JP2019051517A - Cleaning device - Google Patents

Abstract

To provide a cleaning device capable of removing foreign matters relatively large in millimeter size and fine foreign matters.SOLUTION: A cleaning device for an object surface to be conveyed includes: a cleaning roller which is disposed almost vertically to a conveyance direction of the object and around a rotation axis almost parallel to the object surface and is contacted with the object surface in a charged state; and a cleaning brush which is disposed in almost parallel to the cleaning roller and is contacted with the object surface in the charged state. The cleaning brush is disposed away from the cleaning roller and has a columnar core metal and a brush part formed by planting a plurality of bristles on a peripheral surface of the core metal. The rotation direction in a contact part with the object surface in the cleaning roller is a forward direction with respect to the conveyance direction of the object.SELECTED DRAWING: Figure 1

Description

  The present invention relates to a cleaning device.

  In recent years, cleaning devices have been developed for removing foreign substances such as dust adhering to the surface of a target object such as a glass substrate of a flat panel display (FPD), a printed circuit board on which electronic components are mounted, a resin thin plate, and a film material.

  As such a cleaning device, there has been proposed a cleaning device that removes foreign matter on the surface of an object with a charged roller-shaped cleaning brush, and transports and collects the removed foreign matter by the force of an electric field (Japanese Patent Laid-Open No. 2011-2011). No. 92846).

  However, although the cleaning apparatus proposed in the above publication can remove foreign particles having a relatively large millimeter size, a portion where the cleaning brush does not contact the surface of the object is generated, and thus fine foreign matter existing in the portion cannot be removed. In the above publication, the rotation direction of the cleaning brush may be either the forward direction or the reverse direction with respect to the conveyance direction of the object. However, the inventors have confirmed that the cleaning brush is moved in the forward direction. In the case of rotation, the relatively large millimeter-size foreign matter could not be removed sufficiently.

JP 2011-92848 A

  The present invention has been made based on the above circumstances, and an object of the present invention is to provide a cleaning device capable of removing fine foreign matters together with relatively large foreign matters having a millimeter size.

  The invention made to solve the above-mentioned problems is a cleaning device for a surface of an object to be transported, and is arranged around a rotation axis that is substantially perpendicular to the transport direction of the object and substantially parallel to the surface of the object. A cleaning roller that is in contact with the surface of the object in a charged state, and a cleaning brush that is disposed substantially parallel to the cleaning roller and that is in contact with the surface of the object while being rotationally driven in a charged state; Arranged upstream of the cleaning brush in the direction of conveyance of the object, with a rotation axis that is substantially perpendicular to the direction of conveyance of the object and substantially parallel to the surface of the object, and restricts the direction in which the object proceeds. A rotation direction at a contact portion with the surface of the object in the cleaning brush is opposite to the conveying direction of the object. And wherein the door.

  In the cleaning device, the traveling direction of the object into the cleaning device is regulated by a pair of guide rollers. For this reason, it can suppress that a target object is bent by electrification of a cleaning roller and a cleaning brush, or reverse rotation of a cleaning brush. Therefore, the cleaning device can effectively remove foreign matters adhering to the surface of the object. Note that “substantially parallel” means that the angle formed is within ± 10 °. “Substantially vertical” means that the angle formed is within 90 ° ± 10 °.

  The cleaning brush may be brought into contact with the surface of the object in a charged state. In this way, by bringing the cleaning brush into contact with the surface of the object in a charged state, the foreign matter is more easily attracted to the cleaning brush by the force of the electric field, so that the foreign matter on the surface of the object can be more effectively removed.

  The cleaning brush may be in contact with the surface of the cleaning roller. In this way, by bringing the cleaning brush into contact with the surface of the cleaning roller, the foreign matter adsorbed on the surface of the cleaning roller can be moved to the cleaning brush. Thereby, the fall of the adsorption effect of a cleaning roller can be controlled.

  It is preferable to further include a dust collecting roller disposed substantially parallel to the cleaning brush and contacting the outer peripheral side of the cleaning brush with the surface charged. In this way, by arranging the dust collecting roller that is brought into contact with the outer peripheral side of the cleaning brush in a state where the surface is charged substantially parallel to the cleaning brush, for example, the dust collecting roller surface is charged with a higher voltage than the cleaning brush. Thus, the foreign matter moved to the cleaning brush can be further moved to the dust collecting roller, so that the work of removing the foreign matter adhering to the cleaning brush can be omitted or reduced.

  It is preferable to further include a brush roller disposed substantially parallel to the cleaning roller and contacting the surface of the cleaning roller while being charged and rotated. In this way, by disposing the brush roller that contacts the cleaning roller surface while being charged and rotated, substantially parallel to the cleaning roller, the foreign matter adsorbed on the cleaning roller surface can be moved to the brush roller. A decrease in the adsorption effect can be suppressed.

  It is preferable to further include one or two dust collecting rollers which are disposed substantially in parallel with the cleaning brush and the brush roller and are brought into contact with the outer peripheral sides of the cleaning brush and the brush roller with the surface charged. In this way, by arranging one dust collecting roller which is brought into contact with the outer peripheral sides of both the cleaning brush and the brush roller in a state where the surface is charged, the dust collecting roller, for example, is arranged substantially in parallel with the cleaning brush and the brush roller. By charging the surface with a higher voltage than the cleaning brush and the brush roller, the foreign matter moved to the cleaning brush and the brush roller can be further moved to the dust collecting roller. Can be omitted or reduced. In addition, one dust collecting roller that is brought into contact with the cleaning brush with the surface charged is disposed substantially parallel to the cleaning brush, and another dust collecting roller that is brought into contact with the brush roller with the surface charged is brushed. Even if the roller is disposed substantially parallel to the roller, the foreign matter moved to the cleaning brush and the brush roller can be further moved to these dust collecting rollers, so that the work of removing the foreign matter adhering to the cleaning brush and the brush roller can be omitted or reduced. .

  The cleaning roller and the cleaning brush may be incorporated in a single unit. In this manner, the cleaning device and the cleaning brush are incorporated into a single unit, so that the cleaning device can be downsized.

  A unit in which the cleaning roller is incorporated and a unit in which the cleaning brush is incorporated may be provided separately. In this way, by replacing the unit incorporating the cleaning roller and the unit incorporating the cleaning brush as separate units, it is possible to replace each unit, and it is possible to replace them individually with the respective lifetimes of the cleaning roller and the cleaning brush. .

  As described above, the cleaning device of the present invention can remove fine foreign matters together with relatively large foreign matters having a millimeter size.

