WO2010109755A1 - クリーニングシステム - Google Patents

クリーニングシステム Download PDF

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Publication number
WO2010109755A1
WO2010109755A1 PCT/JP2010/000916 JP2010000916W WO2010109755A1 WO 2010109755 A1 WO2010109755 A1 WO 2010109755A1 JP 2010000916 W JP2010000916 W JP 2010000916W WO 2010109755 A1 WO2010109755 A1 WO 2010109755A1
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WO
WIPO (PCT)
Prior art keywords
roller
cleaning
foreign matter
cleaning roller
transfer roller
Prior art date
Application number
PCT/JP2010/000916
Other languages
English (en)
French (fr)
Japanese (ja)
Inventor
太田雅史
永瀬貴行
新居俊男
松本英樹
Original Assignee
バンドー化学株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by バンドー化学株式会社 filed Critical バンドー化学株式会社
Priority to KR1020147019013A priority Critical patent/KR101523693B1/ko
Priority to CN2010800135973A priority patent/CN102361703A/zh
Priority to JP2011505825A priority patent/JP5605813B2/ja
Publication of WO2010109755A1 publication Critical patent/WO2010109755A1/ja

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B6/00—Cleaning by electrostatic means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B1/00—Cleaning by methods involving the use of tools
    • B08B1/10—Cleaning by methods involving the use of tools characterised by the type of cleaning tool
    • B08B1/12—Brushes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B1/00—Cleaning by methods involving the use of tools
    • B08B1/10—Cleaning by methods involving the use of tools characterised by the type of cleaning tool
    • B08B1/14—Wipes; Absorbent members, e.g. swabs or sponges
    • B08B1/143—Wipes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B11/00—Cleaning flexible or delicate articles by methods or apparatus specially adapted thereto
    • B08B11/04—Cleaning flexible or delicate articles by methods or apparatus specially adapted thereto specially adapted for plate glass, e.g. prior to manufacture of windshields
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B5/00—Cleaning by methods involving the use of air flow or gas flow
    • B08B5/02—Cleaning by the force of jets, e.g. blowing-out cavities
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2201/00—Details relating to filtering apparatus
    • B01D2201/50—Means for dissipating electrostatic charges

Definitions

  • the present invention relates to a cleaning system for removing foreign matters (dust etc.) adhering to the surface of a material to be cleaned. It is particularly suitable when the material to be cleaned is a thin object such as a film, a sheet, or a printed board.
  • Such an adhesive roller cannot remove foreign matters having an average diameter of 1 ⁇ m or less, and it is difficult to completely remove foreign matters such as dust once adhering to the surface (adhesive layer) of the adhesive roller. Inferior.
  • the adhesive roller is pressed against the material to be cleaned to a certain extent to remove foreign matter. If the material to be cleaned is, for example, a film, not only the foreign matter but also the film may stick to the roller surface. There is.
  • the inventor applied electrophotographic technology to remove foreign matters such as dust from the material to be cleaned, a charge that can adsorb the foreign matter to the outer peripheral surface of the cleaning roller by electrostatic force due to peeling charging (or contact charging).
  • electrostatic force due to peeling charging (or contact charging).
  • the cleaning is performed according to the cleaning material. It is necessary to determine the material of the outer layer of the roller.
  • the inventor further advances the one for which the patent application has been separately filed, and positively controls the charging of the cleaning roller using a charge control roller or an external power source, and the outer peripheral surface of the cleaning roller It was conceived that the foreign object can be stably adsorbed and removed from the material to be cleaned over a long period of time if the charged voltage capable of adsorbing the foreign object by electrostatic force is stably maintained. It is what.
  • An object of the present invention is to provide a cleaning system that can stably perform foreign matter adsorption operation by a cleaning roller over a long period of time.
  • the cleaning roller includes a cleaning roller that moves while rotating while being in contact with the surface of the cleaning material, and the cleaning roller uses electrostatic force to remove foreign matters such as dust adhering to the surface of the cleaning material.
  • the cleaning roller is capable of charging the outer peripheral surface with an electric charge that adsorbs foreign matter adhering to the surface of the material to be cleaned by electrostatic force.
  • a charge control roller that rotates while being in contact with the outer peripheral surface of the cleaning roller is provided, and the charge control roller generates an electric charge for adsorbing foreign matter adhering on the surface of the cleaning material by electrostatic force to the cleaning roller. It is characterized in that it can be charged.
  • the cleaning roller due to contact peeling caused by rotation of the cleaning roller and the charge control roller, a charge for adsorbing foreign matter adhering to the surface of the cleaning material by electrostatic force is charged, and the cleaning roller is subjected to the cleaning.
  • the cleaning roller is stably charged over a long period of time by the charge control roller that rotates while contacting the outer peripheral surface of the roller.
  • the cleaning roller adsorbs the foreign matter adhering to the surface of the material to be cleaned by electrostatic force, and removes the foreign material from the surface of the material to be cleaned. Therefore, cleaning with the cleaning roller can be performed over a long period of time.
  • the charge control roller that is, by changing the combination of the cleaning roller and the charge control roller
  • the positive charge can be charged on the outer peripheral surface of the cleaning roller.
  • the type of foreign matter adhering to the surface of the material to be cleaned including the case of foreign matter of the same material and different charge polarity
  • Cleaning can be performed.
  • a voltage having the same sign as the charge (positive charge or negative charge) charged to the cleaning roller is applied to the charge control roller by an external power source (for example, a high voltage power source), the charging property of the cleaning roller is applied. It is possible to raise the voltage according to the applied voltage, and it is possible to realize the adsorption and removal of foreign matters more efficiently by the cleaning roller.
  • the charge control roller rotates while contacting the surface of the cleaning roller, so that the charge control roller and the cleaning roller are between the cleaning roller and the cleaning roller.
  • a potential difference can be generated according to the difference in surface characteristics.
  • the voltage of the cleaning roller is determined based on the surface characteristics of the charge control roller (for example, the charge control roller) based on the voltage of the charge control roller.
  • a charge is generated that generates a potential difference according to the difference in the order), and charges for adsorbing foreign matter adhering to the surface of the material to be cleaned by electrostatic force are charged.
  • the transfer roller is provided so as to rotate while contacting the cleaning roller with respect to the cleaning roller.
  • the transfer roller includes a conductive core rod and an outer side of the core rod.
  • the elastic layer portion has a volume resistivity higher than that of the core rod, and is charged with a charge that adsorbs foreign matter adhering to the outer peripheral surface of the cleaning roller to the surface by electrostatic force. It is desirable to be formed from a material that can be used.
  • the foreign matter adsorbed by the electrostatic force on the outer peripheral surface of the cleaning roller comes into contact with the outer peripheral surface (surface) of the transfer roller by the rotation of the cleaning roller. Due to this contact, the elastic layer portion of the transfer roller is formed of a material that can charge the foreign matter adhering to the outer peripheral surface of the cleaning roller by electrostatic force, so that the foreign matter leaves the cleaning roller. Transferred to the transfer roller.
  • the foreign matter removed from the surface of the material to be cleaned by the cleaning roller is transferred to the transfer roller, and the foreign matter is not returned to the surface of the material to be cleaned. Further, since the foreign matter on the outer peripheral surface of the cleaning roller is constantly transferred to the transfer roller side, the foreign matter adhering to the outer peripheral surface of the cleaning roller is periodically removed (cleaned) or the foreign matter is attached. There is no need to perform maintenance work for periodically replacing the cleaning roller. Therefore, the foreign matter suction operation by the cleaning roller can be continuously performed over a long period of time.
  • the guide roller is disposed on the opposite side of the cleaning roller with the material to be cleaned interposed therebetween, and the cleaning roller adheres to the surface of the material to be cleaned. It is also possible to increase the electric field strength for adsorbing foreign matter by electrostatic force.
  • the two rollers cleaning roller and guide roller
  • the material to be cleaned is supported from above and below at the position where the cleaning roller and the guide roller are in contact with each other.
  • the foreign matter is removed while being well supported.
  • the guide roller increases the electric field strength for adsorbing foreign matter adhering to the surface of the material to be cleaned by electrostatic force, and the charged foreign matter on the material to be cleaned depends on the applied electric field strength. Adsorbed to the cleaning roller and efficiently removed.
  • the cleaning roller includes a conductive core rod, a cylindrical inner layer portion provided outside the core rod, and an outer layer portion provided outside the inner layer portion.
  • the outer layer portion preferably has a hardness (JIS-A) of 50 ° or more and has a higher volume resistivity than the inner layer portion.
  • “the volume resistivity is high” means that the electric resistance is high.
  • the hardness of the outer layer portion is measured using a flat plate having a thickness of 2 mm molded from the material forming the outer layer portion.
  • the hardness of the outer layer part (JIS-A) is more preferably 60 ° or more.
  • the roller surface hardness can be increased, and since the outer layer portion has a higher volume resistivity than the inner layer portion, This is effective for maintaining a charged voltage generated by contact peeling with an object in contact with it, and can charge the outer peripheral surface with a charge that adsorbs foreign matter adhering to the surface of the material to be cleaned by electrostatic force.
  • the material to be cleaned is a thin object such as a film, it is possible to prevent the material to be cleaned from being wound around the cleaning roller while maintaining the nip width.
  • the cleaning roller may be configured such that the inner layer portion is formed of an elastic material having conductivity and the outer layer portion is formed of acrylic mixed urethane or fluorine mixed urethane.
  • the charging polarity can be changed compared to the case where only urethane is used for the outer peripheral surface of the roller.
  • Foreign substances that are easily charged negatively with acrylic mixed urethane are charged positively with fluorine mixed urethane.
  • the foreign matters that are likely to be removed are easily removed from the material to be cleaned.
  • the transfer roller that rotates while contacting the surface of the cleaning roller is provided with respect to the cleaning roller, and the charging control roller is configured such that a first external power source is connected to a metal core.
  • the charge for adsorbing foreign matter adhering to the surface of the cleaning material by electrostatic force can be changed with respect to the cleaning roller, and the transfer roller can remove foreign matter adhering to the surface of the cleaning roller by electrostatic force. It is also possible to use a first external power source connected to the core of the charge control roller to change the charge for adsorbing foreign matter by electrostatic force. Is possible.
