CN103406314B - Method and device for cleaning silicon powder of workpiece supports - Google Patents
Method and device for cleaning silicon powder of workpiece supports Download PDFInfo
- Publication number
- CN103406314B CN103406314B CN201310377180.0A CN201310377180A CN103406314B CN 103406314 B CN103406314 B CN 103406314B CN 201310377180 A CN201310377180 A CN 201310377180A CN 103406314 B CN103406314 B CN 103406314B
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- CN
- China
- Prior art keywords
- work rest
- row
- silica flour
- ionic wind
- belt
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000000034 method Methods 0.000 title claims abstract description 15
- 238000004140 cleaning Methods 0.000 title abstract description 12
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title abstract description 7
- 239000011863 silicon-based powder Substances 0.000 title abstract 5
- 238000007664 blowing Methods 0.000 claims abstract description 32
- 230000033001 locomotion Effects 0.000 claims abstract description 8
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 88
- 235000013312 flour Nutrition 0.000 claims description 44
- 239000000377 silicon dioxide Substances 0.000 claims description 44
- 239000000428 dust Substances 0.000 claims description 13
- 238000010438 heat treatment Methods 0.000 claims description 6
- 239000010408 film Substances 0.000 abstract description 8
- 229910021417 amorphous silicon Inorganic materials 0.000 abstract description 6
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 abstract description 5
- 239000000853 adhesive Substances 0.000 abstract description 4
- 230000001070 adhesive effect Effects 0.000 abstract description 4
- 230000015572 biosynthetic process Effects 0.000 abstract description 3
- 239000010409 thin film Substances 0.000 abstract description 3
- 238000006243 chemical reaction Methods 0.000 abstract description 2
- 230000001680 brushing effect Effects 0.000 abstract 1
- 230000003749 cleanliness Effects 0.000 abstract 1
- 230000000694 effects Effects 0.000 description 12
- 230000005540 biological transmission Effects 0.000 description 5
- 230000008030 elimination Effects 0.000 description 4
- 238000003379 elimination reaction Methods 0.000 description 4
- 239000012528 membrane Substances 0.000 description 4
- 230000009466 transformation Effects 0.000 description 4
- 150000002500 ions Chemical class 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- 239000013078 crystal Substances 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 230000007613 environmental effect Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000006386 neutralization reaction Methods 0.000 description 2
- 238000010926 purge Methods 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- TVEXGJYMHHTVKP-UHFFFAOYSA-N 6-oxabicyclo[3.2.1]oct-3-en-7-one Chemical compound C1C2C(=O)OC1C=CC2 TVEXGJYMHHTVKP-UHFFFAOYSA-N 0.000 description 1
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 1
- 229910000577 Silicon-germanium Inorganic materials 0.000 description 1
- 238000003915 air pollution Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000005137 deposition process Methods 0.000 description 1
- 238000003912 environmental pollution Methods 0.000 description 1
- 239000005431 greenhouse gas Substances 0.000 description 1
- 230000003434 inspiratory effect Effects 0.000 description 1
- 210000002345 respiratory system Anatomy 0.000 description 1
Landscapes
- Cleaning In General (AREA)
- Nozzles For Electric Vacuum Cleaners (AREA)
- Silicon Compounds (AREA)
Abstract
The invention relates to a method and a device for cleaning silicon powder of workpiece supports. A plurality of air blowing nozzles are arranged on a row-shaped ion air nozzle, and the air blowing nozzles are located between every two polar plates of a workpiece support respectively; a high voltage power supply generator inside the row-shaped ion air nozzle ionizes compressed air conveyed inside the row-shaped ion air nozzle to generate positive and negative charges; the compressed air carried with the positive and negative charges blows towards the surface of the polar plates of the workpiece support through the air blowing nozzles to neutralize charges carried by silicon powder adhered to the surface of the polar plates of the workpiece support and to reduce the adhesive force of the silicon powder; a power unit drives the row-shaped ion air nozzle to perform reciprocating motion up and down in a perpendicular direction to blow off the silicon powder on the polar plates of the workpiece support; brush bristles on the surface of the air blowing nozzles are used for brushing and cleaning the surfaces of the polar plates of the workpiece support during the up-and-down motion of the row-shaped ion air nozzle. The cleanliness of the workpiece support is improved, the manpower is saved, the cleaning efficiency is improved, the formation of PECVD (Plasma Enhanced Chemical Vapor Deposition) coated film pinhole through holes can be reduced, and the amorphous silicon thin film conversion efficiency can be improved.