It is a mimetic diagram of a cleaning device concerning a first embodiment of the present invention. It is a schematic diagram of the cleaning apparatus which concerns on 2nd embodiment of this invention. It is a schematic diagram of the cleaning apparatus which concerns on embodiment different from embodiment of FIG.1 and FIG.2. FIG. 4 is a schematic diagram of a cleaning roller unit of a cleaning device according to an embodiment different from the embodiments of FIGS. 1, 2, and 3. FIG. 4 is a schematic diagram of a cleaning brush unit of a cleaning device according to an embodiment different from the embodiments of FIGS. 1, 2, and 3. FIG. 4B is a schematic view of a cleaning device according to an embodiment different from the embodiments of FIGS. 1, 2, 3 and 4A.

  Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings as appropriate.

[First embodiment]
The cleaning device 1 shown in FIG. 1 is a cleaning device for the surface of a film-like or plate-like object S to be conveyed. The cleaning device 1 is disposed to be rotatable about a rotation axis that is substantially perpendicular to the conveyance direction C of the object S and substantially parallel to the surface of the object S, and contacts the surface of the object S with the surface charged. It mainly includes a cleaning roller 2 to be moved and a roller-shaped cleaning brush 3 which is disposed substantially parallel to the cleaning roller 2 and is brought into contact with the surface of the object S while being driven to rotate. The cleaning device 1 is disposed substantially parallel to the cleaning roller 2, and is disposed substantially parallel to the cleaning roller 3 and the brush roller 4. The brush roller 4 is brought into contact with the surface of the cleaning roller 2 while being charged and rotated. And a dust collecting roller 5 that is brought into contact with the outer peripheral side of the cleaning brush 3 and the brush roller 4 with the surface charged. In addition, the arrow in FIG. 1 has shown the conveyance direction C of the target object S, and the rotation direction of each roller. The rotation direction at the contact portion with the surface of the object S in the cleaning roller 2 is the forward direction with respect to the conveyance direction C of the object S, and the rotation direction at the contact portion with the surface of the object S in the cleaning brush 3 is The direction of the object S is opposite to the conveyance direction C.

  The cleaning device 1 also includes a scraper 6 that scrapes off foreign matter adhering to the surface of the dust collecting roller 5, and a frame 7 that houses the cleaning roller 2, the cleaning brush 3, the brush roller 4, the dust collecting roller 5, and the scraper 6. With. As described above, in the cleaning device 1, the cleaning roller 2 and the cleaning brush 3 are incorporated in a single unit.

  Further, the cleaning device 1 includes a first counter electrode roller 9 disposed so as to face the cleaning brush 3 substantially in parallel, and a second counter electrode roller 10 disposed so as to face the cleaning roller 2 substantially in parallel. A pair of guide rollers 11 that are arranged to be rotatable about a rotation axis that is substantially perpendicular to the conveyance direction C of the object S and substantially parallel to the surface of the object S, and regulates the direction in which the object S is conveyed; Is provided.

(Object)
The object S to be removed by the cleaning device 1 may be any film-like or plate-like object. For example, an FPD glass substrate, a printed circuit board on which electronic components are mounted, a resin thin plate, a film material, or the like can be used as the object S.

  The average thickness of the object S is not particularly limited, but the lower limit of the average thickness of the object S is preferably, for example, 30 μm, and more preferably 50 μm. If the average thickness of the object S is less than the lower limit, it may be difficult to transport the object S.

  Although the minimum of the conveyance speed of the target object S is not specifically limited, For example, 5 m / min is preferable and 10 m / min is more preferable. On the other hand, the upper limit of the conveyance speed of the object S is preferably 30 m / min, and more preferably 20 m / min. If the conveyance speed of the object S is less than the above lower limit, the time required for removing the foreign matter becomes long, and the foreign matter removal efficiency may be reduced. On the other hand, if the conveyance speed of the object S exceeds the upper limit, there is a possibility that the cleaning roller 2 cannot sufficiently adsorb foreign matter on the surface of the object S.

<Cleaning roller>
The cleaning roller 2 is disposed to be rotatable about a rotation axis that is substantially perpendicular to the conveyance direction C of the object S and substantially parallel to the surface of the object S. The cleaning roller 2 is in contact with the surface of the object S with the surface charged, and adsorbs foreign matter adhering to the surface of the object S by the force of an electric field while being rotated along with the conveyance of the object S. That is, the foreign matter adhering to the surface of the object S is attracted to the surface of the cleaning roller 2 by electrostatic force.

  The cleaning roller 2 includes a cylindrical cored bar 2a, a cylindrical inner layer part 2b that covers the peripheral surface of the cored bar 2a, and a thin-film cylindrical outer layer part 2c that covers the outer peripheral surface of the inner layer part 2b.

  An elastic member having conductivity is used as the material of the inner layer portion 2b. As such an elastic member, for example, polyester-based urethane containing carbon may be used.

  As the material of the outer layer portion 2c, any material may be used as long as it can charge a charge that adsorbs foreign matter adhering to the surface of the object S by the force of an electric field, and examples thereof include polyurethane such as acrylic mixed polyurethane and fluorine mixed polyurethane. By forming the outer layer portion 2c with polyurethane, the wear resistance is superior to that when the outer layer portion 2c is formed with silicone resin, butyl rubber, or the like, and contamination with a plasticizer or a low molecular weight substance can be reduced.

  The acrylic mixed polyurethane is mainly composed of polyester polyurethane or polyether polyurethane, and further includes (1) thermoplastic polyurethane and silicone / acrylic copolymer resin, (2) acrylic resin (for example, from methacrylic acid-methyl methacrylate copolymer). Or a thermoplastic polyurethane, or (3) a mixture containing an acrylic resin, a polyurethane and a fluorine-based surface coating agent. By using acrylic mixed polyurethane as the material of the outer layer portion 2c, foreign matters that are easily charged negatively are easily removed from the surface of the object S. The “main component” is a component having the largest content, for example, a component contained in an amount of 50% by mass or more.

  The fluorine-mixed polyurethane is mainly composed of polyurethane and means a mixture containing thermoplastic polyurethane and urethane / fluorine copolymer. By using fluorine-mixed polyurethane as the material of the outer layer portion 2c, foreign matters that are easily charged positively are easily removed from the object S.

  As a minimum of average thickness of outer layer part 2c, 2 micrometers is preferred and 5 micrometers is more preferred. On the other hand, the upper limit of the average thickness of the outer layer portion 2c is preferably 500 μm, and more preferably 50 μm. If the average thickness of the outer layer portion 2c is less than the above lower limit, the surface of the cleaning roller 2 cannot be sufficiently charged, and there is a possibility that a foreign matter adsorption effect cannot be obtained sufficiently. On the other hand, if the average thickness of the outer layer portion 2c exceeds the upper limit, good charging characteristics for adsorbing foreign matter may not be obtained.

