrate of the fastening base 100 via the adhesives.
- each protruded block 110 can be positioned precisely, and can be fastened on the fastening base 100 via the adhesives.
- the structure of the protruded blocks 110 is the same as mentioned above so as to be omitted.
- FIG. 3D is a schematic view of a further embodiment of the fastening base 100.
- the protruded blocks 110 are manufactured separately, and are threaded with the annular substrate of the fastening base 100 via the screw bolts 120.
- the first through holes 115 are opened on the protruded blocks 110 in advance
- a plurality second through holes 103 is opened on the annular substrate of the fastening base 100 in advance.
- Each second through hole 103 is corresponding to and is opposite to each corresponding first through hole 115.
- the adhesives can be applied to enhance the structural strength between the protruded blocks 110 and the annular substrate of the fastening base 100.
- the structure of the protruded blocks 110 is the same as mentioned above so as to be omitted.
- FIG. 3E is a schematic view of a yet another embodiment of the fastening base 100.
- the protruded blocks 110 are manufactured separately, and are attached on the annular substrate of the fastening base 100 via the adhesives.
- the second grooves 102 are formed on the annular substrate of the fastening base 100 in advance so as to receive the protruded blocks 110 therein.
- the second grooves 102 are provided to secure and position the protruded blocks 110 transversely, and the adhesives are provided to fasten the protruded blocks 110 with the annular substrate of the fastening base 100 longitudinally. That is to say, each second groove 102 receives each corresponding protruded block 110 so as to prevent each corresponding protruded block 110 from sliding.
- the structure of the protruded blocks 110 is the same as mentioned above so as to be omitted.
- FIG. 3F is a schematic view of a still another embodiment of the fastening base 100.
- the protruded blocks 110 are manufactured separately, and each protruded block 110 has the protruded rod 116.
- the recessed holes 104 are disposed on the annular substrate of the fastening base 100 in advance for corresponding to the protruded rods 116. Therefore, the protruded rods 116 can be inserted into the recessed holes 104 and fastened on the annular substrate of the fastening base 100 via the adhesives.
- each protruded block 110 can be positioned precisely, and can be fastened on the fastening base 100 via the adhesives.
- the second grooves 102 are also formed on the annular substrate of the fastening base 100 in advance so as to receive the protruded blocks 110 therein.
- the second grooves 102 are provided to secure and position the protruded blocks 110 transversely, and the adhesives are provided to fasten the protruded blocks 110 with the annular substrate of the fastening base 100 longitudinally.
- the structure of the protruded blocks 110 is the same as mentioned above so as to be omitted.
- FIG. 3G is a schematic view of another further embodiment of the fastening base 100.
- the protruded blocks 110 are manufactured separately, and are threaded with the annular substrate of the fastening base 100 via the screw bolts 120.
- the first through holes 115 are opened on the protruded blocks 110 in advance
- the second through holes 103 are opened on the annular substrate of the fastening base 100 in advance.
- the adhesives can be applied to enhance the structural strength between the protruded blocks 110 and the annular substrate of the fastening base 100.
- the second grooves 102 are also formed on the annular substrate of the fastening base 100 in advance so as to receive the protruded blocks 110 therein.
- the second grooves 102 are provided to secure and position the protruded blocks 110 transversely, and the adhesives are provided to fasten the protruded blocks 110 with the annular substrate of the fastening base 100 longitudinally.
- the structure of the protruded blocks 110 is the same as mentioned above so as to be omitted.
- FIGs. 4A to 4H are the cross-sectional views of FIGs. 3A to 3G respectively, and FIG. 4H is a cross-sectional view for showing the protruded blocks 110 and the annular substrate of the fastening base 100 are formed integrally as a whole.
- the screw bolt 120 is threaded with the annular substrate of the fastening base 100 via the first through hole 115 and the second through hole 103, and the second groove 102 can receive the protruded block 110 so as to position the protruded block 110.
- the protruded block 110 is attached on the annular substrate of the fastening base 100 via the adhesives.
- the protruded block 110 is positioned in the recessed hole 104 via the protruded rod 116, and can be attached on the annular substrate of the fastening base 100 via the adhesives.
- the screw bolt 120 is threaded with the annular substrate of the fastening base 100 via the first through hole 115 and the second through hole 103.
- the protruded block 110 is attached on the annular substrate of the fastening base 100 via the adhesives. And, the second groove 102 can receive the protruded block 110 so as to position the protruded block 110.
- the protruded block 110 is positioned in the recessed hole 104 via the protruded rod 116, and can be attached on the annular substrate of the fastening base 100 via the adhesives. And, the second groove 102 can receive the protruded block 110 so as to position the protruded block 110.
