CN203803861U - Automatic dust removal device and coating equipment - Google Patents
Automatic dust removal device and coating equipment Download PDFInfo
- Publication number
- CN203803861U CN203803861U CN201420245819.XU CN201420245819U CN203803861U CN 203803861 U CN203803861 U CN 203803861U CN 201420245819 U CN201420245819 U CN 201420245819U CN 203803861 U CN203803861 U CN 203803861U
- Authority
- CN
- China
- Prior art keywords
- cavity
- battery lead
- removing apparatus
- automatic dust
- lead plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000428 dust Substances 0.000 title claims abstract description 84
- 239000011248 coating agent Substances 0.000 title abstract 2
- 238000000576 coating method Methods 0.000 title abstract 2
- 239000011521 glass Substances 0.000 claims abstract description 35
- 239000000758 substrate Substances 0.000 claims abstract description 35
- 230000005684 electric field Effects 0.000 claims abstract description 29
- 239000008187 granular material Substances 0.000 claims description 45
- 239000007921 spray Substances 0.000 claims description 13
- 238000009413 insulation Methods 0.000 claims description 6
- 230000015572 biosynthetic process Effects 0.000 claims description 3
- 230000001681 protective effect Effects 0.000 claims description 3
- 238000010992 reflux Methods 0.000 claims description 3
- 238000000034 method Methods 0.000 abstract description 12
- 238000004140 cleaning Methods 0.000 abstract description 10
- 239000002245 particle Substances 0.000 abstract description 5
- 238000007599 discharging Methods 0.000 abstract 3
- 239000007789 gas Substances 0.000 description 20
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 16
- 238000006243 chemical reaction Methods 0.000 description 9
- 229910052757 nitrogen Inorganic materials 0.000 description 8
- 238000001816 cooling Methods 0.000 description 5
- 230000000694 effects Effects 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 5
- 239000010409 thin film Substances 0.000 description 5
- 239000001307 helium Substances 0.000 description 3
- 229910052734 helium Inorganic materials 0.000 description 3
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 3
- 230000009286 beneficial effect Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 238000012512 characterization method Methods 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000012937 correction Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 238000007726 management method Methods 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- 239000000376 reactant Substances 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 230000001629 suppression Effects 0.000 description 1
Abstract
The utility model relates to the technical field of display, in particular to an automatic dust removal device and coating equipment. The automatic dust removal device comprises a cavity, an electrode plate, a discharging device and a power device. The cavity is used for converting vacuum and atmosphere on a glass substrate and is provided with an output end discharging gas, and the electrode plate is arranged on the cavity in a sealed manner and is provided with an input end used for allowing the air to enter; the discharging device is arranged corresponding to the input end and is used for allowing dust particles in the cavity to be electrified; two electrodes of the power supply are connected to the electrode plate and the cavity respectively and are used for forming the electric field in the cavity, and the electric field drives the dust particles to move to the output end. The automatic dust removal device is capable of removing the dust particles in the cavity by the electrostatic dust removal method, the glass substrate is prevented from contaminating since the dust particles float in the cavity, and the purpose of automatic cleaning is realized. The system structure is simple, removal is performed completely, practicality is high, and the equipment and the glass substrate are protected from damage.
Description
Technical field
The utility model relates to Display Technique field, relates in particular to a kind of automatic dust removing apparatus and filming equipment.
Background technology
At TFT-LCD, (English name is Thin Film Transistor-Liquid Crystal Display, Chinese is Thin Film Transistor-LCD) in manufacture process, glass substrate need to repeatedly be travelled to and fro between between each relatively independent production equipment to form film crystal array, as vacuum atmosphere converting unit, cooling heating unit and delivery unit etc.In this course due to the dust granules of environmental factor and reaction cavity self ground contamination glass substrate in various degree all, make thin film transistor (TFT) form kinds of processes type as: (English name is Data Gate Short to DGS, Chinese is that gate line and data wire shorten), (English name is Data Common short to DCS, Chinese is that data wire shortens by electrode wires together), (English name is Standard Deviation Remain to SD Remain, Chinese is standard deviation) etc. technique bad, the yield of product is caused to impact to a great extent.
In thin film transistor (TFT) manufacture process, dust granules management and control is the technological standards that we generally emphasize always, wherein mainly comprises dust granules in environment and the dust granules in equipment.For thin film transistor (TFT) filming equipment, because course of reaction need to be carried out under vacuum environment, therefore before entering reaction cavity, glass substrate needs through vacuum and atmosphere converting unit.This unit at present to dust granules processing aspect also in miss status.Because this converting unit need to be interrupted and be carried out the switching of vacuum and atmosphere and the effect that this conversion unit also has cooled glass substrate, so glass substrate reaction rear surface residual gas reactant can form dust granules and pollute this conversion unit when this conversion unit is cooling.
At present, the existing dust suppression of taking is regularly this vacuum and atmosphere converting unit manually to be cleared up.Because this vacuum and atmosphere converting unit relate to the devices such as dry pump that circuit and gas maintain vacuum in addition, therefore cannot utilize liquid cleaner directly to clear up it, can only carry out wiping cleaning to the local surfaces in this conversion unit, remove not thorough; And also need to shut down processing when removing, affected the mobility of equipment.
For above deficiency, need a kind of simple in structurely, can automatically remove the dust granules in vacuum cavity, the automatic dust removing apparatus that clean-up performance thoroughly and not can not damage equipment itself and glass substrate.
Utility model content
(1) technical problem that will solve
The technical problems to be solved in the utility model has been to provide a kind of automatic dust removing apparatus, makes it possible to automatically remove the dust granules in cavity, and clean-up performance thoroughly and not can damage equipment itself and glass substrate.
(2) technical scheme
In order to solve the problems of the technologies described above, the utility model provides a kind of automatic dust removing apparatus, comprising:
Cavity, described cavity is provided with the output that gas is discharged;
Battery lead plate, described battery lead plate is seal-installed on described cavity, and battery lead plate is provided with the input for gas is entered;
Electric discharge device, the setting corresponding to described input of described electric discharge device, for making the dust granules in described cavity charged;
Power supply, the two poles of the earth of described power supply are connected to battery lead plate and cavity, for forming and can drive dust granules to move to the electric field of described output in described cavity.
Wherein, described battery lead plate is positioned at the top of described cavity, the positive and negative electrode of described power supply is connected with the base plate of described battery lead plate, cavity respectively, for forming and can drive dust granules to move to the electric field of described output between the base plate at described battery lead plate, cavity.
Wherein, the base plate of described cavity is provided with the output that gas is discharged.
Wherein, described battery lead plate is installed on the top of described cavity by insulation dottle pin sheet and rubber seal rings for seal, on described battery lead plate, be provided with protective cover.
Wherein, between described input and output, be provided with the orifice plate for preventing that dust granules from refluxing.
Wherein, described orifice plate is provided with a plurality of bellmouths and for the support column of support glass substrate, described bellmouth to be shaped as aperture, one end large, its other end aperture is little.
Wherein, described electric discharge device comprises spray point and the direct current pulse power source being connected with described spray point, described spray point is positioned at input end, for the gas ionization of input end is produced to positive charge, described dust granules is combined with positive charge, and through bellmouth, moves to output under the driving of described electric field.
Wherein, described output is connected with the vavuum pump for cavity is vacuumized by pipeline.
Wherein, described pipeline is provided with vacuum valve.
The utility model also provides a kind of filming equipment, comprises described automatic dust removing apparatus.
(3) beneficial effect
Technique scheme of the present utility model has following beneficial effect: the cavity of the utility model automatic dust removing apparatus carries out vacuum for glass substrate and atmosphere transforms; Cavity is provided with the output that gas is discharged; Battery lead plate is seal-installed on cavity, and battery lead plate is provided with the input for gas is entered; Electric discharge device setting corresponding to input, for making the dust granules in cavity charged; The two poles of the earth of power supply are connected to battery lead plate and cavity, and for form electric field in cavity, electric field driven dust granules moves to output.The Cottrell process of utilizing this automatic dust removing apparatus realizes cleaning dust granules in cavity, by a simple DC electric field, dust granules in cavity is with to electric treatment, can be moved to assigned address at electric field action, avoid dust granules to swim in inside cavity and cause the pollution to glass substrate, realized the object of automated cleaning.This system architecture is simple, and clean-up performance is more thorough, practical, but also can not damage equipment itself and glass substrate, can make inside cavity cleaning more intelligent.
Accompanying drawing explanation
Fig. 1 is the structural representation of the utility model embodiment automatic dust removing apparatus;
Fig. 2 is the stereogram of the utility model embodiment automatic dust removing apparatus;
Fig. 3 is the structural representation of the utility model embodiment orifice plate;
Fig. 4 is the operation principle schematic diagram of the utility model embodiment electric field;
Fig. 5 is the poised state schematic diagram of the utility model embodiment automatic dust removing apparatus.
Wherein, 1: cavity; 2: battery lead plate; 3: electric discharge device; 4: power supply; 5: input; 6: output; 7: dust granules; 8: earth connection; 9: orifice plate; 10: glass substrate; 21: insulation dottle pin sheet; 22: rubber seal; 31: spray point; 32: direct current pulse power source; 91: bellmouth; 92: support column.
The specific embodiment
Below in conjunction with drawings and Examples, embodiment of the present utility model is described in further detail.Following examples are used for illustrating the utility model, but can not be used for limiting scope of the present utility model.
In description of the present utility model, except as otherwise noted, the implication of " a plurality of " is two or more; Term " on ", orientation or the position relationship of the indication such as D score, " left side ", " right side ", " interior ", " outward ", " front end ", " rear end ", " head ", " afterbody " be based on orientation shown in the drawings or position relationship, only the utility model and simplified characterization for convenience of description, rather than indicate or imply that the device of indication or element must have specific orientation, with specific orientation, construct and operation, therefore can not be interpreted as restriction of the present utility model.In addition, term " first ", " second ", " the 3rd " etc. are only for describing object, and can not be interpreted as indication or hint relative importance.
In description of the present utility model, it should be noted that, unless otherwise clearly defined and limited, term " is connected ", " connection " should be interpreted broadly, and for example, can be to be fixedly connected with, and can be also to removably connect, or connects integratedly; Can be mechanical connection, can be to be also electrically connected to; Can be to be directly connected, also can indirectly be connected by intermediary.For the ordinary skill in the art, can concrete condition understand the concrete meaning of above-mentioned term in the utility model.
As shown in Figure 1, the automatic dust removing apparatus described in the present embodiment, comprises cavity 1, battery lead plate 2, electric discharge device 3 and power supply 4, and cavity 1 carries out vacuum for glass substrate 10 and atmosphere transforms; Cavity 1 is provided with the output 6 that gas is discharged; Battery lead plate 2 is seal-installed on cavity 1, and battery lead plate 2 is provided with the input 5 for gas is entered; Electric discharge device 3 setting corresponding to input 5, for making the dust granules 7 in cavity 1 charged; The two poles of the earth of power supply 4 are connected to battery lead plate 2 and cavity 1, and at the interior formation electric field of cavity 1, electric field driven dust granules 7 moves to output 6.
The Cottrell process of utilizing this automatic dust removing apparatus realizes cleaning the interior dust granules 7 of cavity 1.As shown in Figure 4, by add a simple DC electric field in cavity 1, make the dust granules 7 in cavity 1 charged, and be moved to assigned address and discharge at electric field action.Make dust granules 7 can not swim in cavity 1 inside and cause the pollution to glass substrate 10, having realized automated cleaning object.
As shown in Figure 2, battery lead plate 2 is positioned at the top of cavity 1, and the positive and negative electrode of power supply 4 is connected with the base plate of battery lead plate 2, cavity 1 respectively, for forming electric field between the base plate at battery lead plate 2, cavity 1.Wherein input 5 is positioned at the top of cavity 1, mainly passes into nitrogen, and nitrogen enters in the cavity 1 under vacuum state by input 5, also mixes a small amount of helium, for accelerating cooled glass substrate 10 use simultaneously.Passing into nitrogen is a kind of embodiment wherein, not restriction.Can use corresponding gas according to actual conditions, and in gas flow rate relative vacuum pump pumping speed allowed band, gas flow is larger, effect is more obvious.
