JP4887251B2 - 分光モジュール - Google Patents
分光モジュール Download PDFInfo
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- JP4887251B2 JP4887251B2 JP2007238317A JP2007238317A JP4887251B2 JP 4887251 B2 JP4887251 B2 JP 4887251B2 JP 2007238317 A JP2007238317 A JP 2007238317A JP 2007238317 A JP2007238317 A JP 2007238317A JP 4887251 B2 JP4887251 B2 JP 4887251B2
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- 238000001514 detection method Methods 0.000 claims description 48
- 239000000463 material Substances 0.000 claims description 25
- 230000031700 light absorption Effects 0.000 claims description 21
- 239000010410 layer Substances 0.000 description 38
- 239000011347 resin Substances 0.000 description 6
- 229920005989 resin Polymers 0.000 description 6
- 230000003595 spectral effect Effects 0.000 description 5
- 239000011521 glass Substances 0.000 description 4
- 238000003848 UV Light-Curing Methods 0.000 description 2
- 230000001788 irregular Effects 0.000 description 2
- 238000002844 melting Methods 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 239000010453 quartz Substances 0.000 description 2
- 238000000820 replica moulding Methods 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 239000002356 single layer Substances 0.000 description 2
- 238000004611 spectroscopical analysis Methods 0.000 description 2
- RZVAJINKPMORJF-UHFFFAOYSA-N Acetaminophen Chemical compound CC(=O)NC1=CC=C(O)C=C1 RZVAJINKPMORJF-UHFFFAOYSA-N 0.000 description 1
- 229910018885 Pt—Au Inorganic materials 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 239000005001 laminate film Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 239000006089 photosensitive glass Substances 0.000 description 1
- 230000000644 propagated effect Effects 0.000 description 1
- 239000005297 pyrex Substances 0.000 description 1
Images
Landscapes
- Spectrometry And Color Measurement (AREA)
Description
Claims (2)
- 光を透過させる本体部と、
前記本体部の所定の面から前記本体部に入射した光を分光して前記所定の面側に反射する分光部と、
前記分光部によって分光されて反射された光を検出する光検出部を有し、前記所定の面側に形成された配線にフェースダウンボンディングによって電気的に接続された光検出素子と、
前記光検出素子の前記本体部側に充填され、光を透過させるアンダーフィル材と、を備え、
前記光検出素子は、前記分光部に進行する光が通過する光通過孔を有しており、
前記光検出素子における前記本体部側の面には、前記光通過孔の光出射開口を囲むように凸部が形成され、
前記所定の面には、前記分光部に進行する光が通過する第1の光通過部、及び前記光検出部に進行する光が通過する第2の光通過部を有する光吸収層が形成され、
前記凸部は、前記光通過孔の中心線方向から見て前記第1の光通過部を囲むように形成されていることを特徴とする分光モジュール。 - 前記配線は、前記所定の面側に光反射防止層を有していることを特徴とする請求項1記載の分光モジュール。
Priority Applications (7)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007238317A JP4887251B2 (ja) | 2007-09-13 | 2007-09-13 | 分光モジュール |
EP08765192.3A EP2075555A4 (en) | 2007-06-08 | 2008-06-05 | SPECTROSCOPIC MODULE |
CN2008800005084A CN101542250B (zh) | 2007-06-08 | 2008-06-05 | 分光模块 |
KR1020097000554A KR20100017082A (ko) | 2007-06-08 | 2008-06-05 | 분광 모듈 |
PCT/JP2008/060379 WO2008149941A1 (ja) | 2007-06-08 | 2008-06-05 | 分光モジュール |
US12/377,314 US8049887B2 (en) | 2007-06-08 | 2008-06-05 | Spectroscopic module |
TW097121327A TW200916739A (en) | 2007-06-08 | 2008-06-06 | Spectroscopic module |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007238317A JP4887251B2 (ja) | 2007-09-13 | 2007-09-13 | 分光モジュール |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2009069017A JP2009069017A (ja) | 2009-04-02 |
JP4887251B2 true JP4887251B2 (ja) | 2012-02-29 |
Family
ID=40605428
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2007238317A Active JP4887251B2 (ja) | 2007-06-08 | 2007-09-13 | 分光モジュール |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP4887251B2 (ja) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2012137506A (ja) * | 2012-04-18 | 2012-07-19 | Hamamatsu Photonics Kk | 分光モジュール |
US8411269B2 (en) | 2007-06-08 | 2013-04-02 | Hamamatsu Photonics K.K. | Spectroscopic module |
US8477306B2 (en) | 2007-06-08 | 2013-07-02 | Hamamatsu Photonics K.K. | Spectroscope |
US10551312B2 (en) | 2017-12-29 | 2020-02-04 | Samsung Electronics Co., Ltd. | Optical sensor, and apparatus and method for measuring absorbance using the same |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5592089B2 (ja) * | 2009-08-19 | 2014-09-17 | 浜松ホトニクス株式会社 | 分光モジュール及びその製造方法 |
US8484498B2 (en) | 2010-08-26 | 2013-07-09 | Advanced Micro Devices | Method and apparatus for demand-based control of processing node performance |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63229765A (ja) * | 1987-03-18 | 1988-09-26 | Fujitsu Ltd | 赤外線検知器 |
JP2713838B2 (ja) * | 1992-10-15 | 1998-02-16 | 浜松ホトニクス株式会社 | 分光イメージングセンサ |
JPH06229829A (ja) * | 1993-02-04 | 1994-08-19 | Olympus Optical Co Ltd | 受光素子アレイ |
JP2003139611A (ja) * | 2001-11-06 | 2003-05-14 | Olympus Optical Co Ltd | 分光光度計 |
JP2004191246A (ja) * | 2002-12-12 | 2004-07-08 | Matsushita Electric Ind Co Ltd | 凹凸検出センサ |
JP4409860B2 (ja) * | 2003-05-28 | 2010-02-03 | 浜松ホトニクス株式会社 | 光検出器を用いた分光器 |
JP4627410B2 (ja) * | 2004-04-20 | 2011-02-09 | 浜松ホトニクス株式会社 | 分光器を用いた測定装置 |
-
2007
- 2007-09-13 JP JP2007238317A patent/JP4887251B2/ja active Active
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8411269B2 (en) | 2007-06-08 | 2013-04-02 | Hamamatsu Photonics K.K. | Spectroscopic module |
US8477306B2 (en) | 2007-06-08 | 2013-07-02 | Hamamatsu Photonics K.K. | Spectroscope |
US8477305B2 (en) | 2007-06-08 | 2013-07-02 | Hamamatsu Photonics K.K. | Spectroscope |
JP2012137506A (ja) * | 2012-04-18 | 2012-07-19 | Hamamatsu Photonics Kk | 分光モジュール |
US10551312B2 (en) | 2017-12-29 | 2020-02-04 | Samsung Electronics Co., Ltd. | Optical sensor, and apparatus and method for measuring absorbance using the same |
Also Published As
Publication number | Publication date |
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JP2009069017A (ja) | 2009-04-02 |
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