JP2008304385A - 分光モジュール - Google Patents
分光モジュール Download PDFInfo
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- JP2008304385A JP2008304385A JP2007153014A JP2007153014A JP2008304385A JP 2008304385 A JP2008304385 A JP 2008304385A JP 2007153014 A JP2007153014 A JP 2007153014A JP 2007153014 A JP2007153014 A JP 2007153014A JP 2008304385 A JP2008304385 A JP 2008304385A
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- 238000001514 detection method Methods 0.000 claims abstract description 34
- 230000031700 light absorption Effects 0.000 claims abstract description 32
- 230000005540 biological transmission Effects 0.000 claims description 5
- 238000004611 spectroscopical analysis Methods 0.000 claims description 5
- 230000003595 spectral effect Effects 0.000 claims description 4
- 238000000059 patterning Methods 0.000 abstract description 2
- 239000010410 layer Substances 0.000 description 46
- 239000011347 resin Substances 0.000 description 10
- 229920005989 resin Polymers 0.000 description 10
- 239000000463 material Substances 0.000 description 7
- 239000011521 glass Substances 0.000 description 5
- 230000003287 optical effect Effects 0.000 description 4
- 229910052737 gold Inorganic materials 0.000 description 3
- 238000003848 UV Light-Curing Methods 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 230000001788 irregular Effects 0.000 description 2
- 238000002844 melting Methods 0.000 description 2
- 239000010453 quartz Substances 0.000 description 2
- 238000000820 replica moulding Methods 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 239000002356 single layer Substances 0.000 description 2
- 238000003892 spreading Methods 0.000 description 2
- RZVAJINKPMORJF-UHFFFAOYSA-N Acetaminophen Chemical compound CC(=O)NC1=CC=C(O)C=C1 RZVAJINKPMORJF-UHFFFAOYSA-N 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 229910018885 Pt—Au Inorganic materials 0.000 description 1
- 229910004541 SiN Inorganic materials 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000006089 photosensitive glass Substances 0.000 description 1
- 239000005297 pyrex Substances 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/04—Slit arrangements slit adjustment
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0202—Mechanical elements; Supports for optical elements
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
- G01J3/0243—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows having a through-hole enabling the optical element to fulfil an additional optical function, e.g. a mirror or grating having a throughhole for a light collecting or light injecting optical fiber
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0256—Compact construction
- G01J3/0259—Monolithic
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0262—Constructional arrangements for removing stray light
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0291—Housings; Spectrometer accessories; Spatial arrangement of elements, e.g. folded path arrangements
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/12—Generating the spectrum; Monochromators
- G01J3/18—Generating the spectrum; Monochromators using diffraction elements, e.g. grating
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
- G01J3/2803—Investigating the spectrum using photoelectric array detector
Landscapes
- Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- General Physics & Mathematics (AREA)
- Spectrometry And Color Measurement (AREA)
- Light Receiving Elements (AREA)
- Optical Elements Other Than Lenses (AREA)
- Surface Treatment Of Optical Elements (AREA)
Abstract
【解決手段】 分光モジュール1では、分光部3に進行する光L1が通過する光通過孔6a、及び光検出素子4の光検出部4aに進行する光L2が通過する光通過孔6bを有する光吸収層6がパターニングによって一体成形される。そのため、光通過孔6aと光通過孔6bとの相対的な位置関係にずれが生じるのを防止することができる。しかも、光吸収層6によって、迷光の発生が抑制され、また、迷光が吸収されるため、光検出素子4の光検出部4aに迷光が入射するのを抑制することができる。従って、分光モジュール1によれば、信頼性を向上させることが可能となる。
