WO2011151004A1 - Système de manipulation pour la manipulation d'objets - Google Patents

Système de manipulation pour la manipulation d'objets Download PDF

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Publication number
WO2011151004A1
WO2011151004A1 PCT/EP2011/002278 EP2011002278W WO2011151004A1 WO 2011151004 A1 WO2011151004 A1 WO 2011151004A1 EP 2011002278 W EP2011002278 W EP 2011002278W WO 2011151004 A1 WO2011151004 A1 WO 2011151004A1
Authority
WO
WIPO (PCT)
Prior art keywords
telescopic arm
drive
handling system
telescopic
holding
Prior art date
Application number
PCT/EP2011/002278
Other languages
German (de)
English (en)
Inventor
Michael Freund
Robert Eschmann
Lukas Küffer
Original Assignee
Festo Ag & Co. Kg
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Festo Ag & Co. Kg filed Critical Festo Ag & Co. Kg
Priority to DE212011100058U priority Critical patent/DE212011100058U1/de
Priority to CN201180027642.5A priority patent/CN102905996B/zh
Priority to KR1020127029602A priority patent/KR20130094192A/ko
Publication of WO2011151004A1 publication Critical patent/WO2011151004A1/fr

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/061—Lifting, gripping, or carrying means, for one or more sheets forming independent means of transport, e.g. suction cups, transport frames
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/067—Sheet handling, means, e.g. manipulators, devices for turning or tilting sheet glass
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
    • H01L21/67742—Mechanical parts of transfer devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
    • H01L21/67748—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber horizontal transfer of a single workpiece

Definitions

  • the invention relates to a handling system for handling in particular plate-shaped objects, comprising a transport device which has at least one transfer unit which has object holding means which can be moved horizontally by carrying out a linear transfer movement, and which has drive means for producing the transfer movement.
  • Such handling systems are used, inter alia, in the solar and flat panel industry and serve there for handling plate-shaped objects, in particular to be coated glass plates.
  • DE 10 2005 039 453 AI describes a processing plant for processing flat substrates, which is equipped with a handling system of the type mentioned.
  • This known handling system has a transport device which has a plurality of guideways on which transfer units are mounted in such a way by means of guide carriages that they can be moved into a plurality of processing stations and there in each case opposite a processing module
  • Each transfer unit includes a flat box which defines a transfer chamber in which, for example, circulating steel belts are housed, which function as article holding means realized in the form of support means and on which the respective one to be handled Subject is filed.
  • a corresponding drive of these steel belts an object lying thereon is displaced transversely to the direction of travel of the transfer units and can be introduced into a processing module.
  • an article to be transferred as it is transferred to a processing module, gradually leaves the article holding means, compromising its stability and adversely affecting the accuracy of positioning of the article in the processing module.
  • a device for loading and unloading a press which is equipped with movable between different positions trolley.
  • Each trolley is provided on both longitudinal sides with clamping and suction devices, which are supported by movable transversely to the direction of travel of the trolley telescopic arms.
  • the telescopic arms allow the clamping and suction units to be positioned above plates to raise or lower them as needed.
  • the transfer unit has a support structure and at least one of the support having carried structure telescopic arm unit, wherein the Te ⁇ leskoparmaji includes a plurality in the direction of transfer movement relative to each other and relative to the support structure displaceable, parallel telescopic arms, including a drivable by the drive means drive telescopic arm and the object holding means exhibiting holding telescopic arm is located, wherein the drive telescopic arm and any telescopic arm disposed between the drive telescopic arm and the telescopic arm telescopic arm is equipped with a coupling device which contains a deflection around herum formaten, bend flexible tension cord, said arranged on the drive telescopic arm tension cord both with respect to the support structure as well as with respect to the adjacent him telescopic arm is fixed in place and wherein the holding telescopic arm is fixed in place with respect to the tension cord of the adjacent telescopic arm.
  • Umpositioniervorganges to be fixed to the article-holding means. This ensures optimum stability during article transfer and high precision when depositing at a designated location.
  • a part of the transfer unit namely the telescopic arms, carry along the transfer movement and may be able to move laterally beyond the usually remaining supporting structure and an object, for example a glass plate, with permanent support to a place next to the transfer unit, for example, in a processing module to spend.
  • the transfer unit can be kept very narrow transversely to the direction of the transfer movement, which allows the openings of possibly associated processing modules with a very small cross section in order to minimize the influence on the inside of the processing module atmosphere during the duration of opening by external influences.
  • An article to be transferred is held to the article support means disposed on the support telescoping arm and, together with them, is caused to move linearly by activating drive means engaging the drive telescoping arm.
  • the drive means cause a linear process of the drive telescopic arm, which due to the at least one existing coupling device has the effect that all other telescopic arms, including the holding telescopic arm, also perform a linear movement relative to the telescopic arm carrying them, which ultimately, based on the movement of the drive telescopic arm, a displacement and speed translation result.
  • the transfer unit has only two telescopic arms, namely a drive telescopic arm and a holding telescopic arm
  • the holding telescopic arm moves at twice the speed of the support structure acting as a base and twice as long as the drive telescopic arm.
  • With a total of three telescopic arms per Telekoparmisme results in a translation by the factor "3".
  • the telescopic arm unit is equipped with only two telescopic arms or with more than two telescopic arms depends in particular on the desired transfer distance and transfer speed.
  • the at least one telescopic arm unit contains a total of three telescopic arms, namely a drive telescopic arm, provided with an object holding means holding telescopic arm and an intermediate intermediate telescopic arm arranged therebetween.
  • the respective coupling device has a flexurally flexible, for example rope-shaped or band-shaped tensile strand, which is wrapped around deflecting means, in particular roll-shaped deflecting means. It is possible, the pull cord in one piece or in several parts, in particular from several successive Buchstrangabitesen, form.
  • the latter opens up the possibility of biasing one of the tension cord sections by means of a spring so that strains can be compensated by elasticity or temperature.
  • the transport device preferably contains a
  • Positioning device on which the at least one transfer unit is arranged and which makes it possible to move and position the transfer unit in a direction perpendicular to the transfer movement horizontal direction or in a vertical direction or both horizontally and vertically. In this way, repositioning objects can be moved with high flexibility in space.
  • a particularly advantageous construction of the telescopic arm unit provides that the existing telescopic arms are arranged horizontally next to one another transversely to their longitudinal axes. In this way, a small overall height of the telescopic arm unit can be realized. Particularly advantageous is a pertinent arrangement that extend all telescopic arms at least approximately in a common horizontal plane.
  • Adjacent telescopic arms are conveniently linear guide means linearly displaceable supported each other. Darü beyond the drive telescopic arm can also be slidably mounted by linear guide means on the support structure. This results in a high stability of the telescopic arm unit.
  • the linear guide means expediently each comprise at least one guide rail and at least one guide carriage mounted linearly displaceably on the guide rail and supported in the transverse direction.
  • the interaction of guide rail and guide carriage is effected by plain bearing means and / or rolling bearing means.
  • the linear guide means are preferably arranged transversely to their longitudinal axes horizontally next to each other, which allows the A attitude of a low overall height of the transfer unit All linear guide means may, for example, at least approaching in a common horizontal plane.
  • the drive means are expediently equipped with a drive unit which at least one in the direction having the transfer movement extending linear drive.
  • This linear drive is fixed in place on the support structure and has a drivable to a linear output movement driven part which is coupled for movement with the drive telescopic arm.
  • the drive unit electrically actuated, in particular equipped with an electric servomotor or stepper motor, a design is preferred in which the drive unit has at least one fluid-operated and preferably rodless linear drive.
  • a fluid-actuated linear drive has the advantage that it is easily vacuum-compatible, which ensures particularly universal application possibilities.
  • the drive unit is equipped with at least two parallel-connected and drive-coupled linear drives.
  • the at least one transfer unit could be equipped with only a single telescopic arm unit.
  • a design is considered to be particularly advantageous which has at least two telescoping arm units arranged horizontally next to each other transversely to the direction of the transfer movement and which are arranged together on one and the same support structure.
  • These two or more than two telescoping arm units are drivingly synchronized, so that their holding telescopic arms equipped with article-holding means are always synchronously extendable and retractable.
  • the double arrangement of Teleskoparmicaen offers the advantageous possibility of a particularly stable and precise support of objects to be transported, while high torsional rigidity and small footprint.
  • the telescopic arm units are in particular arranged horizontally next to one another in such a way that, in the extended state, they protrude laterally in the manner of an at least two-pronged fork over the preferably plate-shaped support structure.
  • the drive unit is, as seen in a vertical plan view of the transfer unit, expediently arranged between the two telescopic arm units, preferably centrally between these two telescopic arm units. Then, the drive telescopic arms of both telescopic arm units are coupled for movement via at least one driver to the output part of the at least one linear drive of the drive unit.
  • a driver at least one flexible strand, such as a steel cable or a steel strip, can be used.
  • a permanently particularly high precision with relatively simple production offers a design in which the driver is designed like a strut and rigidly connects the drive telescopic arms while bridging the space between them.
  • This driver may for example be designed plate-shaped. It may extend above or, preferably, below the drive unit past the latter, wherein it may be fastened to the output part of the at least one linear drive.
  • the transfer unit has, in the retracted state of the at least one telescopic arm unit, a starting outline that can be labeled as a base outline.
  • a starting outline that can be labeled as a base outline.
  • both the object holding means and the drive means are located.
  • the at least one telescopic arm unit is advantageously ensured that in the extended State of the telescopic arm while the drive means continue to lie within the base outline, the telescopic arm unit (s) and in particular the article-holding means, however, at least partially protrude laterally beyond the base outline. In this way, an object held on the article-holding means, which in the retracted state of the telescoping arm unit (s) lies within the base outline, can be completely transferred out of the base outline, while retaining the support of the object carrying it. holding means.
  • the article-holding means are in particular realized as a support means on which the object to be transported can be placed, so that it is retained for example due to friction.
  • the article may be undermined and then lifted by the article-holding means for its picking up.
  • the support means are arranged on the upwardly facing longitudinal side of the holding telescopic arm, selectively distributed support elements formed, which may consist of an elastically yielding material.
  • the article holding means can also be designed as gripping means.
  • they can consist of one or more suction pads, which hold a transportable object with negative pressure.
  • grippers are electrostatic grippers, as described for example in DE 102 32 080 AI or WO 2004/077531 AI.
  • these article-holding means may for example be arranged exclusively on the at least one holding telescopic arm be.
  • article holding means which have a holding plate which is equipped, for example, with support elements arranged on the upper side or with gripping means of the previously described kind arranged on the underside.
  • the holding plate may for example be attached to the top or bottom of the holding telescopic arms. It is also possible to operate the transfer unit with 180 ° orientation.
  • the at least one transfer unit is equipped with position detection means, in particular in the form of a position measuring system, with which the current position of the object holding means can be detected directly or indirectly.
  • the position detection device cooperates expediently with a drive telescopic arm.
  • the handling system can be readily conceived such that the telescoping arm units are horizontally extendable and positionable relative to the preferably plate-like support structure starting from a retracted basic position in two opposite directions.
  • processing modules arranged on opposite sides of a transfer unit and, for example, to take objects from a processing module arranged on one side of the transfer unit and to feed into a processing module arranged on the other side of the transfer unit to hand over.
  • a movement stop in the retracted home position is not mandatory.
  • FIG. 1 shows a partially schematized plan view of a preferred embodiment of the handling system according to the invention in connection with a processing plant, wherein the existing Teleskoparmikien are shown in the retracted basic position and wherein a transportable plat- tenförmiger object is indicated by dash-dotted lines,
  • Figure 2 is an end view of the arrangement of Figure 1 with
  • FIG. 3 shows a side view of the transfer unit present in the handling system of FIGS. 1 and 2, looking in the direction of arrow III from FIG. 1,
  • FIG. 4 shows a top view of the transfer unit shown in FIGS. 1 to 3 in an intermediate position of the telescopic arm units, which lies between the retracted basic position and the extended end position, wherein an object to be transferred is again shown with a dot-dash line
  • FIG. 4 is a side view of the transfer unit from FIG. 4 looking in the direction of arrow V
  • a top view of the transfer unit with telescopic arm units moved into the extended end position and with dash-dotted illustration of an article to be transferred a side view of the transfer unit from FIG. 6 looking in the direction of arrow VII
  • an end view of FIG 1 a schematic side view of the transfer unit with viewing direction according to arrow II in the retracted basic position of a transport unit
  • FIG. 1 shows a schematic side view of the transfer unit, as seen in the transfer unit of FIGS.
  • FIG. 10 shows the arrangement from FIG. 9 with the telescopic arm unit partially extended in accordance with a side view according to arrow V from FIG. 4, and FIG.
  • Figure 11 shows the arrangement of Figures 9 and 10 in a side view according to arrow VII of Figure 6 for the illustration of the extended end position of a Teleskoparmiser.
  • FIG. 1 schematically shows a detail of a processing device 1 in which objects 2, in particular flat or plate-shaped objects 2, can be processed.
  • the processing Device for a device for coating glass plates in the solar and / or flat screen industry.
  • the processing device 1 contains, by way of example, a loading / unloading module 3 and a plurality of processing modules 4, which are arranged lying one after the other in a row.
  • a handling system 5 is arranged, which is able to remove objects to be processed 2 from the loading / unloading module 3 and spend in one of the processing modules 4, and to remove after processing from the respective processing module 4 and again to return to the loading / unloading module 3 for slipping out of the processing device 1.
  • the handling system 5 can also be used for repositioning objects 2 between different processing modules 4.
  • An essential component of the handling system 5 is a transport device designated in its entirety by reference numeral 6.
  • the same comprises at least one transfer unit 7 and expediently also serving for the desired method and positioning of the transfer unit 7
  • the positioning device 8 has a linear guide 12, which enables a process of the transfer unit 7 in a horizontal, first traversing direction 13.
  • the transfer unit 7 is expediently mounted on the linear guide 12 by means of a lifting device 14, which makes it possible to move the transfer unit 7 in a direction perpendicular to the first direction of travel 13, vertical second travel direction 15.
  • One or more drive means, not shown, of the positioning device 8 allow the travel drive of the transfer unit 7 in order to be able to cause the said movement movements 13, 15.
  • the transfer unit 7 can be moved along the row of modules 3, 4 in order to be able to position each of the modules 3, 4 horizontally opposite one another. If all the modules 3, 4 are at the same height, the vertical second movement possibility 15 of the transfer unit 7 can be dispensed with.
  • a transfer unit 7 is intended to serve only a single module or two modules located opposite one another on opposite sides of the transfer unit, the horizontal and / or vertical movement possibilities of the transfer unit 7 can also be dispensed with. In this case, one saves a consuming constructed positioning 8.
  • Each module 3, 4 has a not shown, normally closed opening, which faces the transport device 6.
  • the transport unit 7 can be positioned in the exemplary embodiment by methods in the first direction of travel 13 so that it faces one of the openings of the modules 3, 4.
  • the loading / unloading module 3 serves to feed and dispose plate-shaped objects 2 to be processed.
  • the transfer unit 7 can pick up an item 2 located in the loading / unloading module 3, bring it out, move it into the area opposite a processing module 4 and then, after having previously released the associated opening, insert it into the selected processing module 4 and place it there. In this way, an object 2 can be transferred between the loading / unloading module 3 and a processing module 4. Reverse transfers are also possible and also subject transfers between different processing modules
  • the transfer unit 7, which may be present once or several times, contains an expediently plate-shaped and preferably horizontally oriented support structure 16. This exemplarily defines a horizontally extending, vertically upwardly pointing support plane 16a. About this support structure 16, the transfer unit 7 is fixed to the positioning device 8. In other words, it works
  • Positioning device 8 on the support structure 16 is able to move selbige in the first direction of travel 13 and, optionally, in the second direction of travel 15.
  • the support structure 16 carries in the region of the supporting plane 16a two telescopic arm units 17, 18, each containing a plurality of telescopic arms 22 which are movable relative to each other and also each with respect to the support structure 16 by executing a direction indicated by a double arrow linear transfer movement 23.
  • the transfer movement 23 is oriented horizontally and, in the exemplary embodiment, runs at right angles to the first travel direction 13 and also to the optional second travel direction 15.
  • Each telescopic arm 22 has a longitudinal shape. All telescopic arms 22 are aligned with their longitudinal direction parallel to the transfer movement 23.