- the screw bolt 120 is threaded with the annular substrate of the fastening base 100 via the first through hole 115 and the second through hole 102, and the second groove 102 can receive the protruded block 110 so as to position the protruded block 110.
- the protruded blocks 110 and the annular substrate of the fastening base 100 are formed integrally as a whole.
- FIGs. 5A to 5B are a partial enlarged view and a cross-sectional view of a fastening ring 200 of the disclosure respectively.
- the fastening ring 200 has the second combining face 201 and the first grooves 210.
- the first grooves 210 are annularly aligned on the second combining face 201 and provided receiving spaces for receiving the protruded blocks 110.
- parts of the flange of each first groove 210 are constituted of a second buckling face 215 (a dove-tail structure) for receiving the first buckling face 114 of the protruded block 110.
- the second buckling face 215 is tilted from the root portion (namely, the intersection portion of the second buckling face 215 and the second combining face 201) thereof toward the second combining face 201 along a plane radially extending along the fastening ring 200 (but embodiments of the disclosure are not limited thereto) and formed as another reversed clamp structure.
- the fist buckling face 114 of the protruded block 110 is formed as one reversed clamp structure, and the second buckling face 215 and is formed as another reversed clamp structure and parallel with the first buckling face 114. Therefore, when the adhesives are applied to attach the fastening base 100 with the fastening ring 200, the fastening ring 200 is fastened with the fastening base 100 longitudinally, as shown in FIG. 6A .
- the first groove 210 is consisting of a second top face 211, a second inner lateral face 212, a second outer lateral face 213, a second guiding face 214 and the second combining face 215.
- the second top face 211 is the bottom portion of a plane constituted of the first groove 210.
- the second inner lateral face 212 and the second outer lateral face 213 are arc faces recessed from the circumference of the fastening ring 200, and the curvature radii of the second inner lateral face 212 is smaller than the curvature radii of the second outer lateral face 213.
- the second buckling face 215 is corresponding to the first buckling face 114 and a tilt angle thereof is 30 degrees; but embodiments of the disclosure are not limited thereto, in some embodiments, the tilt angle of the first buckling face 114 and the tilt angle of the second buckling face 215 can be defined from 1 degree to 60 degrees, and the tilt angle of the first buckling face 114 is the same as the tilt angle of the second buckling face 215, so that the first buckling face 114 is parallel with the second buckling face 215.
- the second guiding face 214 is the plane radially extending along the fastening ring 200 (but embodiments of the disclosure are not limited thereto); in this embodiment, preferably, the second guiding face 214 is tilted from the root portion (the intersection portion of the second guiding face 214 and the second combining face 201) of the second guiding face 214 toward the inner side of the first groove 210. In one embodiment, the second guiding face 214 is disposed opposite to the second buckling face 215 and is parallel to the second buckling face 215.
- the axle center of the fastening base 100 is aligned with the axle center of the fastening ring 200, so that the first combining face 101 is aligned with the second combining face 201, the protruded blocks 110 are aligned with the first grooves 210, each first buckling face 114 is aligned with each corresponding second buckling face 215, the intersection portion of each second guiding face 214 and each corresponding top face 211 is aligned with each corresponding first guiding face 111, and the first inner lateral face 112 and the first outer lateral face 113 are aligned with the second inner lateral face 212 and the second outer lateral face 213 respectively.
- the protruded blocks 110 are positioned with the first grooves 210 respectively. That is to say, the protruded blocks 210 are disposed in the first grooves 210. And then, the fastening base 100 and the fastening ring 200 can be rotated counterclockwise respectively along the circumference thereof, so that the protruded blocks 110 and the first grooves 210 are slid along the first buckling face 114 (or the second buckling face 215) to buckle with each other, so that the fastening ring 200 does not depart from the fastening base 100.
- the adhesives can be applied to the connection of the fastening base 100 and the fastening ring 200 so as to enhance the fastening force between the fastening base 100 and the fastening ring 200.
- the first buckling face 114 is tilted leftward from a lateral view of the disclosure, so that when the fastening ring 200 is disposed on the fastening base 100, the fastening ring 200 is rotated counterclockwise so as to let the first grooves 210 receive the protruded blocks 110.
- the first bucking face 114 is tilted rightward from a lateral view of the disclosure, so that when the fastening ring 200 is disposed on the fastening base 100, the fastening ring 200 is rotated clockwise so as to let the first grooves 210 receive the protruded blocks 110.
- the structure of the protruded block 110 of the fastening base 100 and the structure of the first groove 210 of the fastening ring 200 can be exchanged. That is to say, the protruded blocks 110 can be manufactured on the fastening ring 200, and the first grooves 210 can be manufactured on the fastening base 100.