Wherein, power supply 4 can be dc source, is used to form DC electric field; On battery lead plate 2, with positive electricity, for accelerating positive charge, move.The base plate of cavity 1 is ground connection pole plate, is connected with earth connection 8 on the base plate of cavity 1, thereby makes to form constant electric field between the base plate of battery lead plate 2, cavity 1.This DC electric field intensity can regulate according to actual needs, is not subject to concrete restriction.When passing into high voltage direct current, its size is a kilovolt unit value, therefore need to above battery lead plate 2, set up protective cover.
And battery lead plate 2 can be seal-installed on by insulation dottle pin sheet 21 and rubber seal 22 top of cavity 1.Insulation dottle pin sheet 21 and rubber seal 22 can play the effect to the insulation of upper bottom crown and sealing.
Electric discharge device 3 comprises spray point 31 and the direct current pulse power source 32 being connected with spray point 31, spray point 31 is positioned at input 5 places, for the gas ionization at input 5 places is produced to positive charge, dust granules 7 is combined with positive charge, and through bellmouth 91, moves to output 6 under the driving of electric field.Spray point 31 makes the gas that input 5 enters form charged ion wind by point discharge principle, thereby makes the dust granules 7 in cavity 1 charged.
As shown in Figure 3, for the charged dust particle 7 that can make to accelerate flows into output 6 smoothly, and prevent that dust granules 7 is attached to electrode surface, also dust granules 7 is entered in cavity 1 when preventing gas backstreaming simultaneously.Between input 5 and output 6, be provided with the orifice plate 9 for preventing that dust granules 7 from refluxing.Preferably, orifice plate 9 is provided with a plurality of bellmouths 91 and for the support column 92 of support glass substrate 10, bellmouth 91 be shaped as class cone shape, its aperture increases gradually from one end to the other end.One end of the small-bore of bellmouth 91 is near output 6, and wide-aperture one end of bellmouth 91, near input 5, effectively prevents the backflow of dust granules 7.
Output 6 can be located on the base plate of cavity 1, for the dust granules by bellmouth 91 7 is discharged.Be specially, output 6 is connected with to the vavuum pump for cavity 1 is vacuumized by pipeline, and on pipeline, be provided with vacuum valve, by vacuum valve, control the connection of pipeline and close.
The utility model also provides a kind of filming equipment, comprises this automatic dust removing apparatus, is also provided with the delivery unit, heating and the cooling unit that for TFT-LCD production process, need and for picking and placeing the vacuum robot of glass substrate in filming equipment.
The course of work of this filming equipment in normal production is: the first step, external vacuum mechanical arm is put into the cavity under atmospheric condition by the glass substrate of not carrying out operation, cavity starts to carry out and vacuumizes, during clamping device can carry out position correction to glass substrate; Second step, reaches after vacuum requirement, and vacuum robot is taken the glass substrate of not carrying out operation away, the glass substrate of carrying out operation is placed in cavity simultaneously; The 3rd step, delivery unit vacuum valve is closed, and stops vacuumizing, and passes into nitrogen simultaneously and mixes a small amount of helium, and this gas also can play the cooling effect to glass substrate when entering cavity, and wherein helium can accelerate the cooling of glass substrate.The 4th step, delivery unit reaches after atmospheric pressure standard, and mechanical arm is taken the glass substrate of carrying out operation away, puts into the glass substrate of not carrying out operation simultaneously, and so forth action.In said process, the upper bottom crown of cavity does not power up, and DC pulse is also closed, and prevents glass substrate to cause electrostatic interference to produce static bad phenomenon, and simultaneously also in order to prevent that dust granules from descending slowly and lightly on glass substrate, this clearing function is in masked state.
