WO2017155075A1 - Cleaning device and cleaning method - Google Patents
Cleaning device and cleaning method Download PDFInfo
- Publication number
- WO2017155075A1 WO2017155075A1 PCT/JP2017/009624 JP2017009624W WO2017155075A1 WO 2017155075 A1 WO2017155075 A1 WO 2017155075A1 JP 2017009624 W JP2017009624 W JP 2017009624W WO 2017155075 A1 WO2017155075 A1 WO 2017155075A1
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- WIPO (PCT)
- Prior art keywords
- roller
- cleaning
- brush roller
- brush
- foreign matter
- Prior art date
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B11/00—Cleaning flexible or delicate articles by methods or apparatus specially adapted thereto
-
- B08B1/12—
-
- B08B1/20—
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B6/00—Cleaning by electrostatic means
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08B—POLYSACCHARIDES; DERIVATIVES THEREOF
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- C08B1/02—Rendering cellulose suitable for esterification
- C08B1/04—Rendering cellulose suitable for esterification for the preparation of cellulose nitrate
Definitions
- the present invention relates to a cleaning device and a cleaning method.
- the cleaning device has room for improvement in the removal efficiency of foreign matters.
- the present invention has been made based on the above circumstances, and provides a cleaning device and a cleaning method capable of efficiently removing both relatively large foreign matters and fine foreign matters from the surface of an object. With the goal.
- the invention made to solve the above-mentioned problems is a cleaning device that removes a foreign material on the surface while conveying a plate-like or film-like object, and a rotation shaft that is substantially perpendicular to the conveyance direction and substantially parallel to the conveyance surface.
- a pair of opposed rollers that are driven to rotate in a forward direction with respect to the conveyance direction of the object, and one or more voltage application mechanisms that apply a voltage to the first brush roller and the cleaning roller And the one or more voltage application mechanisms apply a high voltage to the first brush roller with the same polarity and absolute value as the cleaning roller. And butterflies.
- the cleaning device can remove relatively large foreign matter from the object by the first brush roller, and can remove fine foreign matter from the object by the cleaning roller. Moreover, since the first brush roller and the cleaning roller can be effectively pressed against the object by providing the pair of opposed rollers facing the first brush roller and the cleaning roller, the first brush roller and The removal efficiency of the foreign matter from the object by the cleaning roller can be increased. Furthermore, by applying a voltage to the first brush roller and the cleaning roller by the voltage application mechanism, it is possible to further increase the efficiency of removing foreign substances from the object by the first brush roller and the cleaning roller. In particular, by applying a voltage having the same polarity and high absolute value as the cleaning roller to the first brush roller, it is possible to remove relatively large foreign matters by the first brush roller and fine foreign matters by the cleaning roller. Can be made more efficient. Thus, the cleaning device can efficiently remove not only relatively large foreign substances but also fine foreign substances from the surface of the object.
- the first brush roller is rotationally driven in a reverse direction with respect to the conveyance direction of the object, and the cleaning roller is rotationally driven in a forward direction with respect to the conveyance direction of the object.
- the first brush roller is driven to rotate in the direction opposite to the conveyance direction of the object, so that the relatively large foreign matter adhering to the surface of the object can be effectively scraped and removed. it can.
- the cleaning roller is driven to rotate in the forward direction with respect to the conveyance direction of the object, so that fine foreign substances adhering to the surface of the object can be effectively removed while the object is conveyed.
- the one or more voltage application mechanisms may apply a voltage of ⁇ 800 V to ⁇ 200 V to the first brush roller, and apply a voltage of ⁇ 200 V to less than 0 V to the cleaning roller. In this way, the voltage application mechanism applies the voltage in the above range to the first brush roller and the cleaning roller, so that the potentials of the first brush roller and the cleaning roller are suitable for removing foreign substances. Large foreign matters and fine foreign matters can be more effectively removed.
- the one or more voltage application mechanisms may give a potential difference of 100 V or more and 500 V or less in absolute value to the first brush roller and the cleaning roller.
- the voltage application mechanism applies the voltage so that the potential difference between the first brush roller and the cleaning roller is in the above range, thereby making the potentials of the cleaning roller and the brush roller suitable for removing foreign substances, respectively.
- relatively large foreign matters and fine foreign matters can be more effectively removed.
- the potential of the pair of opposing rollers may be a predetermined fixed potential.
- an electric field is effectively generated between the first brush roller and one opposed roller and between the cleaning roller and the other opposed roller. Therefore, the foreign matter removal efficiency from the object by the first brush roller and the cleaning roller can be further improved.
- the cleaning device includes a first recovery roller that recovers the foreign matter removed from the object by the first brush roller, and the one or more voltage application mechanisms are configured to perform the above operation on the first recovery roller.
- a voltage having the same polarity as the first brush roller and a high absolute value may be applied.
- the cleaning device includes the first recovery roller, and the first brush roller applies a high voltage in the same polarity and absolute value as the first brush roller to the first recovery roller.
- the foreign matter removed from the object can be collected by the first collection roller. As a result, it is possible to maintain the cleanliness and electric charge of the first brush roller, and to suppress the reduction of the foreign matter removal efficiency.
- the one or more voltage application mechanisms may give a potential difference of 200 V or more and 600 V or less in absolute value to the first recovery roller and the first brush roller.
- the first collection roller can effectively collect the foreign matter removed from the object by the first brush roller by giving the first collection roller and the first brush roller a potential difference in the above range. It is possible to effectively maintain the cleanliness and charge of the first brush roller, and to effectively suppress the reduction of the foreign matter removal efficiency.
- the rotation direction of the first recovery roller is the reverse direction to the rotation direction of the first brush roller, and the rotation speed of the first recovery roller is relative to the rotation speed of the first brush roller. It is good that they are 1.0 times or more and 1.5 times or less.
- recovery roller can be improved by setting the rotation conditions of a 1st collection
- the cleaning device further includes a second brush roller that collects the foreign matter removed from the object by the cleaning roller, and the second brush roller is driven to rotate in the reverse direction with respect to the cleaning roller.
- the rotation speed is preferably 1.0 to 1.5 times the rotation speed of the cleaning roller.
- the cleaning device further includes a second recovery roller that recovers the foreign matter removed from the cleaning roller by the second brush roller, and the second recovery roller rotates in a reverse direction with respect to the second brush roller.
- the rotation speed is preferably 1.0 to 1.5 times the rotation speed of the second brush roller.
- Another invention made to solve the above-mentioned problems is a cleaning method for removing foreign substances on the surface while conveying a plate-like or film-like object, and the object to be conveyed is conveyed in the conveying direction.
- a step of abutting a cleaning roller driven to rotate by a rotating shaft, and applying a voltage to the cleaning roller and having the same polarity as the voltage applied to the cleaning roller and a high absolute value to the brush roller Apply voltage.
- relatively large foreign matter can be removed from the object by the brush roller, and fine foreign matter can be removed from the object by the cleaning roller.
- a voltage to the brush roller and the cleaning roller it is possible to further increase the efficiency of removing the foreign matter from the object.
- a voltage having the same polarity as the cleaning roller and a high absolute value to the brush roller it is possible to further increase the efficiency of removing foreign matter from the object.
- the amount of biting of the brush roller into the object is set to a predetermined value
- the cleaning roller It may be set so that the object is pressed with a predetermined pressure.
- rotation in the follower direction with respect to the movement direction of the object or the other roller is referred to as “rotation in the forward direction” and vice versa. This is called “reverse rotation”.
- substantially vertical means that the angle of intersection with the vertical line is within ⁇ 10 °, and may be vertical.
- substantially parallel means that the acute angle between two straight lines is greater than 0 ° and within 10 °, or parallel.
- front side and back side of an object are merely distinguished for convenience and do not necessarily correspond to the front side and the back side when the object is used.
- the cleaning device and the cleaning method of the present invention can efficiently remove both relatively large foreign matters and fine foreign matters from the surface of an object.
- FIG. 2 is a schematic sectional view of the cleaning device shown in FIG. 1. It is typical sectional drawing of the brush roller of the cleaning apparatus shown in FIG. It is typical sectional drawing of the collection
- FIG. 6 is a schematic cross-sectional view taken along line XX in FIG. 5. It is typical sectional drawing which shows an example of the height adjustment mechanism applicable to the cleaning apparatus which concerns on one Example of this invention. It is typical sectional drawing which shows 1 process of height adjustment using the height adjustment mechanism of FIG. It is a typical perspective view which shows the height adjustment mechanism of FIG.
- FIG. It is typical sectional drawing of the cleaning roller of the cleaning apparatus shown in FIG. It is a typical perspective view which shows the unit side terminal applicable to the cleaning apparatus which concerns on one Example of this invention. It is a typical perspective view which shows the holder side terminal applicable to the cleaning apparatus which concerns on one Example of this invention. It is a typical sectional view showing a voltage application mechanism applicable to a cleaning device concerning one example of the present invention. It is a figure which shows the electrification row
- the cleaning device shown in FIGS. 1 and 2 removes foreign matters on the surface (front side surface S1 and back side surface S2) while conveying the flat object S in the conveyance direction D.
- the cleaning device mainly includes a holder 1, an external transport mechanism (upstream-side external transport mechanism 2 ⁇ / b> A and downstream-side external transport mechanism 2 ⁇ / b> B), and a cleaning mechanism 3.
- the cleaning device includes a voltage application mechanism (not shown in FIGS. 1 and 2) that applies a voltage to a brush roller 41, a cleaning roller 51, and the like, which will be described later.
- the cleaning device includes a control mechanism that controls the external transport mechanism, the cleaning mechanism 3, and the voltage application mechanism.
- this control mechanism various conventionally known ones can be adopted, and for example, it can be constituted by a personal computer or the like.
- the object S is a flat plate member in FIG. 2, but is not particularly limited as long as it is a plate member or a film member. Specifically, the surface of the object may be flat as shown in FIG. 2, but a depression may be present. Furthermore, the object may have a hole or the like.
- Examples of the plate-like object include an FPD glass substrate, a resin substrate, a printed circuit board for mounting electronic components, a ceramic green sheet for forming a multilayer ceramic capacitor, a resin thin plate, and the like.
- An example of the film-like object is a resin film.
- the average thickness of the object is not particularly limited, but the lower limit is preferably 30 ⁇ m, and more preferably 50 ⁇ m. If the average thickness of the object is less than the lower limit, it may be difficult to convey the object. On the other hand, the upper limit of the average thickness of the object is, for example, 5 mm.
- the holder 1 holds the cleaning mechanism 3.
- a pair of opposing plate-like members 10 are connected by a plurality of rods 11 and shafts 12.
- the external transport mechanism applies a propulsive force for transport to the object S, and is provided outside the cleaning mechanism 3.
- the external transport mechanism includes an upstream external transport mechanism 2A disposed upstream of the cleaning mechanism 3 in the transport direction, and a downstream external transport mechanism 2B disposed downstream of the cleaning mechanism 3 in the transport direction.
- the conveyance speed of the object S by the external conveyance mechanism is not particularly limited as long as it is a range in which foreign matter can be removed from the object S by the cleaning mechanism 3.
- the lower limit of the conveyance speed of the object S is preferably 5 m / min, and more preferably 10 m / min.
- the upper limit of the conveyance speed of the object S is preferably 30 m / min, and more preferably 20 m / min. If the conveyance speed of the object S is less than the above lower limit, the time required for removing the foreign matter becomes long, and the foreign matter removal efficiency may be reduced. On the contrary, when the conveyance speed of the target S exceeds the upper limit, there is a possibility that the foreign matter on the surface of the target S cannot be sufficiently removed by the cleaning mechanism 3.
- the upstream external transport mechanism 2A is for transporting the object S into the cleaning mechanism 3, and has a plurality of belt transport sections 20A.
- the belt conveyance unit 20A is obtained by winding an endless belt 22A between a pair of rollers 21A that are spaced apart along the conveyance direction D. Of the pair of rollers 21A, one is a driving roller to which a rotational force is applied, and the other is a driven roller that rotates together with the endless belt 22A by the rotation of the driving roller.
- the plurality of belt conveyance units 20A are arranged at regular intervals in a horizontal direction orthogonal to the conveyance direction D (hereinafter also referred to as “conveyance width direction”).
- the downstream side external conveyance mechanism 2B carries out the object S from the cleaning mechanism 3, and has a plurality of belt conveyance units 20B.
- the belt conveyance unit 20B has the same configuration as the plurality of belt conveyance units 20A of the upstream side external conveyance mechanism 2A. That is, the plurality of belt conveyance units 20B are configured such that the endless belt 22B is wound between a pair of rollers 21B configured by a driving roller and a driven roller that are arranged apart from each other in the conveyance direction D.
- the plurality of belt conveyance units 20B are also arranged at regular intervals in the conveyance width direction.
- the cleaning mechanism 3 is a mechanism capable of cleaning both the front side surface S1 and the back side surface S2 of the object S, and includes a front side cleaning mechanism 3A and a back side cleaning mechanism 3B.
- the front side cleaning mechanism 3A is a unit that removes foreign matters on the front side surface S1 of the object S to be conveyed.
- the front side cleaning mechanism 3 ⁇ / b> A includes a front side brush roller unit 4, a front side cleaning roller unit 5, and a back side opposing roller unit 6.
- a front brush roller unit 4 and a front cleaning roller unit 5 are detachably mounted on a holder 1 installed on a floor base in a factory or the like.
- the holder 1 may be fixed on the base by a fixing tool such as a screw, but is preferably placed in a movable state without using the fixing tool.
- the front brush roller unit 4 and the front cleaning roller unit 5 are disposed above the object S to be transported (above the transport path) and are detachably held by the holder 1.
- the front-side brush roller unit 4 is a unit that removes foreign matter on the front-side surface S1 of the object S with the brush roller 41 housed in the housing 40, and is suitable for removing relatively large foreign matters of millimeter size.
- the housing 40 of the front side brush roller unit 4 accommodates a collection roller 42, a blade 43, a foreign matter collection unit 44, and a conveyance roller 45, and the whole is unitized. In this way, the front brush roller unit 4 is detachably united with the holder 1, so that the front brush roller unit 4 can be easily detached from the holder 1.
- the unit when it is necessary to replace the brush roller 41 in accordance with the type of the object S or foreign matter, the unit can be replaced, so that effective foreign matter removal can be easily performed. Further, by removing the front side brush roller unit 4 from the holder 1, an opposing metal roller 60, which will be described later, facing the brush roller 41 is exposed and can be easily replaced and cleaned, so that it is excellent in maintainability. In addition, the maintenance of the brush roller 41 and the like housed in the housing 40 is also easier than in the case where the brush roller 41 is assembled and fixed in the holder 1.
- the housing 40 accommodates the brush roller 41 and the like as a unit and is detachable from the holder 1.
- the housing 40 includes an upstream plate and a downstream plate disposed so as to be substantially perpendicular to the conveyance surface, a pair of side plates that connect side ends of the upstream plate and the downstream plate, an upstream plate, A top plate connected to the upper end of the downstream plate and the pair of side plates; and a bottom plate connected to the lower end of the upstream plate, the downstream plate and the pair of side plates.
- the top plate is provided with a pair of gripping portions 40A that are separated in the width direction. The pair of gripping portions 40A is used when the front brush roller unit 4 is attached or detached.
- An opening 40B is provided in the bottom plate, and a tip end portion of brush bristles 41C of a brush roller 41 described later protrudes from the opening 40B.
- casing 40 For example, stainless steel etc. are mentioned.
- the brush roller 41 is a first brush roller on the front side that comes into contact with the object S to be conveyed and removes foreign matters on the front surface S1, particularly relatively large foreign matters (for example, millimeter-size foreign matters).
- the brush roller 41 is reversely rotated with respect to the conveyance direction D with a rotation axis substantially perpendicular to the conveyance direction D and substantially parallel to the conveyance surface by the power from the external drive source in a state of being charged by the voltage application mechanism (FIG. 2). (Clockwise direction).