- the structure of the protruded blocks 110 of the fastening ring 200 and the structure of the first groove 210s of the fastening base 100 are the same as mentioned above so as to be omitted.
- the fastening ring 200 and the fastening base 100 of the chemical mechanical polishing fastening fixture in accordance with the disclosure can be efficiently fastened with each other and easily manufactured, so that the lifetime of the chemical mechanical polishing fastening fixture is elongated.
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Description
- The disclosure relates to a wafer fastening fixture, and particularly to a chemical mechanical polishing fastening fixture and fastening base.
- Wafer fastening fixtures are essentially basic tools during manufacturing the semiconductor and are applied for loading the wafers, so that the wafers are moved, processing chemical procedures and so forth conveniently during semiconductor manufacturing process.
- Please refer to
FIG. 1 , which is a conventional wafer fastening fixture provided by the semiconductor apparatus manufacturers. The conventional wafer fastening fixture includes afastening base 10 and afastening ring 20. Thefastening base 10 is made of stainless steel and is disposed on a semiconductor processing equipments. The fasteningring 20 is made of high level plastics and provided for loading the wafer. Thefastening ring 20 is attached onto thefastening base 10 via adhesives; however, since the attachingface 11 of thefastening base 10 is flat, once the adhesives fails to attach thefastening ring 20 with thefastening base 10, thefastening ring 20 and thefastening base 10 are separated. -
US 2004/219870A1 discloses a two part retaining ring made of two generally annual portions. One portion has depressions and the other portion has projections that extend into the depressions when the two portions are brought together. The projections can have a cross section with two outwardly sloped sides. However, the projections cannot be abutted against the depression when the upper ring is connected with the lower ring. - I
US 2005/277375A1 discloses a retaining ring assembly for use in chemical mechanical polishing that includes an annular plastic retaining ring portion defining an annular projection thereon, an annular metal backing defining an annular channel therein for receiving the projection and a pair of elongated spring members concentrically disposed about the annular projection on the retaining ring. The channel in the backing is sized so as to receive the annular projection on the retaining ring and spring members therein upon the retaining ring being urged against the backing whereupon the spring members bear against the projection on the retaining ring and portions of the annular backing so as to releasable secure the retaining ring to the backing such that the retaining ring can be replaced upon becoming worn during use and the metal backing can be reused. However, the projections cannot be abutted against the depression when the retaining ring portion is connected with the backing ring portion. - Therefore, the conventional wafer fastening fixture has to be renewed frequently due to the issue mentioned above so that the manufacturing cost of the wafer is increased. Besides, the wafer fastening fixtures with low quality will damage the wafer. Hence, the structure of the wafer fastening fixture has to be improved so as to possess high stability and sustainability for significantly reducing the manufacturing cost of the wafer.
- In view of this, the disclosure proposes a chemical mechanical polishing fastening fixture which is easy to be assembled, easy to be manufactured, as well as possess high stability and sustainability, so that the manufacturing cost of wafer can be reduced. One concept of the disclosure provides a chemical mechanical polishing fastening fixture. The chemical mechanical polishing fastening fixture includes a fastening base and a fastening ring. The fastening base includes an annular substrate having a first combining face and a plurality of protruded blocks annularly aligned on the first combining face. Each protruded block is made of polyphenylene sulfide and includes a first buckling face. The first buckling face is tilted from a root portion thereof toward an outer side of the protruded block along a plane radially extending from the annular substrate. The fastening ring has a second combing face and a plurality of first grooves. The first grooves arc annularly aligned on the second combining face. Parts of a flange of each first groove are constituted of a second buckling face, and the second buckling face is tilted from a root portion thereof toward the second combining face. When the protruded blocks are disposed in the first grooves, the fastening base and the fastening ring are rotated counterclockwise respectively along the circumference thereof, so that the first buckling face of the protruded block is buckled with the second buckling face of the first groove. Another concept of the disclosure provides a fastening base of a chemical mechanical polishing fastening fixture. The fastening base is provided to combine with a fastening ring so as to form the chemical mechanical polishing fastening fixture. The fastening ring has a second combining face and a plurality of first grooves. The first grooves are annularly aligned on the second combining face. Parts of a flange of each first groove are constituted of a second buckling face. The second buckling face is tilted from a root portion thereof toward the second combining face. The fastening base includes an annular substrate having a first combining face and a plurality of protruded blocks annularly aligned on the first combining face. Each protruded block is made of polyphenylene sulfide and includes a first buckling face. The first buckling face is tilted from a root portion thereof toward an outer side of the protruded block along a plane radially extending from the annular substrate. When the protruded blocks are disposed in the first grooves, the fastening base and the fastening ring are rotated counterclockwise respectively along the circumference thereof, so that the first buckling face of the protruded block is buckled with the second buckling face of the first groove. A further concept of the disclosure provides a chemical mechanical polishing fastening fixture. The chemical mechanical polishing fastening fixture includes a fastening base and a fastening ring. The fastening ring includes an annular substrate having a first combining face and a plurality of protruded blocks annularly aligned on the first combining face. Each protruded block is made of polyphenylene sulfide and includes a first buckling face. The first buckling face is tilted from a root portion thereof toward an outer side of the protruded block along a plane radially extending from the annular substrate. The fastening base has a second combing face and a plurality of first grooves. The first grooves are annularly aligned on the second combining face. Parts of a flange of each first groove are constituted of a second buckling face, and the second buckling face is tilted from a root portion thereof toward the second combining face. When the protruded blocks are disposed in the first grooves, the fastening base and the fastening ring are rotated counterclockwise respectively along the circumference thereof, so that the first buckling face of the protruded block is buckled with the second buckling face of the first groove.
