CN102905996B - 用于操纵物品的操纵系统 - Google Patents

用于操纵物品的操纵系统 Download PDF

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Publication number
CN102905996B
CN102905996B CN201180027642.5A CN201180027642A CN102905996B CN 102905996 B CN102905996 B CN 102905996B CN 201180027642 A CN201180027642 A CN 201180027642A CN 102905996 B CN102905996 B CN 102905996B
Authority
CN
China
Prior art keywords
telescopic boom
telescopic
arm elements
article
buanch unit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN201180027642.5A
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English (en)
Chinese (zh)
Other versions
CN102905996A (zh
Inventor
M.弗罗因德
R.埃施曼
L.屈费尔
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Festo SE and Co KG
Original Assignee
Festo SE and Co KG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Festo SE and Co KG filed Critical Festo SE and Co KG
Publication of CN102905996A publication Critical patent/CN102905996A/zh
Application granted granted Critical
Publication of CN102905996B publication Critical patent/CN102905996B/zh
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
    • H01L21/67742—Mechanical parts of transfer devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/061—Lifting, gripping, or carrying means, for one or more sheets forming independent means of transport, e.g. suction cups, transport frames
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/067—Sheet handling, means, e.g. manipulators, devices for turning or tilting sheet glass
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
    • H01L21/67748—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber horizontal transfer of a single workpiece

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Robotics (AREA)
  • Manipulator (AREA)
  • Specific Conveyance Elements (AREA)
CN201180027642.5A 2010-06-04 2011-05-06 用于操纵物品的操纵系统 Expired - Fee Related CN102905996B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102010022625.4 2010-06-04
DE102010022625A DE102010022625A1 (de) 2010-06-04 2010-06-04 Handhabungssystem zur Handhabung von Gegenständen
PCT/EP2011/002278 WO2011151004A1 (fr) 2010-06-04 2011-05-06 Système de manipulation pour la manipulation d'objets

Publications (2)

Publication Number Publication Date
CN102905996A CN102905996A (zh) 2013-01-30
CN102905996B true CN102905996B (zh) 2015-11-25

Family

ID=44358341

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201180027642.5A Expired - Fee Related CN102905996B (zh) 2010-06-04 2011-05-06 用于操纵物品的操纵系统

Country Status (4)

Country Link
KR (1) KR20130094192A (fr)
CN (1) CN102905996B (fr)
DE (2) DE102010022625A1 (fr)
WO (1) WO2011151004A1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP4032665A1 (fr) * 2021-01-22 2022-07-27 Kimball Electronics Indiana, Inc. Robot d'extension linéaire télescopique

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102012020679B4 (de) * 2012-10-22 2022-01-05 Grenzebach Maschinenbau Gmbh Verfahren und Vorrichtung zum schnellen Versetzen von Platten
JP6349853B2 (ja) * 2013-06-27 2018-07-04 株式会社デンソーウェーブ 産業用ロボット
DE102014001406A1 (de) 2014-02-04 2015-08-06 Festo Ag & Co. Kg Transportvorrichtung
AT515565B1 (de) * 2014-04-08 2015-12-15 Swisslog Evomatic Gmbh Regalbediengerät zur Ein- und Auslagerung eines Ladeguts in ein Regal
DE102014209684B4 (de) * 2014-05-21 2023-06-29 Siemens Healthcare Gmbh Medizinisches Untersuchungs- und/oder Behandlungsgerät
CN105016043B (zh) * 2015-07-07 2019-08-30 中国核电工程有限公司 一种用于热室之间的物料转运装置
DE202016100689U1 (de) 2016-02-11 2016-03-03 Analytik Jena Ag Kartesische Transportvorrichtung
KR102491718B1 (ko) * 2016-03-04 2023-01-27 주식회사 케이씨텍 기판이송장치
DE102017106309B3 (de) * 2016-12-05 2018-02-22 Bystronic Lenhardt Gmbh Handhabungsvorrichtung für eine Glasplatte
EP3369684A1 (fr) * 2017-03-03 2018-09-05 Swisslog Evomatic GMBH Procédé et dispositif destinés à préparer un article
AT520277A1 (de) * 2017-08-14 2019-02-15 Josef Muser Ing Lineare auszugseinheit
CN109436938B (zh) * 2018-11-28 2021-02-02 潍坊凯德塑料机械有限公司 塑料管材在线自动换卷切割捆扎卸卷装置
DE102019119228A1 (de) * 2019-07-16 2021-01-21 Strothmann Machines & Handling GmbH Linearförderer zum Umsetzen von Werkstücken zwischen zwei in einer Durchlaufrichtung aufeinanderfolgenden Positionen
DE102019006503A1 (de) * 2019-09-16 2021-03-18 Satisloh Ag Ladesystem für eine Optikmaschine, insbesondere zum Laden und Entladen optischer Werkstücke, wie Brillengläser, und Abblockvorrichtung umfassend ein solches Ladesystem
TWI730695B (zh) 2020-03-27 2021-06-11 潤弘精密工程事業股份有限公司 傳送板件之傳送機
CN111348367A (zh) * 2020-04-27 2020-06-30 北京极智嘉科技有限公司 一种取货箱设备
CN113130967B (zh) * 2021-03-29 2022-09-23 广东利元亨智能装备股份有限公司 一种电芯封装机构、电芯封装物流线及电芯翻折转运方法