  • the two transfer units 17, 18 transversely and in particular at right angles to the direction of
  • Transfer movement 23 arranged at a distance horizontally next to each other.
  • the support structure 16 carries together both Teleskoparmiseren 17, 18th
  • each telescopic arm unit 17, 18 contains a total of three telescopic arms 22. Specifically, these are a drive telescopic arm 22a, a holding telescopic arm 22c and an intermediate these two telescopic arms 22a, 22c arranged intermediate telescopic arm 22b.
  • the drive telescopic arm 22a is mounted so as to be linearly displaceable on the support structure 16 by means of first linear guide means 24a for carrying out the transfer movement 23.
  • first linear guide means 24a for carrying out the transfer movement 23.
  • adjacent telescopic arms 22a, 22b, 22c are mounted so as to be linearly displaceable relative to one another and, secondly, that the drive telescopic arm 22a is displaceably mounted on the support structure 16.
  • each telescopic arm 22 is expediently shaped like a spar, although it can be composed of several components.
  • the designation of the "holding telescopic arm” 22c is due to the fact that it is equipped with article holding means 25 in the embodiment of its vertically upwardly facing upper side.
  • support means 25 designed as support means can also be directly from the upwardly facing, in particular flat, outer surface of the holding telescopic arm 22c It is expedient if the article holding means 25 designed as a support means have non-slip properties.
  • the object holding means 25 allow the loose laying of the object to be transferred 2.
  • An object to be transferred or transported 2 is thus placed from above on the two Teleskoparmismeen 17, 18, where at he, as illustrated in the drawing, the bridged between the adjacent Teleskoparmikien 17, 18 intermediate space 26 and rests on the object - holding means 25 of both holding telescopic arms 22c rattle safely.
  • the article-holding means 25 may for example also be designed as gripping means which engage an object to be transferred, in particular from below or from above.
  • gripping means are realized, for example, in the form of vacuum grippers or on the basis of electrostatic grippers. Also mechanical grippers are possible.
  • the gripping means may, as in the embodiment, the support means, be arranged at the top of the respective holding telescopic arm, wherein the Teleskoparmikien or the entire transfer unit 7, depending on whether an object is to be taken from below or from above, either in the Orientation shown in the drawing operates or in a rotated by 180 ° orientation, - so quasi upside down - so that in the embodiment facing upwards side of the holding telescopic arms facing down.
  • the transfer movement 23 can be caused by drive means 27.
  • the latter are arranged by way of example on the support structure 16, in particular on the support plane 16a, and are in drive connection with each drive telescopic arm 22a.
  • Each adjacent directly telescoping arms 22a, 22b; 22b, 22c are each drivingly coupled by a coupling device 28. By this coupling is achieved that from the caused by the drive means 27 transfer movement 23 of the drive telescopic arm 22a a
  • Transfer movement 23 of the subsequent intermediate telescopic arm 22b is generated, wherein from the transfer movement 23 of this intermediate telescopic arm 22b, the transfer movement 23 of the holding telescopic arm 22c is generated.
  • a first coupling device 28 arranged on the drive telescopic arm 22a has two deflection means 32 arranged at an axial distance from one another on the drive telescopic arm 22a, preferably in the form of deflection rollers rotatably mounted on the drive telescopic arm 22a, and a loop wrapped around these two deflection means 32.
  • bend-flexible tension cord 33 is in particular a rope or a band, preferably of metal or of a high-tensile plastic material. Shown is a one-piece variant of the pull string 33, but this may readily consist of several successively arranged strand parts or strand sections.
  • a comparably formed further coupling device 28 is arranged, whose component Nenten in the drawing with identical reference numerals.
  • Each tensile strand 33 can execute a reciprocating orbital movement (double arrow 30) about the deflection means 32 that it is looped around.
  • strand spaces 33a, 33b extending between the deflection means 32 each move in one or the other direction of the transfer movement 23.
  • Each tensile strand 33 has, by way of example, a first strand strand 33a and a second strand strand 33b.
  • the tensile strand 33 arranged on the drive telescopic arm 22a is fixed in a stationary manner with its first strand strand 33a to at least one fastening point 34 on the support structure 16.
  • the second strand run 33b of this tensile strand 33 is fixed in place on at least one second attachment point 35 on the telescopic arm 22 adjacent to the drive telescopic arm 22a, which by way of example is the intermediate telescopic arm 22b.
  • the tension cord 33 of the intermediate telescopic arm 22b As far as the tension cord 33 of the intermediate telescopic arm 22b is concerned, its first strand strand 33a is fixedly fixed to the intermediate telescopic arm 22b at at least one third attachment point 36b and its second strand strand 33b is fixed to the retaining telescopic arm 22c at at least one fourth attachment point 37 ,
  • the latter means that the holding telescopic arm 22c is fixed at least stationary with respect to the tension cord 33 of the adjacent telescopic arm 22, which is formed in the embodiment of the intermediate telescopic arm 22b.
  • the stationary fixation of the holding device takes place. Teleskoparmes 22a accordingly at the second strand strand 33b of the drive -Teleskoparm 22a arranged pull string 33rd
  • attachment tabs 38 which are able to bridge existing distances.
  • each telescopic arm unit 17, 18 starting from the basic position by corre sponding activation of the drive means 27 optionally in the egg ne or other axial direction.
  • the transport device 6 is able to operate modules 3, 4 arranged on both sides of the transfer unit 7.
  • the transfer unit 7 in a plan view from above, it has in the retracted state of the telescopic arm units 17, 18, as shown in FIGS. 1 to 3 and 9, a base outline 42 defined in the embodiment by the outline of the plate-shaped support structure 16.
