EP2835218B1 - Dispositif de fixation de polissage mécanique chimique et base de fixation - Google Patents

Dispositif de fixation de polissage mécanique chimique et base de fixation Download PDF

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Publication number
EP2835218B1
EP2835218B1 EP13179742.5A EP13179742A EP2835218B1 EP 2835218 B1 EP2835218 B1 EP 2835218B1 EP 13179742 A EP13179742 A EP 13179742A EP 2835218 B1 EP2835218 B1 EP 2835218B1
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EP
European Patent Office
Prior art keywords
face
protruded
fastening
buckling
annular substrate
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EP13179742.5A
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German (de)
English (en)
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EP2835218A1 (fr
Inventor
Hui-Chen Yen
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
KAI FUNG TECHNOLOGY Co Ltd
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KAI FUNG TECHNOLOGY Co Ltd
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Priority to EP13179742.5A priority Critical patent/EP2835218B1/fr
Publication of EP2835218A1 publication Critical patent/EP2835218A1/fr
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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/27—Work carriers
    • B24B37/30—Work carriers for single side lapping of plane surfaces
    • B24B37/32—Retaining rings

Definitions

  • the disclosure relates to a wafer fastening fixture, and particularly to a chemical mechanical polishing fastening fixture and fastening base.
  • Wafer fastening fixtures are essentially basic tools during manufacturing the semiconductor and are applied for loading the wafers, so that the wafers are moved, processing chemical procedures and so forth conveniently during semiconductor manufacturing process.
  • FIG. 1 is a conventional wafer fastening fixture provided by the semiconductor apparatus manufacturers.
  • the conventional wafer fastening fixture includes a fastening base 10 and a fastening ring 20.
  • the fastening base 10 is made of stainless steel and is disposed on a semiconductor processing equipments.
  • the fastening ring 20 is made of high level plastics and provided for loading the wafer.
  • the fastening ring 20 is attached onto the fastening base 10 via adhesives; however, since the attaching face 11 of the fastening base 10 is flat, once the adhesives fails to attach the fastening ring 20 with the fastening base 10, the fastening ring 20 and the fastening base 10 are separated.
  • US 2004/219870A1 discloses a two part retaining ring made of two generally annual portions. One portion has depressions and the other portion has projections that extend into the depressions when the two portions are brought together.
  • the projections can have a cross section with two outwardly sloped sides. However, the projections cannot be abutted against the depression when the upper ring is connected with the lower ring.
  • a retaining ring assembly for use in chemical mechanical polishing that includes an annular plastic retaining ring portion defining an annular projection thereon, an annular metal backing defining an annular channel therein for receiving the projection and a pair of elongated spring members concentrically disposed about the annular projection on the retaining ring.
  • the channel in the backing is sized so as to receive the annular projection on the retaining ring and spring members therein upon the retaining ring being urged against the backing whereupon the spring members bear against the projection on the retaining ring and portions of the annular backing so as to releasable secure the retaining ring to the backing such that the retaining ring can be replaced upon becoming worn during use and the metal backing can be reused.
  • the projections cannot be abutted against the depression when the retaining ring portion is connected with the backing ring portion.
  • the conventional wafer fastening fixture has to be renewed frequently due to the issue mentioned above so that the manufacturing cost of the wafer is increased.
  • the wafer fastening fixtures with low quality will damage the wafer.
  • the structure of the wafer fastening fixture has to be improved so as to possess high stability and sustainability for significantly reducing the manufacturing cost of the wafer.
  • the disclosure proposes a chemical mechanical polishing fastening fixture which is easy to be assembled, easy to be manufactured, as well as possess high stability and sustainability, so that the manufacturing cost of wafer can be reduced.
  • One concept of the disclosure provides a chemical mechanical polishing fastening fixture.
  • the chemical mechanical polishing fastening fixture includes a fastening base and a fastening ring.
  • the fastening base includes an annular substrate having a first combining face and a plurality of protruded blocks annularly aligned on the first combining face. Each protruded block is made of polyphenylene sulfide and includes a first buckling face.