The dedusting course of work of this automatic dust removing apparatus is: the first step, and in cavity, under the condition without glass substrate, open dc source and make formation DC electric field in cavity; Second step passes into nitrogen in cavity, opens vacuum valve, makes to keep a certain stable air pressure in cavity, as shown in Figure 5 by regulating the flow of nitrogen to control; The 3rd step, after said flow stable gas pressure, passes into DC pulse to the spray point in cavity, and the nitrogen that spray point makes to pass into input by point discharge is positively charged; The 4th step, now the dust granules in environment also becomes positively charged under the effect of nitrogen, and the dust granules after charged, under DC electric field drives, moves downward along the direction of electric field line; The 5th step, charged dust granules passes through bellmouth, and drains along output, and so far dust removal process finishes.
In sum, the cavity of the utility model automatic dust removing apparatus carries out vacuum and atmosphere conversion for glass substrate; Cavity is provided with the output that gas is discharged; Battery lead plate is seal-installed on cavity, and battery lead plate is provided with the input for gas is entered; Electric discharge device setting corresponding to input, for making the dust granules in cavity charged; The two poles of the earth of power supply are connected to battery lead plate and cavity, and for form electric field in cavity, electric field driven dust granules moves to output.The Cottrell process of utilizing this automatic dust removing apparatus realizes cleaning dust granules in cavity, by a simple DC electric field, dust granules in cavity is with to electric treatment, can be moved to assigned address at electric field action, avoid dust granules to swim in inside cavity and cause the pollution to glass substrate, realized the object of automated cleaning.This system architecture is simple, and clean-up performance is more thorough, practical, but also can not damage equipment itself and glass substrate, can make inside cavity cleaning more intelligent.
Embodiment of the present utility model provides for example with for the purpose of describing, and is not exhaustively or by the utility model to be limited to disclosed form.Many modifications and variations are apparent for the ordinary skill in the art.Selecting and describing embodiment is for better explanation principle of the present utility model and practical application, thereby and makes those of ordinary skill in the art can understand the various embodiment with various modifications that the utility model design is suitable for special-purpose.
Claims (10)
1. an automatic dust removing apparatus, is characterized in that, comprising:
Cavity (1), described cavity (1) is provided with the output (6) that gas is discharged;
Battery lead plate (2), it is upper that described battery lead plate (2) is seal-installed on described cavity (1), and battery lead plate (2) is provided with the input (5) for gas is entered;
Electric discharge device (3), described electric discharge device (3) and the corresponding setting of described input (5), for making the dust granules (7) in described cavity (1) charged;
Power supply (4), the two poles of the earth of described power supply (4) are connected to battery lead plate (2) and cavity (1), for formation in described cavity (1), can drive dust granules (7) to move to the electric field of described output (6).
2. automatic dust removing apparatus according to claim 1, it is characterized in that, described battery lead plate (2) is positioned at the top of described cavity (1), the positive and negative electrode of described power supply (4) is connected with the base plate of described battery lead plate (2), cavity (1) respectively, for forming and can drive dust granules (7) to move to the electric field of described output (6) between the base plate at described battery lead plate (2), cavity (1).
3. automatic dust removing apparatus according to claim 2, is characterized in that, the base plate of described cavity (1) is provided with the output (6) that gas is discharged.
4. automatic dust removing apparatus according to claim 2, it is characterized in that, described battery lead plate (2) is seal-installed on the top of described cavity (1) by insulation dottle pin sheet (21) and rubber seal (22), on described battery lead plate (2), be provided with protective cover.
5. automatic dust removing apparatus according to claim 4, is characterized in that, is provided with the orifice plate (9) for preventing that dust granules (7) from refluxing between described input (5) and output (6).
6. automatic dust removing apparatus according to claim 5, it is characterized in that, described orifice plate (9) is provided with a plurality of bellmouths (91) and for the support column (92) of support glass substrate (10), described bellmouth (91) to be shaped as aperture, one end large, its other end aperture is little.
7. automatic dust removing apparatus according to claim 6, it is characterized in that, described electric discharge device (3) comprises spray point (31) and the direct current pulse power source (32) being connected with described spray point (31), described spray point (31) is positioned at input (5) and locates, for the gas ionization that input (5) is located, produce positive charge, described dust granules (7) is combined with positive charge, and through bellmouth (91), moves to output (6) under the driving of described electric field.
