TWI725171B - Cleaning device - Google Patents

Abstract

The present invention provides a cleaning device that is excellent in maintainability and can remove fine foreign matter more reliably. The present invention is a cleaning device that removes foreign matter on the surface while conveying a plate-shaped or film-shaped object. The cleaning device is characterized by comprising a front side brush roller unit, which is detachably arranged above the conveyed object, The front side brush roller is used to remove foreign matter on the front surface of the object; and a front side cleaning roller unit is detachably arranged above the object and on the downstream side in the conveying direction of the front side brush roller unit, and uses the front side The cleaning roller removes foreign matter on the front surface of the object. It is preferable to provide a height adjustment mechanism for adjusting the height of each of the front side brush roller unit and the front side brush roller unit.

Description

Cleaning device

The present invention relates to a cleaning device.

In recent years, a cleaning device has been developed to remove glass substrates or resin substrates attached to flat panel displays (Flat Panel Display, FPD), or printed substrates for mounting electronic parts, or to form laminated ceramics Foreign matter such as dust on the surface of an object such as a ceramic green sheet, a resin sheet, or a long film.

As such a cleaning device, for example, a cleaning device is proposed that uses a charged brush to remove foreign matter on the surface of an object, and uses electric field force to transport and recover the removed foreign matter by a cleaning roller (refer to Japan Patent Publication No. 2011-92846).

However, in the conventional cleaning device, the charged brush or the cleaning roller is usually fixed in the frame of the device. Therefore, the device must be disassembled during the maintenance of the device, and there is a problem in terms of maintainability. In addition, a cleaning device equipped with a charged brush can remove relatively large foreign objects in millimeter size by the charged brush, but there is a part where the charged brush does not contact the surface of the object, and the foreign matter existing on the non-contact part cannot be removed (especially Fine foreign matter). [Prior Art Document] [Patent Document]

[Patent Document 1] Japanese Patent Laid-Open No. 2011-92846

[Problem to be Solved by the Invention] The present invention is based on the above situation, and its object is to provide a cleaning device that is excellent in maintainability and can remove fine foreign matter more reliably. [Means to solve the problem]

The invention made to solve the above-mentioned problems is a cleaning device that removes foreign matter on the surface while conveying a plate-shaped or film-shaped object. The cleaning device is characterized in that it includes a front-side brush roller unit and is detachably arranged on the conveyed object. Above the object, the front side brush roller is used to remove foreign matter on the front side surface of the object; and a front side cleaning roller unit is detachably arranged above the object and conveys the front side brush roller unit Toward the downstream side, and use a front side cleaning roller to remove foreign matter on the front side surface of the object.

In this cleaning device, the front side brush roller and the front side cleaning roller that remove foreign matter on the front surface of the object are separately unitized and detachably arranged, whereby the front side brush roller unit and the front side cleaning roller unit can be easily removed. Therefore, the maintenance of each component of the cleaning device is easy to perform.

In addition, the cleaning device is equipped with a front side brush roller and a front side cleaning roller above the object to remove foreign objects from the front surface of the object, thereby not only removing relatively large millimeter-sized foreign objects from the front surface of the object, but also Can remove fine foreign matter. That is, the cleaning device can scrape and remove relatively large foreign matter of millimeter size from the front surface of the object by the front brush roller, and can adsorb and remove the fine particles from the front surface of the object by the front cleaning roller. foreign body. In this way, the cleaning device can remove foreign matter of various sizes or materials generated in the manufacturing steps of FPDs, semiconductors, and the like, and therefore, compared with the previous cleaning devices, the cleaning characteristics are exceptionally excellent.

The cleaning device preferably includes a height adjustment mechanism for adjusting the height of each of the front side brush roller unit and the front side cleaning roller unit. In this way, by including the height adjustment mechanism of the cleaning device, the pressure contact amount of the front side brush roller or the pressing force (nip width) of the front side cleaning roller to the object can be adjusted. Thereby, the removal of relatively large foreign matter by the front side brush roller and the removal of fine foreign matter by the front side cleaning roller can be performed efficiently. In particular, since the front side brush roller unit and the front side cleaning roller unit are removable, independent height adjustment mechanisms can be installed in each unit to adjust the height of each unit. Therefore, even if the optimal pressure contact conditions between the front brush roller and the object are different from the optimal pressure contact conditions between the front cleaning roller and the object, the independent height adjustment mechanism can be used to separately adjust the pressure to the object. The crimping conditions are optimized.

The front side brush roller unit is preferably provided with: the front side brush roller, in a direction that is reversed with respect to the conveying direction, is driven to rotate by a rotating shaft that is substantially perpendicular to the conveying direction and substantially parallel to the conveying surface; It is arranged so as to be substantially parallel to and in contact with the front side brush roller; and the first blade abuts on the surface of the first recovery roller and removes adhered foreign matter. In such a front-side brush roller unit, the front-side brush roller is driven to rotate in a direction reversed with respect to the conveying direction, thereby scraping and effectively removing foreign matter attached to the front surface of the object, especially millimeter-sized ones. A relatively large foreign body. In addition, after the relatively large foreign matter removed from the object by the front side brush roller is attached to the first recovery roller, it can be removed by the first blade. Therefore, the possibility that foreign matter removed from the front surface of the object will continue to adhere to the front brush roller can be reduced, and the front brush roller can be maintained in a clean state. As a result, it is possible to more effectively remove relatively large foreign matter from the front surface of the object by the front brush roller.

The front-side brush roller unit preferably includes a conveying roller having a rotating shaft that is substantially perpendicular to the conveying direction and substantially parallel to the conveying surface. The conveying roller is arranged on the upstream side of the conveying direction of the front-side brush roller and assists the removal of the object. Transport. By providing such a conveying roller, the object can be guided and conveyed smoothly.

The front side brush roller unit is preferably provided with a first foreign matter recovery part on the upstream side in the conveying direction of the front side brush roller, and the first foreign matter recovery part accommodates at least the foreign matter removed by the first blade. By providing such a first foreign matter recovery part, it is possible to recover the foreign matter scraped from the first recovery roller by the first blade from scattering in the unit while being recovered. In addition, by arranging the first foreign matter recovery section on the upstream side of the front brush roller in the conveying direction, the first foreign matter recovery section can be drawn out toward the upstream side of the conveying direction, and the recovered foreign matter in the first foreign matter recovery section can be easily taken out. Foreign body.

The front side cleaning roller unit is preferably provided with: the front side cleaning roller, in a forward rotation direction relative to the conveying direction, is driven to rotate by a rotating shaft that is substantially perpendicular to the conveying direction and substantially parallel to the conveying surface; The front-side cleaning roller is arranged in a substantially parallel and abutting manner, and is driven to rotate in a direction reversed with respect to the front-side cleaning roller; the second recovery roller is arranged in a substantially parallel and abutting manner with the brush roller; and The 2 blades abut on the surface of the second recovery roller and remove adhering foreign matter. In this type of front side cleaning roller unit, after the fine foreign matter removed from the front surface of the object by the front side cleaning roller is transported to the second recovery roller via the brush roller, it can be scraped by the second blade And remove. Therefore, it is possible to reduce the possibility that the foreign matter removed from the front surface of the object will continue to adhere to the front cleaning roller, and the front cleaning roller can be maintained in a clean state. As a result, it is possible to more effectively remove relatively large foreign matter from the front surface of the object by the front cleaning roller.

The front side cleaning roller unit preferably includes a second foreign matter recovery part on the downstream side in the conveying direction of the front side cleaning roller, and the second foreign matter recovery part accommodates at least the foreign matter removed by the second blade. With this, it is possible to recover the foreign matter scraped from the second recovery roller by the second blade from scattering in the unit while being recovered. In addition, by arranging the second foreign matter recovery section on the downstream side of the front cleaning roller in the conveying direction, the second foreign matter recovery section can be drawn out toward the downstream side of the conveying direction, and the foreign matter recovered in the second foreign matter recovery section can be removed. Easy.

The cleaning device preferably includes a back-facing roller unit, the back-facing roller unit including: a first back-facing roller, corresponding to the front side brush roller of the front side brush roller unit and provided below the object; and The second back side facing roller is provided below the object corresponding to the front side cleaning roller of the front side cleaning roller unit. By having such a back side facing roller unit, the object can be transported accurately by the first back side facing roller, and the front side can be used more efficiently by the second back side facing roller. Removal of fine foreign matter from the cleaning roller.

The back side facing roller unit preferably includes an auxiliary roller that is provided on the upstream side in the conveying direction of the first back side facing roller and assists the conveyance of the object. In this way, by providing the auxiliary roller, when the object is carried into the front side brush roller unit, the auxiliary roller can guide the object and convey it accurately. As a result, it is possible to suppress damage to the front side cleaning roller due to the contact of the front end portion of the object, or poor transport of the object, and the like.

The cleaning device preferably includes a back-side brush roller unit arranged below the object and on the downstream side in the conveying direction of the back-side facing roller unit, and uses the back-side brush roller to remove the back surface of the object. Foreign matter; a backside cleaning roller unit, arranged below the object and on the downstream side of the conveying direction of the backside brush roller unit, and using the backside cleaning roller to remove foreign objects on the backside surface of the object; and removable The front-side facing roller unit arranged on the ground includes a first front-side facing roller, which is provided above the object corresponding to the back-side brush roller of the back-side brush roller unit, and a second front-side facing roller, corresponding to The back side cleaning roller of the back side cleaning roller unit is provided above the object. In this way, by providing the back side cleaning roller unit and the back side brush roller unit, foreign matter on the back side surface of the object can be removed. In addition, with the front-side facing roller unit, the object can be transported more accurately by the first front-side facing roller, and the back-side cleaning roller can be efficiently used by the second front-side facing roller. The removal of fine foreign matter. Furthermore, by making the front-side facing roller unit detachable, it can be removed during maintenance. As a result, the back-side brush roller unit and the back-side cleaning roller unit can be easily maintained, especially the back-side brush roller. And the maintenance of the backside cleaning roller.

In addition, in the description of the direction of rotation of each roller in this specification, the case of rotating in the direction of rotation relative to the direction of movement of the object or other rollers is referred to as "rotating in the forward direction", and vice versa. "Rotate in the reverse direction." In addition, the term "substantially perpendicular" means that the crossing angle with respect to the vertical line is within ±10°, and it may be perpendicular. Furthermore, "substantially parallel" means that the acute angle of the angle formed by two straight lines exceeds 0° and is within 10°, or is parallel. In this manual, the "front side" and "back side" of the object are only for convenience of distinction, and do not necessarily correspond to the front side and the back side when the object is used. [Effects of the invention]

The invention can improve the maintainability of the device, and can remove not only relatively large foreign matter with a millimeter size, but also fine foreign matter.

Hereinafter, an example of the cleaning device of the present invention will be described in detail while referring to the drawings as appropriate. Of course, the specific configuration and details of the present invention can be appropriately changed within the scope of utilizing the essence of the present invention.

<Cleaning Device> The cleaning device shown in FIGS. 1 and 2 conveys a flat object S in the conveying direction D and removes foreign matter on the surface (front surface S1 and back surface S2). This cleaning device mainly includes a holder 1, an external transport mechanism (upstream side external transport mechanism 2A and downstream side external transport mechanism 2B), and a cleaning mechanism 3.

[Object] The object S is a plate-shaped member in FIG. 2, but it is not particularly limited as long as it is a plate-shaped or film-shaped member. Specifically, the surface of the object may be flat as shown in FIG. 2, but there may be depressions. Furthermore, holes etc. may exist in the object.

Examples of the plate-shaped object include glass substrates or resin substrates of FPD, printed circuit boards for mounting electronic components, ceramic green sheets for forming multilayer ceramic capacitors, or resin sheets. As a film-like object, a resin film etc. are mentioned, for example.

The average thickness of the object is not particularly limited, but as the lower limit, it is preferably 30 μm, more preferably 50 μm. If the average thickness of the object is less than the lower limit, it may be difficult to convey the object. On the other hand, the upper limit of the average thickness of the object is, for example, 5 mm.

[Fixer] The fixer 1 holds the cleaning mechanism 3. The holder 1 is formed by connecting a pair of opposed plate-shaped members 10 with a plurality of rods 11 and shafts 12.