  • the first buckling face is tilted from a root portion thereof toward an outer side of the protruded block along a plane radially extending from the annular substrate.
  • the fastening ring has a second combing face and a plurality of first grooves.
  • the first grooves arc annularly aligned on the second combining face.
  • Parts of a flange of each first groove are constituted of a second buckling face, and the second buckling face is tilted from a root portion thereof toward the second combining face.
  • the fastening base and the fastening ring are rotated counterclockwise respectively along the circumference thereof, so that the first buckling face of the protruded block is buckled with the second buckling face of the first groove.
  • Another concept of the disclosure provides a fastening base of a chemical mechanical polishing fastening fixture.
  • the fastening base is provided to combine with a fastening ring so as to form the chemical mechanical polishing fastening fixture.
  • the fastening ring has a second combining face and a plurality of first grooves.
  • the first grooves are annularly aligned on the second combining face. Parts of a flange of each first groove are constituted of a second buckling face.
  • the second buckling face is tilted from a root portion thereof toward the second combining face.
  • the fastening base includes an annular substrate having a first combining face and a plurality of protruded blocks annularly aligned on the first combining face.
  • Each protruded block is made of polyphenylene sulfide and includes a first buckling face.
  • the first buckling face is tilted from a root portion thereof toward an outer side of the protruded block along a plane radially extending from the annular substrate.
  • the chemical mechanical polishing fastening fixture includes a fastening base and a fastening ring.
  • the fastening ring includes an annular substrate having a first combining face and a plurality of protruded blocks annularly aligned on the first combining face.
  • Each protruded block is made of polyphenylene sulfide and includes a first buckling face.
  • the first buckling face is tilted from a root portion thereof toward an outer side of the protruded block along a plane radially extending from the annular substrate.
  • the fastening base has a second combing face and a plurality of first grooves.
  • the first grooves are annularly aligned on the second combining face.
  • Parts of a flange of each first groove are constituted of a second buckling face, and the second buckling face is tilted from a root portion thereof toward the second combining face.
  • the fastening base and the fastening ring are rotated counterclockwise respectively along the circumference thereof, so that the first buckling face of the protruded block is buckled with the second buckling face of the first groove.
  • a chemical mechanical polishing fastening fixture of the disclosure includes a fastening base 100, a fastening ring 200, at least one protruded block 110 and at least one first groove 210.
  • the fastening base 100 includes an annular substrate which has a first combining face 101; that is to say, the fastening base has the first combining face 101, and the first combining face 101 is an annular face.
  • the fastening base 100 can be made of stainless steel.
  • the first combining face 101 has a plurality of protruded blocks 110 disposed thereon, and the protruded blocks 110 are annularly aligned and can also be made of stainless steel; but embodiments of the disclosure are not limited thereto, in some embodiments, the protruded blocks 110 are made of polyphenylene sulfide (PPS).
  • PPS polyphenylene sulfide
  • the fastening ring 200 has a second combining face 201 and a plurality of first grooves 210 corresponding to the protruded blocks 110.
  • the fastening ring 200 can be made of high level plastics.
  • the fastening base 100 and the fastening ring 200 can be rotated counterclockwise respectively along the circumference thereof, so that the protruded blocks 110 are buckled with the first grooves 210, and the first combining face 101 is closely contacted with the second combining face 201.
  • adhesives are applied to fasten the fastening base 100 and the fastening ring 200 securely so as to form a structure with high stability and sustainability.
  • the options of the adhesive are known by skilled in the arts so as to be omitted.
  • the protruded blocks 110 and the fastening base 100 can be formed integrally as a whole, or can be made separately. Several embodiments are described below.
  • FIGs. 3A to 3G are partial enlarged views of the circle 6 shown in FIG. 2B for showing several embodiments of the fastening base 100 of the disclosure respectively.
  • FIG. 3A is an assembled view of the fastening base 100 of the embodiment shown in FIG. 3G and presents one embodiment showing the annular substrate of the fastening base 100 and the protruded blocks 110 are manufactured separately.