- the brush roller 41 is preferably driven to rotate in a reverse direction with respect to the conveyance direction D in a charged state, but may be driven to rotate in an uncharged state.
- the brush roller 41 has a cylindrical core rod 41A and a plurality of brush bristles 41C implanted on the outer peripheral surface of the core rod 41A via an adhesive layer 41B.
- the core rod 41A is formed of a conductive material such as a metal, a carbon material, or a synthetic resin composite material.
- the upper limit of the volume resistivity of the conductive material is, for example, 10 5 ⁇ cm.
- a voltage is applied to the core bar 41A by a voltage application mechanism described later.
- the voltage applied to the core bar 41A is set to have the same polarity and a larger absolute value than the cleaning roller 51 of the front side cleaning roller unit 5 described later.
- the lower limit of the voltage applied to the core rod 41A is preferably -800V, more preferably -600V.
- the upper limit of the voltage is preferably -200V, more preferably -300V.
- the brush bristles 41C are preferably those on which foreign substances are physically easily attached, and examples thereof include synthetic resin fibers. Moreover, as the bristle 41C, a material that can be charged with electric charge for adsorbing foreign matter adhering to the front surface S1 of the object S is preferable. For example, a conductive material such as carbon black, carbon fiber, metal powder, or metal whisker. A synthetic resin fiber-containing material can be suitably used.
- the cross-sectional shape of the bristle 41C is not particularly limited, and examples thereof include a circular shape, an elliptical shape, and a star shape.
- the outer shape of the brush bristle 41C is not particularly limited, and examples thereof include a straight line shape, a wave curve shape, and a shape formed by combining a curve and a straight line.
- the brush bristles 41C are more likely to adsorb foreign matter as the surface area increases. Therefore, as the bristle 41C, it is possible to use one having a different cross-sectional shape capable of ensuring a large surface area, for example, a star shape.
- the brush roller 41 is driven to rotate in the direction opposite to the conveyance direction D of the object S, thereby causing the adhering foreign matter on the front surface S1 of the object S to adhere to the brush hair 41C. Can do. Further, by applying a voltage to the brush roller 41 and charging it, an attracting force due to the electric field can be applied, and the foreign matter on the front surface S1 of the object S can be effectively attracted to the brush hair 41C. In particular, by charging the brush roller 41, even when the object S has a hole or a depression on the surface, the foreign matter in the hole or the depression can be efficiently removed. Furthermore, by applying a voltage in the above range to the core rod 41A, relatively large foreign matter can be more effectively attracted to the brush roller 41 from the front surface S1 of the object S.
- the brush roller 41 of the front side brush roller unit 4 has the bristle 41C, rotates in the reverse direction with respect to the conveying direction D, and a voltage having the same polarity and larger absolute value than the cleaning roller 51 is applied. By doing so, a relatively large foreign substance of millimeter order can be removed from the front surface S1 of the object S.
- the lower limit of the average pressure contact amount of the brush roller 41 to the object S is preferably 0.3 mm, and more preferably 0.5 mm.
- the upper limit of the average pressure contact amount is preferably 1.5 mm, and more preferably 1 mm. If the average pressure contact amount is less than the lower limit, the foreign matter on the front surface S1 of the object S may not be sufficiently scraped. On the other hand, if the average pressure contact amount exceeds the upper limit, the resistance between the brush bristles 41C and the front surface S1 of the object S increases, so that the conveyance speed of the object S may decrease and the object. There is a risk of scratching the front surface S1 of S.
- the “pressure contact amount” is the amount of brush hair 41 biting into the object S, and the minimum distance between the surface of the core bar 41A and the front surface S1 of the object S is calculated from the average length of the brush hair 41C. It means the difference value.
- the lower limit of the peripheral speed of the brush roller 41 is preferably 1 m / min, and more preferably 2 m / min.
- the upper limit of the peripheral speed of the brush roller 41 is preferably 30 m / min, and more preferably 15 m / min. If the peripheral speed of the brush roller 41 is less than the lower limit, the foreign matter on the front surface S1 of the object S may not be sufficiently scraped. Conversely, if the peripheral speed of the brush roller 41 exceeds the above upper limit, the resistance between the brush bristles 41C and the front surface S1 of the object S increases, and therefore the conveyance speed of the object S may decrease. The front surface S1 of the object S may be damaged.
- the upper limit of the ratio (B / W) of the peripheral speed B of the brush roller 41 to the transport speed W of the object S is preferably 25%. If the peripheral speed B of the brush roller 41 is too large with respect to the conveyance speed W of the object S, it may be difficult to cause a relatively large foreign object to be scraped by the brush roller 41.
- the collection roller 42 is a first collection roller on the front side that is substantially parallel to the brush roller 41 and is in contact with the brush bristles 41C and collects the foreign matter attached to the brush bristles 41C.
- the collection roller 42 has a smaller diameter than the brush roller 41, and is disposed above the brush roller 41 and upstream of the brush roller 41 in the transport direction.
- the collection roller 42 includes a roller main body 42A formed of a conductive material and a corrosion-resistant layer 42B laminated on the outer peripheral surface thereof.
- the material of the roller body 42A is not particularly limited as long as it is a conductive material.
- a metal material such as stainless steel, copper, or aluminum, or a conductive resin material in which a conductive material such as a conductive filler is blended into a synthetic resin, or the like.
- metal materials are preferable.
- the corrosion-resistant layer 42B can be a metal plating layer formed by a plating process such as nickel plating or gold plating.
- the recovery roller 42 may be formed entirely of a conductive material that is difficult to oxidize, such as stainless steel, and does not have the corrosion-resistant layer 42B.
- the recovery roller 42 is rotationally driven in a reverse direction (clockwise direction in FIG. 2) with respect to the brush roller 41 by power from an external drive source while being charged by the voltage application mechanism.
- the lower limit of the magnification of the rotation speed of the collection roller 42 with respect to the rotation speed of the brush roller 41 is preferably 1.0.
- the upper limit of the rotation speed magnification is preferably 1.5 times. Thereby, the foreign matter can be effectively moved from the brush roller 41 to the collection roller 42.
- the rotation direction of the collection roller 42 may be a forward direction with respect to the brush roller 41.
- the applied voltage to the recovery roller 42 is set to have the same polarity and higher absolute value than the applied voltage to the brush roller 41.
- the lower limit of the absolute value of the difference between the voltage applied to the collection roller 42 and the voltage applied to the brush roller 41 is preferably 200V, and more preferably 300V.
- the upper limit of the absolute value of the difference is preferably 600V, and more preferably 500V.
- the lower limit of the voltage applied to the collecting roller 42 is preferably -1,500V, and more preferably -1,200V.
- the upper limit of the applied voltage is preferably ⁇ 400V, more preferably ⁇ 600V.
- the applied voltage to the collection roller 42 By making the applied voltage to the collection roller 42 have the same polarity and higher absolute value than the applied voltage to the brush roller 41, the potential of the outer peripheral surface of the collection roller 42 becomes the potential of the brush hair 41C of the brush roller 41. Therefore, the foreign matter attached to the brush roller 41 can be adsorbed to the outer peripheral surface of the collection roller 42.
- the difference between the applied voltages of the collection roller 42 and the brush roller 41 is set in the above range, and the applied voltage to the collection roller 42 is set in the above range, so that the foreign matter attached to the brush roller 41 Can be adsorbed effectively.
- the upper limit of the electrical resistance of the collection roller 42 is preferably 10 8 ⁇ .
- the blade 43 is a first blade that scrapes and removes foreign matter from the collection roller 42.
- the blade 43 is, for example, a rectangular plate member having elasticity.
- the tip of the blade 43 is a free end, and the root is fixed to the blade support 43a.
- a tip portion which is a free end of the blade 43 is in contact with the outer peripheral surface of the collection roller 42 in the axial direction of the collection roller 42.
- the blade 43 is preferably in contact with the outer peripheral surface of the collection roller 42 in an inclined state.
- the lower limit of the inclination angle between the blade 43 and the virtual tangent on the outer periphery of the collection roller 42 is preferably 5 °, and more preferably 15 °.
- the upper limit of the tilt angle is preferably 30 °, more preferably 25 °.
- the blade 43 When the angle is less than the lower limit, the foreign matter cannot be sufficiently scraped off by the blade 43 due to insufficient pressure contact force, and a retransfer phenomenon in which the foreign matter that has passed through the blade 43 reattaches to the object S may occur. There is.
- the blade 43 when the inclination angle exceeds the upper limit, the blade 43 may be turned up due to the rotation of the collection roller 42. Accordingly, foreign matters can be effectively scraped off from the collection roller 42 by bringing the blade 43 into contact with the collection roller 42 so that the inclination angle falls within the above range. Further, the blade 43 is disposed upstream of the collection roller 42 in the transport direction, that is, above the transport roller 45.
- the space above the conveyance roller 45 can be used effectively, and the front brush roller unit 4 can be reduced in size. Further, it is possible to improve the convenience by adopting a configuration in which a foreign substance collection unit 44 described later is pulled out to the upstream side in the conveyance direction.
- the material of the blade 43 is not particularly limited, but preferably has elasticity, more preferably synthetic resin. Specifically, in order to impart appropriate elasticity, it may be formed of a synthetic resin such as a thermosetting polyurethane. Further, at least the tip of the blade 43 may be fluorine-coated with a fluorine-containing compound such as a fluorine resin in order to reduce friction with the collecting roller 42 that abuts.
- the lower limit of the average thickness of the fluorine coating is preferably 5 ⁇ m.
- the upper limit of the average thickness is preferably 15 ⁇ m. If the average thickness is less than the lower limit, the friction reducing effect is not sufficiently exhibited, and the blade 43 may be easily caught in the rotation of the collecting roller 42. On the other hand, when the average thickness exceeds the upper limit, the fluorine coating may be cracked.
- the shape of the blade 43 is not limited to the rectangular plate shape of FIG. 2, and may be a shape bent or curved from the root portion to the tip portion.
- the foreign matter collection unit 44 is a first foreign matter collection unit that collects and stores foreign matter scraped off from the collection roller 42 by the blade 43.
- the foreign matter collection unit 44 is disposed below the tip of the blade 43 and upstream of the brush roller 41 in the transport direction.
- recovery part 44 is engage
- a grip 44A is provided on the upstream side of the foreign matter collection unit 44, and the foreign matter collection unit 44 can be easily taken in and out using the grip 44A.
- recovery part 44 can be pulled out to the conveyance direction upstream, it can draw out with the front side brush roller unit 4 fixed to the holder 1, and can collect a foreign material, and is excellent in convenience.
- the conveyance roller 45 guides the movement of the object S carried into the cleaning mechanism 3 together with an auxiliary roller 62 of the back side opposing roller unit 6 described later. Further, the transport roller 45 and the auxiliary roller 62 have a function for applying a propulsive force to the object S in order to allow the object S to enter under the brush roller 41 rotating in the reverse direction with respect to the transport direction D with an appropriate force. Also have.
- the transport roller 45 is disposed so as to face an auxiliary roller 62 of the back side roller unit 6 described later. The transport roller 45 rotates in the forward direction (counterclockwise direction in FIG. 2) with respect to the transport direction D.
- the transport roller 45 is disposed so as to press the auxiliary roller 62 with a force of about 0.49N.
- the pressing force can be appropriately adjusted in consideration of the material and thickness of the object S.
- the conveying roller 45 can be omitted from the cleaning device.
- the transport roller 45 is a ring-shaped member that is stacked on the core shaft 45 ⁇ / b> A and the outer periphery of the core shaft 45 ⁇ / b> A, and is spaced apart along the axial direction of the core shaft 45 ⁇ / b> A.
- a plurality of resin portions 45B As shown in FIGS. 5 and 6, the resin portion 45 ⁇ / b> B has irregularities on the outer peripheral surface.
- the contact area of the conveyance roller 45 and the front side surface S1 of the target object S can be reduced by arranging the plurality of resin portions 45B having irregularities on the outer peripheral surface apart from each other. As a result, it is possible to suppress clogging of the object S between the transport roller 45 and the auxiliary roller 62 when the object S is carried into the cleaning mechanism 3.
- the core shaft 45A is made of a metal such as stainless steel, copper, or aluminum.
- the resin portion 45B is made of polyurethane or the like, for example. Examples of the polyurethane include acrylic mixed urethane and fluorine mixed urethane.
- acrylic mixed urethane is a resin mainly composed of polyester polyurethane or polyether polyurethane, and is (1) a mixture of thermoplastic polyurethane and silicone-acrylic copolymer resin, (2) acrylic resin (for example, A mixture comprising a graft compound in which an aminoethyl group is grafted to a main chain comprising a methacrylic acid-methyl methacrylate copolymer) and a thermoplastic polyurethane, or (3) a mixture comprising an acrylic resin, a polyurethane and a fluorine-based surface coating agent. Means.
- “Fluorine-mixed urethane” is a resin mainly composed of polyurethane, which means a mixture of thermoplastic polyurethane and urethane / fluorine copolymer.
- the “main component” is a component having the largest content, for example, a component contained in an amount of 50% by mass or more.
- the front brush roller unit 4 may be configured to be height adjustable by a height adjustment mechanism.
- a height adjustment mechanism By adjusting the height of the front brush roller unit 4 by the height adjusting mechanism, the pressure contact amount of the brush roller 41 against the object S is adjusted, and the brush roller 41 removes relatively large foreign matters. It can be done more efficiently.
- FIGS. 7 to 9 show an example of a state in which the front brush roller unit 4 is disposed on the plate-like member 10 of the holder 1 via the height adjusting mechanism of the front brush roller unit 4 (holder 1, height adjusting mechanism). And members other than the top plate 103 of the housing 40 of the front brush roller unit 4 are not shown).
- the height adjusting mechanism shown in FIGS. 7 to 9 includes a substantially plate-like fixing member 101 fixed to the plate-like member 10 of the holder 1 and a horizontal surface that is placed on the upper surface of the fixing member 101 and extends in the transport direction D. It mainly includes a slide member 102 that can move and move up and down, and a cover 104 that covers the fixing member 101.
- the top plate 103 of the front brush roller unit 4 is supported at its longitudinal end by the slide member 102 and moves up and down with the slide member 102.
- the height adjusting mechanism shown in FIGS. 7 to 9 is further provided with a gauge fixed to the plate-like member 10 and capable of measuring the vertical position of the slide member 102 and the like, and an adjusting tool for fixing the horizontal position of the slide member 102. May be.
- FIG. 7 shows a state in which the height of the front brush roller unit 4 is adjusted to a minimum.
- 8 and 9 show a state in which the height of the front brush roller unit 4 is adjusted to be maximum.
- a part of the upper surface of the fixing member 101 is formed with a slope whose height gradually increases from approximately the center in the transport direction D to the downstream side (right side in FIGS. 7 and 8).
- the upper surface of the slide member 102 is a substantially horizontal surface, but a slope whose height gradually increases from the vicinity of the approximate center in the transport direction D to the downstream side is formed on a part of the lower surface.
- the slope of the upper surface of the fixing member 101 and the slope of the lower surface of the slide member 102 have the same slope and are abutted. Therefore, by moving the slide member 102 horizontally along the conveyance direction D, the height can be raised and lowered while maintaining the upper surface of the slide member 102 in a substantially horizontal plane state.
- the height of the top plate 103 supported by the slide member 102 (the distances L1 and L2 between the top surface of the top plate 103 and the upper end of the plate-like member 10) is changed, and the height of the top plate 103 is changed.
- the front brush roller unit 4 can be adjusted to a desired height.
- the height adjusting mechanism shown in FIGS. 7 to 9 can be arranged near the upper end of the holder 1, the space of the holder 1 can be used effectively and the workability at the time of height adjustment is excellent.
- the method and structure of the height adjustment mechanism of the brush roller unit 4 are not limited to those shown in FIGS.
