CN202610326U - On-line blowing device of plate type plasma enhanced chemical vapor deposition (PECVD) coating of crystalline silicon solar cell - Google Patents
On-line blowing device of plate type plasma enhanced chemical vapor deposition (PECVD) coating of crystalline silicon solar cell Download PDFInfo
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- CN202610326U CN202610326U CN2012202309105U CN201220230910U CN202610326U CN 202610326 U CN202610326 U CN 202610326U CN 2012202309105 U CN2012202309105 U CN 2012202309105U CN 201220230910 U CN201220230910 U CN 201220230910U CN 202610326 U CN202610326 U CN 202610326U
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- air knife
- silicon solar
- blowing device
- plated film
- pecvd
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Abstract
The utility model discloses an on-line blowing device of a plate type PECVD coating of a crystalline silicon solar cell. The on-line blowing device is characterized by comprising a pressure regulating valve (1), a connecting pipe (2) and an air knife (3), the air knife (3) is in a hollow structure and provided with a trapezoid section, the two ends of the connecting pipe (2) are connected with an air source (4) and an air inlet on the lower bottom surface of the air knife (3) respectively, the connecting pipe (2) is provided with the pressure regulating valve (1), a plurality of blowing holes are evenly arranged on the upper bottom surface of the air knife (3), and the width of the upper bottom surface of the air knife (3) is larger than or equal to that of a graphite support plate to be blown. The on-line blowing device solves the problem that silicon nitride dust on coating surfaces is difficult to remove caused by the fact the silicon nitride dust deposited on upper surfaces of silicon chips stains silicon chip coating surfaces during stacking of the silicon chips.
Description
Technical field
The utility model relates to the board-like filming equipment of a kind of crystal silicon solar energy battery PECVD operation, is specifically related to a kind of online blow device of board-like PECVD plated film of crystal silicon solar energy battery.
Background technology
Sun power is paid close attention to by people its utilization as a kind of cleaning, the reproducible energy always.How crystal-silicon solar cell reduces the cost of solar cell as the main flow of present solar cell, raises the efficiency the emphasis that becomes domestic and international crystal silicon solar energy battery research.In the process of producing crystal silicon solar energy battery, the plated film face existed easily and is stained by the silicon nitride dust when silicon chip stacked behind plated film, and the problem that causes plated film face silicon nitride dust to be difficult to remove is not easy to the postorder operation, has increased human cost.
The utility model content
The utility model purpose: the purpose of the utility model is that the plated film face is prone to the problem that stained by dust when better solving that silicon chip stacks behind the plated film, and a kind of conveniently purging system is provided, and is convenient to the postorder operation, practices thrift human cost.
Technical scheme: the online blow device of the board-like PECVD plated film of the described a kind of crystal silicon solar energy battery of the utility model; Comprise pressure regulator valve, connecting pipeline and air knife; Said air knife is a hollow structure; And the cross section is trapezoidal, and the two ends of said connecting pipeline are connected with the inlet mouth of source of the gas and air knife bottom surface respectively, and said pressure regulator valve is arranged on the said connecting pipeline; The upper bottom surface of said air knife evenly is provided with some purging pores, the width of said air knife upper bottom surface with more than or equal to the width of waiting to purge the graphite support plate.
Further, the pore of said air knife upper bottom surface is divided into three rows, and each row evenly arranges, and hole diameter is 0.1cm, and pore is spaced apart 0.3cm.
Further, the length of said air knife and the equal in length of waiting to purge the graphite support plate.
Further, the material of said air knife is a tetrafluoroethylene.
In order to have guaranteed that gas does not receive any pollution in transmission course, said connecting pipeline is 1/2nd inches stainless steel tubes.
This device is under the prerequisite that does not change existing equipment and technology; Behind equipment discharging chamber, air knife is installed, above-mentioned air knife adopts pressurized air to do source of the gas, directly is positioned over the process cavity afterbody; Wait to purge directly over the outlet of graphite support plate, pore purges direction and waits that purging the graphite support plate becomes 45 ° of angles.