  • a base outline 42 defined in the embodiment by the outline of the plate-shaped support structure 16.
  • both the object-holding means 25 and the drive means 27 are located in an outline. More precisely, in the retracted basic position, both telescopic arm units 17, 18 are arranged completely within the base contour 42.
  • the transfer unit 7 easily in the first Moving direction 13 along the laterally arranged adjacent modules 3, 4 are moved.
  • FIGS. 4, 5 and 10 show how the article holding means 25 gradually move sideways out of the base outline 42 when the telescoping arm units 17, 18 are actuated.
  • FIGS. 4, 5 and 10 illustrate an intermediate position, in which the article support means 25 lie partially outside the base outline 42.
  • the transfer unit 7 assumes a position opposite the opening of a module 3, 4 and if the opening of the respective module 3, 4 is released, the telescopic arm units 17, 18 completely engage the object holding means 25 when the extended end position is taken up , 4 on.
  • an object 2 can be easily removed from a module 3, 4 or stored in a module 3, 4, wherein it is held stationary during the entire transfer to the article-holding means 25.
  • the object-holding means 25 are retracted in the lowered position in the second travel direction 15 of the transfer unit 7 into the relevant module until they are below the male object 2, whereupon they are lifted until the article 2 rests on the article holding means 25. Now the telescopic arm unit 17, 18 can be moved out together with the resting object 2 from the relevant module 3, 4.
  • the deposition of an object 2 in a module 3, 4 is done in reverse sequence of movements.
  • the article holding means 25 are used together with the article 2 in the Transfer direction 23 retracted into the module 3, 4.
  • the transfer unit 7 and consequently the article holding means 25 are lowered so that the object 2 is deposited on support means arranged within the module 3, 4 and subsequently the telescope arm units 17, 18 are moved out of the module 3, 4 without article 2 can be.
  • the article holding means 25 are designed as gripping means which can grasp an object from above, the at least one holding telescopic arm 22c for receiving an article 2 above it is retracted into a module 3, 4.
  • the transfer unit 7 can then be lowered for a short time.
  • the at least one holding telescopic arm 22 c is retracted with object 2 hanging thereon in the relevant module, whereupon the generated gripping force is removed, so that the object 2 dissolves.
  • the drop can be combined with a short-term vertical movement.
  • the two Teleskoparmismeen 17, 18 extend from the base outline 42, they have in the embodiment together the structure of a two-pronged fork.
  • Each Teleskoparmiser 17, 18 corresponds to a forks, the interposed space 26 is preferably completely free.
  • the intermediate space 26 existing between adjacent telescopic arm units 17, 18 is at least partially occupied at least in that area in which the holding telescopic arms 22c are located.
  • the object holding means 25 in this case have a holding plate which adjoins the holding telescopic arms 22c. Barter Teleskoparmikien 17, 18 is fixed while bridging the gap 26.
  • either supporting means for placing the object to be transported can be present on this holding plate or gripping means for actively gripping the object 2 to be transferred.
  • a plurality of gripping units can be provided as gripping means, which are distributed over the holding plate over a large area and which, for example, as Suction gripper or designed as electrostatic grippers or as a mechanical gripper. In this way, an object to be handled can be detected over a large area and thus very securely, even if it is relatively thin.
  • the mentioned holding plate would be expediently arranged on the vertically upward-facing side, in particular in such a way that it extends over a plurality of holding telescopic arms 22c and bridges the intermediate space 26 therebetween. If the transfer unit 7 in this case be equipped with gripping means which engage an object 2 from above, one will use the Teleskoparmismeen 17, 18 and suitably the entire transfer unit 7, however, in a reversed position by 180 °. As a result, the objects to be transferred can be conveniently transported suspended below the transfer unit.
  • the drive means designated in its entirety by reference numeral 27 preferably include a drive unit 43, which has at least one in the direction of the transfer movement 23 extending linear drive 44, 45.
  • This at least one linear drive 44, 45 is with respect to the support Structure 16 fixed in place and in particular attached to the upwardly facing support plane 16 a of the support structure 16.
  • the drive unit 43 is preferably arranged centrally between the two Teleskoparmiseren 17, 18, wherein it extends parallel to these.
  • the drive unit 43 lies entirely within the base outline 42.
  • the drive unit 43 includes two with parallel alignment side by side arranged side by side linear actuators 44, 45. In this way, in a compact size, a high driving force can be generated.
  • the drive unit 43 could in principle consist of one or more electrical drives, for example, an electric servomotor or stepper motor.
  • an electric servomotor or stepper motor for example, an electric servomotor or stepper motor.
  • a refinement in fluid-actuated design has proved to be particularly advantageous, in particular in the form of a pneumatically actuatable drive unit 43.
  • the linear drives 44, 45 expediently each have an elongated, fixed to the support structure 16 stator 46 and a relative to the stator 46 in its longitudinal direction linearly movable output member 47.
  • the stator 46 is attached to the support structure 16.
  • the output member 47 can be driven to a coincident with the direction of the transfer movement 23 output motion.
  • each stator 46 consists of a tubular body in which a linearly displaceable by fluid actuation drive piston is arranged, which is coupled in motion with the outside of the stator 46 linearly displaceably arranged driven part 47.
  • This motion coupling can be mechanical, however, is advantageously carried out in an embodiment contactless in that the drive piston is coupled in motion with the output member 47 by a magnetic permanent magnet magnetic means.
  • Such a system has the advantage that it can be performed absolutely fluid-tight, since there are no dynamic seals with respect to the drive fluid.