- The detailed features and advantages of the disclosure are described below in great detail through the following embodiments, the content of the detailed description is sufficient for those skilled in the art to understand the technical content of the disclosure and to implement the disclosure there accordingly. Based upon the content of the specification, the claims, and the drawings, those skilled in the art can easily understand the relevant objectives and advantages of the disclosure.
- The disclosure will become more fully understood from the detailed description given herein below for illustration only and thus not limitative of the disclosure, wherein:
-
FIG. 1 is a perspective view of a conventional wafer fastening fixture; -
FIGs. 2A and 2B are schematic views of a chemical mechanical polishing fastening fixture of the disclosure; -
FIGs. 3A to 3G are partial enlarged views of the circle 6 shown inFIG. 2B for showing embodiments of the fastening base of the disclosure; -
FIGs. 4A to 4G are cross-sectional views ofFIGs. 3A to 3G respectively, -
FIG. 4H is a cross-sectional view of the fastening base according to one embodiment of the disclosure, showing protruded blocks and annular substrate of the fastening base are formed integrally as a whole; -
FIG. 5A is a partial enlarged view of a fastening ring of the disclosure; -
FIG. 5B is a cross-sectional view of a fastening ring of the disclosure; -
FIG 6A is an exploded schematic view of the fastening base shown inFIG. 4A and the fastening ring shown inFIG. 5B ; -
FIG. 6B is an assembled schematic view of the fastening base shown inFIG. 4A and the fastening ring shown inFIG. 5B . - Please refer to
FIGs. 2A to 2B , a chemical mechanical polishing fastening fixture of the disclosure includes afastening base 100, afastening ring 200, at least one protrudedblock 110 and at least onefirst groove 210. - The
fastening base 100 includes an annular substrate which has a first combiningface 101; that is to say, the fastening base has the first combiningface 101, and the first combiningface 101 is an annular face. Thefastening base 100 can be made of stainless steel. The first combiningface 101 has a plurality of protrudedblocks 110 disposed thereon, and the protruded blocks 110 are annularly aligned and can also be made of stainless steel; but embodiments of the disclosure are not limited thereto, in some embodiments, the protruded blocks 110 are made of polyphenylene sulfide (PPS). Thefastening ring 200 has a second combiningface 201 and a plurality offirst grooves 210 corresponding to the protruded blocks 110. Thefastening ring 200 can be made of high level plastics. Thefastening base 100 and thefastening ring 200 can be rotated counterclockwise respectively along the circumference thereof, so that the protruded blocks 110 are buckled with thefirst grooves 210, and the first combiningface 101 is closely contacted with the second combiningface 201. Then, adhesives are applied to fasten thefastening base 100 and thefastening ring 200 securely so as to form a structure with high stability and sustainability. The options of the adhesive are known by skilled in the arts so as to be omitted. - Practically, the protruded blocks 110 and the
fastening base 100 can be formed integrally as a whole, or can be made separately. Several embodiments are described below. - Please refer to
FIGs. 3A to 3G , which are partial enlarged views of the circle 6 shown inFIG. 2B for showing several embodiments of thefastening base 100 of the disclosure respectively. - Firstly, please refer to
FIG. 3A , which is an assembled view of thefastening base 100 of the embodiment shown inFIG. 3G and presents one embodiment showing the annular substrate of thefastening base 100 and the protruded blocks 110 are manufactured separately. As shown inFIG. 3A andFIG. 3G , the protruded blocks 110 are secured on the annular substrate of thefastening base 100 via a plurality ofscrew bolts 120, and the annular substrate has a plurality ofsecond grooves 102 to receive the protruded blocks 110 and prevent the protruded blocks 110 from shifting. - Each protruded
block 110 includes a first top face (namely, the top face of the protruded block 110), afirst guiding face 111, a first innerlateral face 112, a first outerlateral face 113, a first bucklingface 114 and a first through hole 115 (as shown inFIG. 