  • the protruded blocks 110 are secured on the annular substrate of the fastening base 100 via a plurality of screw bolts 120, and the annular substrate has a plurality of second grooves 102 to receive the protruded blocks 110 and prevent the protruded blocks 110 from shifting.
  • Each protruded block 110 includes a first top face (namely, the top face of the protruded block 110), a first guiding face 111, a first inner lateral face 112, a first outer lateral face 113, a first buckling face 114 and a first through hole 115 (as shown in FIG. 3G ).
  • the first buckling face 114 is tilted from the root portion (namely, the intersection portion of the first buckling face 114 and the first combining face 101) thereof toward the outer side of the protruded block 110 along a plane radially extending from the annular substrate of the fastening base 100 (but embodiments of the disclosure are not limited thereto) and formed as one reversed clamp structure.
  • the first inner lateral face 112 and the first outer lateral face 113 are arc faces extending from the circumference of the fastening base 100, and the curvature radii of the first inner lateral face 112 is smaller than the curvature radii of the first outer lateral face 113.
  • the first top face is the top portion of a plane constituted of the protruded block 110.
  • a tilt angle of the first buckling face 114 is 30 degrees.
  • the first guiding face 111 is the plane radially extending along the fastening base 100 (but embodiments of the disclosure are not limited thereto) and cooperates with the first buckling face 114 to guide the first grooves 210 to securely buckled with the protruded blocks 110.
  • the first guiding face 111 is vertically disposed on the first combining face 101, but embodiments of the disclosure are not limited thereto; the first guiding face 111 can tilt from the root portion (namely, the intersection portion of the first guiding face 111 and the first combining face 101) of the first guiding face 111 toward the inner side of the protruded block 110.
  • the first guiding face 111 is disposed opposite to the first buckling face 114 and is parallel to the first buckling face 114.
  • FIGs. 3B to 3G shows several embodiments of the disclosure.
  • FIG. 3B is a schematic view of one embodiment of the fastening base 100.
  • the protruded blocks 110 are manufactured separately and are fastened on the annular substrate of the fastening base 100 via adhesives.
  • the positions of the protruded blocks 110 are pre-determined on the fastening base 100, and then the adhesives are applied to fasten the protruded blocks 110 with the fastening base 100.
  • the structure of the protruded blocks 110 is the same as mentioned above so as to be omitted.
  • FIG. 3C is a schematic view of another embodiment of the fastening base 100.
  • the protruded blocks 110 are manufactured separately, and each protruded block 110 has a protruded rod 116.
  • a plurality of recessed holes 104 is disposed on the annular substrate of the fastening base 100 in advance for corresponding to the protruded rods 116. Therefore, the protruded rods 116 can be inserted into the recessed holes 104 and fastened on the annular substrate of the fastening base 100 via the adhesives.
  • each protruded block 110 can be positioned precisely, and can be fastened on the fastening base 100 via the adhesives.
  • the structure of the protruded blocks 110 is the same as mentioned above so as to be omitted.
  • FIG. 3D is a schematic view of a further embodiment of the fastening base 100.
  • the protruded blocks 110 are manufactured separately, and are threaded with the annular substrate of the fastening base 100 via the screw bolts 120.
  • the first through holes 115 are opened on the protruded blocks 110 in advance
  • a plurality second through holes 103 is opened on the annular substrate of the fastening base 100 in advance.
  • Each second through hole 103 is corresponding to and is opposite to each corresponding first through hole 115.
  • the adhesives can be applied to enhance the structural strength between the protruded blocks 110 and the annular substrate of the fastening base 100.
  • the structure of the protruded blocks 110 is the same as mentioned above so as to be omitted.
  • FIG. 3E is a schematic view of a yet another embodiment of the fastening base 100.
  • the protruded blocks 110 are manufactured separately, and are attached on the annular substrate of the fastening base 100 via the adhesives.
  • the second grooves 102 are formed on the annular substrate of the fastening base 100 in advance so as to receive the protruded blocks 110 therein.
  • the second grooves 102 are provided to secure and position the protruded blocks 110 transversely, and the adhesives are provided to fasten the protruded blocks 110 with the annular substrate of the fastening base 100 longitudinally. That is to say, each second groove 102 receives each corresponding protruded block 110 so as to prevent each corresponding protruded block 110 from sliding.
