JP6962103B2 - 積層体、磁気抵抗効果素子、磁気ヘッド、センサ、高周波フィルタ及び発振素子 - Google Patents
積層体、磁気抵抗効果素子、磁気ヘッド、センサ、高周波フィルタ及び発振素子 Download PDFInfo
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Description
・コンタクト用金属層8:Ru、5nm、(3nm以上8nm以下)
・キャップ用非磁性金属層7:Ag、5nm、(3nm以上8nm以下)
・第2の強磁性層6:CMS(コバルトマンガンシリコン合金)、5nm、(3nm以上20nm以下)
・第2の中間層5C:NiAlX合金(上記のNiγ1Alγ2Xγ3)1nm、(0.1nm以上15nm以下)
・非磁性金属層5B: Ag、5nm、(3nm以上10nm以下)
・第1の中間層5A:NiAlX合金(上記のNiγ1Alγ2Xγ3)、1nm、(0.1nm以上15nm以下)
・第1の強磁性層4:CMS(コバルトマンガンシリコン合金)、10nm、(3nm以上20nm以下)
・第2非磁性金属層3:Ag、50nm、(20nm以上100nm以下)
・第1非磁性金属層2:Cr、20nm、(10nm以上30nm以下)
・第1基材層1:MgO、0.5mm(0.1mm以上2mm以下)
・第2の中間層5C:Niγ1Alγ2Xγ3、10nm
・非磁性金属層5B:Ag、100nm
・第1基材層1:MgO、0.5mm
・第2の中間層5C:なし
・非磁性金属層5B:Ag、100nm
・第1基材層1:MgO、0.5mm
・第2の強磁性層6:Co2TiSn、5nm
・第2の中間層5C:NbNi2Al、50nm
・非磁性金属層5B:Cu、50nm
・第1基材層1:MgO、0.5mm
・第2の強磁性層6:Co2Mn1.3Si0.95、5nm
・第2の中間層5C:NbNi2Al、50nm
・非磁性金属層5B:Cu、50nm
・第1基材層1:MgO、0.5mm
・第2の強磁性層6:Co2Mn1.3Si0.95、5nm
・第2の中間層5C:NbNi2Al、50nm
・非磁性金属層5B:Ag、50nm
・第1基材層1:MgO、0.5mm
・第2の強磁性層6:Co2Mn1.3Si0.95、5nm
・第2の中間層5C:Cr0.66Ni0.67Al0.67、50nm
・非磁性金属層5B:Ag、50nm
・第1基材層1:MgO、0.5mm
・第2の強磁性層6:Co2Mn1.3Si0.95、5nm
・第2の中間層5C:CrNi2Al、50nm
・非磁性金属層5B:Ag、50nm
・第1基材層1:MgO、0.5mm
・第2の強磁性層6:Co2TiSn、5nm
・非磁性金属層5B:Cu、50nm
・第1基材層1:MgO、0.5mm
・第2の強磁性層6:Co2Mn1.3Si0.95、5nm
・第2の中間層5C:CrNi2Al(0.1nm〜50nm)
・非磁性金属層5B:Ag、50nm
・第1基材層1:MgO、0.5mm
・コンタクト用金属層8:Ru、5nm
・キャップ用非磁性金属層7:Ag、5nm
・第2の強磁性層6:Co2LαMβ(L=Mn、M=Si)、5nm
・第2の中間層5C:CrNi2Al、1nm
・非磁性金属層5B:Ag、5nm
・第1の中間層5A:CrNi2Al、1nm
・第1の強磁性層4:Co2LαMβ(L=Mn、M=Si)、10nm
・第2非磁性金属層3:Ag、50nm
・第1非磁性金属層2:Cr、20nm
・第1基材層1:MgO、0.5mm
0.7<α<1.6 …(2−1)、
0.65<β<1.35 …(2−2)、
2<α+β<2.6 …(2−3)。
なお、上記と同様の観点から、以下の範囲が更に好ましい。
0.75≦β≦1.25 …(2−2’)、
2.05≦α+β≦2.55 …(2−3’)。
第1の中間層5A及び第2の中間層5Cを、NiAl合金及びNiAlX合金の積層構造としたものである。なお、非磁性金属層5Bと接するようにNiAl合金、NiAl合金と強磁性層との間にNiAlX合金が積層されている。第1の強磁性層4及び第2の強磁性層6として、Co2Mn1.0Si0.95を用いた場合であり、その他の材料及び膜厚は以下の通りである。
・コンタクト用金属層8:Ru、5nm
・キャップ用非磁性金属層7:Ag、5nm
・第2の強磁性層6:CMS(コバルトマンガンシリコン合金)、5nm
・第2の中間層5C:NiAl合金とNiAlX合金の積層(非磁性金属層5B側にNiAl合金)、各0.5nmで合計1nm
・非磁性金属層5B:Ag、5nm
・第1の中間層5A:NiAl合金とNiAlX合金の積層(非磁性金属層5B側にNiAl合金)、各0.5nmで合計1nm
・第1の強磁性層4:CMS(コバルトマンガンシリコン合金)、10nm
・第2非磁性金属層3:Ag、50nm
・第1非磁性金属層2:Cr、20nm
・第1基材層1:MgO、0.5mm
Claims (13)
- 非磁性金属層上に位置する積層体であって、
強磁性層と、
前記非磁性金属層と前記強磁性層との間に介在する中間層と、
を備え、
前記中間層は、
下記一般式(1):
Niγ1Alγ2Xγ3 …(1)、
[Xは、Si、Sc、Ti、Cr、Mn、Fe、Co、Cu、Zr、Nb及びTaからなる群より選択される1以上の元素を表し、γ=γ3/(γ1+γ2+γ3)とした場合に、0<γ<0.5を満たす]
で表されるNiAlX合金層を含み、
