JP2006030031A - 分光器 - Google Patents
分光器 Download PDFInfo
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- JP2006030031A JP2006030031A JP2004210687A JP2004210687A JP2006030031A JP 2006030031 A JP2006030031 A JP 2006030031A JP 2004210687 A JP2004210687 A JP 2004210687A JP 2004210687 A JP2004210687 A JP 2004210687A JP 2006030031 A JP2006030031 A JP 2006030031A
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- 230000003287 optical effect Effects 0.000 claims abstract description 178
- 230000003595 spectral effect Effects 0.000 claims abstract description 27
- 238000001514 detection method Methods 0.000 claims description 11
- 239000000463 material Substances 0.000 claims description 7
- 238000000034 method Methods 0.000 abstract description 4
- 230000000644 propagated effect Effects 0.000 abstract description 4
- 238000001228 spectrum Methods 0.000 description 5
- 239000011521 glass Substances 0.000 description 4
- 230000007423 decrease Effects 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 230000010287 polarization Effects 0.000 description 3
- 230000001419 dependent effect Effects 0.000 description 2
- 239000006185 dispersion Substances 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 230000001902 propagating effect Effects 0.000 description 2
- 238000004611 spectroscopical analysis Methods 0.000 description 2
- 239000004593 Epoxy Substances 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 239000012790 adhesive layer Substances 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000010410 layer Substances 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 238000002310 reflectometry Methods 0.000 description 1
- 230000002040 relaxant effect Effects 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
- G01J3/2803—Investigating the spectrum using photoelectric array detector
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0256—Compact construction
- G01J3/0259—Monolithic
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0262—Constructional arrangements for removing stray light
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/12—Generating the spectrum; Monochromators
- G01J3/18—Generating the spectrum; Monochromators using diffraction elements, e.g. grating
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- Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- General Physics & Mathematics (AREA)
- Spectrometry And Color Measurement (AREA)
Abstract
【解決手段】 分光の対象光が伝搬する分光光路が内部に設定される光学体10と、対象光を入射する光入射スリット16と、入射された対象光を分光する回折格子17と、回折格子17で分光された対象光を検出するフォトダイオードアレイ18とによって、分光器1Aを構成する。また、光学体10とフォトダイオードアレイ18とを光学的に接続させる光学部材として、分光された対象光に対する光入射面21が光学体10の上面11に接し、光出射面22がフォトダイオードアレイ18に接するとともに、光出射面22が光入射面21に対して所定角度で傾いた形状に形成された光学接続部材20を設置する。
【選択図】 図2
Description
Claims (3)
- 分光対象となる所定の波長範囲内の対象光を通過させる材料によって形成され、その内部に前記対象光が伝搬する分光光路が設定される光学体と、
前記分光光路上となる所定位置に設けられた分光素子と、
前記分光光路に対して入射側に位置し、前記対象光を入射させる光入射手段と、
前記分光光路に対して出射側に位置し、前記光入射手段から入射して前記分光素子で分光された前記対象光を検出する光検出手段と、
前記光学体及び前記光検出手段を光学的に接続させる光学接続部材とを備え、
前記光学接続部材は、前記分光素子で分光された前記対象光に対する光入射面が前記光学体の所定の面に接し、前記光入射面とは反対側となる光出射面が前記光検出手段に接するとともに、前記光出射面が前記光入射面に対して所定角度で傾いた形状に形成されていることを特徴とする分光器。 - 前記光学接続部材は、前記分光素子からの前記対象光の一部が前記光出射面で反射された反射光が、前記分光光路から外れる方向に伝搬するように構成されていることを特徴とする請求項1記載の分光器。
- 前記光学接続部材は、前記分光素子で分光された前記対象光の波長による焦点ラインに対して、前記光出射面が沿うように構成されていることを特徴とする請求項1記載の分光器。
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004210687A JP4473665B2 (ja) | 2004-07-16 | 2004-07-16 | 分光器 |
US11/596,066 US7605917B2 (en) | 2004-07-16 | 2005-07-08 | Spectrometer |
PCT/JP2005/013096 WO2006009089A1 (en) | 2004-07-16 | 2005-07-08 | Spectrometer |
DE602005024565T DE602005024565D1 (de) | 2004-07-16 | 2005-07-08 | Spektrometer |
EP05759947A EP1776567B1 (en) | 2004-07-16 | 2005-07-08 | Spectrometer |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004210687A JP4473665B2 (ja) | 2004-07-16 | 2004-07-16 | 分光器 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2006030031A true JP2006030031A (ja) | 2006-02-02 |
JP4473665B2 JP4473665B2 (ja) | 2010-06-02 |
Family
ID=34981382
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2004210687A Active JP4473665B2 (ja) | 2004-07-16 | 2004-07-16 | 分光器 |
Country Status (5)
Country | Link |
---|---|
US (1) | US7605917B2 (ja) |
EP (1) | EP1776567B1 (ja) |
JP (1) | JP4473665B2 (ja) |
DE (1) | DE602005024565D1 (ja) |
WO (1) | WO2006009089A1 (ja) |
Cited By (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2008149948A1 (ja) * | 2007-06-08 | 2008-12-11 | Hamamatsu Photonics K.K. | 分光モジュール |
WO2008149944A1 (ja) * | 2007-06-08 | 2008-12-11 | Hamamatsu Photonics K.K. | 分光モジュール |
JP2008304385A (ja) * | 2007-06-08 | 2008-12-18 | Hamamatsu Photonics Kk | 分光モジュール |
JP2009535621A (ja) * | 2006-04-28 | 2009-10-01 | コーニング インコーポレイテッド | モノリシックオフナー分光器 |
JP2009300413A (ja) * | 2008-05-15 | 2009-12-24 | Hamamatsu Photonics Kk | 分光モジュール |
JP2009300418A (ja) * | 2008-05-15 | 2009-12-24 | Hamamatsu Photonics Kk | 分光モジュール |
JP2009300416A (ja) * | 2008-05-15 | 2009-12-24 | Hamamatsu Photonics Kk | 分光モジュールの製造方法及び分光モジュール |
JP2009300415A (ja) * | 2008-05-15 | 2009-12-24 | Hamamatsu Photonics Kk | 分光モジュール |
JP2011164014A (ja) * | 2010-02-12 | 2011-08-25 | Shimadzu Corp | ポリクロメータ |
US8031336B2 (en) | 2007-06-08 | 2011-10-04 | Hamamatsu Photonics K.K. | Spectroscope |
US8045155B2 (en) | 2007-06-08 | 2011-10-25 | Hamamatsu Photonics K.K. | Spectroscopic module |
US8049887B2 (en) | 2007-06-08 | 2011-11-01 | Hamamatsu Photonics K.K. | Spectroscopic module |
US8068223B2 (en) | 2007-06-08 | 2011-11-29 | Hamamatsu Photonics K.K. | Spectroscopic module |
JP2012137506A (ja) * | 2012-04-18 | 2012-07-19 | Hamamatsu Photonics Kk | 分光モジュール |
US8604412B2 (en) | 2008-05-15 | 2013-12-10 | Hamamatsu Photonics K.K. | Spectral module and method for manufacturing spectral module |
US8804118B2 (en) | 2008-05-15 | 2014-08-12 | Hamamatsu Photonics K.K. | Spectral module |
JP2018105883A (ja) * | 2018-02-14 | 2018-07-05 | 浜松ホトニクス株式会社 | 分光器 |
US10775236B2 (en) | 2014-02-05 | 2020-09-15 | Hamamatsu Photonics K.K. | Spectrometer, and spectrometer production method |
Families Citing this family (11)
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US8203710B1 (en) | 2006-06-12 | 2012-06-19 | Wavefront Research, Inc. | Compact wide field fast hyperspectral imager |
US7817274B2 (en) | 2007-10-05 | 2010-10-19 | Jingyun Zhang | Compact spectrometer |
US7812949B2 (en) * | 2007-10-17 | 2010-10-12 | Horiba Jobin Yvon Inc. | Spectrometer with cylindrical lens for astigmatism correction and demagnification |
US8345226B2 (en) | 2007-11-30 | 2013-01-01 | Jingyun Zhang | Spectrometers miniaturized for working with cellular phones and other portable electronic devices |
DE202008003977U1 (de) * | 2008-02-26 | 2009-07-02 | Bürkert Werke GmbH & Co. KG | Mikrospektrometer |
JP2009300422A (ja) * | 2008-05-15 | 2009-12-24 | Hamamatsu Photonics Kk | 分光モジュール |
JP2009300417A (ja) * | 2008-05-15 | 2009-12-24 | Hamamatsu Photonics Kk | 分光モジュールの製造方法及び分光モジュール |
US8054462B2 (en) * | 2009-09-16 | 2011-11-08 | Itt Manufacturing Enterprises, Inc. | Quantum efficiency enhancement device for array detectors |
FI20155547A (fi) * | 2015-07-10 | 2017-01-11 | Outotec Finland Oy | Transparentti suojaava seinäelin käytettäväksi menetelmässä tai laitteessa fluidien laseravusteista optista säteilyspektroskooppia varten |
DE102016225344A1 (de) * | 2016-12-16 | 2018-06-21 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | System zur Analyse von elektromagnetischer Strahlung und Bauelement zur Herstellung desselben |
GB201708643D0 (en) * | 2017-05-31 | 2017-07-12 | Univ Edinburgh | Optical wireless communications system |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4633078A (en) * | 1985-07-23 | 1986-12-30 | The Perkin-Elmer Corporation | Optical interference eliminator |
DE3743131A1 (de) * | 1987-10-26 | 1989-05-03 | Siemens Ag | Anordnung zur hochaufloesenden spektroskopie |
DE4038638A1 (de) | 1990-12-04 | 1992-06-11 | Zeiss Carl Fa | Diodenzeilen-spektrometer |
JPH09250946A (ja) * | 1996-03-14 | 1997-09-22 | Nikon Corp | 分光装置 |
JP3137020B2 (ja) * | 1997-02-14 | 2001-02-19 | 日本電気株式会社 | 分光計 |
EP0942267B1 (de) * | 1998-03-11 | 2006-08-30 | Gretag-Macbeth AG | Spektrometer |
DE59913150D1 (de) * | 1999-04-01 | 2006-04-27 | Gretag Macbeth Ag Regensdorf | Spektrometer |
WO2002010698A1 (en) * | 2000-07-28 | 2002-02-07 | Otsuka Electronics Co., Ltd. | Light spectrum detecting apparatus |
US7262845B2 (en) * | 2003-05-27 | 2007-08-28 | Wayne State University | Diffractive imaging spectrometer |
-
2004
- 2004-07-16 JP JP2004210687A patent/JP4473665B2/ja active Active
-
2005
- 2005-07-08 DE DE602005024565T patent/DE602005024565D1/de active Active
- 2005-07-08 WO PCT/JP2005/013096 patent/WO2006009089A1/en active Application Filing
- 2005-07-08 EP EP05759947A patent/EP1776567B1/en active Active
- 2005-07-08 US US11/596,066 patent/US7605917B2/en active Active
Cited By (30)
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---|---|---|---|---|
JP2009535621A (ja) * | 2006-04-28 | 2009-10-01 | コーニング インコーポレイテッド | モノリシックオフナー分光器 |
JP2013231984A (ja) * | 2006-04-28 | 2013-11-14 | Corning Inc | モノリシックオフナー分光器 |
JP2012230388A (ja) * | 2006-04-28 | 2012-11-22 | Corning Inc | モノリシックオフナー分光器 |
US8477306B2 (en) | 2007-06-08 | 2013-07-02 | Hamamatsu Photonics K.K. | Spectroscope |
US8477305B2 (en) | 2007-06-08 | 2013-07-02 | Hamamatsu Photonics K.K. | Spectroscope |
JP2008304387A (ja) * | 2007-06-08 | 2008-12-18 | Hamamatsu Photonics Kk | 分光モジュール |
WO2008149944A1 (ja) * | 2007-06-08 | 2008-12-11 | Hamamatsu Photonics K.K. | 分光モジュール |
JP2008304385A (ja) * | 2007-06-08 | 2008-12-18 | Hamamatsu Photonics Kk | 分光モジュール |
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US8031336B2 (en) | 2007-06-08 | 2011-10-04 | Hamamatsu Photonics K.K. | Spectroscope |
US8045155B2 (en) | 2007-06-08 | 2011-10-25 | Hamamatsu Photonics K.K. | Spectroscopic module |
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JP2008304379A (ja) * | 2007-06-08 | 2008-12-18 | Hamamatsu Photonics Kk | 分光モジュール |
JP2009300415A (ja) * | 2008-05-15 | 2009-12-24 | Hamamatsu Photonics Kk | 分光モジュール |
JP2009300416A (ja) * | 2008-05-15 | 2009-12-24 | Hamamatsu Photonics Kk | 分光モジュールの製造方法及び分光モジュール |
JP2009300418A (ja) * | 2008-05-15 | 2009-12-24 | Hamamatsu Photonics Kk | 分光モジュール |
US8564773B2 (en) | 2008-05-15 | 2013-10-22 | Hamamatsu Photonics K.K. | Spectroscopy module |
JP2009300413A (ja) * | 2008-05-15 | 2009-12-24 | Hamamatsu Photonics Kk | 分光モジュール |
US8604412B2 (en) | 2008-05-15 | 2013-12-10 | Hamamatsu Photonics K.K. | Spectral module and method for manufacturing spectral module |
US8742320B2 (en) | 2008-05-15 | 2014-06-03 | Hamamatsu Photonics K.K. | Spectral module and method for manufacturing spectral module |
US8804118B2 (en) | 2008-05-15 | 2014-08-12 | Hamamatsu Photonics K.K. | Spectral module |
JP2011164014A (ja) * | 2010-02-12 | 2011-08-25 | Shimadzu Corp | ポリクロメータ |
JP2012137506A (ja) * | 2012-04-18 | 2012-07-19 | Hamamatsu Photonics Kk | 分光モジュール |
US10775236B2 (en) | 2014-02-05 | 2020-09-15 | Hamamatsu Photonics K.K. | Spectrometer, and spectrometer production method |
JP2018105883A (ja) * | 2018-02-14 | 2018-07-05 | 浜松ホトニクス株式会社 | 分光器 |
Also Published As
Publication number | Publication date |
---|---|
DE602005024565D1 (de) | 2010-12-16 |
JP4473665B2 (ja) | 2010-06-02 |
EP1776567A1 (en) | 2007-04-25 |
US20070211250A1 (en) | 2007-09-13 |
US7605917B2 (en) | 2009-10-20 |
EP1776567B1 (en) | 2010-11-03 |
WO2006009089A1 (en) | 2006-01-26 |
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