WO2014163121A1 - 電流垂直型磁気抵抗効果素子 - Google Patents
電流垂直型磁気抵抗効果素子 Download PDFInfo
- Publication number
- WO2014163121A1 WO2014163121A1 PCT/JP2014/059778 JP2014059778W WO2014163121A1 WO 2014163121 A1 WO2014163121 A1 WO 2014163121A1 JP 2014059778 W JP2014059778 W JP 2014059778W WO 2014163121 A1 WO2014163121 A1 WO 2014163121A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- layer
- ferromagnetic layer
- substrate
- alloy
- current
- Prior art date
Links
Images
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/33—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only
- G11B5/39—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects
- G11B5/3903—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects using magnetic thin film layers or their effects, the films being part of integrated structures
- G11B5/3906—Details related to the use of magnetic thin film layers or to their effects
- G11B5/3929—Disposition of magnetic thin films not used for directly coupling magnetic flux from the track to the MR film or for shielding
- G11B5/3932—Magnetic biasing films
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R33/00—Arrangements or instruments for measuring magnetic variables
- G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
- G01R33/06—Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
- G01R33/09—Magnetoresistive devices
- G01R33/093—Magnetoresistive devices using multilayer structures, e.g. giant magnetoresistance sensors
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/02—Recording, reproducing, or erasing methods; Read, write or erase circuits therefor
- G11B5/09—Digital recording
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/1278—Structure or manufacture of heads, e.g. inductive specially adapted for magnetisations perpendicular to the surface of the record carrier
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/33—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only
- G11B5/39—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/33—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only
- G11B5/39—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects
- G11B5/3903—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects using magnetic thin film layers or their effects, the films being part of integrated structures
- G11B5/3906—Details related to the use of magnetic thin film layers or to their effects
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N50/00—Galvanomagnetic devices
- H10N50/10—Magnetoresistive devices
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N50/00—Galvanomagnetic devices
- H10N50/80—Constructional details
- H10N50/85—Magnetic active materials
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/33—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only
- G11B5/39—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects
- G11B2005/3996—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects large or giant magnetoresistive effects [GMR], e.g. as generated in spin-valve [SV] devices
Abstract
Description
12 配向層
13 下地層
14 下部強磁性層
15 スペーサ層
16 上部強磁性層
17 キャップ層
Claims (9)
- 表面酸化Si基板、シリコン基板、ガラス基板及び金属基板のうちの少なくとも一種類からなる基板と、
前記基板上に形成された、ホイスラー合金を(100)方向に配向させる配向層と、
前記配向層上に形成された、(100)方向に配向したホイスラー合金の多結晶薄膜よりなる下部強磁性層及び上部強磁性層並びに前記下部強磁性層と前記強磁性層に挟まれたスペーサ層と、
を備えることを特徴とする電流垂直型磁気抵抗効果素子。 - 前記配向層はMgO、TiN及びNiTa合金のうちの少なくとも一種類を含むことを特徴とする請求項1に記載の電流垂直型磁気抵抗効果素子。
