JP2009276244A - 分光モジュール - Google Patents
分光モジュール Download PDFInfo
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- JP2009276244A JP2009276244A JP2008128693A JP2008128693A JP2009276244A JP 2009276244 A JP2009276244 A JP 2009276244A JP 2008128693 A JP2008128693 A JP 2008128693A JP 2008128693 A JP2008128693 A JP 2008128693A JP 2009276244 A JP2009276244 A JP 2009276244A
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- 238000001514 detection method Methods 0.000 claims abstract description 42
- 230000003595 spectral effect Effects 0.000 claims description 11
- 238000004611 spectroscopical analysis Methods 0.000 claims description 6
- 239000010410 layer Substances 0.000 description 22
- 239000011347 resin Substances 0.000 description 22
- 229920005989 resin Polymers 0.000 description 22
- 230000003287 optical effect Effects 0.000 description 16
- 239000003795 chemical substances by application Substances 0.000 description 15
- 230000031700 light absorption Effects 0.000 description 7
- 239000010931 gold Substances 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 238000005530 etching Methods 0.000 description 4
- 229910052737 gold Inorganic materials 0.000 description 4
- 229910052782 aluminium Inorganic materials 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 239000004033 plastic Substances 0.000 description 3
- 229910018885 Pt—Au Inorganic materials 0.000 description 2
- 238000001723 curing Methods 0.000 description 2
- 238000005520 cutting process Methods 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 238000000465 moulding Methods 0.000 description 2
- 239000002356 single layer Substances 0.000 description 2
- RZVAJINKPMORJF-UHFFFAOYSA-N Acetaminophen Chemical compound CC(=O)NC1=CC=C(O)C=C1 RZVAJINKPMORJF-UHFFFAOYSA-N 0.000 description 1
- 239000004925 Acrylic resin Substances 0.000 description 1
- 229920000178 Acrylic resin Polymers 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 210000005069 ears Anatomy 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 238000013007 heat curing Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000013307 optical fiber Substances 0.000 description 1
- 238000000016 photochemical curing Methods 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 239000005297 pyrex Substances 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 238000000820 replica moulding Methods 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/12—Generating the spectrum; Monochromators
- G01J3/18—Generating the spectrum; Monochromators using diffraction elements, e.g. grating
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0202—Mechanical elements; Supports for optical elements
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
- G01J3/0208—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using focussing or collimating elements, e.g. lenses or mirrors; performing aberration correction
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
- G01J3/0243—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows having a through-hole enabling the optical element to fulfil an additional optical function, e.g. a mirror or grating having a throughhole for a light collecting or light injecting optical fiber
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0256—Compact construction