[External transport mechanism] The external transport mechanism is a device that imparts propelling force for transport to the object S, and is provided outside the cleaning mechanism 3. This external transport mechanism has an upstream external transport mechanism 2A arranged on the upstream side of the cleaning mechanism 3 in the transport direction, and a downstream external transport mechanism 2B placed on the downstream side of the cleaning mechanism 3 in the transport direction. The conveying speed of the object S by the external conveying mechanism is not particularly limited as long as it is a range in which foreign matters can be removed from the object S by the cleaning mechanism 3. The lower limit of the conveyance speed of the object S is preferably 5 m/min, and more preferably 10 m/min. On the other hand, as the upper limit of the conveyance speed of the object S, 30 m/min is preferable, and 20 m/min is more preferable. If the conveyance speed of the object S is less than the lower limit, the time required for the removal of the foreign matter will increase, and the removal efficiency of the foreign matter may decrease. Conversely, if the conveyance speed of the object S exceeds the upper limit, the cleaning mechanism 3 may not be able to sufficiently remove foreign matters on the surface of the object S.

<Upstream-side external transport mechanism> The upstream-side external transport mechanism 2A transports the object S into the cleaning mechanism 3, and has a plurality of belt transport parts 20A. The belt conveying section 20A is formed by winding an endless belt 22A between a pair of rollers 21A spaced apart along the conveying direction D. Among the pair of rollers 21A, one is a drive roller to which a rotational force is applied, and the other is a driven roller that rotates together with the endless belt 22A by the rotation of the drive roller. The plurality of tape conveying parts 20A are arranged at fixed intervals in a horizontal direction (hereinafter, also referred to as "transport width direction") orthogonal to the conveying direction D.

<Downstream External Transport Mechanism> The downstream external transport mechanism 2B carries out the object S from the cleaning mechanism 3, and has a plurality of belt transport parts 20B. The tape conveying section 20B has the same configuration as the plurality of tape conveying sections 20A of the upstream-side external conveying mechanism 2A. That is, the plurality of belt conveying parts 20B are formed by winding the endless belt 22B between a pair of rollers 21B including a driving roller and a driven roller, which are spaced apart along the conveying direction D. The several tape conveyance part 20B is also arrange|positioned in the conveyance width direction at fixed intervals.

[Cleaning Mechanism] The cleaning mechanism 3 is a mechanism capable of cleaning both the front side surface S1 and the back side surface S2 of the object S, and includes a front side cleaning mechanism 3A and a back side cleaning mechanism 3B.

<Front side cleaning mechanism> The front side cleaning mechanism 3A is a unit that removes foreign matter on the front side surface S1 of the object S to be conveyed. The front side cleaning mechanism 3A has a front side brush roller unit 4, a front side cleaning roller unit 5, and a back side facing roller unit 6. In this cleaning device, the front side brush roller unit 4 and the front side cleaning roller unit 5 are detachably mounted on a holder 1 provided on a base of a floor of a factory or the like. The holder 1 can be fixed to the base by a fixing tool such as a screw, but it is preferably placed in a movable state without using a fixing tool. The front side brush roller unit 4 and the front side cleaning roller unit 5 are arranged above the object S to be conveyed (above the conveyance path), and are detachably held on the holder 1.

[Front Side Brush Roller Unit] The front side brush roller unit 4 is a unit that removes foreign matter on the front surface S1 of the object S using the brush roller 41 housed in the frame body 40, and is suitable for removing relatively large foreign matter of a millimeter size. In the frame 40 of the front-side brush roller unit 4, in addition to the brush roller 41, the recovery roller 42, the blade 43, the foreign matter recovery portion 44, and the conveyance roller 45 are housed, and the whole is unitized. In this way, by detachably unitizing the front side brush roller unit 4 on the holder 1, the front side brush roller unit 4 can be easily removed from the holder 1. As a result, when it is necessary to replace the brush roller 41 according to the type of the object S or the foreign matter, the brush roller 41 can be replaced together with the unit, so that the foreign matter can be easily and effectively removed. In addition, by removing the front-side brush roller unit 4 from the holder 1, the facing metal roller 60 described later facing the brush roller 41 can be exposed and can be easily replaced or cleaned. Therefore, it is excellent in maintainability. Moreover, regarding the brush roller 41 etc. accommodated in the frame 40, compared with the case where it is assembled and fixed to the holder 1, maintenance becomes easy.

(Frame body) The frame body 40 accommodates the brush roller 41 and the like, is unitized, and can be attached to and detached from the holder 1. The frame body 40 includes: an upstream plate and a downstream plate, which are arranged to face each other in a manner substantially perpendicular to the conveying surface; a pair of side plates, which connect the side ends of the upstream plate and the downstream plate to each other; and a top plate, which is connected to the upstream plate and the downstream plate. The upper end of the plate and the pair of side plates; and the bottom plate, which are connected to the lower end of the upstream plate, the downstream plate, and the pair of side plates. A pair of grips 40A partitioned in the width direction are provided in the top plate. The pair of grips 40A is a user when the front side brush roller unit 4 is attached or detached. An opening 40B is provided in the bottom plate, and the tip of the bristles 41C of the brush roller 41 described later protrudes from the opening 40B. In addition, as a material which comprises the frame body 40, there is no restriction|limiting in particular, For example, stainless steel etc. are mentioned.

(Brush roller) The brush roller 41 is a front-side brush roller that abuts on the conveyed object S and removes foreign matter on the front surface S1, particularly relatively large foreign matter (for example, a foreign matter of a millimeter size). When the brush roller 41 is in a charged state, by the power from an external drive source, in a direction reversed with respect to the conveying direction D (clockwise rotation direction in FIG. 2), the brush roller 41 is substantially perpendicular to the conveying direction D and is substantially perpendicular to the conveying direction D. Rotation is driven by a rotating shaft whose surfaces are approximately parallel. Furthermore, the brush roller 41 is preferably driven to rotate in a reversed direction with respect to the conveying direction D in a charged state, but it may also be driven to rotate in a non-charged state, or in a forward rotation with respect to the conveying direction D. Rotate in the direction of the drive.

As shown in Fig. 3, such a brush roller 41 has a cylindrical core rod 41A and a plurality of bristles 41C implanted on the outer peripheral surface of the core rod 41A via an adhesive layer 41B.

The core rod 41A is formed of a conductive material such as metal, carbon material, synthetic resin composite material, or the like. The upper limit of the volume resistivity of the conductive material is, for example, 10 ⁵ Ωcm. A voltage is applied to the core rod 41A by a voltage application mechanism such as an external power supply described later. In addition, compared with the cleaning roller 51 of the front-side cleaning roller unit 5 described later, the voltage applied to the core rod 41A is set to have the same polarity and the absolute value becomes larger.

As the lower limit of the voltage applied to the core rod 41A, -800V is preferable, and -600V is more preferable. On the other hand, as the upper limit of the voltage, -200 V is preferable, and -300 V is more preferable.

As the bristles 41C, those that are easily attached to foreign matter physically are preferable, and examples thereof include those made of synthetic resin fibers. In addition, as the bristles 41C, it is preferable to have a charge for adsorbing foreign matter attached to the surface S1 of the object S. For example, conductive materials containing carbon black, carbon fiber, metal powder, metal whiskers, etc. can be suitably used. Material made of synthetic resin fiber.

The cross-sectional shape of the bristles 41C is not particularly limited, and examples thereof include a circular shape, an elliptical shape, and a star shape. In addition, the outer shape of the bristles 41C is not particularly limited, and examples thereof include a linear shape, a wavy line shape, a shape formed by combining a curve and a straight line, and the like. Furthermore, the larger the surface area of the bristles 41C, the easier it is to adsorb foreign matter. Therefore, as the bristles 41C, a cross-sectional shape that can secure a large surface area is a strange shape, for example, a star shape.

The brush roller 41 is driven to rotate so as to be reversed with respect to the conveying direction D of the object S, thereby scraping the adhering foreign objects on the front surface S1 of the object S and making it adhere to the bristles 41C. In addition, by applying a voltage to the brush roller 41 to charge it, the attraction force generated by the electric field force can be exerted, and the foreign matter on the front surface S1 of the object S can be effectively attracted to the bristles 41C. In particular, by electrifying the brush roller 41, even when there are holes or depressions on the surface of the object S, the foreign objects in the holes or depressions can be efficiently removed. Furthermore, by applying a voltage in the aforementioned range to the core rod 41A, relatively large foreign matter can be more effectively attracted to the brush roller 41 from the front surface S1 of the object S.

Furthermore, the brush roller 41 of the front-side brush roller unit 4 has bristles 41C, rotates in a direction reverse to the conveying direction D, and is applied with a voltage having the same polarity and a larger absolute value than the cleaning roller 51. A relatively large foreign matter on the order of millimeters is removed from the front surface S1 of the object S.

The lower limit of the average pressure contact amount of the brush roller 41 toward the object S is preferably 0.3 mm, and more preferably 0.5 mm. On the other hand, as the upper limit of the average crimping amount, it is preferably 1.5 mm, more preferably 1 mm. If the average pressure-bonding amount is less than the lower limit, the foreign matter on the front surface S1 of the object S may not be sufficiently scraped. Conversely, if the average crimping amount exceeds the upper limit, the resistance between the bristles 41C and the front surface S1 of the object S increases, so the conveying speed of the object S may decrease, and the object may be damaged. The front side surface of S is concerned with S1. In addition, "the amount of crimping" is the sinking amount of the bristles 41 into the object S, and refers to the value obtained by subtracting the minimum distance between the surface of the core rod 41A and the front surface S1 of the object S from the average length of the bristles 41C .

The lower limit of the peripheral speed of the brush roller 41 is preferably 1 m/min, and more preferably 2 m/min. On the other hand, as the upper limit of the peripheral speed of the brush roller 41, 30 m/min is preferable, and 15 m/min is more preferable. If the peripheral speed of the brush roller 41 is less than the lower limit, the foreign matter on the front surface S1 of the object S may not be sufficiently scraped. Conversely, if the peripheral speed of the brush roller 41 exceeds the upper limit, the resistance between the bristles 41C and the front surface S1 of the object S increases, so the conveying speed of the object S may decrease, and the object S may also be present. The surface S1 of the surface side may be damaged. In addition, the upper limit of the ratio (B/W) of the peripheral speed B of the brush roller 41 to the conveying speed W of the object S is preferably 25%. If the peripheral speed B of the brush roller 41 is too high with respect to the conveying speed W of the object S, it may be difficult to scrape relatively large foreign objects by the brush roller 41.

(Recovery Roller) The recovery roller 42 is a first recovery roller that is substantially parallel to the brush roller 41 and abuts on the bristles 41C, and collects foreign substances attached to the bristles 41C. The recovery roller 42 has a diameter smaller than that of the brush roller 41 and is arranged above the brush roller 41 and on the upstream side of the brush roller 41 in the conveying direction. With such an arrangement, it is possible to reduce adverse effects such as the reattachment of foreign matter scraped by the blade 43 described later to members such as the recovery roller 42 and the like.

As shown in FIG. 4, the recovery roller 42 includes a roller body 42A formed of a conductive material, and a corrosion-resistant layer 42B laminated on the outer peripheral surface of the roller body 42A. The material of the roller body 42A is not particularly limited as long as it is a conductive material. Examples include metallic materials such as stainless steel, copper, and aluminum, or conductive resins prepared by blending conductive materials such as conductive fillers into synthetic resins. Among these materials, metal materials are preferred. As the corrosion-resistant layer 42B, a metal plating layer formed by a plating process such as nickel plating or gold plating can be used. However, as the recovery roller 42, it is also possible to use one that is entirely formed of a conductive material that is difficult to oxidize, such as stainless steel, and does not have the corrosion-resistant layer 42B.

The recovery roller 42 is rotatably driven by power from an external drive source in a reverse direction (clockwise rotation direction in FIG. 2) with respect to the brush roller 41 in a state of being charged by an external power source. In this way, by setting the rotation direction of the recovery roller 42 to a direction reversed with respect to the brush roller 41, the recovery efficiency of foreign matter can be improved. The lower limit of the magnification of the rotation speed of the recovery roller 42 with respect to the rotation speed of the brush roller 41 is preferably 1.0 times. On the other hand, the upper limit of the magnification of the rotation speed is preferably 1.5 times. Thereby, the foreign matter can be effectively moved from the brush roller 41 to the recovery roller 42. However, the rotation direction of the recovery roller 42 may be a direction in which the brush roller 41 rotates normally.