The utility model compared with prior art, its beneficial effect is: 1, solved the silicon nitride dust that is deposited on the silicon chip upper surface and when silicon chip stacks, stained silicon chip film-coated, the problem that causes plated film face silicon nitride dust to be difficult to remove; 2, this blow device is installed simply, need not existing equipment is changed conserve space; 3, this blow device is a source of the gas with pressurized air, need not the independent installation transfer line, can be directly and the pneumatic line of miscellaneous equipment shared; 4, unique air knife pore design makes sweeping gas form stable, uniform airflow, and the silicon chip on PECVD support plate and the support plate is purged, and removes its surperficial silicon nitride dust, prevents owing to dust pollutes, scratches silicon chip surface.
Description of drawings
Fig. 1 is the structural representation of the utility model.
Fig. 2 is the structural representation of said air knife.
Embodiment
Be elaborated in the face of the utility model technical scheme down, but the protection domain of the utility model is not limited to said embodiment.
Be illustrated in figure 1 as a kind of online blow device of board-like PECVD plated film of crystal silicon solar energy battery, comprise pressure regulator valve 1, connecting pipeline 2 and air knife 3, said air knife 3 adopts tetrafluoroethylene to be made; Said connecting pipeline 2 is 1/2nd inches stainless steel tubes, has ensured the resistance to air loss of blow device and the stability of source of the gas output, and said air knife 3 is a hollow structure; And the cross section is trapezoidal; The two ends of said connecting pipeline 2 are connected with the inlet mouth of source of the gas 4 and air knife 3 bottom surfaces respectively, and said pressure regulator valve 1 is arranged on the said connecting pipeline 2, and pressure regulator valve 1 adjustable gets into the compressed air pressure of blow device; Preventing that pressure is too small can not remove the silicon nitride dust that drops on support plate and the silicon chip; And silicon chip is damaged or displacement, and the upper bottom surface of said air knife 3 evenly is provided with three rows and purges pores, and hole diameter is 0.1cm; Pore is spaced apart 0.3cm; Guarantee that pressurized air forms even, stable air-flow, prevent because the inhomogeneous fragment that causes of air-flow, fin, the width and the length of said air knife 3 upper bottom surfaces and wait to purge the width and the equal in length of graphite support plate.
Silicon chip spreads out of from the blanking chamber through behind the plated film; Spread out of the position at it this blow device is installed, said air knife 3 is installed on 10-20cm place directly over the outlet of graphite support plate, air knife 3 and graphite support plate keeping parallelism; Pore purges direction and becomes 45 ° with graphite support plate direct of travel; Fixing and the equipment exit with this blow device, compressed-air actuated delivery port links to each other with connecting pipeline 2, and gas is delivered to air knife 3 through pressure regulator valve 1; Gas evenly blows to the graphite support plate through air knife 3, reaches the purpose of in the transmission course of graphite support plate, removing its surperficial silicon nitride dust.
As stated, although represented and explained the utility model that with reference to specific preferred embodiment it shall not be construed as the restriction to the utility model self.Under the spirit and scope prerequisite of the utility model that does not break away from the accompanying claims definition, can make various variations in form with on the details to it.
Claims (5)
1. the online blow device of the board-like PECVD plated film of a crystal silicon solar energy battery; It is characterized in that; Comprise pressure regulator valve (1), connecting pipeline (2) and air knife (3), said air knife (3) is a hollow structure, and the cross section is trapezoidal; The two ends of said connecting pipeline (2) are connected with the inlet mouth of source of the gas (4) and said air knife (3) bottom surface respectively; Said pressure regulator valve (1) is arranged on the said connecting pipeline (2), and the upper bottom surface of said air knife (3) evenly is provided with some purging pores, and the width of said air knife (3) upper bottom surface is more than or equal to the width of waiting to purge the graphite support plate.
2. the online blow device of the board-like PECVD plated film of crystal silicon solar energy battery according to claim 1 is characterized in that, the purging pore of said air knife (3) upper bottom surface evenly is divided into three rows, and hole diameter is 0.1cm, and pore is spaced apart 0.3cm.
3. the online blow device of the board-like PECVD plated film of crystal silicon solar energy battery according to claim 1 is characterized in that, the length of said air knife (3) and the equal in length of waiting to purge the graphite support plate.
4. the online blow device of the board-like PECVD plated film of crystal silicon solar energy battery according to claim 1 is characterized in that, the material of said air knife (3) is a tetrafluoroethylene.
5. the online blow device of the board-like PECVD plated film of crystal silicon solar energy battery according to claim 1 is characterized in that, said connecting pipeline (2) is 1/2nd inches stainless steel tubes.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2012202309105U CN202610326U (en) | 2012-05-22 | 2012-05-22 | On-line blowing device of plate type plasma enhanced chemical vapor deposition (PECVD) coating of crystalline silicon solar cell |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2012202309105U CN202610326U (en) | 2012-05-22 | 2012-05-22 | On-line blowing device of plate type plasma enhanced chemical vapor deposition (PECVD) coating of crystalline silicon solar cell |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202610326U true CN202610326U (en) | 2012-12-19 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2012202309105U Expired - Lifetime CN202610326U (en) | 2012-05-22 | 2012-05-22 | On-line blowing device of plate type plasma enhanced chemical vapor deposition (PECVD) coating of crystalline silicon solar cell |
Country Status (1)
| Country | Link |
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| CN (1) | CN202610326U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103406314A (en) * | 2013-08-27 | 2013-11-27 | 山东禹城汉能光伏有限公司 | Method and device for cleaning silicon powder of workpiece supports |
| CN104561929A (en) * | 2015-01-08 | 2015-04-29 | 厦门市三安光电科技有限公司 | MOCVD (Metal Organic Chemical Vapor Deposition) reaction system |
| CN113369238A (en) * | 2020-02-25 | 2021-09-10 | 上海神力科技有限公司 | Method and device for cleaning graphite bipolar plate |
-
2012
- 2012-05-22 CN CN2012202309105U patent/CN202610326U/en not_active Expired - Lifetime
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103406314A (en) * | 2013-08-27 | 2013-11-27 | 山东禹城汉能光伏有限公司 | Method and device for cleaning silicon powder of workpiece supports |
| CN104561929A (en) * | 2015-01-08 | 2015-04-29 | 厦门市三安光电科技有限公司 | MOCVD (Metal Organic Chemical Vapor Deposition) reaction system |
| CN104561929B (en) * | 2015-01-08 | 2017-04-19 | 厦门市三安光电科技有限公司 | MOCVD (Metal Organic Chemical Vapor Deposition) reaction system |
| CN113369238A (en) * | 2020-02-25 | 2021-09-10 | 上海神力科技有限公司 | Method and device for cleaning graphite bipolar plate |
| CN113369238B (en) * | 2020-02-25 | 2022-09-16 | 上海神力科技有限公司 | Method and device for cleaning graphite bipolar plate |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| EE01 | Entry into force of recordation of patent licensing contract |
Assignee: CECEP SOLAR ENERGY TECHNOLOGY (ZHENJIANG) CO., LTD. Assignor: CECEP Solar Energy Technology Co., Ltd. Contract record no.: 2014990000106 Denomination of utility model: On-line blowing device of plate type plasma enhanced chemical vapor deposition (PECVD) coating of crystalline silicon solar cell Granted publication date: 20121219 License type: Common License Record date: 20140304 |
|
| LICC | Enforcement, change and cancellation of record of contracts on the licence for exploitation of a patent or utility model | ||
| C56 | Change in the name or address of the patentee |
Owner name: CECEP SOLAR ENERGY TECHNOLOGY CO., LTD. Free format text: FORMER NAME: CECEP SOLAR ENERGY TECHNOLOGY CO., LTD. |
|
| CP01 | Change in the name or title of a patent holder |
Address after: 100041, No. 1, building No. 3, West well road, Badachu hi tech park, Beijing, Shijingshan District Patentee after: Cecep Solar Energy Technology Co., Ltd. Address before: 100041, No. 1, building No. 3, West well road, Badachu hi tech park, Beijing, Shijingshan District Patentee before: CECEP Solar Energy Technology Co., Ltd. |
|
| C56 | Change in the name or address of the patentee | ||
| CP01 | Change in the name or title of a patent holder |
Address after: 100041, No. 1, building No. 3, West well road, Badachu hi tech park, Beijing, Shijingshan District Patentee after: CECEP Solar Energy Technology Co., Ltd. Address before: 100041, No. 1, building No. 3, West well road, Badachu hi tech park, Beijing, Shijingshan District Patentee before: Cecep Solar Energy Technology Co., Ltd. |
|
| CX01 | Expiry of patent term | ||
| CX01 | Expiry of patent term |
Granted publication date: 20121219 |