CN104148333B - A kind of reative cell clearing apparatus - Google Patents
A kind of reative cell clearing apparatus Download PDFInfo
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- CN104148333B CN104148333B CN201410313221.4A CN201410313221A CN104148333B CN 104148333 B CN104148333 B CN 104148333B CN 201410313221 A CN201410313221 A CN 201410313221A CN 104148333 B CN104148333 B CN 104148333B
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- adsorbent
- reative cell
- fixed mount
- driving mechanism
- winding
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B6/00—Cleaning by electrostatic means
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Abstract
The invention discloses a kind of reative cell clearing apparatus, relate to liquid crystal display and manufacture field.For solution is invented because cleaning reative cell fragment makes the problem of production capacity decline and the rising of product fraction defective.A kind of reative cell clearing apparatus provided by the invention, comprises housing, adsorbent winding up roller, fixed mount, the first driving mechanism, the second driving mechanism and electrostatic generator, is provided with vacuum space in housing, and the sidewall of housing is provided with docking door; Adsorbent winding up roller is arranged in vacuum space, and adsorbent winding up roller comprises rotating shaft and is sheathed on the adsorbent volume in rotating shaft; Fixed mount is arranged in vacuum space, and the initiating terminal of adsorbent volume is fixed on fixed mount; First driving mechanism is connected with rotating shaft; Second driving mechanism is connected with fixed mount, and fixed mount and adsorbent winding up roller entirety can be driven to move along the first linear reciprocation, and docking door is positioned on the first straight line; Electrostatic generator is rolled up with adsorbent and is connected.The present invention can be used for the glass fragment cleaning dry etching machine reative cell.
Description
Technical field
The present invention relates to liquid crystal display and manufacture field, particularly relate to a kind of reative cell clearing apparatus.
Background technology
In the manufacturing process of liquid crystal display, dry etch process etches away without the metal film of photoresist masking or non-metallic film on substrate, the region of photoresist masking preserved, thus on substrate, forms required figure.To substrate etch be dry etching equipment vacuum reaction indoor carry out, with reference to Fig. 1, Fig. 1 is the stressed schematic diagram of glass substrate in reative cell, glass substrate 03 is placed on the lower electrode 02 of reative cell 01, electrostatic is applied in the surperficial plush copper of lower electrode 02, downward absorption affinity F is produced to glass substrate 03, simultaneously, lower electrode 02 is dispersed with helium eyelet 021 of uniform size, helium upwards blows out, the back of cooled glass substrate 03, and lift F' is upwards produced to glass substrate 03; Plush copper due to lower electrode 02 is easy to pile up attachment, make absorption affinity decline and uneven, under the effect of helium, easily there is local and tilt in glass substrate 03, then the edge portion of glass substrate 03 can reveal helium, thus, glass substrate 03 vibrates, thus causes glass substrate 03 broken.On the other hand, after etching reaction terminates, in order to remove the electrostatic charge remaining in glass substrate 03 back, the radio-frequency power of usual employing 2000 watts carries out bombardment generation plasma air mass to oxygen and removes, due to the charge effects of plasma, electrostatic is made to be difficult to remove completely, thus, occurring in electric step, glass substrate 03 is broken, in actual production, glass substrate 03 fragmentation of about more than 90% occurs in except electric step, owing to creating fragment and particle after glass substrate 03 fragmentation on the positions such as lower electrode 02, have impact on next glass substrate 03 and carry out etching reaction, therefore, need in reative cell 01 glass fragment clear up.
In prior art; reative cell 01 pair of fragment must be opened clear up; need before cleaning to discharge tail gas, cooling and atmospheric treatment; then open reative cell 01 and clear up fragment; because air and steam enter reative cell 01; need of production temperature rising preheating again, application of vacuum and plasma are to processes such as treatment of electrode surfaces, then minimum need shutdown just can be resumed production for 21 hours, and production capacity is significantly declined.On the other hand, once reative cell 01 is opened, steam in air can be adsorbed on lower electrode 02, be difficult in short time remove, easily cause lower electrode 02 paradoxical discharge and attaching organism to dissolve differentiation in the reaction, cause technique bad, simultaneously, the device characteristics of reative cell 01 and the characteristic such as internal surfactant and product absorption are undergone mutation, and make the substrate performance of production inconsistent, thus product fraction defective rise.
Summary of the invention
Embodiments of the invention provide a kind of reative cell clearing apparatus, when reaction chamber state is constant, fragment is cleaned, shorten the time of resuming production, thus improve production capacity, meanwhile, maintain the uniformity of reative cell equipment state, ensure that the uniformity of substrate performance, thus improve yields.
For achieving the above object, embodiments providing a kind of reative cell clearing apparatus, comprising: housing, being provided with vacuum space in described housing, the sidewall of described housing is provided with docking door; Adsorbent winding up roller, described adsorbent winding up roller is arranged in described vacuum space, and described adsorbent winding up roller comprises rotating shaft and is sheathed on the adsorbent volume in described rotating shaft, and described adsorbent volume can static electrification; Fixed mount, described fixed mount is arranged in described vacuum space, and the initiating terminal of described adsorbent volume is fixed on described fixed mount; First driving mechanism, described first driving mechanism is connected with described rotating shaft, and described adsorbent winding up roller can be driven to move relative to described fixed mount; Second driving mechanism, described second driving mechanism is connected with described fixed mount, and described fixed mount and described adsorbent winding up roller entirety can be driven to move along the first linear reciprocation, and described docking door is positioned on described first straight line; Electrostatic generator, described electrostatic generator is rolled up with described adsorbent and is connected.
Further, described first driving mechanism comprises gear, tooth bar, the first linking arm, the second linking arm and the first cylinder, the piston rod of described first cylinder is fixedly connected with described tooth bar, described gear is meshed with described tooth bar, described gear is fixed on described fixed mount by gear rotating shaft, one end of described first linking arm is fixedly connected with described gear, and one end of the other end and described second linking arm is hinged, and the other end of described second linking arm is fixedly connected with described rotating shaft.
Further, described first cylinder is arranged at described hull outside, and the piston rod of described first cylinder is fixedly connected with described tooth bar through after the sidewall of described housing.
Further, state between the first linking arm and the second linking arm and be provided with back-moving spring.
Further, described second driving mechanism comprises the second cylinder, and the piston rod of described second cylinder is fixedly connected with described fixed mount.
Further, described second cylinder is arranged at described hull outside, and the piston rod of described second cylinder is fixedly connected with described fixed mount through after the sidewall of described housing.
Further, described adsorbent volume is made up of rubber.
Further, described electrostatic generator can send positive charge and negative electrical charge.
Further, described docking door is connected with drive motors, and described drive motors can drive docking door opening and closing.
A kind of reative cell clearing apparatus that the embodiment of the present invention provides, comprises housing, adsorbent winding up roller, fixed mount, the first driving mechanism, the second driving mechanism and electrostatic generator, vacuum space is provided with in housing, and the sidewall of housing is provided with docking door, when cleaning the glass fragment in reative cell, be communicated with reative cell by opening docking goalkeeper housing, then be vacuum state in housing and in reative cell, under the drive of the second driving mechanism, fixed mount is moved to docking door place along the first straight line with adsorbent winding up roller entirety, when adsorbent winding up roller arrives docking door place, first driving mechanism drives the axis of rotation on adsorbent winding up roller, because the initiating terminal of adsorbent volume is fixed on fixed mount, adsorbent volume then on adsorbent winding up roller can launch and cover on reative cell glass fragment by from coil to coil, adsorbent is made to roll up surface with electrostatic by electrostatic generator, Electrostatic Absorption is carried out to glass fragment, again by the second driving mechanism, the adsorbent winding up roller being adsorbed with glass fragment is moved straightly in housing along first, docking door is closed, electrostatic generator sends contrary electrostatic charge again, neutralize the electrostatic on adsorbent volume surface, now, fragment loses absorption affinity and falls in housing, what the adsorbent on adsorbent winding up roller twisted in from coil to coil under the drive of the first driving mechanism is rolled onto in rotating shaft, for cleaning next time is ready.Owing to cleaning in the process of fragment, vacuum state is in housing and in reative cell, atmospheric condition and the temperature of reative cell all do not change, without the need to temperature rising preheating, application of vacuum and plasma to processes such as treatment of electrode surfaces, docking door can continue to put into production after closing, substantially reduce the time of resuming production, thus improve production capacity, simultaneously, owing to entering reative cell without steam, maintain the uniformity of reative cell equipment state, avoid the exception of reaction indoor equipment, ensure that the uniformity of substrate performance, thus improve yields.
Accompanying drawing explanation
In order to be illustrated more clearly in the technical scheme in the embodiment of the present invention, below the accompanying drawing used required in describing embodiment is briefly described, apparently, accompanying drawing in the following describes is only some embodiments of the present invention, for those of ordinary skill in the art, under the prerequisite not paying creative work, other accompanying drawing can also be obtained according to these accompanying drawings.
Fig. 1 is the stressed schematic diagram of glass substrate in dry etching reative cell in prior art;
Fig. 2 is the structural representation of embodiment of the present invention reative cell clearing apparatus;
Fig. 3 is the structural representation after embodiment of the present invention reative cell clearing apparatus is connected with dry etching reative cell.
Detailed description of the invention
Below in conjunction with the accompanying drawing in the embodiment of the present invention, be clearly and completely described the technical scheme in the embodiment of the present invention, obviously, described embodiment is only the present invention's part embodiment, instead of whole embodiments.Based on the embodiment in the present invention, those of ordinary skill in the art, not making the every other embodiment obtained under creative work prerequisite, belong to the scope of protection of the invention.
In describing the invention, it will be appreciated that, orientation or the position relationship of the instruction such as term " " center ", " on ", D score, "front", "rear", "left", "right", " vertically ", " level ", " top ", " end ", " interior ", " outward " they be based on orientation shown in the drawings or position relationship; be only the present invention for convenience of description and simplified characterization; instead of instruction or imply the device of indication or element must have specific orientation, with specific azimuth configuration and operation, therefore can not be interpreted as limitation of the present invention.In addition, term " first ", " second " only for describing object, and can not be interpreted as instruction or hint relative importance or imply the quantity indicating indicated technical characteristic.Thus, be limited with " first ", the feature of " second " can express or impliedly comprise one or more these features.
In describing the invention, it should be noted that, unless otherwise clearly defined and limited, term " installation ", " being connected ", " connection " should be interpreted broadly, and such as, can be fixedly connected with, also can be removably connect, or connect integratedly; Can be mechanical connection, also can be electrical connection; Can be directly be connected, also indirectly can be connected by intermediary, can be the connection of two element internals.For the ordinary skill in the art, concrete condition above-mentioned term concrete meaning in the present invention can be understood.
Fig. 2 is a specific embodiment of embodiment of the present invention reative cell clearing apparatus; With reference to Fig. 2, reative cell clearing apparatus in the present embodiment, comprises housing 1, adsorbent winding up roller 2, fixed mount 3, first driving mechanism 4, second driving mechanism 5 and electrostatic generator 6, is provided with vacuum space in housing 1, the sidewall of housing 1 is provided with docking door 7; Adsorbent winding up roller 2 is arranged in vacuum space, and adsorbent winding up roller 2 comprises rotating shaft 21 and is sheathed on the adsorbent volume 22 in rotating shaft 21, and meanwhile, adsorbent volume 22 can static electrification 10; Fixed mount 3 is arranged in vacuum space, and the initiating terminal of adsorbent volume 22 is fixed on fixed mount 3; First driving mechanism 4 is connected with rotating shaft 21, and adsorbent winding up roller 2 can be driven to move relative to fixed mount 3; Second driving mechanism 5 is connected with fixed mount 3, and fixed mount 3 and adsorbent winding up roller 2 entirety can be driven to move along the first linear reciprocation, and docking door 7 is positioned on described first straight line; Electrostatic generator 6 and adsorbent are rolled up 22 and are connected.