  • the structure of the protruded blocks 110 is the same as mentioned above so as to be omitted.
  • FIG. 3F is a schematic view of a still another embodiment of the fastening base 100.
  • the protruded blocks 110 are manufactured separately, and each protruded block 110 has the protruded rod 116.
  • the recessed holes 104 are disposed on the annular substrate of the fastening base 100 in advance for corresponding to the protruded rods 116. Therefore, the protruded rods 116 can be inserted into the recessed holes 104 and fastened on the annular substrate of the fastening base 100 via the adhesives.
  • each protruded block 110 can be positioned precisely, and can be fastened on the fastening base 100 via the adhesives.
  • the second grooves 102 are also formed on the annular substrate of the fastening base 100 in advance so as to receive the protruded blocks 110 therein.
  • the second grooves 102 are provided to secure and position the protruded blocks 110 transversely, and the adhesives are provided to fasten the protruded blocks 110 with the annular substrate of the fastening base 100 longitudinally.
  • the structure of the protruded blocks 110 is the same as mentioned above so as to be omitted.
  • FIG. 3G is a schematic view of another further embodiment of the fastening base 100.
  • the protruded blocks 110 are manufactured separately, and are threaded with the annular substrate of the fastening base 100 via the screw bolts 120.
  • the first through holes 115 are opened on the protruded blocks 110 in advance
  • the second through holes 103 are opened on the annular substrate of the fastening base 100 in advance.
  • the adhesives can be applied to enhance the structural strength between the protruded blocks 110 and the annular substrate of the fastening base 100.
  • the second grooves 102 are also formed on the annular substrate of the fastening base 100 in advance so as to receive the protruded blocks 110 therein.
  • the second grooves 102 are provided to secure and position the protruded blocks 110 transversely, and the adhesives are provided to fasten the protruded blocks 110 with the annular substrate of the fastening base 100 longitudinally.
  • the structure of the protruded blocks 110 is the same as mentioned above so as to be omitted.
  • FIGs. 4A to 4H are the cross-sectional views of FIGs. 3A to 3G respectively, and FIG. 4H is a cross-sectional view for showing the protruded blocks 110 and the annular substrate of the fastening base 100 are formed integrally as a whole.
  • the screw bolt 120 is threaded with the annular substrate of the fastening base 100 via the first through hole 115 and the second through hole 103, and the second groove 102 can receive the protruded block 110 so as to position the protruded block 110.
  • the protruded block 110 is attached on the annular substrate of the fastening base 100 via the adhesives.
  • the protruded block 110 is positioned in the recessed hole 104 via the protruded rod 116, and can be attached on the annular substrate of the fastening base 100 via the adhesives.
  • the screw bolt 120 is threaded with the annular substrate of the fastening base 100 via the first through hole 115 and the second through hole 103.
  • the protruded block 110 is attached on the annular substrate of the fastening base 100 via the adhesives. And, the second groove 102 can receive the protruded block 110 so as to position the protruded block 110.
  • the protruded block 110 is positioned in the recessed hole 104 via the protruded rod 116, and can be attached on the annular substrate of the fastening base 100 via the adhesives. And, the second groove 102 can receive the protruded block 110 so as to position the protruded block 110.
  • the screw bolt 120 is threaded with the annular substrate of the fastening base 100 via the first through hole 115 and the second through hole 102, and the second groove 102 can receive the protruded block 110 so as to position the protruded block 110.
  • the protruded blocks 110 and the annular substrate of the fastening base 100 are formed integrally as a whole.
  • FIGs. 5A to 5B are a partial enlarged view and a cross-sectional view of a fastening ring 200 of the disclosure respectively.
  • the fastening ring 200 has the second combining face 201 and the first grooves 210.
  • the first grooves 210 are annularly aligned on the second combining face 201 and provided receiving spaces for receiving the protruded blocks 110.
  • parts of the flange of each first groove 210 are constituted of a second buckling face 215 (a dove-tail structure) for receiving the first buckling face 114 of the protruded block 110.
  • the second buckling face 215 is tilted from the root portion (namely, the intersection portion of the second buckling face 215 and the second combining face 201) thereof toward the second combining face 201 along a plane radially extending along the fastening ring 200 (but embodiments of the disclosure are not limited thereto) and formed as another reversed clamp structure.