- 前記下部強磁性層と前記上部強磁性層は、Co2ABの組成式(式中、AはCr、Mn、Fe、又はこれらのうちの2種類以上を合計の量が1になるように混合したもの、BはAl、Si、Ga、Ge、In、Sn、又はこれらのうちの2種類以上を合計の量が1になるように混合したものである)で表されるホイスラー合金よりなる多結晶薄膜であることを特徴とする請求項1又は2に記載の電流垂直型磁気抵抗効果素子。
- 前記スペーサ層はAg、Al、Cu、Au及びCrからなる群から選ばれた少なくとも一種類の金属又はこれらの合金であること特徴とする請求項1から3のいずれか1項に記載の電流垂直型磁気抵抗効果素子。
- 前記配向層、前記下部強磁性層及び前記上部強磁性層並びにスペーサ層のうちの少なくとも一層はスパッタ法により製膜されたものであること特徴とする請求項1から4のいずれか1項に記載の電流垂直型磁気抵抗効果素子。
- 前記配向層と前記下部強磁性層との間に磁気抵抗測定用の電極である下地層を挟んで設けたこと特徴とする請求項1から5のいずれか1項に記載の電流垂直型磁気抵抗効果素子。
- 前記下地層は金属又は合金よりなること特徴とする請求項6に記載の電流垂直型磁気抵抗効果素子。
- さらに、前記上部強磁性層に積層された、表面保護用のキャップ層を有すること特徴とする請求項1から7のいずれか1項に記載の電流垂直型磁気抵抗効果素子。
- 前記キャップ層はAg、Al、Cu、Au、Ru及びPtからなる群から選ばれた少なくとも一種類の金属又はこれらの合金よりなること特徴とする請求項8に記載の電流垂直型磁気抵抗効果素子。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP14778602.4A EP2983219B1 (en) | 2013-04-05 | 2014-04-02 | Current-perpendicular-to-plane magneto-resistance effect element |
US14/774,987 US9558767B2 (en) | 2013-04-05 | 2014-04-02 | Current-perpendicular-to-plane magneto-resistance effect element |
JP2015510120A JP6137577B2 (ja) | 2013-04-05 | 2014-04-02 | 電流垂直型磁気抵抗効果素子 |
US15/339,094 US9589583B1 (en) | 2013-04-05 | 2016-10-31 | Current-perpendicular-to-plane magneto-resistance effect element |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2013-079344 | 2013-04-05 | ||
JP2013079344 | 2013-04-05 |
Related Child Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US14/774,987 A-371-Of-International US9558767B2 (en) | 2013-04-05 | 2014-04-02 | Current-perpendicular-to-plane magneto-resistance effect element |
US15/339,094 Continuation US9589583B1 (en) | 2013-04-05 | 2016-10-31 | Current-perpendicular-to-plane magneto-resistance effect element |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2014163121A1 true WO2014163121A1 (ja) | 2014-10-09 |
Family
ID=51658412
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/JP2014/059778 WO2014163121A1 (ja) | 2013-04-05 | 2014-04-02 | 電流垂直型磁気抵抗効果素子 |
Country Status (4)
Country | Link |
---|---|
US (2) | US9558767B2 (ja) |
EP (1) | EP2983219B1 (ja) |
JP (1) | JP6137577B2 (ja) |
WO (1) | WO2014163121A1 (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10205091B2 (en) | 2015-12-04 | 2019-02-12 | National Institute For Materials Science | Monocrystalline magneto resistance element, method for producing the same and method for using same |
US10403425B2 (en) | 2015-12-02 | 2019-09-03 | The Board Of Trustees Of The University Of Alabama | Layered Heusler alloys and methods for the fabrication and use thereof |
Families Citing this family (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6438636B1 (ja) | 2017-03-03 | 2018-12-19 | Tdk株式会社 | 磁気抵抗効果素子 |
US10559749B2 (en) | 2017-03-03 | 2020-02-11 | Tdk Corporation | Magnetoresistive effect element |
JP6943019B2 (ja) | 2017-05-26 | 2021-09-29 | Tdk株式会社 | 磁気抵抗効果素子、磁気ヘッド、センサ、高周波フィルタ及び発振素子 |
CN110800057B (zh) * | 2017-06-28 | 2023-04-18 | 威斯康星州男校友研究基金会 | 基于4d和5d过渡金属钙钛矿的磁性存储器设备 |
US10453598B2 (en) | 2017-06-29 | 2019-10-22 | Tdk Corporation | Magnetoresistive effect element, magnetic head, sensor, high frequency filter, and oscillation element |
JP6962103B2 (ja) | 2017-09-26 | 2021-11-05 | Tdk株式会社 | 積層体、磁気抵抗効果素子、磁気ヘッド、センサ、高周波フィルタ及び発振素子 |
JP2019102799A (ja) | 2017-12-05 | 2019-06-24 | Tdk株式会社 | 磁気抵抗効果素子 |
JP2020155432A (ja) | 2019-03-18 | 2020-09-24 | Tdk株式会社 | 磁気抵抗効果素子 |
JP6806939B1 (ja) | 2019-08-08 | 2021-01-06 | Tdk株式会社 | 磁気抵抗効果素子およびホイスラー合金 |
JP6806200B1 (ja) | 2019-08-08 | 2021-01-06 | Tdk株式会社 | 磁気抵抗効果素子およびホイスラー合金 |
