CN205556777U - PECVD filming equipment - Google Patents
PECVD filming equipment Download PDFInfo
- Publication number
- CN205556777U CN205556777U CN201620334861.8U CN201620334861U CN205556777U CN 205556777 U CN205556777 U CN 205556777U CN 201620334861 U CN201620334861 U CN 201620334861U CN 205556777 U CN205556777 U CN 205556777U
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- CN
- China
- Prior art keywords
- controller
- reative cell
- cooling chamber
- transporter
- electrically connected
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Abstract
The utility model discloses a PECVD filming equipment, including reacting chamber, conveyer and cooling chamber, reacting chamber and conveyer set up at the cooling chamber top, reacting chamber and conveyer connecting portion bottom are connected with the baffle through the articulated elements, cooling chamber one side is provided with the controller, the cooling chamber top is provided with cooling device, the reacting chamber top is fixed with the vacuum pump through the pipeline, the vacuum pump export is provided with the vacuum valve, the inside top of reacting chamber is provided with temperature sensor, the inside upper end of reacting chamber is fixed with the heating element, the inboard bottom of reacting chamber is provided with special air pipe, special air pipe bottom conveyer top is provided with the graphite boat, the inside square hole that is provided with of graphite boat. This product simple structure, it is with low costs, convenient operation, the multiunit concurrent operation, the reaction is even, saves the step, reduces the process time, improves work efficiency.
Description
Technical field
This utility model belongs to PECVD coating technique field, is specifically related to a kind of PECVD filming equipment.
Background technology
PECVD is equipment more common in solar battery sheet production process.PECVD know-why is to utilize low temperature plasma to make energy source, sample is placed under low pressure on the negative electrode of glow discharge, glow discharge (or separately adding heater) is utilized to make sample be warmed up to predetermined temperature, then pass to appropriate reacting gas, gas is through series of chemical and plasma reaction, form solid film at sample surfaces, play the effect of antireflective and passivation.It is long to there is productive temp in current PECVD technology, and production cost is too high, and uniformity and concordance are poor.
Utility model content
The purpose of this utility model is to provide a kind of PECVD filming equipment, with the problem solving to propose in above-mentioned background technology.
nullFor achieving the above object，This utility model following technical scheme of offer: a kind of PECVD filming equipment，Including reative cell、Transporter and cooling chamber，Described reative cell and transporter are arranged on cooling chamber top，Described reative cell and transporter connecting portion bottom are connected by articulated elements baffle plate，Described cooling chamber side is provided with controller，Described controller is electrically connected with transporter，Described cooling chamber top is provided with chiller，Described chiller is electrically connected with controller，Described reactor top is fixed with vacuum pump by pipeline，Described vacuum pump outlet is provided with vacuum valve，Described vacuum valve is electrically connected with controller，Described reative cell inner tip is provided with temperature sensor，Described temperature sensor is electrically connected with controller，Described reative cell inner upper end is fixed with heating element，Described heating element is electrically connected with controller，Described reative cell inner lower edge is provided with special air pipe，Described special transporter top, air pipe bottom is provided with graphite boat，Described graphite boat is internally provided with square hole.
Preferably, described special air pipe is provided with the special pore of many groups, and the quantity such as special pore is corresponding with square hole.
Preferably, described square hole is at least provided with 15 groups.
Preferably, described controller is provided with display；Described display surface is provided with light-emitting diode display.
nullTechnique effect of the present utility model and advantage: this PECVD filming equipment，The position precipitated in entering reative cell by transporter after having loaded silicon chip in the square hole of graphite boat，Controller controls vacuum valve and by vacuum pump, the air extraction in reative cell is gone，Then it is passed through NH3 by special air pipe，Special pore is distributed to NH3 on the silicon chip in each square hole uniformly，Controller controls heating element heating，Temperature sensor shows the temperature in reative cell on the controller，Thus facilitate the control and regulation of temperature，React rear graphite boat to enter inside cooling chamber through baffle plate，Controller controls chiller refrigeration，Save the process time，Thus improve work efficiency，This product structure is simple，Low cost，Easy to operate，Many groups operate simultaneously，Reaction is uniformly，Save step，Reduce the process time，Improve work efficiency.
Accompanying drawing explanation
Fig. 1 is structural representation of the present utility model.
In figure: 1 graphite boat, 2 square holes, 3 special air pipe, 4 heating elements, 5 temperature sensors, 6 vacuum valves, 7 vacuum pumps, 8 reative cells, 9 transporters, 10 baffle plates, 11 cooling chambers, 12 chillers, 13 controllers.
Detailed description of the invention
Below in conjunction with the accompanying drawing in this utility model embodiment, the technical scheme in this utility model embodiment is clearly and completely described, it is clear that described embodiment is only a part of embodiment of this utility model rather than whole embodiments.Based on the embodiment in this utility model, the every other embodiment that those of ordinary skill in the art are obtained under not making creative work premise, broadly fall into the scope of this utility model protection.