  The cleaning roller 2 rotates with the surface S coming into contact with the object S to be conveyed. Accordingly, the cleaning roller 2 rotates so as to be in the forward direction with the conveyance direction C of the object S at the contact portion with the surface of the object S. Since the cleaning roller 2 is charged, foreign matter on the surface of the object S is attracted to the cleaning roller 2 by the force of the electric field when the surface of the object S to be conveyed approaches the surface of the cleaning roller 2.

<Cleaning brush>
The roller-shaped cleaning brush 3 is disposed substantially parallel to the cleaning roller 2 on the upstream side in the transport direction C of the object S relative to the cleaning roller 2. The cleaning brush 3 is disposed apart from the cleaning roller 2 so that the outer peripheral side does not contact the surface of the cleaning roller 2. The cleaning brush 3 is rotationally driven while being in contact with the surface of the object S so that the rotation direction at the contact portion with the surface of the object S is opposite to the conveyance direction C of the object S.

  The cleaning brush 3 has a cylindrical cored bar 3a and a brush part 3b formed by planting a plurality of hairs on the peripheral surface of the cored bar 3a.

  As the bristles that form the brush portion 3b, those that are easily physically attached with foreign substances are preferable, and for example, synthetic resin fibers can be used. Further, as the bristles forming the brush portion 3b, those capable of charging a charge that adsorbs foreign matter adhering to the surface of the object S by the force of an electric field are preferable. A fiber made of synthetic resin containing a functional material can be suitably used.

  The cross-sectional shape of the hair of the brush portion 3b is not particularly limited, and as the brush portion 3b, for example, a cross-sectional shape of the hair that is circular, elliptical, or star-shaped can be used. Further, the outer shape of the brush portion 3b is not particularly limited, and the brush portion 3b may be, for example, a shape having a straight shape, a wave curve shape, a shape formed by combining a curve and a straight line, or the like. it can. In addition, since it becomes easy to adsorb | suck a foreign material, so that the surface area of the brush part 3b is large, as a bristle which forms the brush part 3b, a cross-sectional shape can use a star shape suitably, for example.

  The cleaning brush 3 is driven to rotate at a contact portion with the surface of the object S so as to be in a direction opposite to the conveyance direction C of the object S. Foreign matter adheres to the brush portion 3b. The cleaning brush 3 is also charged similarly to the cleaning roller 2. As a result, an attracting force due to the electric field force also acts, so that the foreign matter on the surface of the object S can be more effectively attracted and moved to the brush portion 3b. Even if the force of the electric field does not act, the foreign matter adheres to the brush portion 3b, so the cleaning brush 3 does not necessarily have to be charged.

  The lower limit of the average pressure contact amount of the cleaning brush 3 to the object S is preferably 0.03 mm, and more preferably 0.05 mm. On the other hand, the upper limit of the average pressure contact amount is preferably 1.5 mm, and more preferably 1 mm. If the average pressure contact amount is less than the lower limit, the surface of the object S may not be sufficiently scraped. On the other hand, when the average pressure contact amount exceeds the upper limit, the frictional force between the brush portion 3b and the surface of the object S increases, so that the conveyance speed of the object S may decrease. The “pressure contact amount” means a difference between the distance between the surface of the metal core 3a and the object S at the contact portion between the cleaning brush 3 and the object S and the length of the hair of the brush part 3b.

  The lower limit of the peripheral speed of the cleaning brush 3 is preferably 1 m / min, and more preferably 3 m / min. On the other hand, the upper limit of the peripheral speed of the cleaning brush 3 is preferably 30 m / min, and more preferably 15 m / min. If the peripheral speed of the cleaning brush 3 is less than the lower limit, there is a possibility that the foreign matter on the surface of the object S cannot be sufficiently scraped. On the contrary, when the peripheral speed of the cleaning brush 3 exceeds the upper limit, the frictional force between the brush portion 3b and the surface of the object S increases, so that the conveyance speed of the object S may decrease.

<Brush roller>
The brush roller 4 is disposed substantially parallel to the cleaning roller 2 so that the outer peripheral side contacts the surface of the cleaning roller 2 while being charged and rotated.

  The brush roller 4 has a cylindrical cored bar 4a and a brush part 4b formed by planting a plurality of hairs on the peripheral surface of the cored bar 4a.

  As the metal core 4a and the brush part 4b, for example, the same material as the metal core 3a and the brush part 3b of the cleaning brush 3 described above can be used.

  A voltage higher than the voltage applied to the cleaning roller 2 is applied to the brush roller 4. As a result, the outer peripheral side of the brush roller 4 has a higher potential than the surface of the cleaning roller 2, so that the foreign matter adhering to the surface of the cleaning roller 2 is attracted to the brush roller 4 and the foreign matter on the surface of the cleaning roller 2 moves to the brush roller 4. .

  The rotational direction of the brush roller 4 that is rotationally driven may be any direction, but the cleaning roller 2 and the brush roller 4 have contact points between the cleaning roller 2 and the brush roller 4 so that the movement directions of the circumferential surfaces are opposite to each other. 2 Since foreign matter adhering to the surface is likely to be scraped, the foreign matter is likely to move to the brush roller 4. Therefore, the brush roller 4 is preferably driven to rotate in the same rotational direction as the cleaning roller 2.

<Dust collecting roller>
The dust collecting roller 5 is disposed substantially parallel to the cleaning brush 3 and the brush roller 4 so that the surface thereof is in contact with the outer peripheral side of the cleaning brush 3 and the outer peripheral side of the brush roller 4 while being charged and rotated.

  A conductive material is used as the material of the dust collecting roller 5. Examples of such a conductive material include metal materials such as stainless steel, copper, and aluminum. When a conductive material that easily oxidizes, such as copper or aluminum, is used as the dust collecting roller 5, it is preferable that the surface of the dust collecting roller 5 be subjected to a corrosion-resistant plating process such as nickel plating or gold plating.

  A voltage higher than the voltage applied to the cleaning brush 3 and the brush roller 4 is applied to the dust collecting roller 5. As a result, the surface of the dust collecting roller 5 has a higher potential than the outer peripheral side of the cleaning brush 3 and the brush roller 4, so that the foreign matter adhering to the cleaning brush 3 and the brush roller 4 is adsorbed on the surface of the dust collecting roller 5. 3 and the foreign matter adhering to the brush roller 4 move to the dust collecting roller 5. Thereby, the removal operation | work of the foreign material collected on the cleaning brush 3 and the brush roller 4 can be abbreviate | omitted or reduced.

