WO2011134156A1 - 具有锥状狭缝的微型光谱仪的光机模块及其狭缝结构 - Google Patents
具有锥状狭缝的微型光谱仪的光机模块及其狭缝结构 Download PDFInfo
- Publication number
- WO2011134156A1 WO2011134156A1 PCT/CN2010/072336 CN2010072336W WO2011134156A1 WO 2011134156 A1 WO2011134156 A1 WO 2011134156A1 CN 2010072336 W CN2010072336 W CN 2010072336W WO 2011134156 A1 WO2011134156 A1 WO 2011134156A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- slit
- micro
- substrate
- optomechanical module
- optical signal
- Prior art date
Links
- 230000003287 optical effect Effects 0.000 claims abstract description 54
- 239000004065 semiconductor Substances 0.000 claims abstract description 19
- 230000000149 penetrating effect Effects 0.000 claims abstract description 3
- 239000000758 substrate Substances 0.000 claims description 33
- 230000003595 spectral effect Effects 0.000 claims description 12
- 239000000463 material Substances 0.000 claims description 11
- 229920002120 photoresistant polymer Polymers 0.000 claims description 8
- 229910052710 silicon Inorganic materials 0.000 claims description 5
- 239000010703 silicon Substances 0.000 claims description 5
- 230000002093 peripheral effect Effects 0.000 claims description 3
- 230000003746 surface roughness Effects 0.000 claims description 3
- 239000011521 glass Substances 0.000 claims description 2
- 229920003023 plastic Polymers 0.000 claims description 2
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 claims 1
- 239000013590 bulk material Substances 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 abstract description 13
- 238000000034 method Methods 0.000 abstract description 6
- 230000000694 effects Effects 0.000 abstract description 5
- 238000001228 spectrum Methods 0.000 abstract 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 4
- 238000001039 wet etching Methods 0.000 description 4
- 238000003754 machining Methods 0.000 description 3
- 230000002411 adverse Effects 0.000 description 2
- 238000009760 electrical discharge machining Methods 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229920006397 acrylic thermoplastic Polymers 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 239000000356 contaminant Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 238000005323 electroforming Methods 0.000 description 1
- 230000002708 enhancing effect Effects 0.000 description 1
- 230000006870 function Effects 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 230000008447 perception Effects 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
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- ISXSCDLOGDJUNJ-UHFFFAOYSA-N tert-butyl prop-2-enoate Chemical compound CC(C)(C)OC(=O)C=C ISXSCDLOGDJUNJ-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/34—Optical coupling means utilising prism or grating
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0256—Compact construction
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/04—Slit arrangements slit adjustment
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/12—Generating the spectrum; Monochromators
- G01J3/18—Generating the spectrum; Monochromators using diffraction elements, e.g. grating
- G01J3/20—Rowland circle spectrometers
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
- G01J3/2803—Investigating the spectrum using photoelectric array detector
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
Definitions
- FIG. 1 and 2 show a front view and a top view, respectively, of a conventional slit structure 300.
- the slit 310 of the slit structure 300 is manufactured by electrical discharge machining, so that the surface flatness is poor and there are many zigzag patterns. These jagged patterns may affect the incidence of light and have a negative impact on the performance of the spectrometer.
- the cost of electric discharge machining is high, and the use of electric discharge machining is less suitable for mass production.
- Figure 5 shows a side view of the miniature spectrometer of Figure 4.
- the height of the diffraction pattern 42 of the micro-diffraction grating 40 is generally about several tens of micrometers to several hundreds of micrometers.
- the macroscopic profile of the diffraction pattern 42 of the micro-diffraction grating 40 includes a curved surface as shown in FIG. 4 instead of the plane as shown in the conventional FIG. 3, which functions to pass through the micro-diffraction grating 40.
- the light is focused onto the front light sensor 50.
- the photo sensor 50 of Fig. 4 can have a plurality of photosensitive cells 52, such as two, three or more, and the photosensitive cells 52 are arranged in a line.
Landscapes
- Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Spectrometry And Color Measurement (AREA)
Description
Claims
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201080064168.9A CN102762966B (zh) | 2010-04-29 | 2010-04-29 | 具有锥状狭缝的微型光谱仪的光机模块及其狭缝结构 |
US13/642,828 US9746616B2 (en) | 2010-04-29 | 2010-04-29 | Optical module of micro spectrometer with tapered slit and slit structure thereof |
PCT/CN2010/072336 WO2011134156A1 (zh) | 2010-04-29 | 2010-04-29 | 具有锥状狭缝的微型光谱仪的光机模块及其狭缝结构 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PCT/CN2010/072336 WO2011134156A1 (zh) | 2010-04-29 | 2010-04-29 | 具有锥状狭缝的微型光谱仪的光机模块及其狭缝结构 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2011134156A1 true WO2011134156A1 (zh) | 2011-11-03 |
Family
ID=44860769
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/CN2010/072336 WO2011134156A1 (zh) | 2010-04-29 | 2010-04-29 | 具有锥状狭缝的微型光谱仪的光机模块及其狭缝结构 |
Country Status (3)
Country | Link |
---|---|
US (1) | US9746616B2 (zh) |
CN (1) | CN102762966B (zh) |
WO (1) | WO2011134156A1 (zh) |
Cited By (3)
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CN104819775A (zh) * | 2014-02-03 | 2015-08-05 | 比尔克特韦尔克有限公司 | 分光计及流体分析系统 |
WO2016115720A1 (zh) * | 2015-01-23 | 2016-07-28 | 台湾超微光学股份有限公司 | 光谱仪及其光输入部 |
CN109724696A (zh) * | 2018-12-15 | 2019-05-07 | 中国科学院长春光学精密机械与物理研究所 | 一种罗兰光栅光谱仪光谱分辨率的检测系统 |
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US10101278B2 (en) * | 2013-05-09 | 2018-10-16 | University Of Central Florida Research Foundation, Inc. | Portable spectrometer for the presumptive identification of illicit drugs and substances of abuse |
US9500827B2 (en) * | 2014-06-27 | 2016-11-22 | Intel Corporation | Apparatus, method and system for spectrometry with a displaceable waveguide structure |
US10656013B2 (en) | 2015-09-29 | 2020-05-19 | Chromation Inc. | Nanostructure based article, optical sensor and analytical instrument and method of forming same |
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JP1577691S (zh) * | 2016-06-14 | 2017-05-29 | ||
JP1582266S (zh) * | 2016-12-28 | 2017-07-24 | ||
JP1582267S (zh) * | 2016-12-28 | 2017-07-24 | ||
EP4034921A4 (en) * | 2019-09-24 | 2023-11-01 | Agilent Technologies, Inc. | OPENING WITH VARIABLE TRANSMISSION |
CN114114492B (zh) * | 2021-11-30 | 2022-08-16 | 中国科学院长春光学精密机械与物理研究所 | 硅基狭缝组件及将其装配到光路中的方法 |
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2010
- 2010-04-29 WO PCT/CN2010/072336 patent/WO2011134156A1/zh active Application Filing
- 2010-04-29 CN CN201080064168.9A patent/CN102762966B/zh not_active Expired - Fee Related
- 2010-04-29 US US13/642,828 patent/US9746616B2/en active Active
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CN104819775A (zh) * | 2014-02-03 | 2015-08-05 | 比尔克特韦尔克有限公司 | 分光计及流体分析系统 |
CN104819775B (zh) * | 2014-02-03 | 2018-12-14 | 比尔克特韦尔克有限公司 | 分光计及流体分析系统 |
WO2016115720A1 (zh) * | 2015-01-23 | 2016-07-28 | 台湾超微光学股份有限公司 | 光谱仪及其光输入部 |
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CN109724696A (zh) * | 2018-12-15 | 2019-05-07 | 中国科学院长春光学精密机械与物理研究所 | 一种罗兰光栅光谱仪光谱分辨率的检测系统 |
CN109724696B (zh) * | 2018-12-15 | 2020-08-21 | 中国科学院长春光学精密机械与物理研究所 | 一种罗兰光栅光谱仪光谱分辨率的检测系统 |
Also Published As
Publication number | Publication date |
---|---|
US9746616B2 (en) | 2017-08-29 |
CN102762966B (zh) | 2014-08-06 |
CN102762966A (zh) | 2012-10-31 |
US20140002820A1 (en) | 2014-01-02 |
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