With respect to the voltage applied to the brush roller 41, the voltage applied to the recovery roller 42 has the same polarity and the absolute value becomes higher. The lower limit of the absolute value of the difference between the voltage applied to the recovery roller 42 and the voltage applied to the brush roller 41 is preferably 200 V, and more preferably 300 V. On the other hand, as the upper limit of the absolute value of the difference, 600 V is preferable, and 500 V is more preferable. In addition, the lower limit of the voltage applied to the recovery roller 42 is preferably -1,500 V, and more preferably -1,200 V. On the other hand, as the upper limit of the applied voltage, -400 V is preferable, and -600 V is more preferable. With respect to the voltage applied to the brush roller 41, the voltage applied to the recovery roller 42 has the same polarity and the absolute value becomes higher. The potential of the outer peripheral surface of the recovery roller 42 is relative to the potential of the bristles 41C of the brush roller 41. Since they have the same polarity and the absolute value becomes high, the foreign matter adhering to the brush roller 41 can be adsorbed on the outer peripheral surface of the recovery roller 42. In particular, by setting the difference between the applied voltage of the recovery roller 42 and the brush roller 41 to the above range, and further setting the applied voltage to the recovery roller 42 to the above range, the foreign matter adhering to the brush roller 41 can be made effective. The ground is adsorbed on the outer peripheral surface of the recovery roller 42. The upper limit of the electrical resistance of the recovery roller 42 is preferably 10 ⁸ Ω. By setting the electrical resistance of the recovery roller 42 to 10 ⁸ Ω or less, even when the recovery roller 42 is surface-treated or when a film is formed, it can be effectively charged by the application of a voltage.

(Blade) The blade 43 is the first blade that scrapes and removes foreign substances from the recovery roller 42. The blade 43 is, for example, a rectangular plate-shaped member having elasticity.

In this blade 43, the front end portion is a free end, and the base end portion is fixed to the blade support portion 43a. The tip portion of the blade 43 as a free end abuts on the outer peripheral surface of the recovery roller 42 across the axial direction of the recovery roller 42. The blade 43 preferably abuts on the outer peripheral surface of the recovery roller 42 in an inclined state. At the contact point of the blade 43 and the recovery roller 42, the lower limit of the inclination angle of the imaginary tangent line between the blade 43 and the recovery roller 42 is preferably 5°, more preferably 15°. On the other hand, as the upper limit of the inclination angle, 30° is preferable, and 25° is more preferable. When the angle is less than the lower limit, there is a possibility that the foreign matter cannot be sufficiently scraped off by the blade 43 due to insufficient crimping force, and the foreign matter rubbing the blade 43 may be attached to the object S again. The retransfer phenomenon. On the other hand, when the inclination angle exceeds the upper limit, the blade 43 may be caught in the rotation of the recovery roller 42 and may be curled. Therefore, the blade 43 is made to abut on the recovery roller 42 so that the inclination angle becomes the above-mentioned range, thereby effectively scraping off foreign matter from the recovery roller 42. In addition, the blade 43 is arranged on the upstream side in the conveying direction than the recovery roller 42, that is, above the conveying roller 45. Thereby, the space above the conveyance roller 45 can be effectively utilized, and the front-side brush roller unit 4 can be miniaturized. In addition, it is possible to adopt a configuration in which the later-described foreign matter recovery portion 44 is drawn toward the upstream side in the conveying direction, and convenience is improved.

The material of the blade 43 is not particularly limited, but it is preferably one having elasticity, and more preferably a synthetic resin. Specifically, in order to impart moderate elasticity, it is preferably formed of synthetic resin such as thermosetting polyurethane. In addition, in order to reduce friction with the abutting recovery roller 42, at least the tip of the blade 43 may be coated with a fluorine-containing compound such as a fluorine resin. The lower limit of the average thickness of the fluorine coating is preferably 5 μm. On the other hand, as the upper limit of the average thickness, 15 μm is preferable. If the average thickness is less than the lower limit, the friction reduction effect may not be sufficiently exhibited, and the blade 43 may be easily caught in the rotation of the recovery roller 42. On the other hand, when the average thickness exceeds the upper limit, there is a possibility that the fluorine coating may be damaged. In addition, the shape of the blade 43 is not limited to the rectangular plate shape of FIG. 2, and may be a shape bent or curved from the base end part to the front end part.

(Foreign Material Recovery Unit) The foreign material recovery unit 44 is a first foreign material recovery unit that collects and accommodates the foreign material scraped off from the recovery roller 42 by the blade 43. The foreign matter recovery portion 44 is arranged below the tip portion of the blade 43 and on the upstream side of the brush roller 41 in the conveying direction. In addition, the foreign matter recovery portion 44 is fitted into the opening of the upstream plate of the frame body 40 and can be drawn out from the opening to the upstream side in the conveying direction. A grip portion 44A is provided on the upstream side of the foreign substance collection portion 44, and the foreign substance collection portion 44 is facilitated by the grip portion 44A. In addition, since the foreign matter collection part 44 can be drawn out toward the upstream side in the conveying direction, the front side brush roller unit 4 can be maintained in a fixed state to the holder 1 and the foreign matter can be drawn out to recover the foreign matter, which is excellent in convenience.

(Conveying Roller) The conveying roller 45 is a person who guides the object S carried in the cleaning mechanism 3 together with the auxiliary roller 62 of the back-side facing roller unit 6 described later. In addition, in order to cause the object S to enter under the brush roller 41 reversed with respect to the conveying direction D with an appropriate force, the conveying roller 45 and the auxiliary roller 62 also have a function for applying a propelling force to the object S. The transport roller 45 is arranged to face the auxiliary roller 62 of the back-side facing roller unit 6 described later. The conveyance roller 45 rotates in a forward rotation direction relative to the conveyance direction D (counterclockwise rotation direction in FIG. 2 ). Here, when the force to pinch the object S by the auxiliary roller 62 and the conveying roller 45 is too strong, the foreign object may be pressed against the object S and be difficult to remove, or the object S may be damaged. In consideration of these circumstances, the conveyance roller 45 is arranged so as to press the auxiliary roller 62 with a force of about 0.49 N. However, the pressing force can be appropriately adjusted in consideration of the material, thickness, and the like of the object S. In addition, when the hardness of the object S is relatively high and can be brought under the brush roller 41 only by the auxiliary roller 62, the conveying roller 45 may be omitted from the cleaning device.

As shown in FIGS. 5 and 6, the transport roller 45 includes a core shaft 45A and a plurality of resin portions 45B. The resin portion 45B is a ring-shaped member laminated on the outer circumference of the core shaft 45A and runs along the core shaft 45A. The axial direction is separated configuration. As shown in FIG. 5 and FIG. 6, the resin part 45B has unevenness|corrugation on the outer peripheral surface. In this way, by arranging the plurality of resin portions 45B having irregularities on the outer peripheral surface separately, the contact area between the transport roller 45 and the front surface S1 of the object S can be reduced. As a result, when the object S is carried into the cleaning mechanism 3, the object S can be prevented from clogging between the transport roller 45 and the auxiliary roller 62.

The mandrel 45A is formed of, for example, metal such as stainless steel, copper, or aluminum. The resin part 45B is formed of, for example, polyurethane. As this polyurethane, acrylic mixed urethane, fluorine mixed urethane, etc. are mentioned, for example. Here, "acrylic mixed urethane" is a resin containing polyester polyurethane or polyether polyurethane as the main component, and refers to: (1) Thermoplastic polyurethane A mixture of ester and silicon-acrylic copolymer resin, (2) contains acrylic resin (for example, a graft compound containing methacrylic acid-methyl methacrylate copolymer grafted with aminoethyl group on the main chain) and thermoplastic A mixture of polyurethane, or (3) a mixture containing acrylic resin, polyurethane, and fluorine-based surface coating agent. "Fluorine mixed urethane" is a resin containing polyurethane as the main component, and refers to a mixture of thermoplastic polyurethane and urethane/fluorocopolymer. The "main component" refers to the component with the largest content, for example, a component containing 50% by mass or more.

(Height adjustment mechanism) It is preferable that the front side brush roller unit 4 is comprised so that the height can be adjusted by a height adjustment mechanism. In this way, the height of the front side brush roller unit 4 can be adjusted by the height adjustment mechanism, whereby the amount of pressure of the brush roller 41 to the object S can be adjusted, and the brush roller 41 can be used to more efficiently remove relatively large foreign objects. .

Figures 7-9 show an example of the state where the front side brush roller unit 4 is arranged on the plate-shaped member 10 of the holder 1 via the height adjustment mechanism of the front side brush roller unit 4 (fixer 1, height adjustment mechanism, and front side brush roller The members other than the top plate 103 of the frame body 40 of the unit 4 are not shown in the drawings). The height adjustment mechanism of FIGS. 7-9 mainly includes: a substantially plate-shaped fixing member 101, which is fixed to the plate-shaped member 10 of the holder 1, and a sliding member 102, which is placed on the upper surface of the fixing member 101 and can be moved along It moves horizontally, and moves up and down in the conveying direction D; and the cover 104 covers the fixing member 101. The top plate 103 of the front-side brush roller unit 4 is supported by the sliding member 102 at the end in the longitudinal direction, and moves up and down along with the sliding member 102. In the height adjustment mechanism of FIGS. 7-9, a gauge that is fixed to the plate-shaped member 10 and can measure the vertical position of the sliding member 102, etc., or an adjustment tool for fixing the horizontal position of the sliding member 102 can be further provided . FIG. 7 shows a state adjusted so that the height of the front side brush roller unit 4 becomes the smallest. 8 and 9 show the state adjusted so that the height of the front side brush roller unit 4 becomes the largest.

In a part of the upper surface of the fixing member 101, a slope gradually increasing in height from the vicinity of the approximate center in the conveying direction D to the downstream side (the right side in FIGS. 7 and 8) is formed. On the other hand, the upper surface of the sliding member 102 becomes a substantially horizontal plane, but a slope whose height gradually increases from the vicinity of the substantially center in the conveying direction D to the downstream side is formed in a part of the lower surface. The inclined surface of the upper surface of the fixing member 101 and the inclined surface of the lower surface of the sliding member 102 have the same gradient but butt. Therefore, by horizontally moving the sliding member 102 along the conveying direction D, the upper surface of the sliding member 102 can be maintained in a substantially horizontal state and the height can be raised and lowered. Thereby, the height of the top plate 103 supported by the sliding member 102 (the distance L1 and the distance L2 between the upper surface of the top plate 103 and the upper end of the plate-shaped member 10) can be changed, and the height of the top plate 103 can be changed to roll the front side brush. The unit 4 is adjusted to the desired height.

In the height adjustment mechanism of FIGS. 7-9, the relatively large horizontal movement of the sliding member 102 can be steplessly converted into the relatively fine vertical movement of the top plate 103, so it can correspond to the type of object S or The thickness of the brush roller unit 4 is finely adjusted steplessly. In addition, since the height adjustment mechanism of FIGS. 7 to 9 can be arranged near the upper end of the holder 1, the space of the holder 1 can be effectively utilized, and the workability during height adjustment is excellent.

However, the form or structure of the height adjustment mechanism of the brush roller unit 4 is not limited by FIGS. 7-9. As other height adjustment methods, for example, a method of arranging a spacer of a predetermined height on the fixed portion of the brush roller unit 4 in the holder 1, or providing a protrusion on the front side brush roller unit 4, and A method in which a rail-shaped member fitted with the protruding portion is arranged on the holder 1 in the vertical direction, and the mounting height of the front side brush roller unit 4 can be adjusted steplessly.

[Front side cleaning roller unit] The front side cleaning roller unit 5 is a unit that removes foreign matter on the front side surface S1 of the object S by the cleaning roller 51 housed in the housing 50. In the housing 50 of the front side cleaning roller unit 5, in addition to the cleaning roller 51, the brush roller 52, the recovery roller 53, the blade 54 and the foreign matter recovery part 55 are mainly housed, and the whole is unitized. The front side cleaning roller unit 5 is suitable for removing fine foreign matter smaller than a millimeter, and is detachably arranged on the holder 1 at a position adjacent to the downstream side in the conveying direction than the front side brush roller unit 4. Here, the cleaning roller 51 is set to apply pressure from both surfaces of the object S together with the opposing resin roller 61 described later in order to effectively move the fine foreign matter on the surface thereof. Therefore, if the front side cleaning roller unit 5 is arranged on the upstream side of the front side brush roller unit 4, the cleaning roller 51 squeezes and presses a relatively large foreign matter onto the object S, even though the brush roller 41 It is also impossible to remove the risk of the foreign matter mentioned above. Therefore, the front side cleaning roller unit 5 is preferably arranged on the downstream side of the front side brush roller unit 4.

In this way, by detachably unitizing the front side cleaning roller unit 5 on the holder 1, the front side cleaning roller unit 5 can be easily removed from the holder 1. As a result, when it is necessary to change the cleaning roller 51 according to the object S or the type of foreign matter, the cleaning roller 51 can be replaced together with the unit, so that the foreign matter can be easily and effectively removed. In addition, by removing the front side cleaning roller unit 5 from the holder 1, the facing resin roller 61 and the like described later facing the cleaning roller 51 can be exposed and can be easily replaced or cleaned. Therefore, it is excellent in maintainability. In addition, the cleaning roller 51 and the like housed in the housing 50 are unitized by being housed in the housing 50, and maintenance is also easier than in the case of assembling and fixing to a device.

(Frame body) The frame body 50 accommodates the cleaning roller 51 and the like, is unitized, and can be attached to and detached from the holder 1. Similar to the front side brush roller unit 4, the frame body 50 has an upstream plate, a downstream plate, a pair of side plates, a top plate, and a bottom plate. A pair of grips 50A partitioned in the conveying width direction are provided in the top plate. The pair of grips 50A is a user when the front side cleaning roller unit 5 is attached and detached. An opening 50B is provided in the bottom plate, and a part of the cleaning roller 51 protrudes from the opening 50B. The downstream plate is bent from above to below. In addition, the material constituting the frame body 50 is not particularly limited, and for example, metals such as stainless steel can be suitably used.

(Cleaning roller) The cleaning roller 51 removes foreign matter from the front surface S1 of the object S, especially relatively fine foreign matter (for example, foreign matter smaller than a millimeter in size). It is charged relative to the conveying direction when the outer peripheral surface is charged. In the forward rotation direction of D (counterclockwise rotation direction in FIG. 2 ), it is driven to rotate by a rotating shaft that is substantially perpendicular to the conveying direction D and substantially parallel to the conveying surface. As shown in FIG. 10, the cleaning roller 51 is an elastic roller having a core rod 51A, an inner layer portion 51B formed on the outer peripheral surface of the core rod 51A, and an outer layer portion 51C covering the outer peripheral surface of the inner layer portion 51B. .

The core rod 51A is formed in a cylindrical shape by a conductive material. Examples of the conductive material used for the core rod 51A include metal materials and the like. Specifically, similar to the roller body 42A of the recovery roller 42 of the front side brush roller unit 4, stainless steel, copper, aluminum, and the like can be cited.

The inner layer portion 51B is for ensuring a fixed pressing force or nip width to the object S by the cleaning roller 51 and the facing resin roller 61 described later. In other words, the inner layer portion 51B ensures the desired adhesive force or contact width to the object S, and contributes to the efficient removal of relatively fine foreign substances from the front surface S1. The material for forming the inner layer portion 51B is preferably a resin material having elasticity and conductivity, and more preferably a resin material containing resin components and carbon, such as polyurethane, silicone resin, natural rubber, and synthetic rubber. . As this polyurethane, the same thing as the polyurethane of the resin part 45B of the said conveyance roller 45 can be used suitably. As the material forming the inner layer portion 51B, a conductive elastomer containing polyester polyurethane and carbon black is more preferable. With these materials, it is possible to sufficiently ensure the elasticity of the cleaning roller 51, avoid excessive pressing of foreign matter onto the object S due to the cleaning roller 51, and suppress a decrease in the removal efficiency of foreign matter.

The outer layer portion 51C plays the role of ensuring the adhesion to the object S, or not obstructing the application of an appropriate surface potential, and ensuring the stain resistance or abrasion resistance of the cleaning roller 51, while avoiding moisture And other adverse effects caused by. As the material of the outer layer portion 51C, any material that can be charged in order to adsorb foreign matter attached to the front surface S1 of the object S by the force of an electric field, such as acrylic mixed polyurethane or fluorine mixed Polyurethane such as polyurethane, or silicone resin, natural rubber, synthetic rubber, etc., among these, polyurethane is preferred. In this way, the outer layer portion 51C is formed of polyurethane, thereby improving the abrasion resistance compared to the case of being formed of silicone resin or butyl rubber, and in addition, it is possible to reduce the amount of plasticizer or lower Contamination of the cleaning roller 51 caused by the addition of the molecular weight compound. In addition, the outer layer portion 51C is preferably higher in hardness than the inner layer portion 51B, and specifically, the JIS-A hardness is preferably 50° or more. When the JIS-A hardness of the outer layer portion 51C is 50° or more, the abrasion resistance of the cleaning roller 51 can be sufficiently ensured.

By using acrylic mixed polyurethane as the material of the outer layer portion 51C, it is easy to remove the negatively charged foreign matter from the front surface S1 of the object S. On the other hand, by using fluorine mixed polyurethane as the material of the outer layer portion 51C, it is easy to negatively charge the cleaning roller 51, and it is easy to remove the positively charged foreign matter from the object S.

Furthermore, if the adhesive force of the outer layer portion 51C is too strong, if the thickness of the object S is thin, the cleaning roller 51 may be caught in the object S. Therefore, in order to prevent the object S from being entangled, it is preferable to form fine protrusions on the surface (outer layer portion 51C) of the cleaning roller 51. As a specific method of forming the microprotrusions, a method of blending particles used as the raw material of the microprotrusions in a resin material such as thermoplastic polyurethane used for the formation of the outer layer portion 51C is preferred. The particle may be a fixed-shaped particle or an amorphous particle, but from the viewpoint of making the protrusion shape of the micro-protrusion uniform, it is preferably a fixed-shaped spherical particle. The lower limit of the average particle diameter of the spherical particles is preferably 2 μm, more preferably 2.5 μm. On the other hand, as the upper limit of the average particle size, it is preferably 5 μm, more preferably 4.5 μm. In addition, in the spherical particles, the lower limit of the coefficient of variation (CV (Coefficient of Variation) value) obtained by dividing the standard deviation (σ) related to the average particle diameter by the average particle diameter is preferably 3.0 %, more preferably 3.5%. On the other hand, as the upper limit of the coefficient of variation, 5.0% is preferable, and 4.5% is more preferable. Here, the "average particle diameter" refers to the volume average particle diameter (Mv) obtained by the laser diffraction and scattering method.

The spherical particles are preferably harder than thermoplastic polyurethane. However, if the spherical particles are excessively hard like glass beads or ceramic beads, there is a risk of damaging the object S, so they are preferably made of resin. Examples of the hard resin forming the spherical particles include melamine resin, acrylic resin, and the like. Among them, melamine resin is preferred.

The lower limit of the average thickness of the outer layer portion 51C is preferably 2 μm, and more preferably 5 μm. On the other hand, the upper limit of the average thickness of the outer layer portion 51C is preferably 500 μm, and more preferably 300 μm. If the average thickness of the outer layer portion 51C is less than the lower limit, the surface of the cleaning roller 51 cannot be sufficiently charged, and there is a possibility that the adsorption effect of foreign matter cannot be sufficiently obtained. Conversely, if the average thickness of the outer layer portion 51C exceeds the upper limit, there is a possibility that good charging characteristics for adsorbing foreign substances may not be obtained.

The cleaning roller 51 is charged by the application of a voltage from an external power source, and is given a surface potential (surface charge). That is, the cleaning roller 51 abuts on the front surface S1 of the object S in a state where the surface is charged, and attracts and removes relatively fine foreign matter adhering to the front surface S1 of the object S by the force of an electric field. In this way, by electrifying the cleaning roller 51, even when there are holes or depressions on the surface of the object S, the foreign matter in the holes or depressions can be efficiently removed.

With respect to the voltage applied to the brush roller 41 of the brush roller unit 4 on the front side, the voltage applied to the cleaning roller 51 has the same polarity and the absolute value becomes lower. The lower limit of the voltage applied to the cleaning roller 51 is, for example, -400V, preferably -200V. On the other hand, the applied voltage is, for example, less than 0 V, preferably -50 V or less. In this way, the voltage applied to the cleaning roller 51 becomes the same polarity and the absolute value is lower than the voltage applied to the brush roller 41 of the brush roller unit 4 on the front side, which can be removed from the front surface S1 of the object S Relatively fine foreign matter. In particular, by setting the voltage applied to the cleaning roller 51 within the above range, relatively fine foreign matter can be efficiently removed from the front surface S1 of the object S. Furthermore, the upper limit of the electrical resistance of the cleaning roller 51 is preferably 10 ⁸ Ω. Since the resistance of the cleaning roller 51 is 10 ⁸ Ω or less, it can be effectively charged when a voltage is applied.

Furthermore, in order to improve the efficiency of collecting fine foreign matter, the cleaning roller 51 is preferably set to a height at which an appropriate pressure is applied to the object S between the cleaning roller 51 and the opposing resin roller 61. The pressure applied to the object S by the cleaning roller 51 and the facing resin roller 61 can be, for example, a linear pressure: 2.4 kg/250 mm. Here, 250 mm is the axial length of the outer layer portion 51C of the cleaning roller 51 in this embodiment. In addition, the cleaning roller 51 also has a function of giving an appropriate propelling force to the object S together with the facing resin roller 61. Thereby, it is easy to make the object S enter below the brush roller 71 of the back side brush roller unit 7 mentioned later which rotates in the direction reversed with respect to the conveyance direction D. As shown in FIG.

(Brush Roller) The brush roller 52 is for collecting foreign matter removed from the object S by the cleaning roller 51, and is arranged directly above the cleaning roller 51 so as to be substantially parallel to and in contact with the cleaning roller 51. In a charged state, the brush roller 52 is rotated and driven by power from an external drive source in a direction (counterclockwise rotation direction in FIG. 2) reversed with respect to the cleaning roller 51. This brush roller 52 has a cylindrical core rod 52A, and a plurality of bristles 52C (see FIG. 3) implanted on the outer peripheral surface of the core rod 52A via an adhesive layer 52B. The details are the same as those of the front side brush roller unit 4 The core rod 41A and the bristles 41C of the brush roller 41 are the same, and therefore repeated descriptions are omitted. In addition, with respect to the voltage applied to the cleaning roller 51, the voltage applied to the brush roller 52 (the voltage applied to the core rod 52A) becomes the same polarity and the absolute value becomes higher. As a specific lower limit of the voltage applied to the brush roller 52, as with the brush roller 41 of the front-side brush roller unit 4, it is preferably -800 V, and more preferably -600 V. On the other hand, as the upper limit of the applied voltage, -200 V is preferable, and -300 V is more preferable.

(Recovery Roller) The recovery roller 53 is a second recovery roller that recovers foreign matter recovered by the brush roller 52 from the cleaning roller 51. It is arranged above the brush roller 52 so as to be substantially parallel to the brush roller 52 and in contact with the bristles 52C. Assume. In a charged state, the recovery roller 53 is rotated and driven by power from an external drive source in a direction (counterclockwise rotation direction in FIG. 2) that is reversed with respect to the brush roller 52. The details of the recovery roller 53 can be the same as those of the recovery roller 42 of the front-side brush roller unit 4 described above, so repeated descriptions are omitted.

With respect to the voltage applied to the brush roller 52, the voltage applied to the recovery roller 53 has the same polarity and the absolute value becomes higher. The lower limit of the absolute value of the difference between the voltage applied to the recovery roller 53 and the voltage applied to the brush roller 52 is preferably 200 V, and more preferably 300 V. On the other hand, as the upper limit of the absolute value of the difference, 600 V is preferable, and 500 V is more preferable. In addition, as the lower limit of the voltage applied to the recovery roller 53, it is preferably -1,500 V, and more preferably-1,200 V. On the other hand, as the upper limit of the applied voltage, -400 V is preferable, and -600 V is more preferable. With respect to the voltage applied to the brush roller 52, the voltage applied to the recovery roller 53 becomes the same polarity and the absolute value becomes higher. Compared with the potential of the bristles 52C of the brush roller 52, the outer peripheral surface of the recovery roller 53 The potentials have the same polarity and the absolute value becomes higher, so the foreign matter adhering to the brush roller 52 can be adsorbed on the outer peripheral surface of the recovery roller 53. In particular, by setting the difference between the applied voltage of the recovery roller 53 and the brush roller 52 to the above range, and further setting the applied voltage to the recovery roller 53 to the above range, the foreign matter adhering to the brush roller 52 can be made effective. The ground is adsorbed on the outer peripheral surface of the recovery roller 53.

The recovery roller 53 is arranged on the downstream side of the brush roller 52 in the conveying direction. Thereby, even if the diameter of the recovery roller 53 is smaller than that of the brush roller 52, the blade 54 described later can scrape the foreign matter to the downstream side in the conveying direction, and it is possible to prevent the foreign matter from being adsorbed on the brush roller 52 again.

The direction of rotation of the recovery roller 53 may be any direction relative to the direction in which the brush roller 52 rotates forward and the direction in which it rotates, and it is preferably set to a direction in which foreign objects can be easily recovered from the outer peripheral surface by the blade 54 described later. In this embodiment, as shown in FIG. 2, the rotation direction of the recovery roller 53 is set to a direction reversed with respect to the brush roller 52 (counterclockwise rotation direction in FIG. 2), and the recovery efficiency of foreign matter by the blade 54 can be improved. . The lower limit of the magnification of the rotation speed of the recovery roller 53 with respect to the rotation speed of the brush roller 52 is preferably 1.0 times. On the other hand, the upper limit of the magnification of the rotation speed is preferably 1.5 times. Thereby, the foreign matter can be effectively moved from the brush roller 52 to the recovery roller 53.

(Blade) The blade 54 is a second blade that scrapes foreign matter from the recovery roller 53. The details of the blade 54 and the blade support portion 54a supporting it are the same as the blade 43 and the blade support portion 43a of the front side brush roller unit 4 described above.

(Foreign Material Recovery Unit) The foreign material recovery unit 55 recovers and accommodates the foreign material scraped off from the recovery roller 53 by the blade 54. The foreign matter recovery part 55 is arranged below the front end of the blade 54 and on the downstream side of the brush roller 52 in the conveying direction. In addition, the foreign matter recovery part 55 is fitted into the opening of the downstream plate of the frame body 50 and can be drawn out to the downstream side in the conveying direction through the opening. A grip part 55A is provided on the downstream side of the foreign matter recovery part 55, and the foreign matter recovery part 55 is facilitated by the grip part 55A. In addition, since the foreign matter recovery part 55 can be drawn out toward the downstream side in the conveying direction, the cleaning roller unit 5 can be drawn out to recover the foreign matter while maintaining the state of fixing the cleaning roller unit 5 to the holder 1, which is excellent in convenience.

(Height adjustment mechanism) The front side cleaning roller unit 5 is preferably configured so that the height can be adjusted by a height adjustment mechanism. In this way, by adjusting the height of the front side cleaning roller unit 5 by the height adjustment mechanism, the pressing force (nip width) of the cleaning roller 51 against the object S can be adjusted. As a result, fine foreign matter can be removed efficiently. .

As a specific example of the height adjustment mechanism of the front side cleaning roller unit 5, for example, the same mechanism as exemplified as the height adjustment mechanism of the front side brush roller unit 4 can be used.

As described above, the front side brush roller unit 4 and the front side cleaning roller unit 5 are both attachable and detachable, so the height adjustment mechanism can be independently provided in each unit. Therefore, even when the optimum pressure contact condition of the brush roller 41 of the front side brush roller unit 4 to the object S is different from the optimum pressure contact condition of the cleaning roller 51 of the front side cleaning roller unit 5 to the object S, This cleaning device can also optimize the respective crimping conditions.

[Back side facing roller unit] The back side facing roller unit 6 defines the conveyance path of the object S together with the brush roller 41 of the front side brush roller unit 4 and the cleaning roller 51 of the front side cleaning roller unit 5, and is arranged in The back side of the object S (below the conveying path). The back side facing roller unit 6 mainly includes: a pair of facing rollers including a facing metal roller 60 as a first back facing roller and a facing resin roller 61 as a second back facing roller, and auxiliary滚62。 Roller 62. From the viewpoint of maintainability, the back side facing roller unit 6 is preferably detachably mounted on the holder 1.

Here, in order to accurately control the amount of pressure contact of the bristles 41C of the brush roller 41 with the object S, it is advantageous that the hardness of the first counter roller holding the object S on the lower surface of the object S is high. Therefore, since the facing metal roller 60 is a relatively hard metal roller, the bristles 41C of the brush roller 41 of the front side brush roller unit 4 can be properly abutted on the object S and effectively removed from the front surface S1. A relatively large foreign body. On the other hand, in order for the cleaning roller 51 to efficiently adsorb fine foreign matter on its surface, it is necessary to apply an appropriate pressure to the object S between the cleaning roller 51 and the second opposed roller. However, if excessive pressure is applied, the foreign matter is pressure-bonded. On the object S, there is a possibility that it will be difficult to recover. Therefore, as the second facing roller, for example, a roller having a high hardness such as a metal is not suitable, and a resin roller having substantially the same hardness as that of the cleaning roller 51 is preferable. Therefore, since the facing resin roller 61 is an elastic resin roller (elastic roller), an appropriate pressure can be applied to the object S between the cleaning roller 51 of the front side cleaning roller unit 5 to improve the adhesiveness and ensure proper Therefore, the cleaning roller 51 can efficiently remove fine foreign matter from the front surface S1 of the object S.

(Opposite metal roller) The opposing metal roller 60 opposes the brush roller 41 of the front side brush roller unit 4 via the object S, and is arranged directly below the brush roller 41 so as to abut on the object S The first back side facing roller. The counter metal roller 60 is driven to rotate in a forward rotation direction (clockwise rotation direction in FIG. 2) with respect to the conveyance direction D of the object S. That is, the facing metal roller 60 is driven to rotate in a direction that is reversed with respect to the brush roller 41 of the front-side brush roller unit 4. The details of the facing metal roller 60 are the same as the recovery roller 42 of the front-side brush roller unit 4. However, the opposed metal roller 60 is not connected to an external power source but is electrically connected to the ground, whereby when the brush roller 41 is charged, an electric field suitable for removing foreign matter can be generated.

(Opposing Resin Roll) The opposing resin roller 61 opposes the cleaning roller 51 of the front side cleaning roller unit 5 via the object S, and is arranged directly below the cleaning roller 51 so as to abut on the object S. The opposed resin roller 61 is rotationally driven in a forward rotation direction (clockwise rotation direction in FIG. 2) with respect to the conveyance direction D of the object S. That is, the facing resin roller 61 is rotationally driven in the direction of forward rotation with respect to the cleaning roller 51. The details of the facing resin roller 61 are substantially the same as those of the cleaning roller 51 of the front side cleaning roller unit 5. However, when forming the outer layer portion of the opposing resin roller 61, it is preferable to blend titanium oxide, barium titanate, or the like as the particles used as the raw material of the micro protrusions for forming the micro protrusions. By using titanium oxide, barium titanate, or the like as the particles, the density of the micro-protrusions increases, and the object S can be transported appropriately. In addition, the opposed resin roller 61 is not connected to an external power source but is electrically connected to the ground, and an electric field suitable for removing foreign matter can be generated between the charged cleaning roller 51 and the surface.

(Auxiliary Roller) The auxiliary roller 62 is a person who guides the object S together with the transport roller 45 of the front-side brush roller unit 4 and the object S is carried into the cleaning mechanism 3 by the upstream external transport mechanism 2A. The layer structure and the like of the auxiliary roller 62 can be made the same as that of the facing resin roller 61.

<Back side cleaning mechanism> The back side cleaning mechanism 3B is a device that removes foreign matter on the back side surface S2 of the object S. The back side cleaning mechanism 3B is roughly configured to invert the front side cleaning mechanism 3A upside down, and includes a back side brush roller unit 7, a back side cleaning roller unit 8, and a front side counter roller unit 9.

[Back side brush roller unit] The back side brush roller unit 7 removes foreign matter on the back side surface S2 of the object S by the brush roller 71, which is on the back side of the object S (below the conveying path) than the front side The back side facing roller unit 6 of the cleaning mechanism 3A is arranged further adjacent to the downstream side in the conveying direction. The back side brush roller unit 7 mainly includes a brush roller 71, a recovery roller 72, and a blade 73, and its basic configuration is the same as that of the front side brush roller unit 4 of the front side cleaning mechanism 3A. However, compared with the front-side brush roller unit 4, the back-side brush roller unit 7 is different in that no members corresponding to the conveyance roller 45 and the foreign matter recovery portion 44 are provided. Furthermore, the reason why a member corresponding to the conveying roller 45 is not provided in the back-side brush roller unit 7 is that although the brush roller 71 is driven to rotate in a reverse direction with respect to the conveying direction D, the reason The cleaning roller 51 and the opposing resin roller 61 that are arranged upstream in the conveying direction than the brush roller 71 apply an appropriate propelling force to the object S. In addition, although the back side brush roller unit 7 is not provided with a member corresponding to the foreign matter recovery portion 44, the foreign matter can be discharged out of the unit by opening the bottom. The foreign matter discharged from the back-side brush roller unit 7 is recovered together with the foreign matter discharged from the back-side cleaning roller unit 8 described later by the foreign matter recovery unit 13 provided in the lowermost portion of the holder 1. From the viewpoint of maintainability, the back side brush roller unit 7 is preferably detachably mounted on the holder 1.

(Brush roller) The brush roller 71 is a back-side brush roller, abuts against the back-side surface S2 of the object S in a charged state, and is in a direction reversed with respect to the conveying direction D of the object S (counterclockwise in FIG. 2 Rotational drive in the direction of rotation), thereby removing relatively large foreign matter with a millimeter size on the back surface S2 of the object S. This brush roller 71 has a cylindrical core rod 71A, and a plurality of bristles 71C (see FIG. 3) implanted on the outer peripheral surface of the core rod 71A via an adhesive layer 71B. The details are the same as those of the front side brush roller unit 4 The core rod 41A and the bristles 41C of the brush roller 41 are the same, and therefore repeated descriptions are omitted. In addition, the voltage applied to the brush roller 71 (the voltage applied to the core rod 71A) has the same polarity and the absolute value becomes higher than the voltage applied to the cleaning roller 80 of the rear side cleaning roller unit 8 described later. As a specific lower limit of the voltage applied to the brush roller 71, similarly to the brush roller 41 of the front side brush roller unit 4, it is preferably -800 V, and more preferably -600 V. On the other hand, as the upper limit of the applied voltage, -200 V is preferable, and -300 V is more preferable.

(Recovery Roller) The recovery roller 72 is a third recovery roller that recovers foreign matter removed from the back surface S2 of the object S by the brush roller 71. It is located below the brush roller 71, and is approximately parallel to the brush roller 71 and to the bristles 71C Arrange by abutting. In a charged state, the recovery roller 72 is rotated and driven by power from an external drive source in a direction (counterclockwise rotation direction in FIG. 2) that is reversed with respect to the brush roller 71. The details of the recovery roller 72 can be the same as the recovery roller 42 of the front-side brush roller unit 4 described above, and therefore, repeated descriptions are omitted.

With respect to the voltage applied to the brush roller 71, the voltage applied to the recovery roller 72 has the same polarity and the absolute value becomes higher. The lower limit of the absolute value of the difference between the voltage applied to the recovery roller 72 and the voltage applied to the brush roller 71 is preferably 200 V, and more preferably 300 V. On the other hand, as the upper limit of the absolute value of the difference, 600 V is preferable, and 500 V is more preferable. In addition, as the lower limit of the voltage applied to the recovery roller 72, -1,500 V is preferable, and -1,200 V is more preferable. On the other hand, as the upper limit of the applied voltage, -400 V is preferable, and -600 V is more preferable. With respect to the voltage applied to the brush roller 71, the voltage applied to the recovery roller 72 has the same polarity and the absolute value becomes higher. The potential of the outer peripheral surface of the recovery roller 72 is relative to the potential of the bristles 71C of the brush roller 71. Since they have the same polarity and the absolute value becomes high, the foreign matter adhering to the brush roller 71 can be adsorbed on the outer peripheral surface of the recovery roller 72. In particular, by setting the difference between the applied voltage of the recovery roller 72 and the brush roller 71 in the above range, and further setting the applied voltage to the recovery roller 72 in the above range, the foreign matter adhering to the brush roller 71 can be made effective. The ground is adsorbed on the outer peripheral surface of the recovery roller 72.

The direction of rotation of the recovery roller 72 can be any direction relative to the direction in which the brush roller 71 rotates normally and the direction in which it rotates, and it is preferably driven in the direction of rotation that facilitates the recovery of foreign matter on the outer peripheral surface by the blade 73 described later. . In this embodiment, as shown in FIG. 2, the rotation direction of the recovery roller 72 is set to a direction reversed with respect to the brush roller 71 (counterclockwise rotation direction in FIG. 2), and the recovery efficiency of foreign matter by the blade 73 can be improved. . The lower limit of the magnification of the rotation speed of the recovery roller 72 with respect to the rotation speed of the brush roller 71 is preferably 1.0 times. On the other hand, the upper limit of the magnification of the rotation speed is preferably 1.5 times. Thereby, the foreign matter can be effectively moved from the brush roller 71 to the recovery roller 72.

(blade)

The blade 73 is a third blade that scrapes foreign matter from the recovery roller 72. The details of the blade 73 and the blade support portion 73a supporting it are the same as the blade 43 and the blade support portion 43a of the front side brush roller unit 4 of the front side cleaning mechanism 3A.

[Back side cleaning roller unit]

The back side cleaning roller unit 8 removes the fine foreign matter on the back side surface S2 of the object S by the cleaning roller 80, and is on the back side of the object S (under the conveying path) than the back side brush roller unit 7 It is arranged more adjacent to the downstream side in the conveying direction. The back side cleaning roller unit 8 mainly includes a cleaning roller 80, a brush roller 81, a recovery roller 82, a blade 83, and a conveying roller 85, and its basic configuration is the same as that of the front side cleaning roller unit 5 of the front side cleaning mechanism 3A. However, compared with the front side cleaning roller unit 5, the back side cleaning roller unit 8 is different in the point that the conveying roller 85 is provided, and the point that the member corresponding to the foreign material recovery part 55 is not provided, etc. are different. The back side cleaning roller unit 8 is not provided with a member corresponding to the foreign matter recovery part 55, but its bottom is open, and foreign matter can be discharged out of the unit. The foreign matter discharged from the back side cleaning roller unit 8 and the foreign matter discharged from the back side brush roller unit 7 are recovered by the foreign matter recovery unit 13 provided at the lowermost portion of the holder 1. From the viewpoint of maintainability, the back side cleaning roller unit 8 is preferably detachably mounted on the holder 1.

(Cleaning Roller) The cleaning roller 80 is a backside cleaning roller that removes fine foreign matter on the backside surface S2 of the object S, and is arranged on the back side of the object S (under the conveyance path). The cleaning roller 80 is charged on the outer peripheral surface with a rotating shaft that is substantially perpendicular to the conveying direction D and substantially parallel to the conveying surface in a forward rotation direction relative to the conveying direction D (clockwise rotation direction in FIG. 2). Come and spin the drive. The details of the cleaning roller 80 can be set to be the same as the cleaning roller 51 of the front side cleaning roller unit 5, so repeated descriptions are omitted.

With respect to the voltage applied to the brush roller 71 of the brush roller unit 7 on the back side, the voltage applied to the cleaning roller 80 becomes the same polarity and the absolute value becomes lower. The lower limit of the voltage applied to the cleaning roller 80 is, for example, -400V, preferably -200V. On the other hand, as the applied voltage, for example, it is less than 0 V, and preferably -50 V or less. In this way, the voltage applied to the cleaning roller 80 has the same polarity and the absolute value is lower than the voltage applied to the brush roller 71 of the brush roller unit 7 on the back side, and the voltage from the back surface S2 of the object S can be reduced. Remove relatively fine foreign matter. In particular, by setting the voltage applied to the cleaning roller 80 within the above range, relatively fine foreign matter can be efficiently removed from the back surface S2 of the object S.

(Brush Roller) The brush roller 81 is one that collects the fine foreign matter removed from the back surface S2 of the object S by the cleaning roller 80, and it abuts on the cleaning roller 80 and is arranged below the cleaning roller 80. In a charged state, the brush roller 81 is rotated and driven by a rotating shaft that is substantially perpendicular to the conveying direction D and substantially parallel to the conveying surface in a direction that is reversed relative to the cleaning roller 80 (clockwise rotation direction in FIG. 2) . Similar to the brush roller 41 of the front brush roller unit 4, the brush roller 81 is formed by implanting a plurality of bristles 81C on the core rod 81A via the adhesive layer 81B. The details are the same as those of the brush of the front brush roller unit 4. The roller 41 is the same.

With respect to the voltage applied to the cleaning roller 80, the voltage applied to the brush roller 81 (the voltage applied to the core rod 81A) becomes the same polarity and the absolute value becomes higher. As a specific lower limit of the voltage applied to the brush roller 81, similarly to the brush roller 41 of the front-side brush roller unit 4, it is preferably -800 V, and more preferably -600 V. On the other hand, as the upper limit of the applied voltage, -200 V is preferable, and -300 V is more preferable.

(Recovery Roller) The recovery roller 82 is a fourth recovery roller that recovers the fine foreign matter recovered by the brush roller 81 from the cleaning roller 80. It is located below the brush roller 81 and is approximately parallel to the brush roller 81 and is arranged in contact with the bristles 81C. Assume. In a charged state, the recovery roller 82 is rotated and driven by power from an external drive source in a direction (clockwise rotation direction in FIG. 2) that is reversed with respect to the brush roller 81. The details of the recovery roller 82 can be the same as those of the recovery roller 42 of the front-side brush roller unit 4 described above, so repeated descriptions are omitted.

With respect to the voltage applied to the brush roller 81, the voltage applied to the recovery roller 82 has the same polarity and the absolute value becomes higher. The lower limit of the absolute value of the difference between the voltage applied to the recovery roller 82 and the voltage applied to the brush roller 81 is preferably 200 V, and more preferably 300 V. On the other hand, as the upper limit of the absolute value of the difference, 600 V is preferable, and 500 V is more preferable. In addition, as the lower limit of the voltage applied to the recovery roller 82, -1,500 V is preferable, and -1,200 V is more preferable. On the other hand, as the upper limit of the applied voltage, -400 V is preferable, and -600 V is more preferable. With respect to the voltage applied to the brush roller 81, the voltage applied to the recovery roller 82 becomes the same polarity and the absolute value becomes higher. Compared with the potential of the bristles 81C of the brush roller 81, the outer peripheral surface of the recovery roller 82 Since the potentials are of the same polarity and the absolute value becomes higher, the foreign matter adhering to the brush roller 81 can be adsorbed on the outer peripheral surface of the recovery roller 82. In particular, by setting the difference between the applied voltage of the recovery roller 82 and the brush roller 81 to the above range, and further setting the applied voltage to the recovery roller 82 to the above range, the foreign matter adhering to the brush roller 81 can be made effective. The ground is adsorbed on the outer peripheral surface of the recovery roller 82.

The direction of rotation of the recovery roller 82 may be any direction relative to the direction in which the brush roller 81 rotates normally and the direction in which it rotates, and it is preferably performed in the direction of rotation in which foreign objects can be easily recovered from the outer peripheral surface by the blade 83 described later. drive. In this embodiment, as shown in FIG. 2, the rotation direction of the recovery roller 82 is set to a direction reversed with respect to the brush roller 81 (clockwise rotation direction in FIG. 2), which can improve the recovery efficiency of foreign matter by the blade 83 . The lower limit of the magnification of the rotation speed of the recovery roller 82 with respect to the rotation speed of the brush roller 81 is preferably 1.0 times. On the other hand, the upper limit of the magnification of the rotation speed is preferably 1.5 times. Thereby, the foreign matter can be effectively moved from the brush roller 81 to the recovery roller 82.

(Blade) The blade 83 is the fourth blade that scrapes foreign matter from the recovery roller 81. The details of the blade 83 and the blade support portion 83a supporting it are the same as the blade 43 and the blade support portion 43a of the front side brush roller unit 4 of the front side cleaning mechanism 3A.

(Conveying Roller) The conveying roller 85 is a conveyer who guides the object S, and is arranged on the downstream side of the cleaning roller 800 in the conveying direction. As this conveyance roller 85, the same thing as the opposing resin roller 61 can be used suitably.

[Front side facing roller unit] The front side facing roller unit 9 defines the conveying path of the object S together with the brush roller 71 of the back side brush roller unit 7 and the cleaning roller 80 of the back side cleaning roller unit 8, and is arranged in The front side of the object S (above the conveyance path). The front facing roller unit 9 mainly includes a frame 90, a facing metal roller 91 as a first front facing roller, and a facing resin roller 92 as a second front facing roller, and is detachably arranged in a fixed position.器1上. In this cleaning device, the front-side facing roller unit 9 is detachably arranged on the device body fixedly installed with respect to the base of the floor of the factory or the like. In this way, by detachably disposing the front facing roller unit 9 on the holder 1, the front facing roller unit 9 can be easily removed from the holder 1, and the brush roller of the back brush roller unit 7 can be easily removed from the holder 1. 71 and the cleaning roller 80 of the backside cleaning roller unit 8 are exposed. Therefore, the brush roller 71 or the cleaning roller 80 can be easily replaced or cleaned, and the maintainability is excellent. In addition, the opposed metal roller 91 and the opposed resin roller 92 housed in the frame 90 are easier to maintain than when they are assembled and fixed to the holder 1.

(Frame body) The frame body 90 accommodates the opposing metal roller 91 and the opposing resin roller 92 as a unit, and can be attached to and detached from the holder 1. In the top plate of the frame 90, a pair of grips 90A are partitioned in the horizontal direction perpendicular to the conveying direction D and provided. The pair of grips 90A is a user when attaching and detaching the front facing roller unit 9. The frame 90 is provided with an opening 90B in the bottom plate, and a part of the facing metal roller 91 or the facing resin roller 92 protrudes from the opening 90B. In addition, the material which comprises the frame 90 is not specifically limited, For example, metal, such as stainless steel, can be used suitably.

(Opposite metal roller) The opposing metal roller 91 opposes the brush roller 71 of the back side brush roller unit 7 via the object S, and is arranged directly above the brush roller 71 so as to abut on the object S . The counter metal roller 91 is a rotation driver, and rotates in a direction (counterclockwise rotation direction in FIG. 2) that is reversed with respect to the brush roller 71 of the back-side brush roller unit 7. The details of the facing metal roller 91 are the same as the recovery roller 42 of the front side brush roller unit 4. However, the opposed metal roller 91 is not connected to an external power source but is electrically connected to the ground, and an electric field suitable for removing foreign matter can be generated between the opposed metal roller 91 and the brush roller 71.

Since the counter metal roller 91 is a relatively hard metal roller, the bristles 71C of the brush roller 71 of the back brush roller unit 7 can be properly abutted on the object S, so that the object S can be removed from the object S by the brush roller 71. The back surface S2 of S effectively removes relatively large foreign matter.

(Opposite resin roller) The opposing resin roller 92 opposes the cleaning roller 80 of the back side cleaning roller unit 8 via the object S, and is arranged directly above the cleaning roller 80 so as to abut on the object S . The opposing resin roller 92 is a rotation driver, and rotates in a direction (counterclockwise rotation direction in FIG. 2) that rotates forward relative to the cleaning roller 80. The details of the facing resin roller 92 are the same as those of the facing resin roller 61 of the front-side facing roller unit 6. However, the opposed resin roller 92 is not connected to an external power source but is electrically connected to the ground, and an electric field suitable for removing foreign matter can be generated between the opposed resin roller 92 and the cleaning roller 80.

Since the facing resin roller 92 is an elastic resin roller, a suitable nip width can be ensured between the cleaning roller 80 of the backside cleaning roller unit 8 and therefore the adhesion between the cleaning roller 80 and the object S can be improved. The cleaning roller 80 can effectively remove fine foreign matter from the back surface S2 of the object S. In addition, the back side brush roller unit 7 and the back side cleaning roller unit 8 of the back side cleaning mechanism 3B are equipped with a height adjustment mechanism for adjusting the respective heights, which is also the same as the front side cleaning mechanism 3A.

<Charging circuit> As described above, it is preferable to charge the outer peripheral surfaces of the recovery roller 42, the recovery roller 53, the recovery roller 72, the recovery roller 82, the cleaning roller 51, the cleaning roller 80, and the brush roller 52 and the brush roller 81, and The brush roller 41 and the brush roller 71 are also charged. In addition, it is preferable that the auxiliary roller 62, the opposed metal roller 60, the opposed metal roller 91, the opposed resin roller 61, and the opposed resin roller 92 are electrically connected to the ground. A known circuit can be used for the charging circuit for charging the rollers or electrically connecting with the ground (including fixing to 0 V). As a safety measure when two rollers with different potential differences are short-circuited by a long conductive foreign object, for example, the charging circuit can set a current of 500 μA as the threshold value and provide a circuit breaker when a current above the threshold value flows. Mechanism (such as fuses, etc.).

[Terminals of the unit and the holder] Hereinafter, an example of the terminal of the unit and holder 1 for electrically connecting each unit to an external power source or the ground is described. FIG. 11 shows a representation of the unit-side terminals 110 arranged at one end or both ends in the conveying width direction of each unit. FIG. 12 shows the holder-side terminal 120 arranged on the inner surface of the holder 1. Furthermore, it is preferable that all units of the cleaning device are electrically connected to an external power source or the like through the connection structure, but some or all of the units may also be electrically connected to an external power source or the like through a previously known connection structure.

The unit-side terminal 110 of FIG. 11 mainly includes: two unit-side metal plates 111 arranged in parallel along an axis Z parallel to the conveying direction D, and arranged to surround each unit-side metal plate 111 in a plan view. Set the 2 covers 112. The unit-side metal plate 111 is electrically connected to rollers included in each unit via wiring not shown. In addition, the number of the unit-side metal plates 111 included in the unit-side terminal 110 of FIG. 11 is two, but the number of the unit-side metal plates 111 can be appropriately changed in accordance with the number of rollers of each unit. In addition, the shape of the cover 112 may be appropriately changed according to the number of the unit-side metal plates 111 and the like.

The holder-side terminals 120 of FIG. 12 respectively have: a base portion 121 formed of an insulating member; two holder-side metal plates 122 are arranged on the upper surface of the base portion 121 and can be inserted into the unit from above. The side metal plate 111 can be bent so as to hold the inserted unit side metal plate 111 from both sides; and the surrounding portion 123 is formed of an insulating member and is arranged to surround each holder side metal plate 122. The holder-side metal plate 122 is electrically connected to an external power source or the like via wiring or the like not shown. The two surrounding parts 123 have a shape whose outer surface can abut the inner surface of the cover 112 of the unit-side terminal 110. Furthermore, the number of pieces of the holder-side metal plate 122 or the shape of the surrounding portion 123 of the holder-side terminal 120 of FIG. 12 may correspond to the number of pieces of the unit-side metal plate 111 or the cover 112 in the unit-side terminal 110 The shape, etc., can be changed as appropriate.

Each unit is mounted on the holder 1, whereby the unit-side terminal 110 of FIG. 11 and the holder-side terminal 120 of FIG. 12 are electrically connected. Specifically, each unit-side metal plate 111 of the unit-side terminal 110 is inserted into the holder-side metal plate 122 of each holder-side terminal 120, whereby the two metal plates are electrically connected, and the cover of the unit-side terminal 110 is electrically connected. 112 covers the surrounding portion 123 so that the cover 112 and the surrounding portion 123 are fitted. In this way, the cover 112 and the surrounding portion 123 serve as guides when connecting the unit-side terminal 110 and the holder-side terminal 120, so that the two terminals can be easily connected, and the connected two terminals can be firmly fixed. Therefore, by using the unit-side terminal 110 and the holder-side terminal 120 for the cleaning device, electrical connections can be easily made while installing each unit, so convenience can be improved and a strong connection structure can be formed Therefore, even if vibration or the like occurs during operation, it is easy to keep the voltage applied to each roller constant.

[Voltage application mechanism for rollers] In each unit, a voltage application mechanism (including a mechanism electrically connected to the ground) is usually provided near one end of each roller, and the unit-side terminal 110 and the voltage application mechanism They are electrically connected by wiring. The voltage supplied to each unit from an external power source or the like is supplied to each roller via the unit-side terminal 110, the wiring, and the voltage applying mechanism. In this case, a drive mechanism such as a gear for driving each roller is preferably provided near the other end of each roller after using a member formed of an insulating material. FIG. 13 shows the following voltage application mechanism as an example of the voltage application mechanism. The voltage application mechanism includes: a conical depression 130a provided on one end surface of the roller 130; and a frame side electrode 131 having a hemispherical tip portion , And the tip portion abuts against the inner peripheral surface of the conical recess 130a of the roller 130; and a metal leaf spring 132 is connected to the frame-side electrode 131 and faces the frame-side electrode 131 toward the roller 130 side. Pressure. When viewed in the conveying width direction, the center axis of the roller 130 and the apex of the conical depression are substantially coincident with the center of the hemisphere of the front end of the frame side electrode 131. Furthermore, the gap between the roller 130 and the frame side electrode 131 may also be lubricated with grease using conductive grease.

In this voltage applying mechanism, the unit-side terminal 110 and the leaf spring 132 are electrically connected by wiring not shown, and the roller 130 is applied via the wiring, the leaf spring 132, the frame-side electrode 131, and the recess 130a. Voltage. This voltage application mechanism makes the frame-side electrode 131 abut against the center axis of the roller 130, that is, at a relatively low peripheral speed of the roller 130, thereby suppressing the abrasion of the roller 130 and the frame-side electrode 131. In addition, the hemispherical tip portion of the frame-side electrode 131 is brought into contact with the conical depression provided in the roller 130, and the frame-side electrode 131 is pressed toward the roller 130 by the leaf spring 132, thereby When the roller 130 vibrates, it is easy to maintain electrical contact. Furthermore, the frame side electrode 131 is brought into contact with the end surface of the roller 130, and the frame side electrode 131 is pressed in the conveying width direction by the leaf spring 132, whereby even if the roller 130 vibrates up and down, the plate spring 132 Bending is also suppressed, so it is easy to stably apply pressure. Furthermore, the inner peripheral surface of the conical recess 130a and the hemispherical tip portion of the frame side electrode 131 are brought into contact with each other to form a space surrounded by the recess 130a and the tip portion of the frame side electrode 131. The grease is enclosed in this space to suppress its scattering. However, in order to further suppress the scattering of grease, if necessary, a cover or the like may be provided around the voltage application mechanism.

However, the voltage application mechanism in each unit is not limited to the one shown in FIG. 13. For example, a conductive sliding member such as a conductive brush and a conductive bearing is provided in the frame and the conductive sliding member is made to slide. The method of applying voltage to the members by contacting the rollers and so on.

[Cleaning method] A cleaning method for removing foreign matter from the object S using the cleaning device of FIGS. 1 and 2 will be described. In this cleaning method, a voltage having the same polarity and a high absolute value is applied to the brush roller 41 of the front side brush roller unit 4 as the cleaning roller 51 of the front side cleaning roller unit 5. In addition, the brush roller 71 of the back-side brush roller unit 7 is also applied with a voltage having the same polarity and a high absolute value as that of the cleaning roller 80 of the back-side cleaning roller unit 8. In this way, by applying a voltage of the same polarity and a higher absolute value to the brush roller 41 and the brush roller 71 than the cleaning roller 51 and the cleaning roller 80, the brush roller 41 and the brush roller 71 can remove the relatively large millimeter level. Foreign matter, and fine foreign matter can be removed by the cleaning roller 51 and the cleaning roller 80. Regarding various conditions such as application of voltage to each roller and rotation in this cleaning method, it may be the same as that of the cleaning device described above, and therefore, repeated descriptions are omitted.

[Other Embodiments] The present invention is not limited to the above-mentioned embodiment, and can be implemented in a form with various changes and improvements other than the above-mentioned embodiment. In particular, FIGS. 1 and 2 are only examples of the cleaning device. For example, the layer structure of each roller may be different from that of FIG. 2.

The cleaning rollers of the front side cleaning roller unit and the back side cleaning roller unit can also be uncharged. In this case, as the cleaning roller, for example, an adhesive roller, a resin roller having adsorption properties, or the like can be used. In addition, some or all of the rollers of the cleaning device may be driven rollers. Even if all the rollers of the cleaning device are driven rollers, by applying a sufficient propelling force to the object by an external conveying mechanism or the like, each roller can follow the conveyance of the object and perform its function.

The cleaning device only needs to include at least a front side brush roller unit and a front side cleaning roller unit, and other configurations are arbitrary. In addition, in the brush roller unit, only the brush roller is an essential component, and in the cleaning roller unit, only the cleaning roller is an essential component.

In addition, in the above-mentioned embodiment, a foreign material recovery part may be provided in the back side cleaning roller unit and the back side brush roller unit, respectively, instead of providing openings in the bottoms of the back side cleaning roller unit and the back side brush roller unit.

Furthermore, in an example of the present embodiment, both a pair of facing rollers are electrically connected to the ground, but other configurations may also be adopted. For example, a pair of opposed rollers can both be fixed to 0 V, or it can be fixed to a predetermined positive potential according to the charging status of foreign objects. The condition to be satisfied is to apply a fixed potential as a reference to the pair of opposed rollers with respect to the charged brush roller 41 and the charged cleaning roller 51. Therefore, if necessary, a different fixed potential may be applied to each roller of a pair of opposed rollers. If the voltage difference between the fixed potential and the charged cleaning roller 51 is too small, a sufficient electric field for removing foreign substances cannot be generated. Therefore, the lower limit of the potential difference is preferably 50V.

Furthermore, in the case where the foreign matter is extremely negatively charged, etc., it is of course within the scope of the idea of the present invention to set the brush roller 41, the brush roller 71, the cleaning roller 51, and the cleaning roller 80 to a positive potential. In this case, the pair of facing rollers may be electrically connected to the ground, or a fixed potential used as a reference may be applied. The fixed potential may be 0 V, and may be a predetermined negative or positive potential depending on the charging status of the foreign object. [Example]

Hereinafter, the present invention will be explained by examples, but the present invention is not limited by the following examples.

<Optimization of the brush roller (bristles)> The purpose is to select the material of the bristles suitable for removing foreign matter from the viewpoint of frictional electrification, evaluate the chargeability of the workpiece (object) and the bristles, and determine the charging sequence.

As the bristles, those having the characteristics shown in Table 1 below were used. In Table 1 below, "-" indicates that the corresponding characteristic has not been measured.

[Table 1]

As objects and foreign objects, objects in the target market and foreign objects that are a problem in the market are used. Specifically, acrylic plates, glass plates, green sheets, and polyethylene terephthalate (PET) films are used as objects, and acrylic cutting slag, copper powder, and ceramics dregs (ceramics dregs) are used as foreign objects. ), glass cutting slag, polyester particles and fibers.

The triboelectricity is evaluated by measuring the polarity when the objects, the objects and the bristles, or the bristles are frictionally charged with respect to the object and the bristles using a surface potentiometer. In addition, the charging relationship between the foreign object and the object is evaluated by adding the foreign object to the object and frictionally charging the object, attracting the foreign object, and measuring the amount of charge with a digital electrometer. These evaluation results are shown in FIG. 14 as a charging sequence.

Generally, in the charging sequence, the more the bristles of a material that is positioned as far away as possible with respect to the object and the foreign matter with the opposite polarity, the higher the adsorption force of the foreign matter becomes. Therefore, based on the results of FIG. 14, it is estimated that the materials 1 and 4, which are conductive polyester, are suitable for removing foreign substances.

Next, regarding the conductive polyester presumed to be the most suitable for removing foreign matter, the evaluation of the foreign matter removal performance using material 1 and material 4 was performed. In this evaluation, the cleaning device shown in FIGS. 1 and 2 was used to remove foreign matter from the object S, and it was calculated that the material of the bristles 41C of the brush roller 41 of the front brush roller unit 4 was set to material 1 or The recovery rate of foreign matter in the foreign matter recovery section 44 when the material is 4. As the object S, a green sheet to which ceramic slag adhered was used. As a result, the recovery rate of foreign matter was 86.6% when Material 1 was used, and on the other hand, when Material 4 was used, it was 26.7%. Therefore, it is judged that the bristle is preferably the material 1 of a relatively large fiber, that is, a relatively thick fiber. In addition, the reason why the recovery rate when the material 4 is used is lower than the recovery rate when the material 1 with the same frictional electrability is used is estimated as follows. That is, it is considered that the reason is that the material 4 is a relatively small fiber, that is, a relatively thin fiber, and therefore, the rigidity of the bristles 41C is insufficient, and the relatively large ceramic slag adhering to the object S cannot be moved.

<Optimization of the voltage applied to the brush roller> The optimization of the voltage applied to the brush roller is as shown in Figure 15(A). On the object, the state where the predetermined voltage is applied is maintained for 10 seconds. Then, as shown in FIG. 15(B), the brush roller was removed from the object, and the width of the band-shaped area formed by the removal of dust was evaluated as the dust adsorption width (the width of the electric field).

As the bristles of the brush roller, the conductive polyester of Material 1 which obtained a suitable result in the previous evaluation was used. As the object, a PET film with a thickness of 50 μm was used. As the foreign matter, polyester particles having a particle size of 50 μm to 150 μm are used. Set the prescribed voltage applied to the brush roller to 0 V, -100 V, -400 V, -800 V, or -1,600 V. The evaluation result of the dust adsorption width is shown in FIG. 16.

As can be seen from FIG. 16, it was confirmed that when the applied voltage to the brush roller was -400 V, the dust adsorption width was the largest, that is, the adsorption performance was the highest. In addition, according to the result shown in FIG. 16, as the lower limit of the voltage applied to the brush roller, it can be said that it is preferably -800 V, and more preferably -600 V. On the other hand, as the upper limit of the applied voltage, it can be said that it is preferably -200 V, and more preferably -300 V.

<Research on the peripheral speed of the brush and the amount of pressure contact> Using the cleaning device shown in FIGS. 1 and 2, the peripheral speed of the brush roller 41 of the front brush roller unit 4 and the amount of pressure contact on the object were changed. , While removing foreign matter from the object. In this way, the influence of the peripheral speed of the brush roller and the amount of pressure contact of the brush roller to the object on the removal of foreign matter was studied.

The influence caused by the peripheral speed of the brush roller was to change the ratio (B/W) of the peripheral speed B of the brush roller to the conveying speed W of the object, and it was evaluated as the relationship with the removability of ceramic dross. As a result, when B/W is 50% (for example, the conveying speed with respect to the object is 12 m/min, and the peripheral speed of the brush roller is 6 m/min), the ceramic slag will fly toward the entrance side of the workpiece. On the other hand, if the peripheral speed of the brush roller is changed to 3 m/min and B/W is changed to 25%, the bouncing is suppressed. Generally, small foreign objects are more likely to be bounced off than large foreign objects, so it is judged that the B/W is preferably 25% or less.

The influence of the pressure-bonding amount of the brush roller on the object was evaluated by changing the pressure-bonding amount to 0.3 mm or 0.6 mm while removing the ceramic dross. As a result, if the pressure-bonding amount is set to 0.3 mm, a part of the ceramic slag will rub the brush roller and remain on the object. On the other hand, if the crimping amount is set to 0.6 mm, ceramic slag can be removed. Here, the larger the amount of crimping, the better the removal of foreign matter, but if it is too large, scratches may occur depending on the type or state of the object. However, the upper limit of the crimping amount is different for each object. Therefore, by adjusting the height of the brush roller unit using the height adjustment mechanism, even when the thickness, type, state, and the like of the object are different, the pressure contact amount of the brush roller can be optimized.

<Confirmation of cleaning performance> The cleaning performance of the cleaning device was evaluated. Specifically, for the combination of various foreign objects and objects, the cleaning device shown in FIGS. 1 and 2 was used, and the peripheral speed and applied voltage of each roller were set as shown in Table 2, and the surface of the object before and after cleaning Take a picture to make an evaluation.

The specific combination of the foreign matter and the object is set as ceramic punch residue and green sheets, sebum and polarizing plates, cotton fibers and acrylic plates, polyester fibers and green sheets, or polyester particles and PET films. In addition, the conveying speed of the object was set to 10 m/min. The imaging results of each combination are shown in (A) to (F) of FIGS. 17 to 19. (A) to (F) of FIGS. 17 to 19 are all images on the left before cleaning, and images on the right after cleaning. The combination of (A) in FIG. 17 is that the object Sa is a green sheet, and the foreign substance Xa is a ceramic punch slag (φ4 mm, thickness 120 μm). The combination of Fig. 17(B) is that the object Sb is a green sheet, and the foreign material Xb is ceramic slag of various sizes and shapes (length is 0.1 mm to 3 mm, thickness is 170 μm). In the combination of (C) of FIG. 18, the object Sc is the deflecting plate, and the foreign object Xc is sebum. The combination of (D) in FIG. 18 is that the object Sd is an acrylic plate, and the foreign object Xd is cotton fiber. The combination of (E) in FIG. 19 is that the object Se is a green sheet, and the foreign object Xe is a polyester fiber (length is 2 mm to 15 mm). In the combination of (F) in FIG. 19, the object Sf is a PET film, and the foreign matter Xf is polyester particles (particle size of 50 μm to 150 μm).

[Table 2]

As shown in Figs. 17 to 19, it was confirmed that any combination can appropriately remove foreign matter from the object. [Industrial availability]

The cleaning device of the present invention can improve maintenance, and can remove not only relatively large foreign matter of millimeter size, but also fine foreign matter. Therefore, it can be suitably used for dust adhering to the surface of plate-shaped or film-shaped objects. Removal of foreign matter.

1‧‧‧Fixer 2A‧‧‧Upstream side external transport mechanism 2B‧‧‧Downstream side external transport mechanism 3‧‧‧Cleaning mechanism 3A‧‧Front side cleaning mechanism 3B‧‧‧Back side cleaning mechanism 4‧‧‧Front side Brush roller unit 5‧‧‧Front side cleaning roller unit 6‧‧‧Back side counter roller unit 7‧‧‧Back side brush roller unit 8‧‧‧Back side cleaning roller unit 9‧‧‧Front side counter roller unit 10‧ ‧‧Plate member 11‧‧‧Bar 12‧‧‧Shaft 13,44,55‧‧‧Foreign object collection part 20A, 20B‧‧‧With conveying part 21A, 21B, 130‧‧‧Roller 22A, 22B‧‧‧ Endless belt 40, 50, 90‧‧‧Frame body 40A, 44A, 50A, 55A, 90A‧‧‧Grip 40B, 50B, 90B‧‧‧ Opening 41, 52, 71, 81‧‧‧Brush roller 41A, 51A, 52A, 71A, 81A‧‧‧Mandrel 41B, 52B, 71B, 81B‧‧‧Adhesive layer 41C, 52C, 71C, 81C‧‧‧Bristles 42, 53, 72, 82‧‧‧Recovery roller 42A ‧‧‧Roller body 42B‧‧‧Corrosion resistant layer 43,54,73,83‧‧‧Blade 43a,54a,73a,83a‧‧‧Blade support part 45,85‧‧‧Conveying roller 45A‧‧‧Mandrel 45B‧‧‧Resin part 51,80‧‧‧Cleaning roller 51B‧‧‧Inner part 51C‧‧‧Outer part 60,91‧‧Counter metal roller 61,92‧‧‧Counter resin roller 62‧‧ ‧Auxiliary roller 101‧‧‧Fixing member 102‧‧‧Sliding member 103‧‧‧Top plate 104,112‧‧‧Cover 110‧‧‧Unit side terminal 111‧‧‧Unit side electrode plate 120‧‧‧Fixer side terminal 121‧‧‧Base part 122‧‧‧Fixer side electrode plate 123‧‧‧Enclosure part 130a‧‧‧Concavity 131‧‧‧Frame side electrode 132‧‧‧Leaf spring D‧‧‧Conveying direction L1, L2‧ ‧‧Distance S, Sa, Sb, Sc, Sd, Se, Sf‧‧‧Object S1‧‧‧Front surface S2‧‧‧Back surface Xa, Xb, Xc, Xd, Xe, Xf‧‧‧Foreign object Z ‧‧‧axis

Fig. 1 is a perspective view showing a cleaning device according to an embodiment of the present invention. Fig. 2 is a schematic cross-sectional view of the cleaning device shown in Fig. 1. Fig. 3 is a schematic cross-sectional view of a brush roller of the cleaning device shown in Fig. 1. Fig. 4 is a schematic cross-sectional view of a recovery roller of the cleaning device shown in Fig. 1. Fig. 5 is a schematic front view of a conveying roller of the cleaning device shown in Fig. 1. Fig. 6 is a schematic cross-sectional view taken along line X-X in Fig. 5. Fig. 7 is a schematic cross-sectional view showing an example of a height adjustment mechanism of a cleaning device applicable to an embodiment of the present invention. Fig. 8 is a schematic cross-sectional view showing a step of height adjustment using the height adjustment mechanism of Fig. 7. Fig. 9 is a schematic perspective view showing the height adjustment mechanism of Fig. 8. Fig. 10 is a schematic cross-sectional view of a cleaning roller of the cleaning device shown in Fig. 1. Fig. 11 is a schematic perspective view showing a unit-side terminal of a cleaning device applicable to an embodiment of the present invention. Fig. 12 is a schematic perspective view showing a holder-side terminal of a cleaning device applicable to an embodiment of the present invention. Fig. 13 is a schematic cross-sectional view showing a voltage applying mechanism of a cleaning device applicable to an embodiment of the present invention. Fig. 14 is a diagram showing a charging sequence of an object, a brush, and a foreign object. 15 is a schematic diagram for explaining an experimental method for optimizing the applied voltage of the brush roller in the brush roller unit. FIG. 16 is a graph showing the measurement result of the adsorption width of foreign matter with respect to the applied voltage of the brush roller. FIG. 17 is an imaging result of the surface of the object showing the result of the confirmation of the cleaning performance. FIG. 18 shows the result of imaging of the surface of the object showing the result of checking the cleaning performance. FIG. 19 shows the result of imaging of the surface of the object showing the result of checking the cleaning performance.

1: Fixer

2A: External transport mechanism on the upstream side

2B: External transport mechanism on the downstream side

3: Cleaning mechanism

3A: Front side cleaning mechanism

3B: Backside cleaning mechanism

4‧‧‧Side brush roller unit

5‧‧‧Front side cleaning roller unit

6‧‧‧Back side facing roller unit

7‧‧‧Back side brush roller unit

8‧‧‧Back side cleaning roller unit

9‧‧‧Front side facing roller unit

10‧‧‧Plate member

11‧‧‧Bon

12‧‧‧Axis

13, 44, 55‧‧‧Foreign Object Recycling Department

21A、21B‧‧‧roller

22A、22B‧‧‧Annular belt

40, 50, 90‧‧‧Frame

40A, 44A, 50A, 55A, 90A‧‧‧Grip

40B, 50B, 90B‧‧‧ opening

41, 52, 71, 81‧‧‧Brush roller

42, 53, 72, 82‧‧‧Recycling roller

43,54,73,83‧‧‧Blade

43a, 54a, 73a, 83a‧‧‧Blade support

45、85‧‧‧Conveying roller

51、80‧‧‧Cleaning roller

60、91‧‧‧Opposite metal roller

61、92‧‧‧Opposite resin roller

62‧‧‧Auxiliary roller

D‧‧‧Conveying direction

S‧‧‧Object

S1‧‧‧Side surface

S2‧‧‧Back side surface

Claims (9)

A cleaning device that removes foreign matter on the surface while conveying a plate-shaped or film-shaped object, and is characterized by comprising: a front side brush roller unit, which is detachably arranged above the conveyed object and uses the front side The brush roller removes foreign matter on the front surface of the object; the front side cleaning roller unit is detachably arranged above the object and on the downstream side in the conveying direction of the front side brush roller unit, and uses the front side cleaning roller to remove all the objects. Foreign matter on the front surface of the object; and a height adjustment mechanism for adjusting the height of each of the front brush roller unit and the front cleaning roller unit, and the front brush roller and the front cleaning roller are in contact with The object is to remove foreign matter on the surface of the object, the height adjustment mechanism includes a fixing member and a sliding member, a part of the upper surface of the fixing member forms a slope, and a part of the lower surface of the sliding member forms The inclined surface opposite to the inclined surface of the fixed member, and the inclined surface of the sliding member slides on the inclined surface of the fixed member to cause the height of the sliding member to fluctuate, thereby adjusting the front side brush roller unit and/or the The height of the cleaning roller unit on the front side. The cleaning device according to the first item of the scope of patent application, wherein the front side brush roller unit includes: the front side brush roller, in a direction reversed with respect to the conveying direction, by being substantially perpendicular to the conveying direction and with the conveying surface Roughly parallel rotating shafts to rotate and drive; The first recovery roller is arranged so as to be substantially parallel to and in contact with the front side brush roller; and the first blade abuts on the surface of the first recovery roller and removes adhering foreign matter. The cleaning device according to claim 1, wherein the front side brush roller unit includes a conveying roller, and the conveying roller has a rotating shaft that is substantially perpendicular to the conveying direction and substantially parallel to the conveying surface, and is arranged on the front side The brush roller is on the upstream side in the conveying direction and assists the conveying of the object. The cleaning device according to claim 2, wherein the front side brush roller unit is provided with a first foreign matter recovery part on the upstream side in the conveying direction of the front side brush roller, and the first foreign matter recovery part contains at least the Describe the foreign matter removed by the first blade. According to the cleaning device described in claim 1, wherein the front-side cleaning roller unit includes: the front-side cleaning roller is rotated in a forward direction with respect to the conveying direction by being substantially perpendicular to the conveying direction and with the conveying surface A substantially parallel rotating shaft is driven to rotate; the brush roller is arranged substantially parallel to and in contact with the front side cleaning roller, and is driven to rotate in a reverse direction with respect to the front side cleaning roller; second recovery The roller is arranged so as to be substantially parallel to and in contact with the brush roller; the second blade abuts on the surface of the second recovery roller and removes adhered foreign matter. The cleaning device as described in item 5 of the scope of patent application, wherein the table The side cleaning roller unit is provided with a second foreign matter recovery part on the downstream side in the conveying direction of the front side cleaning roller, and the second foreign matter recovery part accommodates at least the foreign matter removed by the second blade. The cleaning device according to the first item of the scope of patent application, which includes a back side facing roller unit, the back side facing roller unit includes: a first back side facing roller, corresponding to the front side of the front side brush roller unit The brush roller is provided below the object; and the second backside facing roller is provided below the object corresponding to the front side cleaning roller of the front side cleaning roller unit. The cleaning device according to claim 7, wherein the back side facing roller unit is provided with an auxiliary device provided on the upstream side in the conveying direction of the first back side facing roller and assisting the conveyance of the object Roll. The cleaning device described in claim 7 includes a back side brush roller unit arranged below the object and on the downstream side of the conveying direction of the back side facing roller unit, and uses the back side The brush roller removes foreign matter on the back side surface of the object; the back side cleaning roller unit is arranged below the object and on the downstream side of the conveying direction of the back side brush roller unit, and the object is removed by the back side cleaning roller Foreign matter on the back side surface of the back side surface; and a detachably arranged front side facing roller unit, including a first front side facing roller, corresponding to the back side brush roller of the back side brush roller unit and installed above the object , And the second front side facing roller are provided above the object corresponding to the back side cleaning roller of the back side cleaning roller unit.

Images