Description
Technical field
The present invention relates to technical field of solar batteries, be specifically related to the work rest silica flour sweep-out method and the scavenge unit that load film substrate in a kind of solar cell.
Background technology
In order to reduce the discharge of environmental pollution, CO2 greenhouse gases, solar energy industry has become the strategic requirement of each country.At present, the product of photovoltaic market is divided into crystal silicon solar batteries and thin-film solar cells, compared with crystal silicon solar batteries, thin-film solar cells have cheap, pollute low, flexibility is high, low light level effect is good, be applicable to the advantage such as large areas use.The Si/SiGe/Si triple stack layers structure of PECVD deposition is the electric layer of hull cell, is responsible for producing photo-generated carrier, directly determines the open-circuit voltage of Si base film battery, short circuit current and conversion efficiency.And the quality of forming film of depositional environment to amorphous silicon film battery in deposition process plays very important effect.Under existing manufacturing condition, work rest for loading amorphous silicon membrane substrate has several electrodes, each electrode has two polar plate spacings, after Si base film has deposited, the inside remaining silica flour very difficult clean, pollution deposit environment, make the pin hole transmission producing white during the amorphous silicon membrane again deposited, not only affect the open-circuit voltage of hull cell, short circuit current, and the back electrode that PVD is deposited and front electrode TCO form short circuit, reduce the transformation efficiency of hull cell.So load the silica flour of the work rest of substrate number directly affects the transformation efficiency of battery.Under existing working condition, the clean of work rest just purges with CDA, edge alcohol wipe, the non-constant of cleaning effect.And the silica flour that CDA purges suspends in atmosphere, not only causes the secondary pollution of work rest, and very easily sucks respiratory tract, work the mischief to human body.
Summary of the invention
The present invention, in order to overcome the deficiency of above technology, provides a kind of cleaning effect excellent and the work rest silica flour sweep-out method of clean environment and scavenge unit.
The present invention overcomes the technical scheme that its technical problem adopts:
This work rest silica flour sweep-out method, comprises the steps:
(1) some blowing nozzles are set in row's shape ionic wind nozzle, and make blowing nozzle lay respectively between every two work rest pole plates; (2) the compressed air ionization in the row's of being transported to shape ionic wind nozzle is produced positive and negative charge by the high voltage source generator arranged in shape ionic wind nozzle; (3) compressed air with positive and negative charge blows to work rest polar board surface by blowing nozzle, by the silica flour of its surface attachment with charging neutrality; (4) power set drive row's shape ionic wind nozzle to move back and forth up and down in the vertical direction, are blown off by the silica flour of work rest polar board surface; (5) by being arranged on the bristle on blowing nozzle surface, realize clearing away work rest polar board surface brush removing in row's shape ionic wind nozzle moves up and down process.
In order to reduce air pollution, be also included in the step that the silica flour blown off is collected by dust arrester that work rest pole plate rear arranged suction head and be connected to suction head by airduct.
In order to better realize silica flour elimination effect, also comprise the step being driven row's shape ionic wind nozzle transverse shifting by power set.
In order to improve silica flour elimination effect, also install PTC heating chip in the row's of being included in shape ionic wind nozzle, realize adding the compressed-air actuated step flow through in hot type shape ionic wind nozzle, compressed-air actuated heating-up temperature is 20-70 DEG C.
This work rest silica flour scavenge unit, comprise N number of work rest pole plate, about two belt wheels arranged I, be paperwrapped in the driving belt on two belt wheels I, be connected to the motor of wherein belt wheel I one end, be installed on the travel(l)ing rest I on belt, be connected to the connection bracket I of travel(l)ing rest I, be installed on connection bracket I head end and be connected to row's shape ionic wind nozzle of compressed air line and N-1 blowing nozzle of the row's of being installed on shape ionic wind nozzle head end, described each blowing nozzle lays respectively between every two work rest pole plates, distance between described two belt wheel I axis is greater than the height of work rest pole plate.
In order to improve transmission accuracy and improve silica flour cleaning effect, above-mentioned motor is servomotor I, and described belt is cog belt I, is provided with PTC heating chip in described row's shape ionic wind nozzle.
Also comprise the suction head being arranged at work rest pole plate rear and the dust arrester being connected to suction head by airduct.
In order to realize blowing nozzle relative to the horizontal movement of work rest pole plate, also comprise the horizontally disposed leading screw for driving pulley I transverse movement, one end of described leading screw is provided with servomotor III.
In order to improve cleaning effect, above-mentioned blowing nozzle outer surface surrounding is provided with bristle.
In order to improve dust arrester pick-up performance, also comprise two horizontally disposed belt wheels II, the cog belt II be paperwrapped on two belt wheels II, the servomotor II being connected to wherein belt wheel belt wheel II one end, the travel(l)ing rest II be installed on cog belt II, be connected to the connection bracket II of travel(l)ing rest II, described dust arrester is installed on the head end of connection bracket II.
The invention has the beneficial effects as follows: utilize the compressed air containing negative ions to flow through the electrically charged neutralization of silica flour at a high speed after work rest pole plate, because this reducing the adhesive force of silica flour, therefore air is utilized to blow and bristle brushes the cleannes that improve work rest, save manpower and improve cleaning efficiency, reduce the formation of PECVD plated film pin hole transmission, reach the object improving amorphous silicon membrane transformation efficiency.
Accompanying drawing explanation
Fig. 1 is structural representation of the present invention;
In figure, 1. servomotor I 2. belt wheel I 3. row shape ionic wind nozzle 4. suction head 5. dust arrester 6. travel(l)ing rest II 7. belt wheel II 8. servomotor II 9. cog belt II 10. connection bracket II 11. work rest pole plate 12. bristle 13. connection bracket I 14. travel(l)ing rest I 15. cog belt I 16. leading screw 17. servomotor III 18. blowing nozzle.
Detailed description of the invention
Below in conjunction with accompanying drawing 1, the present invention will be further described.
This work rest silica flour sweep-out method, comprises the steps:
(1) some blowing nozzles 18 are set in row's shape ionic wind nozzle 3, and make blowing nozzle 18 lay respectively between every two work rest pole plates 11; (2) the compressed air ionization in the row's of being transported to shape ionic wind nozzle 3 is produced positive and negative charge by the high voltage source generator arranged in shape ionic wind nozzle 3; (3) with positive and negative charge compressed air by blowing nozzle 18 blow to work rest pole plate 11 surface, by the silica flour of its surface attachment with charging neutrality; (4) power set drive row's shape ionic wind nozzle 3 to move back and forth up and down in the vertical direction, are blown off by the silica flour on work rest pole plate 11 surface; (5) by being arranged on the bristle 12 on blowing nozzle 18 surface, realize clearing away work rest pole plate 11 surface brush removing in row's shape ionic wind nozzle 3 moves up and down process.Because the compressed air containing negative ions flows through the electrically charged neutralization of silica flour at a high speed after work rest pole plate 11, because this reducing the adhesive force of silica flour, therefore air is utilized to blow and bristle 12 brushes the cleannes that improve work rest, save manpower and improve cleaning efficiency, reduce the formation of PECVD plated film pin hole transmission, reach the object improving amorphous silicon membrane transformation efficiency.