- G01J3/0259—Monolithic
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
- G01J3/2803—Investigating the spectrum using photoelectric array detector
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/02—Mountings, adjusting means, or light-tight connections, for optical elements for lenses
- G02B7/022—Mountings, adjusting means, or light-tight connections, for optical elements for lenses lens and mount having complementary engagement means, e.g. screw/thread
Landscapes
- Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Spectrometry And Color Measurement (AREA)
- Mounting And Adjusting Of Optical Elements (AREA)
- Light Receiving Elements (AREA)
Abstract
【解決手段】 本発明に係る分光モジュール1では、一方の面2aから入射した光を透過させる基板2と、基板2の他方の面2bに対面する入射面3aを有し、基板2を透過して入射面3aから入射した光を透過させるレンズ部3と、レンズ部3に形成され、レンズ部3に入射した光を分光すると共に反射する分光部4と、分光部4によって反射された光を検出する光検出素子5と、他方の面2bと入射面3aとの間に設けられ、基板2に対してレンズ部3を支持する支持部8と、を備えている。この分光モジュール1によれば、支持部8によって基板2の他方の面2bとレンズ部3の入射面3aとの間に隙間Sが形成されるため、基板2の他方の面2bとレンズ部3の入射面3aとの接触による傷の発生を防止することができ、分光モジュールの信頼性を向上させることができる。
【選択図】図2
Description
[第1の実施形態]
[第2の実施形態]
[第3の実施形態]
[第4の実施形態]
[第5の実施形態]
Claims (4)
- 一方の面から入射した光を透過させる基板と、
前記基板の他方の面に対面する入射面を有し、前記基板を透過して前記入射面から入射した光を透過させるレンズ部と、
前記レンズ部に形成され、前記レンズ部に入射した光を分光すると共に反射する分光部と、
前記基板の前記一方の面側に配置され、前記分光部によって反射された光を検出する光検出素子と、
前記他方の面と前記入射面とが離間するように、前記基板に対して前記レンズ部を支持する支持部と、を備えることを特徴とする分光モジュール。 - 前記入射面には、前記分光部に対して所定の位置関係を有する第1の凹部が設けられており、
前記支持部は、前記基板に前記光検出素子を位置決めするための基準部に対して所定の位置関係を有するように、前記基板の前記他方の面側に設けられると共に、前記第1の凹部に嵌め合わされていることを特徴とする請求項1記載の分光モジュール。 - 前記他方の面には、前記基板に前記光検出素子を位置決めするための基準部に対して所定の位置関係を有する第2の凹部が設けられており、
前記支持部は、前記分光部に対して所定の位置関係を有するように、前記レンズ部の前記入射面側に設けられると共に、前記第2の凹部に嵌め合わされていることを特徴とする請求項1又は2記載の分光モジュール。 - 前記支持部は、前記分光部のグレーティング溝の延在方向と略一致する方向に延在していることを特徴とする請求項2又は3記載の分光モジュール。
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2008128693A JP5074291B2 (ja) | 2008-05-15 | 2008-05-15 | 分光モジュール |
KR1020107015308A KR20110005772A (ko) | 2008-05-15 | 2009-05-07 | 분광모듈 |
US12/992,456 US20110122408A1 (en) | 2008-05-15 | 2009-05-07 | Spectral module |
CN2009801087391A CN101970993A (zh) | 2008-05-15 | 2009-05-07 | 分光模块 |
EP09746528.0A EP2287576A4 (en) | 2008-05-15 | 2009-05-07 | spectral engine |
PCT/JP2009/058638 WO2009139321A1 (ja) | 2008-05-15 | 2009-05-07 | 分光モジュール |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2008128693A JP5074291B2 (ja) | 2008-05-15 | 2008-05-15 | 分光モジュール |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2009276244A true JP2009276244A (ja) | 2009-11-26 |
JP2009276244A5 JP2009276244A5 (ja) | 2010-01-21 |
JP5074291B2 JP5074291B2 (ja) | 2012-11-14 |
Family
ID=41318692
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2008128693A Active JP5074291B2 (ja) | 2008-05-15 | 2008-05-15 | 分光モジュール |
Country Status (6)
Country | Link |
---|---|
US (1) | US20110122408A1 (ja) |
EP (1) | EP2287576A4 (ja) |
JP (1) | JP5074291B2 (ja) |
KR (1) | KR20110005772A (ja) |
CN (1) | CN101970993A (ja) |
WO (1) | WO2009139321A1 (ja) |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5205241B2 (ja) | 2008-05-15 | 2013-06-05 | 浜松ホトニクス株式会社 | 分光モジュール |
JP5207938B2 (ja) | 2008-05-15 | 2013-06-12 | 浜松ホトニクス株式会社 | 分光モジュール及び分光モジュールの製造方法 |
JP5512961B2 (ja) * | 2008-05-15 | 2014-06-04 | 浜松ホトニクス株式会社 | 分光モジュール及びその製造方法 |
JP5415060B2 (ja) | 2008-05-15 | 2014-02-12 | 浜松ホトニクス株式会社 | 分光モジュール |
JP5875936B2 (ja) | 2012-05-18 | 2016-03-02 | 浜松ホトニクス株式会社 | 分光センサ |
JP5926610B2 (ja) * | 2012-05-18 | 2016-05-25 | 浜松ホトニクス株式会社 | 分光センサ |
JP5988690B2 (ja) | 2012-05-18 | 2016-09-07 | 浜松ホトニクス株式会社 | 分光センサ |
KR102009904B1 (ko) * | 2012-10-24 | 2019-08-12 | 삼성전자주식회사 | 광학부재 실장장치 및 이를 이용한 발광장치 제조방법 |
US11432406B2 (en) * | 2020-09-18 | 2022-08-30 | Advanced Semiconductor Engineering, Inc. | Package substrate |
Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH06207762A (ja) * | 1992-11-09 | 1994-07-26 | Saamobonitsuku:Kk | 電子冷却ユニツト |
JPH09255086A (ja) * | 1996-03-19 | 1997-09-30 | Nippon Zeon Co Ltd | フランジを持つ成形体 |
JP2000065642A (ja) * | 1998-03-11 | 2000-03-03 | Gretag Macbeth Ag | スペクトロメ―タ |
WO2000062344A1 (fr) * | 1999-04-13 | 2000-10-19 | Hamamatsu Photonics K.K. | Dispositif à semiconducteur |
JP2004191246A (ja) * | 2002-12-12 | 2004-07-08 | Matsushita Electric Ind Co Ltd | 凹凸検出センサ |
JP2004354176A (ja) * | 2003-05-28 | 2004-12-16 | Hamamatsu Photonics Kk | 光検出器及びそれを用いた分光器 |
WO2008149928A1 (ja) * | 2007-06-08 | 2008-12-11 | Hamamatsu Photonics K.K. | 分光モジュール |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4470856A (en) * | 1983-02-07 | 1984-09-11 | Hughes Aircraft Company | Self-compensating hydrostatic flattening of semiconductor substrates |
DE4038638A1 (de) | 1990-12-04 | 1992-06-11 | Zeiss Carl Fa | Diodenzeilen-spektrometer |
US6639742B2 (en) * | 2001-08-30 | 2003-10-28 | 3M Innovative Properties Company | Apparatus and methods for mounting an optical element in an optical system |
CN1246848C (zh) * | 2003-08-05 | 2006-03-22 | 曾繁根 | 微型光学读取头模块与其制造方法 |
US20090135420A1 (en) * | 2005-09-22 | 2009-05-28 | Hamamatsu Photonics K.K. | Spectrometer mount and measuring apparatus including same |
-
2008
- 2008-05-15 JP JP2008128693A patent/JP5074291B2/ja active Active
-
2009
- 2009-05-07 KR KR1020107015308A patent/KR20110005772A/ko not_active Application Discontinuation
- 2009-05-07 EP EP09746528.0A patent/EP2287576A4/en not_active Withdrawn
- 2009-05-07 WO PCT/JP2009/058638 patent/WO2009139321A1/ja active Application Filing
- 2009-05-07 US US12/992,456 patent/US20110122408A1/en not_active Abandoned
- 2009-05-07 CN CN2009801087391A patent/CN101970993A/zh active Pending
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH06207762A (ja) * | 1992-11-09 | 1994-07-26 | Saamobonitsuku:Kk | 電子冷却ユニツト |
JPH09255086A (ja) * | 1996-03-19 | 1997-09-30 | Nippon Zeon Co Ltd | フランジを持つ成形体 |
JP2000065642A (ja) * | 1998-03-11 | 2000-03-03 | Gretag Macbeth Ag | スペクトロメ―タ |
WO2000062344A1 (fr) * | 1999-04-13 | 2000-10-19 | Hamamatsu Photonics K.K. | Dispositif à semiconducteur |
JP2004191246A (ja) * | 2002-12-12 | 2004-07-08 | Matsushita Electric Ind Co Ltd | 凹凸検出センサ |
JP2004354176A (ja) * | 2003-05-28 | 2004-12-16 | Hamamatsu Photonics Kk | 光検出器及びそれを用いた分光器 |
WO2008149928A1 (ja) * | 2007-06-08 | 2008-12-11 | Hamamatsu Photonics K.K. | 分光モジュール |
Also Published As
Publication number | Publication date |
---|---|
EP2287576A4 (en) | 2014-02-26 |
US20110122408A1 (en) | 2011-05-26 |
CN101970993A (zh) | 2011-02-09 |
WO2009139321A1 (ja) | 2009-11-19 |
KR20110005772A (ko) | 2011-01-19 |
JP5074291B2 (ja) | 2012-11-14 |
EP2287576A1 (en) | 2011-02-23 |
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