TW201036715A - Cleaning system - Google Patents

Abstract

Foreign materials can be continuously attracted by means of a cleaning roller for a relatively long period of time without requiring maintenance. A cleaning roller (11) is brought into contact with the surface So of a material to be cleaned (S), and the foreign materials, such as dusts, which are adhered on the surface (S1) of the material to be cleaned (S) are removed using an electrostatic force. A transfer roller (51) is provided on the cleaning roller (11) surface on the reverse side of the surface having the material to be cleaned (S) thereon, and the foreign materials adhered on the cleaning roller (11) are transferred onto the transfer roller (51). An electrostatic charge control roller (21) which rotates in contact with the outer circumferential surface of the cleaning roller (11) is provided, and the electrostatic charge quantity of an outer layer section (1lc) of the cleaning roller (11) can be controlled. As a material for forming the outer layer section of the transfer roller (51), a material which can be charged with electrostatic charges that can attract the foreign materials adhered on the outer circumferential surface of the cleaning roller (11) to the outer circumferential surface by means of an electrostatic force is selected.

Description

201036715 VI. Description of the Invention: [Technical Field of the Invention] The present invention relates to a clean system for removing foreign matter (dust, etc.) adhering to the surface of a cleaned material. In particular, it is suitable for the case where the cleaned material is a thin object such as a film, a sheet, or a printed substrate. [Prior Art] A clean system for removing foreign matter such as dust adhering to the surface of a cleaned material such as a glass substrate or a bonded film of a flat panel display (FPD) is known. The roller is attached, and the foreign matter is removed by the adhesive force (for example, refer to Patent Document 1). However, with such an adhesive roller, foreign matter having an average diameter of 丨" below the melon cannot be removed, and it is difficult to completely remove foreign matter such as dust adhering to the surface (adhesive layer) of the adhesive roller, and the maintainability is not good. Further, since the adhesive roller is pressed against the material to be removed to remove foreign matter by a certain degree of pressure, when the cloth is cleaned, for example, if it is a film, it is possible to remove not only the foreign matter but also the film. surface. Therefore, the inventor applied the electrophotographic technique, and applied for the following = patent (see Japanese Patent Application No. 20 () 8_271797), which is based on the removal of foreign matter such as dust from the cleaned material, if it is stripped (or contacted with electricity). The outer surface of the clean roller is preliminarily charged with an electrostatic force to adsorb the foreign matter, and the foreign matter can be removed by electrostatic force by means of a description of the clean roller. 0014 Patent Document 1. Japanese Laid-Open Patent Publication No. 2008-168188 (No. 3, 2010, 367, 188, filed in the s. The voltage of the foreign matter in the pregnancy roller is required to be # & + electrostatic force to adsorb before (1) the material of the outer layer of the wheel to be cleaned according to the above-mentioned cleaned material. If you use the charged control roller or (4) power supply to accumulate the charging roller, the 滚轮, +, 初 & Α Α Α 洁净 洁净 洁净 洁净 洁净 洁净 洁净 洁净 洁净 洁净 洁净 洁净 洁净 洁净 洁净 洁净 洁净 洁净 洁净 洁净 洁净 洁净 洁净The charged voltage is the adsorption and removal of the foreign matter from the cleaned material, and the object of the present invention is to provide a clean system capable of stably performing the foreign matter adsorption action of the clean roller for a long time. The invention of the patent application is a clean system. a cleaning roller that is in contact with the surface of the material to be cleaned while rotating while moving relative to each other, and the cleaning roller is electrostatically removed by the cleaning roller The foreign matter such as dust on the surface of the cleaned material is characterized in that the clean roller has an external surface with an electrostatic force to adsorb foreign matter adhering to the surface of the cleaned material, and (4) a clean roller is provided. a charging control roller having a side that rotates in contact with the outer surface of the cleaning roller; (4) an electronically controlled (four) roller that can be used to charge the cleaning roller with an electrostatic force to adsorb foreign matter adhering to the surface of the object to be cleaned. In this way, the cleaning roller is separated from the rotating contact of the charging control roller, and the electric charge for adsorbing the foreign matter attached to the surface of the cleaned material by the electrostatic force is applied to the cleaning roller by the side and the cleaning roller. The outer peripheral surface is in contact with the rotating control roller to rotate the clean roller for a long period of 201036715. The clean roller uses electrostatic force to adsorb foreign matter adhering to the surface of the cleaned material to remove the foreign matter from the cleaned material. The foreign matter is removed on the surface. Therefore, the clean roller can be cleaned for a long time. Even the same-cleaning roller can be changed by changing the charging control roller. Also, by changing the combination of the cleaning roller and the charged control roller, the outer surface of the cleaning roller may have a positive side charge or a negative side charge, and may be attached to the type of foreign matter on the surface of the cleaned material ( Including the foreign matter of the same material but different in the polarity of the electrode, etc.), to achieve the best cleanliness. * > Furthermore, if the charged control roller is applied by an external power source (such as a high voltage power supply) 4 The charge (positive or negative charge) of the same sign voltage can increase the chargeability of the clean roller according to the applied voltage, and the foreign matter can be adsorbed and removed more efficiently by the cleaning roller. For example, as described in claim 2, the charging control roller may be configured to be rotated while being in contact with the surface of the cleaning roller to control the roller between the cleaning roller and the cleaning roller. The surface difference of the clean waste wheel produces a potential difference. In this way, the charging voltage from the clean, clean roller and the charged control roller is connected to the charging voltage of the cleaning roller, which is set to the I and the live control based on the electric voltage of the charged control roller. The surface of the wheel = the charged voltage of the potential difference of the characteristic (for example, the charging sequence), and the electric power of the mustard to adsorb the foreign matter adhering to the surface of the cleaned material by the electrostatic force - as described in item 3 of the patent application scope Preferably, the transfer roller is provided in such a manner that the cleaning roller rotates while being in contact with the cleaning roller, 5 201036715 The transfer roller has an electrically conductive anger bar and a cylindrical elasticity disposed outside the mandrel In the layer portion, the elastic layer portion is formed of a material having a volume resistivity higher than that of the material capable of adsorbing a foreign matter adhering to the outer peripheral surface of the cleaning roller by an electrostatic force. In this way, the foreign matter adsorbed on the outer peripheral surface of the cleaning roller by the electrostatic force comes into contact with the outer peripheral surface (surface) of the transfer roller due to the rotation of the cleaning roller. By the contact, since the elastic layer portion of the transfer roller is made of a material capable of adsorbing (using an electrostatic force to adsorb foreign matter adhering to the outer peripheral surface of the cleaning roller), the foreign matter is caused to leave the cleaning roller. It is transferred to the transfer tray. ^This is the case where the foreign material to be removed from the surface of the material is printed on the transfer roller' and no foreign matter is returned to the surface of the material to be cleaned. : Side: Γ: The foreign matter on the outer peripheral surface of the roller is continuously transferred to the transfer roller j. Therefore, it is not necessary to periodically remove (clean) the foreign matter on the outer circumference of the attached wheel or the maintenance of the regular surface. . _ The clean roller of the foreign matter is adsorbed: the foreign matter of the clean roller is continuously continued for a long time. The fourth paragraph of the profit range can also be set to be arranged on the opposite side of the clean roller from the clean guide 2i ^ ^ The wheel is used to increase the electric field strength for the "wheel, which uses electrostatic force to adsorb foreign matter attached to the surface of the object to be cleaned. The net material and::: two 'two wheels (clean roller, guide roller) are clamped by the foreign matter:: support, and in the state of good stability support 4 201036715 using 2 by guiding the roller, clean The roller can increase the electric field strength (using electrostatic force to adsorb the foreign matter attached to the surface of the cleaned material), and according to the electric field strength, the charged foreign matter on the cleaned material is adsorbed to the clean and difficult wheel to achieve good efficiency. Remove. As printed in the fifth paragraph of the patent application, ^^ & preferably the clean roller: a conductive core rod, a cylindrical inner layer on the outside of the core rod, and an outer layer on the outer side of the inner layer The outer layer has 5 turns. The above hardness (10) - A) and the volume resistivity are higher than that of the inner layer portion. Here, "high volumetric electric current rate" means high electrical resistance. Further, the hardness of the outer layer portion was measured using a flat plate having a thickness of 2 mm formed by forming a material which is deflated from the outer layer portion. Further, the hardness (JIS_A) of the outer layer portion is more preferably 6 〇. the above. In this way, since the outer layer portion has 5 turns. The above hardness (jisa) can improve the surface hardness of the roller, and since the volume resistivity of the outer layer portion is higher than the inner layer port P', the charging voltage generated by the contact peeling with the contact surface object has a maintenance effect. On the outer peripheral surface, it is possible to carry a charge which uses static electricity to adsorb foreign matter adhering to the surface of the object to be cleaned. * Therefore, unlike the conventional adhesive roller, the cleaned material can maintain the width of the nip (ηιρ) even if it is a film or the like to prevent the cleaned material from being wound up to the clean roller. As described in the sixth paragraph of the patent application, the cleaning roller may be configured such that the inner layer portion is formed of an electrically conductive elastic material, and the outer layer portion is formed by mixing acrylic acid urethane or gas mixed urethane. . In the case of using only urethane on the outer peripheral surface of the roller, the polarity of the electrode can be changed. If the urethane is mixed with urethane, the foreign matter which is easily negatively charged can be easily removed from the cleaned material. Fluorine mixed amine 201036715 bismuth citrate can easily remove foreign matter that is easily positively charged from the cleaned material. According to Item 7 of the patent scope of Shishen 4, the transfer roller can be rotated while the clean roller is placed in contact with the surface of the delta clean roller, and the == is connected to the mandrel (4) - the external power supply can be cleaned The wheel change is used to adsorb and adhere to the surface of the material to be cleaned by the electrostatic force::::charge, and may also be configured as follows: the transfer roller may be attached to the cleaning roller by electrostatic force The surface of the foreign material is formed by the material, and the charge of the foreign matter can be adsorbed by the electrostatic force by the first external power source connected to the mandrel of the charging control roller. By using the static control roller, the cleaning roller can be set to have the charge of the foreign matter attached to the surface of the cleaned material, and the electric control roller can stably carry the electric power to the cleaning roller. The foreign matter on the surface of the cleaned material is contending for the adsorption force of the clean roller to adsorb the foreign matter adhering to the surface of the battered material by the electrostatic force. Further, since the cleaning roller is provided with a transfer roller that rotates with the side, and the transfer roller is formed by the contact-electrostatic force absorbing and adhering to the clean roller table, it is adsorbed by the electrostatic force. The material of the roller:: the charge is rotated by the cleaning roller and the foreign matter on the surface of the transfer roller is "when it is transferred to the transfer roller by leaving the cleaning roller", the foreign matter is self-contained by the cleaning roller On the surface of the clean material, the foreign matter transferred to the transfer roller without being left on the clean roller will return to the surface of the cleaned material. On the surface, there is no such thing as 'because the foreign matter does not remain on the surface of the clean roll, and the 201036715 will not return to the cleaned surface regularly to remove the surface of the heart. Therefore, there is no need to replace the clean roll. Maintenance work for the clean rollers of foreign objects. The flood season is more: and 'by the voltage applied by the mandrel source connected to the charged control roller, the ancestral land is not the external electric Π control roller applied to the electric surface and the transfer roller when cleaning. Transfer roller Therefore, there is a voltage of ^= and an absolute value, so that the suction of the foreign matter of the printing roller: the force is opposite polarity' eliminates adsorption at the switch, and it is easy to remove foreign matter from the transfer roller during cleaning. This 'the wheel is at the same time as the surface of the material to be cleaned (4) - the time when the red side turns relative to the side. There are 8 items (4) m net _, which has a net i-wheel:,: the surface of the surface is contacted while rotating while moving relative to the clean = L! T net roller using electrostatic force to remove the attachment of the foreign object _ lies in: the clean roller system

"Bu. P power supply, but on the surface with the use of electrostatic force to adsorb the attached person in the dream of the net;; fc|·矣13⁄4 W 〇-w foreign matter charge; the clean roller 4-side and the clean The transfer roller is provided on the surface with a charge for adsorbing foreign matter adhering to the surface of the two-roller roller by electrostatic force using a P/mour wheel, and is connected to the cleaning roller by changing The first external lightning, the wide I + ff, and the external power supply of the younger, can change the charging voltage of the transfer roller for adsorbing the foreign matter by electrostatic force. In this way, since the cleaning roller can The surface has a charge on the surface to absorb the foreign matter adhering to the surface of the object to be cleaned, so that the foreign matter on the surface of the cleaned material is adsorbed to the clean roller. Moreover, since the transfer roller can be used on the surface to utilize static electricity Force to adsorb the foreign matter attached to the surface of the wheel of the cleaning roller 9 201036715, so that the foreign matter adsorbed on the cleaning roller is adsorbed to the transfer roller. Therefore, it is not necessary to periodically remove the cleaning roller. (cleaning) or maintenance work that is periodically replaced. Further, by changing the applied voltage of the first external power source connected to the cleaning roller, the charging voltage of the transfer roller for adsorbing the foreign matter by electrostatic force can be changed. This may change the applied voltage of the first external power source to weaken the adsorption force of the transfer roller to the foreign matter adsorbed on the transfer roller. For example, by setting the polarity of the charged voltage of the transfer roller to be used The electrostatic force is used to adsorb the polarity of the opposite polarity of the foreign matter adhering to the (4) fading surface, so that the transfer roller loses the adsorption force to the foreign matter adsorbed on the transfer roller. It is easy to perform the above-mentioned maintenance work of the printing roller. Therefore, it is not necessary to periodically remove (clean) the surface of the roller attached to the cleaning roller as in the conventional cleaning system using the adhesion of the adhesive roller, or periodically replace the material to which the foreign matter is attached. The roller has been repaired and 'for the transfer roller, as the above, the maintenance work has become excellent in maintainability. Therefore, if applying According to the ninth item of the patent scope, the roller is connected between the transfer roller and the cleaning roller by one side and the surface of the cleaning roller, and the roller is different from the cleaning roller according to the (four) roller. (eg, a live sequence) to create a potential difference. The surface is in this way 'by the cleaning roller and the transfer roller away from 'to produce a different potential difference in the transfer roller according to the contact stripping, charging sequence) There is an adsorption (4) t胄 adsorbed on the surface of the cleaned material. Power supply 201036715 Composition: The transfer wear::: According to item 10, it is better to clean the brush in the following way, and have a relationship with X Rotating the roller in the opposite direction of the rotation direction, a potential is generated between the metal wheel that rotates in the direction of rotation of the metal, and a power supply is externally connected to the surface of the wheel with the front end scraping portion and the transfer roller. With a clean blade. Foreign matter on the surface of the roller 〇 In this way, the foreign matter that is cleaned and brushed on the surface of the metal roller will be removed by the wheel and removed by electrostatic force, and the foreign matter will be scraped off from the front end of the surface of the metal roller. The scraper is added to the charged control roller & In particular, if the application force is controlled, it is possible to more effectively "clear the transfer roller to remove foreign matter from the transfer roller efficiently." (4) According to Item 11, it is preferable that the first-external power = lower: mode Composition: In addition to the cleaning of the clean roller, in the phase change =;:: action, the charge on the surface of the transfer roller is oppositely broken and the absolute value is large. ...the charged control roller, the first surface (four) = "the following way: when cleaning, the potential of the same symbol as the charge of the transfer roller = kg is applied to the metal roller to the metal roller and the transfer A potential difference is generated between the rollers. In this way, since the adsorption force on the surface of the transfer roller when sucked by the electrostatic force is weakened by the control applied to the electric house of the charging control roller, it is advantageous in removing foreign matter. As described in item 12 of the patent application, it is preferable to provide a suction Ό 〇 367 367 367 367 367 367 367 367 367 367 367 367 367 367 367 367 367 367 367 367 367 367 367 367 367 367 367 367 367 367 367 367 367 367 367 367 367 367 367 367 367 367 The foreign matter on the surface of the roller is sucked and removed by the suction port of the gas vacuum mechanism that can be suctioned by the negative pressure. Further, as described in the scope of claim 13 , the transfer roller is preferably configured as follows. a cleaning brush that rotates in a direction opposite to the direction of the rotation, and a metal roller that rotates in the direction of the rotation of the cleaning brush, and a second external power source is connected to the metal roller to generate a potential difference with the transfer roller, and In the vicinity of the surface of the metal roller, a clean blade having a front end scraping portion to a foreign matter adhering to the surface of the metal roller is disposed. In this way, the foreign matter can be removed from the transfer roller by a cleaning brush and then moved to the metal roller by electrostatic force, and then scraped off by the clean scraping front end scraping portion. In addition, the foreign matter adsorbed on the metal roll surface by electrostatic force is scraped off by the scraping end of the clean blade by the 嚟嗓 嚟嗓 g rain gauge, so the effect is removed from the metal roller. foreign matter. In particular, when the second external electric power is changed: the voltage is applied to cause the metal roller to lose the adsorption of the foreign matter adsorbed thereon, the foreign matter can be removed from the metal roller more efficiently. Further, as in the patent application range 帛 14 g on the surface of the transfer roller m... The battle is placed in the vicinity of the ^ clean to the sheet, and a suction port of a gas vacuum mechanism capable of foreign matter by a negative pressure is disposed. i I: In this way, since the electrostatic scraping force is adsorbed on the transfer roller: the scraping portion is scraped off before the cleaning blade is sucked, and the foreign matter is attracted by the negative pressure through the gas port, the foreign matter is not present. Stained 2 The top of the transfer roller. 7 hibiscus