3G ). The first bucklingface 114 is tilted from the root portion (namely, the intersection portion of the first bucklingface 114 and the first combining face 101) thereof toward the outer side of the protrudedblock 110 along a plane radially extending from the annular substrate of the fastening base 100 (but embodiments of the disclosure are not limited thereto) and formed as one reversed clamp structure. The first innerlateral face 112 and the first outerlateral face 113 are arc faces extending from the circumference of thefastening base 100, and the curvature radii of the first innerlateral face 112 is smaller than the curvature radii of the first outerlateral face 113. The first top face is the top portion of a plane constituted of the protrudedblock 110. In this embodiment, preferably, a tilt angle of the first bucklingface 114 is 30 degrees. Preferably, thefirst guiding face 111 is the plane radially extending along the fastening base 100 (but embodiments of the disclosure are not limited thereto) and cooperates with the first bucklingface 114 to guide thefirst grooves 210 to securely buckled with the protruded blocks 110. In this embodiment, preferably thefirst guiding face 111 is vertically disposed on the first combiningface 101, but embodiments of the disclosure are not limited thereto; thefirst guiding face 111 can tilt from the root portion (namely, the intersection portion of thefirst guiding face 111 and the first combining face 101) of thefirst guiding face 111 toward the inner side of the protrudedblock 110. In one embodiment, thefirst guiding face 111 is disposed opposite to the first bucklingface 114 and is parallel to the first bucklingface 114. - And then, please refer to
FIGs. 3B to 3G , which shows several embodiments of the disclosure. -
FIG. 3B is a schematic view of one embodiment of thefastening base 100. In this embodiment, the protruded blocks 110 are manufactured separately and are fastened on the annular substrate of thefastening base 100 via adhesives. In this embodiment, the positions of the protruded blocks 110 are pre-determined on thefastening base 100, and then the adhesives are applied to fasten the protruded blocks 110 with thefastening base 100. Here, the structure of the protruded blocks 110 is the same as mentioned above so as to be omitted. -
FIG. 3C is a schematic view of another embodiment of thefastening base 100. In this embodiment, the protruded blocks 110 are manufactured separately, and eachprotruded block 110 has a protrudedrod 116. A plurality of recessedholes 104 is disposed on the annular substrate of thefastening base 100 in advance for corresponding to the protrudedrods 116. Therefore, the protrudedrods 116 can be inserted into the recessedholes 104 and fastened on the annular substrate of thefastening base 100 via the adhesives. In this embodiment, because of the protrudedrod 116 and the recessedhole 104, each protruded block 110 can be positioned precisely, and can be fastened on thefastening base 100 via the adhesives. Here, the structure of the protruded blocks 110 is the same as mentioned above so as to be omitted. -
FIG. 3D is a schematic view of a further embodiment of thefastening base 100. In this embodiment, the protruded blocks 110 are manufactured separately, and are threaded with the annular substrate of thefastening base 100 via thescrew bolts 120. In this embodiment, the first throughholes 115 are opened on the protruded blocks 110 in advance, and a plurality second throughholes 103 is opened on the annular substrate of thefastening base 100 in advance. Each second throughhole 103 is corresponding to and is opposite to each corresponding first throughhole 115. Before thescrew bolts 120 pass through the first throughholes 115 and the second throughholes 103 to thread with the annular substrate, the adhesives can be applied to enhance the structural strength between theprotruded blocks 110 and the annular substrate of thefastening base 100. Here, the structure of the protruded blocks 110 is the same as mentioned above so as to be omitted. -
FIG. 3E is a schematic view of a yet another embodiment of thefastening base 100. In this embodiment, the protruded blocks 110 are manufactured separately, and are attached on the annular substrate of thefastening base 100 via the adhesives. In this embodiment, thesecond grooves 102 are formed on the annular substrate of thefastening base 100 in advance so as to receive the protruded blocks 110 therein. Thesecond grooves 102 are provided to secure and position the protruded blocks 110 transversely, and the adhesives are provided to fasten the protruded blocks 110 with the annular substrate of thefastening base 100 longitudinally. That is to say, eachsecond groove 102 receives each corresponding protrudedblock 110 so as to prevent each corresponding protrudedblock 110 from sliding. Here, the structure of the protruded blocks 110 is the same as mentioned above so as to be omitted. -
FIG. 3F is a schematic view of a still another embodiment of thefastening base 100. In this embodiment, the protruded blocks 110 are manufactured separately, and eachprotruded block 110 has the protrudedrod 116. The recessedholes 104 are disposed on the annular substrate of thefastening base 100 in advance for corresponding to the protrudedrods 116. Therefore, the protrudedrods 116 can be inserted into the recessedholes 104 and fastened on the annular substrate of thefastening base 100 via the adhesives. In this embodiment, because of the protrudedrod 116 and the recessedhole 104, each protruded block 110 can be positioned precisely, and can be fastened on thefastening base 100 via the adhesives. Besides, in this embodiment, thesecond grooves 102 are also formed on the annular substrate of thefastening base 100 in advance so as to receive the protruded blocks 110 therein. Thesecond grooves 102 are provided to secure and position the protruded blocks 110 transversely, and the adhesives are provided to fasten the protruded blocks 110 with the annular substrate of thefastening base 100 longitudinally. Here, the structure of the protruded blocks 110 is the same as mentioned above so as to be omitted. -
