WO2011021557A1 - 分光モジュール及びその製造方法 - Google Patents
分光モジュール及びその製造方法 Download PDFInfo
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- WO2011021557A1 WO2011021557A1 PCT/JP2010/063648 JP2010063648W WO2011021557A1 WO 2011021557 A1 WO2011021557 A1 WO 2011021557A1 JP 2010063648 W JP2010063648 W JP 2010063648W WO 2011021557 A1 WO2011021557 A1 WO 2011021557A1
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- Prior art keywords
- layer
- diffraction
- grating pattern
- light
- diffraction grating
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- 238000004519 manufacturing process Methods 0.000 title claims description 13
- 238000004611 spectroscopical analysis Methods 0.000 title abstract description 9
- 239000010410 layer Substances 0.000 claims description 105
- 239000000463 material Substances 0.000 claims description 21
- 239000011347 resin Substances 0.000 claims description 19
- 229920005989 resin Polymers 0.000 claims description 19
- 230000003595 spectral effect Effects 0.000 claims description 14
- 239000011241 protective layer Substances 0.000 claims description 10
- 210000001217 buttock Anatomy 0.000 claims description 2
- 238000003825 pressing Methods 0.000 claims description 2
- 238000000926 separation method Methods 0.000 abstract 1
- 239000000758 substrate Substances 0.000 description 32
- 238000001514 detection method Methods 0.000 description 22
- 230000031700 light absorption Effects 0.000 description 10
- 230000015572 biosynthetic process Effects 0.000 description 8
- 238000000034 method Methods 0.000 description 5
- 230000035945 sensitivity Effects 0.000 description 4
- 239000011521 glass Substances 0.000 description 3
- 229910052737 gold Inorganic materials 0.000 description 3
- 239000002356 single layer Substances 0.000 description 3
- 229910018885 Pt—Au Inorganic materials 0.000 description 2
- 230000003111 delayed effect Effects 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 239000010453 quartz Substances 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 230000000087 stabilizing effect Effects 0.000 description 2
- RZVAJINKPMORJF-UHFFFAOYSA-N Acetaminophen Chemical compound CC(=O)NC1=CC=C(O)C=C1 RZVAJINKPMORJF-UHFFFAOYSA-N 0.000 description 1
- 239000004925 Acrylic resin Substances 0.000 description 1
- 229920000178 Acrylic resin Polymers 0.000 description 1
- 238000001723 curing Methods 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 238000013007 heat curing Methods 0.000 description 1
- 238000005304 joining Methods 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 238000002161 passivation Methods 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 239000012466 permeate Substances 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 239000005297 pyrex Substances 0.000 description 1
- 238000000820 replica moulding Methods 0.000 description 1
- 230000006641 stabilisation Effects 0.000 description 1
- 238000011105 stabilization Methods 0.000 description 1
Images
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/12—Generating the spectrum; Monochromators
- G01J3/18—Generating the spectrum; Monochromators using diffraction elements, e.g. grating
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0202—Mechanical elements; Supports for optical elements
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
- G01J3/0208—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using focussing or collimating elements, e.g. lenses or mirrors; performing aberration correction
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
- G01J3/021—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using plane or convex mirrors, parallel phase plates, or particular reflectors
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0256—Compact construction
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0256—Compact construction
- G01J3/0259—Monolithic
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
- G01J3/2803—Investigating the spectrum using photoelectric array detector
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/18—Diffraction gratings
- G02B5/1814—Diffraction gratings structurally combined with one or more further optical elements, e.g. lenses, mirrors, prisms or other diffraction gratings
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/18—Diffraction gratings
- G02B5/1847—Manufacturing methods
- G02B5/1852—Manufacturing methods using mechanical means, e.g. ruling with diamond tool, moulding
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/18—Diffraction gratings
- G02B5/1861—Reflection gratings characterised by their structure, e.g. step profile, contours of substrate or grooves, pitch variations, materials
Definitions
- the present invention relates to a spectral module for spectrally detecting light and a method for manufacturing the same.
- the diffraction grating pattern In order to improve the reliability of the spectral module as described above, stabilization of the formation of the diffraction grating pattern is extremely important. Particularly in recent years, the diffraction grating pattern has been miniaturized and thinned in order to reduce the size of the spectroscopic module, and the demand for stabilizing the formation of the diffraction grating pattern has been increasing.
- a spectroscopic module is provided on a main body that transmits light incident from one side and a convex curved surface formed on the other side of the main body.
- a spectroscopic unit that splits light incident on the part and reflects the light to one side of the main body part, and a light detection element that is disposed on one side of the main body part and detects the light dispersed by the spectroscopic part,
- the spectroscopic part is formed on the other side of the diffraction layer, the diffraction layer formed along the curved surface, the collar part integrally formed along the periphery of the diffraction layer so as to be thicker than the diffraction layer, and It has a reflection layer, and a diffraction grating pattern is formed on the diffraction layer so as to be biased to a predetermined side with respect to the center of the diffraction layer.