  The rotation direction of the dust collecting roller 5 may be any direction. The dust collecting roller 5 is preferably driven in a rotational direction in which foreign matter scraped from the surface of the dust collecting roller 5 by a scraper 6 described later is easily collected. In the cleaning device 1, the dust collection roller 5 is disposed above the cleaning brush 3, and the scraper 6 is disposed on the upstream side in the conveyance direction C of the dust collection roller 5 so that the scraper 6 is inclined downstream in the conveyance direction C and downward. Is done. Therefore, the dust collecting roller 5 is driven in the same rotational direction as that of the cleaning brush 3, so that the scraped foreign matter can be easily collected.

<Scraper>
The scraper 6 is a rectangular plate, for example, and has a portion that can contact the surface of the dust collecting roller 5 in the axial direction. The scraper 6 is inclined downstream in the conveying direction C and downward, and is disposed on the upstream side in the conveying direction C of the dust collecting roller 5 so that the long side of the rectangle contacts the surface of the dust collecting roller 5 in the rotation axis direction. Is done. Here, the long side that contacts the surface of the dust collecting roller 5 of the scraper 6 is referred to as a tip portion.

  The scraper 6 is formed of an elastic body made of synthetic resin such as thermosetting polyurethane. As the dust collecting roller 5 rotates, the foreign matter attached to the surface of the dust collecting roller 5 is scraped off by the tip of the scraper 6 that contacts the surface of the dust collecting roller 5. Thereby, the surface of the dust collecting roller 5 is in a clean state from which foreign matters are removed. In addition, a tray-like foreign material collection unit 8 is disposed below the tip of the scraper 6, and the scraped foreign material is dropped and collected in the foreign material collection unit 8.

<Frame>
The frame 7 is substantially perpendicular to the conveyance direction C of the object S, and the front and rear plates disposed before and after the conveyance direction C, and substantially parallel to the conveyance direction C and substantially perpendicular to the surface of the object S. It has a pair of side plates arranged and a top plate arranged substantially parallel to the surface of the object S. The top plate is connected to each upper end of the pair of side plates, front plate and rear plate. The cleaning roller 2, the cleaning brush 3, the brush roller 4, the dust collecting roller 5 and the scraper 6 are accommodated inside the frame 7 having such a shape.

  The lower part of the rear plate is bent downstream in the conveying direction C so as to be substantially parallel to the surface of the object S, and the bent end side is further bent upward so as not to contact the cleaning brush 3. Has been. The tray-like foreign matter collecting portion 8 is formed by the bent shape of the lower portion of the rear plate.

  The frame 7 is formed of an insulating material. An example of such an insulating material is a resin such as polyacetal.

  The foreign matter collection unit 8 is formed below the position where the tip of the scraper 6 contacts the surface of the dust collecting roller 5. Foreign matter scraped off from the surface of the dust collecting roller 5 due to contact with the tip of the scraper 6 is dropped and collected in the foreign matter collecting unit 8.

<Counter electrode roller>
The first counter electrode roller 9 is in a position substantially parallel to and facing the cleaning brush 3 so as to contact the surface of the object S opposite to the surface that contacts the cleaning brush 3 with the surface charged. It is rotatably arranged. The first counter electrode roller 9 rotates with the conveyance of the object S.

  Part or all of the first counter electrode roller 9 is formed of a conductive material. Examples of such a conductive material include metal materials such as stainless steel, copper, and aluminum. The first counter electrode roller 9 may be formed only of such a conductive material, and the outer peripheral surface of the cored bar formed of such a conductive material is covered with an insulating layer such as a synthetic resin. Also good.

  A voltage lower than the voltage applied to the cleaning brush 3 or a voltage opposite in polarity is applied to the first counter electrode roller 9. Alternatively, the first counter electrode roller 9 is grounded. As a result, the suction effect due to the electric field force of the cleaning brush 3 is promoted, and foreign matter adhering to the surface of the object S on the cleaning brush 3 side is easily attracted to the cleaning brush 3.

  The second counter electrode roller 10 is in a position substantially parallel to and facing the cleaning roller 2 so as to contact the surface of the object S opposite to the surface contacting the cleaning roller 2 with the surface charged. It is rotatably arranged. The second counter electrode roller 10 rotates with the conveyance of the object S.

  The 2nd counter electrode roller 10 is formed with an electroconductive material, for example, can be formed with the material similar to the 1st counter electrode roller 9. FIG. By applying a voltage to the second counter electrode roller 10 made of a conductive material or by grounding the second counter electrode roller 10, the adsorption effect due to the electric field force of the cleaning roller 2 is promoted.

<Guide roller>
The pair of guide rollers 11 are rotated substantially upstream of the cleaning brush 3 and the first counter electrode roller 9 in the conveying direction C of the object S and substantially perpendicular to the conveying direction C of the object S and substantially parallel to the surface of the object S. It is arranged so as to be rotatable about an axis. The pair of guide rollers 11 are disposed so as to have a gap such that both surfaces of the object S conveyed between the guide rollers 11 are in contact with the peripheral surface of each guide roller 11. The pair of guide rollers 11 rotates with the conveyance of the object S.

  By inserting the object S between the pair of guide rollers 11 in the cleaning device 1, the direction in which the tip of the object S advances into the cleaning device 1 is regulated. For example, when the object S is in the form of a thin film, the tip is easily bent. Even in such a case, the bending of the tip is suppressed by insertion between the pair of guide rollers 11, and the cleaning brush 3 and the first counter electrode roller The tip of the object S can enter between 9. If the object S is, for example, like a plate that is difficult to bend at the tip, and the tip can easily enter between the cleaning brush 3 and the first counter electrode roller 9, the pair of guide rollers 11 may be omitted. Good.

  The material of the guide roller 11 is preferably a material having a small frictional force with the object S, and metal, resin, or the like can be used as a material for forming the guide roller 11.

  The pair of guide rollers 11 may be configured to be rotationally driven. For example, by rotating the pair of guide rollers 11 so as to be forward with respect to the conveyance direction C of the object S, the conveyance speed of the object S in the cleaning device 1 can be made constant.

[Cleaning method]
A cleaning method for removing foreign substances adhering to the surface of a film-like or plate-like object will be described using the cleaning device 1 of FIG. In this cleaning method, a film- or plate-like object S is conveyed (conveying process), and the surface of the object S is contacted, and the rotation direction at the contact point with the surface of the object S is the conveyance direction of the object S. The cleaning brush 3 that is rotationally driven so as to be in the reverse direction with respect to C, and a first foreign matter adsorption process for adsorbing foreign matter adhering to the surface of the object S, and a rotatable arrangement, with the surface charged A cleaning roller 2 that is brought into contact with the surface of the object S mainly includes a second foreign matter suction step for sucking the foreign matter. This cleaning method also includes a first foreign matter moving step in which the foreign matter adsorbed on the cleaning roller 2 is moved to the brush roller 4 that contacts the surface of the cleaning roller 2 while being charged and rotated, and the surface is charged. The dust collecting roller 5 that contacts the outer peripheral side of the cleaning brush 3 and the brush roller 4 is attached to the surface of the dust collecting roller 5 by the second foreign substance moving step for moving the foreign matter adhered to the cleaning brush 3 and the brush roller 4. A step of collecting the foreign matter by scraping the foreign matter with a scraper 6 (foreign matter collecting step).

<Conveying process>
In the conveying step, the tip of the film-like or plate-like object S is inserted between the pair of guide rollers 11. For example, by disposing the cleaning device 1 so that the pair of guide rollers 11 is arranged at the end of a transport mechanism such as a belt conveyor that transports the object S, the cleaning device 1 is moved to the cleaning device 1 at a transport speed by the transport mechanism. The object S can be inserted. Further, for example, the tip of the object S may be inserted between the pair of guide rollers 11 by hand. When the tip of the object S is inserted between the guide rollers 11, the cleaning roller 2 and the second counter electrode roller are passed between the cleaning roller 2 and the second counter electrode roller 10 while both surfaces of the object S are in contact with each other. 10 is rotated, and the object S is conveyed through the cleaning device 1 by the rotational inertia of the cleaning roller 2 and the second counter electrode roller 10 generated by the rotation.

<First foreign matter adsorption step>
In the first foreign matter adsorbing step, foreign matter adhering to the surface of the object S on the cleaning brush 3 side is adsorbed by the cleaning brush 3. Specifically, since the cleaning brush 3 is rotationally driven so that the rotation direction at the contact portion with the surface of the object S is opposite to the conveyance direction C of the object S, the cleaning brush 3 is When coming into contact with the surface of the S, foreign matter adhering to the surface of the object S is scraped. Further, since the cleaning brush 3 is charged, foreign matter on the surface of the object S is adsorbed to the cleaning brush 3 by the force of the electric field. In addition, since a relatively large millimeter-size foreign matter is scraped by the above-described scraping, the relatively large millimeter-size foreign matter is effectively removed from the surface of the object S by the cleaning brush 3 in the first foreign matter adsorption step.

<Second foreign matter adsorption step>
In the second foreign matter adsorption step, foreign matter adhering to the surface of the object S on the cleaning roller 2 side is adsorbed on the surface of the cleaning roller 2. Specifically, since the cleaning roller 2 rotates while being in contact with the surface of the object S in a charged state, when the cleaning roller 2 contacts the surface of the object S, the surface of the object S is affected by the force of the electric field. Foreign matter is attracted to the cleaning roller 2. Here, since the cleaning roller 2 is easy to contact the surface of the object S in the axial direction, fine foreign matters of micron size can be adsorbed. Therefore, by performing the first foreign matter adsorption step and the second foreign matter adsorption step, fine foreign matters can be removed together with relatively large foreign matters adhering to the surface of the object S.

<First foreign matter moving step>
In the first foreign matter moving step, the foreign matter attracted to the cleaning roller 2 in the second foreign matter attracting step is moved to the brush roller 4. Specifically, a voltage higher than the voltage applied to the cleaning roller 2 is applied to the brush roller 4, and the brush roller 4 is driven to rotate while being in contact with the surface of the cleaning roller 2, so that it is attracted to the cleaning roller 2. The foreign matter moves to the brush roller 4. Thereby, the peripheral surface of the cleaning roller 2 before contacting the surface of the object S is in a clean state free from foreign matter.

<Second foreign matter moving step>
In the second foreign matter moving step, the foreign matter attached to the cleaning brush 3 in the first foreign matter adsorbing step and the foreign matter attached to the brush roller 4 in the first foreign matter moving step are moved to the dust collecting roller 5. Specifically, a voltage higher than the voltage applied to the cleaning brush 3 and the brush roller 4 is applied to the dust collecting roller 5, and the dust collecting roller 5 rotates while contacting the outer peripheral side of the cleaning brush 3 and the brush roller 4. By driving, the foreign matter adhered to the cleaning brush 3 and the brush roller 4 is attracted to the dust collecting roller 5.

<Foreign matter collection process>
In the foreign matter collecting step, the foreign matter adsorbed on the surface of the dust collecting roller 5 in the second foreign matter moving step is collected. Specifically, the dust collecting roller 5 whose surface comes into contact with the tip of the scraper 6 is rotationally driven, so that the foreign matter adsorbed on the surface of the dust collecting roller 5 is scraped off by the scraper 6. The scraped foreign matter is dropped and collected in the foreign matter collection unit 8.

[advantage]
The cleaning device is brought into contact with the surface of the object in a charged state on the surface of a cleaning roller that is arranged to be rotatable about a rotation axis that is substantially perpendicular to the conveyance direction C of the object and substantially parallel to the surface of the object. Therefore, fine foreign matters can be effectively removed by adsorption to the surface of the cleaning roller by the force of the electric field. In addition, since the cleaning device contacts the surface of the object while rotating the roller-shaped cleaning brush disposed substantially parallel to the cleaning roller while being charged, the foreign matter adhered to the surface of the object is scraped. Therefore, it is possible to effectively remove a relatively large foreign substance having a millimeter size.

  Further, in the cleaning device, since the dust collecting roller disposed substantially parallel to the cleaning brush and the brush roller contacts the outer peripheral side of the cleaning brush and the brush roller with the surface charged, the cleaning brush and the brush roller The moved foreign matter can be further moved to the dust collecting roller. As a result, it is possible to omit or reduce the work of removing foreign matters attached to the cleaning brush and the brush roller.

  In addition, the cleaning device is easily miniaturized because the cleaning roller and the cleaning brush are incorporated in a single unit.

[Second Embodiment]
The cleaning device 21 shown in FIG. 2 is arranged to be rotatable about a rotation axis that is substantially perpendicular to the conveyance direction C of the object S and substantially parallel to the surface of the object S, and the object is charged in a state where the surface is charged. A cleaning roller 22 that is in contact with the surface of the S and a roller-shaped cleaning brush 23 that is disposed substantially in parallel with the cleaning roller 22 and contacts the surface of the object S while being driven to rotate are mainly provided. The cleaning brush 23 is in contact with the surface of the cleaning roller 22. The cleaning device 21 includes a dust collecting roller 25 that is disposed substantially in parallel with the cleaning brush 23 and contacts the outer peripheral side of the cleaning brush 23 in a state where the surface is charged. The rotation direction of the cleaning roller 22 at the contact portion with the surface of the object S is the forward direction with respect to the conveyance direction C of the object S, and the rotation direction at the contact portion of the cleaning brush 23 with the surface of the object S. Is the direction opposite to the conveyance direction C of the object S.

  In addition, the cleaning device 21 includes a scraper 26 that scrapes off foreign matter adhering to the surface of the dust collecting roller 25, a first counter electrode roller 9 that is disposed so as to face the cleaning brush 23 substantially in parallel, and a cleaning roller 22. A second counter electrode roller 10 disposed so as to be substantially parallel and opposed to the roller, and a rotation axis that is substantially perpendicular to the conveyance direction C of the object S and is substantially parallel to the surface of the object S, And a pair of guide rollers 11 that regulate the direction in which the tip of the object S travels. The cleaning device 21 includes a cleaning roller 22, a cleaning brush 23, a dust collection roller 25, and a scraper 26 housed in a frame, and is incorporated into a single unit as in the cleaning device 1 of the first embodiment. In FIG. 2, the illustration of the frame is omitted.

  The cleaning device 21 has the same configuration as that of the cleaning device 1 of the first embodiment except that the cleaning roller 21 is not provided and the relative arrangement of the cleaning roller 22 and the cleaning brush 23 is different. Therefore, components other than the cleaning roller 22, the cleaning brush 23, the dust collecting roller 25, and the scraper 26 are denoted by the same reference numerals and description thereof is omitted.

<Cleaning roller>
The cleaning roller 22 is in contact with the surface of the object S with the surface charged, and adsorbs foreign matter adhering to the surface of the object S due to the force of the electric field while rotating along with the conveyance of the object S. For example, the cleaning roller 22 similar to the cleaning roller 2 of the first embodiment can be used.

<Cleaning brush>
The roller-shaped cleaning brush 23 is disposed substantially parallel to the cleaning roller 22, and the rotation direction at the contact portion with the surface of the object S is in contact with the conveyance direction C of the object S while contacting the surface of the object S. And is driven to rotate in the opposite direction. For example, the cleaning brush 23 similar to the cleaning brush 3 of the first embodiment can be used.

  The cleaning roller 22 and the cleaning brush 23 are different in relative positional relationship from the cleaning roller 2 and the cleaning brush 3 of the first embodiment. That is, while the cleaning roller 2 and the cleaning brush 3 of the first embodiment are disposed apart from each other, the cleaning brush 23 is disposed so as to contact the surface of the cleaning roller 22.

  A voltage higher than the voltage applied to the cleaning roller 22 is applied to the cleaning brush 23. As a result, the outer peripheral side of the cleaning brush 23 has a higher potential than the surface of the cleaning roller 22, so that the foreign matter adhering to the surface of the cleaning roller 22 is attracted to the cleaning brush 23 and the foreign matter on the surface of the cleaning roller 22 moves to the cleaning brush 23. .

<Dust collecting roller>
The dust collecting roller 25 is disposed substantially in parallel with the cleaning brush 23 and is rotationally driven so as to come into contact with the outer peripheral side of the cleaning brush 23 with the surface charged. As the dust collecting roller 25, for example, the same dust collecting roller 5 as that of the first embodiment can be used.

  A voltage higher than the voltage applied to the cleaning brush 23 is applied to the dust collection roller 25. As a result, the surface of the dust collection roller 25 has a higher potential than the outer peripheral side of the cleaning brush 23, so that the foreign matter adhering to the cleaning brush 23 is adsorbed to the surface of the dust collection roller 25 and the foreign matter adhering to the cleaning brush 23 is collected. Move to roller 25. Thereby, the operation of removing foreign matter accumulated on the cleaning brush 23 can be omitted or reduced.

  The rotation direction of the dust collection roller 25 may be any direction, but it is preferable to drive in a rotation direction in which foreign matter scraped from the surface of the dust collection roller 25 by the scraper 26 is easily collected. In the cleaning device 21, the rectangular scraper 26 is disposed on the upstream side in the conveyance direction C of the dust collection roller 25 so as to be inclined downstream in the conveyance direction C and downward. Driven in the same direction of rotation.

<Scraper>
The scraper 26 is disposed so as to incline downstream in the conveying direction C and downward, and the tip end portion is in contact with the surface of the dust collecting roller 25 over the rotation axis direction. For example, the scraper 26 similar to the scraper 6 of the first embodiment can be used.

  As the dust collecting roller 25 rotates, the foreign matter attached to the surface of the dust collecting roller 25 is scraped off by the tip of the scraper 26 that contacts the surface of the dust collecting roller 25. As a result, the surface of the dust collecting roller 25 becomes clean with no foreign matter. The foreign matter scraped off by the scraper 26 is dropped and collected in a foreign matter collection unit (not shown).

[advantage]
Since the cleaning device moves the foreign matter adsorbed on the surface of the cleaning roller 22 to the cleaning brush 23, there is no need to provide a brush roller for moving the foreign matter on the surface of the cleaning roller 22. Thereby, the facility cost can be reduced and the size can be easily reduced.

[Other Embodiments]
The present invention is not limited to the above-described embodiment, and can be implemented in a mode in which various changes and improvements are made in addition to the above-described mode.

  In the above-described embodiment, the cleaning device has been described in which the cleaning brush is disposed upstream of the cleaning roller in the conveyance direction of the object. However, like the cleaning device 31 in FIG. It is good also as a structure arrange | positioned rather than the conveyance direction C upstream of the target object S. FIG. The cleaning device 31 of FIG. 3 differs from the cleaning device 21 of the second embodiment in the arrangement of the cleaning roller and the cleaning brush with respect to the conveyance direction C of the object S. In FIG. 3, illustration of each part other than the cleaning roller 32 and the cleaning brush 33 is omitted. In the cleaning device 31, first, foreign matter adhering to the surface of the object S is adsorbed by the cleaning roller 32, and then the foreign matter remaining on the surface of the object S is adsorbed and removed by the cleaning brush 33. Here, the cleaning roller 32 mainly sucks fine foreign matter, and the cleaning brush 33 scratches relatively large foreign matter on the surface of the object S, and mainly sucks the scraped foreign matter.

  When the cleaning brush 23 is disposed upstream of the conveyance direction C of the object S as in the cleaning device 21 of FIG. 2, the cleaning roller 22 is subjected to the cleaning roller 22 after the cleaning brush 23 causes the foreign matter on the surface of the object S to be scraped. Since the foreign matter on the surface of the object S is adsorbed, fine foreign matter deposited on the surface of the object S due to scratching can also be removed by the cleaning roller 22, and the foreign matter adhering to the object S can be effectively removed. On the other hand, when the cleaning roller 32 is disposed upstream of the conveyance direction C of the object S as in the cleaning device 31 of FIG. 3, the cleaning roller 32 removes fine foreign matter on the surface of the object S and then performs cleaning. The brush 33 scratches the foreign matter on the surface of the object S. Since this scraping also causes a relatively large foreign matter to be scraped, the cleaning brush 33 can adsorb and remove a relatively large foreign matter together with the fine foreign matter. Accordingly, in this case as well, fine foreign matters can be removed together with relatively large foreign matters.

  In the above-described embodiment, the configuration in which the cleaning roller and the cleaning brush are incorporated in a single unit has been described. However, these may be incorporated in another unit. Specifically, as a unit incorporating the cleaning roller and the cleaning brush, for example, a cleaning roller unit 41 incorporating the cleaning roller 42 shown in FIG. 4A and a cleaning brush unit 51 incorporating the cleaning brush 53 shown in FIG. 4B are used. Another unit may be used. The cleaning roller unit 41 is disposed so that the surface of the cleaning roller 42 comes into contact with the surface of the object to be conveyed. In the cleaning roller unit 41 arranged in this way, the cleaning roller 42 adsorbs foreign matter adhering to the surface of the object, and the foreign matter adsorbed on the cleaning roller 42 moves to the brush roller 44. The moved foreign matter is further adsorbed by the first dust collecting roller 45, and the foreign matter adhering to the surface of the first dust collecting roller 45 is scraped off by the scraper 46 and collected by the foreign matter collecting unit 48. On the other hand, the cleaning brush unit 51 is disposed such that the outer peripheral side of the cleaning brush 53 is in contact with the surface of the object. In the cleaning brush unit 51 arranged in this manner, the cleaning brush 53 scratches and adsorbs foreign matter adhering to the surface of the object, and the foreign matter attached to the cleaning brush 53 is adsorbed by the second dust collecting roller 55. The foreign matter adhering to the surface of the second dust collecting roller 55 is scraped off by the scraper 56 and collected by the foreign matter collecting unit 58. Note that this cleaning device is a dust collecting roller that contacts the outer peripheral side of the cleaning brush 53 as described above, and a second dust collecting roller 55 that is different from the first dust collecting roller 45 that contacts the outer peripheral side of the brush roller 44. It has. That is, the cleaning device includes two dust collecting rollers.

  The cleaning roller unit 41 and the cleaning brush unit 51 are sequentially arranged, for example, along the conveyance direction C of the object, and each unit adsorbs and removes foreign matter on the surface of the object. In this way, the cleaning roller unit 41 in which the cleaning roller 42 is incorporated and the cleaning brush unit 51 in which the cleaning brush 53 is incorporated are provided separately, so that the order of arrangement along the conveyance direction C of the object is provided. Can be easily replaced, and a plurality of cleaning roller units 41 and a plurality of cleaning brush units 51 can be arranged along the conveyance direction C of the object. When the cleaning roller 42 needs to be replaced, only the cleaning roller unit 41 needs to be replaced. When the cleaning brush 53 needs to be replaced, only the cleaning brush unit 51 needs to be replaced. Therefore, the cleaning roller 42 and the cleaning brush 53 can be continuously used for each usable period.

  Moreover, although the said embodiment demonstrated the structure which removes the foreign material adhering to the single side | surface of the target object conveyed, the cleaning apparatus of the said embodiment is arrange | positioned on the both surfaces side of a target object, and adheres to both surfaces of a target object. It is good also as a structure which removes the foreign material. For example, as shown in the cleaning system 61 in FIG. 5, foreign substances on both sides of the object can be removed by providing two cleaning devices 21 in FIG. 2. The cleaning system 61 is provided with a cleaning device 21 for removing foreign substances on one surface of the object S on the upstream side in the conveyance direction C of the object S, and removes foreign substances on the other surface of the object S on the downstream side. Another cleaning device 21 to be removed is provided. That is, the upstream cleaning device 21 is disposed so that the cleaning roller and the cleaning brush are in contact with one surface of the object S, and the downstream cleaning device 21 is configured such that the cleaning roller and the cleaning brush are the other of the object S. It arrange | positions so that the surface of this may be contacted. Here, the configuration in which the cleaning device 21 of the second embodiment is disposed on both sides of the object has been described, but the cleaning device 1 of FIG. 1 and the cleaning device 31 of FIG. 3 are disposed on both sides of the object. It is good also as a structure to provide, It is good also as a structure which arrange | positions the cleaning apparatus from which a structure differs by the one surface side of the target object S and the other surface side.

  In the first embodiment, the cleaning device has been described that includes one dust collecting roller that contacts the outer peripheral sides of both the cleaning brush and the brush roller, and that adsorbs foreign matter adhering to the cleaning brush and the brush roller. The cleaning brush and the brush roller may be configured to include two dust collecting rollers that separately adsorb foreign substances adhering to the cleaning brush. Since the dust collecting roller is in contact with the cleaning brush and the brush roller with the surface always clean, the foreign matter adhered to the cleaning brush and the brush roller can be more reliably removed. The dust collecting roller can be moved.

  EXAMPLES Hereinafter, the present invention will be described more specifically with reference to examples. However, the present invention is not limited to the following examples.

[Example 1]
4B is disposed on the upstream side in the conveying direction of the object, and the foreign matter is dispersed on the surface of the object to be tested using a cleaning device in which the cleaning roller unit 41 in FIG. 4A is disposed on the downstream side. The removal effect was evaluated. Specifically, a strip-shaped polyethylene terephthalate (PET) sheet having an average thickness of 75 μm, an average width of 100 mm, and an average length of 100 mm is used as a test object, and the test sheet has an average diameter of 2 mm as a test foreign material. Circular PET was sprayed, and this PET sheet was inserted into the cleaning device at a conveyance speed of 12 m / min. A cleaning brush 53 having a polyester brush portion is used, and this cleaning brush 53 is disposed so that the amount of pressure contact with the PET sheet is 0.5 mm, and the rotation direction at the contact portion with the surface of the PET sheet is The PET sheet was rotationally driven at a peripheral speed of 6 m / min so as to be in the opposite direction to the PET sheet conveyance direction. The applied voltage to the cleaning brush 53 was set to -800V, and the applied voltage to the dust collecting roller 55 was set to -1200V. Since the cleaning roller 42 is rotated with the conveyance of the PET sheet, the peripheral speed of the cleaning roller 42 is 12 m / min. The applied voltage to the cleaning roller 42 was −400 V, the applied voltage to the brush roller 44 was −800 V, and the applied voltage to the dust collecting roller 45 was −1200 V.

[Example 2]
Except that the cleaning brush 53 was disposed so that the amount of pressure contact with the PET sheet was 0.1 mm, the PET sheet on which the test foreign matter was dispersed was inserted into the cleaning device in the same manner as in Example 1.

[Comparative Example 1]
The cleaning brush 53 is disposed so that the pressure contact amount to the PET sheet is 0.1 mm, and the rotation direction of the cleaning brush 53 at the contact portion with the surface of the PET sheet is forward with respect to the PET sheet conveyance direction. A PET sheet on which test foreign matter was dispersed was inserted into the cleaning device in the same manner as in Example 1 except that it was rotationally driven at a peripheral speed of 36 m / min.

[Comparative Example 2]
Except that the cleaning brush 53 was rotated at a peripheral speed of 24 m / min so that the rotation direction at the contact portion with the PET sheet surface was the forward direction with respect to the PET sheet conveyance direction, the same method as in Example 1 was used. The PET sheet on which the test foreign matter was dispersed was inserted into the cleaning device.

[Comparative Example 3]
Except that the cleaning brush 53 was rotated at a peripheral speed of 12 m / min so that the rotation direction at the contact portion with the PET sheet surface was the forward direction with respect to the PET sheet conveyance direction, the same method as in Example 1 was used. The PET sheet on which the test foreign matter was dispersed was inserted into the cleaning device.

[Comparative Example 4]
The cleaning brush 53 is disposed so that the pressure contact amount to the PET sheet is 0.1 mm, and the rotation direction of the cleaning brush 53 at the contact portion with the surface of the PET sheet is forward with respect to the PET sheet conveyance direction. A PET sheet on which the test foreign matter was dispersed was inserted into the cleaning device in the same manner as in Example 1 except that it was rotationally driven at a peripheral speed of 6 m / min.

[Cleanability evaluation]
In Example 1, Example 2 and Comparative Examples 1 to 4, 15 test foreign substances were sprayed on the surface of the PET sheet before insertion of the cleaning device, and the number of foreign matters remaining on the PET sheet surface after passing through the cleaning device Were counted visually. The removal rate [%] of foreign matter was calculated by the following formula (1) from the number of scattered foreign matter for testing and the number of foreign matter after passing through the cleaning device. The evaluation results of Example 1, Example 2, and Comparative Examples 1 to 4 are shown in Table 1. In Table 1, “Rotation direction of the cleaning brush” indicates a moving direction with respect to the conveyance direction of the PET sheet at a contact portion between the cleaning brush and the surface of the PET sheet.
Removal rate [%] = {(spraying number of foreign matter before cleaning−remaining number of foreign matter after cleaning)
/ (Number of scattered foreign matter before cleaning)} × 100 (1)

  From the results of Table 1, in Example 1 and Example 2, it was confirmed that 100% of foreign substances could be removed. This is considered to be because the foreign matter adhering to the surface of the PET sheet is agitated and easily attracted to the charged cleaning brush by rotating the cleaning brush in the opposite direction to the PET sheet conveyance direction.

  On the other hand, in Comparative Examples 1 to 4, there is no particular influence on the foreign matter removal effect due to the difference in the peripheral speed and the pressure contact amount of the cleaning brush, and it can be seen that the foreign matter was hardly removed. From these facts, it was confirmed that the effect of removing foreign matters can be remarkably improved by rotating the cleaning brush in the reverse direction with respect to the PET sheet conveyance direction.

  Since the cleaning device of the present invention can remove fine foreign matters as well as relatively large foreign matters of millimeter size, dust adhering to the surfaces of glass substrates of flat panel displays, printed boards on which electronic components are mounted, resin thin plates, film materials, etc. It can be suitably used for removing foreign matters such as.

1, 2, 31 Cleaning device 2, 22, 32, 42 Cleaning roller 2a Core 2b Inner layer 2c Outer layer 3, 23, 33, 53 Cleaning brush 3a Core 3b Brush unit 4, 44 Brush roller 4a Core 4b Brush Part 5, 25, 45, 55 Dust collecting roller 6, 26, 46, 56 Scraper 7 Frame 8, 48, 58 Foreign matter collecting part 9 First counter electrode roller 10 Second counter electrode roller 11 Guide roller 41 Cleaning roller unit 51 Cleaning Brush unit 61 Cleaning system C Conveying direction S Object

Claims (8)

A cleaning device for a surface of an object to be conveyed,
A cleaning roller that is arranged around a rotation axis that is substantially perpendicular to the conveyance direction of the object and substantially parallel to the object surface, and that contacts the object surface in a charged state;
A cleaning brush disposed substantially parallel to the cleaning roller and contacting the surface of the object in a charged state,
The cleaning brush
It is arranged apart from the cleaning roller,
It has a cylindrical cored bar and a brush part formed by planting a plurality of hairs on the peripheral surface of the cored bar,
The cleaning apparatus according to claim 1, wherein a rotation direction of the cleaning roller at a contact portion with a surface of the object is a forward direction with respect to a conveyance direction of the object.   The cleaning apparatus according to claim 1, wherein the bristles forming the brush portion are synthetic resin fibers containing a conductive material.   The cleaning device according to claim 2, wherein the conductive material is carbon black, carbon fiber, metal powder, or metal whisker.   The cleaning device according to claim 1, wherein a cross-sectional shape of the hair of the brush portion is a star shape.   The cleaning device according to any one of claims 1 to 4, wherein an average pressure contact amount of the brush portion to the object is 0.03 mm or more and 1.5 mm or less. The cleaning brush is driven to rotate,
The rotation direction at the contact portion with the surface of the object in the cleaning brush is opposite to the conveyance direction of the object,
The cleaning device according to claim 1, wherein a peripheral speed of the cleaning brush is 1 m / min or more and 30 m / min or less.   The cleaning apparatus according to claim 1, further comprising a dust collection roller disposed substantially parallel to the cleaning brush and contacting the outer peripheral side of the cleaning brush with the surface charged.   The cleaning apparatus according to claim 1, further comprising a brush roller disposed substantially parallel to the cleaning roller and contacting the surface of the cleaning roller while being charged and rotated.

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