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JP2664354B2 (ja) * 1995-07-21 1997-10-15 シーケーディ株式会社 多段スライド装置
CN1574271A (zh) * 2003-05-30 2005-02-02 东京毅力科创株式会社 基板运送装置和基板运送方法以及真空处理装置
TWM281944U (en) * 2005-06-15 2005-12-01 De-Zheng Chen Improved structure of transportation cartridge for glass substrate for liquid crystal display panel manufacturing operation
CN1740084A (zh) * 2004-08-27 2006-03-01 村田机械株式会社 搬运装置
CN101088908A (zh) * 2006-06-13 2007-12-19 大福株式会社 滑动式叉装置
CN101131169A (zh) * 2006-08-26 2008-02-27 费斯托合资公司 带有重负荷导向机构的线性驱动装置
DE202008011687U1 (de) * 2008-09-02 2008-10-30 Grenzebach Maschinenbau Gmbh Vorrichtung zum Zwischenlagern von Glasplatten für photovoltaische Module
JP2009034783A (ja) * 2007-08-02 2009-02-19 Denso Corp 内面研削パターン設定装置、内面研削装置、内面研削パターン設定方法、内面研削方法及びプログラム

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DE1925367U (de) * 1964-08-12 1965-10-14 Ver Flugtechnische Werke Ges M Hoehenverstellbare arbeitsbuehne.
BE899228A (nl) * 1984-03-23 1984-07-16 Tecnomatix N V Telescoop voor een portaalrobot en andere.
FR2611826B1 (fr) * 1987-02-25 1989-06-16 Masseron Alain Bras telescopique pouvant etre concu sous forme demontable
CH675762A5 (fr) * 1988-10-03 1990-10-31 Peter Huerlimann
DE9110687U1 (de) * 1991-08-29 1991-10-10 Hauser Elektronik GmbH, 7600 Offenburg Linearantrieb
FR2709745B1 (fr) * 1993-09-08 1995-10-20 Productique Cie Gle Système de préhension à fourches télescopiques à double profondeur.
DE19606132A1 (de) * 1996-02-20 1997-08-21 Dieffenbacher Gmbh Maschf Verfahren und Vorrichtung zum Beschicken und Entleeren einer Kurztaktpresse
JP2001300883A (ja) * 2000-04-20 2001-10-30 Kawasaki Heavy Ind Ltd ロボット
DE10232080B4 (de) 2002-07-15 2015-10-01 Integrated Dynamics Engineering Gmbh Elektrostatischer Greifer und Verfahren zu dessen Herstellung
WO2004077531A1 (fr) 2003-02-25 2004-09-10 Technische Universität München Dispositif pour saisir, maintenir et orienter avec un faible contact des composants plats sensibles aux contacts
DE102005039453B4 (de) 2005-08-18 2007-06-28 Asys Automatic Systems Gmbh & Co. Kg Bearbeitungsanlage modularen Aufbaus für flächige Substrate
JP4999144B2 (ja) * 2006-01-26 2012-08-15 株式会社ソディック サーボモータ駆動装置
US20100070077A1 (en) * 2008-09-15 2010-03-18 Xyz Automation Programmed calibration and mechanical impulse response application iin robotic automation systems

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2664354B2 (ja) * 1995-07-21 1997-10-15 シーケーディ株式会社 多段スライド装置
CN1574271A (zh) * 2003-05-30 2005-02-02 东京毅力科创株式会社 基板运送装置和基板运送方法以及真空处理装置
CN1740084A (zh) * 2004-08-27 2006-03-01 村田机械株式会社 搬运装置
TWM281944U (en) * 2005-06-15 2005-12-01 De-Zheng Chen Improved structure of transportation cartridge for glass substrate for liquid crystal display panel manufacturing operation
CN101088908A (zh) * 2006-06-13 2007-12-19 大福株式会社 滑动式叉装置
CN101131169A (zh) * 2006-08-26 2008-02-27 费斯托合资公司 带有重负荷导向机构的线性驱动装置
JP2009034783A (ja) * 2007-08-02 2009-02-19 Denso Corp 内面研削パターン設定装置、内面研削装置、内面研削パターン設定方法、内面研削方法及びプログラム
DE202008011687U1 (de) * 2008-09-02 2008-10-30 Grenzebach Maschinenbau Gmbh Vorrichtung zum Zwischenlagern von Glasplatten für photovoltaische Module

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP4032665A1 (fr) * 2021-01-22 2022-07-27 Kimball Electronics Indiana, Inc. Robot d'extension linéaire télescopique

Also Published As

Publication number Publication date
KR20130094192A (ko) 2013-08-23
DE102010022625A1 (de) 2011-12-08
CN102905996A (zh) 2013-01-30
WO2011151004A1 (fr) 2011-12-08
DE212011100058U1 (de) 2012-11-13

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PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
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GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20151125

Termination date: 20160506