FIG. 3G is a schematic view of another further embodiment of thefastening base 100. In this embodiment, the protruded blocks 110 are manufactured separately, and are threaded with the annular substrate of thefastening base 100 via thescrew bolts 120. In this embodiment, the first throughholes 115 are opened on the protruded blocks 110 in advance, and the second throughholes 103 are opened on the annular substrate of thefastening base 100 in advance. Before thescrew bolts 120 pass through the first throughholes 115 and the second throughholes 103 to thread with the annular substrate, the adhesives can be applied to enhance the structural strength between theprotruded blocks 110 and the annular substrate of thefastening base 100. Besides, in this embodiment, thesecond grooves 102 are also formed on the annular substrate of thefastening base 100 in advance so as to receive the protruded blocks 110 therein. Thesecond grooves 102 are provided to secure and position the protruded blocks 110 transversely, and the adhesives are provided to fasten the protruded blocks 110 with the annular substrate of thefastening base 100 longitudinally. Here, the structure of the protruded blocks 110 is the same as mentioned above so as to be omitted. - And then, please refer to
FIGs. 4A to 4H , in whichFIGs. 4A to 4G are the cross-sectional views ofFIGs. 3A to 3G respectively, andFIG. 4H is a cross-sectional view for showing the protruded blocks 110 and the annular substrate of thefastening base 100 are formed integrally as a whole. - As shown in
FIG. 4A , thescrew bolt 120 is threaded with the annular substrate of thefastening base 100 via the first throughhole 115 and the second throughhole 103, and thesecond groove 102 can receive theprotruded block 110 so as to position theprotruded block 110. - As shown in
FIG. 4B , theprotruded block 110 is attached on the annular substrate of thefastening base 100 via the adhesives. - As shown in
FIG. 4C , theprotruded block 110 is positioned in the recessedhole 104 via the protrudedrod 116, and can be attached on the annular substrate of thefastening base 100 via the adhesives. - As shown in
FIG. 4D , thescrew bolt 120 is threaded with the annular substrate of thefastening base 100 via the first throughhole 115 and the second throughhole 103. - As shown in
FIG. 4E , theprotruded block 110 is attached on the annular substrate of thefastening base 100 via the adhesives. And, thesecond groove 102 can receive theprotruded block 110 so as to position theprotruded block 110. - As shown in
FIG. 4F , theprotruded block 110 is positioned in the recessedhole 104 via the protrudedrod 116, and can be attached on the annular substrate of thefastening base 100 via the adhesives. And, thesecond groove 102 can receive theprotruded block 110 so as to position theprotruded block 110. - As shown in
FIG. 4G , thescrew bolt 120 is threaded with the annular substrate of thefastening base 100 via the first throughhole 115 and the second throughhole 102, and thesecond groove 102 can receive theprotruded block 110 so as to position theprotruded block 110. - As shown in
FIG. 4H , the protruded blocks 110 and the annular substrate of thefastening base 100 are formed integrally as a whole. - And then, please refer to
FIGs. 5A to 5B , which are a partial enlarged view and a cross-sectional view of afastening ring 200 of the disclosure respectively. Thefastening ring 200 has the second combiningface 201 and thefirst grooves 210. Thefirst grooves 210 are annularly aligned on the second combiningface 201 and provided receiving spaces for receiving the protruded blocks 110. And, parts of the flange of eachfirst groove 210 are constituted of a second buckling face 215 (a dove-tail structure) for receiving the first bucklingface 114 of the protrudedblock 110. The second bucklingface 215 is tilted from the root portion (namely, the intersection portion of the second bucklingface 215 and the second combining face 201) thereof toward the second combiningface 201 along a plane radially extending along the fastening ring 200 (but embodiments of the disclosure are not limited thereto) and formed as another reversed clamp structure. Thefist buckling face 114 of the protrudedblock 110 is formed as one reversed clamp structure, and the second bucklingface 215 and is formed as another reversed clamp structure and parallel with the first bucklingface 114. Therefore, when the adhesives are applied to attach thefastening base 100 with thefastening ring 200, thefastening ring 200 is fastened with thefastening base 100 longitudinally, as shown inFIG. 6A . - In
FIG. 5A , thefirst groove 210 is consisting of a secondtop face 211, a second innerlateral face 212, a second outerlateral face 213, asecond guiding face 214 and the second combiningface 215. The secondtop face 211 is the bottom portion of a plane constituted of thefirst groove 210. The second innerlateral face 212 and the second outerlateral face 213 are arc faces recessed from the circumference of thefastening ring 200, and the curvature radii of the second innerlateral face 212 is smaller than the curvature radii of the second outerlateral face 213. In this embodiment, preferably, the second bucklingface 215 is corresponding to the first bucklingface 114 and a tilt angle thereof is 30 degrees; but embodiments of the disclosure are not limited thereto, in some embodiments, the tilt angle of the first bucklingface 114 and the tilt angle of the second bucklingface 215 can be defined from 1 degree to 60 degrees, and the tilt angle of the first bucklingface 114 is the same as the tilt angle of the second bucklingface 215, so that the first bucklingface 114 is parallel with the second bucklingface 215. Preferably, thesecond guiding face 214 is the plane radially extending along the fastening ring 200 (but embodiments of the disclosure are not limited thereto); in this embodiment, preferably, thesecond guiding face 214 is tilted from the root portion (the intersection portion of thesecond guiding face 214 and the second combining face 201) of thesecond guiding face 214 toward the inner side of thefirst groove 210. In one embodiment, thesecond guiding face 214 is disposed opposite to the second bucklingface 215 and is parallel to the second bucklingface 215. - Please refer to
FIGs. 6A to 6B , upon assembling thefastening base 100 with thefastening ring 200, the axle center of thefastening base 100 is aligned with the axle center of thefastening ring 200, so that the first combiningface 101 is aligned with the second combiningface 201, the protruded blocks 110 are aligned with thefirst grooves 210, each first bucklingface 114 is aligned with each corresponding second bucklingface 215, the intersection portion of each second guidingface 214 and each correspondingtop face 211 is aligned with each corresponding first guidingface 111, and the first innerlateral face 112 and the first outerlateral face 113 are aligned with the second innerlateral face 212 and the second outerlateral face 213 respectively. Based on this, the protruded blocks 110 are positioned with thefirst grooves 210 respectively. That is to say, the protruded blocks 210 are disposed in thefirst grooves 210. And then, thefastening base 100 and thefastening ring 200 can be rotated counterclockwise respectively along the circumference thereof, so that the protruded blocks 110 and thefirst grooves 210 are slid along the first buckling face 114 (or the second buckling face 215) to buckle with each other, so that thefastening ring 200 does not depart from thefastening base 100. The adhesives can be applied to the connection of thefastening base 100 and thefastening ring 200 so as to enhance the fastening force between thefastening base 100 and thefastening ring 200. - Furthermore, in the embodiments mentioned above, the first buckling
face 114 is tilted leftward from a lateral view of the disclosure, so that when thefastening ring 200 is disposed on thefastening base 100, thefastening ring 200 is rotated counterclockwise so as to let thefirst grooves 210 receive the protruded blocks 110. In other embodiments, thefirst bucking face 114 is tilted rightward from a lateral view of the disclosure, so that when thefastening ring 200 is disposed on thefastening base 100, thefastening ring 200 is rotated clockwise so as to let thefirst grooves 210 receive the protruded blocks 110. - In addition, the structure of the protruded
block 110 of thefastening base 100 and the structure of thefirst groove 210 of thefastening ring 200 can be exchanged. That is to say, the protruded blocks 110 can be manufactured on thefastening ring 200, and thefirst grooves 210 can be manufactured on thefastening base 100. Here, the structure of the protruded blocks 110 of thefastening ring 200 and the structure of the first groove 210s of thefastening base 100 are the same as mentioned above so as to be omitted. - As compared to a conventional fastening fixture in which the
fastening ring 20 is attached on thefastening base 10 via the flat attachingface 11, thefastening ring 200 and thefastening base 100 of the chemical mechanical polishing fastening fixture in accordance with the disclosure can be efficiently fastened with each other and easily manufactured, so that the lifetime of the chemical mechanical polishing fastening fixture is elongated. - While the disclosure has been described by the way of example and in terms of the preferred embodiments, it is to be understood that the invention need not be limited to the disclosed embodiments. On the contrary, it is intended to cover various modifications and similar arrangements included within the scope of the appended claims, the scope of which should be accorded the broadest interpretation so as to encompass all such modifications and similar structures.
Claims (7)
- A chemical mechanical polishing fastening fixture, comprising:a fastening base (100), comprising:an annular substrate, having a first combining face (101); anda plurality of protruded blocks (110), annularly aligned on the first combing face (101), each protruded block (110) being made of polyphenylene sulfide and comprising a first buckling face (114), the first buckling face (114) being tilted from a root portion thereof toward an outer side of the protruded block (110) along a plane radially extending from the annular substrate; anda fastening ring (200), having a second combing face (201) and a plurality of first grooves (210), the first grooves (210) being annularly aligned on the second combining face (201), parts of a flange of each first groove (210) being constituted of a second buckling face (215), the second buckling face (215) being tilted from a root portion thereof toward the second combining face (201);wherein the chemical mechanical polishing fastening fixture is characterized in that:the protruded block (110) further comprises a first guiding face (111), disposed opposite to the first buckling face (114) and parallel to the first buckling face (114), the first groove (210) further comprises a second guiding face (214), disposed opposite to the second buckling face (215) and is parallel to the second buckling face (215), andwhen the protruded blocks (110) are disposed in the first grooves (210), the fastening base (100) and the fastening ring (200) are configured for being rotated counterclockwise respectively along the circumference thereof, so that the first buckling face (114) of the protruded block (110) is buckled with the second buckling face (215) of the first groove (210), and the first guiding face (111) is abutted against the second guiding face (214).
- The chemical mechanical polishing fastening fixture according to claim 1, wherein each protruded block (110) has a first through hole (115), and the first combining face (101) of the annular substrate has a plurality of second through holes (103), each second through hole (103) is corresponding to and is opposite to each corresponding first through hole (115), a screw bolt (120) is passing through and threaded with the first through hole (115) and the second through hole (103), so that the protruded block (110) is fastened on the annular substrate.
- The chemical mechanical polishing fastening fixture according to claim 2, wherein the annular substrate further comprises a plurality of second grooves (102), each second groove (102) receives each corresponding protruded block (110) so as to prevent each corresponding protruded block (110) from sliding.
- The chemical mechanical polishing fastening fixture according to claim 1, wherein each protruded block (110) has a protruded rod (116), and the first combining face (101) of the annular substrate has a plurality of recessed holes (104), the protruded rods (116) are inserted into the recessed holes (104), so that the protruded blocks (110) are fastened on the annular substrate.
- The chemical mechanical polishing fastening fixture according to claim 4, wherein the annular substrate further comprises a plurality of second grooves (102), each second groove (102) receives each corresponding protruded block so as to prevent each corresponding protruded block (110) from sliding.
- The chemical mechanical polishing fastening fixture according to claim 1, wherein a first tilt angle defined between the first buckling face (114) and the second buckling face (215) is defined from 1 degree to 60 degrees, and the first buckling face (114) is parallel to the second buckling face (215).
- The chemical mechanical polishing fastening fixture according to claim 1, wherein a second tilt angle defined between the first guiding face (111) and the second guiding face (214) is defined from 1 degree to 60 degrees, and the first guiding face (111) is parallel to the second guiding face (214).
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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EP13179742.5A EP2835218B1 (en) | 2013-08-08 | 2013-08-08 | Chemical mechanical polishing fastening fixture and fastening base |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
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EP13179742.5A EP2835218B1 (en) | 2013-08-08 | 2013-08-08 | Chemical mechanical polishing fastening fixture and fastening base |
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EP2835218A1 EP2835218A1 (en) | 2015-02-11 |
EP2835218B1 true EP2835218B1 (en) | 2017-07-26 |
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EP13179742.5A Active EP2835218B1 (en) | 2013-08-08 | 2013-08-08 | Chemical mechanical polishing fastening fixture and fastening base |
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US6974371B2 (en) * | 2003-04-30 | 2005-12-13 | Applied Materials, Inc. | Two part retaining ring |
US7029386B2 (en) * | 2004-06-10 | 2006-04-18 | R & B Plastics, Inc. | Retaining ring assembly for use in chemical mechanical polishing |
CN101331003A (en) * | 2005-05-24 | 2008-12-24 | 安格斯公司 | Cmp retaining ring |
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2013
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