γ3の値は、面内方向又は厚み方向に沿って変化する、
積層体。 - 非磁性金属層上に位置する積層体であって、
強磁性層と、
前記非磁性金属層と前記強磁性層との間に介在する中間層と、
を備え、
前記中間層は、
下記一般式(1):
Niγ1Alγ2Xγ3 …(1)、
[Xは、Si、Sc、Ti、Cr、Mn、Fe、Co、Cu、Zr、Nb及びTaからなる群より選択される1以上の元素を表し、γ=γ3/(γ1+γ2+γ3)とした場合に、0<γ<0.5を満たす]
で表されるNiAlX合金層を含み、
前記強磁性層は、
Lを、Mn及びFeからなる群から選択される1以上の元素とし、
Mを、Si、Al、Ga及びGeからなる群より選択される1以上の元素とし、
α及びβを正の値とした場合に、
下記一般式(2):
Co2LαMβ …(2)、
で表されるホイスラー合金を含む、
積層体。 - 非磁性金属層上に位置する積層体であって、
強磁性層と、
前記非磁性金属層と前記強磁性層との間に介在する中間層と、
を備え、
前記中間層は、
下記一般式(1):
Niγ1Alγ2Xγ3 …(1)、
[Xは、Si、Sc、Ti、Cr、Mn、Fe、Co、Cu、Zr、Nb及びTaからなる群より選択される1以上の元素を表し、γ=γ3/(γ1+γ2+γ3)とした場合に、0<γ<0.5を満たす]
で表されるNiAlX合金層を含み、
γ3の値は、前記強磁性層から、その厚み方向に沿って離れるに従って減少する、
積層体。 - 前記非磁性金属層は、Ag、Cr、Al、Au及びNiAlからなる群から選択される1以上の元素を含む、
請求項1〜3いずれか一項に記載の積層体。 - 前記NiAlX合金層におけるXは、
Si、Cr、Fe、Co、及びZrからなる群より選択される1以上の元素である、
請求項1〜4のいずれか一項に記載の積層体。 - 前記一般式(1)において、
0<γ<0.3を満たす、
請求項1〜5のいずれか一項に記載の積層体。 - 前記NiAlX合金層の厚さをt1としたとき、
0.2nm≦t1≦10nmを満たす、
請求項1〜6のいずれか一項に記載の積層体。 - 前記一般式(2)で表されるホイスラー合金において、
α及びβは、以下の関係式(2−1)、(2−2)、(2−3):
0.7<α<1.6 …(2−1)、
0.65<β<1.35 …(2−2)、
2<α+β<2.6 …(2−3)、
を満たす、
請求項2に記載の積層体。 - 請求項1〜8のいずれか一項に記載の積層体を備えた磁気抵抗効果素子。
- 請求項9に記載の磁気抵抗効果素子を備えた磁気ヘッド。
- 請求項9に記載の磁気抵抗効果素子を備えたセンサ。
- 請求項9に記載の磁気抵抗効果素子を備えた高周波フィルタ。
- 請求項9に記載の磁気抵抗効果素子を備えた発振素子。
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
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JP2017184943A JP6962103B2 (ja) | 2017-09-26 | 2017-09-26 | 積層体、磁気抵抗効果素子、磁気ヘッド、センサ、高周波フィルタ及び発振素子 |
US16/138,031 US10921392B2 (en) | 2017-09-26 | 2018-09-21 | Stacked structure, magnetoresistive effect element, magnetic head, sensor, high frequency filter, and oscillator |
CN201811113397.XA CN109560192B (zh) | 2017-09-26 | 2018-09-25 | 层叠结构、磁阻效应元件、磁头、传感器、高频滤波器以及振荡器 |
CN202211376632.9A CN115666208A (zh) | 2017-09-26 | 2018-09-25 | 层叠结构、磁阻效应元件、磁头、传感器、高频滤波器以及振荡器 |
US17/148,686 US11422211B2 (en) | 2017-09-26 | 2021-01-14 | Stacked structure, magnetoresistive effect element, magnetic head, sensor, high frequency filter, and oscillator |
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JP6806200B1 (ja) * | 2019-08-08 | 2021-01-06 | Tdk株式会社 | 磁気抵抗効果素子およびホイスラー合金 |
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JP2022016846A (ja) * | 2020-07-13 | 2022-01-25 | Tdk株式会社 | 磁気抵抗効果素子 |
CN115572923B (zh) * | 2022-09-09 | 2023-07-21 | 北京航空航天大学 | 一种基于原位电阻测量获得铝合金非等温时效制度的方法 |
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