  • the two linear drives 44, 45 are functionally connected in parallel, thus driving the Teleskoparmiseren 17, 18 each at the same time and in the same direction.
  • the two drive telescopic arms 22a are drivingly connected to the driven parts 47 in synchronously drivable manner.
  • the drive connection is expediently realized by means of a rigid driver 48 which extends striven * perpendicular to the transfer direction 23 between the two drive -Teleskoparmen 22a, wherein it bridges the gap 26 and is rigidly attached to both drive telescopic arms 22a.
  • the driver 48 is plate-shaped or strip-shaped, wherein it extends either above or below the driven parts 47 transversely to these.
  • the two output members 47 are passed by the driver 48 below. Lead the
  • driver 48 for example one or more cable-shaped or band-shaped drivers which have a drive connection between them. see the create at least one output member 47 and a respec conditions drive telescopic arm 22a.
  • Such ropes or bands are suitably made of steel.
  • each telescopic arm unit 17, 18 are expediently arranged horizontally next to each other transversely to their longitudinal axes and thus transversely to the transfer direction 23. In this case, they can in particular extend at least approximately in a common horizontal plane 52 indicated in FIG.
  • Such a longitudinally adjacent arrangement de telescopic arms 22 allows compliance with very small height dimensions for the Teleskoparmiser 17, 18th
  • linear guide means 24a, 24b, 24c are arranged horizontally next to each other horizontally to their longitudinal axes, whereby they also expediently extend at least approximately in a common horizontal plane 52 Kings NEN.
  • the two drive telescopic arms 22a are expediently located on the outside, while the holding telescopic arms 22c are located on the inside.
  • the term "inside” is to be understood as that longitudinal side of each telescope unit 17 18, which faces the respective other telescope unit 18, 17.
  • linear guide means 24a, 24b, 24c each have at least one and preferably exactly one linearly extending guide rail 53 and at least one on this guide rail 23 linearly displaceably mounted and supported in the transverse direction guide carriage 54.
  • the guide rail 53 is fixed to the one, the guide carriage 54 at the other of the relative zuei each other to be stored components.
  • the guide rail 53 of the first linear guide means 24a is arranged on the support structure 16. It sits in particular on the upwardly facing side of a towering from the support structure 16 supporting spar 55.
  • the associated guide carriage 54 is fixed to the drive telescopic arm 22a.
  • the guide rail 53 of the second linear guide means 24b is fastened on the drive telescopic arm 22a, expediently on a longitudinal side pointing toward the other telescopic arm unit 17 or 18.
  • the associated guide carriage 54 is fixed to the intermediate telescopic arm 22b.
  • Each guide carriage 54 expediently overlaps the associated guide rail 53 in a rider-like manner.
  • each guide carriage 54 may be U-shaped.
  • the guide carriages 54 are oriented so that their U-openings are directed downwards in the case of the first linear guide means 24a and, in the case of the second and third linear guide means 24b, 24c, in the direction of the guide Carriage 54 of the first linear guide means 24a are oriented.
  • the transfer unit 7 expediently has position detection means 56.
  • the same are preferably realized in the form of a position measuring system, with which any position of the object holding means 25 in the
  • Transfer direction 23 can detect.
  • the position of the object holding means 25 is expediently not detected directly, but only indirectly, by detecting the position of at least one drive telescopic arm 22a. Since there is a fixed relationship between the relative movements of the individual telescopic arms 22 of each telescopic arm unit 17, 18, the position detection of a drive telescopic arm 22a can very precisely affect the position of the object holding means 25 or the holding telescopic arms 22c having these object holding means 25 getting closed.
  • the position detecting means 56 are suitably arranged alongside a telescopic arm unit 18, one of which is arranged on the support structure 16 and the other on the drive telescopic arm 22a of the components of the position detecting means 56 to be moved relative to each other.
  • the particular advantage of the telescopic arm system 17, 18 realized in the exemplary embodiment is the optimum adaptation to the spatial and technical conditions of the application.
  • By using two Teleskoparmakuen 17, 18 is used optimally with little effort of the available space, whereby an optionally existing vacuum chamber of the processing apparatus 1 relative can be made small.
  • all of its components are under vacuum, with very high temperatures prevailing in the process chambers present in the processing modules 3.
  • the fluidically and in particular pneumatically actuated drive means 27 are particularly predestined.
  • the transfer unit 7 in the direction of the transfer movement 23 can be made very narrow.
  • the width of the transfer unit 7 is very low in the retracted basic position of the telescopic arm 17, 18.
  • the telescopic arm units 17, 18 can advantageously be extended either in one direction or the other.
  • the drive means 27 are expediently designed so that the at least one driven part 47 in the retracted basic position occupies a central position between the two oriented in the axial direction of the transfer movement 23 end faces of the Teleskoparmismeen 17, 18.
  • the driven parts 47 travel either in the direction of the one or the other side edge of the support structure 16, starting from the middle position.
  • each telescopic arm unit 17, 18 can be summarized in particular to the effect that in each case at least one based on a cable principle coupling device 28 is present.
  • About particular designed as pulleys guide 32 is formed by means of rope or band-shaped tension cords a closed ring. At this pulley then the two are relative to each other attached to moving components of each immediately adjacent telescopic arms 22.
  • the next telescopic arm coupled thereto moves at twice the speed and twice the travel distance.
  • the third telescopic arm functioning as the holding telescopic arm 22c moves as compared to the first telescopic arm 22 forming the drive telescopic arm 22a at three times the speed of the triple path "3s".