  • the fist buckling face 114 of the protruded block 110 is formed as one reversed clamp structure, and the second buckling face 215 and is formed as another reversed clamp structure and parallel with the first buckling face 114. Therefore, when the adhesives are applied to attach the fastening base 100 with the fastening ring 200, the fastening ring 200 is fastened with the fastening base 100 longitudinally, as shown in FIG. 6A .
  • the first groove 210 is consisting of a second top face 211, a second inner lateral face 212, a second outer lateral face 213, a second guiding face 214 and the second combining face 215.
  • the second top face 211 is the bottom portion of a plane constituted of the first groove 210.
  • the second inner lateral face 212 and the second outer lateral face 213 are arc faces recessed from the circumference of the fastening ring 200, and the curvature radii of the second inner lateral face 212 is smaller than the curvature radii of the second outer lateral face 213.
  • the second buckling face 215 is corresponding to the first buckling face 114 and a tilt angle thereof is 30 degrees; but embodiments of the disclosure are not limited thereto, in some embodiments, the tilt angle of the first buckling face 114 and the tilt angle of the second buckling face 215 can be defined from 1 degree to 60 degrees, and the tilt angle of the first buckling face 114 is the same as the tilt angle of the second buckling face 215, so that the first buckling face 114 is parallel with the second buckling face 215.
  • the second guiding face 214 is the plane radially extending along the fastening ring 200 (but embodiments of the disclosure are not limited thereto); in this embodiment, preferably, the second guiding face 214 is tilted from the root portion (the intersection portion of the second guiding face 214 and the second combining face 201) of the second guiding face 214 toward the inner side of the first groove 210. In one embodiment, the second guiding face 214 is disposed opposite to the second buckling face 215 and is parallel to the second buckling face 215.
  • the axle center of the fastening base 100 is aligned with the axle center of the fastening ring 200, so that the first combining face 101 is aligned with the second combining face 201, the protruded blocks 110 are aligned with the first grooves 210, each first buckling face 114 is aligned with each corresponding second buckling face 215, the intersection portion of each second guiding face 214 and each corresponding top face 211 is aligned with each corresponding first guiding face 111, and the first inner lateral face 112 and the first outer lateral face 113 are aligned with the second inner lateral face 212 and the second outer lateral face 213 respectively.
  • the protruded blocks 110 are positioned with the first grooves 210 respectively. That is to say, the protruded blocks 210 are disposed in the first grooves 210. And then, the fastening base 100 and the fastening ring 200 can be rotated counterclockwise respectively along the circumference thereof, so that the protruded blocks 110 and the first grooves 210 are slid along the first buckling face 114 (or the second buckling face 215) to buckle with each other, so that the fastening ring 200 does not depart from the fastening base 100.
  • the adhesives can be applied to the connection of the fastening base 100 and the fastening ring 200 so as to enhance the fastening force between the fastening base 100 and the fastening ring 200.
  • the first buckling face 114 is tilted leftward from a lateral view of the disclosure, so that when the fastening ring 200 is disposed on the fastening base 100, the fastening ring 200 is rotated counterclockwise so as to let the first grooves 210 receive the protruded blocks 110.
  • the first bucking face 114 is tilted rightward from a lateral view of the disclosure, so that when the fastening ring 200 is disposed on the fastening base 100, the fastening ring 200 is rotated clockwise so as to let the first grooves 210 receive the protruded blocks 110.
  • the structure of the protruded block 110 of the fastening base 100 and the structure of the first groove 210 of the fastening ring 200 can be exchanged. That is to say, the protruded blocks 110 can be manufactured on the fastening ring 200, and the first grooves 210 can be manufactured on the fastening base 100.
  • the structure of the protruded blocks 110 of the fastening ring 200 and the structure of the first groove 210s of the fastening base 100 are the same as mentioned above so as to be omitted.
  • the fastening ring 200 and the fastening base 100 of the chemical mechanical polishing fastening fixture in accordance with the disclosure can be efficiently fastened with each other and easily manufactured, so that the lifetime of the chemical mechanical polishing fastening fixture is elongated.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Connection Of Plates (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)

Claims (7)

  1. Fixation pour polissage chimio-mécanique, comprenant :
    une base de fixation (100), comprenant :
    un substrat annulaire, ayant une première face de combinaison (101) ; et
    une pluralité de blocs en saillie (110), alignés de manière annulaire sur la première face de combinaison (101), chaque bloc en saillie (110) étant composé de sulfure de polyphénylène et comprenant une première face de gauchissement (114), la première face de gauchissement (114) étant inclinée entre une partie de base de celle-ci et un côté extérieur du bloc en saillie (110) le long d'un plan s'étendant radialement depuis le substrat annulaire ; et
    une bague de fixation (200), ayant une seconde face de combinaison (201) et une pluralité de premières rainures (210), les premières rainures (210) étant alignées de manière annulaire sur la seconde face de combinaison (201), des parties d'une collerette de chaque première rainure (210) étant composées d'une seconde face de gauchissement (215), la seconde face de gauchissement (215) étant inclinée entre une partie de base de celle-ci et la seconde face de combinaison (201) ;
    dans laquelle la fixation pour polissage chimio-mécanique est caractérisée en ce que :
    le bloc en saillie (110) comprend en outre une première face de guidage (111), disposée de manière opposée à la première face de gauchissement (114) et parallèle à la première face de gauchissement (114), la première rainure (210) comprend en outre une seconde face de guidage (214), disposée de manière opposée à la seconde face de gauchissement (215), et est parallèle à la seconde face de gauchissement (215), et
    lorsque les blocs en saillie (110) sont disposés dans les premières rainures (210), la base de fixation (100) et la bague de fixation (200) sont configurées pour être tournées dans le sens inverse des aiguilles d'une montre respectivement le long de la circonférence de ceux-ci, de sorte que la première face de gauchissement (114) du bloc en saillie (110) soit gauchie avec la seconde face de gauchissement (215) de la première rainure (210), et la première face de guidage (111) bute contre la seconde face de guidage (214).
  2. Fixation pour polissage chimio-mécanique selon la revendication 1, dans laquelle chaque bloc en saillie (110) possède un premier trou traversant (115), et la première face de combinaison (101) du substrat annulaire possède une pluralité de seconds trous traversants (103), chaque second trou traversant (103) correspondant à et étant opposé à chaque premier trou traversant correspondant (115), un boulon à vis (120) passant par et étant fileté avec le premier trou traversant (115) et le second trou traversant (103), de sorte que le bloc en saillie (110) soit fixé sur le substrat annulaire.
  3. Fixation pour polissage chimio-mécanique selon la revendication 2, dans laquelle le substrat annulaire comprend en outre une pluralité de secondes rainures (102), chaque seconde rainure (102) recevant chaque bloc en saillie correspondant (110) de façon à empêcher chaque bloc en saillie correspondant (110) de glisser.
  4. Fixation pour polissage chimio-mécanique selon la revendication 1, dans laquelle chaque bloc en saillie (110) possède une tige en saillie (116), et la première face de combinaison (101) du substrat annulaire possède une pluralité de trous renfoncés (104), les tiges en saillie (116) étant insérées dans les trous renfoncés (104), de sorte que les blocs en saillie (110) soient fixés sur le substrat annulaire.
  5. Fixation pour polissage chimio-mécanique selon la revendication 4, dans laquelle le substrat annulaire comprend en outre une pluralité de secondes rainures (102), chaque seconde rainure (102) recevant chaque bloc en saillie correspondant de façon à empêcher chaque bloc en saillie correspondant (110) de glisser.
  6. Fixation pour polissage chimio-mécanique selon la revendication 1, dans laquelle un premier angle d'inclinaison défini entre la première face de gauchissement (114) et la seconde face de gauchissement (215) est défini entre 1 degrés et 60 degrés, et la première face de gauchissement (114) est parallèle à la seconde face de gauchissement (215).
  7. Fixation pour polissage chimio-mécanique selon la revendication 1, dans laquelle un second angle d'inclinaison défini entre la première face de guidage (111) et la seconde face de guidage (214) est défini entre 1 degrés et 60 degrés, et la première face de guidage (111) est parallèle à la seconde face de guidage (214).
EP13179742.5A 2013-08-08 2013-08-08 Dispositif de fixation de polissage mécanique chimique et base de fixation Active EP2835218B1 (fr)

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Application Number Priority Date Filing Date Title
EP13179742.5A EP2835218B1 (fr) 2013-08-08 2013-08-08 Dispositif de fixation de polissage mécanique chimique et base de fixation

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Application Number Priority Date Filing Date Title
EP13179742.5A EP2835218B1 (fr) 2013-08-08 2013-08-08 Dispositif de fixation de polissage mécanique chimique et base de fixation

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EP2835218A1 EP2835218A1 (fr) 2015-02-11
EP2835218B1 true EP2835218B1 (fr) 2017-07-26

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Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6974371B2 (en) * 2003-04-30 2005-12-13 Applied Materials, Inc. Two part retaining ring
US7029386B2 (en) * 2004-06-10 2006-04-18 R & B Plastics, Inc. Retaining ring assembly for use in chemical mechanical polishing
CN101331003A (zh) * 2005-05-24 2008-12-24 安格斯公司 化学-机械抛光固定环

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
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