The step that the silica flour blown off is collected by dust arrester 5 that work rest pole plate 11 rear arranged suction head 4 and be connected to suction head 4 by airduct can also be included in.Not only by dust arrester 5 by silica flour absorptive collection, can environmental quality be improved but also secondary pollution that work rest pole plate 11 is caused can be avoided.
The step being driven row's shape ionic wind nozzle 3 transverse shifting by power set can also be comprised.After blowing nozzle 18 moves up and down, at transverse movement certain distance and then move up and down, can cleaning effect be improved, guarantee that the silica flour of attachment on work rest pole plate 11 can be removed completely.
Also install PTC heating chip in the row's of being included in shape ionic wind nozzle 3, realize adding the compressed-air actuated step flow through in hot type shape ionic wind nozzle 3, compressed-air actuated heating-up temperature is 20-70 DEG C.Hot blast effectively can reduce the adhesive force of silica flour, therefore effectively can improve elimination effect.
This work rest silica flour scavenge unit, comprise N number of work rest pole plate 11, about two belt wheels arranged I 2, be paperwrapped in the driving belt on two belt wheels I 2, be connected to the motor of wherein belt wheel I 2 one end, be installed on the travel(l)ing rest I 14 on belt, be connected to the connection bracket I 13 of travel(l)ing rest I 14, be installed on connection bracket I 13 head end and be connected to row's shape ionic wind nozzle 3 of compressed air line and N-1 blowing nozzle 18 of the row's of being installed on shape ionic wind nozzle 3 head end, each blowing nozzle 18 lays respectively between every two work rest pole plates 11, distance between two belt wheel I 2 axis is greater than the height of work rest pole plate 11.Motor driven belts wheel I 2 rotates thus belt is rotated around belt wheel I 2, belt drives connection bracket I 13 to drive row's shape ionic wind nozzle 3 to move up and down by travel(l)ing rest I 14, thus the compressed air with negative ions blown out by blowing nozzle 18 can be made can be evenly blown on each work rest pole plate 11, realize removing object.Motor can be servomotor I 1, and belt can be cog belt I 15, and servomotor I 1 and cog belt I 15 can improve the precision of transmission, ensures the setting accuracy that ionic wind nozzle 3 moves up and down, raises the efficiency.In row's shape ionic wind nozzle 3, PTC heating chip can be installed, add the compressed air that flows through in hot type shape ionic wind nozzle 3 to improve elimination effect.
Can also arrange suction head 4 at work rest pole plate 11 rear, suction head 4 is connected to dust arrester 5 by airduct.The silica flour blown off is collected by suction head 4 by dust arrester 5, namely improves the environmental quality in workshop, avoids the secondary pollution of work rest pole plate 11, silica flour can be reclaimed so that secondary utilizes again, save manufacturing cost.By increasing by two horizontally disposed belt wheels II 7, the cog belt II 9 be paperwrapped on two belt wheels II 7, the servomotor II 8 being connected to wherein belt wheel belt wheel II 7 one end, the travel(l)ing rest II 6 be installed on cog belt II 9, being connected to the connection bracket II 10 of travel(l)ing rest II 6, dust arrester 5 is installed on the head end of connection bracket II 10.Therefore servomotor II 8 rotates thus belt is rotated around belt wheel II 7, cog belt II 9 drives connection bracket II 10 transverse shifting by travel(l)ing rest II 6 thus makes suction head 4 move to the suitable operating distance of distance work rest pole plate 11, and then work, to reach best inspiratory effects.
Also comprise the horizontally disposed leading screw 16 for driving pulley I 2 transverse movement, one end of leading screw 16 is provided with servomotor III 17.Servomotor III 17 rotates thus drives leading screw 16 to rotate, thus make blowing nozzle 18 relative to work rest pole plate 11 traverse feed, after blowing nozzle 18 moves up and down, at traverse feed certain distance, and then move up and down, thus by repeatedly acting on, achieve the removing silica flour at the surperficial noresidue dead angle of work rest pole plate 11.
By arranging bristle 12 in blowing nozzle 18 outer surface surrounding, making blowing nozzle 18 that bristle 12 can be utilized when opposite piece frame pole plate 11 apparent motion to be assisted on surface residual silica flour thoroughly to remove totally, improve cleaning effect.
Claims (10)
1. a work rest silica flour sweep-out method, is characterized in that: comprise the steps:
A) some blowing nozzles (18) are set on row's shape ionic wind nozzle (3), and make blowing nozzle (18) lay respectively between every two work rest pole plates (11);
B) arrange high voltage source generator in shape ionic wind nozzle (3) and the compressed air in the row of being transported to shape ionic wind nozzle (3) is ionized generation positive and negative charge;
C) with positive and negative charge compressed air by blowing nozzle (18) blow to work rest pole plate (11) surface, by the silica flour of its surface attachment with charging neutrality;
D) power set drive row's shape ionic wind nozzle (3) to move back and forth up and down in the vertical direction, are blown off by the silica flour on work rest pole plate (11) surface;
E) by being arranged on the bristle (12) on blowing nozzle (18) surface, realize clearing away work rest pole plate (11) surface brush removing in row's shape ionic wind nozzle (3) moves up and down process.
2. work rest silica flour sweep-out method according to claim 1, is characterized in that: be also included in the step that the silica flour blown off is collected by dust arrester (5) that work rest pole plate (11) rear arranged suction head (4) and be connected to suction head (4) by airduct.
3. work rest silica flour sweep-out method according to claim 1, is characterized in that: also comprise the step being driven row's shape ionic wind nozzle (3) transverse shifting by power set.
4. work rest silica flour sweep-out method according to claim 1, it is characterized in that: also in the row's of being included in shape ionic wind nozzle (3), PTC heating chip is installed, realization adds the compressed-air actuated step flow through in hot type shape ionic wind nozzle (3), and compressed-air actuated heating-up temperature is 20-70 DEG C.
5. one kind realizes the work rest silica flour scavenge unit of work rest silica flour sweep-out method according to claim 1, it is characterized in that: comprise N number of work rest pole plate (11), about two belt wheels arranged I (2), be paperwrapped in the driving belt on two belt wheels I (2), be connected to the motor of wherein belt wheel I (2) one end, be installed on the travel(l)ing rest I (14) on belt, be connected to the connection bracket I (13) of travel(l)ing rest I (14), be installed on connection bracket I (13) head end and be connected to row's shape ionic wind nozzle (3) of compressed air line and N-1 blowing nozzle (18) of the row's of being installed on shape ionic wind nozzle (3) head end, described each blowing nozzle (18) lays respectively between every two work rest pole plates (11), distance between described two belt wheels I (2) axis is greater than the height of work rest pole plate (11).
6. work rest silica flour scavenge unit according to claim 5, is characterized in that: described motor is servomotor I (1), and described belt is cog belt I (15), is provided with PTC heating chip in described row's shape ionic wind nozzle (3).
7. work rest silica flour scavenge unit according to claim 5, is characterized in that: also comprise the suction head (4) being arranged at work rest pole plate (11) rear and the dust arrester (5) being connected to suction head (4) by airduct.
8. work rest silica flour scavenge unit according to claim 5, is characterized in that: also comprise the horizontally disposed leading screw (16) for driving pulley I (2) transverse movement, one end of described leading screw (16) is provided with servomotor III (17).
9. according to the work rest silica flour scavenge unit in claim 5 to 8 described in any one, it is characterized in that: described blowing nozzle (18) outer surface surrounding is provided with bristle (12).
10. work rest silica flour scavenge unit according to claim 7, it is characterized in that: also comprise two horizontally disposed belt wheels II (7), the cog belt II (9) be paperwrapped on two belt wheels II (7), the servomotor II (8) being connected to wherein belt wheel belt wheel II (7) one end, the travel(l)ing rest II (6) be installed on cog belt II (9), be connected to the connection bracket II (10) of travel(l)ing rest II (6), described dust arrester (5) is installed on the head end of connection bracket II (10).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310377180.0A CN103406314B (en) | 2013-08-27 | 2013-08-27 | Method and device for cleaning silicon powder of workpiece supports |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310377180.0A CN103406314B (en) | 2013-08-27 | 2013-08-27 | Method and device for cleaning silicon powder of workpiece supports |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103406314A CN103406314A (en) | 2013-11-27 |
| CN103406314B true CN103406314B (en) | 2015-03-25 |
Family
ID=49599381
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201310377180.0A Expired - Fee Related CN103406314B (en) | 2013-08-27 | 2013-08-27 | Method and device for cleaning silicon powder of workpiece supports |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN103406314B (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106563652B (en) * | 2016-11-04 | 2022-04-19 | 广东技术师范大学 | Controller with cleaning function |
| CN112605055A (en) * | 2020-11-09 | 2021-04-06 | 中广核核电运营有限公司 | Component cleaning device |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6260225A (en) * | 1985-09-10 | 1987-03-16 | Toshiba Ceramics Co Ltd | Cleaning silicon wafer |
| US8449662B2 (en) * | 2010-07-29 | 2013-05-28 | Pioneer Astronuatics | Dust repellent surface coating |
| CN202336453U (en) * | 2011-10-24 | 2012-07-18 | 昆山众汇复合材料有限公司 | Dust absorption device used in silicon coating machine |
| CN202610326U (en) * | 2012-05-22 | 2012-12-19 | 中节能太阳能科技有限公司 | On-line blowing device of plate type plasma enhanced chemical vapor deposition (PECVD) coating of crystalline silicon solar cell |
| CN203448343U (en) * | 2013-08-27 | 2014-02-26 | 山东禹城汉能光伏有限公司 | Silica powder clearing device for work rest |
-
2013
- 2013-08-27 CN CN201310377180.0A patent/CN103406314B/en not_active Expired - Fee Related
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| Publication number | Publication date |
|---|---|
| CN103406314A (en) | 2013-11-27 |
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Owner name: SHANDONG YUCHENG HANERGY THIN FILM SOLAR CO., LTD. Free format text: FORMER NAME: SHANDONG YUCHENG HANERGY PHOTOVOLTAIC CO., LTD. |
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Address after: High tech Zone 251200 Shandong city of Dezhou province Yucheng City revitalization Road hina photovoltaic industrial park Patentee after: SHANDONG YUCHENG HANERGY FILM SOLAR ENERGY CO.,LTD. Address before: High tech Zone 251200 Shandong city of Dezhou province Yucheng City revitalization Road hina photovoltaic industrial park Patentee before: SHANDONG YUCHENG HANERGY PHOTOVOLTAIC Co.,Ltd. |
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Effective date of registration: 20190212 Address after: Room 103, Building 2, Office District, Olympic Village, Chaoyang District, Beijing Patentee after: HANERGY PHOTOVOLTAIC TECHNOLOGY Co.,Ltd. Address before: 251200 Haneng Photovoltaic Industrial Park, Revitalization Avenue, Yucheng High-tech Zone, Dezhou City, Shandong Province Patentee before: SHANDONG YUCHENG HANERGY FILM SOLAR ENERGY CO.,LTD. |
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Effective date of registration: 20190312 Address after: Room 107, Building 2, Olympic Village Street Comprehensive Office District, Chaoyang District, Beijing Patentee after: HANERGY MOBILE ENERGY HOLDING GROUP Co.,Ltd. Address before: Room 103, Building 2, Office District, Olympic Village, Chaoyang District, Beijing Patentee before: HANERGY PHOTOVOLTAIC TECHNOLOGY Co.,Ltd. |
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