  • the charge control roller can set a charge for adsorbing foreign matter adhering to the surface of the cleaning material by electrostatic force to the cleaning roller. Charges for adsorbing foreign matter adhering to the surface of the cleaning material by electrostatic force can be stably charged to the cleaning roller. As a result, the cleaning roller has a stable adsorbing force for adsorbing foreign matter adhering to the surface of the material to be cleaned by electrostatic force.
  • a transfer roller is provided so as to rotate with respect to the cleaning roller while being in contact with the cleaning roller, and the transfer roller charges the surface with a charge that adsorbs foreign matter adhering to the surface of the cleaning roller by electrostatic force. Since the foreign matter adsorbed by the electrostatic force on the surface of the cleaning roller comes into contact with the surface of the transfer roller by the rotation of the cleaning roller, the foreign matter leaves the cleaning roller and the transfer roller. Transferred to the surface. In this way, the foreign matter removed from the surface of the material to be cleaned by the cleaning roller is sequentially transferred to the transfer roller and does not remain on the surface of the cleaning roller, so that the foreign matter is returned to the surface of the material to be cleaned. It is not.
  • cleaning time refers to a time when the cleaning roller rotates and moves relative to the surface of the material to be cleaned.
  • the cleaning roller includes a cleaning roller that moves while rotating while being in contact with the surface of the material to be cleaned.
  • the cleaning roller is connected to a first external power source and can charge the surface with a charge for adsorbing foreign matter adhering on the surface of the material to be cleaned by electrostatic force.
  • a transfer roller that rotates while contacting the surface of the cleaning roller is provided with respect to the cleaning roller, and the transfer roller absorbs foreign matter adhering to the surface of the cleaning roller by electrostatic force. Can be charged on the surface and connected to the cleaning roller By changing the voltage applied by the first external source, the transfer roller, and wherein the said foreign object can change the charged voltage for adsorbing by electrostatic force.
  • the cleaning roller can charge the surface with a charge for adsorbing foreign matter adhering on the surface of the material to be cleaned by electrostatic force. Adsorbed to the cleaning roller. Further, since the transfer roller can charge the surface with a charge for adsorbing foreign matter adhering on the surface of the cleaning roller by electrostatic force, the foreign matter adsorbed on the cleaning roller is adsorbed on the transfer roller. Therefore, it is not necessary to perform maintenance work such as periodically removing (cleaning) or periodically replacing the cleaning roller.
  • the transfer roller can be easily maintained as described above, it is excellent in maintainability from this point.
  • the transfer roller rotates while contacting the surface of the cleaning roller, so that the surface characteristics of the transfer roller and the cleaning roller are between the cleaning roller and the surface. It is desirable to generate a potential difference according to the difference (for example, charging order).
  • a cleaning brush that rotates in a direction opposite to the rotation direction is provided for the transfer roller, and a metal roller is installed to rotate in the rotation direction with respect to the cleaning brush.
  • the metal roller is connected to a second external power source, and is configured to generate a potential difference with the transfer roller.
  • the metal roller adheres on the surface of the metal roller in the vicinity of the surface of the metal roller. It is desirable to have a configuration in which a cleaning blade that scrapes off foreign matter at the tip scraping portion is disposed.
  • the foreign matter removed from the transfer roller by the cleaning brush and adsorbed to the surface of the metal roller by electrostatic force is scraped off by the tip scraping part of the cleaning blade, and the foreign matter is removed from the surface of the metal roller. It is.
  • the foreign matter can be more efficiently removed from the transfer roller by eliminating the adsorption force of the transfer roller to the foreign matter by controlling the voltage applied to the charging control roller.
  • the absolute value of the first external power source is an opposite sign to the charge charged on the surface of the transfer roller during the transfer operation by the transfer roller, except during cleaning by the cleaning roller.
  • the second external power source has the same sign as the charge charged on the surface of the transfer roller during cleaning so as to generate a potential difference with the transfer roller. It is desirable that the potential is applied to the metal roller.
  • This arrangement is advantageous in removing foreign matter because the attracting force against foreign matter attracted to the surface of the transfer roller by electrostatic force is weakened by controlling the voltage applied to the charging control roller.
  • a suction port of air vacuum means capable of sucking foreign matter by negative pressure is provided in the vicinity of the surface of the metal roller.
  • a cleaning brush that rotates in a direction opposite to the rotation direction is provided for the transfer roller, and a metal roller is installed to rotate in the rotation direction with respect to the cleaning brush.
  • the metal roller is connected to a second external power source, and is configured to generate a potential difference with the transfer roller.
  • the metal roller adheres on the surface of the metal roller in the vicinity of the surface of the metal roller. It is desirable to arrange a cleaning blade that scrapes off foreign matter at the tip scraping portion.
  • a suction port of an air vacuum means capable of sucking foreign matter by negative pressure is disposed in the vicinity of the cleaning blade installed on the surface of the transfer roller.
  • the foreign matter adsorbed by the electrostatic force on the surface of the transfer roller is scraped off by the tip scraping portion of the cleaning blade, and the foreign matter is sucked by the negative pressure through the suction port of the air vacuum means. Therefore, there is no possibility that the foreign matter will contaminate the periphery of the transfer roller.
  • the guide roller is disposed on the opposite side of the cleaning roller with the cleaning material interposed therebetween, and the cleaning roller adheres to the surface of the cleaning material.
  • the electric field strength for adsorbing foreign matter by electrostatic force can be increased.
  • the two rollers cleaning roller and guide roller
  • the material to be cleaned is supported from above and below at the position where the cleaning roller and the guide roller are in contact with each other.
  • the foreign matter is removed while being well supported.
  • the guide roller increases the electric field strength for adsorbing foreign matter adhering to the surface of the material to be cleaned by electrostatic force, and the charged foreign matter on the material to be cleaned depends on the applied electric field strength. Adsorbed to the cleaning roller and efficiently removed.
  • the charging control roller can be provided not on the cleaning roller but on the continuous roller. That is, the invention of claim includes a cleaning roller that moves relative to the surface of the material to be cleaned while rotating, and removes foreign matter such as dust adhering to the surface of the material to be cleaned by the electrostatic force by the cleaning roller.
  • the cleaning roller is capable of charging the surface with a charge that adsorbs foreign matter adhering to the surface of the material to be cleaned by electrostatic force.
  • a transfer roller that rotates while contacting the surface of the roller is provided, and the transfer roller is formed of a material capable of charging the surface with a charge that adsorbs foreign matter adhering to the surface of the cleaning roller by electrostatic force, and the transfer roller against the surface of the transfer roller.
  • the charge control roller is connected to a first external power source to a core metal, and the charge for adsorbing foreign matter adhering on the surface of the material to be cleaned by electrostatic force is used as the cleaning roller.
  • the transfer roller can be changed.
  • the charge control roller is provided for the transfer roller, when the second external power source described above is provided, the current generated by the second external power source is prevented from flowing into the cleaning roller. Even if the material to be cleaned is a conductive material or the like, electrical damage to the material to be cleaned can be prevented.
  • the present invention can stably charge the cleaning roller for a long period of time with a charge for adsorbing foreign matter adhering to the surface of the material to be cleaned by electrostatic force.
  • the cleaning roller can adsorb foreign matter adhering to the surface of the material to be cleaned by electrostatic force, and can stably remove the foreign matter from the surface of the material to be cleaned over a long period of time.
  • FIG. 10 is a view similar to FIG. 4 showing still another embodiment of the cleaning unit. It is a figure similar to FIG.
  • FIG. 3 which shows another embodiment of a cleaning unit. It is explanatory drawing of the foreign material removal test. It is a figure which shows an example of the cleaning system which concerns on this invention.
  • (A) (b) is explanatory drawing which shows the basic structure of the cleaning unit used for the cleaning system which concerns on this invention, respectively. It is a figure which shows embodiment of the said cleaning unit. It is a figure which shows embodiment which has arrange
  • FIG. (A) shows an example of the cleaning system using the cleaning unit shown in FIG. (A)
  • (b) is explanatory drawing of the principle which removes foreign materials, such as dust, by an example of the cleaning unit used for the cleaning system which concerns on this invention, respectively, using electrostatic force.
  • (A)-(f) is explanatory drawing of operation
  • Fig.1 (a) about another embodiment.
  • Fig.1 (a) about another embodiment.
  • FIG.1 shows an example of the cleaning system which concerns on this invention.
  • the cleaning unit U used in the cleaning system according to the present invention includes a cleaning roller 11 that rotates and moves relative to the surface S1 of the material S to be cleaned. Foreign matter (not shown) such as dust adhering to the surface S1 of S is removed by the cleaning roller 11 using electrostatic force.
  • This cleaning roller 11 is capable of charging the outer peripheral surface with a charge that adsorbs foreign matter adhering to the surface S1 of the material to be cleaned S by electrostatic force, and uses the charging property of the roller surface (outer peripheral surface) of this cleaning roller. Thus, foreign matter is adsorbed.
  • the cleaning roller 11 is provided with a charge control roller 21 that rotates while being in contact with the outer peripheral surface of the cleaning roller 11 to constitute one cleaning unit U.
  • the charging control roller 21 can stably charge the outer peripheral surface (outer layer portion) of the cleaning roller 11 with a charge for adsorbing foreign matter adhering on the surface S1 of the cleaning material S by electrostatic force. is there.
  • the cleaning roller 11 is made of a metal core (core bar) 11a, a cylindrical inner layer portion 11b provided outside the metal core 11a, and a material having higher resistance than the inner layer portion 11b provided outside the inner layer portion 11b.
  • a thin cylindrical outer layer portion 11c (for example, a thickness of about 30 ⁇ m), and has a two-layer structure.
  • a material capable of charging a charge that adsorbs foreign matter such as dust adhering to the surface S1 of the material to be cleaned S by electrostatic force is selected. That is, it only needs to have a potential difference with respect to the charged voltage of the foreign matter, and it is appropriately charged positively or negatively by the charging control roller. Note that the charging control roller 21 stabilizes the charged voltage of the cleaning roller 11 regardless of the foreign material adhering to the cleaning target material S or the surface S1 thereof.
  • the thickness of the outer layer portion 11c of the cleaning roller 11 is preferably 2 to 500 ⁇ m (more preferably 5 to 50 ⁇ m). This is because if the thickness of the outer layer portion 11c is less than 2 ⁇ m, the roller surface (outer layer surface) tends to be less likely to be charged. On the other hand, the thickness exceeding 500 ⁇ m is not industrially efficient.
  • a cored bar made of a conductive carbon material, synthetic resin composite, or the like can be used in place of the cored bar 11a.
  • the volume resistivity of the core rod is desirably 10 5 ⁇ cm or less.
  • the inner layer portion 11b is made of a conductive elastic material (for example, polyester urethane containing carbon (conductive material)), and has a lower hardness or substantially the same hardness as the outer layer portion 11c.
  • the inner layer portion 11b is not particularly limited as long as it has a lower resistance than the outer layer portion 11c, but the volume resistivity is preferably about 10 4 to 10 12 ⁇ cm.
  • the material used for the outer layer portion 11c has a hardness (JIS-A) of 50 ° or more (desirably 50 ° or more and 100 ° or less, more desirably 55 ° or more and 100 ° or less, and further desirably 65 ° or more and 100 ° or less). .
  • the outer layer portion 11c has a higher resistance than the inner layer portion 11b.
  • the outer layer part 11c desirably has a volume resistivity of 10 8 ⁇ cm or more, and more desirably 10 10 ⁇ cm or more.
  • Preferred examples of the material forming the outer layer portion 11c of the cleaning roller 11 include urethane resin, and further, acrylic mixed urethane or fluorine mixed urethane.
  • the “acrylic mixed urethane” is mainly composed of polyester polyurethane or polyether polyurethane, and (i) a mixture of thermoplastic urethane resin and silicon / acrylic copolymer resin, (ii) acrylic resin (for example, methacrylic acid-methacrylic acid).
  • the “fluorine-mixed urethane” is a polyurethane-based component, which means a mixture of a urethane / fluorine copolymer with a thermoplastic urethane resin.
  • the charging control roller 21 includes a conductive metal core 21a, a cylindrical inner layer portion 21b provided outside the metal core 21a, and a cylindrical outer layer portion 21c provided outside the inner layer portion 21b.
  • the outer layer portion 21c is set to have a higher volume resistivity than the inner layer portion 21b.
  • the cored bar 21a, the inner layer part 21b, and the outer layer part 21c of the charge control roller 21 can also be formed, for example, using a material that generates a potential difference according to the difference in surface characteristics from the cleaning roller 11.
  • the charge control roller may have a structure in which a cylindrical outer layer portion 21c 'is directly provided outside the core metal 21a' as in the charge control roller 21 'shown in FIG.
  • the material of the outer layer portions 21c and 21c ′ of the charge control rollers 21 and 21 ′ is the contact between the cleaning roller 11 and the charge control rollers 21 and 21 ′ due to the rotation of the cleaning roller 11 and the charge control rollers 21 and 21 ′. It is desirable that the potential difference generated according to the difference in surface characteristics is as large as possible as long as the stable adsorptivity is not impaired.
  • the charge control roller 21 can charge the cleaning roller 11 with a charge that adsorbs foreign matter adhering to the surface S1 of the material to be cleaned S by electrostatic force.
  • the cored bar 21a of the charge control roller 21 is set to a reference potential (for example, ground potential, that is, 0V).
  • the cleaning roller 11 that rotates with the charge control roller 21 is charged by contact peeling between the cleaning roller 11 and the charge control roller 21, and the surface characteristics of the cleaning roller 11 and the charge control roller 21 are changed between the cleaning roller 11 and the charge control roller 21.
  • a potential difference is generated based on the charging sequence. Since the potential difference generated between these rollers 11 and 21 is generated according to the difference in the surface characteristics thereof, a constant numerical value is stably displayed at a constant peripheral speed.
  • a value obtained by adding or subtracting the potential difference generated according to the difference in surface characteristics between the rollers 11 and 21 to the potential of the charging control roller 21 according to the material forming the outer layer portions 11 c and 21 c is the value of the cleaning roller 11. It becomes a charged voltage. That is, if the material forming the outer layer portion 21c of the charge control roller 21 is positive with respect to the material forming the outer layer portion 11c of the cleaning roller 11, the cleaning roller 11 is charged to the negative side and the charging sequence is charged. If is negative, the cleaning roller 11 is charged positive.
  • the charging voltage of the cleaning roller 11 is ⁇ 300 V or +300 V. It becomes. Even when the cleaning roller 11 is the same, when the cleaning roller 11 exhibits a negative characteristic with respect to the charge control roller 21, ⁇ 300 V is indicated, and when the cleaning roller 11 exhibits a positive characteristic with respect to the charge control roller 21. Will show + 300V.
  • the cleaning roller 11 is stably charged with a charge capable of adsorbing foreign matter by electrostatic force due to contact with the charging control roller 21.
  • the cleaning performance that foreign matters are removed from the surface S1 of the substrate is stably exhibited.
  • two cleaning units U1 and U2 are arranged, and in each of the units U1 and U2, the sign of the charge charged on the outer peripheral surface of the cleaning rollers 11A and 11B with respect to the cleaning rollers 11A and 11B. It is possible to provide charging control rollers 21A and 21B that can reverse the above. In this way, the cleaning roller 11A (cleaning unit U1) that negatively charges the positively charged foreign matter adhering to the surface S1 of the cleaning material S and the cleaning roller 11B (cleaning) that positively charges the negatively charged foreign matter. Each unit U2) can be removed, and the range of foreign matter that can be removed is increased.
  • a guide roller 41 may be disposed on the opposite side of the cleaning roller 11 with the material to be cleaned S interposed therebetween.
  • the guide roller 41 is for increasing the electric field intensity for the cleaning roller 11 to adsorb foreign matter adhering to the surface of the material to be cleaned S by electrostatic force.
  • the guide roller 41 is electrically conductive on the outer side of the core metal 41a.
  • an outer layer portion 41c having an insulating property on the outside of the inner layer portion 41b, and is formed to increase the electric field strength.
  • This guide roller 41 has a potential difference with respect to the cleaning roller 11, and is provided with another charge control roller 71 having the same structure as the charge control roller 21.
  • the guide roller 41 allows the cleaning roller 11, the guide roller 41, and The electric field strength acting on the material to be cleaned S sandwiched between them can be stably increased further, and the cleaning property can be improved.
  • the charging control rollers 21 and 71 it is desirable to select the charging control rollers 21 and 71 so that the potential of the guide roller 41 is higher than the potential of the cleaning roller 11 or vice versa.
  • the potential difference generated with respect to the cleaning roller 11 and the guide roller 41 is 300 V, and the charge control roller 21 exhibits a positive characteristic.
  • the control roller 71 exhibits a negative characteristic, the outer peripheral surface of the cleaning roller 11 can be charged to ⁇ 300V, and the outer peripheral surface of the guide roller 41 can be charged to + 300V.
  • the two rollers 11 and 41 are opposed to each other with the material to be cleaned S interposed therebetween, and a potential difference of 600 V is generated at the position where the material to be cleaned S contacts the cleaning roller 11 and the guide roller 41, thereby generating The strength is the highest, and charged foreign matter on the surface S1 of the cleaning material S is adsorbed to the outer peripheral surface of the cleaning roller 11 by electrostatic force according to the applied electric field, and effectively from the surface S1 of the cleaning material S. Removed.
  • another cleaning roller is disposed with the material to be cleaned S interposed therebetween, so that the front surface and the back surface (back surface) of the material to be cleaned S can be simultaneously cleaned.
  • two units can be arranged similarly to the one shown in FIG. Needless to say, the cleaning material S may be cleaned only on the back surface side.
  • an external power source 31 (for example, a high voltage power source) can be connected to the cored bar 21a of the charging control roller 21.
  • the reference potential of the charging control roller 21 can be set to a potential given by the voltage applied by the external power supply 31.
  • the cleaning roller 11 shows a value obtained by adding ⁇ 300 V to the potential difference generated when the ground potential is set as the reference potential. .
  • the charging control roller 21 and the cleaning roller 11 held by an insulating member are brought into contact with each other and rotated together at a peripheral speed of 5 m / min.
  • the core potential 21a was applied with a ground potential of 0 V or a voltage ⁇ 500 V from an external power source. In the description of examples and comparative examples described later, a ground potential of 0 V is applied unless otherwise specified.
  • An inner layer portion (thickness 6 mm / width (dimension in the extension direction of the core metal) 240 mm) was formed on a metal core (material: aluminum alloy size: diameter ⁇ 28 mm ⁇ length 250 mm).
  • a metal core material: aluminum alloy size: diameter ⁇ 28 mm ⁇ length 250 mm.
  • an outer layer portion (thickness 30 ⁇ m / width 240 mm) was further formed outside the inner layer portion.
  • the elastic layer has an outer diameter of 40 mm and a width of 240 mm.
  • the outer layer portion (thickness 30 ⁇ m / width 240 mm) was directly formed on the same core metal as described above.
  • Table 4 shows the test results when the foreign material is an acrylic resin
  • Table 5 shows the test result when the foreign material is a polystyrene resin.
  • ⁇ marks indicate three points in the range of 650 ⁇ m ⁇ 500 ⁇ m using a digital microscope (Digital microscope VHX-200 KEYENCE, lens magnification 450 times). A case where no foreign matter is confirmed is indicated by a circle, and a case where a foreign object is confirmed is indicated by a cross.
  • Examples 1 to 17 in which the charging control roller 21 is introduced a potential difference is generated according to the difference in surface characteristics (for example, charging sequence) between the charging control roller 21 and the cleaning roller 11, so that the charging voltage of the cleaning roller 11 is stabilized. It can be seen that foreign matter has been removed in any sample, and stable cleaning performance can be obtained over a long period of time.
  • surface characteristics for example, charging sequence
  • the potential of the cleaning roller can be made negative or positive by changing the charging control roller 21. You can also see what you can do.
  • Comparative Example 4 the foreign matter was removed exclusively using the adhesive force, and although a 10 ⁇ m foreign matter could be removed, a finer 1 ⁇ m foreign matter could not be removed.
  • the charging control roller 21 is provided for the cleaning roller 11 that can charge the outer peripheral surface with a charge that adsorbs foreign matter adhering to the surface of the material to be cleaned by electrostatic force.
  • a transfer roller 51 that rotates while being in contact with the outer peripheral surface of the cleaning roller 11 may be provided to constitute a cleaning unit U10 with improved maintainability.
  • the transfer roller 51 includes a conductive metal core 51a, a cylindrical inner layer portion 51b provided outside the metal core 51a, and an outer layer portion provided outside the inner layer portion 51b.
  • 51c elastic layer portion
  • the outer layer portion 51c may have a higher volume resistivity than the inner layer portion 51b.
  • the transfer roller 51 may also have a structure in which the core 51a is directly provided with a cylindrical outer layer portion (elastic layer portion).
  • the outer layer portion 51c of the transfer roller 51 is selected to have a volume resistivity higher than that of the core metal 51a, and can charge the foreign matter adhering to the outer peripheral surface of the cleaning roller 11 to the outer peripheral surface by electrostatic force.
  • the transfer roller 51 rotates with the cleaning roller 11 and is charged by contact peeling, and adheres to the outer peripheral surface of the cleaning roller 11 between the outer peripheral surface of the transfer roller 51 and the outer peripheral surface of the cleaning roller 11.
  • a potential difference is generated so as to transfer (move) the foreign matter on the outer peripheral surface of the transfer roller 51 by electrostatic force. That is, the transfer roller 51 has the same sign as the charge (positive charge or negative charge) charged on the roller 11 and the absolute value of the charged voltage with respect to the cleaning roller 11 due to the difference in roller surface characteristics (for example, charging order). Is larger than the roller 11 and has a potential difference capable of adsorbing foreign matter.
  • a material for forming the outer layer portion 51c of the transfer roller 51 a material having the same polarity as the cleaning roller 11 and a potential difference that is as large as possible is selected as long as stable adsorbability is not impaired. Is desirable.
  • the charged voltage of the transfer roller 51 is determined according to the generated potential difference (potential difference corresponding to the difference in surface characteristics between the rollers 51 and 11). For example, if the cleaning roller 11 exhibits a voltage of ⁇ 300V, the potential difference between the cleaning roller 11 and the transfer roller 51 is 300V, and the transfer roller 51 exhibits a negative characteristic, the transfer roller 51 has ⁇ 600V. It will indicate the charged voltage.
  • the foreign matter transferred to the transfer roller 51 side due to the potential difference generated by the contact peeling between the cleaning roller 11 and the transfer roller 51 stops the rotation of the transfer roller 51, so that the transfer roller 51 itself loses the adsorptivity due to electrostatic force. Therefore, it can be removed from the transfer roller 51 relatively easily.
  • a means for removing the foreign matter from the transfer roller 51 for example, wiping, brushing, scraping with a rubber blade, air blowing, or other appropriate means may be employed.
  • the foreign matter adsorbed by the electrostatic force on the cleaning roller 11 is brought into contact with the transfer roller 51 by the rotation of the cleaning roller 11, so that a potential difference is generated between the transfer roller 51 and the cleaning roller 11.
  • the roller 11 leaves the outer peripheral surface and is transferred (moved) to the outer peripheral surface of the transfer roller 51.
  • the foreign matter on the outer peripheral surface of the cleaning roller 11 is continuously transferred to the transfer roller 51 side, and the cleaning roller 11 is in a state where the cleaning effect can be exerted at any time.
  • the adsorption operation can be continued. Therefore, maintenance work for periodically removing foreign matters on the outer peripheral surface of the cleaning roller 11 or replacing the cleaning roller 11 is not necessary, and the maintainability is improved.
  • two cleaning units U11 and U12 are arranged, and the signs of the charges charged on the rollers 11A and 11B are given to the cleaning rollers 11A and 11B with which the transfer rollers 51A and 51B come into contact.
  • the reverse charging control rollers 21A and 21B can be provided.
  • the sign of the charge charged on the cleaning rollers 11A and 11B is also reversed so that the positively charged foreign matter adhering to the cleaning material S is negatively charged and the negatively charged foreign matter is positively charged by the cleaning roller 11A. Each can be removed by the roller 11B.
  • the charging voltage of the cleaning roller 11 can be changed by changing the reference of the charging control roller 21 (0 V when grounding is used) by using an external power source 31.
  • the charging voltage of the cleaning roller 11 shows a value obtained by adding ⁇ 300 V to the potential difference generated between the rollers 21 and 11.
  • a guide roller 41 may be disposed on the opposite side of the cleaning roller 11 with the material to be cleaned S interposed therebetween. This guide roller 41 increases the electric field strength for the cleaning roller 11 to adsorb foreign matter adhering to the surface of the material S to be cleaned by electrostatic force.
  • a charge control roller 71 is also provided for the guide roller 41, and the strength of the electric field acting on the cleaning material S sandwiched between the cleaning roller 11 and the guide roller 41 is further increased by the guide roller 41, thereby cleaning performance.
  • the charging voltage of the guide roller 41 can be set to +300 V by introducing a charge control roller 71 having a potential difference of 300 V and a negative characteristic with respect to the guide roller 41.
  • a cleaning roller can be provided instead of the guide roller 41.
  • the transfer roller 72 it is possible to form a unit having a transfer mechanism on the back surface of the material S to be cleaned. A double arrangement can also be adopted.
  • the surface potentials of the cleaning roller 11 and the transfer roller 51 during cleaning were measured using surface potential meters 55 and 56 (Model 341B manufactured by Trek).
  • Tables 6 and 7 show the roller structures of Examples and Comparative Examples in which the foreign matter removal test 2 was performed, and the compositions of the inner and outer layers are shown in Table 3.
  • the production methods of the rollers of Examples and Comparative Examples shown in Tables 6 and 7 are the same as those in the foreign matter removal test 1 described above, and are made of a core metal (material: aluminum alloy, size: diameter ⁇ 28 mm ⁇ length 250 mm).
  • the inner layer part (thickness 6 mm / width (dimension in the extension direction of the core metal) 240 mm) is molded, and those having the outer layer part further mold the outer layer part (thickness 30 ⁇ m / width 240 mm), and the elastic layer has the outer diameter
  • the diameter was 40 mm and the width was 240 mm.
  • an outer layer portion (thickness 30 ⁇ m / width 240 mm) was directly formed on the same cored bar as described above.
  • Table 8 shows the test results when the foreign material is an acrylic resin
  • Table 9 shows the test result when the foreign material is a polystyrene resin.
  • the circles indicate 650 ⁇ m ⁇ 500 ⁇ m using a digital microscope (digital microscope VHX-200 KEYENCE, lens magnification: 450 times). The range of 3 is confirmed, and a case where foreign matter is not confirmed at all points is indicated by a circle, and a case where foreign matter is confirmed is indicated by a cross.
  • Comparative Examples 11 and 13 a conventional adhesive roller is used as the transfer roller 51, and as described in the prior art section, 1 ⁇ m foreign matter cannot be transferred.
  • the cleaning system 61 includes a cleaning unit 62 that removes foreign matter (conductor or dielectric) such as dust adhering to the surface S ⁇ b> 1 of the material S to be cleaned using electrostatic force, and the cleaning unit 62.
  • a carrying-in unit 63 that conveys the material to be cleaned S toward the surface, and a carrying-out unit 64 that carries out the material to be cleaned S after cleaning from the cleaning unit 61.
  • the carry-in unit 63 is configured such that a conveyance belt 63C is wound around a pair of rollers 63A and 63B, and the material S to be cleaned on the conveyance belt 63C is conveyed toward the cleaning unit 62.
  • the carry-out unit 64 is configured so that the conveyance belt 64C is wound around the pair of rollers 64A and 64B, and the material to be cleaned S discharged from the cleaning unit 62 onto the conveyance belt 64C is conveyed in a direction away from the cleaning unit 62. It has become.
  • the cleaning unit 62 includes a pair of cleaning rollers 11A and 11B that rotate with the outer peripheral surface being in contact with the surface S1 (upper surface) of the material S to be cleaned.
  • the charging control rollers 21A and 21B 21B and the outer peripheral surfaces of the transfer rollers 51A and 51B are rotated while being in contact with each other.
  • a pair of cleaning rollers 11A ′ and 11B ′ are also arranged on the back surface (lower surface) of the material to be cleaned S corresponding to the upper cleaning rollers 11A and 11B, and between the cleaning rollers 11A and 11B.
  • the cleaning material S is moved to the carry-out portion 64 side with the cleaning material S interposed therebetween.
  • the cleaning rollers 11A 'and 11B' are also provided with transfer rollers 72A and 72B corresponding to the charge control rollers 71A and 71B.
  • the rotational force of the drive roller 74 is transmitted to the shaft portions of the cleaning rollers 11A 'and 11B' via the drive belt 73, so that the cleaning rollers 11A 'and 11B' are rotationally driven.
  • the cleaning unit U used in the cleaning system according to the present invention rotates on the surface S1 of the cleaning material S while contacting the surface of the cleaning roller 111 and rotating.
  • the cleaning roller 111 removes foreign matters such as dust (conductor or dielectric not shown) that move relative to the surface S1 of the material S to be cleaned by electrostatic force.
  • the cleaning roller 111 is capable of charging the surface with a charge that adsorbs foreign matter adhering on the surface S1 of the material to be cleaned S by electrostatic force.
  • the charging property of the roller surface (outer peripheral surface) of the cleaning roller 111 is used. Thus, foreign matter is adsorbed.
  • This cleaning roller 111 is rotatably held by an insulating member (not shown), and rotates while contacting the surface (outer peripheral surface) of the cleaning roller 111 on the side opposite to the material to be cleaned S.
  • 121 and a transfer roller 131 are provided, and one cleaning unit U is configured. These rollers 121 and 131 are also rotatably held by an insulating member (not shown).
  • the charge control roller 121 can stably charge the outer peripheral surface (outer layer portion) of the cleaning roller 111 with a charge for adsorbing foreign matter adhering on the surface S1 of the cleaning material S by electrostatic force.
  • the transfer roller 131 can stably charge the outer peripheral surface (outer layer portion) of the transfer roller 131 with a charge for adsorbing foreign matter adhering to the surface of the cleaning roller 111 by electrostatic force.
  • the transfer roller 131 rotates together with the cleaning roller 111, and generates a potential difference between the rollers 131 and 111 according to the difference in surface characteristics (for example, charging sequence) of the rollers 131 and 111.
  • the transfer roller 131 causes a potential difference in the transfer roller 131 according to a difference in surface characteristics (for example, charging sequence) from the cleaning roller 111, and the surface of the cleaning roller 111 is changed. Electric charge for adsorbing the adhering foreign matter by electrostatic force is charged.
  • the cleaning roller 111 includes a conductive metal core (core bar) 111a, a cylindrical inner layer portion 111b provided outside the metal core 111a, and a higher resistance than the inner layer portion 111b provided outside the inner layer portion 111b. And a thin cylindrical outer layer portion 111c (for example, a thickness of about 30 ⁇ m), which has a two-layer structure.
  • the material forming the outer layer portion 111c of the cleaning roller 111 has a charge for adsorbing foreign matter such as dust adhering to the surface S1 of the material to be cleaned S by electrostatic force as in the case of the cleaning roller 11 described above. Those that can be charged are selected.
  • the thickness of the outer layer portion 111c of the cleaning roller 111 is also preferably 2 to 500 ⁇ m (more preferably 5 to 50 ⁇ m) for the same reason as in the case of the cleaning roller 11 described above.
  • a conductive carbon A core rod made of a material or a synthetic resin composite material can also be used.
  • the material used for the outer layer portion 111c of the cleaning roller 111 is the same as that of the cleaning roller 11 described above.
  • the inner layer portion 11b of the cleaning roller 111 is the same as that of the cleaning roller 11 described above.
  • the charge control roller 121 includes a conductive metal core (core bar) 121a, a cylindrical inner layer part 121b provided outside the metal core 121a, and an outer layer part 121c provided outside the inner layer part 121b.
  • the volume resistivity of the outer layer portion 121c is set to be higher than that of the inner layer portion 121b.
  • the cored bar 121a, the inner layer part 121b, and the outer layer part 121c of the charge control roller 121 can also be formed using, for example, a material that generates a potential difference depending on the difference in surface characteristics from the cleaning roller 11. Note that, as in the cleaning unit U ′ shown in FIG. 12B, the charge control roller 121 ′ may have a structure in which a cylindrical outer layer portion 121c ′ is directly provided outside the cored bar 121a ′.
  • a first external power supply 141 is connected to the cores 121a and 121a ′ of the charge control rollers 121 and 121 ′, and the first external power supply 141 is connected to the cores 121a and 121a ′ of the charge control rollers 121 and 121 ′.
  • a voltage can be applied.
  • the charge (sign of charge and magnitude of charge) charged to the cleaning roller 111 can be arbitrarily changed.
  • the charge control roller 121 can charge the cleaning roller 111 with a charge that adsorbs foreign matter adhering to the surface S1 of the material to be cleaned S by electrostatic force.
  • the core metal 121a of the charge control roller 121 is set to a reference potential (for example, ground potential, that is, 0 V).
  • the cleaning roller 111 that rotates with the charge control roller 121 is charged by contact peeling with the charge control roller 121, and the cleaning roller 111 and the charge control roller 121 are separated from each other. Depending on the difference in surface properties between them, a potential difference is generated based on the charging sequence.
  • the transfer roller 131 includes a conductive metal core (core bar) 131a, a cylindrical inner layer part 131b provided outside the metal core 131a, and an outer layer part 131c provided outside the inner layer part 131b.
  • the roller surface can be charged with a charge that adsorbs the foreign matter adhering to the surface of the cleaning roller 111 by the electrostatic force by the electrostatic force.
  • the outer layer portion 131c of the transfer roller 131 has a higher volume resistivity than the inner layer portion 131b.
  • the transfer roller 131 ′ may also have a structure in which a cylindrical outer layer portion 131c ′ (elastic layer portion) is directly provided on the core bar 131a ′.
  • a potential difference generated according to a difference in surface characteristics between the cleaning roller 111 and the transfer roller 131 ′ due to contact peeling due to rotation with the cleaning roller 111 is stabilized. It is desirable to select one that is as large as possible without compromising the properties.
  • the transfer roller 131 has the same polarity as the charging voltage generated in the cleaning roller 111 by the accompanying rotation when the voltage applied by the first external power supply 141 installed on the core 121a of the charge control roller 121 is 0V, for example.
  • the absolute value of the charged voltage generated in the transfer roller 131 is set to be larger than the absolute value of the charged voltage generated in the cleaning roller 111.
  • the foreign matter on the outer peripheral surface of the cleaning roller 111 is continuously transferred to the transfer roller 131 side, and the cleaning roller 111 is in a state where the cleaning effect can be exhibited at any time.
  • the adsorption operation can be continued. Therefore, maintenance work for periodically removing foreign matters on the outer peripheral surface of the cleaning roller 111 or replacing the cleaning roller 111 is not required, and the maintainability is improved.
  • the first external power supply 141 applies a voltage having a large absolute value with a reverse sign to the charge charged on the surface of the transfer roller 131 during the transfer operation by the transfer roller 131 except during cleaning by the cleaning roller 111.
  • Application to 121 facilitates the removal of foreign matter adhering to the transfer roller 131.
  • the charging control is performed.
  • the voltage applied by the first external power supply 141 installed on the roller 121 is 0V
  • the cleaning roller 111 becomes ⁇ 300V.
  • the transfer roller 131 becomes ⁇ 600V. In this case, the foreign matter having a positive chargeability with respect to the cleaning roller 111 is attracted to the cleaning roller 111 by electrostatic force and transferred from the cleaning roller 111 to the transfer roller 131.
  • the transfer roller 131 loses the adsorbing force against the foreign matter showing the positive charging property that is attracted to the transfer roller 131 by the electrostatic force, and the foreign matter can be easily removed from the transfer roller 131.
  • a cleaning brush 151 that rotates in the direction opposite to the rotation direction with respect to the transfer roller 131 and scrapes off the foreign matter adhering to the surface of the transfer roller 131 by electrostatic force is rotatably provided.
  • a metal roller 152 made of, for example, a stainless alloy (SUS304) can be installed so as to rotate in a rotating direction with respect to the cleaning brush 151.
  • the cleaning brush 151 has a hair 151b (brush portion) made of synthetic resin on a core metal 151a.
  • a second external power source 153 is connected to the metal roller 152, and a potential difference is generated between the metal roller 152 and the transfer roller 131. That is, a potential having the same sign as the electric charge charged on the surface of the transfer roller 131 at the time of cleaning is applied to the metal roller 152 by the second external power source 153 so as to generate a potential difference with the transfer roller 131.
  • the cleaning blade 146 is formed of an elastic body made of a synthetic resin (for example, thermosetting urethane resin) and is held by an insulating holder (not shown). Note that the holder of the cleaning blade 146 may be held by an insulator.
  • a suction port 145 for air vacuum means capable of sucking foreign matter with negative pressure. Since the cleaning blade 146 is disposed in the vicinity of the suction port 145, the foreign matter scraped off by the cleaning blade 146 is sucked and removed through the suction port 145. Thereby, the foreign material adhering to the metal roller 152 can be efficiently removed.
  • any air vacuum means may be used as long as it can suck foreign matter with a negative pressure, and for example, a known air vacuum pump can be employed.
  • the cleaning roller 111 comes into contact with the foreign matter adhering to the cleaning target material S to be cleaned, so that foreign matters such as dust are adsorbed on the surface (outer layer portion 111c) of the cleaning roller 111 and cleaned. It is removed from the surface S1 of the material S.
  • the foreign matter adhering to the surface of the transfer roller 131 is scraped off from the transfer roller 131 by the cleaning brush 151 and is adsorbed on the surface of the metal roller 152.
  • the foreign matter adhering to the surface of the metal roller 152 is scraped off by the cleaning blade 146, and the foreign matter scraped off by the cleaning blade 146 is removed by suction through the suction port 145 of the air vacuum means. If it is not left on the surface, the transfer roller 131, the cleaning brush 151, and the metal roller 152 can continuously remove foreign substances adhering to the surface of the cleaning roller 111 over a long period of time.
  • the periphery of the transfer roller 131 and the metal roller 152 is not contaminated by the scraped foreign matter.
  • the suction operation by the air vacuum means may be performed all the time, but it can be configured to be driven except during the cleaning by the cleaning roller 111.
  • the first external power supply 141 applies a voltage having a large absolute value opposite to the charge charged on the surface of the transfer roller 131 during the transfer operation by the transfer roller 131 except when the cleaning roller 111 performs cleaning.
  • a voltage is applied to the charging control roller 121 to eliminate the foreign matter adsorbing force by the transfer roller 131, so that the foreign matter can be sucked and removed more efficiently.
  • whether or not the cleaning by the cleaning roller 111 is being performed may be determined by detecting the movement of the cleaning material electrically or mechanically.
  • the cleaning roller 111 since the cleaning roller 111 has a potential difference of +300 V with respect to the transfer roller 131, the foreign matter showing positive chargeability with respect to the cleaning roller 111 is temporarily transferred to the transfer roller 131. Then, the toner image is not transferred again to the cleaning roller 111.
  • the potential difference generated according to the difference in surface characteristics between the rollers 111 and 121 is generated with reference to the charging control roller 121 (for example, ground voltage 0 V).
  • the numerical value is shown stably.
  • two cleaning units U1 and U2 are arranged in a series, and the signs of the cleaning rollers 111 and 111A of each unit are reversed, so that positively charged foreign matter adhering to the cleaning material S is negatively charged.
  • the negatively charged foreign matter can be removed by the positively charged cleaning roller 111A by the cleaning roller 111.
  • the range of foreign matters that can be removed from the material to be cleaned S by the cleaning units U1, U2 (cleaning rollers 111, 111A) can be widened.
  • the charging control rollers 121 and 121A, the transfer rollers 131 and 131A, the second external power sources 153 and 153A, the suction ports 145 and 145A of the vacuum means, the cleaning blades 146 and 146A, the cleaning Brushes 151 and 151A and metal rollers 152 and 152A are provided.
  • a guide roller 154 is provided across the material to be cleaned S, and the material to be cleaned S is supported from above and below at a position where the cleaning roller 111 and the guide roller 154 are in contact with each other, and is stably supported. It is also possible to remove foreign substances.
  • the guide roller 154 is provided with the charge control roller 121 ′′ and the first external power source 141 ′′, and the guide roller 154 is charged so that the potential difference with respect to the cleaning roller 111 becomes large, thereby acting on the material to be cleaned S.
  • the electric field strength can be further increased and the cleaning property can be improved.
  • the electric field strength is highest at the position where the cleaning material S contacts the cleaning roller 111 and the guide roller 154, so that the charging control roller 121 ′′ is installed on the guide roller 154 in accordance with the applied electric field.
  • the charged foreign matter on the material to be cleaned S is efficiently adsorbed to the cleaning roller 111 and removed.
  • the cleaning of the back surface of the material S to be cleaned can be performed simultaneously with the cleaning of the surface by the cleaning unit U3.
  • the charging control rollers 121 and 121B, the transfer rollers 131 and 131B, the second external power sources 153 and 153B, the suction ports 145 and 145B of the vacuum means, the cleaning blades 146 and 146B, the cleaning brushes 151 and 151B, and the metal roller 152 , 152B are provided.
  • the charging control roller 121, the cleaning roller 111, and the transfer roller 131 held by an insulating member (not shown) are brought into contact with each other and rotated together at a peripheral speed of 5 m / min.
  • An arbitrary voltage (ground 0 V, first external power supply ⁇ 900 V) was applied to the cored bar 121 a of the control roller 121 by the first external power supply 141.
  • the first external power supply 141 is set to 0 V when the material to be cleaned passes, that is, at the time of cleaning.
  • the first external power supply 141 is an arbitrary voltage (first external power supply +900 V in the case of Table 14; The external power supply -900 V) was applied.
  • a second external power supply 153 is connected to a metal roller 152 provided to the transfer roller 131 via a cleaning brush 151, and the second external power supply 153 always applies an absolute value of 300 V with the same sign as the transfer roller potential at the time of cleaning. did.
  • the cleaning brush 151 is provided so as to rotate in a direction opposite to the rotation direction with respect to the transfer roller 131, and the metal roller 152 is installed so as to rotate in the rotation direction with respect to the cleaning brush 151.
  • the suction port 145 of the air vacuum means has a gap length of 2 mm with respect to the surface (outer peripheral surface) of the metal roller 152, and a cleaning blade 146 is installed at a position 5 mm behind the roller surface in the advancing direction of the roller immediately below the opening end of the suction port 145. did.
  • the surface potentials of the cleaning roller 11, the charging control roller 121 and the transfer roller 131 during cleaning were measured using surface potential meters 161, 162 and 163 (Model 341B manufactured by Trek).
  • Tables 10 and 11 show the roller structures of Examples 23 to 28 and Comparative Examples 14 and 15 in which the foreign matter removal test 1 was performed, and the compositions of the inner and outer layers are shown in Table 3.
  • the production methods of the rollers of Examples and Comparative Examples shown in Tables 10 and 11 are as follows.
  • An inner layer portion (thickness 6 mm / width (dimension in the extension direction of the core metal) 240 mm) was formed on a core metal (material: made of aluminum alloy, size: diameter ⁇ 28 mm ⁇ length 250 mm).
  • a core metal material: made of aluminum alloy, size: diameter ⁇ 28 mm ⁇ length 250 mm.
  • an outer layer portion (thickness 30 ⁇ m / width 240 mm) was further formed outside the inner layer portion.
  • the elastic layer has an outer diameter of 40 mm and a width of 240 mm.
  • an outer layer portion (thickness 30 ⁇ m / width 240 mm) was directly formed on the same core metal as described above.
  • Table 12 shows the test results when the foreign material is an acrylic resin
  • Table 13 shows the test result when the foreign material is a polystyrene resin.
  • ⁇ marks indicate three points in the range of 650 ⁇ m ⁇ 500 ⁇ m using a digital microscope (Digital microscope VHX-200 KEYENCE, lens magnification 450 times). A case where no foreign matter is confirmed is indicated by a circle, and a case where a foreign object is confirmed is indicated by a cross.
  • the cleaning performance of the cleaning roller 111 and the transfer performance of the transfer roller 131 can be maintained by voltage control by the first external power source 141, and foreign matter is not accumulated, so that it adheres to the surfaces of the cleaning roller 111 and the transfer roller 131. There is no need to perform maintenance work such as periodically removing (cleaning) the foreign matter or periodically replacing the cleaning roller 111 or the transfer roller 131 to which the foreign matter is attached.
  • the cleaning system 171 includes a cleaning unit 172 that removes foreign matter (conductor or dielectric) such as dust adhering to the surface S1 of the material to be cleaned S by using electrostatic force, and the cleaning unit.
  • the apparatus includes a carry-in unit 173 that conveys the cleaning material S toward the 172, and a carry-out unit 174 that carries out the cleaning material S after cleaning from the cleaning unit 171.
  • the carry-in unit 173 is configured such that a conveyance belt 173C is wound around a pair of rollers 173A and 173B, and the material to be cleaned S on the conveyance belt 173C is conveyed toward the cleaning unit 172.
  • the carry-out unit 174 is configured so that the conveyance belt 174C is wound around the pair of rollers 174A and 174B, and the cleaning material S discharged from the cleaning unit 172 onto the conveyance belt 174C is conveyed in a direction away from the cleaning unit 172. It has become.
  • the cleaning unit 172 includes a pair of cleaning rollers 111 that rotate while bringing the surface into contact with the surface S1 (upper surface) of the material to be cleaned S.
  • a pair of cleaning rollers 111 is also disposed on the back surface (lower surface) of the cleaning material S corresponding to the upper cleaning roller 111, and the cleaning material S is sandwiched between the cleaning roller 111 and the cleaning material 111.
  • the cleaning material S is moved to the carry-out portion 174 side.
  • the cleaning roller 111 is also provided with a transfer roller 131 corresponding to the charging control roller 121.
  • the rotational force of the driving roller 176 is transmitted to the shaft portion of the cleaning roller 111 via the driving belt 175 so that the cleaning roller 111 is rotationally driven.
  • a first external power source (high voltage power source) 141 is connected to the core of each charging control roller 121, and a metal roller 152 is provided on each transfer roller 131 via a cleaning brush 151.
  • a suction port 145 and a cleaning blade 146 of an air vacuum pump 178 are provided.
  • Each suction port 145 is connected to an air vacuum pump 178 via a dust collector (filter) 177.
  • the cleaning brush 151 is rotatably provided to the transfer roller 131
  • the metal roller 152 is installed on the cleaning brush 151
  • the cleaning blade 146 and the air vacuum means are sucked in the vicinity of the surface of the metal roller 152.
  • the opening 145 is provided, the present invention is not limited to such a structure.
  • the cleaning brush and the metal roller are omitted, and the cleaning blade 146 and the air vacuum means are sucked in the vicinity of the surface of the transfer roller.
  • a structure in which the mouth 145 is provided may be employed.
  • the charging control roller 121 is provided for the cleaning roller 111, but it can also be provided for the transfer roller 131 as shown in FIG. Next, a test on the foreign matter removal performance of the cleaning roller 111 will be described.
  • the cleaning brush 151 is provided so as to rotate in a direction opposite to the rotation direction with respect to the transfer roller 131, and the metal roller 152 is installed so as to rotate in the rotation direction with respect to the cleaning brush 151.
  • the suction port 145 of the air vacuum means has a gap length of 2 mm with respect to the surface (outer peripheral surface) of the metal roller 152, and a cleaning blade 146 is installed at a position 5 mm behind the roller surface in the advancing direction of the roller immediately below the opening end of the suction port 145. did.
  • a sample in which foreign matter (polystyrene resin or acrylic resin having an average diameter of 1 ⁇ m, 10 ⁇ m) is sprayed on the material to be cleaned S (glass epoxy substrate with copper foil: 12 cm ⁇ 12 cm ⁇ 2 mm) is used.
  • the foreign substance removal performance was evaluated.
  • ⁇ marks indicate three points in the range of 650 ⁇ m ⁇ 500 ⁇ m using a digital microscope (digital microscope VHX-200 KEYENCE, lens magnification: 450 times). A case where no foreign matter is confirmed is indicated by a circle, and a case where a foreign object is confirmed is indicated by a cross.
  • the evaluation experiment was performed continuously for 5 cools with 50 glass epoxy substrates as 1 cool.
  • the surface potential of the cleaning roller 111 during cleaning was measured using a surface potential meter (Mode 1 341B manufactured by Trek). Furthermore, the copper foil surface of the material to be cleaned was connected to the ground, and the value of current flowing on the copper foil surface during cleaning was measured.
  • Table 14 shows the roller structures of Examples 29 to 32 and Comparative Examples 16 to 19, and Table 3 shows the compositions of the inner and outer layers.
  • the charging control roller 121 is arranged so as to rotate while contacting the surface of the cleaning roller 111.
  • An inner layer portion (thickness 6 mm / width (dimension in the extension direction of the core metal) 240 mm) was formed on a metal core (material: aluminum alloy size: diameter ⁇ 28 mm ⁇ length 250 mm).
  • an outer layer portion (thickness 30 ⁇ m / width 240 mm) was further formed outside the inner layer portion, so that the elastic layer had an outer diameter of ⁇ 40 mm and a width of 240 mm.
  • the outer layer (thickness 30 ⁇ m / width 240 mm) was formed directly on the same cored bar as described above.
  • the charging control roller 121 with respect to the transfer roller 131, the current generated from the second external power source 153 is prevented from flowing into the cleaning roller 111, and the current flowing through the cleaning material S is reduced. It has also been confirmed that electrical damage to the cleaning material S can be prevented even if the cleaning material S is a conductive material or the like. In other words, in a system in which the charging control roller 121 that rotates while contacting the surface of the cleaning roller 111 is in contact with the cleaning roller 111, a current generated from the second external power source 153 flows into the cleaning roller 111, When S is a conductive material, the cleaning material S may be damaged.
  • the cleaning roller 111 can be replaced with the cleaning roller 111. It is possible to prevent the current generated from the external power source 153 from flowing in, and to prevent electrical damage to the cleaning material S.
  • FIG. 20 shows an example of the overall configuration of the cleaning system having the cleaning unit described above.
  • the surface (outer peripheral surface) of the cleaning roller 211 is moved relative to the surface S1 of the material to be cleaned S while being rotated, Foreign matter such as dust (conductor or dielectric, not shown) adhering to the surface S1 of the material to be cleaned S is removed by the cleaning roller 211 using electrostatic force.
  • This cleaning roller 211 is capable of charging the surface with a charge for adsorbing foreign matter adhering to the surface S1 of the material to be cleaned S by electrostatic force by contact peeling with the material to be cleaned S.
  • the outer layer portion 211c (for example, a thickness of about 30 ⁇ m) is provided and has a two-layer structure.
  • the first external power supply 21 is connected to the cored bar 211 a of the cleaning roller 211.
  • a transfer roller 231 that rotates while being in contact with the surface of the cleaning roller 211 is provided for the cleaning roller 211 that adsorbs foreign matter by electrostatic force using the charging property of the roller surface.
  • the transfer roller 231 can charge the surface with a charge for adsorbing foreign matter adhering to the surface of the cleaning roller 211 by electrostatic force. Foreign matter adhering to the cleaning roller 211 due to electrostatic force is transferred (moved) to the transfer roller 231 side.
  • the voltage applied to the transfer roller 231 for adsorbing the foreign matter by electrostatic force can be arbitrarily changed. It has become.
  • the transfer roller 231 includes a conductive metal core (core bar) 231a, a cylindrical inner layer portion 231b provided outside the metal core 231a, and an outer layer portion 231c provided outside the inner layer portion 231b.
  • the outer layer portion 231c has a higher volume resistivity than the inner layer portion 231b.
  • a cleaning brush 243 that rotates in a direction opposite to the rotation direction with respect to the transfer roller 231 and scrapes foreign matter adhering to the surface of the transfer roller 31 by electrostatic force is rotatably provided.
  • a metal roller 244 made of stainless alloy (SUS304) is installed so as to rotate.
  • This cleaning brush 243 has a hair portion 243b (brush portion) made of synthetic resin on a metal core 243a.
  • a second external power source 245 is connected to the metal roller 244, and has a mechanism for generating a potential difference with the transfer roller 231. That is, the second external power source 245 applies a potential having the same sign as the electric charge charged on the surface of the transfer roller 231 during cleaning to the metal roller 244.
  • the cleaning blade 241 is formed of an elastic body made of a synthetic resin (for example, thermosetting urethane resin) and is held by an insulating holder (not shown). Note that the holder of the cleaning blade 241 may be held by an insulator.
  • the suction port 242 of the air vacuum means capable of sucking foreign matter by negative pressure near the surface of the metal roller 244 and near the contact portion between the roller surface of the transfer roller 231 and the scraping portion of the cleaning blade 241.
  • the cleaning blade 241 is disposed in the vicinity of the suction port 242, the foreign matter scraped off by the cleaning blade 241 is sucked and removed through the suction port 242. Thereby, the foreign material adhering to the metal roller 244 can be efficiently removed.
  • any air vacuum means may be used as long as it can suck foreign matter with a negative pressure, and for example, a known air vacuum pump can be employed.
  • the tip scraping portion of the cleaning blade 241 contacts the metal roller 244 in the vicinity of the suction port 242 of the air vacuum means to scrape the foreign matter.
  • the foreign matter adhering to the metal roller 44 is efficiently removed and the surroundings are not soiled.
  • the cleaning roller 211 and the transfer roller 231 are held by an insulating material (not shown), and the transfer roller 231 rotates together with the cleaning roller 211, and each roller is between the rollers 231 and 211.
  • a potential difference is generated according to the difference in the surface characteristics of 231 and 211.
  • contact peeling due to the rotation of the cleaning roller 211 and the transfer roller 231 causes a potential difference on the roll surface of the transfer roller 231 according to a difference in surface characteristics (for example, charging order) with the cleaning roller 211, A charge for adsorbing foreign matter adhering to the surface by electrostatic force is charged.
  • a voltage can be applied to the metal core 211a of the cleaning roller 211 by the first external power supply 221.
  • the voltage applied by the first external power supply 221 connected to the metal core 211a of the cleaning roller 211 is 0V.
  • the cleaning roller 211 adsorbs foreign matter from the material to be cleaned S.
  • the transfer roller 231 can transfer the foreign matter attached to the cleaning roller 211.
  • the foreign matter adsorbed on the transfer roller 231 under the above condition has a polarity opposite to the charged voltage generated in the transfer roller 231 due to the rotation with respect to the core metal 211a of the cleaning roller 211 when the applied voltage of the above condition is 0V.
  • the transfer roller 231 loses an adsorbing force (electrostatic force) for adsorbing foreign matter. Accordingly, the foreign matter is scraped off by the cleaning brush 243 and moves to the surface of the metal roller 244.
  • the foreign matter that has moved to the surface of the metal roller 244 is scraped off by the cleaning blade 241 and is removed by suction through the suction port 242 of the air vacuum means.
  • the transfer roller 231 used here has the same structure as that of the cleaning roller 211. However, like the unit U1 ′ shown in FIG. 21B, the transfer roller 231 ′ has a core metal 231a ′ (except for the inner layer portion). A structure in which a cylindrical outer layer portion 231c ′ is directly provided outside the core rod) may be employed. The material of the outer layer portion is preferably selected so that the potential difference with respect to the charged voltage of the cleaning roller 211 is as large as possible within a range that does not impair the stable attracting force due to electrostatic force.
  • the thickness of the outer layer portion 211c of the cleaning roller 211 is preferably 2 to 500 ⁇ m (more preferably 5 to 50 ⁇ m), like the cleaning rollers 11 and 111 described above.
  • a cored bar made of a conductive carbon material, synthetic resin composite, or the like can be used.
  • the material used for the outer layer portion 211c and the material used for the inner layer portion 211b are the same as those of the cleaning rollers 11 and 111 described above.
  • the transfer roller 231 includes a conductive metal core (core bar) 231a, a cylindrical inner layer portion 231b provided outside the metal core 231a, and an outer layer portion 231c provided outside the inner layer portion 231b.
  • the roller surface can be charged with electric charge for adsorbing foreign matter adhering to the surface of the cleaning roller 211 by electrostatic force.
  • the outer layer portion 231c of the transfer roller 231 has a higher volume resistivity than the inner layer portion 231b. It has the same polarity as the voltage applied to the first external power supply 221 and is set so that the absolute value becomes large.
  • the transfer roller 231 arbitrarily changes the charged voltage for adsorbing foreign matter adhering to the surface of the cleaning roller 211 by electrostatic force by the first external power source 221 connected to the core metal 211a of the cleaning roller 211. it can.
  • the cleaning roller 211 continues the foreign matter adsorption operation for a long period of time. Can be done.
  • the cleaning roller 211 comes into contact with the foreign matter adhering to the cleaning target material S to be cleaned, so that foreign matters such as dust are adsorbed to the surface (outer layer portion 211c) of the cleaning roller 211 and cleaned. It is removed from the surface S1 of the material S.
  • the foreign matter adhering to the surface of the transfer roller 231 is scraped off from the transfer roller 231 by the cleaning brush 243 and is adsorbed on the surface of the metal roller 244.
  • the foreign matter scraped off by the cleaning blade 241 adhered to the surface of the metal roller 244 is sucked and removed through the suction port 242 of the air vacuum means.
  • the cleaning roller 211 continues the suction operation of the foreign matter for a long period of time. It can be carried out. Further, the foreign matter scraped from the metal roller 211 by the cleaning blade 241 is immediately sucked and removed through the suction port 242 of the air vacuum means, so that the periphery of the metal roller 211 is not soiled by the scraped foreign matter. .
  • the maintenance work for periodically removing the foreign matter on the surface of the cleaning roller 211 or the transfer roller 231 or replacing the cleaning roller 211 or the transfer roller 231 is not necessary, and the periphery of the transfer roller 231 is caused by the foreign matter. Since there is almost no possibility of getting dirty, maintenance is excellent.
  • the suction operation by the air vacuum means may be always performed, but the first external power source 221 is charged on the surface of the transfer roller 231 during the transfer operation by the transfer roller 231 except for the cleaning by the cleaning roller 211.
  • the voltage of the absolute value larger than the absolute value of the charging voltage of the transfer roller 231 is applied to the cleaning roller 211, and the air vacuum means is driven except when cleaning is performed by the cleaning roller 211. It can also be configured.
  • “during cleaning” refers to the time when the cleaning roller 211 moves relative to the surface of the material to be cleaned while rotating.
  • the movement of the material to be cleaned may be detected electrically or mechanically, and the passage of the material to be cleaned S may be determined by, for example, the vertical displacement of the metal core 211a of the cleaning roller 211. You may make it detect and determine. It is also possible to adopt a structure in which the cleaning blade 241 is supported so as to be able to advance and retract so that the tip scraping portion of the cleaning blade 241 contacts the surface of the metal roller 211 only when the air vacuum means is driven.
  • the transfer roller 231 is ⁇ 600 V
  • the cleaning roller 211 is ⁇ 300 V
  • the positive chargeable foreign matter is removed from the cleaning roller. After being attracted to 211, it is transferred to and attracted to the transfer roller 231.
  • the transfer roller 231 is +600 V
  • the cleaning roller 211 is +300 V
  • negatively charged foreign matter is attracted to the cleaning roller 211. Then, the toner is transferred and attracted to the transfer roller 231.
  • the cleaning roller 211 since the cleaning roller 211 has a potential of +300 V on the plus side with respect to the transfer roller 231, the plus side once transferred to the transfer roller 231 is used. The foreign matter showing the charging property is not retransferred to the cleaning roller 211.
  • the cleaning roller 211 has a potential of ⁇ 300 V on the minus side with respect to the transfer roller 231, and thus the minus that has been transferred to the transfer roller 231 once.
  • the foreign matter showing the charging property on the side is not retransferred to the cleaning roller 211.
  • the reference is the voltage applied by the first external power source 221 connected to the cored bar 211a of the cleaning roller 211.
  • the first external power source 221 applies any of ⁇ 300 V when the material to be cleaned S passes (that is, during cleaning). In other cases, the first external power source 221 has ⁇ 600 V with a polarity opposite to the previously applied potential. The voltage was set to be applied. The second external power supply 245 always applied the same value as the voltage applied when the first external power supply 221 passes the cleaning material.
  • the cleaning brush 243 was installed so as to rotate in the opposite direction with respect to the transfer roller 231 and the metal roller 244 so as to rotate in the accompanying direction with respect to the cleaning brush 243.
  • the suction port 242 of the air vacuum means has a gap length of 2 mm with the roller surface of the metal roller 244, and a cleaning blade 241 is installed at a position 5 mm behind the metal roller 244 in the advancing direction from the roller surface immediately below the opening end of the suction port 242. .
  • the surface potentials of the cleaning roller 211 and the transfer roller 231 during cleaning were measured using surface potential meters 261 and 262 (Model 341B manufactured by Trek).
  • Tables 15 and 16 show the roller structures of Examples 33 to 48 and Comparative Examples 20 and 21 in which the foreign matter removal test 1 was performed.
  • the compositions of the inner and outer layers are shown in Table 3 above.
  • the production methods of the rollers of Examples 33 to 48 and Comparative Examples 20 and 21 shown in Tables 15 and 16 are as follows.
  • An inner layer portion (thickness 6 mm / width (dimension in the extension direction of the core metal) 240 mm) was formed on a metal core (material: made of aluminum alloy, size: diameter ⁇ 28 mm ⁇ length 250 mm).
  • a metal core material: made of aluminum alloy, size: diameter ⁇ 28 mm ⁇ length 250 mm.
  • an outer layer portion (thickness 30 ⁇ m / width 240 mm) was further formed outside the inner layer portion.
  • the elastic layer has an outer diameter of 40 mm and a width of 240 mm.
  • the outer layer portion (thickness 30 ⁇ m / width 240 mm) was directly formed on the same cored bar as described above.
  • Table 17 shows the case where the foreign material is an acrylic resin
  • Table 18 shows the case where the foreign material is a polystyrene resin.
  • ⁇ marks indicate three points in the range of 650 ⁇ m ⁇ 500 ⁇ m using a digital microscope (Digital microscope VHX-200 KEYENCE, lens magnification 450 times). A case where no foreign matter is confirmed is indicated by a circle, and a case where a foreign object is confirmed is indicated by a cross.
  • two cleaning units U1 and U2 are arranged, and the sign of the electric charge charged to the cleaning rollers 211 and 211A of each unit U1 and U2 is reversed, so that the material to be cleaned S is provided. It is possible to remove adhering foreign matter having a positive charging property with the cleaning roller 211 charged to the negative side, and removing foreign matter showing negative charging property with the cleaning roller 211A charged to the positive side.
  • Reference numerals 221 and 221A denote first external power supplies, and reference numerals 231 and 231A denote transfer rollers.
  • a guide roller 251B is provided on the opposite side of the cleaning roller 211 with the material to be cleaned S interposed therebetween, a transfer roller 231B is provided for the guide roller 251B, and the cleaning roller 211 is provided by the guide roller 251B. Further, the electric field strength acting on the cleaning material S sandwiched between the guide roller 251B and the guide roller 251B can be further increased, and the cleaning performance can be improved.
  • the cleaning system 271 includes a cleaning unit 272 that removes foreign matter (conductor or dielectric) such as dust that adheres to the surface S1 of the material S to be cleaned using electrostatic force, and the cleaning unit.
  • 272 includes a carry-in unit 273 that conveys the cleaning material S toward the 272, and a carry-out unit 274 that carries out the cleaned material S after cleaning from the cleaning unit 272.
  • the carrying-in unit 273 is configured such that a conveyance belt 273C is wound around a pair of rollers 273A and 273B, and the material to be cleaned S on the conveyance belt 273C is conveyed toward the cleaning unit 272.
  • the carry-out unit 274 is configured such that the conveyance belt 274C is wound around the pair of rollers 274A and 274B, and the cleaning material S discharged from the cleaning unit 272 onto the conveyance belt 274C is conveyed in a direction away from the cleaning unit 272. It has become.
  • the cleaning unit 272 includes a pair of cleaning rollers 211 that rotate while the surface is in contact with the surface S1 (upper surface) of the material S to be cleaned.
  • the cleaning unit 272 rotates while the surface of the transfer roller 231 is in contact with each cleaning roller 211. It is supposed to be.
  • a pair of cleaning rollers 211 is also disposed on the back surface (lower surface) of the material to be cleaned S corresponding to the upper cleaning roller 211, and the material to be cleaned S is sandwiched between the cleaning roller 211.
  • the cleaning material S is moved to the carry-out portion 274 side.
  • the cleaning roller 211 is also provided with a transfer roller 231 corresponding thereto.
  • the rotational force of the driving roller 276 is transmitted to the shaft portion of the cleaning roller 211 via the driving belt 275 so that the cleaning roller 211 is driven to rotate.
  • a first external power source (high voltage power source) 221 is connected to the core of each cleaning roller 211, and each transfer roller 231 is provided with a metal roller 244 via a cleaning brush 243.
  • the second external power source 245 is connected.
  • a suction port 242 of an air vacuum pump 278 (air vacuum means) and a cleaning blade 241 are provided for the metal roller 244.
  • Each suction port 242 is connected to an air vacuum pump 278 via a dust collector (filter) 277.

Landscapes

  • Electrostatic Charge, Transfer And Separation In Electrography (AREA)
  • Electrostatic Separation (AREA)
  • Cleaning In General (AREA)
  • Cleaning In Electrography (AREA)
PCT/JP2010/000916 2009-03-23 2010-02-15 クリーニングシステム WO2010109755A1 (ja)

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WO2012111302A1 (ja) * 2011-02-15 2012-08-23 バンドー化学株式会社 クリーニング装置
US8479338B2 (en) * 2010-02-15 2013-07-09 Bando Kagaku Kabushiki Kaisha Cleaning device
WO2013183248A1 (ja) * 2012-06-06 2013-12-12 バンドー化学株式会社 クリーニング装置
CN104148333A (zh) * 2014-07-02 2014-11-19 京东方科技集团股份有限公司 一种反应室清扫装置
WO2015083467A1 (ja) * 2013-12-03 2015-06-11 バンドー化学株式会社 クリーニング装置
JP2015178091A (ja) * 2014-02-25 2015-10-08 バンドー化学株式会社 クリーニング装置、粘着ローラユニット及び粘着ローラ
WO2017155074A1 (ja) * 2016-03-09 2017-09-14 バンドー化学株式会社 クリーニング装置
WO2017155075A1 (ja) * 2016-03-09 2017-09-14 バンドー化学株式会社 クリーニング装置及びクリーニング方法
JP7459080B2 (ja) 2018-10-18 2024-04-01 イリノイ トゥール ワークス インコーポレイティド 低静電気接触クリーニングシステム

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WO2015187161A1 (en) 2014-06-05 2015-12-10 Illinois Tool Works Inc. System and method for cleaning an object
CN107377565B (zh) * 2017-07-19 2019-06-25 安徽云融信息技术有限公司 一种玻璃清理装置及清理方法
GB2574179B (en) * 2018-03-12 2021-06-30 Illinois Tool Works Contact cleaning surface assembly
JP6957429B2 (ja) * 2018-09-18 2021-11-02 株式会社東芝 クリーナーヘッド、除去装置及び除去方法

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US8479338B2 (en) * 2010-02-15 2013-07-09 Bando Kagaku Kabushiki Kaisha Cleaning device
JP5044061B1 (ja) * 2011-02-15 2012-10-10 バンドー化学株式会社 クリーニング装置
WO2012111302A1 (ja) * 2011-02-15 2012-08-23 バンドー化学株式会社 クリーニング装置
WO2013183248A1 (ja) * 2012-06-06 2013-12-12 バンドー化学株式会社 クリーニング装置
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JPWO2013183248A1 (ja) * 2012-06-06 2016-01-28 バンドー化学株式会社 クリーニング装置
KR101718199B1 (ko) * 2012-06-06 2017-03-20 반도 카가쿠 가부시키가이샤 청소장치
WO2015083467A1 (ja) * 2013-12-03 2015-06-11 バンドー化学株式会社 クリーニング装置
JPWO2015083467A1 (ja) * 2013-12-03 2017-03-16 バンドー化学株式会社 クリーニング装置
JP2018187634A (ja) * 2014-02-25 2018-11-29 バンドー化学株式会社 クリーニング装置
JP2015178091A (ja) * 2014-02-25 2015-10-08 バンドー化学株式会社 クリーニング装置、粘着ローラユニット及び粘着ローラ
CN104148333A (zh) * 2014-07-02 2014-11-19 京东方科技集团股份有限公司 一种反应室清扫装置
WO2017155075A1 (ja) * 2016-03-09 2017-09-14 バンドー化学株式会社 クリーニング装置及びクリーニング方法
JPWO2017155074A1 (ja) * 2016-03-09 2018-03-15 バンドー化学株式会社 クリーニング装置
JPWO2017155075A1 (ja) * 2016-03-09 2018-03-15 バンドー化学株式会社 クリーニング装置及びクリーニング方法
CN108778536A (zh) * 2016-03-09 2018-11-09 阪东化学株式会社 清洁装置
WO2017155074A1 (ja) * 2016-03-09 2017-09-14 バンドー化学株式会社 クリーニング装置
TWI762481B (zh) * 2016-03-09 2022-05-01 日商阪東化學股份有限公司 清潔裝置及清潔方法
JP7459080B2 (ja) 2018-10-18 2024-04-01 イリノイ トゥール ワークス インコーポレイティド 低静電気接触クリーニングシステム

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TWI483789B (zh) 2015-05-11
CN102361703A (zh) 2012-02-22
JP5605813B2 (ja) 2014-10-15
KR101523693B1 (ko) 2015-05-28
KR20120004420A (ko) 2012-01-12
TW201036715A (en) 2010-10-16
JPWO2010109755A1 (ja) 2012-09-27

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