- Other height adjustment methods include, for example, a method in which a spacer having a predetermined height is arranged at a fixed portion of the brush roller unit 4 in the holder 1, and a protrusion is provided on the front brush roller unit 4.
- Examples include a method in which a rail-like member to be fitted is arranged on the holder 1 along the vertical direction so that the mounting height of the front brush roller unit 4 can be adjusted steplessly.
- the front-side cleaning roller unit 5 is a unit that removes foreign matter on the front-side surface S1 of the object S with the cleaning roller 51 housed in the housing 50.
- the housing 50 of the front side cleaning roller unit 5 mainly accommodates a brush roller 52, a recovery roller 53, a blade 54, and a foreign matter recovery unit 55, and is entirely unitized.
- the front side cleaning roller unit 5 is suitable for removing fine foreign matters smaller than the millimeter size, and is detachably attached to the holder 1 at a position adjacent to the downstream side in the transport direction from the front side brush roller unit 4. .
- the cleaning roller 51 is set so as to apply pressure from both sides of the object S together with the counter resin roller 61 to be described later in order to effectively move fine foreign matters to the surface thereof. Therefore, if the front side cleaning roller unit 5 is arranged on the upstream side of the front side brush roller unit 4, the cleaning roller 51 presses and compresses a relatively large foreign object against the object S, and the brush roller 41 also removes the foreign object. There is a risk of not being able to complete. Therefore, the front side cleaning roller unit 5 is preferably disposed on the downstream side of the front side brush roller unit 4.
- the front side cleaning roller unit 5 is detachably united with the holder 1 so that the front side cleaning roller unit 5 can be easily detached from the holder 1.
- the unit can be replaced, and effective foreign matter removal can be easily performed.
- a counter resin roller 61 which will be described later, facing the cleaning roller 51 is exposed and can be easily replaced or cleaned, so that maintenance is excellent.
- maintenance is facilitated by housing and housing the housing 50 as compared with a case where the cleaning roller 51 is assembled and fixed in the apparatus.
- the case 50 accommodates the cleaning roller 51 and the like as a unit and can be attached to and detached from the holder 1. Similar to the front brush roller unit 4, the housing 50 includes an upstream plate, a downstream plate, a pair of side plates, a top plate, and a bottom plate. The top plate is provided with a pair of gripping portions 50A that are separated in the transport width direction. The pair of gripping portions 50 ⁇ / b> A is used when the front side cleaning roller unit 5 is attached or detached. An opening 50B is provided in the bottom plate, and a part of the cleaning roller 51 protrudes from the opening 50B. The downstream plate is bent from above to below.
- casing 50 there is no restriction
- the cleaning roller 51 removes foreign matter on the front surface S1 of the object S, in particular, relatively fine foreign matter (for example, foreign matter smaller than millimeter size), and is transported in a state where the outer peripheral surface is charged by the voltage application mechanism. It is rotationally driven in the forward direction (counterclockwise direction in FIG. 2) with respect to the conveyance direction D by a rotation axis substantially perpendicular to the direction D and substantially parallel to the conveyance surface. As shown in FIG. 10, the cleaning roller 51 has a core rod 51A, an inner layer portion 51B formed on the outer peripheral surface of the core rod 51A, and an outer layer portion 51C that covers the outer peripheral surface of the inner layer portion 51B. It is an elastic roller.
- the core rod 51A is formed in a cylindrical shape from a conductive material.
- the conductive material used for the core rod 51 ⁇ / b> A include a metal material, and specifically, stainless steel, copper, aluminum, and the like, similar to the roller main body 42 ⁇ / b> A of the recovery roller 42 of the front brush roller unit 4.
- the inner layer portion 51B ensures a certain pressing force and nip width against the object S by the cleaning roller 51 and the counter resin roller 61 described later. That is, the inner layer portion 51B ensures a desired adhesion force and contact width with respect to the object S, and contributes to efficient removal of relatively fine foreign matters from the front surface S1.
- a resin material having elasticity and conductivity is preferable, and a resin material containing a resin component such as polyurethane, silicone resin, natural rubber, and synthetic rubber and carbon is more preferable.
- this polyurethane the same polyurethane as the polyurethane of the resin portion 45B of the above-described transport roller 45 is preferably used.
- a conductive elastomer containing polyester polyurethane and carbon black is more preferable. With these materials, the elasticity of the cleaning roller 51 is sufficiently ensured, and it is possible to prevent the foreign matter from being excessively pressed against the object S by the cleaning roller 51 and to suppress the reduction of the foreign matter removal efficiency.
- the outer layer portion 51C has a role of avoiding adverse effects due to moisture and the like while ensuring the antifouling property and wear resistance of the cleaning roller 51 without hindering the adhesion with the object S and the application of an appropriate surface potential.
- any material may be used as long as it can be charged to adsorb foreign matter attached to the front surface S1 of the object S by the force of an electric field.
- polyurethane such as acrylic mixed polyurethane or fluorine mixed polyurethane, , Silicone resin, natural rubber, synthetic rubber and the like. Among these, polyurethane is preferable.
- the wear resistance is improved as compared with the case where it is formed with silicone resin, butyl rubber or the like, and contamination of the cleaning roller 51 due to the addition of a plasticizer or a low molecular weight compound is prevented. Can be reduced.
- the outer layer portion 51C preferably has a higher hardness than the inner layer portion 51B.
- the JIS-A hardness is preferably 50 ° or more. When the JIS-A hardness of the outer layer portion 51C is 50 ° or more, the wear resistance of the cleaning roller 51 can be sufficiently ensured.
- acrylic mixed polyurethane As the material of the outer layer portion 51C, negatively charged foreign matter can be easily removed from the front surface S1 of the object S.
- fluorine mixed polyurethane As the material of the outer layer portion 51C, the cleaning roller 51 can be easily charged negatively, and the positively charged foreign matter can be easily removed from the object S.
- the cleaning roller 51 may entrain the object S when the thickness of the object S is thin. Therefore, in order to prevent the object S from being caught, it is preferable that minute protrusions are formed on the surface of the cleaning roller 51 (outer layer portion 51C).
- a method for forming the microprotrusions a method of blending the particles serving as the bases of the microprotrusions into a resin material such as thermoplastic polyurethane used for forming the outer layer portion 51C is preferable.
- the particles may be regular particles or irregular particles, but regular spherical particles are preferable from the viewpoint of uniforming the protruding shape of the microprojections.
- the lower limit of the average particle diameter of the spherical particles is preferably 2 ⁇ m, and more preferably 2.5 ⁇ m.
- the upper limit of the average particle diameter is preferably 5 ⁇ m, and more preferably 4.5 ⁇ m.
- the lower limit of the coefficient of variation (CV value) obtained by dividing the standard deviation ( ⁇ ) related to the average particle size by the average particle size is preferably 3.0%, and 3.5% Is more preferable.
- the upper limit of the coefficient of variation is preferably 5.0% and more preferably 4.5%.
- the “average particle diameter” means a volume average particle diameter (Mv) obtained by a laser diffraction / scattering method.
- the spherical particles are preferably harder than thermoplastic polyurethane.
- the spherical particles are preferably made of resin since they may damage the object S if they are excessively hard like glass beads or ceramic beads.
- a melamine resin, an acrylic resin, etc. are mentioned, for example, Among these, a melamine resin is preferable.
- the lower limit of the average thickness of the outer layer portion 51C is preferably 2 ⁇ m and more preferably 5 ⁇ m.
- the upper limit of the average thickness of the outer layer portion 51C is preferably 500 ⁇ m, and more preferably 300 ⁇ m. If the average thickness of the outer layer portion 51C is less than the lower limit, the surface of the cleaning roller 51 cannot be sufficiently charged, and there is a possibility that a foreign matter adsorption effect cannot be sufficiently obtained. On the contrary, if the average thickness of the outer layer portion 51C exceeds the upper limit, good charging characteristics for adsorbing foreign matter may not be obtained.
- the cleaning roller 51 is charged by the voltage application mechanism and is given a surface potential (surface charge). That is, the cleaning roller 51 is in contact with the front surface S1 of the object S with the surface charged, and adsorbs and removes relatively fine foreign matter adhering to the front surface S1 of the object S by the force of the electric field. . In this way, by charging the cleaning roller 51, even when the object S has a hole or a depression on the surface, the foreign matter in the hole or the depression can be efficiently removed.
- the applied voltage to the cleaning roller 51 has the same polarity and lower absolute value than the applied voltage to the brush roller 41 of the front side brush roller unit 4.
- the lower limit of the voltage applied to the cleaning roller 51 is, for example, ⁇ 400V, and preferably ⁇ 200V.
- the applied voltage is, for example, less than 0V and is preferably ⁇ 50V or less. In this way, by applying the voltage applied to the cleaning roller 51 to the same polarity and lower in absolute value than the voltage applied to the brush roller 41 of the front side brush roller unit 4, relatively fine foreign matter is removed from the object S. Can be removed from the front surface S1.
- the upper limit of the electrical resistance of the cleaning roller 51 is preferably 10 8 ⁇ . Since the electrical resistance of the cleaning roller 51 is 10 8 ⁇ or less, the cleaning roller 51 can be effectively charged when a voltage is applied.
- the cleaning roller 51 is set to a height at which an appropriate pressure can be applied to the object S between the cleaning roller 51 and the counter resin roller 61 in order to increase the collection efficiency of fine foreign matters.
- the pressure applied to the object S by the cleaning roller 51 and the counter resin roller 61 can be, for example, a linear pressure of 2.4 kg / 250 mm.
- 250 mm is the axial length of the outer layer portion 51C of the cleaning roller 51 in the present embodiment.
- the cleaning roller 51 also has a function of giving an appropriate driving force to the object S together with the counter resin roller 61. Thereby, it becomes easy to make the target object S enter below the brush roller 71 of the back side brush roller unit 7 which will be described later rotating in the reverse direction with respect to the transport direction D.
- the brush roller 52 is a second brush roller on the front side that collects the foreign matter removed from the object S by the cleaning roller 51, and is disposed so as to be substantially parallel and in contact with the cleaning roller 51 immediately above the cleaning roller 51. .
- the brush roller 52 is rotationally driven in the counterclockwise direction (counterclockwise direction in FIG. 2) with respect to the cleaning roller 51 in a charged state by power from an external drive source.
- Such a brush roller 52 has a cylindrical core rod 52A and a plurality of brush bristles 52C implanted on the outer peripheral surface of the core rod 52A via an adhesive layer 52B (see FIG. 3).
- the details are the same as the core rod 41A and the bristle 41C of the brush roller 41 of the front side brush roller unit 4, and therefore, the duplicated explanation is omitted.
- the voltage applied to the brush roller 52 (voltage applied to the core rod 52A) is set to have the same polarity and higher absolute value than the voltage applied to the cleaning roller 51.
- the lower limit of the voltage applied to the brush roller 52 is preferably ⁇ 800 V, more preferably ⁇ 600 V, like the brush roller 41 of the front brush roller unit 4.
- the upper limit of the applied voltage is preferably -200V, more preferably -300V.
- the collection roller 53 is a second collection roller on the front side that collects the foreign matter collected by the brush roller 52 from the cleaning roller 51, and is substantially parallel to the brush roller 52 and in contact with the brush bristles 52C above the brush roller 52. Arranged.
- the collection roller 53 is rotationally driven in the counterclockwise direction (counterclockwise direction in FIG. 2) with respect to the brush roller 52 by the power from the external drive source while being charged by the voltage application mechanism. Since the details of the collection roller 53 can be the same as those of the collection roller 42 of the front brush roller unit 4 described above, a duplicate description is omitted.
- the applied voltage to the collection roller 53 is set to have the same polarity and higher absolute value than the applied voltage to the brush roller 52.
- the lower limit of the absolute value of the difference between the voltage applied to the collection roller 53 and the voltage applied to the brush roller 52 is preferably 200V, and more preferably 300V.
- the upper limit of the absolute value of the difference is preferably 600V, and more preferably 500V.
- the lower limit of the voltage applied to the collection roller 53 is preferably -1,500V, and more preferably -1,200V.
- the upper limit of the applied voltage is preferably ⁇ 400V, more preferably ⁇ 600V.
- the applied voltage to the collection roller 53 By making the applied voltage to the collection roller 53 have the same polarity and higher absolute value than the applied voltage to the brush roller 52, the potential of the outer peripheral surface of the collection roller 53 becomes the potential of the brush bristles 52C of the brush roller 52. Therefore, the foreign matter attached to the brush roller 52 can be attracted to the outer peripheral surface of the collection roller 53.
- the difference in applied voltage between the collection roller 53 and the brush roller 52 is set in the above range, and the applied voltage to the collection roller 53 is set in the above range, so that the foreign matter attached to the brush roller 52 can be removed from the outer peripheral surface of the collection roller 53. Can be adsorbed effectively.
- the collection roller 53 is disposed downstream of the brush roller 52 in the transport direction. Thereby, even if the collection roller 53 has a smaller diameter than the brush roller 52, the foreign material can be scraped to the downstream side in the transport direction by the blade 53 described later, and re-adsorption of the foreign material to the brush roller 52 can be suppressed.
- the rotation direction of the collection roller 53 may be either a forward direction or a reverse direction with respect to the brush roller 52, and may be a rotation direction in which foreign matter is easily collected from the outer peripheral surface by a blade 54 described later.
- the rotation direction of the collection roller 53 is the reverse direction (counterclockwise direction in FIG. 2) with respect to the brush roller 52 as shown in FIG. ing.
- the lower limit of the magnification of the rotation speed of the collection roller 53 with respect to the rotation speed of the brush roller 52 is preferably 1.0.
- the upper limit of the rotation speed magnification is preferably 1.5 times. Thereby, the foreign matter can be effectively moved from the brush roller 52 to the collection roller 53.
- the blade 54 is a second blade that scrapes foreign matter from the collection roller 53.
- the details of the blade 54 and the blade support portion 53a that supports the blade 54 are the same as those of the blade 43 and the blade support portion 43a of the front brush roller unit 4 described above.
- the foreign matter collection unit 55 collects and stores foreign matter scraped off from the collection roller 53 by the blade 54.
- the foreign matter collection unit 55 is disposed below the tip of the blade 54 and downstream of the brush roller 52 in the transport direction. And the foreign material collection
- a gripping portion 55A is provided on the downstream side of the foreign matter collection unit 55, and the foreign matter collection unit 55 can be easily put in and out using the gripping portion 55A.
- the foreign matter collection unit 55 can be pulled out downstream in the transport direction, the foreign matter can be collected by pulling out the cleaning roller unit 5 while being fixed to the holder 1.
- the front cleaning roller unit 5 may be configured to be height adjustable by a height adjustment mechanism. In this way, by adjusting the height of the front cleaning roller unit 5 with the height adjusting mechanism, the pressing force (nip width) of the cleaning roller 51 against the object S is adjusted, and as a result, fine foreign matter is removed. It can be done efficiently.
- the height adjusting mechanism of the front side cleaning roller unit 5 for example, a mechanism similar to that exemplified as the height adjusting mechanism of the front side brush roller unit 4 can be used.
- the front brush roller unit 4 and the front cleaning roller unit 5 are both detachable, it is possible to provide a height adjusting mechanism independently for each unit. Therefore, in the cleaning device, the optimum pressure contact condition to the object S by the brush roller 41 of the front side brush roller unit 4 and the optimum pressure contact condition to the object S by the cleaning roller 51 of the front side cleaning roller unit 5 are different. Even in the case, the respective pressure contact states can be optimized.
- the back side opposing roller unit 6 defines the transport path of the object S together with the brush roller 41 of the front side brush roller unit 4 and the cleaning roller 51 of the front side cleaning roller unit 5, and the back side of the object S (below the transport path) ).
- the back-side counter roller unit 6 mainly includes a pair of counter rollers and an auxiliary roller 62 including a counter metal roller 60 which is a first counter roller on the back side and a counter resin roller 61 which is a second counter roller on the back side. ing. It is preferable that the back side opposing roller unit 6 is detachably attached to the holder 1 from the viewpoint of maintainability.