As described in the Patent Application No. 1 S 固 Η , , , , 2010 2010 2010 2010 2010 2010 2010 2010 2010 2010 2010 2010 2010 2010 2010 2010 2010 2010 2010 2010 2010 2010 2010 2010 2010 2010 2010 2010 2010 2010 2010 2010 2010 2010 2010 2010 2010 2010 2010 2010 2010 2010 The utility model is characterized in that the electric field strength is increased, and the cleaning roller uses an electrostatic force to adsorb foreign matter adhering to the surface of the cleaned material. The net material = the wheel (cleaning roller, guide roller) is lost in the opposite direction, and the broken material is removed by the cleaning roller and the guide roller. The support is carried out under the support state with good stability. ο χ 'Improve the electric field strength of the clean roller by electrostatic force to adsorb foreign matter adhering to the surface of the cleaned material by the guide roller, and adsorb the charged foreign matter on the cleaned material to the clean roller according to the electric field strength imparted. Remove. If it is stated in item 16 of the patent scope, it is also possible to provide a charging control roller for the transfer roller instead of the cleaning roller. That is, the invention of the claim is a clean system having a clean roller that is rotated while moving in contact with the surface of the material to be cleaned, and the clean roller is used to remove the surface attached to the object to be cleaned by electrostatic force. The foreign matter such as dust on the surface is characterized in that the cleaning roller has a charge on the surface of the foreign matter adhered to the surface of the object to be cleaned by the electrostatic force I; the clean roller is provided with one side and the "clean roller" a transfer roller that rotates while contacting the surface; the transfer roller is formed of a material having a surface on which a foreign matter adhering to the surface of the cleaning roller is adsorbed by an electrostatic force, and one side of the roller is provided a charging control roller that rotates while contacting the surface of the transfer roller; the charged control roller is connected to the mandrel with a first external power source, and the cleaning roller and the transfer roller can be changed to adsorb and adhere by electrostatic force The charge of the foreign matter on the surface of the cleaned material. 13 201036715 In this way, since the transfer roller is provided with a charging control roller, when the second external power source is provided, the current generated from the second external power source can be prevented from flowing into the cleaning roller even if it is cleaned. The material is a conductive material, etc., and can also prevent electrical damage of the cleaned material. The present invention can stabilize the aforementioned clean roller with a charge for utilizing static electricity to adsorb foreign matter adhering to the surface of the object to be cleaned. Therefore, the cleaning roller can absorb the foreign matter adhering to the surface of the cleaned material by the electrostatic force, and can stably remove the foreign matter from the surface of the cleaned material for a long period of time. [Embodiment] Hereinafter, embodiments of the present invention will be described based on the drawings. (Basic embodiment) As shown in Fig. 1 (a), the cleaning unit U used in the cleaning system of the present invention has a cleaning roller 相对 that moves while being in contact with the surface 31 of the cleaned material s while rotating. The cleaning roller 丨 丨 丨 丨 丨 丨 丨 丨 静电 静电 静电 静电 静电 静电 静电 静电 静电 ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( The electric charge of the foreign matter on the surface S1 of the S, and the charging property of the surface (outer peripheral surface) of the roller of the cleaning roller is used to adsorb the foreign matter. The cleaning roller 11 is provided with a charging control while rotating in contact with the outer surface of the cleaning roller ii. The roller 21 constitutes a cleaning unit u. The charging control roller 21 stabilizes the outer peripheral surface (outer layer portion) of the cleaning roller 11 to utilize the electrostatic force to adsorb the electric charge attached to the foreign matter on the surface S1 of the cleaned material S. 14 201036715 The cleaning roller 11 includes a mandrel (mandrel) 丨丨a, a cylindrical inner layer portion 11b provided outside the mandrel 11a, and an outer side of the inner layer portion Ub and having a higher impedance The thin cylindrical outer layer portion llc (for example, 'thickness of 30" m or so) formed by the material of the inner layer 胄llb has a two-layer structure. The material for forming the outer layer portion Uc of the cleaning roller U is selected as follows: It is possible to carry a charge by electrostatic force to adsorb foreign matter such as dust adhering to the surface S1 of the cleaned material S. That is, as long as the charged voltage of the foreign matter has a zeta potential difference, the charged control roller is appropriately charged into a positive (9) Or negative (minus). In addition, regardless of the foreign material 3 or the foreign matter attached to the surface thereof, the charging voltage of the cleaning roller can be stabilized by the charging control roller. The thickness of the outer layer of the cleaning roller 11 is Preferably, it is 2 to m (more preferably 5 to 50). This is because the thickness of the outer layer 胄Uc is less than & m', and there is a tendency that the surface of the roller (the surface of the outer layer is less likely to have a charge). The thickness of more than 500" m is industrially inconsistent with the efficiency of I. In addition, the mandrel 11a may be replaced by a conductive carbon or synthetic resin composite coffin. The electricity is below 1〇5Ω cm. The layer portion m is made of an electrically conductive elastic material (for example, a carbon-containing (electrically conductive material)-containing urethane, etc.), and is set to have a lower hardness or substantially the same hardness as the outer layer portion (1). The claws are not particularly limited as long as the impedance is low, but the volume is preferably about 1 to 12 Qcm. The outer layer 11 c or more, 100 ° or less, 65 ° or more, and 1 〇〇 are used. It has a hardness of 'more preferably 55° or more> (JIS-A). 50 or more (preferably 5〇., 10°° below and 'outer layer' is more preferably 11C impedance 15 201036715 is higher than Inner layer portion 11 b. The outer layer portion 11c preferably has a volume resistivity of 1 〇 8 q cm or more, and more preferably has a volume resistivity of 10 1 g Q cm or more. A preferred example of the material for forming the outer layer portion 11c of the cleaning roller 11 is urethane resin, and further, acrylic acid mixed amine ethyl acrylate or fluorine mixed urethane ethyl ester is exemplified. Here, the "acrylic mixed urethane" means that the polyester polyamine phthalate or the polyether polyethyl phthalate is the main component '(i) thermoplastic amino phthalate resin and poly a mixture of a neon/acrylic copolymer resin' (ii) an acrylic resin (for example, a grafting compound in which an amine ethyl group is grafted to a main chain composed of a methacrylic acid-methyl methacrylate copolymer) a mixture of a thermoplastic resin amine phthalate resin and (iii) a mixture of an acrylic resin/amine phthalate resin/fluorine-based surface coating agent, "fluorine mixed urethane", meaning It is a mixture of a polyurethane sulphate as a main component and an amine citrate/fluoro copolymer mixed with a thermoplastic urethane acetate resin. The charging control roller 21 includes a conductive mandrel 21a, a cylindrical inner layer portion 21b provided outside the mandrel 21a, and a cylindrical outer layer portion 21c provided outside the inner layer portion 2ib, and the outer layer portion 2ic is set. The volume resistivity is two in the inner layer portion 21b. The mandrel 21a, the inner layer portion 21b', and the outer layer portion 21c of the charging control roller 21 may be formed, for example, by using a material that generates a potential difference depending on the surface characteristics of the cleaning roller u. Further, in the case of the charging control roller, as shown in Fig. 1(b), the charging control roller 2 may have a cylindrical outer layer portion 21c directly on the outer side of the mandrel 21a. However, in the range of the materials for the electrification control rollers 21, 21 and the outer layer portions 21c, 21c, it is preferable to select the cleaning roller U and the charging control roller 21, 21 in a range that does not impair the stable adsorption property. Rotation (4) Touch peeling, 16 201036715 According to the cleaning roller 11 and the charging control roller 21, the potential difference generated is as large as possible. In addition, the charging control roller 21 can cause the cleaning roller η to have an electrostatic force to adsorb the foreign matter adhering to the foreign matter on the surface S1 of the cleaned material s, as shown in Fig. 1(a). The mandrel of the charging control roller 21 is set to a potential that constitutes a reference (for example, a ground potential, that is, 〇v). The cleaning roller that rotates in conjunction with the charging control roller 21 is charged by the contact between the 滚轮 ο = net roller η and the charging control roller 21, and between the wheel 2 and the charging control roller 21, according to the surface A charge/column is generated to generate a potential difference. Since the enthalpy difference in the rollers is based on the difference in surface characteristics, the values are stably exhibited at a certain peripheral rate.卜#依; The electrical data generated by the difference in surface characteristics between the 衮 wheel u and 21 forms the outer layer portion lic, and the material is added or subtracted with the electric control, and the value obtained by the electric potential is the clean roller 11 Charged voltage. Jie 2: The material of the outer layer 21 c of the electrified wide roller 21 is relatively formed = material 'If the charging sequence is positive side, then the wheel: 2 1 negative side' If the charging sequence is negative, the cleaning roller 1 Charged to the positive side. d: The potential of the electrification control roller 21 is the ground potential, and is 〇v, that is, the charging voltage of the #: wheel 11 is ·300 ν or + 矿. The clean roll (4), in the material = two = ... that is, a ^ Ding beam control roller 2 1 is presented, and the signature is +300V when the characteristics are seen. 17 201036715 Therefore, according to the clean roller 11 1 by the contact with the charging control roller 21, the cleaning roller u is stabilized with an electric charge capable of adsorbing foreign matter by electrostatic force, so that it can be stably used from the cleaned material. The surface S1 of s removes the cleansing properties of the foreign matter. 'As shown in Fig. 2, two sets of clean units ui, U2 can be arranged, and the charging control rollers 21A, 21B are provided to the cleaning rollers 11a, 11b in the cleaning units U1, U2', and the cleaning rollers 11a can be made. The sign of the charge on the outer surface of 11 b is opposite. In this way, the positively charged foreign matter adhering to the surface S1 of the cleaned material s can be removed by the negatively charged cleaning roller 11A (cleaning unit ui) to clean the positively charged roller 丨丨B (cleaning unit) The negatively charged foreign matter is removed, and the range of the removable foreign matter is increased. Further, as shown in Fig. 3, the cleaning member s can be held and the guide roller 41 can be disposed on the opposite side of the cleaning roller. The guide roller 41 is configured to increase the electric field strength for the clean roller to adsorb the foreign matter adhering to the surface si of the cleaned material s by the electrostatic force, and has the mandrel 41a and the outer side of the mandrel 41a. The inner layer portion 41b and the outer layer portion 41c having an insulating outer side of the inner layer portion 41b are formed to increase the electric field intensity. The guide roller 41 is provided with a potential difference of the relatively clean roller n, and is provided with another electrification control roller 71 having the same structure as the charging control roller 21. The guide roller 41 can further stably improve the action on the clamp roller 41. The electric field strength ' of the cleaned material s between the cleaning roller 11 and the guide roller 41 is improved to improve the cleanliness. At this time, it is preferable to select the respective electrification control rollers 2A, 7丨 so that the potential of the guide roller 41 is higher than the potential of the cleaning roller i] or vice versa. For example, in the case where the charging control roller 2 1 , 71 is grounded and both are 〇v, if the potential difference generated by the 18 201036715 to the cleaning roller η or the guiding roller 41 is the fan V, and the charging control roller 21 exhibits a positive characteristic, the charging is performed. When the control roller 71 presents a negative special I. When it is born, the cleaning roller can be separately made! The outer surface of i is charged to _3〇〇ν, and the outer surface of the guide roller is charged to +3〇〇v. In this way, the two rollers (1) 41 are clamped relative to the cleaned material, and the cleaned material s generates a potential difference of _¥ at the position where the clean roller.U and the guide roller 41 are in contact, and the electric field strength is the highest. The applied electric field causes the foreign matter of the surface of the cleaned material s to be adsorbed to the outer surface of the clean roller u by electrostatic force, and can be effectively removed from the surface S of the cleaned material S. Further, in place of the cleaning roller s, another cleaning roller may be disposed instead of the guide roller 41, whereby the surface and the back surface (back surface) of the cleaned material S are simultaneously cleaned. At this time, two groups can be arranged in the same manner as those shown in Fig. 2 . Further, of course, it is also possible to clean only the reverse side of the material to be cleaned 8. As shown in Fig. 4, an external power source 3i (e.g., a high voltage power source) may be connected to the mandrel 21a of the charging control roller 21. At this time, the reference potential of the charging control 滚轮 roller 21 can be set to a potential which is broken by the voltage applied from the external power source. For example, when 300 volts is applied to the mandrel 21a of the charging control roller 21 by the external power source 31, the cleaning roller system exhibits a value added by the potential difference generated when the ground potential is used as the reference potential. Next, the foreign matter removal test performed using the aforementioned unit will be described. (Test method) As shown in Fig. 5, the charging control roller U and the cleaning roller U held by an insulating member (not shown) are brought into contact with each other, and are rotated at a peripheral speed of 19 201036715 at a rate of 5 m/min to be charged. The mandrel 21a of the control roller 21 is given a ground potential ον or a voltage of an external power source ± 5 〇〇 v. Further, in the description of the examples and comparative examples described later, the ground potential is applied unless otherwise specified. For this purpose, a sample of a foreign material (a diameter of iymio with a polystyrene resin or an acrylic resin) was used on the surface of a cleaned material (PET film: 15 cm x 15 Cmxi 〇〇 μ m) to evaluate the clean roller. Foreign matter removal performance. In addition, the evaluation test system continuously cleans 5 cleaned materials to start with the cleaned material as the sample, and secondly to the sample 2 and evaluates to the sample 5. The surface potential of the clean roller u was measured using a surface potentiometer 45 (Model 341B manufactured by TREK Co., Ltd.) during the cleaning of the cleaned material. (Description of Examples and Comparative Examples) The structures of the rolls of the examples and comparative examples in which the foreign matter removal test was carried out are shown in the following Table 2. The composition of the inner layer and the outer layer is shown in Table 3. The methods for producing the rollers of the examples and comparative examples shown in Tables 1 and 2 are as follows. The inner layer portion (thickness: 6 mm/width (dimension of the mandrel extending direction) of 24 mm) was molded into a mandrel (material: made of aluminum alloy, size: diameter: 28 mm x length: 25 mm). The outer layer portion further has an outer layer portion (thickness 3 〇 " m / width 24 mm) formed on the outer side of the inner layer portion. Thereby, the elastic layer has an outer diameter of 40 mm and a width of 240 mm. However, for the roller without the inner layer portion (the charged control roller of the embodiment 9, 16, 17 is), the outer layer portion (thickness 3 〇 / / m / width 24 〇 η ^) is directly formed in the same core as described above. axis. 20 201036715 Table 1 Charge control roller Clean roller Inner layer outer roller hardness JIS-A〇 Inner layer outer roller hardness JIS-A〇 Example 1 a A 30 a G 32 Example 1 (-500V) a A 30 a G 32 Example 2 (-500V) a A 30 a F 28 Example 3 a B 30 a H 30 Example 4 a B 30 a G 32 Example 5 a C 32 a H 30 Example 6 a D 30 a A 30 Example 7 a E 29 a B 30 Example 8 a F 28 a A 30 Example 9 None A — a H 30 Comparative Example 1 No a A 30 Comparative Example 2 No a G 32 Comparative Example 3 No a H 30 Comparative Example 4 No b No 26 Table 2 Charge control roller Clean roller Inner layer outer roller hardness JIS-A〇 Inner layer outer roller hardness JIS-AQ Example 1 (+500V) a A 30 a G 32 Example 2 a A 30 a F 28 Example 2 (+ 500V) a A 30 a F 28 Example 10 a A 30 a D 30 Example 11 a Η 30 a C 32 Example 12 a Η 30 a B 30 Example 13 a G 32 a B 30 Example 14 a G 32 a A 30 Example 15 a B 30 a E 29 Example 16 No A - a F 28 Example 17 Benefit A - a D 30 Comparative Example 5 No a F 28 Comparative Example 6 None a E 29 Comparative Example 7 No a D 30 Comparative Example 8 a B 30 Comparative Example 4 No b No 26 21 201036715 Table 3 Composition Roller Hardness JIS-AO a Adding carbon (conductive material) 〇.5 parts by mass to 100 parts by mass of the polyester thermosetting urethane resin . 28 b Adhesive butyl rubber 26 A is added to 10 parts by mass of a modified material (ethylamine decanoate/fluoro copolymer) with respect to 100 parts by mass of the polyether-based thermoplastic amine phthalate resin. 93 B A mixture of an acrylic resin/urethane resin/fluorine-based surface coating agent. 95 C is added to 30 parts by mass of a modified thermoplastic (polyoxyl/acrylic copolymer resin) based on 100 parts by mass of the thermoplastic thermoplastic amine phthalate resin. 65 D is composed of 40% by mass of an acrylic resin and 60% by mass of a polyether-based thermoplastic urethane resin. 96 E is a polyether-based thermoplastic urethane resin, and a filler (oxidized) is added. 〇% by mass. 95 F is added to 10 parts by mass of a filler (barium titanate) per 100 parts by mass of the thermoplastic thermoplastic amine phthalate resin. 96 G is added to 100 parts by mass of the thermoplastic thermoplastic urethane resin, and a modified material (ethyl urethane/fluoro copolymer) is added in an amount of 1 part by mass. 66 H is added to a mass of the polyester-based thermoplastic urethane resin in an amount of 3 parts by mass based on 100 parts by mass of the modified thermoplastic material (ethyl urethane/fluoro copolymer). 66 (Test results) Table 4 shows the test results in the case where the foreign matter is an acrylic resin and the foreign matter in Table 5 is a polystyrene resin. Here, the 〇X mark in the table is a digital microscope (the lens magnification of the digital microscope VHX-200 KEYENCE company is 450 times), and the 3 points of the range of 650 " mx500 # m are confirmed, and the ◦ mark indicates that it is not confirmed at all points. In the case of foreign matter, the X mark indicates that a foreign object has been confirmed. 22 201036715 Table 4

Clean roller potential (7) Sample 10/zm 1 μτα 1 2 3 4 5 1 2 3 4 5 Example 1 -378~-332 Example 1 (-500V) -868~-824 〇〇〇〇〇〇〇〇〇〇Example 2 (-500V) -208~-163 〇〇〇〇〇〇〇〇〇〇Example 3 -492~-448 〇〇〇〇〇〇〇〇〇〇 Example 4 -407~-356 〇〇〇〇〇〇〇〇〇〇Example 5 -437-392 〇〇〇〇〇〇〇〇〇〇Example 6 -339~-291 〇〇〇〇〇〇〇 〇〇〇Example 7-167~-111 〇〇〇〇〇〇〇〇〇〇Example 8 -338~-277 〇〇〇〇〇〇〇〇〇〇Example 9 -371~-325 〇〇〇 〇〇〇〇〇〇〇Comparative example 1 氺-6000~+2000 〇XXXX 〇XXXX Comparative example 2 氺-6000~+3000 〇XXXX 〇XXXX Comparative example 3 氺-6000~+2000 〇XXXX 〇XXXX Comparative example 4 氺-2000~+9000 〇〇〇〇〇XXXXX

table 5

Clean Roller Potential (V) Sample 10"m 1 βΤΆ 1 2 3 4 5 1 2 3 4 5 Example 1 (+500V) +118~+153 〇〇〇〇〇〇〇〇〇〇Example 2 +268~ +324 〇〇〇〇〇〇〇〇〇〇Example 2 (+500V) +762~+803 〇〇〇〇〇〇〇〇〇〇Example 10 +341~+388 〇〇〇〇〇〇〇〇 〇〇Example 11 +403 to +451 〇〇〇〇〇〇〇〇〇〇Example 12 +452~+494 〇〇〇〇〇〇〇〇〇〇Example 13 +359~+408 〇〇〇〇 〇〇〇〇〇〇Example 14 +346~+384 〇〇〇〇〇〇〇〇〇〇Example 15 +301~+347 〇〇〇〇〇〇〇—〇〇〇Example 16 +264~+ 311 〇〇〇〇〇〇〇〇〇〇Example 17 +338~+381 〇〇〇〇〇〇〇〇〇〇Comparative Example 5 氺-2000~+%00 〇XXXX 〇XXXX Comparative Example 6 氺-3000~ +6000 〇XXXX 〇XXXX Comparative Example 7 氺-2000~+9000 〇XXXX 〇XXXX Comparative Example 8 氺-2000~+9000 〇XXXX 〇XXXX Comparative Example 4 氺-2000~+9000 〇〇〇〇〇XXXXX 23 201036715 In the first to seventh embodiments in which the charging control roller 2 1 is introduced, it is known that since the charging control roller 21 and the cleaning roller are in between The potential difference is generated depending on the surface characteristics (for example, the charged sequence), so that the charged voltage of the cleaning roller 1 is stabilized 'the foreign matter in each sample has been removed' to obtain long-term stable clean performance. Further, for example, as in the sixth embodiment and the fourteenth embodiment, it is also confirmed that the clean roller potential can be changed to the negative side or to the positive side by changing the charging control roller 21 even if the cleaning roller 11 is the same. Further, in Comparative Example 4, the foreign matter was removed by the adhesive force, and the foreign matter of 1 〇//1]1 was removed, but the finer 1 /z m foreign matter could not be removed. On the other hand, in Comparative Examples 1 to 8 in which the charging control roller was not introduced, the charging voltage of the cleaning roller 11 fluctuated and continuous stability (refer to Tables 1 and 2), negative charging voltage or positive charging voltage was not obtained. After a continual increase in the rise, unevenness of the charging voltage due to discharge (arc discharge) occurs, and the charged voltage of the roller becomes positive or I, that is, continuous foreign matter adsorption cannot be obtained. In the above-described embodiment, the cleaning roller that is capable of adsorbing the charge of the foreign matter adhering to the surface of the object to be cleaned by the electrostatic force on the outer peripheral surface is provided with the charging control roller 21', but as shown in Fig. 6, except In addition to the charging control roller h, it is also possible to provide a transfer roller 51' that rotates while being in contact with the outer surface of the cleaning roller to form a cleaning unit that enhances maintenance, that is, by being disposed in the cleaning roller u On the opposite side of the clean material s, the transfer roller 51 is brought into contact with the cleaning roller u, so that the foreign matter attached to the cleaning roller η by the electrostatic force can be transferred (moved) to the transfer roller (1). By the way, the cleaning roller 11 is in contact with the to-be-cleaned material s in the state in which the foreign material adhered to the outer surface of the cleaning roller is transferred to the transfer roller 51. Similarly to the cleaning roller U, the transfer roller 51 may be provided with a conductive mandrel 51a, a cylindrical inner layer 邛5 1 b provided outside the mandrel 51a, and s from the inner layer portion 5. The outer layer portion 5丨c (elastic layer portion) on the outer side of 1b, and the outer layer portion 51c has a volume resistivity higher than that of the inner layer portion 51b. however'

The transfer roller 51 may have a structure in which a cylindrical outer layer portion (elastic layer portion) is directly provided to the core shaft 51a. x, the outer layer portion of the transfer roller 51 is selected to have a higher volume resistivity than the core shaft 51a, and may have a charge for adsorbing foreign matter adhering to the outer peripheral surface of the clean roller n to the outer peripheral surface by electrostatic force. The transfer roller 51 is coupled to the cleaning roller U (four), and is charged by contact peeling. Between the outer peripheral surface of the transfer roller 51 and the outer peripheral surface of the cleaning roller u, an electrostatic force is applied to adhere to the outer circumference of the cleaning roller η. The surface foreign matter is transferred (moved) to a potential difference of the outer peripheral surface of the transfer roller 51. That is, the 'transfer roller 51 has the same sign as the charge (positive or negative charge) of the roller " by the difference in the surface characteristics of the roller (e.g., the charging sequence), and the absolute voltage of the charging voltage The value is larger than the roller u and can absorb the potential difference of the foreign matter. In this case, in terms of forming the outer layer W (four) of the transfer roller 51, it is preferable to select the same polarity for the cleaning roller U, and the adsorption of the ρ 阁 & The potential difference generated by the range is as large as possible. When the amount of the bone is constant, the charged voltage of the transfer roller 51 is determined according to the difference (potential difference between the rollers 51 and 11). For example, -I seeks the right part of the wheel #1 wheel presents _3〇〇V 夕册; &, clean roller U, transfer see 3 guess, the potential difference between the electric power wheel 51 is 300v, and turn 25 201036715 When the roller 51 exhibits a negative characteristic, the transfer roller 51 exhibits a charging voltage of _6 〇〇v. The foreign matter transferred to the transfer roller 51 side by the potential difference generated by the contact between the cleaning roller Η and the transfer roller 51 is lost by the rotation of the transfer roller 51, thereby causing the transfer roller 51 itself to be lost. The adsorptivity generated by the electrostatic force can be relatively easily removed from the transfer roller 5ι. Here, the method for removing foreign matter from the transfer roller 51 can be carried out, for example, by wiping, rinsing, rubber scraper, etc., by jetting, and the like. Therefore, the foreign matter adsorbed on the cleaning roller U by the electrostatic force causes a potential difference between the cleaning roller 51 and the cleaning roller η by the rotation of the cleaning roller 11, because the second surface of the cleaning roller 1 1 is opened. And is transferred (moved) to the outer peripheral surface of the transfer roller 5 i. Thereby, since the foreign matter on the outer peripheral surface of the cleaning roller η is continuously transferred to the side of the transfer roller 51, the cleaning roller u can be cleaned at any time, so that the cleaning roller u can be continuously performed for a long period of time. The adsorption action of foreign matter. Therefore, it is not necessary to periodically remove the foreign matter on the outer peripheral surface of the cleaning roller u or replace the maintenance roller # of the cleaning roller u to improve the maintainability. At this time, as shown in FIG. 7, two sets of cleaning units uu and 丨2 may be disposed, and the cleaning rollers 11A, 11B contacted by the transfer rollers 51A, 51B are provided: electric control rollers 21A, 21B' to make the rollers UA, " B with the electric 2 symbol is opposite. By also making the charge carried by the cleaning rollers Ua, Ub reverse, it can be removed by the negatively charged cleaning roller UA, "positively charged foreign matter, with the positively charged cleaning roller 11B attached to the ancient A negatively charged foreign matter of the cleaned material S. 26 201036715 As shown in Fig. 8, by changing the reference of the charging control roller 21 (0V when grounding is used) by using the external power supply 31, the charging voltage of the cleaning roller u can be changed. For example, when _300 V is applied to the charging control roller 21, the charged voltage of the cleaning roller 1 i exhibits a potential difference between the rollers 21 and u plus a value of _3 〇〇 v. As shown in Fig. 9, the cleaning material S can be held and the guide roller 41 can be placed on the opposite side of the cleaning roller i. The guiding roller 41 is used to increase electricity

The field strength is used to clean the roller and use electrostatic force to adsorb foreign matter adhering to the surface of the material S to be cleaned. At this time, the charging roller 71 may be disposed on the guiding roller 41, and the electric field strength of the cleaned material s between the cleaning roller and the guiding roller 41 is further improved by the guiding roller 41. For example, the charging voltage of the guiding roller 41 can be made by introducing the charging control roller 7 having a potential difference of 3 qing and == to the guiding roller 41. In addition, the opposite side of the cleaning material s must also be performed. In the case of cleanliness, of course, a clean roller can be provided instead of the guide roller #4. At this time, as shown in Fig. g, the dummy roller is introduced, and by introducing the transfer roller 72, it can be set to be cleaned::=r... It can be explained with the above-mentioned situation, as well as the use of the transfer roller. The foreign matter removal test 2 (test method) of the foreign matter removal test 2 (test method) is rotated in conjunction with the peripheral speed of the charging control roller 21 and the cleaning n, so that the insulating member (not shown) keeps the net roller 1 1 in contact and makes it 5 m/ Mi 27 201036715 The voltage of the charged control roller 2 1 is ±500V. Further, in the description of the embodiment in which the grounding voltage is 0 V or the external power source is applied to the mandrel, the ground potential 〇v is given unless otherwise specified. For this, use a film-like cleaned material s (pET film: 15cmxl5cmxl〇〇)

can. In addition, the evaluation test was carried out in groups of 5 in order to evaluate the foreign matter removal of the clean roller, and the film-like cleaned material was one group. Further, it is confirmed that the foreign matter adhered to the clean roller 后 after the cleaning is completed, and the foreign matter remaining on the transfer roller 51 after the transfer roller 51 is wiped by the rag containing water is confirmed. Surface potentials of the cleaned cleaning roller and the transfer roller 5 were measured using surface potentiometers 55 and 56 (Model 341B manufactured by TREK Corporation). (Description of Examples and Comparative Examples) The compositions of the examples of the foreign matter removal test 2 and the comparative examples were shown in Tables 6 and 7 below, and the compositions of the inner and outer layers are shown in Table 3. The manufacturing method of the roller of the embodiment and the comparative example shown in Tables 6 and 7 is the same as the case of the foreign matter removal test 1, and the inner layer portion (thickness: 6 mm/viscosity (dimension of the mandrel extension direction) is 24 〇 inm. ) formed on the mandrel (material: made of alloy, size: diameter 0 28mmx length 250mm), with the outer layer, further the outer layer (thickness 30 / zm / width 240mm) is opened 7 elastic layer is set to the outer diameter 0 40mm, width 240mm. Further, for the roller having no inner layer portion (the transfer roller of the embodiment 20), the outer layer portion (thickness 3 〇 ym / width 240 mm) is directly formed into the same core as the above. 28 201036715 Table 6 Acoustic control roller cleaning Monthly transfer of the island! Wheel inner layer roller hardness JIS-A (°) Inner layer outer roller hardness JIS-A 〇 inner layer outer roller hardness JIS-A 〇 Example 18 a D 30 a A 30 a G 32 Example 18 (- 500 V) a D 30 a A 30 a G 32 Example 19 a E 29 a B 30 a G 32 Example 20 a D 30 a A 30 No G - Comparative Example 10 a D 30 a A 30 a F 28 Comparative Example 11 a D 30 a A 30 b No 26 Table 7 Charge control roller clean sub-transfer month (inner wheel outer roller hardness JIS-A 〇 inner layer outer roller hardness JIS-A (°) inner layer outer roller hardness JIS-A (°) Example 21 a G 32 a B 30 a E 29 Example 22 a G 32 a A 30 a D 30 Example 22 (+500 V) a G 32 a A 30 a D 30 Comparative Example 12 a A 30 a F 28 a A 30 Comparative Example 13 a A 30 a B 30 b No 26 〇 (test result) Table 8 is a case where the foreign matter is an acrylic resin, and Table 9 is a case where the foreign matter is a polystyrene resin. In the same manner as in the case of the foreign matter removal test 1, the 〇X mark is a digital microscope (manual microscope VHX-200 KEYENCE, lens magnification: 450 times), and 650 / / mx500 M m of 3 points, the ◦ mark indicates that no foreign matter has been confirmed at all points, and the X mark indicates that foreign matter has been confirmed. 29 201036715 Table 8 Clean roller potential (V) Transfer roller potential ( V) Group cleaning roller attached foreign matter transfer roller Residual foreign matter (after wiping) 10//m 1 μτη 1 2 3 4 5 1 2 3 4 5 Example 18 -316 ~ -284 -644 ~ -621 〇〇〇〇 〇〇〇〇〇〇 No Example 18 (-500V) -774 ~ -751 -1113 ~ -1095 〇〇〇〇〇〇〇〇〇〇 No Example 19 -162 ~ -139 -512 ~ -488 〇〇〇〇〇〇〇〇〇〇 No Example 20 -302 ~ -280 -598 ~ -577 〇〇〇〇〇〇〇〇〇〇 No Comparative Example 10 -338 ~ -309 -48~ -41 〇〇XXX 〇〇XXX Is there a comparison example 11 -306 ~ -286 氺-2000 +9000 〇〇〇〇〇〇〇XXX There are Table 9 Clean Roller Potential (V) Transfer Roller Potential (V) Group Clean Roller Attached Foreign Matter Transfer Roller Residual Foreign Matter (after wiping) lO^m 1 μτη 1 2 3 4 5 1 2 3 4 5 Example 21 +333 ~ +356 +683 ~ +696 〇〇〇〇〇〇〇〇〇〇 No Example 22 +348 ~ +366 +654 ~ +669 〇〇〇〇〇 〇〇〇〇〇 No Example 22 (+500V) +827 ~ +841 +1129 ~ +1143 〇〇〇〇〇〇〇〇〇〇 No Comparative Example 12 +272 ~ +294 -39~ -34 〇 〇XXX 〇〇XXX There is no comparison Β+348 ～ +362 -2000~ +9000 〇〇〇〇〇〇〇XXX There are 30 201036715 In the opposite phase of the clean roller ii, the charging roller 5 i is charged voltage In the embodiment in which the absolute value of the charging voltage of the transfer roller 51 is greater than the absolute value of the charged current of the H wheel 11 , the foreign matter adsorbed on the cleaning roller ii in all groups is transferred to the transfer. The roller 51' continues to play a cleansing effect. On the other hand, in the charged electric dust of the transfer roller 51 with respect to the charging voltage of the cleaning roller 11, even if it is the same polarity, the absolute value of the charging voltage of the transfer roller 小于 is smaller than the absolute value of the charging voltage of the cleaning roller 丨丨. In Comparative Example 1 or the charging of the phase cleaning roller u, in the comparative example 12 in which the charging voltage of the transfer roller 51 was not (10), the foreign matter could not be transferred from the cleaning roller 11 to the transfer roller 51. In the first and third embodiments, the conventional adhesive roller is used for the transfer roller 5 as described in the prior art, and the foreign matter that cannot be transferred is used. One example is for the overall configuration of the clean system having the aforementioned clean section. As shown in FIG. 11 , the clean system 61 includes a clean portion 62 that removes foreign matter (conductor or dielectric) adhering to the surface S1 of the cleaned material S by electrostatic force, and transports the cleaned material toward the clean portion 62. The loading unit 63 of the s and the material handling unit Μ after the material is discharged from the material unit 62. The loading unit 63 is connected to the rollers 63Α and 63Β, and the conveying belt (4) is wound, and the conveying belt 63C is conveyed toward the cleaning unit 62. The cleaned material on the s. 64 is a pair of rollers 64A and 64B wound with a transport belt 6' to transport the cleaned material s discharged from the clean portion 62 to the transport 64C in a direction away from the clean portion 62. 31, 201036715 The clean portion 62 has one side The outer peripheral surface is contacted with the surface of the material to be cleaned s. - the side is rotated - the cleaning roller 11A, HB, the cleaning roller 11A for the cleaning rollers 11A, 11B, and the outer circumference of the transfer roller. Rotate on the side of the contact. X·, the opposite side of the cleaned material (below) also corresponds to the upper side of the clean roller 丨丨a, 丨丨Β is equipped with a pair of clean rollers ua, ub, to clamp the material s and clean Between the rollers 11A to 11B', the cleaned material s is moved to the carry-out portion side.

The cleaning rollers UA, UB are also provided with transfer rollers 72A and 72B and charging control rollers 71A and 71B. The drive belt 73 is conveyed to the clean roller cleaning rollers 11A, 11B. The rotation force of the rattan moving roller 74 is transmitted through the shaft portions of the 11A' and 11B', and is rotated by the first embodiment. As shown in Fig. 12 (4), the cleaning unit u used in the cleaning system of the present invention is cleaned. The surface S1 of the material s is in contact with the surface of the cleaning roller ni at the same time - the side is rotated - the side is moved relative to the cleaned material s, and the electrostatic roller is used to remove the dust adhering to the surface si of the cleaned material s by the cleaning roller Hi. Foreign matter (conductor or dielectric is omitted). - the cleaning wheel 1 ί 1 is provided with an electric charge on the surface to adsorb the foreign matter attached to the surface S1 of the cleaned material S, and utilizes the surface of the roller (outer peripheral surface) of the cleaning roller m Chargeability to adsorb foreign matter. The cleaning roller (1) is rotatably held by an insulating member (not shown), and is provided with a charging control roller that rotates while contacting the surface (outer peripheral surface) of the cleaning roller iu on the side opposite to the cleaning material s. 121 and the transfer roller 13 constitute a cleaning unit U. The members (not shown) of the two roller i 2 J edges are kept rotatable. 13 1 also has the absolute 32 201036715 electrified control roller 121 ' can be used to stabilize the outer surface (outer layer) of the clean roller 〗 带有 with the electrostatic charge to adsorb the foreign matter attached to the surface S1 of the cleaned material s By. Further, the transfer roller 131 stabilizes the outer peripheral surface (outer layer portion) of the transfer roller 131 with a charge for adsorbing foreign matter adhering to the surface of the clean roller 1 by electrostatic force. The transfer roller 131 rotates in conjunction with the cleaning roller lu, and a potential difference is generated between the two rollers 1 3 1 and 111 depending on the surface characteristics (e.g., the charging sequence) of the respective rollers i 3 ''. Thereby, by the peeling contact of the cleaning roller 111 and the rotation of the transfer roller 131, the transfer roller 131 generates a potential difference depending on the surface characteristics (for example, a charging sequence) of the cleaning roller m, and is used to utilize the electrostatic force. To adsorb the charge of foreign matter attached to the surface of the clean roller lu. Next, the cleaning roller i i i , the charging control roller 121, and the transfer roller 13 1 will be described separately. (clean roller 111)

The room and the net roller 1 1 1 are the wrong ones, and the mandrel LL Ο is provided, and the mandrel (mandrel) 11 la having conductivity is provided, and the circle provided on the outer side of the mandrel 111 a is free of a round inner layer. a thin portion 11bb and a thin circular outer layer portion 111c (for example, a thick order von 30 or so) formed on the outer side of the inner layer portion 11 lb and having a material having two more impedances than the inner layer Δ D llb The material used to form such a clean roll-Γ 'f ^ ^ ^ 1 ! wheel 111 outer layer portion 111C is the same as the case of the description of the spring net roller 11, which can be attached with an electrostatic force. In the case of the cleaned material V, the static cleaning tool is used. The thickness of the net cleaning roller 111 other than the dust on the surface S1, and the thickness of η lc are based on the same reason as the case of the above-mentioned cleaning 33 201036715 roller 11 It is also possible to use a mandrel composed of a conductive material or a synthetic resin composite material instead of the mandrel 丨丨丨a for 2 to 5 〇〇 in m (more preferably 5 50 # m). The material used for the outer layer portion c of the cleaning roller 111 is also the same as that of the cleaning roller 11 described above. The inner layer portion 1b of the net roller 111 is also the same as the above-described cleaning roller 11. (The charging control roller 12 1) The charging control roller 1 2 1 is provided with a conductive mandrel (mandrel) 1 2 1 a a cylindrical inner layer portion 1 2 1 b provided outside the mandrel 1 2 1 a, and an outer layer portion 12丨 provided on the outer side of the inner layer portion 1 2 1 b, and a volume resistance of the outer layer portion 1 2 1 c The rate is set to be higher than the volume resistivity of the inner layer portion 12ib. The mandrel 121a, the inner layer portion 121b, and the outer layer portion 121c of the charging control roller 121 may be respectively subjected to a potential difference depending on the surface characteristics of the cleaning roller 11, respectively. In addition, as shown in FIG. 12(b), the cleaning unit u, ▼ the electric control roller 1 21 ' may also be provided with a cylindrical outer layer portion 121c directly on the outer side of the mandrel 12 1 a'. The first external power source 141 is connected to the mandrel 12a, 121a of the charging control roller 121, 121, and the voltage can be applied to the charging control roller 12 by the first external power source ι 41, the core 12 la, 121a, by which, in order to use electrostatic force to adsorb and attach to be cleaned The foreign matter on the surface S1 of the material S can be arbitrarily changed to the electric charge (the size of the symbol or the electric charge) of the cleaning roller 111. In addition, the charging control roller 121 can utilize the cleaning roller U1. The electrostatic force is applied to adsorb the electric charge attached to the foreign matter on the surface S1 of the cleaned material S. 201036715 In the case of FIG. 12 (&), the core shaft of the control roller is charged. The potential is formed as a reference (for example, the ground potential is 〇v). a /, the cleaning roller 111 that is rotated by the electric control roller 121, as in the case of the description of the cleaning roller 11, is charged by contact with the charging control roller 121, and is charged with the cleaning roller 111. Between the control rollers 121, a potential difference is generated according to the charging sequence depending on the surface characteristics. (Transfer Roller 131) The transfer roller 131 is provided with a conductive mandrel (mandrel) 131 & a cylindrical inner layer portion mb provided outside the mandrel 131a, and an outer side portion of the inner layer portion 131b. The outer layer portion 131c is configured to have an electric charge on the surface of the roller that adsorbs foreign matter adhering to the surface of the clean roller by electrostatic force. The outer layer portion i 3 i c of the transfer roller i 3 i has a higher volume resistivity than the inner layer portion 131b. However, as shown in Fig. 12 (b), the transfer roller 131 may have a configuration in which the cylindrical outer layer portion 131c (elastic layer portion) is directly provided to the mandrel 13 la'. Further, in the material of the transfer roller 131 and the outer layer portion 131c, it is preferable that the contact with the rotation of the cleaning roller 111 is selected in a range that does not impair the stable adsorption property, and the cleaning roller is used. The potential difference generated by the difference in surface characteristics between the crucible and the transfer roller 丨3 i is as large as possible. The transfer roller 131 is set such that when the applied voltage generated by the first external power source 141 provided to the core shaft 121a of the charging control roller 121 is, for example, ον, it is generated in the cleaning roller by the interlocking rotation. The charged electric magic has the same polarity, and the absolute value of the charged voltage generated in the transfer roller 131 is greater than the absolute value of the charged voltage generated in the clean roller 11 1 . Therefore, if the foreign matter adsorbed on the clean roller 丨n by electrostatic force is contacted with the transfer roller 131 by the rotation of the cleaning roller iu at 35 201036715, the shell 4 is depending on the surface between the transfer roller m and the cleaning roller m. The difference in characteristics causes a potential difference, so that the foreign matter is removed from the outer peripheral surface of the cleaning roller iu t and transferred (moved) to the outer peripheral surface of the transfer roller 131. Thereby, the foreign matter on the surface of the cleaning roller (1) is continuously transferred to the transfer roller 131 side, and the cleaning roller U1 can be in a state of being cleaned at any time. Therefore, the cleaning roller #(1) can be continued for a long period of time. Perform the adsorption of foreign matter. Therefore, it is not necessary to periodically remove the clean roller and the foreign matter on the outer peripheral surface or replace the maintenance work of the cleaning roller 111 to improve the maintainability. Further, in the above-described cleaning system, when the applied voltage of the first external power source 141 is opposite to the charging voltage of the transfer roller 131 in the above case and the absolute value of the charging voltage is large, the transfer roller 131 can be changed. The strip polarity is reversed to weaken the adsorption force of the transfer roller 131. Therefore, in addition to the cleaning of the cleaning roller m, the first external power source 141 applies a voltage having a reverse sign to the surface of the transfer roller 131 at the time of the transfer operation of the transfer roller 131, and a voltage having a large absolute value is applied to the charging. The roller 121' is controlled to thereby facilitate the removal of foreign matter adhering to the transfer roller 131. Therefore, in the above unit, for example, when the potential difference generated by the rotation of the charging control roller 121 and the cleaning roller 1 1 1 is 3 〇〇 v and the charging control roller 121 presents the positive side charging property to the cleaning roller ni, When the applied voltage generated by the first external power source 141 provided to the charging control roller 121 is 0 V, the cleaning roller i is _3 〇〇 v. Further, in the case where the potential difference generated by the rotation of the cleaning roller 111 and the transfer roller 131 is 300 V and the cleaning roller 1 1 1 presents the positive side of the transfer roller 13 i, the transfer roller 13 1 - 6 0 0 V. At this time, the charged foreign matter on the positive side of the cleaning roller 1 11 36 201036715 is adsorbed to the cleaning roller 111 by the electrostatic force, and then transferred from the cleaning roller 111 to the ru Printing roller 1 3 i. On the other hand, when the applied voltage generated by the external source β φ, S 1 /1 1 £/ > 1 external source 141 is changed from 0 V to +900 V, for example, only Pan, - Fen 铋 1 , 〆 The leaf/tire roller 111 series +600V, the transfer roller 131 series + 300V, and the polarity of the belt of the [73⁄4 to the "Senco P" wheel 131 is changed from the negative side to the positive side. As a result, the transfer roller loses the adsorption force against the foreign matter which is adsorbed on the positive side 揲啻 MH & side of the transfer roller 13 by the electrostatic force on the wheel 1 31, and can be easily smashed. The transfer roller 131 removes foreign matter. Further, the method of removing the foreign matter from the transfer roller 131, preferably by using, for example, wiping, rinsing, rubber scraping, scraping, jetting, and other appropriate methods. For example, as shown in FIG. 13 , the cleaning roller 131 is rotated in the phase of the interlocking rotation direction and the opposite direction, and is used for scraping off and attaching to the P roller 131 by electrostatic force. The cleaning brush i5i of the foreign matter on the surface is set to be rotatable, and the metal roller 15 made of, for example, SUS3G4 can be rotated to the cleaning brush 151 to rotate the ancient a#-axis (5). The cleaning brush 151 is attached to the mandrel 151a with a synthetic resin wheel 152 m + 乇 卩 151b (brush portion). A second external electric power is connected to the metal rolling 152 to form a potential difference between the transfer roller and the transfer roller. Also ^ ^ 8# ^ ^ ^ , by the brother an external power supply 153 will be raining with the transfer roller 131 when it is 4 net, the charge is the same as the citrus

The potential is applied to the metal roller j 52 JU.乂 is generated between the transfer roller (3) and the surface of the metal roller 152, and the surface of the roller (4) is cleaned to the sheet 14::= the scraping portion and the metal are attached to the surface of the metal roller 152 to clean the blade 146 to the foreign matter. The clean-to-sheet 146 series 37 201036715 is made of synthetic resin (for example, heat-hardened, and is maintained by the elasticity of insulation, and the maintenance of the clean heart (not shown). It can be held by an insulator. A suction port 145 is provided in the vicinity of the surface of the divergent roller 152, and a vacuum suction mechanism can be used. A clean brake HW field is disposed in the vicinity of the suction port 145. From the cleansing to the sheet 146, the suction port 145 can be attracted to the metal '.I. Thus, the foreign matter of the thorn can be effectively removed. Here, the gas vacuum mechanism is used as a negative grinding machine. Attracting the foreign matter pump. The foreign matter can be 'for example, using a well-known gas vacuum according to the above-mentioned single 兀' by the clean roller (1) and the foreign matter attached to the cleaned material S as a clean image, the surface of the clean roller (1) (outer part u&Quot; is adsorbed to S1 to remove. Surface (bu layer. p 1Uc)' and from the surface of the cleaned material S, then if the electrostatic force is adsorbed on the clean roller u = roller (1) rotation and the transfer roller is different: The potential difference is fixed between the transfer roller 131 and the surface of the cleaning roller 111, and the printing roller is transferred from the cleaning roller 111 to be transferred (moved) to the surface, and the foreign matter adhering to the surface of the transfer roller 131 is cleaned. = from the transfer..."scrape, and the foreign object adsorbed to the metal roller 152 to the surface of the metal roller 152 is removed by the cleaning 46, except if it is set by the cleaning blade 146 The suction σ 145 of the scraping gas vacuum mechanism is sucked and removed on the surface of the metal wheel 152, so that the transfer roller 131, the cleaning brush, the cleaning brush (5), and the foreign matter on the surface of the gold &% U1, and The transfer roller (3) 1 is continuously removed from the cleaning roller and is not contaminated by the surrounding area of the I & or the metal roller 152. Therefore, since it is not necessary to periodically remove the surface of the roller 13 1 Clean's maintenance on the roller 111 or transfer Clean or replace the outer "outer co transferring roller wheel 111 or 131 m, and had no danger of contamination to the transferring roller, so due to the foreign matter 31 surrounding this by having the excellent maintainability. Ο

G Here, the attraction of the gas vacuum mechanism can be set to be the same as the clean roller: 仃'. In particular, when the first outer A and the hour are driven, the charge on the clean surface of the transfer roller 131 is opposite (four), and the value of the wire is higher than that of the 131 electric control roller U1. The voltage is applied to the pulley (2), and the electric waste is applied to the charging control roller to efficiently remove the foreign matter by the adsorption force of the (four) roller 131 on the foreign matter. At this time, whether it is a clean roll: when the ηι is clean, the electric charge of the machine is judged by the movement of the material, and the upper and lower displacement of the mandrel 111a of the clean roller (1) can also be used. '(4) It is judged by the passage of the cleansing material s. Further, it is also possible to provide a structure for supporting the cleaning to a 146 to advance and retreat. When the hollow mechanism is driven, the surface of the roller 152 is applied to the surface of the roller 152, and the end scraping portion is in contact with the metal. In the above-described case, since the cleaning roller iu has a potential difference of +300 V to the transfer roller 131, the cleaning roller (1) exhibits a positive side chargeable foreign matter, and once transferred to the transfer roller ΐ3, it does not Re-transferred to the cleaning roller 111. 39 201036715 Further, the potential difference generated by the difference in the surface characteristics between the above-mentioned rollers m and ui is (4) the potential difference is generated based on the charging control roller 121 (for example, the ground voltage 〇v, etc.), so that it is stable at a certain peripheral rate. Present a certain value. As shown in FIG. 14, by arranging two sets of cleaning units and making the signs of the cleaning rollers 11 i and 丨丨i A of the respective units opposite, the negatively-charged cleaning roller 111 can remove the belt attached to the cleaned material s. Electrical foreign matter, remove the negatively charged foreign matter with a positively charged clean roller 丨丨 1A. In this way, the range of foreign matter that can be removed from the cleaned #S can be enlarged by the cleaning units Ul, U2 (cleaning roller lu, uiA). At this time, the cleaning control unit 12, 121A, the transfer roller 31, 131A, the second external power source 153, 153A, the suction ports (4), 145A of the vacuum mechanism, and the cleaning blade 146 are also provided in the cleaning units in, u2. 146A, clean brush l5i, i5ia, and metal rollers 1 52, 1 52A. As shown in Fig. 15, the guide roller 154 may be provided to hold the cleaned material s, and the cleaned material S' may be supported from the upper and lower sides at a position where the clean roller lu and the guide roller 154 are in contact with each other for good stability. The foreign matter is removed in the state. At this time, the charging control roller 121 and the first external power source 141 are placed on the guide roller 154' to be charged to increase the potential difference between the guide m 154 and the cleaning roller 111, thereby further enhancing the action on the cleaned material. The electric field strength of s to improve cleanliness. The electric field strength is the highest at the position where the W# S system contacts the cleaning roller Π1 and the guide roller 154. Therefore, by providing the charging control roller 121" to the guiding roller 154, the electric field can be effectively cleaned according to the applied electric field. The charged foreign matter on # s is adsorbed to the cleaning roller 201036715 111 and removed. As shown in Fig. 16, the wheel 154' can be taken by using the cleaning roller η' to clean the surface with the cleaning unit U3 while performing the sub-reading S surface. At this time, the charging control roller (2), the turning wave wheel 131, 131Β, the second external power source 153, 153β, the suction mechanism D 145, 145β and the cleaning blade 46, the ΐ 46 Β, the cleaning brush 151, 151Β, and the metal rollers 152, 152β. Ο In the case shown in Figs. 15 and 16, as in the case shown in Fig. 14, it is of course possible to arrange two groups. Next, the foreign matter removal performance for the cleaning roller ln (Method) In the cleaning system shown in Fig. 17, the charging control roller #121, the cleaning roller 35, and the transfer roller 131 which are held by an insulating member (not shown) are brought into contact with each other, and Make It is rotated in parallel at a peripheral speed of 5 m/min, and an arbitrary voltage (ground 〇V, first external power supply ±900 V) is applied to the mandrel 121a of the charging control roller (2) by the second external power source 141. The first external power source 141 It is set to be 〇v when it is passed through the cleaned material, that is, when it is cleaned, and any voltage is applied in other cases (the situation in Table 14 is the first external power supply + 9〇〇V, Table 15) The first external power source is -900 V. The second external power source 153 is connected to the metal roller 152 provided to the transfer roller i3i through the cleaning brush 151. The first external power source i 53 is applied to the transfer roller at any time. The potential (four) symbol and the absolute value are 3 GG V. The cleaning brush 151 is arranged to rotate the transfer roller 131 in the opposite direction to the interlocking rotation direction, and the metal roller 152 is arranged to rotate the cleaning brush 151 in the interlocking rotation direction. 41 201036715 Gas vacuum mechanism The suction port 145 is disposed to have a gap of 2 mm from the surface of the metal roller 152 (outer peripheral surface), and the cleaning blade 146 is disposed on the surface of the roller directly below the open end of the suction port 145. a position of 5 mm in the rear. For this, a sample of a foreign material (polystyrene resin or acrylic resin having an average diameter of l#m, 1 μm) was dispersed on the cleaned material S (PET film: 15 cm x 15 cm x 1 cm). To evaluate the foreign matter removal performance of the clean roller 。. In addition, the evaluation test was carried out in groups of 5 〇 film for the group of 5, and the confirmation of the foreign matter attached to the clean roller after the cleaning was completed. And confirmation of the foreign matter attached to the transfer roller 13 1 . The surface potentials of the clean cleaning roller m, the charging control roller η, and the transfer roller 133 were measured using surface potentiometers 161, 162, and 163 (manufactured by TREK Corporation 341B). (Explanation of Examples and Comparative Examples) A foreign matter removal test will be performed! The structures of the rollers of Examples 23 to 28 and Comparative Examples 14 and 15 are shown in Tables 1 and 5 below, and the compositions of the inner and outer layers are shown in Table 3. The manufacturing methods of the rollers of the examples and the comparative examples shown in Table 1 and " are as follows. The inner layer portion (thickness: 6 mm/width (dimension in the direction in which the anger axis extends) is 24 mm) is formed on a mandrel (material: made of aluminum alloy, size: diameter: 028 mm x length: 250 mm), and the outer layer portion is further provided with the outer layer portion (thickness). 3〇"heart width 240mm) is formed on the outer side of the inner layer portion. Thereby, the elastic layer has an outer diameter of 4 40 mm and a width of 240 mm. However, for the roller having no inner layer portion (the transfer roller of the embodiments 25 and 28), the outer layer portion (thickness 3 〇 # m / width 240 mm) was directly formed on the same mandrel as described above. 42 201036715 Table ίο Electric control roller Clean roller Transfer roller Inner layer Outer roller hardness JIS-A 〇 Inner layer outer roller hardness JIS-A 〇 Inner layer outer roller hardness JIS-A (.) Detail 23 a D 30 a A 30 a G 32 Example 24 a E 29 a B 30 a G 32 Pour Example 25 a D 30 a A 30 No G - Example 14 a D 30 a A 30 a G 32 Table 11 Charge Control Roller Clean Roller Transfer Roller Inner Layer Outer Roller Hardness nS-A(°) Inner layer outer roller hardness JIS-A(°) Inner layer outer roller hardness JIS-A(°) Detail 26 a G 32 a A 30 a D 30 a G 32 a B 30 a E 29 Hybrid 28 a G 32 a A 30 No D —— _ Example 15 a G 32 a A 30 a D 30 ❹ (Test results) Table 12 is a test in the case where the foreign matter is an acrylic resin and the foreign matter in Table 13 is a polystyrene resin. result. Here, in the table, the 〇X mark is a digital microscope (the lens magnification of the digital microscope VHX-200 KEYENCE is 450 times), and 3 points in the range of 650// mx 500 m are confirmed, and the mark is indicated at all points by the 〇 mark. When the foreign matter is not confirmed, the X mark indicates that the foreign object has been confirmed. 43 201036715 Table 12