【選択図】 図2
Description
[第1の実施形態]
[第2の実施形態]
Claims (7)
- 光を透過させる本体部と、
前記本体部の所定の面から前記本体部に入射した光を分光して前記所定の面側に反射する分光部と、
前記所定の面上に支持され、前記分光部によって分光されて反射された光を検出する光検出素子と、を備え、
前記所定の面には、前記分光部に進行する光が通過する第1の光通過孔、及び前記光検出素子に進行する光が通過する第2の光通過孔を有する光吸収層が形成されていることを特徴とする分光モジュール。 - 前記本体部は、前記所定の面と略直交する方向に積層された複数の光透過部材を有することを特徴とする請求項1記載の分光モジュール。
- 前記所定の面を有する前記光透過部材は、板状に形成されていることを特徴とする請求項2記載の分光モジュール。
- 前記所定の面と略直交する方向において隣り合う前記光透過部材間には、前記光吸収層が形成されていることを特徴とする請求項2又は3記載の分光モジュール。
- 前記所定の面には、前記光検出素子と電気的に接続された配線が形成されていることを特徴とする請求項1〜4のいずれか一項記載の分光モジュール。
- 前記配線は、前記所定の面側に光反射防止層を有することを特徴とする請求項5記載の分光モジュール。
- 前記所定の面に形成された前記光吸収層における前記所定の面の反対側の面には、前記光検出素子と電気的に接続された配線が形成されていることを特徴とする請求項1〜4のいずれか一項記載の分光モジュール。
Priority Applications (25)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007153014A JP4887221B2 (ja) | 2007-06-08 | 2007-06-08 | 分光モジュール |
KR1020097001454A KR20100017086A (ko) | 2007-06-08 | 2008-06-05 | 분광 모듈 |
CN200880000507XA CN101542249B (zh) | 2007-06-08 | 2008-06-05 | 分光模块 |
KR1020097000554A KR20100017082A (ko) | 2007-06-08 | 2008-06-05 | 분광 모듈 |
KR1020097000587A KR20100017083A (ko) | 2007-06-08 | 2008-06-05 | 분광 모듈 |
CN2008800005046A CN101542247B (zh) | 2007-06-08 | 2008-06-05 | 分光模块 |
US12/377,350 US8068223B2 (en) | 2007-06-08 | 2008-06-05 | Spectroscopic module |
EP08765192.3A EP2075555A4 (en) | 2007-06-08 | 2008-06-05 | SPECTROSCOPIC MODULE |
EP08765174.1A EP2154498B1 (en) | 2007-06-08 | 2008-06-05 | Spectroscopic module |
EP08765177.4A EP2072978A4 (en) | 2007-06-08 | 2008-06-05 | SPECTROSCOPIC MODULE |
CNA2008800005101A CN101542252A (zh) | 2007-06-08 | 2008-06-05 | 分光模块 |
US12/377,314 US8049887B2 (en) | 2007-06-08 | 2008-06-05 | Spectroscopic module |
PCT/JP2008/060361 WO2008149928A1 (ja) | 2007-06-08 | 2008-06-05 | 分光モジュール |
EP08765191.5A EP2063239A4 (en) | 2007-06-08 | 2008-06-05 | SPECTROSCOPIC MODULE |
PCT/JP2008/060379 WO2008149941A1 (ja) | 2007-06-08 | 2008-06-05 | 分光モジュール |
US12/377,325 US8068224B2 (en) | 2007-06-08 | 2008-06-05 | Spectroscopic module |
CN2008800005084A CN101542250B (zh) | 2007-06-08 | 2008-06-05 | 分光模块 |
US12/377,343 US8045155B2 (en) | 2007-06-08 | 2008-06-05 | Spectroscopic module |
PCT/JP2008/060378 WO2008149940A1 (ja) | 2007-06-08 | 2008-06-05 | 分光モジュール |
KR1020097001214A KR101642514B1 (ko) | 2007-06-08 | 2008-06-05 | 분광 모듈 |
PCT/JP2008/060364 WO2008149930A1 (ja) | 2007-06-08 | 2008-06-05 | 分光モジュール |
TW097121327A TW200916739A (en) | 2007-06-08 | 2008-06-06 | Spectroscopic module |
TW097121324A TW200916738A (en) | 2007-06-08 | 2008-06-06 | Spectroscopic module |
TW097121333A TWI445931B (zh) | 2007-06-08 | 2008-06-06 | Spectral module |
TW097121329A TWI451072B (zh) | 2007-06-08 | 2008-06-06 | Spectral module |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007153014A JP4887221B2 (ja) | 2007-06-08 | 2007-06-08 | 分光モジュール |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2011251704A Division JP5097294B2 (ja) | 2011-11-17 | 2011-11-17 | 分光モジュール |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2008304385A true JP2008304385A (ja) | 2008-12-18 |
JP4887221B2 JP4887221B2 (ja) | 2012-02-29 |
Family
ID=40093739
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2007153014A Active JP4887221B2 (ja) | 2007-06-08 | 2007-06-08 | 分光モジュール |
Country Status (7)
Country | Link |
---|---|
US (1) | US8068224B2 (ja) |
EP (1) | EP2154498B1 (ja) |
JP (1) | JP4887221B2 (ja) |
KR (1) | KR101642514B1 (ja) |
CN (3) | CN101542249B (ja) |
TW (1) | TWI445931B (ja) |
WO (1) | WO2008149928A1 (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2013007707A (ja) * | 2011-06-27 | 2013-01-10 | Hamamatsu Photonics Kk | 分光モジュール |
US8422012B2 (en) | 2009-05-01 | 2013-04-16 | Canon Kabushiki Kaisha | Spectrometer and image forming apparatus having the same |