8. automatic dust removing apparatus according to claim 7, is characterized in that, described output (6) is connected with the vavuum pump for cavity (1) is vacuumized by pipeline.
9. automatic dust removing apparatus according to claim 8, is characterized in that, described pipeline is provided with vacuum valve.
10. a filming equipment, is characterized in that, comprises the automatic dust removing apparatus as described in claim 1-9 any one.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420245819.XU CN203803861U (en) | 2014-05-14 | 2014-05-14 | Automatic dust removal device and coating equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420245819.XU CN203803861U (en) | 2014-05-14 | 2014-05-14 | Automatic dust removal device and coating equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203803861U true CN203803861U (en) | 2014-09-03 |
Family
ID=51442672
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201420245819.XU Expired - Lifetime CN203803861U (en) | 2014-05-14 | 2014-05-14 | Automatic dust removal device and coating equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN203803861U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105448667A (en) * | 2015-12-23 | 2016-03-30 | 苏州工业园区纳米产业技术研究院有限公司 | Wafer surface smudge cleaning method |
| CN109926714A (en) * | 2017-12-19 | 2019-06-25 | 海太半导体（无锡）有限公司 | Laser marking machine automated cleaning control system |
| CN113384983A (en) * | 2021-06-15 | 2021-09-14 | 孙会廷 | Steel smelting waste gas environmental protection processing system |
-
2014
- 2014-05-14 CN CN201420245819.XU patent/CN203803861U/en not_active Expired - Lifetime
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105448667A (en) * | 2015-12-23 | 2016-03-30 | 苏州工业园区纳米产业技术研究院有限公司 | Wafer surface smudge cleaning method |
| CN109926714A (en) * | 2017-12-19 | 2019-06-25 | 海太半导体（无锡）有限公司 | Laser marking machine automated cleaning control system |
| CN113384983A (en) * | 2021-06-15 | 2021-09-14 | 孙会廷 | Steel smelting waste gas environmental protection processing system |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN203803861U (en) | Automatic dust removal device and coating equipment | |
| CN102254764B (en) | Bearing device of component | |
| CN104092433A (en) | Cleaning device for solar photovoltaic cell assemblies | |
| CN105185734A (en) | Wafer wet etching cleaning device | |
| CN105514172B (en) | A kind of low-voltage transparent oxide film transistor and preparation method thereof | |
| CN101927244B (en) | Device for automatically cleaning glass chips on liquid crystal display surface and at line ends | |
| CN102740578B (en) | Static electricity eliminating device and cartridge | |
| JP4456665B2 (en) | Static elimination system | |
| CN104003145A (en) | Feeding and discharging equipment and track cleaning method thereof | |
| CN105720562A (en) | Agricultural spraying unmanned aerial vehicle based on internet of things | |
| CN104661420A (en) | Static electricity eliminating device | |
| CN104526347A (en) | O/C automatic online equipment applied to module screen | |
| CN103406233B (en) | A kind of panel glue spreading apparatus | |
| CN210105407U (en) | Communication base station with protection and dust removal functions | |
| CN204834563U (en) | Dry etching device | |
| CN207936364U (en) | A kind of mobile purification house system made for 500kV extra large cable connectors | |
| CN215734975U (en) | Destaticizing equipment for laser surface treatment | |
| CN208853364U (en) | A kind of valve cleaning equipment | |
| CN203448343U (en) | Silica powder clearing device for work rest | |
| CN203534191U (en) | Mechanism for lifting and overturning furnace cover of reacting furnace | |
| CN201755573U (en) | Device for automatically cleaning chips of glass on surface of liquid crystal display and at line terminals | |
| CN103406314B (en) | Method and device for cleaning silicon powder of workpiece supports | |
| CN111318509A (en) | Bubbling cleaning tank for metal mask plate cleaning system | |
| CN204289413U (en) | Automatic loading and unloading mechanism and automatic material changing mechanism | |
| CN105245187A (en) | Method and test device for monitoring solar cell piece anti-PID performance |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant |