CN103499851B - 一种闪耀凹面光栅制作方法 - Google Patents
一种闪耀凹面光栅制作方法 Download PDFInfo
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- CN103499851B CN103499851B CN201310462037.1A CN201310462037A CN103499851B CN 103499851 B CN103499851 B CN 103499851B CN 201310462037 A CN201310462037 A CN 201310462037A CN 103499851 B CN103499851 B CN 103499851B
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- 238000000034 method Methods 0.000 title claims abstract description 25
- 238000004519 manufacturing process Methods 0.000 title abstract 2
- 239000000758 substrate Substances 0.000 claims description 24
- 238000005520 cutting process Methods 0.000 claims description 17
- 229920002120 photoresistant polymer Polymers 0.000 claims description 15
- 239000003822 epoxy resin Substances 0.000 claims description 10
- 229920000647 polyepoxide Polymers 0.000 claims description 10
- 238000010884 ion-beam technique Methods 0.000 claims description 9
- 239000012528 membrane Substances 0.000 claims description 9
- 238000005530 etching Methods 0.000 claims description 8
- 239000011248 coating agent Substances 0.000 claims description 7
- 238000000576 coating method Methods 0.000 claims description 7
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 6
- 239000000463 material Substances 0.000 claims description 6
- 239000003921 oil Substances 0.000 claims description 6
- 229910052710 silicon Inorganic materials 0.000 claims description 6
- 239000010703 silicon Substances 0.000 claims description 6
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 4
- 229910052782 aluminium Inorganic materials 0.000 claims description 4
- 239000004411 aluminium Substances 0.000 claims description 4
- 239000003292 glue Substances 0.000 claims description 4
- 238000000926 separation method Methods 0.000 claims description 4
- HGAZMNJKRQFZKS-UHFFFAOYSA-N chloroethene;ethenyl acetate Chemical group ClC=C.CC(=O)OC=C HGAZMNJKRQFZKS-UHFFFAOYSA-N 0.000 claims description 3
- 230000029087 digestion Effects 0.000 claims description 3
- 230000008020 evaporation Effects 0.000 claims description 3
- 238000001704 evaporation Methods 0.000 claims description 3
- 239000004615 ingredient Substances 0.000 claims description 3
- 230000003287 optical effect Effects 0.000 claims description 3
- 238000005498 polishing Methods 0.000 claims description 3
- 238000002360 preparation method Methods 0.000 claims description 3
- 238000004528 spin coating Methods 0.000 claims description 3
- 238000010792 warming Methods 0.000 claims description 3
- 238000007711 solidification Methods 0.000 claims description 2
- 230000008023 solidification Effects 0.000 claims description 2
- 230000010076 replication Effects 0.000 abstract description 3
- 238000001816 cooling Methods 0.000 abstract 1
- 230000003362 replicative effect Effects 0.000 abstract 1
- 238000010586 diagram Methods 0.000 description 5
- 230000018109 developmental process Effects 0.000 description 4
- 238000003384 imaging method Methods 0.000 description 2
- 230000011218 segmentation Effects 0.000 description 2
- 230000003595 spectral effect Effects 0.000 description 2
- 230000007423 decrease Effects 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/18—Diffraction gratings
- G02B5/1847—Manufacturing methods
- G02B5/1857—Manufacturing methods using exposure or etching means, e.g. holography, photolithography, exposure to electron or ion beams
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/18—Diffraction gratings
- G02B5/1847—Manufacturing methods
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/18—Diffraction gratings
- G02B5/1861—Reflection gratings characterised by their structure, e.g. step profile, contours of substrate or grooves, pitch variations, materials
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Diffracting Gratings Or Hologram Optical Elements (AREA)
- Shaping Of Tube Ends By Bending Or Straightening (AREA)
Abstract
Description
Claims (6)
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201310462037.1A CN103499851B (zh) | 2013-09-29 | 2013-09-29 | 一种闪耀凹面光栅制作方法 |
JP2016518153A JP6288688B2 (ja) | 2013-09-29 | 2013-11-19 | ブレーズド凹面回折格子の製造方法 |
PCT/CN2013/087439 WO2015043046A1 (zh) | 2013-09-29 | 2013-11-19 | 一种闪耀凹面光栅制作方法 |
US14/983,334 US9470824B2 (en) | 2013-09-29 | 2015-12-29 | Manufacture method for blazed concave grating |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201310462037.1A CN103499851B (zh) | 2013-09-29 | 2013-09-29 | 一种闪耀凹面光栅制作方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN103499851A CN103499851A (zh) | 2014-01-08 |
CN103499851B true CN103499851B (zh) | 2015-06-10 |
Family
ID=49865074
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201310462037.1A Active CN103499851B (zh) | 2013-09-29 | 2013-09-29 | 一种闪耀凹面光栅制作方法 |
Country Status (4)
Country | Link |
---|---|
US (1) | US9470824B2 (zh) |
JP (1) | JP6288688B2 (zh) |
CN (1) | CN103499851B (zh) |
WO (1) | WO2015043046A1 (zh) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103744137B (zh) * | 2014-01-20 | 2015-11-18 | 清华大学深圳研究生院 | 闪耀凹面光栅制作装置及制作方法 |
DE102014117453A1 (de) * | 2014-11-27 | 2016-06-02 | Carl Zeiss Smt Gmbh | Kollektorspiegel für Mikrolithografie |
CN104749673B (zh) * | 2015-04-21 | 2017-04-05 | 中国科学院长春光学精密机械与物理研究所 | 大尺寸平面衍射光栅的复制拼接方法 |
TWI693378B (zh) * | 2015-08-24 | 2020-05-11 | 台灣超微光學股份有限公司 | 光譜儀、單光儀、繞射光柵、繞射光柵的製造方法與母模的製造方法 |
CN108444389A (zh) * | 2017-12-26 | 2018-08-24 | 中国科学院长春光学精密机械与物理研究所 | 一种品字型位移测量光栅的制作方法 |
US10955606B2 (en) * | 2018-05-30 | 2021-03-23 | Applied Materials, Inc. | Method of imprinting tilt angle light gratings |
JP2022540691A (ja) * | 2019-07-19 | 2022-09-16 | マジック リープ, インコーポレイテッド | 回折格子を加工する方法 |
CN112684530A (zh) * | 2021-01-22 | 2021-04-20 | 宜兴市晶科光学仪器有限公司 | 一种消象差非球面平场全息凹面光栅的制备方法 |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3434907B2 (ja) * | 1994-09-12 | 2003-08-11 | 日本分光株式会社 | 凹面エシェレットグレーティングの製造方法 |
US7304797B2 (en) * | 2004-03-24 | 2007-12-04 | Enablence Inc. | Inputs and outputs for an optical multiplexer/demultiplexer utilizing the grating facet diffraction envelope |
JP5066815B2 (ja) * | 2006-03-03 | 2012-11-07 | 株式会社島津製作所 | 反射型回折格子 |
CN101126825A (zh) * | 2007-09-07 | 2008-02-20 | 中国科学院长春光学精密机械与物理研究所 | 一种非球面光栅复制的新方法 |
CN101246229A (zh) * | 2008-03-25 | 2008-08-20 | 清华大学 | 一种在凸面基底上直接制作光刻胶母光栅的方法 |
CN101441286A (zh) * | 2008-12-22 | 2009-05-27 | 中国科学院长春光学精密机械与物理研究所 | 一种采用复制技术制作非球面光栅的方法 |
JP5592089B2 (ja) * | 2009-08-19 | 2014-09-17 | 浜松ホトニクス株式会社 | 分光モジュール及びその製造方法 |
JP2012013530A (ja) * | 2010-06-30 | 2012-01-19 | Fujifilm Corp | 回折格子及びその製造方法、並びに放射線撮影装置 |
JP5864920B2 (ja) * | 2010-12-20 | 2016-02-17 | キヤノン株式会社 | 回折格子の製造方法 |
CN103764361A (zh) * | 2011-08-30 | 2014-04-30 | 综研化学株式会社 | 树脂制模具的接合方法及由该接合方法制得的辊对辊用连续模具结构体 |
JP5056997B2 (ja) * | 2012-04-27 | 2012-10-24 | 株式会社島津製作所 | 回折格子の製造方法 |
CN103105638A (zh) * | 2013-01-11 | 2013-05-15 | 中国科学院长春光学精密机械与物理研究所 | 闪耀凹面全息光栅分区反应离子束的刻蚀方法 |
-
2013
- 2013-09-29 CN CN201310462037.1A patent/CN103499851B/zh active Active
- 2013-11-19 JP JP2016518153A patent/JP6288688B2/ja not_active Expired - Fee Related
- 2013-11-19 WO PCT/CN2013/087439 patent/WO2015043046A1/zh active Application Filing
-
2015
- 2015-12-29 US US14/983,334 patent/US9470824B2/en active Active
Also Published As
Publication number | Publication date |
---|---|
US20160131807A1 (en) | 2016-05-12 |
CN103499851A (zh) | 2014-01-08 |
JP6288688B2 (ja) | 2018-03-07 |
JP2016533520A (ja) | 2016-10-27 |
WO2015043046A1 (zh) | 2015-04-02 |
US9470824B2 (en) | 2016-10-18 |
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Address after: 518055 Guangdong city of Shenzhen province Nanshan District Xili of Tsinghua Patentee after: Shenzhen International Graduate School of Tsinghua University Country or region after: China Address before: 518055 Guangdong city of Shenzhen province Nanshan District Xili of Tsinghua Patentee before: GRADUATE SCHOOL AT SHENZHEN, TSINGHUA University Country or region before: China |
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Effective date of registration: 20240515 Address after: Room B01, 3rd Floor, Building 3, Pingshan Private Enterprise Science and Technology Park, No. 65 Lishan Road, Pingshan Community, Taoyuan Street, Nanshan District, Shenzhen City, Guangdong Province, 518000 Patentee after: Shenzhen Pinwei Optoelectronic Technology Co.,Ltd. Country or region after: China Address before: 518055 Guangdong city of Shenzhen province Nanshan District Xili of Tsinghua Patentee before: Shenzhen International Graduate School of Tsinghua University Country or region before: China |