JP6806199B1 (ja) | 2019-08-08 | 2021-01-06 | Tdk株式会社 | 磁気抵抗効果素子およびホイスラー合金 |
US11730063B2 (en) | 2019-12-17 | 2023-08-15 | Tdk Corporation | Magnetoresistive effect element including a Heusler alloy layer with a crystal region and an amorphous region |
CN113036032A (zh) | 2019-12-24 | 2021-06-25 | Tdk株式会社 | 磁阻效应元件 |
JP7434962B2 (ja) | 2020-02-05 | 2024-02-21 | Tdk株式会社 | 磁気抵抗効果素子 |
CN115211000A (zh) | 2020-03-02 | 2022-10-18 | 福尔肯电力有限责任公司 | 采用可调Halbach磁体阵列的可变转矩生成电机 |
JP2022016846A (ja) | 2020-07-13 | 2022-01-25 | Tdk株式会社 | 磁気抵抗効果素子 |
JP2023013057A (ja) | 2021-07-15 | 2023-01-26 | Tdk株式会社 | 磁気抵抗効果素子 |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2005116701A (ja) | 2003-10-06 | 2005-04-28 | Alps Electric Co Ltd | 磁気検出素子 |
JP2010212631A (ja) | 2009-03-12 | 2010-09-24 | Fujitsu Ltd | 磁気抵抗効果素子および磁気記憶装置 |
JP2010229477A (ja) * | 2009-03-26 | 2010-10-14 | Tohoku Univ | ホイスラー合金材料、磁気抵抗素子および磁気デバイス |
JP2011035336A (ja) | 2009-08-06 | 2011-02-17 | National Institute For Materials Science | 電流垂直型巨大磁気抵抗(cpp−gmr)素子 |
JP2012190914A (ja) * | 2011-03-09 | 2012-10-04 | Tohoku Univ | 磁気抵抗効果素子および磁気デバイス |
JP2013247259A (ja) * | 2012-05-28 | 2013-12-09 | Mitsubishi Electric Corp | 磁気抵抗効果素子、磁界検出器および物理量検出器 |
Family Cites Families (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4487472B2 (ja) * | 2002-07-05 | 2010-06-23 | 株式会社日立製作所 | 磁気抵抗効果素子、及びこれを備える磁気ヘッド、磁気記録装置、磁気メモリ |
JP2005116703A (ja) * | 2003-10-06 | 2005-04-28 | Alps Electric Co Ltd | 磁気検出素子 |
KR100624417B1 (ko) * | 2004-01-31 | 2006-09-18 | 삼성전자주식회사 | 터널링 자기 저항 소자 |
KR100612854B1 (ko) * | 2004-07-31 | 2006-08-21 | 삼성전자주식회사 | 스핀차지를 이용한 자성막 구조체와 그 제조 방법과 그를구비하는 반도체 장치 및 이 장치의 동작방법 |
JP4580966B2 (ja) * | 2007-08-24 | 2010-11-17 | 株式会社東芝 | ホイスラー合金を有する積層体、この積層体を用いたスピンmos電界効果トランジスタ及びトンネル磁気抵抗効果素子 |
JP4956514B2 (ja) * | 2008-09-19 | 2012-06-20 | 株式会社東芝 | 半導体装置 |
JP4764466B2 (ja) * | 2008-09-25 | 2011-09-07 | 株式会社東芝 | ホイスラー合金を有する積層体、この積層体を用いた磁気抵抗素子、及びスピントランジスタ |
JP4738499B2 (ja) * | 2009-02-10 | 2011-08-03 | 株式会社東芝 | スピントランジスタの製造方法 |
JP5534766B2 (ja) * | 2009-06-19 | 2014-07-02 | Tdk株式会社 | スピントロニック素子のスピンバルブ構造およびその形成方法、ボトム型スピンバルブ構造、ならびにマイクロ波アシスト磁気記録用スピントロニック素子 |
US8331063B2 (en) * | 2009-07-10 | 2012-12-11 | Tdk Corporation | Magnetoresistive effect element in CPP-type structure and magnetic disk device |
US8879214B2 (en) * | 2011-12-21 | 2014-11-04 | HGST Netherlands B.V. | Half metal trilayer TMR reader with negative interlayer coupling |
US8836056B2 (en) * | 2012-09-26 | 2014-09-16 | Intel Corporation | Perpendicular MTJ stacks with magnetic anisotropy enhancing layer and crystallization barrier layer |
JP5695697B2 (ja) * | 2013-05-09 | 2015-04-08 | 株式会社東芝 | 磁気抵抗効果素子、磁気ヘッド、磁気記録再生装置、および磁気抵抗効果素子の製造方法 |
JP6455804B2 (ja) * | 2014-02-12 | 2019-01-23 | Tdk株式会社 | 磁性素子 |
-
2014
- 2014-04-02 WO PCT/JP2014/059778 patent/WO2014163121A1/ja active Application Filing
- 2014-04-02 JP JP2015510120A patent/JP6137577B2/ja not_active Expired - Fee Related
- 2014-04-02 EP EP14778602.4A patent/EP2983219B1/en not_active Not-in-force
- 2014-04-02 US US14/774,987 patent/US9558767B2/en not_active Expired - Fee Related
-
2016
- 2016-10-31 US US15/339,094 patent/US9589583B1/en not_active Expired - Fee Related
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2005116701A (ja) | 2003-10-06 | 2005-04-28 | Alps Electric Co Ltd | 磁気検出素子 |
JP2010212631A (ja) | 2009-03-12 | 2010-09-24 | Fujitsu Ltd | 磁気抵抗効果素子および磁気記憶装置 |