- the reflective layer is preferably formed in a circular shape.
- the spectroscopic part may be formed on the convex curved surface of the main body part, and the positional deviation in the rotation direction is likely to occur. Is formed in a circular shape, so that the displacement in the rotational direction is absorbed. Accordingly, it is possible to reduce individual differences among the spectral modules and suppress variations in sensitivity.
- a protective layer is formed on the other side of the diffraction layer so as to include and cover the reflective layer.
- the protective layer comes into contact with the region where the diffraction grating pattern is formed and the reflective layer is not present, it is possible to prevent the protective layer from being peeled off from the diffraction layer by the anchor effect. it can.
- the spectral module manufacturing method according to the present invention is the spectral module manufacturing method described above, and a step of placing a resin material on a convex curved surface formed on the other side of the main body, By pressing the mold against the resin material and curing the resin material, the step of forming the diffraction layer in which the diffraction grating pattern is formed, and the collar portion, and the opposite side of the predetermined side precede the predetermined side, And a step of releasing the mold from the resin material.
- FIG. 2 is a cross-sectional view taken along the line II-II in FIG. It is a perspective view of the lens part of the spectroscopy module of FIG. It is sectional drawing of the spectroscopy part of the spectroscopy module of FIG. It is a bottom view of the spectroscopy part of the spectroscopy module of FIG. It is a figure for demonstrating one Embodiment of the manufacturing method of the spectroscopy module which concerns on this invention. It is a figure for demonstrating one Embodiment of the manufacturing method of the spectroscopy module which concerns on this invention.
- the rear surface 2b of the substrate 2 and the front surface 3b of the lens unit 3 are in a state where the longitudinal direction of the substrate 2 and the side surface 3c of the lens unit 3 are substantially parallel, Joined by direct bonding.
- transmit the light L1 which injected from the front side (one side of a main-body part).
- the spectroscopic unit 4 is provided on a convex curved surface 3 a formed on the rear side of the substrate 2 and the lens unit 3 (the other side of the main body unit), and the light detection element 5 includes the substrate 2 and the lens unit 3. It will be arranged on the front side.
- the spectroscopic unit 4 is configured as a reflective grating, and splits the light L1 incident on the substrate 2 and the lens unit 3 and reflects the split light L2 to the front side. More specifically, as shown in FIGS. 4 and 5, the spectroscopic portion 4 is formed on the peripheral layer 6 a of the diffraction layer 6 so as to be thicker than the diffraction layer 6 formed along the curved surface 3 a and the diffraction layer 6. And a reflective layer 8 formed on the outer surface (rear side) of the diffractive layer 6.
- a diffraction grating pattern 9 is formed on the diffraction layer 6.
- the diffraction grating pattern 9 is, for example, a blazed grating having a sawtooth cross section, a binary grating having a rectangular cross section, a holographic grating having a sinusoidal cross section, and a plurality of grooves are arranged in parallel along the longitudinal direction of the substrate 2. Is made up of.
- the diffraction grating pattern 9 is biased to a predetermined side (here, one side along the longitudinal direction of the substrate 2) with respect to the center C of the diffraction layer 6. That is, the center (centroid) of the diffraction grating pattern 9 is shifted to a predetermined side with respect to the center (centroid) of the diffraction layer 6 surrounded by the flange 7.
- the diffraction layer 6 has an outer diameter of 2 mm to 10 mm and a thickness of 1 ⁇ m to 20 ⁇ m
- the flange 7 has a width of 0.1 mm to 1 mm and a thickness of 10 ⁇ m to 500 ⁇ m
- the reflective layer 8 has an outer diameter of 1 mm to 7 mm and a thickness of 10 nm to 2000 nm.
- the region G in which the diffraction grating pattern 9 is formed has a side length of 1.5 mm to 8 mm.
- a wiring 13 made of a single layer film such as Al or Au or a laminated film such as Cr—Pt—Au, Ti—Pt—Au, Ti—Ni—Au, or Cr—Au is formed on the front surface 2a of the substrate 2.
- the wiring 13 includes a plurality of pad portions 13a, a plurality of pad portions 13b, and a plurality of connection portions 13c that connect the corresponding pad portions 13a and the pad portions 13b.
- a light reflection preventing layer 14 made of a single layer film such as CrO or a laminated film such as Cr—CrO is formed.
- a light absorption layer 15 made of a single layer film such as CrO, a laminated film containing CrO, or a black resist is formed on the front surface 2a of the substrate 2.
- the light absorption layer 15 exposes the pad portions 13 a and 13 b of the wiring 13, and covers the connection portion 13 c of the wiring 13.