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Robotics (AREA)
  • Manipulator (AREA)
  • Specific Conveyance Elements (AREA)

Abstract

L'invention concerne un appareil de manipulation pour la manipulation d'objets en forme de plaques, comportant au moins une unité de transfert (7) munie de moyens de maintien d'objets (25) pouvant être déplacés horizontalement à l'aide d'un mouvement de transfert (23) linéaire. L'unité de transfert (7) dispose en outre d'une structure porteuse (16) et d'au moins une unité à bras télescopiques (18) portée par celle-ci. L'unité à bras télescopiques (18) est constituée de plusieurs bras télescopiques (22) qui sont reliés entre eux en entraînement au moyen de dispositifs de couplage (28). Les dispositifs de couplage (28) comprennent un câble de traction (33) flexible, circulant autour de moyens de renvoi (32). Cette structure permet de déplacer les moyens de maintien d'objets (25) sur une distance relativement importante, malgré la conception étroite de l'unité de transfert (7).
PCT/EP2011/002278 2010-06-04 2011-05-06 Système de manipulation pour la manipulation d'objets WO2011151004A1 (fr)

Priority Applications (3)

Application Number Priority Date Filing Date Title
DE212011100058U DE212011100058U1 (de) 2010-06-04 2011-05-06 Handhabungssystem zur Handhabung von Gegenständen
CN201180027642.5A CN102905996B (zh) 2010-06-04 2011-05-06 用于操纵物品的操纵系统
KR1020127029602A KR20130094192A (ko) 2010-06-04 2011-05-06 물체들을 핸들링하기 위한 핸들링 시스템

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DE102010022625.4 2010-06-04
DE102010022625A DE102010022625A1 (de) 2010-06-04 2010-06-04 Handhabungssystem zur Handhabung von Gegenständen

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KR (1) KR20130094192A (fr)
CN (1) CN102905996B (fr)
DE (2) DE102010022625A1 (fr)
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DE202016100689U1 (de) 2016-02-11 2016-03-03 Analytik Jena Ag Kartesische Transportvorrichtung
US11955364B2 (en) 2021-01-22 2024-04-09 Kimball Electronics Indiana, Inc. Telescoping linear extension robot

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DE102014209684B4 (de) * 2014-05-21 2023-06-29 Siemens Healthcare Gmbh Medizinisches Untersuchungs- und/oder Behandlungsgerät
CN105016043B (zh) * 2015-07-07 2019-08-30 中国核电工程有限公司 一种用于热室之间的物料转运装置
KR102491718B1 (ko) * 2016-03-04 2023-01-27 주식회사 케이씨텍 기판이송장치
DE102017106309B3 (de) * 2016-12-05 2018-02-22 Bystronic Lenhardt Gmbh Handhabungsvorrichtung für eine Glasplatte
EP3369684A1 (fr) * 2017-03-03 2018-09-05 Swisslog Evomatic GMBH Procédé et dispositif destinés à préparer un article
AT520277A1 (de) * 2017-08-14 2019-02-15 Josef Muser Ing Lineare auszugseinheit
CN109436938B (zh) * 2018-11-28 2021-02-02 潍坊凯德塑料机械有限公司 塑料管材在线自动换卷切割捆扎卸卷装置
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TWI730695B (zh) 2020-03-27 2021-06-11 潤弘精密工程事業股份有限公司 傳送板件之傳送機
CN111348367A (zh) * 2020-04-27 2020-06-30 北京极智嘉科技有限公司 一种取货箱设备
CN113130967B (zh) * 2021-03-29 2022-09-23 广东利元亨智能装备股份有限公司 一种电芯封装机构、电芯封装物流线及电芯翻折转运方法

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20150274420A1 (en) * 2012-10-22 2015-10-01 Grenzebach Maschinenbau Gmbh Apparatus and method for quickly transferring plates
DE202016100689U1 (de) 2016-02-11 2016-03-03 Analytik Jena Ag Kartesische Transportvorrichtung
US11955364B2 (en) 2021-01-22 2024-04-09 Kimball Electronics Indiana, Inc. Telescoping linear extension robot

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Publication number Publication date
DE102010022625A1 (de) 2011-12-08
DE212011100058U1 (de) 2012-11-13
KR20130094192A (ko) 2013-08-23
CN102905996A (zh) 2013-01-30
CN102905996B (zh) 2015-11-25

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