CN202461054U - Graphite boat dry type cleaning machine - Google Patents
Graphite boat dry type cleaning machine Download PDFInfo
- Publication number
- CN202461054U CN202461054U CN2011204651840U CN201120465184U CN202461054U CN 202461054 U CN202461054 U CN 202461054U CN 2011204651840 U CN2011204651840 U CN 2011204651840U CN 201120465184 U CN201120465184 U CN 201120465184U CN 202461054 U CN202461054 U CN 202461054U
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- graphite boat
- reaction chamber
- graphite
- cleaning machine
- dry type
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Abstract
The utility model relates to a device for maintaining production equipment of crystalline silicon solar cells and particularly provides a graphite boat dry type cleaning machine. The graphite boat dry type cleaning machine contains a reaction cavity, wherein a graphite boat or a graphite frame can be arranged inside the reaction cavity. The inlet of the reaction cavity is connected with an NF3 gas source through an air inlet pipe, while the outlet of the reaction cavity is connected with a dry type vacuum pump through an exhaust pipe. The air inlet pipe is provided with a plasma generator. According to the utility model, silicon nitride on the surface of a graphite boat can be removed through the plasma nitride reaction. The graphite boat dry type cleaning machine has the advantages of good cleaning effect, simple structure, easy manufacture, convenient operation and high cleaning efficiency. Compared with the traditional wet groove type cleaning method, a graphite boat does not need to be split during the above cleaning process, while no extra drying is required. Therefore, the cleaning efficiency is high and the mechanical damage to the graphite boat is avoided.
Description
Technical field
The utility model relates to a kind of device that is used for the plant maintenance of silicon wafer manufacture of solar cells, specifically is a kind of graphite boat dry-cleaning machine.
Background technology
In the crystal silicon solar batteries production process, the silicon nitride antireflective coating depositing operation of a key is arranged.In this silicon nitride antireflective coating deposition process, the carrier of crystal silicon battery sheet is graphite boat or graphite frame.Generally in art production process, graphite boat also can be deposited to silicon nitride film, and (generally greater than 10um) need do clean to graphite boat after certain thickness.At present the conventional clean method that generally adopts of industry is to use HF/HCl mixed liquor wet method groove type to clean, and is about to graphite boat and is immersed in the groove that has HF/HCl 4-8 hour, uses the clear water rinsing again, high temperature oven baking oven dry in 4-8 hour again.This method wants to clean up fully; The soak time that must be long and the HF/HCl of higher concentration need split graphite boat simultaneously and come, to have avoided the cleaning dead angle; After having cleaned; Also must could the aqueous vapor on the graphite boat be got rid of through long hyperthermia drying (400 degree, 4-8 hour).Thereby there is following shortcoming in it: 1, cleaning efficiency is on the low side, length consuming time; 2, use the HF/HCl of high concentration, have certain danger; 3, need to split graphite boat, have the risk of extra mechanical damage.
Summary of the invention
The utility model technical problem to be solved is, provide a kind of simple in structure, cleaning efficiency is high, cleaning performance good, do not grasp the graphite boat dry-cleaning machine of damage equipment.
The utility model a scheme be: this graphite boat dry-cleaning machine includes the reaction chamber that graphite boat or graphite frame can be settled in an inside; The inlet of reaction chamber is connected with the NF3 gas source through air inlet pipe, and the outlet of reaction chamber is connected with dry vacuum pump through blast pipe; On the said air inlet pipe plasma generator is installed.
The utility model another scheme be: this graphite boat dry-cleaning machine includes the reaction chamber that graphite boat or graphite frame can be settled in an inside; The inlet of reaction chamber is connected with the NF3 gas source through air inlet pipe, and the outlet of reaction chamber is connected with dry vacuum pump through blast pipe; Reaction chamber is outside equipped with radio-frequency signal generator, and the extraction electrode of radio-frequency signal generator is connected on the graphite boat or graphite frame in the reaction chamber.
In above-mentioned two schemes, the porch of reaction chamber also can be provided with even flow plate, so that the air-flow more even distribution that gets into improves cleaning performance.
The silicon nitride on graphite boat surface is removed in the reaction that the utility model can utilize plasma silicon nitride, and not only cleaning performance is good, and manufacturing simple in structure, easy to operate, cleaning efficiency is high; Compare with the cleaning of traditional wet slot type, need not graphite boat be split in the cleaning process, oven dry that need not be extra, efficient Gao Bingneng avoids the mechanical damage of graphite boat.
Description of drawings
Fig. 1 is the structural representation of an embodiment of the utility model;
Fig. 2 is the structural representation of another embodiment of the utility model.
The specific embodiment
Among the embodiment shown in Figure 1; The graphite boat dry-cleaning machine includes the reaction chamber 1 that graphite boat or graphite frame can be settled in an inside; The inlet of reaction chamber is connected with the NF3 gas source through air inlet pipe 2; The reaction chamber porch also is provided with even flow plate 3, and the outlet of reaction chamber is connected with dry vacuum pump 4 through blast pipe; Plasma generator 5 is installed on the said air inlet pipe.
Among the embodiment shown in Figure 2; This graphite boat dry-cleaning machine includes the reaction chamber 1 that graphite boat or graphite frame can be settled in an inside; The inlet of reaction chamber is connected with the NF3 gas source through air inlet pipe 2; The reaction chamber porch also is provided with even flow plate 3, and the outlet of reaction chamber is connected with dry vacuum pump 4 through blast pipe; Reaction chamber is outside equipped with radio-frequency signal generator 6, and the extraction electrode of radio-frequency signal generator is connected on the graphite boat or graphite frame in the reaction chamber.
Claims (4)
1. graphite boat dry-cleaning machine; It is characterized in that: it includes the reaction chamber (1) that graphite boat or graphite frame can be settled in an inside; The inlet of reaction chamber is connected with NF (3) gas source through air inlet pipe (2), and the outlet of reaction chamber is connected with dry vacuum pump (4) through blast pipe; Plasma generator (5) is installed on the said air inlet pipe.
2. graphite boat dry-cleaning machine according to claim 1 is characterized in that: the reaction chamber porch is provided with even flow plate (3).
3. graphite boat dry-cleaning machine; It is characterized in that: it includes the reaction chamber (1) that graphite boat or graphite frame can be settled in an inside; The inlet of reaction chamber is connected with the NF3 gas source through air inlet pipe (2), and the outlet of reaction chamber is connected with dry vacuum pump (4) through blast pipe; Reaction chamber is outside equipped with radio-frequency signal generator (6), and the extraction electrode of radio-frequency signal generator is connected on the graphite boat or graphite frame in the reaction chamber.
4. graphite boat dry-cleaning machine according to claim 3 is characterized in that: the reaction chamber porch also is provided with even flow plate (3).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011204651840U CN202461054U (en) | 2011-11-22 | 2011-11-22 | Graphite boat dry type cleaning machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011204651840U CN202461054U (en) | 2011-11-22 | 2011-11-22 | Graphite boat dry type cleaning machine |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202461054U true CN202461054U (en) | 2012-10-03 |
Family
ID=46909252
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2011204651840U Expired - Fee Related CN202461054U (en) | 2011-11-22 | 2011-11-22 | Graphite boat dry type cleaning machine |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202461054U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102397859A (en) * | 2011-11-22 | 2012-04-04 | 镇江大全太阳能有限公司 | Graphite boat (frame) dry-type cleaning machine |
| CN104399724A (en) * | 2014-12-05 | 2015-03-11 | 株洲硬质合金集团有限公司 | Boat cleaning machine |
| CN111229736A (en) * | 2020-01-20 | 2020-06-05 | 山东伟基炭科技有限公司 | Cleaning method of graphite boat for manufacturing solar cell |
-
2011
- 2011-11-22 CN CN2011204651840U patent/CN202461054U/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102397859A (en) * | 2011-11-22 | 2012-04-04 | 镇江大全太阳能有限公司 | Graphite boat (frame) dry-type cleaning machine |
| CN104399724A (en) * | 2014-12-05 | 2015-03-11 | 株洲硬质合金集团有限公司 | Boat cleaning machine |
| CN104399724B (en) * | 2014-12-05 | 2016-01-06 | 株洲硬质合金集团有限公司 | Boat descaling machine |
| CN111229736A (en) * | 2020-01-20 | 2020-06-05 | 山东伟基炭科技有限公司 | Cleaning method of graphite boat for manufacturing solar cell |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20121003 Termination date: 20201122 |