JP5592089B2 - 分光モジュール及びその製造方法 - Google Patents
分光モジュール及びその製造方法 Download PDFInfo
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- JP5592089B2 JP5592089B2 JP2009190340A JP2009190340A JP5592089B2 JP 5592089 B2 JP5592089 B2 JP 5592089B2 JP 2009190340 A JP2009190340 A JP 2009190340A JP 2009190340 A JP2009190340 A JP 2009190340A JP 5592089 B2 JP5592089 B2 JP 5592089B2
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- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
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Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/12—Generating the spectrum; Monochromators
- G01J3/18—Generating the spectrum; Monochromators using diffraction elements, e.g. grating
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0202—Mechanical elements; Supports for optical elements
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
- G01J3/0208—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using focussing or collimating elements, e.g. lenses or mirrors; performing aberration correction
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
- G01J3/021—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using plane or convex mirrors, parallel phase plates, or particular reflectors
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0256—Compact construction
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0256—Compact construction
- G01J3/0259—Monolithic
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
- G01J3/2803—Investigating the spectrum using photoelectric array detector
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/18—Diffraction gratings
- G02B5/1814—Diffraction gratings structurally combined with one or more further optical elements, e.g. lenses, mirrors, prisms or other diffraction gratings
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/18—Diffraction gratings
- G02B5/1847—Manufacturing methods
- G02B5/1852—Manufacturing methods using mechanical means, e.g. ruling with diamond tool, moulding
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/18—Diffraction gratings
- G02B5/1861—Reflection gratings characterised by their structure, e.g. step profile, contours of substrate or grooves, pitch variations, materials
Landscapes
- Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Spectrometry And Color Measurement (AREA)
- Diffracting Gratings Or Hologram Optical Elements (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Optical Elements Other Than Lenses (AREA)
Description
所定の側における鍔部7との境界まで、回折層6に回折格子パターン9を精度良く形成することができる。また、鍔部7の後面7aにおいて回折格子パターン9の状態を容易に検査することが可能となる。
Claims (6)
- 一方の側から入射した光を透過させる本体部と、
前記本体部の他方の側に形成された凸状の曲面上に設けられ、前記本体部に入射した光を分光すると共に前記本体部の一方の側に反射する分光部と、
前記本体部の一方の側に配置され、前記分光部によって分光された光を検出する光検出素子と、を備え、
前記分光部は、前記曲面に沿うように形成された回折層、前記回折層よりも厚くなるように前記回折層の周縁に沿って一体的に形成された鍔部、及び前記回折層の他方の側に形成された反射層を有し、
前記回折層には、前記本体部の他方の側から見た場合に前記回折層の中心に対して所定の側に偏るように回折格子パターンが形成されていることを特徴とする分光モジュール。 - 前記反射層は、円形状に形成されていることを特徴とする請求項1記載の分光モジュール。
- 前記反射層は、前記回折格子パターンが形成された領域に含まれるように形成されていることを特徴とする請求項1又は2記載の分光モジュール。
- 前記回折層の他方の側には、前記反射層を含み且つ覆うように保護層が形成されていることを特徴とする請求項3記載の分光モジュール。
- 前記回折格子パターンは、前記所定の側において前記鍔部上に達していることを特徴とする請求項1〜4のいずれか一項記載の分光モジュール。
- 請求項1記載の分光モジュールの製造方法であって、
前記本体部の他方の側に形成された凸状の曲面上に、樹脂材を載置する工程と、
前記樹脂材に型を押し当て、前記樹脂材を硬化させることにより、前記回折格子パターンが形成された前記回折層、及び前記鍔部を形成する工程と、
前記所定の側に対してその反対側を先行させるように、前記樹脂材から前記型を離す工程と、を含むことを特徴とする分光モジュールの製造方法。
Priority Applications (9)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2009190340A JP5592089B2 (ja) | 2009-08-19 | 2009-08-19 | 分光モジュール及びその製造方法 |
US13/390,527 US9075193B2 (en) | 2009-08-19 | 2010-08-11 | Spectroscopy module and manufacturing method therefor |
PCT/JP2010/063648 WO2011021557A1 (ja) | 2009-08-19 | 2010-08-11 | 分光モジュール及びその製造方法 |
CN201080036948.2A CN102472663B (zh) | 2009-08-19 | 2010-08-11 | 分光模块及其制造方法 |
EP10809902.9A EP2469252B1 (en) | 2009-08-19 | 2010-08-11 | Spectroscopy module and manufacturing method therefor |
KR1020127002549A KR101735131B1 (ko) | 2009-08-19 | 2010-08-11 | 분광 모듈 및 그 제조 방법 |
TW103138257A TWI513958B (zh) | 2009-08-19 | 2010-08-17 | A method of manufacturing a spectroscopic portion and a spectroscopic portion |
TW099127477A TWI464460B (zh) | 2009-08-19 | 2010-08-17 | A spectroscopic module and a manufacturing method thereof |
US14/790,784 US9797773B2 (en) | 2009-08-19 | 2015-07-02 | Spectroscopy module and manufacturing method therefor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2009190340A JP5592089B2 (ja) | 2009-08-19 | 2009-08-19 | 分光モジュール及びその製造方法 |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2014156816A Division JP5799145B2 (ja) | 2014-07-31 | 2014-07-31 | 分光部及びその製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2011043360A JP2011043360A (ja) | 2011-03-03 |
JP5592089B2 true JP5592089B2 (ja) | 2014-09-17 |
Family
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Application Number | Title | Priority Date | Filing Date |
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JP2009190340A Active JP5592089B2 (ja) | 2009-08-19 | 2009-08-19 | 分光モジュール及びその製造方法 |
Country Status (7)
Country | Link |
---|---|
US (2) | US9075193B2 (ja) |
EP (1) | EP2469252B1 (ja) |
JP (1) | JP5592089B2 (ja) |
KR (1) | KR101735131B1 (ja) |
CN (1) | CN102472663B (ja) |
TW (2) | TWI464460B (ja) |
WO (1) | WO2011021557A1 (ja) |
Families Citing this family (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101503079B1 (ko) | 2007-06-08 | 2015-03-16 | 하마마츠 포토닉스 가부시키가이샤 | 분광기 |
JP4891841B2 (ja) * | 2007-06-08 | 2012-03-07 | 浜松ホトニクス株式会社 | 分光モジュール |
JP2011053143A (ja) * | 2009-09-03 | 2011-03-17 | Hamamatsu Photonics Kk | 分光モジュール |
JP6234667B2 (ja) * | 2012-08-06 | 2017-11-22 | 浜松ホトニクス株式会社 | 光学素子及びその製造方法 |
WO2015015693A1 (ja) * | 2013-07-29 | 2015-02-05 | パナソニックIpマネジメント株式会社 | 回折光学素子、回折光学素子の製造方法および回折光学素子の製造方法に用いられる型 |
CN103499851B (zh) * | 2013-09-29 | 2015-06-10 | 清华大学深圳研究生院 | 一种闪耀凹面光栅制作方法 |
US10877192B2 (en) * | 2017-04-18 | 2020-12-29 | Saudi Arabian Oil Company | Method of fabricating smart photonic structures for material monitoring |
KR102498122B1 (ko) | 2017-11-21 | 2023-02-09 | 삼성전자주식회사 | 분광 장치와, 분광 방법, 및 생체신호 측정장치 |
US11391871B2 (en) * | 2017-12-27 | 2022-07-19 | Hitachi High-Tech Corporation | Manufacturing method of concave diffraction grating, concave diffraction grating, and analyzer using the same |
JP1627076S (ja) * | 2018-04-27 | 2019-09-09 | ||
JP1623120S (ja) * | 2018-04-27 | 2019-07-16 | ||
JP1626335S (ja) * | 2018-04-27 | 2019-09-02 | ||
JP1627077S (ja) * | 2018-04-27 | 2019-09-09 | ||
JP1624467S (ja) * | 2018-04-27 | 2019-08-05 | ||
JP1623119S (ja) * | 2018-04-27 | 2019-07-16 |
Family Cites Families (22)
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JPH04204401A (ja) | 1990-11-29 | 1992-07-24 | Matsushita Electric Ind Co Ltd | 回折光学素子 |
DE4038638A1 (de) * | 1990-12-04 | 1992-06-11 | Zeiss Carl Fa | Diodenzeilen-spektrometer |
GB9416223D0 (en) * | 1994-08-11 | 1994-10-05 | Ridyard Andrew W | Radiation detector |
EP0942267B1 (de) * | 1998-03-11 | 2006-08-30 | Gretag-Macbeth AG | Spektrometer |
WO2002004901A1 (en) * | 2000-07-11 | 2002-01-17 | Adc Telecommunications, Inc. | Monitoring apparatus for optical transmission systems |
JP2003222706A (ja) | 2002-01-31 | 2003-08-08 | Canon Inc | 光学素子及びその製造方法 |
JP2004042493A (ja) * | 2002-07-12 | 2004-02-12 | Canon Inc | 成形用型及び光学素子 |
JP4409860B2 (ja) * | 2003-05-28 | 2010-02-03 | 浜松ホトニクス株式会社 | 光検出器を用いた分光器 |
JP4627402B2 (ja) * | 2003-11-28 | 2011-02-09 | 浜松ホトニクス株式会社 | 光検出器を用いた分光器 |
JP4627410B2 (ja) * | 2004-04-20 | 2011-02-09 | 浜松ホトニクス株式会社 | 分光器を用いた測定装置 |
JP2006177994A (ja) | 2004-12-20 | 2006-07-06 | Shimadzu Corp | レプリカ光学素子 |
JP2007309964A (ja) | 2006-05-16 | 2007-11-29 | Matsushita Electric Ind Co Ltd | 複合光学素子及びその製造方法 |
JP2007326330A (ja) * | 2006-06-09 | 2007-12-20 | Canon Inc | 複合型光学素子の成形用型および複合型光学素子 |
KR100789570B1 (ko) | 2006-08-23 | 2007-12-28 | 동부일렉트로닉스 주식회사 | 반도체 소자 및 그 제조방법 |
JP2008129229A (ja) * | 2006-11-20 | 2008-06-05 | Matsushita Electric Ind Co Ltd | 複合光学素子および複合光学素子の製造方法 |
JP4891840B2 (ja) | 2007-06-08 | 2012-03-07 | 浜松ホトニクス株式会社 | 分光モジュール |
JP4887251B2 (ja) * | 2007-09-13 | 2012-02-29 | 浜松ホトニクス株式会社 | 分光モジュール |
JP4887250B2 (ja) * | 2007-09-13 | 2012-02-29 | 浜松ホトニクス株式会社 | 分光モジュール |
WO2008149930A1 (ja) * | 2007-06-08 | 2008-12-11 | Hamamatsu Photonics K.K. | 分光モジュール |
KR101503079B1 (ko) | 2007-06-08 | 2015-03-16 | 하마마츠 포토닉스 가부시키가이샤 | 분광기 |
WO2009110110A1 (ja) * | 2008-03-04 | 2009-09-11 | 浜松ホトニクス株式会社 | 分光モジュール |
JP5111163B2 (ja) * | 2008-03-04 | 2012-12-26 | 浜松ホトニクス株式会社 | 分光器 |
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2009
- 2009-08-19 JP JP2009190340A patent/JP5592089B2/ja active Active
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2010
- 2010-08-11 WO PCT/JP2010/063648 patent/WO2011021557A1/ja active Application Filing
- 2010-08-11 KR KR1020127002549A patent/KR101735131B1/ko active IP Right Grant
- 2010-08-11 US US13/390,527 patent/US9075193B2/en active Active
- 2010-08-11 CN CN201080036948.2A patent/CN102472663B/zh active Active
- 2010-08-11 EP EP10809902.9A patent/EP2469252B1/en active Active
- 2010-08-17 TW TW099127477A patent/TWI464460B/zh active
- 2010-08-17 TW TW103138257A patent/TWI513958B/zh active
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2015
- 2015-07-02 US US14/790,784 patent/US9797773B2/en active Active
Also Published As
Publication number | Publication date |
---|---|
EP2469252A4 (en) | 2014-12-24 |
KR101735131B1 (ko) | 2017-05-24 |
US9797773B2 (en) | 2017-10-24 |
JP2011043360A (ja) | 2011-03-03 |
US20120140214A1 (en) | 2012-06-07 |
KR20120041206A (ko) | 2012-04-30 |
TW201129829A (en) | 2011-09-01 |
US9075193B2 (en) | 2015-07-07 |
CN102472663B (zh) | 2014-07-16 |
TWI513958B (zh) | 2015-12-21 |
WO2011021557A1 (ja) | 2011-02-24 |
TW201506363A (zh) | 2015-02-16 |
US20150308894A1 (en) | 2015-10-29 |
TWI464460B (zh) | 2014-12-11 |
CN102472663A (zh) | 2012-05-23 |
EP2469252B1 (en) | 2017-03-22 |
EP2469252A1 (en) | 2012-06-27 |
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