JP2010229477A (ja) * | 2009-03-26 | 2010-10-14 | Tohoku Univ | ホイスラー合金材料、磁気抵抗素子および磁気デバイス |
JP2011035336A (ja) | 2009-08-06 | 2011-02-17 | National Institute For Materials Science | 電流垂直型巨大磁気抵抗(cpp−gmr)素子 |
JP2012190914A (ja) * | 2011-03-09 | 2012-10-04 | Tohoku Univ | 磁気抵抗効果素子および磁気デバイス |
JP2013247259A (ja) * | 2012-05-28 | 2013-12-09 | Mitsubishi Electric Corp | 磁気抵抗効果素子、磁界検出器および物理量検出器 |
Non-Patent Citations (3)
Title |
---|
APPL. PHYS. LETT., vol. 100, 2012, pages 052405 |
APPL. PHYS. LETT., vol. 101, 2012, pages 252408 |
See also references of EP2983219A4 |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10403425B2 (en) | 2015-12-02 | 2019-09-03 | The Board Of Trustees Of The University Of Alabama | Layered Heusler alloys and methods for the fabrication and use thereof |
US10205091B2 (en) | 2015-12-04 | 2019-02-12 | National Institute For Materials Science | Monocrystalline magneto resistance element, method for producing the same and method for using same |
US10749105B2 (en) | 2015-12-04 | 2020-08-18 | National Institute For Materials Science | Monocrystalline magneto resistance element, method for producing the same and method for using same |
Also Published As
Publication number | Publication date |
---|---|
JP6137577B2 (ja) | 2017-05-31 |
US20160019917A1 (en) | 2016-01-21 |
JPWO2014163121A1 (ja) | 2017-02-16 |
EP2983219A1 (en) | 2016-02-10 |
EP2983219A4 (en) | 2016-11-30 |
EP2983219B1 (en) | 2018-03-28 |
US9589583B1 (en) | 2017-03-07 |
US20170092307A1 (en) | 2017-03-30 |
US9558767B2 (en) | 2017-01-31 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP6137577B2 (ja) | 電流垂直型磁気抵抗効果素子 | |
CN108352447B (zh) | 于高温退火后保持高矫顽力的具有垂直磁各向异性的磁性组件 | |
US10205091B2 (en) | Monocrystalline magneto resistance element, method for producing the same and method for using same | |
JP6105817B2 (ja) | 温度センサのためのナノ磁性多層膜とその製造方法 | |
EP3002755B1 (en) | Tunneling magnetoresistive (tmr) device with mgo tunneling barrier layer and nitrogen-containing layer for minimization of boron diffusion | |
JP6419825B2 (ja) | 磁気抵抗素子、当該磁気抵抗素子を用いた磁気ヘッド及び磁気再生装置 | |
JP6866694B2 (ja) | 磁気抵抗効果素子 | |
JP6444276B2 (ja) | 磁気抵抗素子、その用途及び製造方法、並びにホイスラー合金の製造方法 | |
CN112349832B (zh) | 磁阻效应元件以及惠斯勒合金 | |
JP2019033106A (ja) | 面直通電巨大磁気抵抗素子用積層膜、面直通電巨大磁気抵抗素子、及びその用途 | |
JP6774124B2 (ja) | 磁気抵抗素子、当該磁気抵抗素子を用いた磁気ヘッド及び磁気再生装置 | |
WO2010125641A1 (ja) | トンネル磁気抵抗効果素子、それを用いた磁気メモリセル及びランダムアクセスメモリ | |
JP6661096B2 (ja) | 磁気抵抗素子、当該磁気抵抗素子を用いた磁気ヘッド及び磁気再生装置 | |
JP6967259B2 (ja) | 高感度面直通電巨大磁気抵抗素子、及びその用途 | |
WO2021186693A1 (ja) | 磁気抵抗効果素子 | |
US20230084970A1 (en) | Tunneling magnetoresistive (tmr) device with improved seed layer | |
JP2022132288A (ja) | 磁気抵抗効果素子 | |
JP2021144988A (ja) | 磁気抵抗効果素子 | |
JP2018148006A (ja) | 単結晶磁気抵抗素子、その製造方法及びこれを用いたデバイス | |
JP2009065040A (ja) | 磁性材料及びそれを用いた磁気抵抗素子 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
121 | Ep: the epo has been informed by wipo that ep was designated in this application |
Ref document number: 14778602 Country of ref document: EP Kind code of ref document: A1 |
|
ENP | Entry into the national phase |
Ref document number: 2015510120 Country of ref document: JP Kind code of ref document: A |
|
WWE | Wipo information: entry into national phase |
Ref document number: 14774987 Country of ref document: US |
|
WWE | Wipo information: entry into national phase |
Ref document number: 2014778602 Country of ref document: EP |
|
NENP | Non-entry into the national phase |
Ref country code: DE |