Table 13

The first external power source 141 is connected to the anger axis 121 of the charging control roller 121 and the embodiments 23 to 28 for controlling the applied voltage of the first external power source 141, regardless of the accumulation of foreign matter in any of the groups and the failure of the inter-material passage is confirmed. The cleanliness is reduced. On the other hand, in Comparative Examples 1 and 2' where the grounding was connected to the charging control roller 121, foreign matter accumulated in the transfer roller 131 was accumulated, and it was confirmed that the cleanliness caused by the passage of time was lowered. Therefore, by the voltage control of the first external power source 141, since the cleaning performance of the clean roll % 111 and the transfer performance of the transfer roller 131 can be maintained, and no foreign matter is accumulated, it is not necessary to perform regular removal (cleaning) adhesion to the cleaning. 44 201036715 The net roller "11" or the foreign matter on the roller surface of the transfer roller 131, or the replacement work of the cleaning roller "1 or the transfer roller 9ι31 to which the foreign matter is attached is periodically replaced. m can also confirm that if the voltage is applied by the first external power source i 4 , the charging control roller 121 is applied with the opposite sign of the electric charge on the surface of the transfer roller 6131 when cleaned, and the absolute value is larger. The voltage is thereby made such that the transfer roller has the opposite polarity to reduce the adsorption force of the foreign matter adsorbed on the transfer roller, so that the foreign matter can be easily removed from the transfer roller 丨3 1 . ,

A description of the overall configuration of a clean system having the aforementioned clean room. In the case of the cleaning system 171, the cleansing system 171 is provided with a cleaned portion 172 that removes foreign matter (conductor or dielectric) attached to the surface S1 of the cleaned material S by electrostatic force, and is transported toward the clean portion 172. The moving portion 173 of the cleaned material 3 and the cleaned material s after being cleaned from the clean portion 172

174 〇1 The loading unit 173 is connected to the pair of rollers 173A and mB, and the transport belt 173C is wound, and the cleaned material & transporting unit 174 on the transport belt mc is transported toward the clean unit 172, and is attached to the pair of rollers 174A and 174B. The conveyance belt 174C carries the cleaned material s from the clean 172 discharge belt 174C in a direction away from the clean section 172. The cleansing unit 172 is provided with a pair of clean rollers lu that rotate while the surface is in contact with the surface si (upper surface) of the cleaned material $, and the surface of each of the clean rollers 'the charging control roller 121 and the transfer roller 131 is in contact with each other. Rotate on one side. Further, a pair of cleaning rollers ιη are disposed on the reverse side (below) of the cleaned material s, and the cleaning roller 111 is placed on the upper side of the 2010 20101515 clean roller 111 to hold the cleaned material s between the clean and the miscellaneous 111 and to be cleaned. s moves to the side of the carry-out unit 174. The cleaning roller 1U is also provided with a transfer roller i3i and a charging control roller 121. The driving force of the driving roller 176 is transmitted to the shaft portion of the cleaning roller 1U through the driving belt 175 to rotationally drive the cleaning roller n to the core shaft of each of the charging control rollers 121, and the first external power source U is connected to the power source 141'. Each of the transfer rollers 131 passes through the cleaning brush 151 and has a metal roller 152. The metal roller 152 is provided with a suction port 145 and a cleaning blade 146 of a gas vacuum pump 178 (3⁄4 body vacuum mechanism). Each of the suction ports is connected to the gas vacuum pump 178 through a dust collector (filter) 177. In the above embodiment, the cleaning brush 151 is provided to be rotatable to the transfer roller 131, and the cleaning brush 151 is provided with the metal roller 152, and a cleaning blade #i46 or a gas vacuum mechanism is disposed near the surface of the metal roller 152. The suction port 145 is not limited to this configuration, and the cleaning blade or the metal roller may be omitted, and the suction port of the cleaning blade or the gas vacuum mechanism may be disposed near the surface of the transfer roller. Further, in the embodiment, the charging roller 12i is provided to the cleaning roller 不过. However, as shown in Fig. 19, the transfer roller 131 may be provided. Next, a test for the foreign matter removal performance of the clean roller crucible will be described. (Method) - In the cleaning system shown in Fig. 19, the member having the insulating property (the cleaning roller 1U, the charging control roller 121, and the transfer roller j 1 which are not held) are touched and brought to 5 m/ The peripheral speed of min is rotated in conjunction with each other, and the external power source 141 applies a voltage (grounding ον) of any 46 201036715 to the mandrel 121 & of the charging control roller 121. The second external power source 153 is connected to the transfer roller through the cleaning brush 151 The metal roller 152 provided in the first external power source 153 is provided with the same sign as the transfer roller potential at the time of cleaning, and the absolute value is lkV'. The opposite sign and the absolute value are lkv<) The cleaning brush 151 is disposed to rotate the transfer roller 131 in the opposite direction to the interlocking rotation direction, and the metal roller 152 is disposed to rotate the cleaning brush 151 in the interlocking rotation direction. The suction port 145 of the gas vacuum mechanism is disposed to have a gap of 2 mm from the surface (outer peripheral surface) of the metal roller 152, and the cleaning blade 146 is disposed on the surface of the roller directly below the open end of the suction port 145 to calculate the traveling direction of the roller. 5mm position at the rear. For this, use a cleaned material s (a glass epoxy substrate with copper foil: 12 〇 to x ^ 2 Cm x 2 mm) with foreign matter (polystyrene resin or acrylic acid with an average diameter of 2 claws, i 〇 #m) A sample of the resin to evaluate the foreign matter removal performance of the clean roller (1). Here, the 〇X mark in the table is a digital microscope (the lens magnification of the digital microscope VHX·200 keyence company is 45〇). 3 points in the range of 650^x50^^ are confirmed, and the mark is indicated at all points. If the foreign matter is not confirmed, the \ sign indicates that the foreign matter has been confirmed. In addition, the evaluation test consisted of 5 groups of 5 glass epoxy substrates as a group. Further, the surface potential of the material roller (1) in the cleanness was measured using a surface potentiometer (TREK Corporation 51 M〇del 34ib). Furthermore, the copper box surface of the cleaned material is connected to the ground to measure the flow value of the copper pig surface when it is clean. Further, the structures of the rollers of Examples 29 to 32 and Comparative Examples 16 to 19, 47,367,315, are shown in Table 14. The _ and '' of the inner and outer layers are shown in Table 3. As shown in Fig. 13, the comparative examples 16 to 19 are provided with a register. The electric control roller 121 is a roller arrangement in which the cleaning roller 111 is in contact with the surface while being in contact with the surface. (Description of Examples and Comparative Examples)

The inner layer (thickness: 6 mm/width (the size of the mandrel extension in the direction of the extension of the ancient A) is 240 mm) is formed on this axis (material: made of alloy, size: straight "28-year-old product 250") Further, the outer layer portion (thickness 3 - width 240 mm) is formed on the outer side of the inner layer portion. Thereby, the elastic layer has a diameter of 40 mm and a width of 240 mm. However, the roller/charged control roller having no inner layer portion B is 'The thickness of the outer layer (thickness 3G / / m / width 24 〇 is formed in the same mandrel as before). Table 14

As can be seen from the results of Table 14, in Examples 29 to 32 in which the charging roller 12 1 was provided to the transfer roller 13 1 , foreign matter was removed in any of the samples, and no cleanliness caused by the passage of time occurred. Reduced, and can obtain 48 201036715 long-term stable clean performance. On the other hand, in Comparative Examples 16 to 19 in which the π electric control roller 121 was provided for the cleaning roller, the deterioration of the cleanliness caused by the passage of time was confirmed. Ο ❹ Also, it is confirmed that by providing the charging control roller 12 to the transfer roller 13 可, the current generated from the second external power source 153 can be prevented from flowing into the cleaning roller 111 to reduce the current flowing through the cleaned material s even if The clean material S is a conductive material, etc., and can also prevent electrical damage from being cleaned. That is, in the system in which the cleaning roller 111 is placed with the charging control roller 121 that is in surface contact with the cleaning roller, the current generated from the second external power source 153 flows into the cleaning roller lu, and is In the case of the clean material 3 series of conductive materials, etc., although there is damage to the cleaned material s, the guide roller 121 is guided to the transfer roller 131 instead of the cleaning roller.

It is possible to prevent the current generated from the second external f c, a 4 A p power source 153 from entering the cleaning roller i i " to prevent electrical damage to the cleaned material s. Fig. 20 shows the overall configuration of the clean system having the clean portion described above. W clothing is not in the (first embodiment) # , 3⁄4- Figure 21 (4) does not 'clean unit u used in the clean system, the surface of the wheel m (outer peripheral surface) is in contact with the surface of the cleaned material, at the same time - While rotating - while moving relative to each other, the surface is removed by electrostatic force to 211 on the surface si of the material to be cleaned (the conductor or dielectric 'not shown). Foreign matter such as angstroms, the clean roller, and the electric charge of the foreign matter attached to the surface of the cleaned material s by the foreign matter (4) of the surface of the cleaned material which can be peeled off by the surface of the cleaned material, and has a π, etc. The elastic mandrel (core 49 201036715 rod) 21 la, the cylindrical inner layer portion mb provided outside the mandrel 211a, and the outer side of the inner layer portion 211b and composed of a higher resistance than the inner layer portion 2Ub The thin cylindrical outer layer portion 2Uc (for example, having a thickness of about 3 Å/m) has a two-layer structure. Further, a first external power source 21 is connected to the mandrel 2Ua of the cleaning roller 211. The cleaning roller 211' that utilizes the charging property of the surface of the roller and adsorbs foreign matter by electrostatic force is provided with a transfer roller 23 that rotates while being in contact with the surface of the cleaning roller 21, and the transfer roller 231 is attached to the surface. The electrostatic charge is used to adsorb the charge of the foreign matter attached to the surface of the cleaning roller 211. Foreign matter adhering to the cleaning roller 211 by electrostatic force is transferred (moved) to the side of the transfer roller 231. At the same time, by changing the applied voltage of the first external power source 221 connected to the cleaning roller 211, the transfer roller 23 can be arbitrarily changed to apply a charged voltage for adsorbing the foreign matter by an electrostatic force. The transfer roller 231 includes a conductive mandrel (mandrel) 231a, a cylindrical inner layer portion 2Mb provided outside the mandrel 231a, and an outer layer portion 231c provided on the outer side of the inner layer portion 231b. The volume resistivity of 231 高于 is higher than 23 lb of the inner layer. The cleaning roller 231 is rotatably disposed to rotate the cleaning roller 231 in a direction opposite to the interlocking rotation direction to scrape off the foreign matter adhering to the surface of the transfer roller 231 by electrostatic force, and the cleaning brush 243 can be rotated toward the cleaning brush 243. A metal roller 244 made of, for example, a stainless steel alloy (SUS3 04) is provided in a manner of rotating in the rotational direction. The cleaning brush 243 has a synthetic resin-made hair portion 243b (brush portion) on the core shaft 243a. The metal roller 244 is connected to the second external power source 245' as a mechanism for generating a potential difference between the transfer roller 231 and the transfer roller 231. That is, by the second external power source 245, a potential having the same sign as that of the surface of the transfer roller 50 201036715 23 can be applied to the metal roller 244 near the surface of the metal roller 244 during cleaning. The cleaning blade 241 which is in contact with the surface of the metal roller 244 at the front end scraping portion scrapes off the foreign matter adhering to the surface of the metal roller 244 by the cleaning blade 241. The cleaning blade 241 is formed of an elastomer made of a synthetic resin (for example, a thermosetting polyamine phthalate resin), and is held by an insulating holder (not shown). The holder of the cleaning blade 24l may also be disposed to be held by the insulator. Further, in the vicinity of the contact portion of the surface of the roller 231 near the surface of the metal roller 244 and the roller portion of the transfer roller 241 and the scraping portion of the cleaning blade 241, a gas vacuum mechanism for attracting foreign matter by using a negative pressure is attached to the population 2d. Since the cleaned sheet 24 is disposed in the vicinity of the sucking population 242, the foreign matter scraped off by the sheet 241 can be sucked and removed by the suction port 242. I effectively remove (4) the metal roller (4). Here, the mechanism may be any one that can attract foreign matter by using a negative pressure, and for example, a well-known gas vacuum pump can be used. In this way, in the case where the foreign metal is removed from the metal roller by the cleaning blade 241 U, the end scraping portion of the core is in contact with the suction port 242 of the gas vacuum mechanism (4), and is attached to the metal roller. = The structure of the wheel 44 to scrape foreign matter contaminates the surroundings. The foreign matter can be removed efficiently and is not "clean; the wheel 211 and the transfer roller 231 are not shown", and the transfer roller is smashed with the material of the roller (not linked to the clean roller 21 1). The two rollers, such as 211, are connected to each other, and the surface characteristics of the wheels 231 and 211 are different from each other 51 201036715 to generate a potential difference. By ^, ^ by the clean roller 211 and the transfer roller 231, the contact of the transfer roller is peeled off, 'Thank the m ^ & $ P wheel 23 1 on the surface of the roller to produce a different potential difference depending on the characteristics of the surface of the cleaning roller 2 11 (such as the charging sequence), with the use of the static fan ^W uses electric power to adsorb the charge of the foreign matter attached to the surface of the cleaning roller 211. The voltage can be finely applied to the mandrel 2 of the cleaning roller 2 ii by the first external Thunder 0 Λ, μ and β original 22 1 a 'For example, in connection with private, dream rabbit, swallowing., saving money on the clean roller 2 11 core shaft 2 11 a - external power supply 22 1 application of the thunder &&&& force voltage is ον Next, the polarity of the charged voltage generated by the transfer roller 231 by the interlocking % is the same When the voltage of the polarity is applied to the first external power source 221, the cleaning roller 211 can adsorb the object from the material to be cleaned S, and the transfer roller 23 1 can transfer the foreign matter adhering to the cleaning roller 2 1 1 . The foreign matter adsorbed on the transfer roller 231 is applied to the transfer roller 231 by the first external power source 221 to the mandrel 2Ua of the cleaning roller 211 and the rotation of the transfer roller 231 by the first external power source 221 when the applied voltage of the transfer roller 231 is 0V. The voltage of the opposite polarity of the charged voltage and greater than the absolute value of the charged voltage causes the transfer roller 231 to lose the adsorption force for adsorbing the foreign matter (the electrostatic force, therefore, the foreign matter is scraped off by the cleaning brush 243, and moved to The surface of the metal roller 244. Then, the foreign matter 'moved to the surface of the metal roller 244' will be scraped off by the cleaning blade 241, and then sucked and removed by the suction port 242 of the gas vacuum mechanism. 'Transfer used here The roller 231 has the same structure as the cleaning roller 211. However, as shown in FIG. 21(b), the transfer roller 231 may be provided to remove the inner layer portion and be outside the core shaft 23 la, (core rod). The side is directly provided with the structure of the cylindrical outer layer portion 23 lc'. In addition, the material of the outer layer portion is preferably selected as the charged voltage potential difference of the cleaning roller 2 ιι within a range that does not impair the electrostatic force of the stable suction 52 201036715. The thickness of the outer layer portion 21 lc of the cleaning roller 211 is preferably 2 to 500 " m (more preferably 5 to 50 from m) in the same manner as the cleaning roller u, 111. Instead of the mandrel 211 a, a mandrel composed of a conductive carbon material or a synthetic resin composite or the like is used. Outer layer. The material used in 卩2 11 c or the material used in the inner layer 2丨丨b is the same as the above-mentioned cleaning rollers U and 1U. The transfer roller 231 includes a conductive mandrel (mandrel) 231 & a cylindrical inner layer portion 2Mb provided outside the mandrel 231a; and an outer layer portion 231c provided on the outer side of the inner layer portion U1b, and is configured It is possible to have a charge on the surface of the roller for adsorbing foreign matter adhering to the surface of the cleaning roller 211 by electrostatic force. The volume resistivity of the outer layer portion 231e of the transfer roller 231 is higher than that of the inner layer portion 23b. It is set to have the same polarity as the voltage given to the first external power source 221 and has a large absolute value. At the same time, the transfer roller 231 can arbitrarily change the charging voltage of the foreign matter adhering to the surface of the cleaning roller 211 by the electrostatic force by the first external power source 221 connected to the mandrel 21 of the cleaning roller 211. As a result, the foreign matter adhering to the cleaning roller 211 by the electrostatic force is sequentially transferred (moved) to the transfer roller 231 side with the rotation. As a result, the difference 2 remains on the surface of the cleaning roller 211, and the foreign matter It does not return to the surface S1 of the 4th material s. Therefore, the cleaning roller 2ΐι can continuously perform the adsorption operation of the foreign matter for a long time. The rf is in contact with the foreign matter attached as the cleansing #S according to the above unit. Foreign matter such as dust is adsorbed to the surface of the wheel 2U (outer layer portion 211c), and from the surface of the cleaned material s 53 201036715 and then 'statically adsorbed on the clean roller 211 table + by the rotation of the cleaning roller 211 When the surface of the transfer roller 231 is connected to the right, it is transferred (moved) to the transfer 243 by the transfer wheel 211 of the potential roller (3) on the transfer roller 231 and the cleaning roller 2, and the transfer is performed. Transfer roller 231 The foreign matter on the surface is cleaned by the brush = 223: scraped 'and adsorbed to the metal roller 244. The attached surface is removed from the surface of the metal roller 244, and the cleaned scraper is 丨' to the sheet 241 to the suction of the mechanism... 2 is attracted to remove foreign matter, that is, through the gas vacuum material: Second, because the foreign matter does not remain on the surface of the clean roller 2", the foreign matter will not return to the long-term continuous operation of the clean pan ==rsi' 2" Metal roller 244 ^ ^ action. Also, cleaned to the sheet plus π 242 A Bp ', the object, through the gas vacuum mechanism suction due to the removal of Cl:, so the metal is removed Foreign matter is contaminated. Therefore, 'there is no need to fix the surface of the roller 231, the maintenance of the cleaning roller 211 or transfer, etc., 5, the cleaning roller 211 or the transfer roller 231 is contaminated.虞, there is almost no foreign matter around the transfer roller 231, so it is excellent in maintainability. It can be set at 2: The suction action of the ί space mechanism can be performed at any time, but it is also g*. 卩 Power supply 2U system is clean When the roller 211 is clean, the transfer roller When the H t transfer operation is carried out, the voltage of the transfer roller 231 is opposite to that of the transfer roller 231 and the voltage of the transfer roller 231 is higher than the voltage of the transfer roller 231. The cleaning roller 211 is disposed to drive the gas vacuum mechanism in addition to the cleaning of the cleaning roller 211. Here, the cleaning roller 211 refers to the section in which the cleaning roller 211 is in contact with the surface of the cleaned material while rotating while moving relatively. time. When the cleaning roller 2 is clean, it can be electrically or mechanically detected to determine the movement of the cleaned material, and the cleaned material can be detected by, for example, the up and down displacement of the mandrel 21 la of the cleaning roller 21 The passage of S is judged. Further, it is also possible to provide a structure in which the mi crucible 241 is supported to be retractable, so that the front end scraping portion of the cleaning blade 24 is brought into contact with the surface of the metal roller 244 only when the gas vacuum mechanism is driven. Next, an example of the relationship between the cleaning roller 2A and the transfer roller 23 1 in the above-described cleaning unit U丨 will be described. First, in the above-described cleaning unit, when the potential difference generated by the interlocking rotation of the transfer roller 23A and the cleaning roller 211 is 3〇〇v and the cleaning roller is positively charged to the transfer roller 231 (on the charged side) When the sequence is the positive side of the Q side, as shown in FIG. 22(a), when the applied voltage of the external power source 221 connected to the cleaning roller 211 is 〇v, the transfer roller 231 is _3〇〇v, clean. The roller 211 is 〇v. Further, as shown in Fig. 22 (b), when the applied voltage of the external power source 221 is set to -30 GV, the transfer roller 231 is _6, and the cleaning roller 2 ι is -300 V, and the positive side of the charged foreign matter is After being adsorbed to the cleaning roller 2 11, it is transferred and adsorbed to the transfer roller 23j. Then, as shown in FIG. 22(c), when the applied voltage of the external power source 221 is set to +600 V, the transfer roller 231 is +3 〇〇ν, and the cleaning roller 2 ι is +600 V, and the main positive side is charged. The foreign matter that is intended to leave the charging is turned to the positive side. 55 201036715 In this case, the foreign matter is removed from the transfer roller 231 by the cleaning brush 243, and then moved to the surface of the metal roller 244. The foreign matter moving to the surface of the metal roller 244 is in the vicinity of the suction port 242 of the gas vacuum mechanism, scraped off by the front end of the cleaning blade 241, and then sucked through the suction port 242 of the body vacuum mechanism, and the metal roller The 2 material roller is removed on the surface. Further, in the case where the potential difference generated by the interlocking rotation of the transfer roller 231 is 3 〇〇V and the cleaning roller 211 exhibits the charging property on the negative side of the transfer roller 231 (on the negative side of the charging sequence) In this case, as shown in the figure (), when the applied voltage of the external power source 22 1 connected to the cleaning roller 2 1 1 is 0 V, the transfer roller 231 is +300 V, and the clean roller is 0 V. ^, as shown in Fig. 22(e), if the applied voltage «the external power supply 221 is +3G0V, the transfer roller 231 is +6 qing, and the cleaning roller (1) is +300V, and the negative side is charged. After the foreign matter is adsorbed to the clean roller, it is transferred and adsorbed to the transfer roller 23 1 . < Then, as shown in Fig. 22 (f), when the electric dust applied to the external power source 221 is set to 600 V, the transfer roller 231 is -300 V, and the cleaning roller 211 is charged on the negative side. The foreign object is to turn off the I3 roller 23 1 that is charged to the negative side. In this state, the foreign matter is removed by the cleaning brush 243 and moved to the surface of the metal roller 244. The foreign matter moving to the surface of the metal roll is in the vicinity of the suction port 242 of the gas vacuum mechanism, scraped off by the end scraping portion of the cleaning blade #241, and then sucked through the suction port 242' of the gas vacuum mechanism from the metal roller. Remove the surface of the roller of 244. The above-mentioned electric potential generated by the difference in surface characteristics between the rollers 211 and 231 56 201036715 is generated by the electrification of the clean roller 211 as a reference, and thus stably exhibits a certain value at the peripheral velocity of the crucible. In the case of Figs. 22(a) to (c), since the cleaning roller 211 has a positive side to the transfer roller 231 and is at a potential of +3_, once the P is transferred to the transfer roller 23 1 "presents the positive side" The charged foreign matter will not be transferred to the cleaning roller 2!! Similarly, in the case of FIGS. 22(4) to (7), since the cleaning roller 2U has a negative side to the transfer roller 231 and is a potential of -300 V, the charging property on the negative side of the transfer roller 23 ι is transferred. The foreign matter 'will not be transferred to the cleaning roller 21 again. In this case, the reference voltage is applied to the first external power source 221 of the mandrel 211a of the cleaning roller 211. Next, the test results regarding the performance of the cleaning roller 211 will be described. (Method) In the cleaning system shown in Fig. 23, the transfer roller 231 and the cleaning roller 211 held by an insulating member (not shown) are brought into contact with each other and rotated at a peripheral speed of "5 m/min". The cleaning roller 211 (the mandrel 21) is given an arbitrary voltage (±3〇〇v, ±6〇()v) by the first external power source 221. The first external power source 221 is disposed such that one of ±300V is applied when the cleaning material S passes (that is, when it is clean), and in other cases, it is set to apply a polarity opposite to the potential applied by the precursor and is 600V of soil. Voltage. The first external power source 245 is applied at the same value as the voltage applied when the first external power source 221 passes through the cleaned material s. The cleaning brush 243 is provided to rotate the transfer roller 23 1 in a direction opposite to the direction of the interlocking rotation. The metal roller 244 is provided to rotate in the direction in which the cleaning brush 243 rotates in conjunction. The suction port 242 of the gas vacuum mechanism is set to 57 201036715, and the gap between the surface of the roller of the metal roller 244 is set to be 2 mm, and the cleaning blade 2 41 is set to be the surface of the roller directly below the open end of the inlet 242. The position of the different metal roller 244 in the direction of travel 5 mm behind. For this, use a cleaned material s (pET film: (5) mx^cmxl〇〇#m) with a sample of foreign matter (polystyrene resin with an average diameter of 1Q#m or = dilute I tree &) to evaluate cleanliness (4) 2 η In addition, it is confirmed that the foreign matter adhered to the clean roller 2 is cleaned and adhered to the transfer roller 231 after the cleaning is completed. Confirmation of foreign matter. The surface potentials of the clean cleaning roller 2 i i and the transfer roller 23 ^ were measured using surface potentiometers 261 and 262 (M〇dei 34ιβ manufactured by Trek Corporation). (Description of Examples and Comparative Examples) The structures of the Kang Wheels of Examples 33 to 48 and Comparative Examples 2 and 21 which were subjected to the foreign matter removal test i are shown in Tables 15 and 16 below, and the composition of the inner layer 'the outer layer' It is shown in Table 3 above. The manufacturing methods of the rollers of Examples "48" and "Comparative Examples 2" and 21 shown in Tables 15 and 16 are as follows. The inner layer P (thickness 6 mm/width (dimension of the mandrel extension direction) 24 mm The mandrel is formed on a mandrel (material: made of aluminum alloy, size: diameter: 028 mm, length: 25 mm). The outer layer portion (thickness 30 - width 240 mm) is formed on the outer side of the inner layer portion. &, the elastic layer becomes the outer position φ 40mm, the width is 24〇mm. However, 'for the roller without the inner layer (real) 41, the transfer roller belongs to the outer layer (thickness 3 0 " m/) The width of 24 Gmm) is formed on the same mandrel as described above. 58 201036715 Table 15 Clean sentence transfer wheel transfer island inner wheel outer layer roller hardness JIS-A 〇 inner layer outer roller hardness JIS-A (.) Example 33 a D 30 a A 30 Example 34 a A 30 a G 32 Example 35 a B 30 a H 30 Example 36 a B 30 a G 32 Example 37 a C 32 a H 30 Example 38 a E 29 a B 30 Example 39 a F 28 a A 30 Example 40 a D 28 No A - Comparative Example 20 a E 29 b No 26 Table 16 Clean sentence 1 round transfer island Inner wheel outer roller hardness JIS-A 〇 inner layer outer roller hardness JIS-A 〇 Example 41 a G 32 a A 30 Example 42 a G 32 a B 30 Example 43 a A 30 a F 28 Example 44 a A 30 a D 30 Example 45 a H 30 a C 32 Example 46 a H 20 a B 30 Example 47 a B 30 a E 29 Example 48 a G 32 Benefit A - Comparative Example 21 a G 32 b No 26 ( Test results) Table 1 The case where the foreign matter is an acrylic resin, and the foreign matter in Table 18 is a polystyrene resin. Here, the 〇X mark in the table is a digital microscope (the lens magnification of the digital microscope VHX-200 KEYENCE) 450 times), confirm the 3 points of the range of 65 0 # mx500 /zm, the 〇 mark indicates that no foreign matter has been confirmed at all points, and the X mark indicates that foreign matter has been confirmed. 59 201036715 Table 17 Clean roller potential ( V) Transfer roller potential (V) Group clean roller attached foreign matter transfer roller attached foreign matter 10#m 1 um 1 2 3 4 5 1 2 3 4 5 Example 33 -300, +600 -608, +276 〇〇 〇〇〇〇〇〇〇〇 No Example 34 -300, +600 -642, +253 〇〇〇 〇〇〇〇〇〇 No Example 35 -300, +600 -758, +148 〇〇〇〇〇〇〇〇〇〇 No Example 36 -300, +600 -666, +219 〇〇〇〇 〇〇〇〇〇〇 No Example 37 -300, +600 -701, +199 〇〇〇〇〇〇〇〇〇〇 No Example 38 -300, +600 -431, +459 〇〇〇〇 〇〇〇〇〇〇 No Example 39 -300, +600 -594, +290 〇〇〇〇〇〇〇〇〇〇 No Example 40 -300, +600 -589, +298 〇〇〇〇 〇〇〇〇〇〇 No Comparative Example 20 -300, +600 — 〇〇X 〇X 〇XXXX There are Table 18 Clean Roller Potential (V) Transfer Roller Potential (V) Group Clean Roller Attached Foreign Material Transfer Roller Attached foreign matter ΙΟβϊΏ 1 βτη 1 2 3 4 5 1 2 3 4 5 Example 41 +300, -600 +658, -228 〇〇〇〇〇〇〇〇〇〇 No Example 42 +300, -600 +671 , -218 〇〇〇〇〇〇〇〇〇〇 No Example 43 +300, -600 +581, -304 〇〇〇〇〇〇〇〇〇 None Example 44 +300, -600 +660, -247 〇〇〇〇〇〇〇〇〇〇 No Example 45 +300, -600 +728, -180 〇〇〇〇〇〇〇〇〇〇 None Example 46 +300, -600 +749, -153 〇〇〇〇〇〇〇〇〇〇 No Example 47 +300, -600 +610, -279 〇〇〇〇〇〇〇〇〇〇 None Example 48 +300, -600 +643, -248 〇〇〇〇〇〇〇〇〇〇 No Comparative Example 21 +300, -600 — 〇X 〇XX 〇XXXX There are 60 201036715 from Table 17, In the examples 33 to 48 in which the first external power source 22 is connected to the cleaning roller 211 to apply a voltage, it is understood that the accumulation of the foreign matter to the transfer roller is not observed even if the continuous use is continued, and the deterioration of the cleanliness cannot be observed. On the other hand, in the comparative examples 20 and 21 in which the (4) method obtained the effect of the present invention, in the comparative examples 20 and 21 of the cleaning roller, continuous cleanliness could not be obtained.

Moreover, as shown in FIG. 23, by arranging two sets of clean cells, u2, and making the signs of the charges carried by the cleaning rollers 211, 2nA of the respective units m, U2 opposite, the charging roller can be charged to the negative side. 21 1 Remove the foreign matter attached to the cleaned material S, which is on the positive side, and remove the charged foreign matter on the negative side by the clean roller 211A that is charged to the positive side. The 22i, 22ia first external power sources '231, 231A are transfer rollers. Furthermore, as shown in the '24, the cleaning roller s can be clamped and the guide roller 25 1B 6 is placed on the opposite side of the cleaning roller 2 (i, and the transfer roller 231B is disposed on the guide roller 251B, The electric field of the cleaning roller 211 and the guiding roller 25 s is further enhanced by the guiding roller 2, and the cleaning roller 25 1B can be replaced by using the cleaning roller. The cleaning of the opposite side of the cleaned material S is performed at the same time. Further, as in the case shown in Fig. 23, two sets of units may be disposed. An example of the overall configuration of the clean system having the clean portion described above is shown. 2 71 is a cleansing unit that removes foreign matter (conductor or dielectric) adhering to the surface of the cleaned material S by 9L β and the surface S1 by electrostatic force (2, 2, 2, 2, 2, 2, 2) 272, the loading portion of the cleaned material S is transferred to the cleaning unit s. 201036715 273, and the unloaded portion 274 of the cleaned material s is removed from the cleaning unit 272. The loading unit 273 is wound around the pair of rollers 273A and 273B with the conveying belt 273C' to be cleaned. The part 272 carries out the transport on the transport belt 273C (four) The roller 274 is wound 274C, and the cleaned material s discharged from the clean portion π] to the transport belt 274C is transported in the direction away from the clean portion 272. The clean portion 272 is provided on the surface S1 (upper surface) of the cleaned material s A pair of cleaning rollers 211 that rotate while contacting the surface, and rotate the surfaces of the transfer roller 231 while the cleaning rollers 211 are in contact with each other. The opposite side (below) of the cleaned material s also corresponds to the cleaning of the upper side. A pair of cleaning rollers 211' are disposed on the roller 21A to sandwich the cleaned material s between the clean roller 211 and the cleaned material s to move to the carry-out portion 274. The cleaning roller 211 is also provided with a turn The printing roller 231. The rotating force of the driving roller 2% is transmitted to the shaft portion of the cleaning roller 211 through the driving belt 275 to drive the cleaning roller 2 1 1 to rotate. Further, the first outer portion is connected to the core shaft of each cleaning roller 211. The power source (high voltage power source) 221 is provided with a metal roller 244 through the cleaning brush 243 in each of the transfer rollers 231, and a second external power source 245 is connected to each of the metal rollers 244. Further, the metal roller 244 is provided with a gas vacuum pump 278. ( The suction port 242 and the cleaning blade 241 of the body vacuum mechanism. Each of the suction ports 242 is connected to the gas vacuum pump 278 through a dust collector (filter) 277. [Schematic description] Fig. 1(a)(b) shows the present Fig. 2 shows an embodiment in which a cleaning unit is disposed in a cleaning system. An explanatory diagram of the form. Figure is an explanatory view showing another embodiment of the cleaning unit of the present invention. Fig. 5 is an explanatory diagram of the foreign matter removal test 1. Fig. 6 is a view similar to Fig. 1(a) of another embodiment of the unclean unit. Fig. 7 is a view similar to Fig. 2 showing an embodiment in which two sets of other solid (four) state clean cells are placed. Fig. 8 is a view similar to Fig. 4 showing another embodiment of the cleaning unit. Fig. 9 is a view similar to Fig. 3 showing another embodiment of the cleaning unit. Fig. 10 is an explanatory diagram of the foreign matter removal test 2. Fig. 11 is a view showing an example of the {clean system of the present invention. Fig. 12 (a) and (b) are explanatory views each showing a basic structure of a clean unit used in the cleaning system of the present invention. Fig. 13 is a view showing an embodiment of the above-described cleaning unit. Fig. 14 shows an embodiment in which two sets of cleaning units are arranged. Figure 15 is a view similar to Figure 2 for another embodiment. Fig. 16 is a view similar to Fig. 2 for another embodiment. Fig. 17 is an explanatory diagram of a foreign matter removal test. Fig. 18 is a view showing an example of the cleaning system of the present invention. 63 201036715 Figure 19 shows the other embodiments of the 参 免 _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ b) is an explanatory view showing the principle of using an electrostatic force to remove foreign matter such as dust, respectively, in the example of the clean sheet 7L used in the clean system of the present invention. Fig. 22 (a) to (7) are explanatory views of the operation of the above unit. Fig. 23 is a view similar to Fig. 1(a) for another embodiment. Fig. 24 is a view similar to Fig. 1(a) for another embodiment. Fig. 25 is an explanatory view of a foreign matter removal test. A diagram showing an example of the cleaning system of the present invention. [Explanation of main component symbols] 11, 11A '11A, 11B, 11B' Clean roller 11a Axis lib 11c 21, 21A, 21B, 2Γ 21a ' 21a' 21b 21c, 21c ' 31 41 41a 41b Inner layer outer layer part electrification control roller mandrel inner layer outer layer outer power supply guide roller anger axis inner layer portion 64 201036715

41c 45 , 55 , 56 51 , 51A , 51B 51a 51b 51c 61 62 63

63A, 63B 63C 64

64A, 64B 64C

71, 71A, 71B 72, 72A, 72B 74 11 1, 1 11A, 11 IB, 111 ( 111a 111b 111c 121, 121A, 121B, 12Γ 121a ' 121a' 121b 121c > 121c' outer surface surface potentiometer transfer roller Mandrel inner layer outer layer cleaning system clean part loading part roller conveyor belt carrying-out part roller conveyor belt charged control roller transfer roller drive roller, 111D clean roller mandrel inner layer outer layer portion, 12Γ charged control roller mandrel inner layer outer layer portion 65 201036715 131, 131A, 131B, 131' transfer rollers 131a, 131a, mandrel 131b inner layer portions 131c, 131c, outer layer portions 141, 141A, 141B, 141" first external power source 145, 145A, 145B, 145C, 145D suction port 146, 146A, 146B, 146C, 146D cleaning blade 151, 151A, 151B cleaning brush 151a mandrel 151b hair portion 152, 152A, 152B metal roller 153 ' 153A, 153B second external power source 154 guiding roller 161, 162, 163 Surface potentiometer 171 Clean system 172 Clean unit 173 Carry-in unit 173A, 173B Roller 173C Conveyor belt 174 Carry-out unit 174A, 174B Roller 174C Conveyor belt 175 Drive belt 176 Drive roller 177 Dust collector 66 178 178 ❹ 201036715 21 1,21 ΙΑ 211a 211b 211c

221, 221A, 221B 23 1, 231A, 231B, 23Γ 231a '231a' 231b 231c '231c'

241, 241A

242, 242A 243, 243A 243a 243b

244, 244A

245, 245A 251B 261, 262 271 272

273 273A, 273B

273C Gas Vacuum Pump Clean Roller Mandrel Inner Layer Outer Part External Power Transfer Roller Mandrel Inner Layer Outer Part Clean Blade Sucker Clean Brush Core Shaft Metal Roller Second External Power Guide Roller Surface Potentiometer Clean System Cleaner Move In Roller conveyor belt carry-out section 67 274 201036715 274A ' 274B Roller 274C conveyor belt 275 Drive belt 276 Drive roller 111 Dust collector 278 Gas vacuum pump S Clean material SI Surface U, U', U1, Ul' U2, U3 Clean unit U10, U1 1, U12 clean unit 68

Claims (1)

201036715 VII. Patent application scope · · The t (four) system is a clean roll that moves relative to the cleaned material - side rotation - side: surface contact and electrostatic force to remove the attachment / error by the clean roller using electric knife The surface of the net material of the Hungarians is characterized by: foreign matter such as dust, which is attached to the clean roller system and has a charge on the outer peripheral surface of the foreign matter on the surface of the surface cleaned by the static side; The cleaning roller is provided with a rotating control roller that rotates while rotating; and an "electrically controlled roller system is attached to the outer surface of the cleaning roller, and the cleaning roller is provided with an electrostatic force for adsorbing and adhering to the cleaned material. 2. The charge of the foreign matter on the surface. 2. The cleaning system of claim 1, wherein the charged control roller rotates while the side is in contact with the surface of the cleaning roller, and between the cleaning roller and the cleaning roller A potential difference is generated depending on the surface characteristics of the charging control roller and the cleaning roller. 3. The cleaning system of claim 1 or 2, wherein the cleaning roller is provided with a transfer roller that rotates while contacting the outer surface of the cleaning roller; the transfer roller is provided with a conductive a core rod and a cylindrical elastic layer portion disposed outside the core rod; the elastic layer portion of the transfer roller is higher in volume resistivity than the core rod and is capable of being adsorbed by an electrostatic force on the surface A material is formed by a material attached to the foreign matter of the outer peripheral surface of the cleaning roller. 4. The cleaning system of claim 1 or 2, wherein the guide roller is disposed on the opposite side of the cleaning roller by means of a cleaning roller to clamp the cleaned material; The utility model is used for increasing the electric field strength, so that the cleaning roller uses an electrostatic force to adsorb foreign matter adhering to the surface of the cleaned material. 5. The cleaning system of claim 3, wherein the clean-hearted wheel train has a conductive core rod, a cylindrical inner layer portion disposed outside the core rod, and a outer layer portion disposed on the outer side of the inner layer portion Outer layer; ▲ The outer layer has 5G. The above hardness (Jis_A) and volume resistivity are higher than the inner layer portion. 6. The clean amine system according to claim 3, wherein the inner portion of the roller is formed of an electrically conductive elastic material; and the outer layer is made of (tetra) acid mixed with a urethane or Fluorine mixed with vinegar. a cleaning system in which the surface contact is rotated 7 , as in the first or second aspect of the patent application, the cleaning roller is provided with one side and the cleaning roller transfer roller; the electrically controlled roller is connected to the mandrel with the first outer portion The cleaning roller changes the charge of the foreign matter on the child by the electrostatic force; 纟 (4) ♦ The surface of the object to be cleaned is connected by a charge capable of adsorbing the foreign matter attached to the surface of the cleaning roller by electrostatic force on the surface. The charge of the mandrel of the charged control roller is formed and the electric charge of the foreign matter can be adsorbed by electric power. The external power supply is changed by the surface contact of the static material and the foreign matter such as dust is used by the cleaning roller. 8. A clean system is provided with a clean roller that moves relative to the side while being cleaned, and electrostatic force is removed to adhere thereto. The surface of the cleaned material 201036715 is characterized in that: the clean roller is connected with a first external power source, and may have a charge on the surface for adsorbing foreign matter attached to the surface of the cleaned material by electrostatic force; Λ ^ The roller is provided with a transfer roller that rotates while being in contact with the surface of the cleaning roller; the transfer roller is provided with a charge on the surface for adsorbing foreign matter attached to the surface of the cleaning roller by electrostatic force, and borrows By changing the applied voltage of the first external power source connected to the cleaning roller, the charging voltage of the transfer roller for adsorbing the foreign matter by electrostatic force can be changed. 9. The cleaning system of claim 8, wherein the transfer roller is rotated while being in contact with the surface of the cleaning roller to be between the cleaning roller and the cleaning roller. A potential difference is generated by the difference in surface characteristics of the roller. 10. The clean system of claim 8th item 9 is composed of the following description: the transfer roller is provided with a cleaning brush rotating in the opposite direction to the interlocking rotation direction, and the cleaning brush is arranged to rotate in conjunction. a metal roller rotating in the direction, a second external power source is connected to the metal roller, and a potential difference is generated between the roller and the transfer roller; and a front end scraping portion is disposed near the surface of the metal roller to scrape the metal attached to the metal roller A clean blade of foreign matter on the surface of the roller. η, as in the cleansing system of claim 10, wherein the external power supply is constructed in the following manner: except that the clean roller of the clean roller is in the transfer operation of the (four) 1 The voltage of the opposite side of the printed roller surface τ and the absolute value of the voltage is applied to the charged control 71 201036715 roller; the second external power supply is constructed in the following manner: when it is cleaned, it will be carried with the surface of the transfer roller A potential having the same sign of charge is applied to the metal roller ' to create a potential difference between the metal roller and the transfer roller. 12. The cleaning system of claim 10, wherein the suction σ of the gas vacuum mechanism capable of attracting foreign matter by a vacuum is provided near the surface of the metal roller. 13. The cleaning system of claim 8 or 9 is constructed in such a manner that the transfer roller is provided with a cleaning brush that rotates in a direction opposite to the direction of the interlocking rotation, and the cleaning brush is disposed in a rotational direction. a rotating metal roller, the second external power source is connected to the metal roller, and a potential difference is generated between the metal roller and the transfer roller; and the front end scraping portion is disposed near the surface of the metal roller to scrape the attached A clean blade of foreign matter on the surface of the metal roller. 14. The cleaning system of claim 13, wherein a suction port of the gas vacuum mechanism capable of attracting foreign matter by a negative pressure is disposed in the vicinity of the cleaning blade disposed on the surface of the transfer roller. 15. If the scope of the patent application is 8th, the cleaning roller is used to clamp the guide roller for the cleaned material; the cleaning system of the item is used to improve the electric field strength on the opposite side of the cleaning roller. For the clean roller to use the electrostatic force to adsorb the attached left # ^ 々 澴 澴 利 利 在 在 在 在 # # # # # # # # # # # # # # # # # # The 16 kinds of clean systems are equipped with clean rollers that are moved relative to each other by the surface of the whistle and the side of the whistle. The electrostatic force is used to remove the attached right. The foreign matter such as dust on the surface of the 27-faced net material, 72 201036715 is characterized in that: the force is adsorbed and adhered to the surface contact side, and the clean roller system can have a charge on the surface for using the foreign matter on the surface of the cleaned material. Providing the cleaning roller with a transfer roller that rotates with the cleaning roller; The transfer roller is formed by a roller which can be disposed on the side of the electric roller on the surface of the cleaning roller and the roller of the transfer roller; and is formed by using an electrostatic force to adsorb the attached material, and the transfer surface is formed. The electric control roller that is rotated while being in contact with the electric control roller is connected to the stalk with a first external power source, and the cleaning roller and the transfer roller can be changed to utilize the material force to adsorb the electric charge of the foreign matter attached to the surface of the object to be cleaned. Eight, schema: (such as the next page) 73