With reference to Fig. 2 and Fig. 3, a kind of reative cell clearing apparatus that the embodiment of the present invention provides, comprises housing 1, adsorbent winding up roller 2, fixed mount 3, first driving mechanism 4, second driving mechanism 5 and electrostatic generator 6, when cleaning the glass fragment in reative cell 01, by opening docking door 7, housing 1 is communicated with reative cell 01, then be vacuum state in housing 1 with in reative cell 01, under the drive of the second driving mechanism 5, fixed mount 3 is moved to docking door 7 place along the first straight line with adsorbent winding up roller 2 entirety, when adsorbent winding up roller 2 arrives docking door 7 place, first driving mechanism 4 drives the rotating shaft 21 on adsorbent winding up roller 2 to rotate, because the initiating terminal of adsorbent volume 22 is fixed on fixed mount 3, adsorbent volume 22 then on adsorbent winding up roller 2 can launch and cover on reative cell 01 glass fragment by from coil to coil, adsorbent is made to roll up 22 surfaces with electrostatic 10 by electrostatic generator 6, Electrostatic Absorption is carried out to glass fragment, again by the second driving mechanism 5, the adsorbent winding up roller 2 being adsorbed with glass fragment is moved straightly in housing 1 along first, docking door 7 is closed, electrostatic generator 6 sends contrary electrostatic charge again, neutralize the electrostatic 10 that adsorbent rolls up 22 surfaces, now, fragment loses absorption affinity and falls in housing 1, on adsorbent winding up roller 2 adsorbent volume 22 under the drive of the first driving mechanism 4 from coil to coil be rolled onto in rotating shaft 21, for cleaning next time is ready.With reference to Fig. 3, owing to cleaning in the process of fragment, vacuum state is in housing 1 and in reative cell 01, atmospheric condition and the temperature of reative cell 01 all do not change, without the need to temperature rising preheating, application of vacuum and plasma are to processes such as treatment of electrode surfaces, docking door 7 can continue to put into production after closing, substantially reduce the time of resuming production, thus improve production capacity, simultaneously, owing to entering reative cell 01 without steam, maintain the uniformity of reative cell 01 equipment state, avoid the exception of equipment in reative cell 01, ensure that the uniformity of substrate performance, thus improve yields.In addition, for the glass fragment of sheet, because adsorption area can siphon away greatly more easily, for little particle, by regulating adsorbent volume 22 to increase absorption affinity to the distance of particle or increase electrostatic 10 voltage, thus particle is siphoned away completely.
On the other hand, when fragmentation does not occur, can adsorb the trickle cast of the product on lower electrode 02 surface in reative cell 01, particle, small foreign body and electrode ceramic, to complete cleaning lower electrode 02.When the product attachment on lower electrode 02 surface is tight, by the first driving mechanism 4, adsorbent volume 22 is covered on lower electrode 02, again under the drive of the second driving mechanism 5, adsorbent rolls up 22 integrated reciprocating motions, the product on 22 wiping lower electrode 02 surfaces is rolled up by adsorbent, by the first driving mechanism 4, adsorbent volume 22 is shunk again afterwards, adsorbent volume 22 is left lower electrode 02 certain distance, adsorb to walk the product under wiping by the electrostatic 10 on adsorbent volume 22, thus complete the clean of lower electrode 02 product on the surface., remain owing to there is certain electrostatic after lower electrode 02 Long-Time Service meanwhile, by the surface of adsorbent volume 22 contact lower electrode 02, remain with the electrostatic removing lower electrode 02.Because lower electrode 02 is for a long time by glass wearing and tearing and plasma bombardment, surface-active easily changes, and rolls up 22 pairs of lower electrode 02 surfaces carry out Electrostatic Treatment by adsorbent, thus improves and change the surface-active of lower electrode 02.In addition, because the helium bore dia of lower electrode 02 is very tiny, as fruit part helium hole is blocked by the fine particle that gas circuit is brought, the cooling effect difference of substrate will be caused, thus the change of product etching rate, therefore, after adsorbent can being rolled up 22 contact lower electrodes 02, under the drive of the first driving mechanism 4, adsorbent volume 22 back and forth launches fast and shrinks, form shock wave vibratory to lower electrode 02, shake the obturator in helium hole pine and being siphoned away by electrostatic 10, consistent to ensure product etching rate.
In order to the adsorbent realized on adsorbent winding up roller 2 rolls up expansion and the contraction of 22 from coil to coils, first driving mechanism 4 can adopt the structure of motor driven gear and telescopic arm, cylinder drives the various structures such as the structure of telescopic arm, also structure as shown in Figure 2 can be selected, first driving mechanism 4 is by gear 41, tooth bar 42, first linking arm 43, second linking arm 44 and the first cylinder 45 form, the piston rod of the first cylinder 45 is fixedly connected with tooth bar 42, simultaneously, gear 41 is meshed with tooth bar 42, gear 41 is fixed on fixed mount 3 by gear rotating shaft, one end of first linking arm 43 is fixedly connected with gear 41, one end of the other end and the second linking arm 44 is hinged, the other end of the second linking arm 44 is fixedly connected with rotating shaft 21, thus, the piston rod of the first cylinder 45 can drive tooth bar 42 to move near docking door 7 direction or away from docking door 7 direction, tooth bar 42 moves and drives gear 41 to rotate, along with the rotation of gear 41, first linking arm 43 can drive the second linking arm 44 to move near docking door 7 direction or away from docking door 7 direction, when the second linking arm 44 is to when moving near docking door 7 direction, then adsorbent is rolled up 22 deployable, on the contrary, when the second linking arm 44 moves to away from docking door 7 direction, then adsorbent volume 22 can be rolled onto in rotating shaft 21.
It is inner that first cylinder 45 can be arranged at housing 1, also housing 1 can be arranged at outside, in order to save the material making housing 1, preferably the first cylinder 45 is arranged at housing 1 outside, and the piston rod of the first cylinder 45 is fixedly connected with tooth bar 42 through after the sidewall of housing 1, thus, save housing 1 cost of manufacture, meanwhile, reduce the volume of housing 1, save space.
Back-moving spring 8 can be provided with between first linking arm 43 and the second linking arm 44, also back-moving spring 8 can not be set, if arrange reset bullet 8 spring, when then the second linking arm 44 moves forward, back-moving spring 8 launches, when second linking arm 44 moves backward, back-moving spring 8 shrinks, contraction due to back-moving spring 8 adds the power of the second linking arm 44 movement backward, thus make the second linking arm 44 be easier to move backward, and then adsorbent volume 22 is easier to shrink, therefore, preferably be provided with back-moving spring 8 between the first linking arm 43 and the second linking arm 44, thus, make adsorbent roll up 22 to be easier to shrink.
Move along the first linear reciprocation with adsorbent winding up roller 2 entirety to realize fixed mount 3, second driving mechanism 5 can comprise cylinder, hydraulic cylinder etc. can linear pushing or the structure that retracts, because cylinder operation is simple, be easy to installation, therefore, preferably the second driving mechanism 5 comprises the second cylinder 5, simultaneously, the piston rod of the second cylinder 5 is fixedly connected with fixed mount 3, again because the initiating terminal of adsorbent volume 22 is fixed on fixed mount 3, thus, the piston rod of the second cylinder 5 can promote or retract fixed mount 3 and moves along the first linear reciprocation with adsorbent winding up roller 2 entirety.
Second cylinder 5 is identical with the first cylinder 45, both can be arranged at housing 1 inner, also can be arranged at housing 1 outside, in order to save the material making housing 1, preferably the second cylinder 5 is arranged at housing 1 outside, meanwhile, the piston rod of the second cylinder 5 is fixedly connected with tooth bar 42 through after the sidewall of housing 1, thus, save the material making housing 1, meanwhile, housing 1 small volume, saves space.
Adsorbent volume 22 can adopt the insulating materials such as rubber, plastics to make, because the insulating properties of rubber is better, rubber surface is easier to electrostatic 10, and not easily loss, therefore, preferred adsorbent volume 22 is made up of rubber, thus, adsorbent can be made to roll up on 22 be easy to electrostatic 10, and electrostatic 10 amount remains unchanged.
In order to make adsorbent volume 22 both adsorbable glass fragments, glass fragment can be dropped in housing 1 after absorption again, preferred electrostatic generator 6 both can send positive charge, also negative electrical charge can be sent, thus, adsorbent rolls up 22 surfaces can with positive charge electrostatic 10 or negative electrostatic charge 10, such as, when adsorbent volume 22 covers on glass fragment, electrostatic generator 6 makes adsorbent roll up 22 surfaces with positive charge electrostatic 10, to complete the absorption of glass fragment and after getting back to housing 1, electrostatic generator 6 sends negative electrical charge, neutralize adsorbent and roll up positive charge electrostatic 10 on 22 surfaces, then glass fragment loses adsorptivity and drops in housing 1, also adsorbent can be made to roll up 22 surfaces and first to carry out absorption fragment with negative electrostatic charge 10, then by positive charge with in and negative electrical charge, make attached body volume surface lose absorption affinity, thus glass fragment falls down.
Docking door 7 can manually opened and close, also can docking door 7 on connect drive motors 9, drive motors 9 drives docking door 7 opening and closing, in order to easy to operate, preferably on docking door 7, connect drive motors 9, drive docking door 7 opening and closing by drive motors 9, handled easily.
In the description of this description, specific features, structure, material or feature can combine in an appropriate manner in any one or more embodiment or example.
The above; be only the specific embodiment of the present invention, but protection scope of the present invention is not limited thereto, is anyly familiar with those skilled in the art in the technical scope that the present invention discloses; change can be expected easily or replace, all should be encompassed within protection scope of the present invention.Therefore, protection scope of the present invention should be as the criterion with the protection domain of described claim.
Claims (8)
1. a reative cell clearing apparatus, is characterized in that, comprising:
Housing, is provided with vacuum space in described housing, and the sidewall of described housing is provided with docking door;
Adsorbent winding up roller, described adsorbent winding up roller is arranged in described vacuum space, and described adsorbent winding up roller comprises rotating shaft and is sheathed on the adsorbent volume in described rotating shaft, and described adsorbent volume can static electrification;
Fixed mount, described fixed mount is arranged in described vacuum space, and the initiating terminal of described adsorbent volume is fixed on described fixed mount;
First driving mechanism, described first driving mechanism is connected with described rotating shaft, and described adsorbent winding up roller can be driven to move relative to described fixed mount;
Described first driving mechanism comprises gear, tooth bar, the first linking arm, the second linking arm and the first cylinder, the piston rod of described first cylinder is fixedly connected with described tooth bar, described gear is meshed with described tooth bar, described gear is fixed on described fixed mount by gear rotating shaft, one end of described first linking arm is fixedly connected with described gear, one end of the other end and described second linking arm is hinged, and the other end of described second linking arm is fixedly connected with described rotating shaft;
Second driving mechanism, described second driving mechanism is connected with described fixed mount, and described fixed mount and described adsorbent winding up roller entirety can be driven to move along the first linear reciprocation, and described docking door is positioned on described first straight line;
Electrostatic generator, described electrostatic generator is rolled up with described adsorbent and is connected.
2. reative cell clearing apparatus according to claim 1, is characterized in that, described first cylinder is arranged at described hull outside, and the piston rod of described first cylinder is fixedly connected with described tooth bar through after the sidewall of described housing.
3. reative cell clearing apparatus according to claim 1 and 2, is characterized in that, is provided with back-moving spring between described first linking arm and the second linking arm.
4. reative cell clearing apparatus according to claim 1, is characterized in that, described second driving mechanism comprises the second cylinder, and the piston rod of described second cylinder is fixedly connected with described fixed mount.
5. reative cell clearing apparatus according to claim 4, is characterized in that, described second cylinder is arranged at described hull outside, and the piston rod of described second cylinder is fixedly connected with described fixed mount through after the sidewall of described housing.
6. reative cell clearing apparatus according to claim 1, is characterized in that, described adsorbent volume is made up of rubber.
7. reative cell clearing apparatus according to claim 1, is characterized in that, described electrostatic generator can send positive charge and negative electrical charge.
8. reative cell clearing apparatus according to claim 1, is characterized in that, described docking door is connected with drive motors, and described drive motors can drive docking door opening and closing.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410313221.4A CN104148333B (en) | 2014-07-02 | 2014-07-02 | A kind of reative cell clearing apparatus |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410313221.4A CN104148333B (en) | 2014-07-02 | 2014-07-02 | A kind of reative cell clearing apparatus |
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| Publication Number | Publication Date |
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| CN104148333A CN104148333A (en) | 2014-11-19 |
| CN104148333B true CN104148333B (en) | 2016-04-13 |
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| CN201410313221.4A Expired - Fee Related CN104148333B (en) | 2014-07-02 | 2014-07-02 | A kind of reative cell clearing apparatus |
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| CN112452956B (en) * | 2020-12-04 | 2022-02-25 | 成祖斌 | Dust and net removing equipment for livestock and poultry house |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1595237A (en) * | 2004-06-18 | 2005-03-16 | 友达光电股份有限公司 | Particle clearing device |
| CN1695195A (en) * | 2002-12-17 | 2005-11-09 | 富士通株式会社 | Disc cleaner |
| CN201266289Y (en) * | 2008-10-10 | 2009-07-01 | 北京京东方光电科技有限公司 | Cleaning assembly |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2799852B2 (en) * | 1996-03-29 | 1998-09-21 | 中部電力株式会社 | Removal method of foreign matter from waste rock wool insulation |
| CA2460542A1 (en) * | 2004-03-10 | 2005-09-10 | Kevin Hallett | Cleaning tanks |
| TWI483789B (en) * | 2009-03-23 | 2015-05-11 | Bando Chemical Ind | Clean system |
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2014
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Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1695195A (en) * | 2002-12-17 | 2005-11-09 | 富士通株式会社 | Disc cleaner |
| CN1595237A (en) * | 2004-06-18 | 2005-03-16 | 友达光电股份有限公司 | Particle clearing device |
| CN201266289Y (en) * | 2008-10-10 | 2009-07-01 | 北京京东方光电科技有限公司 | Cleaning assembly |
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