This utility model provides a kind of PECVD filming equipment as shown in Figure 1, including reative cell 8, transporter 9 and cooling chamber 11, described reative cell 8 and transporter 9 are arranged on cooling chamber 11 top, described reative cell 8 and transporter 9 connecting portion bottom are connected by articulated elements baffle plate 10, described cooling chamber 11 side is provided with controller 13, described controller 13 is electrically connected with transporter 9, and described controller (13) is provided with display；nullDescribed display surface is provided with light-emitting diode display，Described cooling chamber 11 top is provided with chiller 12，Described chiller 12 is electrically connected with controller 13，Described reative cell 8 top is fixed with vacuum pump 7 by pipeline，The outlet of described vacuum pump 7 is provided with vacuum valve 6，Described vacuum valve 6 is electrically connected with controller 13，Described reative cell 8 inner tip is provided with temperature sensor 5，Described temperature sensor 5 is electrically connected with controller 13，Described reative cell 8 inner upper end is fixed with heating element 4，Described heating element 4 is electrically connected with controller 13，Described reative cell 8 inner lower edge is provided with special air pipe 3，Described special transporter 9 top, air pipe 3 bottom is provided with graphite boat 1，Described graphite boat 1 is internally provided with square hole 2，Described square hole 2 is at least provided with 15 groups，The special pore of many groups it is provided with on described special air pipe 3，And the quantity such as special pore is corresponding with square hole 2，This PECVD filming equipment，The position deposited in entering reative cell 8 by transporter 9 after having loaded silicon chip in the square hole 2 of graphite boat 1，Controller 13 controls vacuum valve 6 to be allowed the air in 7 reative cells 8 of vacuum pump extract out to go，Then it is passed through NH3 by special air pipe 3，Special pore is distributed to NH3 on the silicon chip in each square hole 2 uniformly，Controller 13 controls heating element 4 and heats，Temperature in 5 reative cells 8 of temperature sensor shows on controller 13，Thus facilitate the control and regulation of temperature，React rear graphite boat 1 and enter cooling chamber 11 inside through baffle plate 10，Controller 13 controls chiller 12 and freezes，Save the process time，Thus improve work efficiency，This product structure is simple，Low cost，Easy to operate，Many groups operate simultaneously，Reaction is uniformly，Save step，Reduce the process time，Improve work efficiency.
Last it is noted that the foregoing is only preferred embodiment of the present utility model; it is not limited to this utility model; although this utility model being described in detail with reference to previous embodiment; for a person skilled in the art; technical scheme described in foregoing embodiments still can be modified by it; or wherein portion of techniques feature is carried out equivalent; all within spirit of the present utility model and principle; the any modification, equivalent substitution and improvement etc. made, within should be included in protection domain of the present utility model.
Claims (4)
- null1. a PECVD filming equipment，Including reative cell (8)、Transporter (9) and cooling chamber (11)，Described reative cell (8) and transporter (9) are arranged on cooling chamber (11) top，It is characterized in that: described reative cell (8) and transporter (9) connecting portion bottom are connected by articulated elements baffle plate (10)，Described cooling chamber (11) side is provided with controller (13)，Described controller (13) is electrically connected with transporter (9)，Described cooling chamber (11) top is provided with chiller (12)，Described chiller (12) is electrically connected with controller (13)，Described reative cell (8) top is fixed with vacuum pump (7) by pipeline，Described vacuum pump (7) outlet is provided with vacuum valve (6)，Described vacuum valve (6) is electrically connected with controller (13)，Described reative cell (8) inner tip is provided with temperature sensor (5)，Described temperature sensor (5) is electrically connected with controller (13)，Described reative cell (8) inner upper end is fixed with heating element (4)，Described heating element (4) is electrically connected with controller (13)，Described reative cell (8) inner lower edge is provided with special air pipe (3)，Described special transporter (9) top, air pipe (3) bottom is provided with graphite boat (1)，Described graphite boat (1) is internally provided with square hole (2).
- A kind of PECVD filming equipment the most according to claim 1, it is characterised in that: it is provided with the special pore of many groups on described special air pipe (3), and the quantity such as special pore is corresponding with square hole (2).
- A kind of PECVD filming equipment the most according to claim 1, it is characterised in that: described square hole (2) is at least provided with 15 groups.
- A kind of PECVD filming equipment the most according to claim 1, it is characterised in that: described controller (13) is provided with display；Described display surface is provided with light-emitting diode display.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620334861.8U CN205556777U (en) | 2016-04-19 | 2016-04-19 | PECVD filming equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620334861.8U CN205556777U (en) | 2016-04-19 | 2016-04-19 | PECVD filming equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN205556777U true CN205556777U (en) | 2016-09-07 |
Family
ID=56808794
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201620334861.8U Expired - Fee Related CN205556777U (en) | 2016-04-19 | 2016-04-19 | PECVD filming equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN205556777U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106756884A (en) * | 2016-12-13 | 2017-05-31 | 温州海旭科技有限公司 | A kind of PECVD coating apparatus |
| CN111599894A (en) * | 2020-05-29 | 2020-08-28 | 苏州拓升智能装备有限公司 | Double-graphite-boat cache cooling device suitable for TOPCon battery |
-
2016
- 2016-04-19 CN CN201620334861.8U patent/CN205556777U/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106756884A (en) * | 2016-12-13 | 2017-05-31 | 温州海旭科技有限公司 | A kind of PECVD coating apparatus |
| CN106756884B (en) * | 2016-12-13 | 2018-10-23 | 温州海旭科技有限公司 | A kind of PECVD coating apparatus |
| CN111599894A (en) * | 2020-05-29 | 2020-08-28 | 苏州拓升智能装备有限公司 | Double-graphite-boat cache cooling device suitable for TOPCon battery |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20160907 Termination date: 20210419 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |