JP2012230388A - モノリシックオフナー分光器 - Google Patents
モノリシックオフナー分光器 Download PDFInfo
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- JP2012230388A JP2012230388A JP2012128670A JP2012128670A JP2012230388A JP 2012230388 A JP2012230388 A JP 2012230388A JP 2012128670 A JP2012128670 A JP 2012128670A JP 2012128670 A JP2012128670 A JP 2012128670A JP 2012230388 A JP2012230388 A JP 2012230388A
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- diffraction grating
- diamond
- slit
- blaze
- offner spectrometer
- Prior art date
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- 229910003460 diamond Inorganic materials 0.000 claims abstract description 70
- 239000010432 diamond Substances 0.000 claims abstract description 70
- 238000003754 machining Methods 0.000 claims abstract description 25
- 239000000463 material Substances 0.000 claims description 35
- 238000000034 method Methods 0.000 claims description 35
- 230000008569 process Effects 0.000 claims description 9
- 230000003746 surface roughness Effects 0.000 claims 2
- 238000004519 manufacturing process Methods 0.000 abstract description 10
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 22
- 230000003287 optical effect Effects 0.000 description 14
- 238000000701 chemical imaging Methods 0.000 description 11
- 229910052759 nickel Inorganic materials 0.000 description 11
- 239000011248 coating agent Substances 0.000 description 10
- 238000000576 coating method Methods 0.000 description 10
- 229910052782 aluminium Inorganic materials 0.000 description 8
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 8
- 238000010586 diagram Methods 0.000 description 8
- 239000000758 substrate Substances 0.000 description 8
- 230000008859 change Effects 0.000 description 6
- 230000003595 spectral effect Effects 0.000 description 6
- 230000008901 benefit Effects 0.000 description 5
- 229910000838 Al alloy Inorganic materials 0.000 description 4
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 4
- 229910052802 copper Inorganic materials 0.000 description 4
- 239000010949 copper Substances 0.000 description 4
- 229910052732 germanium Inorganic materials 0.000 description 4
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 4
- 229920003229 poly(methyl methacrylate) Polymers 0.000 description 4
- 239000004926 polymethyl methacrylate Substances 0.000 description 4
- 229910052710 silicon Inorganic materials 0.000 description 4
- 239000010703 silicon Substances 0.000 description 4
- 239000004793 Polystyrene Substances 0.000 description 3
- 238000003384 imaging method Methods 0.000 description 3
- 238000007747 plating Methods 0.000 description 3
- 239000004417 polycarbonate Substances 0.000 description 3
- 229920000515 polycarbonate Polymers 0.000 description 3
- 229920002223 polystyrene Polymers 0.000 description 3
- 230000003252 repetitive effect Effects 0.000 description 3
- 229910000661 Mercury cadmium telluride Inorganic materials 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 238000001746 injection moulding Methods 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 238000003801 milling Methods 0.000 description 2
- 238000012544 monitoring process Methods 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 238000001228 spectrum Methods 0.000 description 2
- PFNQVRZLDWYSCW-UHFFFAOYSA-N (fluoren-9-ylideneamino) n-naphthalen-1-ylcarbamate Chemical compound C12=CC=CC=C2C2=CC=CC=C2C1=NOC(=O)NC1=CC=CC2=CC=CC=C12 PFNQVRZLDWYSCW-UHFFFAOYSA-N 0.000 description 1
- 229910004261 CaF 2 Inorganic materials 0.000 description 1
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- 206010028980 Neoplasm Diseases 0.000 description 1
- 239000005083 Zinc sulfide Substances 0.000 description 1
- 230000004075 alteration Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- MCMSPRNYOJJPIZ-UHFFFAOYSA-N cadmium;mercury;tellurium Chemical compound [Cd]=[Te]=[Hg] MCMSPRNYOJJPIZ-UHFFFAOYSA-N 0.000 description 1
- WUKWITHWXAAZEY-UHFFFAOYSA-L calcium difluoride Chemical compound [F-].[F-].[Ca+2] WUKWITHWXAAZEY-UHFFFAOYSA-L 0.000 description 1
- 229910001634 calcium fluoride Inorganic materials 0.000 description 1
- 201000011510 cancer Diseases 0.000 description 1
- 239000003086 colorant Substances 0.000 description 1
- 230000000295 complement effect Effects 0.000 description 1
- 238000000748 compression moulding Methods 0.000 description 1
- 239000002178 crystalline material Substances 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 238000005323 electroforming Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- WPYVAWXEWQSOGY-UHFFFAOYSA-N indium antimonide Chemical compound [Sb]#[In] WPYVAWXEWQSOGY-UHFFFAOYSA-N 0.000 description 1
- 229910052500 inorganic mineral Inorganic materials 0.000 description 1
- 239000011707 mineral Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000004297 night vision Effects 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 230000008707 rearrangement Effects 0.000 description 1
- 230000003362 replicative effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 229910052984 zinc sulfide Inorganic materials 0.000 description 1
- DRDVZXDWVBGGMH-UHFFFAOYSA-N zinc;sulfide Chemical compound [S-2].[Zn+2] DRDVZXDWVBGGMH-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/12—Generating the spectrum; Monochromators
- G01J3/18—Generating the spectrum; Monochromators using diffraction elements, e.g. grating
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
- G01J3/0208—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using focussing or collimating elements, e.g. lenses or mirrors; performing aberration correction
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0256—Compact construction
- G01J3/0259—Monolithic
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/04—Slit arrangements slit adjustment
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/12—Generating the spectrum; Monochromators
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
- G01J3/2823—Imaging spectrometer
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/18—Diffraction gratings
- G02B5/1847—Manufacturing methods
- G02B5/1852—Manufacturing methods using mechanical means, e.g. ruling with diamond tool, moulding
Landscapes
- Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Optics & Photonics (AREA)
- Diffracting Gratings Or Hologram Optical Elements (AREA)
- Spectrometry And Color Measurement (AREA)
- Milling Processes (AREA)
- Turning (AREA)
Abstract
【解決手段】モノリシックオフナー分光器はダイアモンド機械加工プロセスを用いて直接作成される。別の実施形態において、モノリシックオフナー分光器はダイアモンド機械加工プロセスで作成された金型を用いて作成される。また別の実施形態において、回折格子はダイアモンド機械加工プロセスを用いて直接作成される。さらにまた別の実施形態において、回折格子はダイアモンド機械加工プロセスで作成された金型を用いて作成される。また別の実施形態において、スリットはダイアモンド機械加工プロセスを用いて直接作成される。
【選択図】なし
Description
101 透光材料
102 モノリシックオフナー分光器
104 スリット
106 検出器
107 光学筐体
108 入光面
109 露出領域/第1の面
110,114 ミラー
112 回折格子
113 露出領域/第2の面
115 露出領域/第3の面
116 出光面
118 反射コーティング
120 ビーム
120' 回折ビーム
Claims (8)
- 回折格子であって、当該回折格子が、
複数本の線格子を持つビーム偏向面を有し、前記線格子のそれぞれは前記偏向面にわたってブレーズ角が変化する傾斜面を有すると共に、2本の罫線の間隔で定められる周期を有し、前記2本の罫線のそれぞれは、ブレーズリセットを有し、当該ブレーズリセットの方向が、前記傾斜面のブレーズ角とは異なる角度で変化することを特徴とする回折格子。 - 前記ビーム偏向面が、相異なる大きさにつくられた周期を有する線格子を有することを特徴とする請求項1記載の回折格子。
- 前記傾斜面が、
二重ファセット面、または
ビーム偏向ファセット面、
であることを特徴とする請求項1または2に記載の回折格子。 - 前記傾斜面が、1nm程度の表面粗さを有することを特徴とする請求項1乃至3のいずれか1項に記載の回折格子。
- 前記偏向面が、球面であることを特徴とする請求項1乃至4いずれか1項に記載の回折格子。
- 回折格子を作成する方法において、
材料をダイアモンド機械加工機に固定する工程、及び
複数本の線格子を持つビーム偏向面を有し、前記線格子のそれぞれは前記偏向面にわたってブレーズ角が変化する傾斜面を有すると共に、2本の罫線の間隔で定められる周期を有し、前記2本の罫線のそれぞれは、ブレーズリセットを有し、当該ブレーズリセットの方向が、前記傾斜面のブレーズ角とは異なる角度で変化するように前記回折格子を形成するために前記材料をダイアモンド機械加工する工程、
を有してなる方法。 - 前記ダイアモンド機械加工する工程が、
前記ブレーズ面を形成するために前記材料を、比較的低速で、ダイアモンド機械加工する工程、及び
前記線格子の周期を定める前記ブレーズリセットを形成するために前記材料を、比較的高速で、ダイアモンド機械加工する工程、
をさらに含むことを特徴とする請求項6に記載の方法。 - 前記傾斜面が、1nm程度の表面粗さを有することを特徴とする請求項6または7記載の方法。
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US79591706P | 2006-04-28 | 2006-04-28 | |
US79591606P | 2006-04-28 | 2006-04-28 | |
US60/795,916 | 2006-04-28 | ||
US60/795,917 | 2006-04-28 |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2009507747A Division JP5602425B2 (ja) | 2006-04-28 | 2007-04-23 | モノリシックオフナー分光器 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2012230388A true JP2012230388A (ja) | 2012-11-22 |
JP5650688B2 JP5650688B2 (ja) | 2015-01-07 |
Family
ID=38477357
Family Applications (4)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2009507747A Active JP5602425B2 (ja) | 2006-04-28 | 2007-04-23 | モノリシックオフナー分光器 |
JP2012128670A Active JP5650688B2 (ja) | 2006-04-28 | 2012-06-06 | モノリシックオフナー分光器 |
JP2013127450A Active JP5650809B2 (ja) | 2006-04-28 | 2013-06-18 | モノリシックオフナー分光器 |
JP2014188642A Active JP5919349B2 (ja) | 2006-04-28 | 2014-09-17 | 高解像度スペクトル撮像システムに使用されるスリットの作成方法 |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2009507747A Active JP5602425B2 (ja) | 2006-04-28 | 2007-04-23 | モノリシックオフナー分光器 |
Family Applications After (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2013127450A Active JP5650809B2 (ja) | 2006-04-28 | 2013-06-18 | モノリシックオフナー分光器 |
JP2014188642A Active JP5919349B2 (ja) | 2006-04-28 | 2014-09-17 | 高解像度スペクトル撮像システムに使用されるスリットの作成方法 |
Country Status (6)
Country | Link |
---|---|
US (1) | US7697137B2 (ja) |
EP (2) | EP2013593A1 (ja) |
JP (4) | JP5602425B2 (ja) |
KR (2) | KR101463632B1 (ja) |
CN (1) | CN101432605B (ja) |
WO (1) | WO2007127167A1 (ja) |
Families Citing this family (67)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7330258B2 (en) * | 2005-05-27 | 2008-02-12 | Innovative Technical Solutions, Inc. | Spectrometer designs |
EP1882916A1 (en) * | 2006-07-20 | 2008-01-30 | Interuniversitair Microelektronica Centrum | Compact catadioptric spectrometer |
EP2075555A4 (en) * | 2007-06-08 | 2014-01-01 | Hamamatsu Photonics Kk | SPECTROSCOPIC MODULE |
JP4887221B2 (ja) * | 2007-06-08 | 2012-02-29 | 浜松ホトニクス株式会社 | 分光モジュール |
EP2063239A4 (en) * | 2007-06-08 | 2013-12-25 | Hamamatsu Photonics Kk | SPECTROSCOPIC MODULE |
JP5094742B2 (ja) | 2007-06-08 | 2012-12-12 | 浜松ホトニクス株式会社 | 分光器 |
WO2008149930A1 (ja) * | 2007-06-08 | 2008-12-11 | Hamamatsu Photonics K.K. | 分光モジュール |
JP4891841B2 (ja) * | 2007-06-08 | 2012-03-07 | 浜松ホトニクス株式会社 | 分光モジュール |
JP4891840B2 (ja) * | 2007-06-08 | 2012-03-07 | 浜松ホトニクス株式会社 | 分光モジュール |
US7817274B2 (en) | 2007-10-05 | 2010-10-19 | Jingyun Zhang | Compact spectrometer |
WO2009070459A1 (en) | 2007-11-30 | 2009-06-04 | Jingyun Zhang | Miniature spectrometers working with cellular phones and other portable electronic devices |
JP5512961B2 (ja) * | 2008-05-15 | 2014-06-04 | 浜松ホトニクス株式会社 | 分光モジュール及びその製造方法 |
JP2009300418A (ja) * | 2008-05-15 | 2009-12-24 | Hamamatsu Photonics Kk | 分光モジュール |
JP5205242B2 (ja) * | 2008-05-15 | 2013-06-05 | 浜松ホトニクス株式会社 | 分光器の製造方法 |
JP5207938B2 (ja) * | 2008-05-15 | 2013-06-12 | 浜松ホトニクス株式会社 | 分光モジュール及び分光モジュールの製造方法 |
JP5415060B2 (ja) * | 2008-05-15 | 2014-02-12 | 浜松ホトニクス株式会社 | 分光モジュール |
JP5205240B2 (ja) * | 2008-05-15 | 2013-06-05 | 浜松ホトニクス株式会社 | 分光モジュールの製造方法及び分光モジュール |
JP5205241B2 (ja) * | 2008-05-15 | 2013-06-05 | 浜松ホトニクス株式会社 | 分光モジュール |
JP5205238B2 (ja) * | 2008-05-15 | 2013-06-05 | 浜松ホトニクス株式会社 | 分光モジュール |
JP2009300422A (ja) * | 2008-05-15 | 2009-12-24 | Hamamatsu Photonics Kk | 分光モジュール |
JP2009300417A (ja) * | 2008-05-15 | 2009-12-24 | Hamamatsu Photonics Kk | 分光モジュールの製造方法及び分光モジュール |
JP5205239B2 (ja) * | 2008-05-15 | 2013-06-05 | 浜松ホトニクス株式会社 | 分光器 |
JP5205243B2 (ja) * | 2008-05-15 | 2013-06-05 | 浜松ホトニクス株式会社 | 分光器 |
US8422013B2 (en) * | 2008-11-11 | 2013-04-16 | Bae Systems Information And Electronic Systems Integration Inc. | Optical multiplexer/demultiplexer |
JP5335729B2 (ja) * | 2010-04-01 | 2013-11-06 | 浜松ホトニクス株式会社 | 分光モジュール |
US8757822B2 (en) * | 2011-01-25 | 2014-06-24 | Ocean Optics, Inc. | Astigmatism compensation in spectrometers using non-spherical mirrors |
US8823932B2 (en) | 2011-04-04 | 2014-09-02 | Corning Incorporated | Multi field of view hyperspectral imaging device and method for using same |
CN102331299A (zh) * | 2011-06-02 | 2012-01-25 | 苏州大学 | 平像场成像光谱仪的分光成像系统 |
US9594201B2 (en) | 2012-07-13 | 2017-03-14 | The University Of North Carolina At Chapel Hill | Curved volume phase holographic (VPH) diffraction grating with tilted fringes and spectrographs using same |
CN104704332B (zh) * | 2012-07-16 | 2017-08-15 | 福斯分析有限公司 | 包括空间光调制器的光谱仪 |
US9435689B2 (en) | 2012-10-31 | 2016-09-06 | Corning Incorporated | Hyperspectral imaging system, monolithic spectrometer and methods for manufacturing the monolithic spectrometer |
US8599374B1 (en) | 2012-11-15 | 2013-12-03 | Corning Incorporated | Hyperspectral imaging systems and methods for imaging a remote object |
EP2972149A1 (en) * | 2013-03-13 | 2016-01-20 | Corning Incorporated | Hyperspectral imaging systems and methods for imaging a remote object |
US20140354868A1 (en) | 2013-06-04 | 2014-12-04 | Corning Incorporated | Portable hyperspectral imager |
CN103308160B (zh) * | 2013-06-24 | 2015-04-22 | 中国科学院长春光学精密机械与物理研究所 | 大相对孔径宽视场小型化成像光谱仪光学系统 |
US20150022811A1 (en) | 2013-07-19 | 2015-01-22 | Corning Incorporated | Compact hyperspectral imaging system |
EP2857810A1 (en) * | 2013-10-02 | 2015-04-08 | Nederlandse Organisatie voor toegepast -natuurwetenschappelijk onderzoek TNO | Monolith spectrometer |
KR101587241B1 (ko) * | 2013-12-20 | 2016-01-20 | (주)럭스콤 | 실시간 광학 스펙트럼 분석을 위한 방법 및 장치 |
GB2521628A (en) * | 2013-12-23 | 2015-07-01 | Sauflon Cl Ltd | Contact lens mould |
JP6251073B2 (ja) * | 2014-02-05 | 2017-12-20 | 浜松ホトニクス株式会社 | 分光器、及び分光器の製造方法 |
JP6344933B2 (ja) * | 2014-03-03 | 2018-06-20 | 株式会社ミツトヨ | 光電式エンコーダ |
US10718667B1 (en) | 2014-03-14 | 2020-07-21 | Wavefront Research, Inc. | Reflective relay spectrometer |
CN104019893B (zh) * | 2014-05-20 | 2016-12-07 | 上海理工大学 | Offner结构成像光谱仪 |
KR101598347B1 (ko) * | 2014-07-17 | 2016-03-02 | 한화탈레스 주식회사 | 링 필드의 기하학적 분석에 기초한 오프너 영상 분광기 |
AT516352B1 (de) * | 2014-09-30 | 2021-11-15 | Chromator Gmbh | Verfahren zur herstellung eines konkaven/konvexen gitters für einen monochromator und ein solches gitter |
DE102014015378A1 (de) * | 2014-10-17 | 2016-04-21 | Audi Ag | Gehäuse für ein Head-up-Display eines Kraftfahrzeugs und Verfahren zum Bereitstellen eines Gehäuses für ein Head-up-Display |
US10760967B2 (en) * | 2014-10-29 | 2020-09-01 | Palo Alto Research Center Incorporated | Liquid crystal fourier transform imaging spectrometer |
US10067352B2 (en) * | 2015-06-15 | 2018-09-04 | Robert Joe Alderman | 3D image generating lens tool |
US9863809B2 (en) * | 2015-08-31 | 2018-01-09 | Mettler-Toledo Gmbh | Spectrograph |
CN105784114B (zh) * | 2016-04-26 | 2018-01-02 | 东南大学 | 一种机载偏振多光谱遥感成像仪、成像方法及确定地面摇杆目标的方法 |
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US20180220892A1 (en) | 2017-02-09 | 2018-08-09 | Corning Incorporated | Assessment of microvascular dysfunction with spectral imaging |
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CN107884387A (zh) * | 2017-11-28 | 2018-04-06 | 北京云端光科技术有限公司 | 光谱仪及光谱检测系统 |
KR20200071563A (ko) | 2018-12-11 | 2020-06-19 | 삼성전자주식회사 | Hsi 기반 검사 장치 |
CN109781261B (zh) * | 2018-12-31 | 2021-03-02 | 苏州大学 | 紧凑型折反式无热化成像光谱仪 |
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US10677651B1 (en) | 2019-05-30 | 2020-06-09 | Raytheon Company | Immersed reflective triplet imaging spectrometer |
JP7395318B2 (ja) * | 2019-10-31 | 2023-12-11 | キヤノン株式会社 | 光学系、それを備える撮像装置及び撮像システム |
US11639873B2 (en) * | 2020-04-15 | 2023-05-02 | Viavi Solutions Inc. | High resolution multi-pass optical spectrum analyzer |
CN111854953A (zh) * | 2020-06-27 | 2020-10-30 | 同济大学 | 一种基于自由曲面棱镜的一体式微型光谱仪光学系统 |
KR20220074626A (ko) * | 2020-11-27 | 2022-06-03 | 삼성전자주식회사 | HSI(Hyper Spectral Imaging) 장치 및 이를 포함하는 검사 장치 |
US11802796B2 (en) | 2020-12-07 | 2023-10-31 | California Institute Of Technology | Monolithic assembly of miniature reflective cyclical spatial heterodyne spectrometer interferometry systems |
US20220412799A1 (en) * | 2021-06-24 | 2022-12-29 | Corning Incorporated | Optical elements including hard oxide bodies and grating layers and method for making the same |
Citations (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5284756A (en) * | 1976-01-07 | 1977-07-14 | Hitachi Ltd | Diffraction grating for spectrometer and spectrometer using the same |
JPS5587925A (en) * | 1978-12-26 | 1980-07-03 | Ritsuo Hasumi | Astigmatism correction type spectroscope |
JPS5737223A (en) * | 1980-08-15 | 1982-03-01 | Hitachi Ltd | Multiwavelength spectrophotometer |
JPS59116602A (ja) * | 1982-12-23 | 1984-07-05 | Agency Of Ind Science & Technol | チヤ−プトグレ−テイングの製造方法 |
JPS62229203A (ja) * | 1986-03-31 | 1987-10-08 | Toshiba Corp | グレ−テイングレンズ |
JPH01299500A (ja) * | 1988-05-27 | 1989-12-04 | Toshiba Corp | X線ミラーの製造方法及びその装置 |
JPH09178557A (ja) * | 1995-10-12 | 1997-07-11 | Aerospatiale Soc Natl Ind Centre Operationnel Satellite | フェリプリズムを具備する同心型のスペクトル装置 |
JPH10293205A (ja) * | 1997-04-18 | 1998-11-04 | Minolta Co Ltd | 回折光学素子及び金型の製造方法 |
JPH11197902A (ja) * | 1997-12-29 | 1999-07-27 | Canon Inc | 回折面形状の製造方法 |
JP2001087921A (ja) * | 1999-09-24 | 2001-04-03 | Canon Inc | 加工方法 |
JP2002144105A (ja) * | 2000-11-10 | 2002-05-21 | Olympus Optical Co Ltd | 曲面切削加工方法 |
JP2004106320A (ja) * | 2002-09-18 | 2004-04-08 | Ricoh Opt Ind Co Ltd | 微細表面構造をもつ物品の製造方法 |
JP2005099375A (ja) * | 2003-09-24 | 2005-04-14 | Sankyo Seiki Mfg Co Ltd | 格子形成方法、金型、および成形品 |
JP2006030031A (ja) * | 2004-07-16 | 2006-02-02 | Hamamatsu Photonics Kk | 分光器 |
JP2006051702A (ja) * | 2004-08-12 | 2006-02-23 | Konica Minolta Opto Inc | 光学素子用成形金型の製造方法、光学素子用成形金型及び光学素子 |
WO2006023712A2 (en) * | 2004-08-19 | 2006-03-02 | Headwall Photonics, Inc. | Multi-channel, multi-spectrum imaging spectrometer |
Family Cites Families (30)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US1000A (en) * | 1838-11-03 | Spring foe | ||
US3045532A (en) * | 1958-05-19 | 1962-07-24 | Coleman Instr Inc | Diffraction grating having a plurality of blaze angles |
DE3216516A1 (de) * | 1982-05-03 | 1983-11-03 | Siemens AG, 1000 Berlin und 8000 München | Optischer wellenlaengendemultiplexer nach dem beugungsgitterprinzip |
JPS6224901A (ja) * | 1985-07-24 | 1987-02-02 | Nec Corp | 溝加工方法 |
DE3709278A1 (de) * | 1987-03-20 | 1988-09-29 | Kernforschungsz Karlsruhe | Verfahren zur herstellung von feinstrukturkoerpern |
US5589983A (en) | 1993-12-29 | 1996-12-31 | Eastman Kodak Company | Method of manufacturing a diffractive surface profile |
AU5436696A (en) * | 1995-07-05 | 1997-02-05 | Lockheed Martin Energy Systems, Inc. | Monolithic spectrometer and method for fabricating same |
US5618217A (en) * | 1995-07-25 | 1997-04-08 | Center For Advanced Fiberoptic Applications | Method for fabrication of discrete dynode electron multipliers |
US5880834A (en) | 1996-10-16 | 1999-03-09 | The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration | Convex diffraction grating imaging spectrometer |
JPH10328922A (ja) * | 1997-06-02 | 1998-12-15 | Canon Inc | 細溝加工方法及び装置及び細溝加工用切刃及び切刃保持装置 |
JP2005292860A (ja) * | 1997-10-03 | 2005-10-20 | Matsushita Electric Ind Co Ltd | 回折レンズの製造方法 |
US6181418B1 (en) | 1998-03-12 | 2001-01-30 | Gretag Macbeth Llc | Concentric spectrometer |
EP1073886A4 (en) * | 1998-04-29 | 2004-05-12 | American Holographic Inc | CONCENTRIC CORRECTION SPECTROMETER |
JP3559710B2 (ja) * | 1998-05-25 | 2004-09-02 | キヤノン株式会社 | 回折光学素子及びそれを用いた走査光学装置 |
JP2000141653A (ja) * | 1998-11-16 | 2000-05-23 | Brother Ind Ltd | インクジェットヘッドおよびその製造方法 |
JP2000210808A (ja) * | 1999-01-25 | 2000-08-02 | Toshiba Tungaloy Co Ltd | エンドミル |
JP4376337B2 (ja) * | 1999-02-17 | 2009-12-02 | 日本非球面レンズ株式会社 | 光偏向器 |
JP2000268610A (ja) * | 1999-03-18 | 2000-09-29 | Kansai Electric Power Co Inc:The | 窓用光制御透明板及び窓ガラス |
JP2000321429A (ja) * | 1999-05-14 | 2000-11-24 | Minolta Co Ltd | 偏光分離素子及び投射型表示装置 |
JP2001166108A (ja) * | 1999-09-29 | 2001-06-22 | Konica Corp | 光学素子、光学系、光ピックアップ装置及び成形金型 |
AU2001270833A1 (en) * | 2000-07-18 | 2002-01-30 | Optaglio Limited | Diffractive device |
US6657723B2 (en) * | 2000-12-13 | 2003-12-02 | International Business Machines Corporation | Multimode planar spectrographs for wavelength demultiplexing and methods of fabrication |
JP2002346803A (ja) * | 2001-05-25 | 2002-12-04 | Ricoh Co Ltd | 溝加工法、溝加工品、及び、光学部品又は精密部品 |
US6597510B2 (en) | 2001-11-02 | 2003-07-22 | Corning Incorporated | Methods and apparatus for making optical devices including microlens arrays |
JP2004029298A (ja) * | 2002-06-25 | 2004-01-29 | Nikon Corp | 光分波合波器 |
US6813018B2 (en) | 2002-11-07 | 2004-11-02 | The Boeing Company | Hyperspectral imager |
DE10304312A1 (de) * | 2003-02-04 | 2004-08-12 | Carl Zeiss Jena Gmbh | Kompakt-Spektrometer |
US7289225B2 (en) * | 2003-09-15 | 2007-10-30 | Zygo Corporation | Surface profiling using an interference pattern matching template |
US7016037B2 (en) * | 2003-10-06 | 2006-03-21 | The Regents Of The University Of California | Imaging spectrometer utilizing immersed gratings with accessible entrance slit |
US20060238756A1 (en) * | 2005-02-10 | 2006-10-26 | Bearman Gregory H | Fast spectral confocal imager |
-
2007
- 2007-03-28 US US11/729,300 patent/US7697137B2/en active Active
- 2007-04-23 EP EP07755926A patent/EP2013593A1/en not_active Withdrawn
- 2007-04-23 KR KR1020087029037A patent/KR101463632B1/ko active IP Right Grant