Families Citing this family (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2008149930A1 (ja) * | 2007-06-08 | 2008-12-11 | Hamamatsu Photonics K.K. | 分光モジュール |
JP5094742B2 (ja) | 2007-06-08 | 2012-12-12 | 浜松ホトニクス株式会社 | 分光器 |
JP4891841B2 (ja) * | 2007-06-08 | 2012-03-07 | 浜松ホトニクス株式会社 | 分光モジュール |
JP4891840B2 (ja) * | 2007-06-08 | 2012-03-07 | 浜松ホトニクス株式会社 | 分光モジュール |
EP2075555A4 (en) | 2007-06-08 | 2014-01-01 | Hamamatsu Photonics Kk | SPECTROSCOPIC MODULE |
JP4887221B2 (ja) | 2007-06-08 | 2012-02-29 | 浜松ホトニクス株式会社 | 分光モジュール |
EP2063239A4 (en) * | 2007-06-08 | 2013-12-25 | Hamamatsu Photonics Kk | SPECTROSCOPIC MODULE |
JP5074291B2 (ja) * | 2008-05-15 | 2012-11-14 | 浜松ホトニクス株式会社 | 分光モジュール |
JP5207938B2 (ja) * | 2008-05-15 | 2013-06-12 | 浜松ホトニクス株式会社 | 分光モジュール及び分光モジュールの製造方法 |
JP5910989B2 (ja) * | 2012-03-09 | 2016-04-27 | 株式会社リコー | 分光計測装置、画像評価装置及び画像形成装置 |
JP5113947B2 (ja) * | 2012-04-18 | 2013-01-09 | 浜松ホトニクス株式会社 | 分光モジュール |
JP6061542B2 (ja) | 2012-08-06 | 2017-01-18 | 浜松ホトニクス株式会社 | 分光器 |
GB2508376A (en) | 2012-11-29 | 2014-06-04 | Ibm | Optical spectrometer comprising an adjustably strained photodiode |
JP6251073B2 (ja) * | 2014-02-05 | 2017-12-20 | 浜松ホトニクス株式会社 | 分光器、及び分光器の製造方法 |
CN107179584B (zh) * | 2016-03-10 | 2019-06-14 | 源杰科技股份有限公司 | 光学连接器 |
EP3372966B1 (en) * | 2017-03-10 | 2021-09-01 | Hitachi High-Tech Analytical Science Limited | A portable analyzer using optical emission spectoscopy |
US11493386B2 (en) | 2018-07-06 | 2022-11-08 | Hamamatsu Photonics K.K. | Spectral module and method for manufacturing spectral module |
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JP5094742B2 (ja) | 2007-06-08 | 2012-12-12 | 浜松ホトニクス株式会社 | 分光器 |
JP4891841B2 (ja) | 2007-06-08 | 2012-03-07 | 浜松ホトニクス株式会社 | 分光モジュール |
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2007
- 2007-06-08 JP JP2007153014A patent/JP4887221B2/ja active Active
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2008
- 2008-06-05 EP EP08765174.1A patent/EP2154498B1/en active Active
- 2008-06-05 CN CN200880000507XA patent/CN101542249B/zh not_active Expired - Fee Related
- 2008-06-05 CN CN2008800005046A patent/CN101542247B/zh active Active
- 2008-06-05 KR KR1020097001214A patent/KR101642514B1/ko active IP Right Grant
- 2008-06-05 WO PCT/JP2008/060361 patent/WO2008149928A1/ja active Application Filing
- 2008-06-05 CN CNA2008800005101A patent/CN101542252A/zh active Pending
- 2008-06-05 US US12/377,325 patent/US8068224B2/en active Active
- 2008-06-06 TW TW097121333A patent/TWI445931B/zh active
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Publication number | Priority date | Publication date | Assignee | Title |
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US8422012B2 (en) | 2009-05-01 | 2013-04-16 | Canon Kabushiki Kaisha | Spectrometer and image forming apparatus having the same |
US9217667B2 (en) | 2009-05-01 | 2015-12-22 | Canon Kabushiki Kaisha | Spectrometer and image forming apparatus having the same |
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Also Published As
Publication number | Publication date |
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WO2008149928A1 (ja) | 2008-12-11 |
EP2154498B1 (en) | 2018-08-08 |
CN101542249A (zh) | 2009-09-23 |
US8068224B2 (en) | 2011-11-29 |
CN101542252A (zh) | 2009-09-23 |
TWI445931B (zh) | 2014-07-21 |
JP4887221B2 (ja) | 2012-02-29 |
EP2154498A4 (en) | 2013-12-25 |
KR101642514B1 (ko) | 2016-07-25 |
TW200916741A (en) | 2009-04-16 |
US20100201980A1 (en) | 2010-08-12 |
KR20100017085A (ko) | 2010-02-16 |
CN101542247B (zh) | 2013-08-21 |
CN101542247A (zh) | 2009-09-23 |
EP2154498A1 (en) | 2010-02-17 |
CN101542249B (zh) | 2012-07-25 |
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