- the light absorption layer 15 is provided with a slit 15b that allows the light L1 that travels to the spectroscopic unit 4 to pass therethrough, and an opening 15a that allows the light L2 that travels to the light detection unit 5a of the light detection element 5 to pass.
- the slit 15b faces the light passage hole 12 of the light detection element 5, and the opening 15a faces the light detection unit 5a.
- the master mold 22 is provided with a concave curved surface 22a having substantially the same curvature as the curved surface 3a of the lens unit 3, and a plurality of grooves 22b corresponding to the diffraction grating pattern 9 are formed on the curved surface 22a. .
- the resin material 21 is irradiated with ultraviolet UV through the master mold 22 to cure the resin material 21.
- the diffraction layer 6 on which the diffraction grating pattern 9 is formed and the flange portion 7 are integrally formed.
- the master mold 22 is moved from the resin material 21 so that the opposite side B precedes the predetermined side A where the diffraction grating pattern 9 is biased in the diffraction layer 6. Release. That is, the release from the diffraction grating pattern 9 that has relatively high adhesion to the master mold 22 is relatively delayed. In addition, after releasing, it is preferable to stabilize the resin material 21 by performing heat curing.
- the rear surface 2b of the substrate 2 on which the photodetecting element 5 is mounted and the spectroscopic unit 4 are formed in a state where the spectroscopic unit 4 is positioned with high accuracy with respect to the photodetecting unit 5a and the light passage hole 12 of the photodetecting element 5.
- the spectroscopic module 1 is completed by joining the front surface 3b of the lens unit 3 thus formed by optical resin or direct bonding.
- the flange portion 7 is integrally formed along the peripheral edge 6 a of the diffraction layer 6 so as to be thicker than the diffraction layer 6.
- the diffractive layer 6 formed along the convex curved surface 3 a of the lens unit 3 is held in the master mold 22 when releasing the diffractive layer 6 and the flange portion 7 using the master mold 22. Therefore, it is possible to prevent peeling from the curved surface 3a.
- a diffraction grating pattern 9 is formed so as to be biased to a predetermined side with respect to the center C of the diffraction layer 6.
- the diffraction grating pattern 9 having relatively high adhesion to the master mold 22 is formed only on a part of the diffraction layer 6, or the diffraction grating pattern 9 is formed on the entire diffraction layer 6. Compared to the case, this contributes to smooth release of the master mold 22.
- the spectroscopic unit 4 may be formed on the convex curved surface 3 a of the lens unit 3, so that the mask 23 is displaced in the rotational direction. It becomes easy.
- the reflective layer is formed so as to be substantially similar to the cross-sectional shape of the light passage hole 12 of the light detection element 5 (for example, to have a rectangular shape)
- the formed reflective layer also has a rotational direction. Since misalignment occurs, individual differences occur in the spectral modules thus manufactured.
- the spectroscopic module 1 since the reflective layer 8 is formed in a circular shape, the displacement in the rotation direction of the mask 23 is absorbed. Accordingly, it is possible to reduce individual differences among the spectral modules 1 and suppress sensitivity variations.
- the diffraction grating pattern 9 reaches the rear surface 7a of the flange portion 7 on a predetermined side, The diffraction grating pattern 9 can be accurately formed in the diffraction layer 6 up to the boundary with the flange 7 on the predetermined side. Further, it is possible to easily inspect the state of the diffraction grating pattern 9 on the rear surface 7a of the flange portion 7.
- the collar portion 7 can be made thicker and more reliable than the diffraction layer 6, and the diffraction layer 6 is prevented from peeling off from the curved surface 3a. It becomes possible to do.
- the formation of the diffraction grating pattern can be stabilized.
Abstract
Description
所定の側における鍔部7との境界まで、回折層6に回折格子パターン9を精度良く形成することができる。また、鍔部7の後面7aにおいて回折格子パターン9の状態を容易に検査することが可能となる。
Claims (6)
- 一方の側から入射した光を透過させる本体部と、
前記本体部の他方の側に形成された凸状の曲面上に設けられ、前記本体部に入射した光を分光すると共に前記本体部の一方の側に反射する分光部と、
前記本体部の一方の側に配置され、前記分光部によって分光された光を検出する光検出素子と、を備え、
前記分光部は、前記曲面に沿うように形成された回折層、前記回折層よりも厚くなるように前記回折層の周縁に沿って一体的に形成された鍔部、及び前記回折層の他方の側に形成された反射層を有し、
前記回折層には、前記回折層の中心に対して所定の側に偏るように回折格子パターンが形成されていることを特徴とする分光モジュール。 - 前記反射層は、円形状に形成されていることを特徴とする請求項1記載の分光モジュール。
- 前記反射層は、前記回折格子パターンが形成された領域に含まれるように形成されていることを特徴とする請求項1記載の分光モジュール。
- 前記回折層の他方の側には、前記反射層を含み且つ覆うように保護層が形成されていることを特徴とする請求項3記載の分光モジュール。
- 前記回折格子パターンは、前記所定の側において前記鍔部上に達していることを特徴とする請求項1記載の分光モジュール。
- 請求項1記載の分光モジュールの製造方法であって、
前記本体部の他方の側に形成された凸状の曲面上に、樹脂材を載置する工程と、
前記樹脂材に型を押し当て、前記樹脂材を硬化させることにより、前記回折格子パターンが形成された前記回折層、及び前記鍔部を形成する工程と、
前記所定の側に対してその反対側を先行させるように、前記樹脂材から前記型を離す工程と、を含むことを特徴とする分光モジュールの製造方法。
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201080036948.2A CN102472663B (zh) | 2009-08-19 | 2010-08-11 | 分光模块及其制造方法 |
KR1020127002549A KR101735131B1 (ko) | 2009-08-19 | 2010-08-11 | 분광 모듈 및 그 제조 방법 |
EP10809902.9A EP2469252B1 (en) | 2009-08-19 | 2010-08-11 | Spectroscopy module and manufacturing method therefor |
US13/390,527 US9075193B2 (en) | 2009-08-19 | 2010-08-11 | Spectroscopy module and manufacturing method therefor |
US14/790,784 US9797773B2 (en) | 2009-08-19 | 2015-07-02 | Spectroscopy module and manufacturing method therefor |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
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JP2009190340A JP5592089B2 (ja) | 2009-08-19 | 2009-08-19 | 分光モジュール及びその製造方法 |
JP2009-190340 | 2009-08-19 |
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Application Number | Title | Priority Date | Filing Date |
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US13/390,527 A-371-Of-International US9075193B2 (en) | 2009-08-19 | 2010-08-11 | Spectroscopy module and manufacturing method therefor |
US14/790,784 Continuation US9797773B2 (en) | 2009-08-19 | 2015-07-02 | Spectroscopy module and manufacturing method therefor |
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WO2011021557A1 true WO2011021557A1 (ja) | 2011-02-24 |
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US (2) | US9075193B2 (ja) |
EP (1) | EP2469252B1 (ja) |
JP (1) | JP5592089B2 (ja) |
KR (1) | KR101735131B1 (ja) |
CN (1) | CN102472663B (ja) |
TW (2) | TWI464460B (ja) |
WO (1) | WO2011021557A1 (ja) |
Cited By (1)
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JP2016533520A (ja) * | 2013-09-29 | 2016-10-27 | グラジュエート スクール アット シェンチェン、 ツィングワ ユニバーシティー | ブレーズド凹面回折格子の製造方法 |
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JP4891841B2 (ja) * | 2007-06-08 | 2012-03-07 | 浜松ホトニクス株式会社 | 分光モジュール |
JP5094742B2 (ja) | 2007-06-08 | 2012-12-12 | 浜松ホトニクス株式会社 | 分光器 |
JP2011053143A (ja) * | 2009-09-03 | 2011-03-17 | Hamamatsu Photonics Kk | 分光モジュール |
JP6234667B2 (ja) * | 2012-08-06 | 2017-11-22 | 浜松ホトニクス株式会社 | 光学素子及びその製造方法 |
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KR102498122B1 (ko) | 2017-11-21 | 2023-02-09 | 삼성전자주식회사 | 분광 장치와, 분광 방법, 및 생체신호 측정장치 |
US11391871B2 (en) * | 2017-12-27 | 2022-07-19 | Hitachi High-Tech Corporation | Manufacturing method of concave diffraction grating, concave diffraction grating, and analyzer using the same |
JP1623119S (ja) * | 2018-04-27 | 2019-07-16 | ||
JP1627077S (ja) * | 2018-04-27 | 2019-09-09 | ||
JP1624467S (ja) * | 2018-04-27 | 2019-08-05 | ||
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TW201129829A (en) | 2011-09-01 |
EP2469252A1 (en) | 2012-06-27 |
TW201506363A (zh) | 2015-02-16 |
CN102472663B (zh) | 2014-07-16 |
TWI464460B (zh) | 2014-12-11 |
US9075193B2 (en) | 2015-07-07 |
JP5592089B2 (ja) | 2014-09-17 |
TWI513958B (zh) | 2015-12-21 |
CN102472663A (zh) | 2012-05-23 |
KR20120041206A (ko) | 2012-04-30 |
JP2011043360A (ja) | 2011-03-03 |
US20120140214A1 (en) | 2012-06-07 |
KR101735131B1 (ko) | 2017-05-24 |
EP2469252A4 (en) | 2014-12-24 |
US20150308894A1 (en) | 2015-10-29 |
EP2469252B1 (en) | 2017-03-22 |
US9797773B2 (en) | 2017-10-24 |
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