- 2007-04-23 KR KR1020147009869A patent/KR20140054440A/ko not_active Application Discontinuation
- 2007-04-23 EP EP11175172A patent/EP2407761A3/en not_active Withdrawn
- 2007-04-23 JP JP2009507747A patent/JP5602425B2/ja active Active
- 2007-04-23 CN CN200780015125XA patent/CN101432605B/zh active Active
- 2007-04-23 WO PCT/US2007/009854 patent/WO2007127167A1/en active Application Filing
-
2012
- 2012-06-06 JP JP2012128670A patent/JP5650688B2/ja active Active
-
2013
- 2013-06-18 JP JP2013127450A patent/JP5650809B2/ja active Active
-
2014
- 2014-09-17 JP JP2014188642A patent/JP5919349B2/ja active Active
Patent Citations (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5284756A (en) * | 1976-01-07 | 1977-07-14 | Hitachi Ltd | Diffraction grating for spectrometer and spectrometer using the same |
JPS5587925A (en) * | 1978-12-26 | 1980-07-03 | Ritsuo Hasumi | Astigmatism correction type spectroscope |
JPS5737223A (en) * | 1980-08-15 | 1982-03-01 | Hitachi Ltd | Multiwavelength spectrophotometer |
JPS59116602A (ja) * | 1982-12-23 | 1984-07-05 | Agency Of Ind Science & Technol | チヤ−プトグレ−テイングの製造方法 |
JPS62229203A (ja) * | 1986-03-31 | 1987-10-08 | Toshiba Corp | グレ−テイングレンズ |
JPH01299500A (ja) * | 1988-05-27 | 1989-12-04 | Toshiba Corp | X線ミラーの製造方法及びその装置 |
JPH09178557A (ja) * | 1995-10-12 | 1997-07-11 | Aerospatiale Soc Natl Ind Centre Operationnel Satellite | フェリプリズムを具備する同心型のスペクトル装置 |
JPH10293205A (ja) * | 1997-04-18 | 1998-11-04 | Minolta Co Ltd | 回折光学素子及び金型の製造方法 |
JPH11197902A (ja) * | 1997-12-29 | 1999-07-27 | Canon Inc | 回折面形状の製造方法 |
JP2001087921A (ja) * | 1999-09-24 | 2001-04-03 | Canon Inc | 加工方法 |
JP2002144105A (ja) * | 2000-11-10 | 2002-05-21 | Olympus Optical Co Ltd | 曲面切削加工方法 |
JP2004106320A (ja) * | 2002-09-18 | 2004-04-08 | Ricoh Opt Ind Co Ltd | 微細表面構造をもつ物品の製造方法 |
JP2005099375A (ja) * | 2003-09-24 | 2005-04-14 | Sankyo Seiki Mfg Co Ltd | 格子形成方法、金型、および成形品 |
JP2006030031A (ja) * | 2004-07-16 | 2006-02-02 | Hamamatsu Photonics Kk | 分光器 |
JP2006051702A (ja) * | 2004-08-12 | 2006-02-23 | Konica Minolta Opto Inc | 光学素子用成形金型の製造方法、光学素子用成形金型及び光学素子 |
WO2006023712A2 (en) * | 2004-08-19 | 2006-03-02 | Headwall Photonics, Inc. | Multi-channel, multi-spectrum imaging spectrometer |
JP2008510964A (ja) * | 2004-08-19 | 2008-04-10 | ヘッドウォール フォトニクス,インコーポレイテッド | マルチチャネル、マルチスペクトル型撮像分光計 |
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KR101463632B1 (ko) | 2014-11-24 |
JP5650688B2 (ja) | 2015-01-07 |
CN101432605B (zh) | 2011-02-09 |
KR20140054440A (ko) | 2014-05-08 |
JP5919349B2 (ja) | 2016-05-18 |
CN101432605A (zh) | 2009-05-13 |
JP2015051499A (ja) | 2015-03-19 |
JP2013231984A (ja) | 2013-11-14 |
US7697137B2 (en) | 2010-04-13 |
US20070252989A1 (en) | 2007-11-01 |
JP5602425B2 (ja) | 2014-10-08 |
JP5650809B2 (ja) | 2015-01-07 |
EP2013593A1 (en) | 2009-01-14 |
EP2407761A3 (en) | 2012-12-05 |
KR20090006220A (ko) | 2009-01-14 |
WO2007127167A1 (en) | 2007-11-08 |
EP2407761A2 (en) | 2012-01-18 |
JP2009535621A (ja) | 2009-10-01 |
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