JP2009300416A - 分光モジュールの製造方法及び分光モジュール - Google Patents
分光モジュールの製造方法及び分光モジュール Download PDFInfo
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- G—PHYSICS
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- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0202—Mechanical elements; Supports for optical elements
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
- G01J3/0208—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using focussing or collimating elements, e.g. lenses or mirrors; performing aberration correction
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
- G01J3/0243—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows having a through-hole enabling the optical element to fulfil an additional optical function, e.g. a mirror or grating having a throughhole for a light collecting or light injecting optical fiber
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
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- G01J3/02—Details
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
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- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
- G01J3/2803—Investigating the spectrum using photoelectric array detector
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49826—Assembling or joining
- Y10T29/49895—Associating parts by use of aligning means [e.g., use of a drift pin or a "fixture"]
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- Spectroscopy & Molecular Physics (AREA)
- General Physics & Mathematics (AREA)
- Spectrometry And Color Measurement (AREA)
Abstract
【解決手段】 分光モジュール1では、光通過孔50を有する光検出素子5を用いる。そのため、光通過孔50と光検出素子5の光検出部5aとの相対的な位置関係にずれが生じるのを防止することができる。更に、基板2の前面2aに形成された配線9に光検出素子5をフェースダウンボンディングによって電気的に接続し、基板2と光検出素子5との間にアンダーフィル樹脂として樹脂層79を形成する。そのため、基板2と光検出素子5との固定強度を向上させることができる。しかも、樹脂層79を形成する前に、光通過孔50を包囲するガイド部77に沿うように樹脂層78を形成する。これにより、光通過孔50への樹脂層79の進入が防止されるため、基板2に光を適切に入射させることができる。
【選択図】 図2
Description
Claims (5)
- 光を透過させる本体部と、前記本体部の所定の面側から前記本体部に入射した光を分光すると共に前記所定の面側に反射する分光部と、前記分光部によって分光された光を検出する光検出素子と、を備える分光モジュールの製造方法であって、
前記分光部に進行する光が通過する光通過孔、及び前記光通過孔を包囲し且つ一部が前記光検出素子の外縁に至るガイド部を有する前記光検出素子を、前記所定の面に形成された配線にフェースダウンボンディングによって電気的に接続する工程と、
前記本体部と前記光検出素子との間に、前記ガイド部に沿うように第1の樹脂層を形成する工程と、
前記本体部と前記光検出素子との間における前記第1の樹脂層の外側に、前記光検出素子の光検出部に対向するように第2の樹脂層を形成する工程と、を含むことを特徴とする分光モジュールの製造方法。 - 前記第2の樹脂層は、前記第1の樹脂層よりも前記本体部との屈折率整合性が高い材料からなることを特徴とする請求項1記載の分光モジュールの製造方法。
- 前記第1の樹脂層は、前記第2の樹脂層よりも光吸収性が高い材料からなることを特徴とする請求項1又は2記載の分光モジュールの製造方法。
- 前記ガイド部の一部は、前記光検出素子において対向する外縁のそれぞれに至っていることを特徴とする請求項1〜3のいずれか一項記載の分光モジュールの製造方法。
- 請求項1〜4のいずれか一項記載の分光モジュールの製造方法によって製造されたことを特徴とする分光モジュール。
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
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JP2008311012A JP5205240B2 (ja) | 2008-05-15 | 2008-12-05 | 分光モジュールの製造方法及び分光モジュール |
US12/464,267 US8027034B2 (en) | 2008-05-15 | 2009-05-12 | Method for manufacturing spectroscopy module, and spectroscopy module |
DE102009021439A DE102009021439A1 (de) | 2008-05-15 | 2009-05-15 | Verfahren zum Herstellen eines Spektroskopiemoduls und Spektroskopiemodul |
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JP2008128687 | 2008-05-15 | ||
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JP2008311012A JP5205240B2 (ja) | 2008-05-15 | 2008-12-05 | 分光モジュールの製造方法及び分光モジュール |
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JP2009300416A true JP2009300416A (ja) | 2009-12-24 |
JP5205240B2 JP5205240B2 (ja) | 2013-06-05 |
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US (1) | US8027034B2 (ja) |
JP (1) | JP5205240B2 (ja) |
DE (1) | DE102009021439A1 (ja) |
Families Citing this family (12)
Publication number | Priority date | Publication date | Assignee | Title |
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JP5207938B2 (ja) | 2008-05-15 | 2013-06-12 | 浜松ホトニクス株式会社 | 分光モジュール及び分光モジュールの製造方法 |
JP5205238B2 (ja) * | 2008-05-15 | 2013-06-05 | 浜松ホトニクス株式会社 | 分光モジュール |
JP5205241B2 (ja) * | 2008-05-15 | 2013-06-05 | 浜松ホトニクス株式会社 | 分光モジュール |
JP5205243B2 (ja) * | 2008-05-15 | 2013-06-05 | 浜松ホトニクス株式会社 | 分光器 |
JP2009300422A (ja) * | 2008-05-15 | 2009-12-24 | Hamamatsu Photonics Kk | 分光モジュール |
JP2009300417A (ja) * | 2008-05-15 | 2009-12-24 | Hamamatsu Photonics Kk | 分光モジュールの製造方法及び分光モジュール |
JP5205242B2 (ja) * | 2008-05-15 | 2013-06-05 | 浜松ホトニクス株式会社 | 分光器の製造方法 |
JP5415060B2 (ja) | 2008-05-15 | 2014-02-12 | 浜松ホトニクス株式会社 | 分光モジュール |
JP5512961B2 (ja) * | 2008-05-15 | 2014-06-04 | 浜松ホトニクス株式会社 | 分光モジュール及びその製造方法 |
JP2009300418A (ja) | 2008-05-15 | 2009-12-24 | Hamamatsu Photonics Kk | 分光モジュール |
WO2011134156A1 (zh) | 2010-04-29 | 2011-11-03 | 晶兆科技股份有限公司 | 具有锥状狭缝的微型光谱仪的光机模块及其狭缝结构 |
JP2015106106A (ja) | 2013-12-02 | 2015-06-08 | セイコーエプソン株式会社 | 電子デバイスおよび電子機器 |
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- 2008-12-05 JP JP2008311012A patent/JP5205240B2/ja active Active
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2009
- 2009-05-12 US US12/464,267 patent/US8027034B2/en not_active Expired - Fee Related
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JP2000065642A (ja) * | 1998-03-11 | 2000-03-03 | Gretag Macbeth Ag | スペクトロメ―タ |
JP2004191246A (ja) * | 2002-12-12 | 2004-07-08 | Matsushita Electric Ind Co Ltd | 凹凸検出センサ |
WO2004082023A1 (ja) * | 2003-03-10 | 2004-09-23 | Hamamatsu Photonics K.K. | ホトダイオードアレイおよびその製造方法並びに放射線検出器 |
JP2004354176A (ja) * | 2003-05-28 | 2004-12-16 | Hamamatsu Photonics Kk | 光検出器及びそれを用いた分光器 |
JP2006030031A (ja) * | 2004-07-16 | 2006-02-02 | Hamamatsu Photonics Kk | 分光器 |
WO2008149940A1 (ja) * | 2007-06-08 | 2008-12-11 | Hamamatsu Photonics K.K. | 分光モジュール |
WO2008149944A1 (ja) * | 2007-06-08 | 2008-12-11 | Hamamatsu Photonics K.K. | 分光モジュール |
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JP5205240B2 (ja) | 2013-06-05 |
US8027034B2 (en) | 2011-09-27 |
US20090290154A1 (en) | 2009-11-26 |
DE102009021439A1 (de) | 2009-12-10 |
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