- the first opposing roller holding the object S on its lower surface has a higher hardness.
- the opposed metal roller 60 is a relatively hard metal roller, the brush hair 41C of the brush roller 41 of the front brush roller unit 4 is appropriately brought into contact with the object S to be relatively large from the front surface S1. Foreign matter can be effectively removed.
- the cleaning roller 51 needs to apply an appropriate pressure to the object S with the second counter roller in order to efficiently adsorb fine foreign matters on the surface. May be difficult to recover by crimping to the object S.
- the opposing resin roller 61 is an elastic resin roller (elastic roller), so that an appropriate pressure is applied to the object S with the cleaning roller 51 of the front-side cleaning roller unit 5 to improve adhesion, Since a suitable nip width can be ensured, fine foreign matters can be efficiently removed from the front surface S1 of the object S by the cleaning roller 51.
- the opposed metal roller 60 is opposed to the brush roller 41 of the front brush roller unit 4 through the object S, and is disposed directly below the brush roller 41 so as to contact the object S. Laura.
- the counter metal roller 60 is rotationally driven in a forward direction (clockwise direction in FIG. 2) with respect to the conveyance direction D of the object S. That is, the opposed metal roller 60 is driven to rotate in the reverse direction with respect to the brush roller 41 of the front brush roller unit 4.
- the details of the counter metal roller 60 are the same as those of the recovery roller 42 of the front brush roller unit 4.
- the opposed metal roller 60 is electrically grounded by the voltage application mechanism, and thus an electric field suitable for removing foreign substances can be generated when the brush roller 41 is charged.
- the surface of the opposed metal roller 60 may be coated with urethane resin or the like in order to prevent the back side surface S2 of the object S from being damaged.
- the electric resistance of the counter metal roller 60 is preferably 10 8 ⁇ or less.
- the electric resistance of the opposed metal roller 42 is 10 8 ⁇ or less, the opposed metal roller 42 is easily grounded electrically.
- the brush roller 41 needs to control the amount of biting of the brush into the object S accurately.
- the first back-side facing roller facing the brush roller 41 it is necessary for the first back-side facing roller facing the brush roller 41 to stably support the object S. Therefore, as the first back side facing roller, one having high hardness is preferable, and specifically, the facing metal roller 60 is preferable as in the present embodiment.
- the first back-side facing roller is not necessarily a metal roller, and a conductive resin roller having high hardness may be used as long as the amount of brush biting into the object S can be controlled.
- the counter resin roller 61 is disposed directly below the cleaning roller 51 so as to face the cleaning roller 51 of the front-side cleaning roller unit 5 through the object S and to contact the object S.
- the counter resin roller 61 is rotationally driven in a forward direction (clockwise direction in FIG. 2) with respect to the conveyance direction D of the object S. That is, the counter resin roller 61 is rotationally driven in the forward direction with respect to the cleaning roller 51.
- the details of the counter resin roller 61 are substantially the same as the cleaning roller 51 of the front side cleaning roller unit 5.
- the counter resin roller 61 it is preferable to blend titanium oxide, barium titanate, or the like as particles serving as the elements of the fine protrusions used for forming the fine protrusions.
- titanium oxide, barium titanate, or the like as the particles, the density of the fine protrusions is increased, and the object S can be appropriately conveyed.
- the counter resin roller 61 is electrically grounded by the voltage application mechanism, and an electric field suitable for removing foreign substances can be generated between the counter resin roller 61 and the charged cleaning roller 51.
- the cleaning roller 51 is set so as to apply an appropriate pressure to the object S between the cleaning roller 51 and the opposing resin roller 61 in order to increase the collection efficiency of fine foreign matters. If this pressure is too low, the cleaning roller 51 and the counter resin roller 61 may not be able to provide a sufficient driving force for causing the object S to enter the brush roller 71 of the back side brush unit 7. If the amount is too large, the foreign matter may be pressed against the object S to be fixed and cannot be collected. Therefore, in order to adjust this pressure, an elastic body or the like may be used so that the counter resin roller 61 can be pressed in the direction of the cleaning roller 51.
- the auxiliary roller 62 guides the movement of the object S carried into the cleaning mechanism 3 by the upstream external transport mechanism 2 ⁇ / b> A together with the transport roller 45 of the front brush roller unit 4.
- the layer structure and the like of the auxiliary roller 62 can be the same as that of the counter resin roller 61.
- the back side cleaning mechanism 3B removes foreign matter on the back side surface S2 of the object S.
- the back side cleaning mechanism 3B is generally configured to be upside down with respect to the front side cleaning mechanism 3A, and has a back side brush roller unit 7, a back side cleaning roller unit 8, and a front side counter roller unit 9.
- the back-side brush roller unit 7 removes foreign matter on the back-side surface S2 of the object S with the brush roller 71. From the back-side counter roller unit 6 of the front-side cleaning mechanism 3A on the back side of the object S (below the conveyance path). Is also arranged adjacent to the downstream side in the transport direction.
- the back brush roller unit 7 mainly includes a brush roller 71, a collection roller 72, and a blade 73, and the basic configuration thereof is the same as that of the front brush roller unit 4 of the front cleaning mechanism 3A. However, the back-side brush roller unit 7 differs from the front-side brush roller unit 4 in that members corresponding to the transport roller 45 and the foreign material collecting unit 44 are not provided.
- the reason why the member corresponding to the transport roller 45 is not provided in the back brush roller unit 7 is that the brush roller 71 is driven to rotate in the reverse direction with respect to the transport direction D but transports more than the brush roller 71. This is because the cleaning roller 51 and the counter resin roller 61 arranged upstream in the direction give the object S an appropriate propulsive force for the brush roller 71 to enter downward.
- the back brush roller unit 7 is not provided with a member corresponding to the foreign matter collecting part 44, but the bottom part is open so that foreign matter can be discharged out of the unit.
- the foreign matter discharged from the back side brush roller unit 7 is collected by the foreign matter collecting unit 13 provided at the bottom of the holder 1 together with the foreign matter discharged from the back side cleaning roller unit 8 described later.
- the back brush roller unit 7 is preferably detachably attached to the holder 1 from the viewpoint of maintainability.
- the brush roller 71 is in contact with the back side surface S2 of the object S while being charged by the voltage application mechanism, and is driven to rotate in the reverse direction (counterclockwise direction in FIG. 2) with respect to the conveyance direction D of the object S. By doing so, it is the first brush roller on the back side that removes relatively large foreign objects of millimeter size on the back side surface S2 of the object S.
- Such a brush roller 71 has a cylindrical core rod 71A and a plurality of brush bristles 71C implanted on the outer peripheral surface of the core rod 71A via an adhesive layer 71B (see FIG. 3).
- the voltage applied to the brush roller 71 (voltage applied to the core rod 71A) has the same polarity and higher absolute value than the voltage applied to the cleaning roller 80 of the back side cleaning roller unit 8 described later.
- the lower limit of the voltage applied to the brush roller 71 is preferably ⁇ 800 V, more preferably ⁇ 600 V, like the brush roller 41 of the front brush roller unit 4.
- the upper limit of the applied voltage is preferably -200V, more preferably -300V.
- the collection roller 72 is a first collection roller on the back side that collects the foreign matter removed by the brush roller 71 from the back surface S2 of the object S.
- the collection roller 72 is substantially parallel to the brush roller 71 below the brush roller 71 and the brush bristles 71C. It is arranged in contact with.
- the collection roller 72 is rotationally driven in the counterclockwise direction (counterclockwise direction in FIG. 2) with respect to the brush roller 71 by the power from the external drive source while being charged by the voltage application mechanism. Since the details of the collection roller 72 can be the same as those of the collection roller 42 of the front brush roller unit 4 described above, a duplicate description is omitted.
- the applied voltage to the collection roller 72 is set to have the same polarity and higher absolute value than the applied voltage to the brush roller 71.
- the lower limit of the absolute value of the difference between the voltage applied to the collection roller 72 and the voltage applied to the brush roller 71 is preferably 200V, and more preferably 300V.
- the upper limit of the absolute value of the difference is preferably 600V, and more preferably 500V.
- the lower limit of the voltage applied to the collecting roller 72 is preferably -1,500V, and more preferably -1,200V.
- the upper limit of the applied voltage is preferably ⁇ 400V, more preferably ⁇ 600V.
- the applied voltage to the collection roller 72 By making the applied voltage to the collection roller 72 have the same polarity and higher absolute value than the applied voltage to the brush roller 71, the potential of the outer peripheral surface of the collection roller 72 becomes the potential of the brush bristle 71C of the brush roller 71. Therefore, the foreign matter adhering to the brush roller 71 can be adsorbed to the outer peripheral surface of the collection roller 72.
- the difference in applied voltage between the collection roller 72 and the brush roller 71 within the above range and further setting the voltage applied to the collection roller 72 within the above range, foreign matter adhering to the brush roller 71 can be removed from the outer peripheral surface of the collection roller 72. Can be adsorbed effectively.
- the rotation direction of the collection roller 72 may be either the forward direction or the reverse direction with respect to the brush roller 71, and may be driven in a rotation direction in which foreign matter on the outer peripheral surface is easily collected by a blade 73 described later. .
- the rotation direction of the collection roller 72 is the reverse direction (counterclockwise direction in FIG. 2) with respect to the brush roller 71 as shown in FIG. ing.
- the lower limit of the magnification of the rotation speed of the collection roller 72 relative to the rotation speed of the brush roller 71 is preferably 1.0.
- the upper limit of the rotation speed magnification is preferably 1.5 times. Thereby, the foreign matter can be effectively moved from the brush roller 71 to the collection roller 72.
- the blade 73 is a third blade that scrapes foreign matter from the collection roller 72.
- the details of the blade 73 and the blade support portion 73a that supports the blade 73 are the same as those of the blade 43 and the blade support portion 43a of the front-side brush roller unit 4 of the front-side cleaning mechanism 3A.
- the back side cleaning roller unit 8 is for removing fine foreign matter on the back side surface S2 of the object S by the cleaning roller 80, and in the back side of the object S (below the transport path) in the transport direction than the back side brush roller unit 7. Adjacent to the downstream side.
- the back side cleaning roller unit 8 mainly includes a cleaning roller 80, a brush roller 81, a collection roller 82, a blade 83, and a transport roller 85, and the basic configuration thereof is the front side cleaning roller unit 5 of the front side cleaning mechanism 3A. It is the same.
- the back-side brush roller unit 7 differs from the front-side brush roller unit 4 in that the back-side brush roller unit 7 has a conveying roller 85 and a member corresponding to the foreign matter collecting unit 55 is not provided.
- the back-side brush roller unit 7 is not provided with a member corresponding to the foreign matter collecting unit 55, but has a bottom portion that is open so that foreign matter can be discharged out of the unit.
- the foreign matter discharged from the back side cleaning roller unit 8 is collected together with the foreign matter discharged from the back side brush roller unit 7 by the foreign matter collecting unit 13 provided at the lowermost part of the holder 1.
- the back side cleaning roller unit 8 is preferably detachably attached to the holder 1 from the viewpoint of maintainability.
- the cleaning roller 80 is a back side cleaning roller that removes fine foreign matters on the back side surface S2 of the object S, and is disposed on the back side of the object S (below the conveyance path).
- the cleaning roller 80 has a forward rotation direction (clockwise direction in FIG. 2) with respect to the conveyance direction D with a rotation axis that is substantially perpendicular to the conveyance direction D and substantially parallel to the conveyance surface in a state where the outer peripheral surface is charged by the voltage application mechanism. ). Since the details of the cleaning roller 80 can be the same as those of the cleaning roller 51 of the front-side cleaning roller unit 5 described above, a duplicate description is omitted.
- the applied voltage to the cleaning roller 80 has the same polarity and lower absolute value than the applied voltage to the brush roller 71 of the back side brush roller unit 7.
- the lower limit of the voltage applied to the cleaning roller 80 is, for example, ⁇ 400V, and preferably ⁇ 200V.
- the applied voltage is, for example, less than 0V and preferably ⁇ 50V or less.
- the voltage applied to the cleaning roller 80 has the same polarity and lower absolute value than the voltage applied to the brush roller 71 of the back brush roller unit 7, so that relatively fine foreign matter can be removed from the object. It can be removed from the backside surface S2 of S.
- by setting the voltage applied to the cleaning roller 80 within the above range relatively fine foreign matter can be efficiently removed from the back surface S2 of the object S.
- the brush roller 81 is a second brush roller on the back side that collects fine foreign matter removed by the cleaning roller 80 from the back surface S2 of the object S.
- the brush roller 81 contacts the cleaning roller 80 and is disposed below the cleaning roller 80.
- the brush roller 81 rotates in the counterclockwise direction (clockwise direction in FIG. 2) with respect to the cleaning roller 80 with a rotation axis substantially perpendicular to the transport direction D and substantially parallel to the transport surface in a state of being charged by the voltage application mechanism.
- This brush roller 81 has a plurality of brush bristles 81C planted on a core rod 81A via an adhesive layer 81B in the same manner as the brush roller 41 of the front brush roller unit 4 described above. The same as the brush roller 41 of the unit 4.
- the applied voltage to the brush roller 81 (voltage applied to the core rod 81A) is set to have the same polarity and higher absolute value than the applied voltage to the cleaning roller 80.
- the lower limit of the voltage applied to the brush roller 81 is preferably ⁇ 800 V, more preferably ⁇ 600 V, similarly to the brush roller 41 of the front brush roller unit 4.
- the upper limit of the applied voltage is preferably -200V, more preferably -300V.
- the collection roller 82 is a second collection roller on the back side that collects fine foreign matter collected by the brush roller 81 from the cleaning roller 80.
- the collection roller 82 is substantially parallel to the brush roller 81 below the brush roller 81 and abuts against the brush bristles 81C. Arranged.
- the recovery roller 82 is rotationally driven in the counterclockwise direction (clockwise direction in FIG. 2) with respect to the brush roller 81 by power from an external drive source while being charged by the voltage application mechanism. Since the details of the collection roller 82 can be the same as those of the collection roller 42 of the front brush roller unit 4 described above, a duplicate description is omitted.
- the applied voltage to the collection roller 82 is set to have the same polarity and higher absolute value than the applied voltage to the brush roller 81.
- the lower limit of the absolute value of the difference between the voltage applied to the collection roller 82 and the voltage applied to the brush roller 81 is preferably 200V, and more preferably 300V.
- the upper limit of the absolute value of the difference is preferably 600V, and more preferably 500V.
- the lower limit of the voltage applied to the collection roller 82 is preferably -1,500V, and more preferably -1,200V.
- the upper limit of the applied voltage is preferably ⁇ 400V, more preferably ⁇ 600V.
- the applied voltage to the collection roller 82 By making the applied voltage to the collection roller 82 have the same polarity and higher absolute value than the applied voltage to the brush roller 81, the potential of the outer peripheral surface of the collection roller 82 becomes the potential of the brush hair 81C of the brush roller 81. Therefore, the foreign matter attached to the brush roller 81 can be attracted to the outer peripheral surface of the collection roller 82.
- the difference in applied voltage between the collection roller 82 and the brush roller 81 within the above range, and further setting the voltage applied to the collection roller 82 within the above range the foreign matter attached to the brush roller 81 can be removed from the outer peripheral surface of the collection roller 82. Can be adsorbed effectively.
- the rotation direction of the collection roller 82 may be either a forward direction or a reverse direction with respect to the brush roller 81, and may be driven in a rotation direction in which foreign matter is easily collected from the outer peripheral surface by a blade 83 described later. .
- the collection roller 82 is rotated in the reverse direction (clockwise direction in FIG. 2) with respect to the brush roller 81 as shown in FIG. Yes.
- the lower limit of the magnification of the rotation speed of the collection roller 82 relative to the rotation speed of the brush roller 81 is preferably 1.0.
- the upper limit of the rotation speed magnification is preferably 1.5 times. Thereby, the foreign matter can be effectively moved from the brush roller 81 to the collection roller 82.
- the blade 83 is a fourth blade that scrapes foreign matter from the collection roller 81.
- the details of the blade 83 and the blade support portion 83a that supports the blade 83 are the same as those of the blade 43 and the blade support portion 43a of the front-side brush roller unit 4 of the front-side cleaning mechanism 3A.
- the transport roller 85 guides the transport of the object S, and is disposed downstream of the cleaning roller 800 in the transport direction. As this conveyance roller 85, the thing similar to the opposing resin roller 61 is used suitably.
- the front-side counter roller unit 9 defines the transport path of the object S together with the brush roller 71 of the back-side brush roller unit 7 and the cleaning roller 80 of the back-side cleaning roller unit 8, and the front side of the object S (above the transport path) ).
- the front-side counter roller unit 9 mainly includes a casing 90, a counter-metal roller 91 that is a first front-side counter roller, and a counter-resin roller 92 that is a second front-side counter roller. It is detachably arranged.
- a front-side facing roller unit 9 is detachably disposed on an apparatus body fixedly installed on a ground base such as a factory.
- the front side opposing roller unit 9 is detachably attached to the holder 1, so that the front side opposing roller unit 9 can be easily detached from the holder 1, and the brush roller 71 and the back side cleaning roller unit 8 of the back side brush roller unit 7.
- the cleaning roller 80 can be exposed. Therefore, since the brush roller 71 and the cleaning roller 80 can be easily replaced and cleaned, the maintenance is excellent.
- maintenance of the counter metal roller 91 and the counter resin roller 92 housed in the housing 90 is facilitated as compared with the case of being assembled and fixed in the holder 1.
- the housing 90 accommodates the opposing metal roller 91 and the opposing resin roller 92 as a unit and can be attached to and detached from the holder 1.
- a pair of gripping portions 90 ⁇ / b> A are provided on the top plate of the housing 90 so as to be separated in the horizontal direction perpendicular to the transport direction D.
- the pair of gripping portions 90A are used when the front side opposing roller unit 9 is attached or detached.
- the casing 90 is provided with an opening 90B in the bottom plate, and a part of the counter metal roller 91 and the counter resin roller 92 protrude from the opening 90B.
- casing 90 there is no restriction
- the opposing metal roller 91 is disposed directly above the brush roller 71 so as to face the brush roller 71 of the back-side brush roller unit 7 via the object S and to contact the object S.
- the counter metal roller 91 is driven to rotate, and rotates counterclockwise (counterclockwise in FIG. 2) with respect to the brush roller 71 of the back brush roller unit 7.
- the details of the counter metal roller 91 are the same as those of the recovery roller 42 of the front brush roller unit 4.
- the opposing metal roller 91 is electrically grounded by the voltage application mechanism, and an electric field suitable for removing foreign matter can be generated between the opposing metal roller 91 and the brush roller 71.
- the opposed metal roller 91 is a relatively hard metal roller
- the brush bristles 71C of the brush roller 71 of the back side brush roller unit 7 can be appropriately brought into contact with the object S.
- a relatively large foreign matter can be effectively removed from the back side surface S2 of S.
- the front facing roller is not necessarily a metal roller, and a conductive resin roller or the like may be used.
- the counter resin roller 92 is disposed directly above the cleaning roller 80 so as to face the cleaning roller 80 of the back side cleaning roller unit 8 through the object S and to contact the object S.
- the counter resin roller 92 is driven to rotate and rotates in the forward direction (counterclockwise direction in FIG. 2) with respect to the cleaning roller 80.
- the details of the counter resin roller 92 are the same as those of the counter resin roller 61 of the front counter roller unit 6.
- the counter resin roller 92 is electrically grounded by the voltage application mechanism, and can generate an electric field suitable for removing foreign matter between the counter resin roller 92 and the cleaning roller 80.
- the opposing resin roller 92 is a resin roller having elasticity, a suitable nip width can be secured between the counter roller 92 and the cleaning roller 80 of the back side cleaning roller unit 8, so that the adhesion between the cleaning roller 80 and the object S is improved.
- the cleaning roller 80 can effectively remove fine foreign matters from the back surface S2 of the object S. It is to be noted that, similarly to the front-side cleaning mechanism 3A, the back-side brush roller unit 7 and the back-side cleaning roller unit 8 of the back-side cleaning mechanism 3B are provided with height adjustment mechanisms for adjusting the respective heights.
- the collection rollers 42, 53, 72, and 82, the cleaning rollers 51 and 80, and the outer peripheral surfaces of the brush rollers 52 and 81 are preferably charged, and the brush rollers 41 and 71 are also preferably charged.
- the auxiliary roller 62, the opposing metal rollers 60 and 91, and the opposing resin rollers 61 and 92 are preferably electrically grounded.
- a charging circuit for charging or electrically grounding (including fixing to 0 V) these rollers a known circuit can be used.
- this charging circuit is a circuit when, for example, a current of 500 ⁇ A is used as a threshold and a current exceeding the threshold flows.
- a mechanism for example, a fuse
- FIG. 11 the unit side terminal 110 arrange
- FIG. 12 shows the holder-side terminal 120 disposed on the inner surface of the holder 1.
- the unit-side terminal 110 in FIG. 11 surrounds two unit-side metal plates 111 arranged in parallel along an axis Z parallel to the transport direction D, and each unit-side metal plate 111 in a plan view. Two covers 112 are mainly provided.
- the unit side metal plate 111 is electrically connected to a roller included in each unit via a wiring (not shown). Note that the number of the unit-side metal plates 111 included in the unit-side terminal 110 of FIG. 11 is two, but the number of the unit-side metal plates 111 can be appropriately changed according to the number of rollers of each unit. Further, the shape of the cover 112 can be changed as appropriate according to the number of unit-side metal plates 111 and the like.
- the holder-side terminal 120 of FIG. 12 is disposed on the base 121 formed of an insulating member and the upper surface of the base 121, and the above-mentioned unit-side metal plate 111 can be inserted from above, and the inserted unit side
- the holder side metal plate 122 is electrically connected to an external power source or the like via a wiring or the like (not shown).
- the two surrounding portions 123 are configured such that their outer surfaces can come into contact with the inner surface of the cover 112 of the unit-side terminal 110.
- the number of holder-side metal plates 122 and the shape of the surrounding portion 123 of the holder-side terminal 120 of FIG. 12 can be appropriately changed according to the number of unit-side metal plates 111 in the unit-side terminal 110, the shape of the cover 112, and the like. It is.
- each unit-side metal plate 111 of the unit-side terminal 110 is inserted into the holder-side metal plate 122 of each holder-side terminal 120 so that both the metal plates are electrically connected, and the unit-side terminal 110
- the cover 112 and the surrounding portion 123 are fitted so that the cover 112 covers the surrounding portion 123.
- both terminals can be easily connected and the connected both terminals can be firmly connected. Can be fixed.
- the unit-side terminal 110 and the holder-side terminal 120 in the cleaning device it is possible to easily and electrically connect at the same time as each unit is mounted, so that convenience can be improved and a strong connection is achieved. Since the structure can be formed, it is easy to keep the voltage applied to each roller constant even if vibration or the like occurs during operation.
- Each unit is usually provided with a voltage applying mechanism (including an electrically grounding mechanism) near one end of each roller, and the unit-side terminal 110 and the voltage applying mechanism are electrically connected by wiring. Connected. A voltage supplied to each unit from an external power source or the like is supplied to each roller via the unit-side terminal 110, the wiring, and the voltage application mechanism.
- a driving mechanism such as a gear for driving each roller may be provided near the other end of each roller after using a member formed of an insulating material.
- a conical recess 130 a provided on one end face of the roller 130 and a hemispherical tip portion, and this tip portion is a conical recess of the roller 130.
- the voltage application mechanism includes a housing side electrode 131 that is in contact with the inner peripheral surface of 130a and a metal leaf spring 132 that is connected to the housing side electrode 131 and pressurizes the housing side electrode 131 toward the roller 130. .
- the central axis of the roller 130 and the apex of the conical depression substantially coincide with the center of the hemisphere at the tip of the housing side electrode 131 when viewed in the conveyance width direction.
- the gap between the roller 130 and the housing-side electrode 131 may be lubricated with conductive grease.
- the unit side terminal 110 and the leaf spring 132 are electrically connected by a wiring (not shown), and a voltage is applied to the roller 130 via the wiring, the leaf spring 132, the housing side electrode 131, and the recess 130a. Is done.
- This voltage application mechanism can suppress wear of the roller 130 and the casing-side electrode 131 by bringing the casing-side electrode 131 into contact with the vicinity of the central axis of the roller 130, that is, a portion of the roller 130 having a relatively low peripheral speed. Further, the roller 130 vibrates by bringing the hemispherical tip of the housing side electrode 131 into contact with the conical depression provided in the roller 130 and pressurizing the housing side electrode 131 to the roller 130 side by the leaf spring 132.
- the housing side electrode 131 is brought into contact with the end face of the roller 130, and the housing side electrode 131 is pressurized in the transport width direction by the plate spring 132, so that the deflection of the plate spring 132 is suppressed even when the roller 130 vibrates up and down. Therefore, it becomes easy to pressurize stably. Furthermore, by contacting the inner peripheral surface of the conical recess 130a and the hemispherical tip of the housing-side electrode 131, a space surrounded by the recess 130a and the tip of the housing-side electrode 101 is formed. Grease can be sealed in the space to suppress the scattering. However, a cover or the like may be provided around the voltage application mechanism as necessary in order to further suppress the scattering of grease.
- the voltage application mechanism in each unit is not limited to the one shown in FIG. 13 described above.
- a conductive sliding member such as a conductive brush or a conductive bearing is provided in the housing, and the conductive sliding member is provided. Examples include a method of applying a voltage by contacting each roller.
- the cleaning method includes a step of bringing a brush roller 41 that is driven to rotate in a direction reverse to the conveyance direction D with a rotation axis that is substantially perpendicular to the conveyance direction D and substantially parallel to the conveyance surface, into contact with the object S to be conveyed; And a step of abutting the cleaning roller 51 rotating about the rotation axis substantially perpendicular to the conveyance direction D and substantially parallel to the conveyance surface with the object S after abutting against the brush roller 41.
- the object S after being brought into contact with the cleaning roller 51 is rotationally driven in a direction reverse to the conveyance direction D by a rotation axis substantially perpendicular to the conveyance direction D and substantially parallel to the conveyance surface.
- a voltage having the same polarity as the cleaning roller 51 of the front side cleaning roller unit 5 and a high absolute value is applied to the brush roller 41 of the front side brush roller unit 4.
- a voltage having the same polarity and a high absolute value as that of the cleaning roller 80 of the back side cleaning roller unit 8 is applied to the brush roller 71 of the back side brush roller unit 7.
- the brush rollers 41 and 71 can remove relatively large foreign substances on the millimeter level and perform cleaning. Fine foreign matters can be removed by the rollers 51 and 80.
- Various conditions such as applied voltage and rotation to each roller in this cleaning method can be the same as those of the above-described cleaning device, and thus redundant description is omitted.
- FIGS. 1 and 2 show only an example of the cleaning device.
- the layer structure of each roller may be different from that in FIG.
- the rollers other than the first brush roller, the cleaning roller, and the pair of opposed rollers may be driven rollers.
- the driven roller is in contact with another roller to be rotationally driven or a conveyed product, so that it can be driven to exert its function.
- the rotation direction of the first brush roller is preferably the reverse direction with respect to the conveyance direction of the object, but may be the forward direction.
- the rotation direction of the cleaning roller is preferably a forward direction with respect to the conveyance direction of the object.
- the cleaning device may include at least one first brush roller, a cleaning roller, a pair of opposed rollers, and a voltage application mechanism, and other configurations are arbitrary. Further, the first brush roller, the cleaning roller, and the pair of opposing rollers are not unitized, and may be directly fixed to the holder of the cleaning device.
- a foreign matter collecting part may be provided in each of the back side cleaning roller unit and the back side brush roller unit.
- both of the pair of opposed rollers are both electrically grounded, but other configurations may be employed.
- both of the pair of opposed rollers may be fixed to 0 V, and may be fixed to a predetermined positive potential depending on the charging state of the foreign matter.
- a condition to be satisfied is that a reference fixed potential is applied to the pair of opposed rollers with respect to the charged brush roller 41 and the charged cleaning roller 51. Therefore, a different fixed potential can be applied to each of the pair of opposed rollers as necessary. If the voltage difference between the fixed potential and the charged cleaning roller 51 is too small, a sufficient electric field for removing foreign substances cannot be generated. Therefore, the lower limit of this potential difference is preferably 50V.
- the brush rollers 41 and 71 and the cleaning rollers 51 and 80 may have a positive potential within the scope of the idea of the present invention.
- the pair of opposed rollers may be electrically grounded, or a fixed potential serving as a reference may be applied. This fixed potential may be 0 V, or may be a predetermined negative potential or a positive potential depending on the charged state of the foreign matter.
- the charge train was determined by evaluating the chargeability of the workpiece (object) and the brush hair, with the objective of selecting a material for the brush hair suitable for removing foreign matter.
- the target object and the foreign object As the target object and the foreign object, the target object in the target market and the foreign object which is a problem in the market were used. Specifically, acrylic plates, glass plates, green sheets and PET films were used as the objects, and acrylic scraps, copper powder, ceramic scraps (ceracas), glass scraps, polyester particles and fibers were used as foreign substances. .
- the triboelectric charging property was evaluated by measuring the polarities when the objects and the brush hairs were frictionally charged with each other, the objects and the brush hairs, or the brush hairs with a surface electrometer. Further, the charging relationship between the foreign object and the object was evaluated by sandwiching the foreign object between the objects and frictionally charging it, and then sucking the foreign object and measuring the charge amount with a digital electrometer. These evaluation results are shown as a charge train in FIG.
- the brush hair using a material positioned as far away as possible from the object and the foreign substance has a higher foreign substance adsorption force. Therefore, from the result of FIG. 14, it is inferred that the material 1 and the material 4 which are conductive polyesters are suitable for removing foreign substances.
- the material 1 which is a fiber having a relatively large fineness, that is, a relatively thick fiber is preferable as the bristle.
- the reason why the recovery rate when the material 4 is used is lower than the recovery rate when the material 1 having the same triboelectric charging property is used is assumed as follows. That is, since the material 4 is a fiber having a relatively small fineness, that is, a relatively thin fiber, the rigidity of the brush bristles 41C is insufficient, and a relatively large ceramic residue attached to the object S cannot be moved. It is believed that there is.
- the optimization of the voltage applied to the brush roller is performed by bringing a brush roller to which a predetermined voltage is applied into contact with an object to which dust is attached as shown in FIG. 15A and applying the predetermined voltage. The state was held for 10 seconds. Next, as shown in FIG. 15B, the brush roller was pulled away from the object, and the width of the band-like region formed by removing the dust was evaluated as the dust adsorption width (field action width).
- the conductive polyester of the material 1 that gave a suitable result in the previous evaluation was used.
- a PET film having a thickness of 50 ⁇ m was used.
- polyester particles having a particle size of 50 ⁇ m to 150 ⁇ m were used.
- the predetermined voltage applied to the brush roller was 0V, -100V, -400V, -800V or -1,600V.
- the evaluation result of the dust adsorption width is shown in FIG.
- the lower limit of the voltage applied to the brush roller is preferably ⁇ 800 V, more preferably ⁇ 600 V.
- the upper limit of the applied voltage is preferably ⁇ 200V, more preferably ⁇ 300V.
- the influence of the peripheral speed of the brush roller was evaluated by changing the ratio (B / W) of the peripheral speed B of the brush roller to the conveyance speed W of the object, and evaluating it as a relationship with the removability of the ceramic residue.
- B / W was 50% (for example, the peripheral speed of the brush roller was 6 m / min with respect to the object conveying speed of 12 m / min)
- the ceramic residue was blown off to the entrance side of the workpiece.
- the peripheral speed of the brush roller was changed to 3 m / min and the B / W was set to 25%, the above-mentioned repelling was suppressed.
- B / W is preferably 25% or less because a foreign material smaller than a large foreign material is likely to be repelled.
- the influence of the pressure contact amount of the brush roller on the object was evaluated by removing the ceramic residue while changing the pressure contact amount to 0.3 mm or 0.6 mm.
- the pressure contact amount was 0.3 mm
- a part of the ceramic residue passed through the brush roller and remained on the object.
- the pressure contact amount was 0.6 mm
- the ceramic residue could be removed.
- the larger the pressure contact amount the better the removal of foreign matters.
- scratches may occur depending on the type and state of the object.
- the upper limit of the pressure contact amount differs for each object. Therefore, by adjusting the height of the brush roller unit using the height adjusting mechanism, the pressure contact amount of the brush roller can be optimized even when the thickness, type, state, etc. of the object are different.
- the cleaning performance of the cleaning device was evaluated. Specifically, for the combinations of various foreign objects and objects, the cleaning device shown in FIGS. 1 and 2 is used, the peripheral speed and applied voltage of each roller are set as shown in Table 2, and the surface of the object before and after cleaning is determined. Evaluation was made by imaging.
- FIGS. 17 to 19 A) to (F).
- FIGS. 17 to 19 show the imaging results before the cleaning on the left and the images after the cleaning on the right.
- the object Sa is a green sheet
- the foreign matter Xa is a ceramic punch residue ( ⁇ 4 mm, thickness 120 ⁇ m).
- FIG. 17A the object Sa is a green sheet
- the foreign matter Xa is a ceramic punch residue ( ⁇ 4 mm, thickness 120 ⁇ m).
- the object Sb is a green sheet, and the foreign matter Xb is a ceramic residue (length: 0.1 to 3 mm, thickness: 170 ⁇ m) of various sizes and shapes.
- the object Sc is a deflection plate and the foreign material Xc is sebum.
- the object Sd is an acrylic plate, and the foreign matter Xd is a cotton fiber.
- the object Se is a green sheet, and the foreign matter Xe is a polyester fiber (length: 2 to 15 mm).
- the object Sf is a PET film, and the foreign matter Xf is a polyester particle (particle size 50 to 150 ⁇ m).
- the cleaning device and the cleaning method of the present invention can efficiently remove both relatively large foreign matters and fine foreign matters from the surface of an object.
Abstract
Description
対象物Sは、図2では平板状の部材であるが、板状又はフィルム状の部材であれば特に制限はない。具体的には、対象物の表面は、図2に示すように平坦であってもよいが、窪みが存在していてもよい。さらに、対象物には、孔等が存在していてもよい。 〔Object〕
The object S is a flat plate member in FIG. 2, but is not particularly limited as long as it is a plate member or a film member. Specifically, the surface of the object may be flat as shown in FIG. 2, but a depression may be present. Furthermore, the object may have a hole or the like.
ホルダ1は、クリーニング機構3を保持するものである。このホルダ1は、対向する一対の板状部材10の間を複数のロッド11及びシャフト12により連結したものである。 [holder]
The
外部搬送機構は、対象物Sに搬送のための推進力を付与するものであり、クリーニング機構3の外部に設けられる。この外部搬送機構は、クリーニング機構3よりも搬送方向上流側に配置される上流側外部搬送機構2Aと、クリーニング機構3よりも搬送方向下流側に配置される下流側外部搬送機構2Bとを有する。この外部搬送機構による対象物Sの搬送速度は、クリーニング機構3により対象物Sから異物を除去できる範囲であれば特に制限はない。対象物Sの搬送速度の下限としては、5m/minが好ましく、10m/minがより好ましい。一方、対象物Sの搬送速度の上限としては、30m/minが好ましく、20m/minがより好ましい。対象物Sの搬送速度が上記下限に満たないと、異物除去に要する時間が長くなり、異物の除去効率が低下するおそれがある。逆に、対象物Sの搬送速度が上記上限を超えると、クリーニング機構3により対象物Sの表面の異物を十分に除去できなくなるおそれがある。 [External transport mechanism]
The external transport mechanism applies a propulsive force for transport to the object S, and is provided outside the
上流側外部搬送機構2Aは、対象物Sをクリーニング機構3に搬入するものであり、複数のベルト搬送部20Aを有している。ベルト搬送部20Aは、搬送方向Dに沿って離間して配置される一対のローラ21Aの間に無端ベルト22Aが巻き掛けられたものである。一対のローラ21Aのうち、一方は回転力が付与される駆動ローラであり、他方は駆動ローラの回転により無端ベルト22Aと共に回転する従動ローラである。複数のベルト搬送部20Aは、搬送方向Dに直交する水平方向(以下、「搬送幅方向」ともいう)に一定間隔で配置されている。 <Upstream side external transport mechanism>
The upstream
下流側外部搬送機構2Bは対象物Sをクリーニング機構3から搬出するものであり、複数のベルト搬送部20Bを有している。ベルト搬送部20Bは、上流側外部搬送機構2Aの複数のベルト搬送部20Aと同様な構成とされている。すなわち、複数のベルト搬送部20Bは、搬送方向Dに沿って離間して配置される駆動ローラ及び従動ローラにより構成される一対のローラ21Bの間に無端ベルト22Bが巻き掛けられたものである。複数のベルト搬送部20Bも搬送幅方向に一定間隔で配置されている。 <Downstream external transport mechanism>
The downstream side
クリーニング機構3は、対象物Sの表側表面S1及び裏側表面S2の両面のクリーニングが可能な機構であり、表側クリーニング機構3A及び裏側クリーニング機構3Bを有している。 [Cleaning mechanism]
The
表側クリーニング機構3Aは、搬送される対象物Sの表側表面S1の異物を除去するユニットである。この表側クリーニング機構3Aは、表側ブラシローラユニット4、表側クリーニングローラユニット5及び裏側対向ローラユニット6を有している。当該クリーニング装置は、工場等の床面の基台上に設置されるホルダ1に、表側ブラシローラユニット4及び表側クリーニングローラユニット5が着脱可能に装着される。ホルダ1は、上記基台上にネジ等の固着具により固定されていてもよいが、固着具を用いず移動可能な状態で載置されていることが好ましい。表側ブラシローラユニット4及び表側クリーニングローラユニット5は、搬送される対象物Sの上方(搬送経路の上方)に配設され、ホルダ1に着脱可能に保持される。 <Front side cleaning mechanism>
The front
表側ブラシローラユニット4は、筐体40に収容されたブラシローラ41により対象物Sの表側表面S1の異物を除去するユニットであり、ミリサイズの比較的大きな異物の除去に好適である。この表側ブラシローラユニット4の筐体40には、ブラシローラ41の他に、回収ローラ42、ブレード43、異物回収部44及び搬送ローラ45が収容され、全体がユニット化されている。このように表側ブラシローラユニット4がホルダ1に着脱可能にユニット化されることで、表側ブラシローラユニット4をホルダ1から容易に取り外すことができる。その結果、対象物Sや異物の種類にあわせてブラシローラ41を交換する必要がある場合にユニットごと交換することができるため、効果的な異物の除去を簡便に行うことができる。また、表側ブラシローラユニット4をホルダ1から取り外すことで、ブラシローラ41に対向する後述の対向金属ローラ60を露出させて交換や洗浄を容易に行えるため、メンテナンス性に優れる。加えて、筐体40に収容されるブラシローラ41等に関しても、ホルダ1に組み込み固定する場合に比べて、メンテナンスが容易となる。 [Front side brush roller unit]
The front-side
筐体40は、ブラシローラ41等を収容してユニット化し、ホルダ1に着脱可能とするものである。この筐体40は、搬送面に略垂直となるように対向して配設される上流板及び下流板と、上流板及び下流板の側端部同士を接続する一対の側板と、上流板、下流板及び一対の側板の上端部に接続される天板と、上流板、下流板及び一対の側板の下端部に接続される底板とを有する。天板には、幅方向において離間している一対の把持部40Aが設けられている。一対の把持部40Aは、表側ブラシローラユニット4の着脱時に利用されるものである。底板には開口部40Bが設けられ、この開口部40Bから後述するブラシローラ41のブラシ毛41Cの先端部が突出している。なお、筐体40を構成する材料としては、特に制限はないが、例えばステンレス等が挙げられる。 (Casing)
The
ブラシローラ41は、搬送される対象物Sに当接して表側表面S1の異物、特に比較的大きな異物(例えばミリサイズの異物)を除去する表側の第1のブラシローラである。このブラシローラ41は、上記電圧印加機構により帯電した状態で外部駆動源からの動力により搬送方向Dと略垂直かつ搬送面と略平行な回転軸で搬送方向Dに対して逆回り方向(図2の時計回り方向)に回転駆動される。なお、ブラシローラ41は、帯電状態で搬送方向Dに対して逆回り方向に回転駆動することが好ましいが、非帯電状態で回転駆動してもよい。 (Brush roller)
The
回収ローラ42は、ブラシローラ41と略平行かつブラシ毛41Cと当接し、このブラシ毛41Cに付着した異物を回収する表側の第1の回収ローラである。この回収ローラ42は、ブラシローラ41よりも小径であり、ブラシローラ41の上方においてブラシローラ41よりも搬送方向上流側に配置されている。このように配置することにより、後述するブレード43で掻き取られた異物が回収ローラ42等の部材に再付着するなどの悪影響を低減できる。 (Recovery roller)
The
ブレード43は、回収ローラ42から異物を掻き取って除去する第1のブレードである。このブレード43は、例えば弾性を有する矩形板状部材である。 (blade)
The
異物回収部44は、ブレード43によって回収ローラ42から掻き落とされた異物を回収及び収容する第1の異物回収部である。この異物回収部44は、ブレード43の先端部の下方かつ、ブラシローラ41よりも搬送方向上流側に配設されている。そして、異物回収部44は、筐体40の上流板の開口部に嵌め込まれ、この開口部から搬送方向上流側に引き出し可能とされている。異物回収部44の上流側には、把持部44Aが設けられており、この把持部44Aを利用して異物回収部44の出し入れが容易化されている。また、異物回収部44は、搬送方向上流側に引き出すことが可能であるため、表側ブラシローラユニット4をホルダ1に固定した状態のまま引き出して異物を回収することができ、利便性に優れる。 (Foreign matter recovery unit)
The foreign
搬送ローラ45は、後述する裏側対向ローラユニット6の補助ローラ62と共に、クリーニング機構3に搬入される対象物Sの移動をガイドするものである。また、搬送ローラ45及び補助ローラ62は、搬送方向Dに対して逆回りするブラシローラ41の下方に対象物Sを適切な力で進入させるために、対象物Sに推進力を与えるための機能も有する。この搬送ローラ45は、後述の裏側対向ローラユニット6の補助ローラ62に対向して配置されている。搬送ローラ45は、搬送方向Dに対して順回り方向(図2の反時計回り方向)に回転する。ここで、補助ローラ62と搬送ローラ45とで対象物Sを挟み込む力が強すぎる場合、異物が対象物Sに押し付けられて除去しにくくなるおそれや、対象物Sに傷を付けてしまうおそれがある。これらを考慮して、搬送ローラ45は、補助ローラ62を0.49N程度の力で押圧するように配設されている。但し、上記押圧力は、対象物Sの材質や厚み等を考慮して適宜調整することができる。また、対象物Sの硬度が比較的高く、補助ローラ62だけでブラシローラ41の下方に進入させることができる場合は、当該クリーニング装置から搬送ローラ45を省略することも可能である。 (Conveyance roller)
The
表側ブラシローラユニット4は、高さ調節機構により高さ調節が可能に構成されているとよい。このように、高さ調節機構により表側ブラシローラユニット4の高さ調節を可能とすることで、対象物Sに対するブラシローラ41の圧接量を調節し、ブラシローラ41による比較的大きな異物の除去をより効率的に行うことができる。 (Height adjustment mechanism)
The front
表側クリーニングローラユニット5は、筐体50に収容されたクリーニングローラ51により対象物Sの表側表面S1の異物を除去するユニットである。この表側クリーニングローラユニット5の筐体50には、クリーニングローラ51の他に、ブラシローラ52、回収ローラ53、ブレード54及び異物回収部55が主に収容され、全体がユニット化されている。表側クリーニングローラユニット5は、ミリサイズよりも小さい微細な異物の除去に好適であり、表側ブラシローラユニット4よりも搬送方向下流側の隣接した位置に、ホルダ1に着脱可能に配設されている。ここで、クリーニングローラ51は、微細な異物を効果的にその表面に移動させるために、後述する対向樹脂ローラ61と共に対象物Sの両面から圧力を加えるように設定されている。従って、もしも表側クリーニングローラユニット5を表側ブラシローラユニット4の上流側に配置した場合、クリーニングローラ51が比較的大きな異物を対象物Sに押し付けて圧着し、ブラシローラ41によっても上記異物を除去しきれないおそれがある。そのため、表側クリーニングローラユニット5は、表側ブラシローラユニット4の下流側に配置することが好ましい。 [Front cleaning roller unit]
The front-side
筐体50は、クリーニングローラ51等を収容してユニット化し、ホルダ1に着脱可能とするものである。この筐体50は、表側ブラシローラユニット4と同様に、上流板、下流板、一対の側板、天板及び底板を有する。天板には、搬送幅方向に離間している一対の把持部50Aが設けられている。一対の把持部50Aは、表側クリーニングローラユニット5の着脱時に利用されるものである。底板には開口部50Bが設けられ、この開口部50Bからクリーニングローラ51の一部が突出している。下流板は、上方から下方にかけて屈曲している。なお、筐体50を構成する材料には、特に制限はなく、例えばステンレス等の金属が好適に用いられる。 (Casing)
The
クリーニングローラ51は、対象物Sの表側表面S1の異物、特に比較的微細な異物(例えばミリサイズよりも小さい異物)を除去するものであり、外周面が上記電圧印加機構により帯電した状態で搬送方向Dと略垂直かつ搬送面と略平行な回転軸で搬送方向Dに対して順回り方向(図2の反時計回り方向)に回転駆動される。このクリーニングローラ51は、図10に示すように、芯棒51Aと、この芯棒51Aの外周面に形成される内層部51Bと、この内層部51Bの外周面を被覆する外層部51Cとを有する弾性ローラである。 (Cleaning roller)
The cleaning
ブラシローラ52は、クリーニングローラ51が対象物Sから除去した異物を回収する表側の第2のブラシローラであり、クリーニングローラ51の直上においてクリーニングローラ51に略平行かつ当接するよう配設されている。このブラシローラ52は、帯電状態で、外部駆動源からの動力により、クリーニングローラ51に対して逆回り方向(図2の反時計回り方向)に回転駆動される。このようなブラシローラ52は、円柱状の芯棒52Aと、この芯棒52Aの外周面に接着層52Bを介して植設される複数のブラシ毛52Cとを有し(図3参照)、その詳細は表側ブラシローラユニット4のブラシローラ41の芯棒41A及びブラシ毛41Cと同様であるため、重複説明は省略する。また、ブラシローラ52への印加電圧(芯棒52Aに印加される電圧)は、クリーニングローラ51への印加電圧に対して同極性かつ絶対値が高くなるようにする。具体的なブラシローラ52への印加電圧の下限としては、表側ブラシローラユニット4のブラシローラ41と同様に、-800Vが好ましく、-600Vがより好ましい。一方、上記印加電圧の上限としては、-200Vが好ましく、-300Vがより好ましい。 (Brush roller)
The
回収ローラ53は、ブラシローラ52がクリーニングローラ51から回収した異物を回収する表側の第2の回収ローラであり、ブラシローラ52の上方においてブラシローラ52と略平行かつブラシ毛52Cと当接するように配設される。この回収ローラ53は、上記電圧印加機構により帯電した状態で、外部駆動源からの動力によりブラシローラ52に対して逆回り方向(図2の反時計回り方向)に回転駆動される。回収ローラ53の詳細は、上述の表側ブラシローラユニット4の回収ローラ42と同様とすることができるため、重複説明は省略する。 (Recovery roller)
The
ブレード54は、回収ローラ53から異物を掻き取る第2のブレードである。このブレード54及びこれを支持するブレード支持部53aの詳細は、上述の表側ブラシローラユニット4のブレード43及びブレード支持部43aと同様である。 (blade)
The
異物回収部55は、ブレード54によって回収ローラ53から掻き落とされた異物を回収及び収容するものである。この異物回収部55は、ブレード54の先端部の下方かつ、ブラシローラ52よりも搬送方向下流側に配設されている。そして、異物回収物55は、筐体50の下流板の開口部に嵌め込まれ、この開口部を介して搬送方向下流側に引き出し可能とされている。異物回収部55の下流側には把持部55Aが設けられており、この把持部55Aを利用して異物回収部55の出し入れが容易化されている。また、異物回収部55は搬送方向下流側に引き出すことが可能であるため、クリーニングローラユニット5をホルダ1に固定した状態のまま引き出して異物を回収することができるという点で利便性に優れる。 (Foreign matter recovery unit)
The foreign
表側クリーニングローラユニット5は、高さ調節機構により高さ調節が可能に構成されているとよい。このように、高さ調節機構で表側クリーニングローラユニット5の高さを調節することで、対象物Sに対するクリーニングローラ51の押圧力(ニップ幅)を調節し、その結果、微細な異物の除去を効率良く行うことができる。 (Height adjustment mechanism)
The front
裏側対向ローラユニット6は、表側ブラシローラユニット4のブラシローラ41及び表側クリーニングローラユニット5のクリーニングローラ51と共に対象物Sの搬送経路を規定するものであり、対象物Sの裏側(搬送経路の下方)に配設されている。この裏側対向ローラユニット6は、裏側の第1の対向ローラである対向金属ローラ60及び裏側の第2の対向ローラである対向樹脂ローラ61からなる一対の対向ローラと補助ローラ62とを主に備えている。裏側対向ローラユニット6は、メンテナンス性の観点から、ホルダ1に着脱可能に装着されていることが好ましい。 [Back side roller unit]
The back side opposing
対向金属ローラ60は、対象物Sを介して表側ブラシローラユニット4のブラシローラ41に対向し、かつ対象物Sに当接するようにブラシローラ41の直下に配設されている第1の裏側対向ローラである。この対向金属ローラ60は、対象物Sの搬送方向Dに対して順回り方向(図2の時計回り方向)に回転駆動されている。すなわち、対向金属ローラ60は、表側ブラシローラユニット4のブラシローラ41に対して逆回り方向に回転駆動されている。対向金属ローラ60の詳細は、表側ブラシローラユニット4の回収ローラ42と同様である。但し、対向金属ローラ60は上記電圧印加機構により電気的に接地され、これにより、ブラシローラ41が帯電されている場合に異物の除去に好適な電界を生じさせることができる。 (Opposing metal roller)
The opposed
対向樹脂ローラ61は、対象物Sを介して表側クリーニングローラユニット5のクリーニングローラ51に対向し、対象物Sに当接するようにクリーニングローラ51の直下に配設されている。この対向樹脂ローラ61は、対象物Sの搬送方向Dに対して順回り方向(図2の時計回り方向)に回転駆動されている。すなわち、対向樹脂ローラ61は、クリーニングローラ51に対して順回り方向に回転駆動されている。対向樹脂ローラ61の詳細は、表側クリーニングローラユニット5のクリーニングローラ51とほぼ同様である。但し、対向樹脂ローラ61の外層部の形成においては、微小突起の形成のために用いる微小突起の素となる粒子として、酸化チタン、チタン酸バリウム等を配合することが好ましい。上記粒子として酸化チタン、チタン酸バリウム等を用いることで、微小突起の密度が粗くなり、対象物Sを適切に搬送することができるようになる。また、対向樹脂ローラ61は上記電圧印加機構により電気的に接地されており、帯電されたクリーニングローラ51との間に異物の除去に好適な電界を生じさせることができる。 (Opposite resin roller)
The counter resin roller 61 is disposed directly below the cleaning
補助ローラ62は、上流側外部搬送機構2Aによりクリーニング機構3に搬入される対象物Sの移動を表側ブラシローラユニット4の搬送ローラ45と共にガイドするものである。この補助ローラ62の層構造等は、対向樹脂ローラ61と同様とすることができる。 (Auxiliary roller)
The auxiliary roller 62 guides the movement of the object S carried into the
裏側クリーニング機構3Bは、対象物Sの裏側表面S2の異物を除去するものである。この裏側クリーニング機構3Bは、概ね表側クリーニング機構3Aの上下を反転させた構成とされており、裏側ブラシローラユニット7、裏側クリーニングローラユニット8及び表側対向ローラユニット9を有している。 <Backside cleaning mechanism>
The back
裏側ブラシローラユニット7は、ブラシローラ71により対象物Sの裏側表面S2の異物を除去するものであり、対象物Sの裏側(搬送経路の下方)において表側クリーニング機構3Aの裏側対向ローラユニット6よりも搬送方向下流側に隣接して配設されている。この裏側ブラシローラユニット7は、ブラシローラ71、回収ローラ72及びブレード73を主に備えており、その基本構成は上述の表側クリーニング機構3Aの表側ブラシローラユニット4と同様である。但し、裏側ブラシローラユニット7は、表側ブラシローラユニット4と比較し、搬送ローラ45及び異物回収部44に相当する部材が設けられていない点等で異なっている。なお、裏側ブラシローラユニット7に搬送ローラ45に相当する部材が設けられていない理由は、ブラシローラ71が搬送方向Dに対して逆回り方向に回転駆動されているものの、ブラシローラ71よりも搬送方向上流に配置されているクリーニングローラ51と対向樹脂ローラ61とが、ブラシローラ71の下方への進入のために適切な推進力を対象物Sに与えているからである。また、裏側ブラシローラユニット7は、異物回収部44に相当する部材が設けられていないが、その底部が開口していることによりユニット外に異物を排出することができる。裏側ブラシローラユニット7から排出された異物は、後述する裏側クリーニングローラユニット8から排出された異物と共に、ホルダ1の最下部に設けられた異物回収部13により回収される。裏側ブラシローラユニット7は、メンテナンス性の観点から、ホルダ1に着脱可能に装着されていることが好ましい。 [Back side brush roller unit]
The back-side
ブラシローラ71は、上記電圧印加機構により帯電した状態で対象物Sの裏側表面S2に当接し、対象物Sの搬送方向Dに対して逆回り方向(図2の反時計回り方向)に回転駆動されることで、対象物Sの裏側表面S2におけるミリサイズの比較的大きな異物を除去する裏側の第1のブラシローラである。このようなブラシローラ71は、円柱状の芯棒71Aと、この芯棒71Aの外周面に接着層71Bを介して植設される複数のブラシ毛71Cとを有し(図3参照)、その詳細は表側ブラシローラユニット4のブラシローラ41の芯棒41A及びブラシ毛41Cと同様であるため重複説明は省略する。また、ブラシローラ71への印加電圧(芯棒71Aに印加される電圧)は、後述の裏側クリーニングローラユニット8のクリーニングローラ80への印加電圧に対して同極性かつ絶対値が高くなるようにする。具体的なブラシローラ71への印加電圧の下限としては、表側ブラシローラユニット4のブラシローラ41と同様に、-800Vが好ましく、-600Vがより好ましい。一方、上記印加電圧の上限としては、-200Vが好ましく、-300Vがより好ましい。 (Brush roller)
The
回収ローラ72は、ブラシローラ71が対象物Sの裏側表面S2から除去した異物を回収する裏側の第1の回収ローラであり、ブラシローラ71よりも下方においてブラシローラ71と略平行かつブラシ毛71Cと当接して配設される。この回収ローラ72は、上記電圧印加機構により帯電した状態で外部駆動源からの動力によりブラシローラ71に対して逆回り方向(図2の反時計回り方向)に回転駆動される。回収ローラ72の詳細は、上述の表側ブラシローラユニット4の回収ローラ42と同様とすることができるため、重複説明は省略する。 (Recovery roller)
The
ブレード73は、回収ローラ72から異物を掻き取る第3のブレードである。このブレード73及びこれを支持するブレード支持部73aの詳細は、上述の表側クリーニング機構3Aの表側ブラシローラユニット4のブレード43及びブレード支持部43aと同様である。 (blade)
The
裏側クリーニングローラユニット8は、クリーニングローラ80により対象物Sの裏側表面S2の微細な異物を除去するものであり、対象物Sの裏側(搬送経路の下方)において裏側ブラシローラユニット7よりも搬送方向下流側に隣接して配設されている。この裏側クリーニングローラユニット8は、クリーニングローラ80、ブラシローラ81、回収ローラ82、ブレード83、及び搬送ローラ85を主に備えており、その基本構成は上述の表側クリーニング機構3Aの表側クリーニングローラユニット5と同様である。但し、裏側ブラシローラユニット7は、表側ブラシローラユニット4と比較し、搬送ローラ85を有する点や、異物回収部55に相当する部材が設けられていない点等が異なる。裏側ブラシローラユニット7は、異物回収部55に相当する部材が設けられていない代わりに、その底部が開口し、ユニット外に異物を排出可能とされている。裏側クリーニングローラユニット8から排出された異物は、裏側ブラシローラユニット7から排出された異物と共に、ホルダ1の最下部に設けられた異物回収部13により回収される。裏側クリーニングローラユニット8は、メンテナンス性の観点から、ホルダ1に着脱可能に装着されていることが好ましい。 [Backside cleaning roller unit]
The back side cleaning
クリーニングローラ80は、対象物Sの裏側表面S2の微細な異物を除去する裏側クリーニングローラであり、対象物Sの裏側(搬送経路の下方)に配設されている。このクリーニングローラ80は、外周面が上記電圧印加機構により帯電した状態で搬送方向Dと略垂直かつ搬送面と略平行な回転軸で搬送方向Dに対して順回り方向(図2の時計回り方向)に回転駆動される。クリーニングローラ80の詳細は、上述の表側クリーニングローラユニット5のクリーニングローラ51と同様とすることができるため、重複説明は省略する。 (Cleaning roller)
The cleaning
ブラシローラ81は、クリーニングローラ80が対象物Sの裏側表面S2から除去した微細な異物を回収する裏側の第2のブラシローラであり、クリーニングローラ80に当接してクリーニングローラ80の下方に配設されている。このブラシローラ81は、上記電圧印加機構により帯電した状態で搬送方向Dと略垂直かつ搬送面と略平行な回転軸でクリーニングローラ80に対して逆回り方向(図2の時計回り方向)に回転駆動される。このブラシローラ81は、上述の表側ブラシローラユニット4のブラシローラ41と同様に、芯棒81Aに接着層81Bを介して複数のブラシ毛81Cを植設したものであり、その詳細は表側ブラシローラユニット4のブラシローラ41と同様である。 (Brush roller)
The
回収ローラ82は、ブラシローラ81がクリーニングローラ80から回収した微細な異物を回収する裏側の第2の回収ローラであり、ブラシローラ81の下方においてブラシローラ81と略平行かつブラシ毛81Cと当接して配設される。この回収ローラ82は、上記電圧印加機構により帯電した状態で外部駆動源からの動力によりブラシローラ81に対して逆回り方向(図2の時計回り方向)に回転駆動される。回収ローラ82の詳細は、上述の表側ブラシローラユニット4の回収ローラ42と同様とすることができるため、重複説明は省略する。 (Recovery roller)
The
ブレード83は、回収ローラ81から異物を掻き取る第4のブレードである。このブレード83及びこれを支持するブレード支持部83aの詳細は、上述の表側クリーニング機構3Aの表側ブラシローラユニット4のブレード43及びブレード支持部43aと同様である。 (blade)
The
搬送ローラ85は、対象物Sの搬送をガイドするものであり、クリーニングローラ800よりも搬送方向下流側に配設されている。この搬送ローラ85としては、対向樹脂ローラ61と同様のものが好適に用いられる。 (Conveyance roller)
The
表側対向ローラユニット9は、裏側ブラシローラユニット7のブラシローラ71及び裏側クリーニングローラユニット8のクリーニングローラ80と共に対象物Sの搬送経路を規定するものであり、対象物Sの表側(搬送経路の上方)に配設されている。この表側対向ローラユニット9は、筐体90と、第1の表側対向ローラである対向金属ローラ91と、第2の表側対向ローラである対向樹脂ローラ92とを主に備えており、ホルダ1に着脱可能に配設されている。当該クリーニング装置は、工場等の地面の基台に対して固定設置される装置本体に、表側対向ローラユニット9が着脱可能に配設される。このように表側対向ローラユニット9がホルダ1に着脱可能に配設されることで、表側対向ローラユニット9をホルダ1から容易に取り外し、裏側ブラシローラユニット7のブラシローラ71及び裏側クリーニングローラユニット8のクリーニングローラ80を露出させることができる。そのため、ブラシローラ71やクリーニングローラ80の交換や洗浄を容易に行えることから、メンテナンス性に優れる。加えて、筐体90に収容される対向金属ローラ91及び対向樹脂ローラ92に関しても、ホルダ1に組み込み固定する場合に比べて、メンテナンスが容易となる。 [Front side facing roller unit]
The front-side
筐体90は、対向金属ローラ91及び対向樹脂ローラ92を収容してユニット化し、ホルダ1に着脱可能とするものである。この筐体90の天板には、搬送方向Dに垂直な水平方向に離間して一対の把持部90Aが設けられている。一対の把持部90Aは、表側対向ローラユニット9の着脱時に利用されるものである。筐体90は、底板に開口部90Bが設けられており、この開口部90Bから対向金属ローラ91や対向樹脂ローラ92の一部が突出している。なお、筐体90を構成する材料には、特に制限はなく、例えばステンレス等の金属が好適に用いられる。 (Casing)
The
対向金属ローラ91は、対象物Sを介して裏側ブラシローラユニット7のブラシローラ71に対向し、かつ対象物Sに当接するようにブラシローラ71の直上に配設されている。この対向金属ローラ91は、回転駆動されるものであり、裏側ブラシローラユニット7のブラシローラ71に対して逆回り方向(図2の反時計回り方向)に回転する。対向金属ローラ91の詳細は、表側ブラシローラユニット4の回収ローラ42と同様である。但し、対向金属ローラ91は上記電圧印加機構により電気的に接地されており、ブラシローラ71との間に異物の除去に好適な電界を生じさせることができる。 (Opposing metal roller)
The opposing
対向樹脂ローラ92は、対象物Sを介して裏側クリーニングローラユニット8のクリーニングローラ80に対向し、かつ対象物Sに当接するようにクリーニングローラ80の直上に配設されている。この対向樹脂ローラ92は、回転駆動されるものであり、クリーニングローラ80に対して順回り方向(図2の反時計回り方向)に回転する。対向樹脂ローラ92の詳細は、表側対向ローラユニット6の対向樹脂ローラ61と同様である。但し、対向樹脂ローラ92は上記電圧印加機構により電気的に接地されており、クリーニングローラ80との間に異物の除去に好適な電界を生じさせることができる。 (Opposite resin roller)
The
上述のように、回収ローラ42,53,72,82と、クリーニングローラ51,80と、ブラシローラ52,81の外周面とは帯電させられ、ブラシローラ41,71も帯電させることが好ましい。また、補助ローラ62、対向金属ローラ60,91、対向樹脂ローラ61,92は電気的に接地させることが好ましい。これらのローラを帯電又は電気的に接地(0Vに固定することも含む)させるための帯電回路は、既知の回路を用いることができる。この帯電回路は、電位差が異なる2つのローラが、長尺状の導電性異物などを介して短絡した場合の安全対策として、例えば500μAの電流を閾値とし、閾値以上の電流が流れた場合に回路を遮断する機構(例えばヒューズ等)を備えている。 <Charging circuit>
As described above, the
以下、各ユニットを外部電源やグラウンド等と電気的に接続するために用いられるユニット及びホルダ1の端子の一例について説明する。図11には、各ユニットの搬送幅方向の一方又は両方の端部に配設されるユニット側端子110を示す。図12には、ホルダ1の内面に配設されるホルダ側端子120を示す。なお、当該クリーニング装置は、全ユニットがこの接続構造によって外部電源等と電気的に接続されることが好ましいが、一部又は全部のユニットが従来公知の接続構造によって外部電源等と電気的に接続されていてもよい。 [Unit and holder terminals]
Hereinafter, an example of a unit used for electrically connecting each unit to an external power source, a ground, or the like and a terminal of the
各ユニットには、通常各ローラの一方の端部付近に電圧印加機構(電気的に接地させる機構を含む)が設けられると共に、上述のユニット側端子110及び上記電圧印加機構の間が配線により電気的に接続される。外部電源等から各ユニットに供給される電圧は、上述のユニット側端子110、上記配線及び上記電圧印加機構を介して各ローラに供給される。この場合、各ローラを駆動させるための歯車等の駆動機構は、絶縁材料により形成される部材を用いた上で、各ローラの他方の端部付近に設けるとよい。図13には、上記電圧印加機構の一例として、ローラ130の一方の端面に設けられた円錐状の窪み130aと、半球状の先端部を有し、この先端部がローラ130の円錐状の窪み130aの内周面に当接している筐体側電極131と、この筐体側電極131に連結され、筐体側電極131をローラ130側に与圧する金属製の板バネ132とを備える電圧印加機構を示す。ローラ130の中心軸及び円錐状の窪みの頂点と、筐体側電極131の先端部の半球の中心とは、搬送幅方向視において略一致する。なお、ローラ130及び筐体側電極131の間は、導電性グリースによるグリース潤滑下としてもよい。 [Voltage application mechanism to roller]
Each unit is usually provided with a voltage applying mechanism (including an electrically grounding mechanism) near one end of each roller, and the unit-
図1及び図2のクリーニング装置を用いて対象物Sから異物を除去するクリーニング方法について説明する。当該クリーニング方法は、搬送される対象物Sに、搬送方向Dと略垂直かつ搬送面と略平行な回転軸で搬送方向Dと逆回り方向に回転駆動されるブラシローラ41を当接させる工程と、ブラシローラ41と当接した後の対象物Sに、搬送方向Dと略垂直かつ搬送面と略平行な回転軸で回転するクリーニングローラ51を当接させる工程とを有する。さらに、当該クリーニング方法は、クリーニングローラ51に当接させた後の対象物Sに、搬送方向Dと略垂直かつ搬送面と略平行な回転軸で搬送方向Dと逆回り方向に回転駆動されるブラシローラ71を当接させる工程と、ブラシローラ71と当接した後の対象物Sに、搬送方向と略垂直かつ搬送面と略平行な回転軸で回転するクリーニングローラ80を接触させる工程を有する。当該クリーニング方法では、表側ブラシローラユニット4のブラシローラ41に対して、表側クリーニングローラユニット5のクリーニングローラ51と同極性かつ絶対値が高い電圧を印加する。また、裏側ブラシローラユニット7のブラシローラ71に対しも同様に、裏側クリーニングローラユニット8のクリーニングローラ80と同極性かつ絶対値が高い電圧を印加する。このように、ブラシローラ41,71に対しクリーニングローラ51,80よりも同極性かつ絶対値の高い電圧を印加することで、ブラシローラ41,71によりミリレベルの比較的大きな異物を除去できると共にクリーニングローラ51,80により微細な異物を除去できる。このクリーニング方法における各ローラへの印加電圧、回転等の各種条件については、上述の当該クリーニング装置と同様とできるため重複した説明を省略する。 [Cleaning method]
A cleaning method for removing foreign matter from the object S using the cleaning device of FIGS. 1 and 2 will be described. The cleaning method includes a step of bringing a
本発明は上記実施形態に限定されるものではなく、上記態様の他、種々の変更、改良を施した態様で実施することができる。特に、図1及び図2は、当該クリーニング装置の一例を示したものに過ぎず、例えば各ローラの層構造は図2と異なっていてもよい。 [Other Embodiments]
The present invention is not limited to the above-described embodiment, and can be implemented in a mode in which various changes and improvements are made in addition to the above-described mode. In particular, FIGS. 1 and 2 show only an example of the cleaning device. For example, the layer structure of each roller may be different from that in FIG.
摩擦帯電性の観点から異物除去に適したブラシ毛の材質を選定することを目的とし、ワーク(対象物)及びブラシ毛の帯電性を評価し帯電列を決定した。 <Optimization of brush roller>
From the viewpoint of triboelectric chargeability, the charge train was determined by evaluating the chargeability of the workpiece (object) and the brush hair, with the objective of selecting a material for the brush hair suitable for removing foreign matter.
ブラシローラへの印加電圧の最適化は、図15(A)に示すようにゴミを付着させた対象物に、所定の電圧を印加したブラシローラを当接させ、この所定電圧を印加している状態を10秒間保持した。次に、図15(B)に示すように対象物からブラシローラを引き離し、ゴミの除去により形成された帯状領域の幅をゴミの吸着幅(電界作用幅)として評価した。 <Optimization of the voltage applied to the brush roller>
The optimization of the voltage applied to the brush roller is performed by bringing a brush roller to which a predetermined voltage is applied into contact with an object to which dust is attached as shown in FIG. 15A and applying the predetermined voltage. The state was held for 10 seconds. Next, as shown in FIG. 15B, the brush roller was pulled away from the object, and the width of the band-like region formed by removing the dust was evaluated as the dust adsorption width (field action width).
図1及び図2に示すクリーニング装置を用い、表側ブラシローラユニット4のブラシローラ41の周速度と対象物への圧接量とを変量させながら対象物の異物除去を行った。これにより、ブラシローラの周速度、及びブラシローラの対象物への圧接量が異物除去に与える影響について検討した。 <Examination of peripheral speed and pressure contact amount of brush>
Using the cleaning device shown in FIGS. 1 and 2, the foreign matter was removed from the object while varying the peripheral speed of the
当該クリーニング装置のクリーニング性能を評価した。具体的には、種々の異物と対象物との組み合わせについて、図1及び図2に示すクリーニング装置を用い、各ローラの周速度及び印加電圧を表2の通りとし、クリーニング前後の対象物表面を撮像することで評価した。 <Confirmation of cleaning performance>
The cleaning performance of the cleaning device was evaluated. Specifically, for the combinations of various foreign objects and objects, the cleaning device shown in FIGS. 1 and 2 is used, the peripheral speed and applied voltage of each roller are set as shown in Table 2, and the surface of the object before and after cleaning is determined. Evaluation was made by imaging.
2A 上流側外部搬送機構
2B 下流側外部搬送機構
3 クリーニング機構
4 表側ブラシローラユニット
41 ブラシローラ
42 回収ローラ
43 ブレード
45 搬送ローラ
5 表側クリーニングローラユニット
51 クリーニングローラ
51A 芯棒
51B 内層部
51C 外層部
52 ブラシローラ
53 回収ローラ
54 ブレード
6 裏側対向ローラユニット
60 対向金属ローラ
61 対向樹脂ローラ
62 補助ローラ
7 裏側ブラシローラユニット
71 ブラシローラ
72 回収ローラ
73 ブレード
8 裏側クリーニングローラユニット
80 クリーニングローラ
81 ブラシローラ
81A 芯棒
81B 接着層
81C ブラシ毛
82 回収ローラ
83 ブレード
9 表側対向ローラユニット
91 対向金属ローラ
92 対向樹脂ローラ
101 固定部材
102 スライド部材
103 天板
104 カバー
110 ユニット側端子
111 ユニット側電極板
112 カバー
120 ホルダ側端子
121 土台部
122 ホルダ側電極板
123 囲繞部
130 ローラ
130a 窪み
131 筐体側電極
132 板バネ
S 対象物
S1 表側表面
S2 裏側表面
D 搬送方向
DESCRIPTION OF
Claims (12)
- 板状又はフィルム状の対象物を搬送しつつ表面の異物を除去するクリーニング装置であって、
搬送方向と略垂直かつ搬送面と略平行な回転軸で回転駆動される第1のブラシローラと、
搬送方向と略垂直かつ搬送面と略平行な回転軸で回転駆動されるクリーニングローラと、
上記対象物を介して上記第1のブラシローラ及びクリーニングローラと対向し、共に上記対象物の搬送方向に対し順回り方向に回転駆動される一対の対向ローラと、
上記第1のブラシローラ及び上記クリーニングローラに電圧を印加する1又は複数の電圧印加機構と
を備え、
上記1又は複数の電圧印加機構が、上記第1のブラシローラに対し、上記クリーニングローラと同極性かつ絶対値において高い電圧を印加することを特徴とするクリーニング装置。 A cleaning device that removes foreign matter on the surface while conveying a plate-like or film-like object,
A first brush roller that is rotationally driven by a rotation axis that is substantially perpendicular to the conveyance direction and substantially parallel to the conveyance surface;
A cleaning roller that is rotationally driven by a rotation axis that is substantially perpendicular to the conveyance direction and substantially parallel to the conveyance surface;
A pair of opposed rollers that face the first brush roller and the cleaning roller through the object and are both driven to rotate in a forward direction with respect to the conveying direction of the object;
One or a plurality of voltage application mechanisms for applying a voltage to the first brush roller and the cleaning roller,
The cleaning apparatus, wherein the one or more voltage application mechanisms apply a voltage having the same polarity and absolute value as the cleaning roller to the first brush roller. - 上記第1のブラシローラが上記対象物の搬送方向に対し逆回り方向に回転駆動され、上記クリーニングローラが上記対象物の搬送方向に対し順回り方向に回転駆動される請求項1に記載のクリーニング装置。 2. The cleaning according to claim 1, wherein the first brush roller is rotationally driven in a reverse direction with respect to the conveyance direction of the object, and the cleaning roller is rotationally driven in a forward direction with respect to the conveyance direction of the object. apparatus.
- 上記1又は複数の電圧印加機構が、上記第1のブラシローラに-800V以上-200V未満の電圧を印加し、上記クリーニングローラに-200V以上0V未満の電圧を印加する請求項1又は請求項2に記載のクリーニング装置。 The one or more voltage application mechanisms apply a voltage of −800 V or more and less than −200 V to the first brush roller, and apply a voltage of −200 V or more and less than 0 V to the cleaning roller. A cleaning device according to claim 1.
- 上記1又は複数の電圧印加機構が、上記第1のブラシローラ及び上記クリーニングローラに絶対値において100V以上500V以下の電位差を与える請求項1、請求項2又は請求項3に記載のクリーニング装置。 4. The cleaning apparatus according to claim 1, wherein the one or more voltage application mechanisms give a potential difference of 100 V or more and 500 V or less in absolute value to the first brush roller and the cleaning roller.
- 上記一対の対向ローラの電位が所定の固定電位である請求項1から請求項4のいずれか1項に記載のクリーニング装置。 The cleaning device according to any one of claims 1 to 4, wherein a potential of the pair of opposed rollers is a predetermined fixed potential.
- 上記第1のブラシローラによって上記対象物から除去した異物を回収する第1の回収ローラを備え、
上記1又は複数の電圧印加機構が、上記第1の回収ローラに対し、上記第1のブラシローラと同極性かつ絶対値において高い電圧を印加する請求項1から請求項5のいずれか1項に記載のクリーニング装置。 A first recovery roller for recovering foreign matter removed from the object by the first brush roller;
6. The device according to claim 1, wherein the one or more voltage application mechanisms apply a high voltage in the same polarity and absolute value as the first brush roller to the first recovery roller. The cleaning device described. - 上記1又は複数の電圧印加機構が、上記第1の回収ローラ及び上記第1のブラシローラに絶対値において200V以上600V以下の電位差を与える請求項6に記載のクリーニング装置。 The cleaning device according to claim 6, wherein the one or more voltage application mechanisms give a potential difference of 200 V or more and 600 V or less in absolute value to the first recovery roller and the first brush roller.
- 上記第1の回収ローラの回転方向が、上記第1のブラシローラの回転方向に対し逆回り方向であり、
上記第1の回収ローラの回転速度が、上記第1のブラシローラの回転速度に対し1.0倍以上1.5倍以下である請求項6又は請求項7に記載のクリーニング装置。 The rotation direction of the first recovery roller is a direction opposite to the rotation direction of the first brush roller;
The cleaning device according to claim 6 or 7, wherein a rotation speed of the first recovery roller is 1.0 to 1.5 times a rotation speed of the first brush roller. - 上記クリーニングローラにより上記対象物から除去した異物を回収する第2のブラシローラをさらに備え、
上記第2のブラシローラが、上記クリーニングローラに対し逆回り方向に回転駆動され、その回転速度が、上記クリーニングローラの回転速度に対し1.0倍以上1.5倍以下である請求項1から請求項8のいずれか1項に記載のクリーニング装置。 A second brush roller for collecting the foreign matter removed from the object by the cleaning roller;
The second brush roller is driven to rotate in the reverse direction with respect to the cleaning roller, and the rotation speed thereof is 1.0 to 1.5 times the rotation speed of the cleaning roller. The cleaning device according to claim 8. - 上記第2のブラシローラにより上記クリーニングローラから除去した異物を回収する第2の回収ローラをさらに備え、
上記第2の回収ローラが、上記第2のブラシローラに対し逆回り方向に回転駆動され、その回転速度が、上記第2のブラシローラの回転速度に対し1.0倍以上1.5倍以下である請求項9に記載のクリーニング装置。 A second recovery roller for recovering foreign matter removed from the cleaning roller by the second brush roller;
The second collection roller is rotationally driven in the reverse direction with respect to the second brush roller, and the rotational speed thereof is 1.0 to 1.5 times the rotational speed of the second brush roller. The cleaning device according to claim 9. - 板状又はフィルム状の対象物を搬送しつつ表面の異物を除去するクリーニング方法であって、
搬送される上記対象物に、搬送方向と略垂直かつ搬送面と略平行な回転軸で回転駆動されるブラシローラを当接させる工程と、
上記対象物に、搬送方向と略垂直かつ搬送面と略平行な回転軸で回転駆動されるクリーニングローラを当接させる工程と
を備え、
上記クリーニングローラに電圧を印加すると共に、上記ブラシローラに上記クリーニングローラへの印加電圧と同極性かつ絶対値において高い電圧を印加することを特徴とするクリーニング方法。 A cleaning method for removing foreign matter on the surface while conveying a plate-like or film-like object,
Contacting the object to be conveyed with a brush roller that is rotationally driven by a rotation axis that is substantially perpendicular to the conveyance direction and substantially parallel to the conveyance surface;
A step of contacting the object with a cleaning roller that is rotationally driven by a rotation shaft that is substantially perpendicular to the conveyance direction and substantially parallel to the conveyance surface;
A cleaning method, wherein a voltage is applied to the cleaning roller, and a voltage having the same polarity and high absolute value as the applied voltage to the cleaning roller is applied to the brush roller. - 上記対象物にブラシローラを当接させる工程において、上記ブラシローラの上記対象物への食い込み量を所定の値に設定し、かつ
上記対象物にクリーニングローラを当接させる工程において、上記クリーニングローラが上記対象物に所定の圧力で押圧されるよう設定する請求項11に記載のクリーニング方法。 In the step of bringing the brush roller into contact with the object, the amount of biting of the brush roller into the object is set to a predetermined value, and in the step of bringing the cleaning roller into contact with the object, the cleaning roller The cleaning method according to claim 11, wherein the cleaning is set so that the object is pressed with a predetermined pressure.
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