WO2011158504A1

WO2011158504A1 - Cleaning system

Info

Publication number: WO2011158504A1
Application number: PCT/JP2011/003413
Authority: WO
Inventors: 雅史太田; 幹夫堤; 由佳村川
Original assignee: バンドー化学株式会社
Priority date: 2010-06-17
Filing date: 2011-06-15
Publication date: 2011-12-22
Also published as: CN102933323B; TWI406716B; TW201210709A; KR101271040B1; JP5015365B2; EP2583761A4; JPWO2011158504A1; EP2583761A1; EP2583761B1; CN102933323A; KR20130029392A

Abstract

Provided is a system in which the adsorption of foreign matter by a cleaning roller can be continued for a prolonged period of time without performing maintenance operations on the cleaning roller. The disclosed cleaning roller (11) moves relatively with respect to an object to be cleaned (S) while rotating and contacting the surface of the object to be cleaned (S), and removes foreign matter, such as dust and dirt, adhering to the surface of the object to be cleaned (S) by utilizing electrostatic force. A transferring roller (21) rotates while contacting the surface of the cleaning roller (11). The cleaning roller (11) is grounded via a voltage stabilizing circuit (12), and can have the roller surface charged stably with an electric charge for carrying out adsorption with said electrostatic force. The transferring roller (21) can have the surface thereof charged with an electric charge for adsorbing foreign matter adhering to the surface of the cleaning roller (11) by utilizing electrostatic force, and the transferring roller is connected to an external power source (31) such that the electrification voltage for the adsorption of said foreign matter with said electrostatic force is kept constant.

Description

Cleaning system

The present invention relates to a cleaning system for removing foreign matters (dust etc.) adhering to the surface of a material to be cleaned by electrostatic force. In particular, it is suitable when the material to be cleaned is a thin object (for example, a glass substrate, a printed circuit board (PCB, PCBA, etc.), a film, a sheet, a plastic plate, etc. with relatively high surface smoothness).

Conventionally, an adhesive roller has been used as a cleaning system for removing foreign substances such as dust adhering to the surface of thin materials to be cleaned such as flat panel display (FPD) glass substrates, laminated films, and printed circuit boards. The thing which removed the said foreign material using the adhesive force of this is known (for example, refer patent document 1).

Such an adhesive roller cannot remove minute foreign matters (for example, foreign matters having an average diameter of 1 μm or less) and completely removes foreign matters such as dust adhered to the surface (adhesive layer) of the adhesive roller. It is difficult to do and inferior to maintainability. Further, since the adhesive roller is pressed to the material to be cleaned to some extent to remove the foreign matter, if the material to be cleaned is, for example, a film, not only the foreign matter but also the film There is a risk of sticking to.

Therefore, when removing foreign matter such as dust from the material to be cleaned, the inventor charges the surface of the cleaning roller with an applied voltage so that the foreign matter can be adsorbed by electrostatic force. A patent application has been filed separately based on the fact that the foreign matter can be removed using electrostatic force (see Japanese Patent Application No. 2008-271797).

However, in the above-mentioned, foreign substances removed from the surface of the material to be cleaned using the electrostatic force by the cleaning roller are sequentially accumulated on the roller surface (outer peripheral surface) of the cleaning roller. It is necessary to periodically perform maintenance work to remove foreign matters from the roller surface.

By the way, in the cleaning system using the adhesive force of the adhesive roller, a foreign matter is transferred from the cleaning roller to the transfer roller side by contacting a transfer roller (adhesive roller) having an adhesive force stronger than that of the cleaning roller (adhesive roller). Mechanisms are commonly used.

Therefore, it is conceivable to use the transfer roller having the strong adhesive force in the cleaning system described above.

Patent Document 1: Japanese Patent Application Laid-Open No. 2008-168188

However, when the transfer roller having such strong adhesive force is used, it is impossible to stably charge the charge that can adsorb foreign matter to the surface of the cleaning roller by electrostatic force. Therefore, it is difficult to continue the foreign matter suction operation by the cleaning roller for a long time without performing maintenance work on the cleaning roller.

An object of the present invention is to provide a cleaning system capable of continuing a foreign matter adsorption operation by a cleaning roller over a long period of time without performing maintenance work on the cleaning roller.

Also, when adsorbing foreign matter by electrostatic force (Coulomb force), the more the charge held on the roller surface, the stronger the adsorbing force, but if the roller surface becomes excessively charged, the cleaning roller and the counterpart material Spark discharge may occur between the material to be cleaned and unevenness may occur in the charged state of the roller surface and the material to be cleaned. Foreign matter may be attracted to the unevenness and stable cleaning performance may not be exhibited. In addition, there is a risk of damaging the counterpart material by spark discharge. Furthermore, when the material to be cleaned is an electronic component such as a semiconductor that is sensitive to static electricity, there is a problem of electrostatic breakdown that occurs even when electric charge is accumulated that does not lead to spark discharge.

Therefore, in addition to the above object, the present invention suppresses an increase in the charged voltage generated on the roller surface in order to adsorb foreign matter by electrostatic force, and can stabilize the charged voltage. It is also intended to provide.

The invention of claim 1 is provided with a cleaning roller that moves while rotating in contact with the surface of the material to be cleaned, and that foreign matter such as dust adhering to the surface of the material to be cleaned is subjected to electrostatic force by the cleaning roller. A cleaning system that uses and removes the cleaning roller, and a transfer roller that rotates while contacting the surface of the cleaning roller is provided for the cleaning roller, and the cleaning roller is a foreign matter that adheres to the surface of the material to be cleaned. The surface of the transfer roller can be charged with an electrostatic force to adsorb foreign matter adhering to the surface of the cleaning roller by the electrostatic force. And the cleaning roller is grounded through a voltage stabilization circuit, and the front An external power supply is directly or indirectly connected to the transfer roller, and the voltage stabilizing circuit is capable of changing a charged voltage for adsorbing the foreign matter by electrostatic force of the transfer roller. To do.

In this way, the cleaning roller can charge the surface with a charge for adsorbing foreign matter adhering on the surface of the material to be cleaned by electrostatic force. Adsorbed to the cleaning roller. Further, since the transfer roller can charge the surface with a charge for adsorbing foreign matter adhering on the surface of the cleaning roller by electrostatic force, the foreign matter adsorbed on the cleaning roller is adsorbed on the transfer roller. Therefore, it is not necessary to perform maintenance work such as periodically removing (cleaning) or periodically replacing the cleaning roller.

In addition, by changing the set voltage value of the voltage stabilization circuit connected to the cleaning roller, it is possible to prevent the charged voltage generated on the roller surface from becoming higher than necessary in order to attract foreign substances by electrostatic force. In addition, the charged voltage can be stabilized. In addition, electrostatic breakdown of electronic components such as semiconductors that are sensitive to static electricity can be prevented.

In this case, as described in claim 2, the voltage stabilization circuit switches the fixed resistor, the variable resistor, or the fixed resistor that has a plurality of fixed resistors to be used and changes the resistance value. A type resistor can be used.

In this way, by changing the resistance value of the fixed resistor, variable resistor, or switchable resistor, the voltage that can change the charged voltage of the transfer roller for attracting the foreign matter by electrostatic force can be changed. The stabilization circuit can be configured easily. Even when a fixed resistor is used, the resistance value can be changed by replacing the fixed resistor.

That is, by changing the resistance value, it is possible to change the voltage of the cleaning roller for attracting the foreign matter by electrostatic force, so even if a voltage is applied to the transfer roller from an external power source, Without changing the applied voltage, it is possible to change the attractive force of the cleaning roller with respect to the foreign matter adsorbed on the cleaning roller. For example, if the resistance value of the resistor connected to the cleaning roller is reduced as much as possible, the charge for adsorbing the foreign matter adhering to the surface of the cleaning roller by electrostatic force is reduced, and is adsorbed by the cleaning roller. It is possible to cause the cleaning roller to lose the attracting force with respect to the foreign matter. As a result, the foreign matter adsorbed on the cleaning roller is adsorbed on the transfer roller. Therefore, the maintenance work as described above becomes easy.

Therefore, as in the conventional cleaning system that uses the adhesive force of the adhesive roller, the foreign matter adhering to the roller surface of the cleaning roller is periodically removed (cleaned) or the cleaning roller to which the foreign matter is attached is removed. There is no need to perform maintenance work for periodic replacement, and a cleaning system with excellent maintainability can be obtained. In addition, since the voltage applied to the transfer roller does not need to be controlled frequently, the design of the external power supply for applying the voltage to the transfer roller can be made compact.

According to a third aspect of the present invention, the transfer roller rotates while being in contact with the surface of the cleaning roller, whereby a difference in surface characteristics between the transfer roller and the cleaning roller between the cleaning roller and the cleaning roller ( For example, it is desirable to generate a potential difference according to the charging order).

In this case, due to contact peeling due to rotation of the cleaning roller and the transfer roller, a potential difference corresponding to a difference in surface characteristics (for example, charging sequence) from the cleaning roller is generated in the transfer roller, and the surface of the material to be cleaned A charge for adsorbing foreign matter adhering to the surface by electrostatic force is charged.

Further, according to claim 4, there is provided a cleaning brush that rotates in the follower direction or in the reverse direction with respect to the transfer roller, and the metal roller so as to rotate in the follower direction or in the reverse direction with respect to the cleaning brush. It is preferable that the external power supply is connected to the metal roller so as to generate a potential difference among the transfer roller, the cleaning brush, and the metal roller.

In this way, the foreign matter is removed from the transfer roller by the cleaning brush and transferred to the metal roller by electrostatic force, and the foreign matter is more efficiently removed from the transfer roller. In particular, the potential difference between the transfer roller and the transfer roller, which is generated by an external power source connected to the metal roller, can be changed, and foreign matters can be effectively conveyed to the metal roller.

In this case, as described in claim 5, a cleaning blade is disposed in the vicinity of the surface of the metal roller to scrape foreign matter adhering to the surface of the metal roller at a tip scraping portion. Can do.

In this way, the foreign matter adsorbed by the electrostatic force on the surface of the metal roller is scraped off by the tip scraping portion of the cleaning blade, so that the foreign matter is efficiently removed from the metal roller.

Further, as described in claim 6, the foreign matter accommodation for collecting and accumulating the foreign matter scraped by the suction port of the air vacuum means capable of sucking the foreign matter by the vacuum pressure or the cleaning blade is provided in the vicinity of the cleaning blade. It is desirable that the box is arranged.

In this way, the foreign matter adsorbed by the electrostatic force on the surface of the metal roller is scraped by the tip scraping portion of the cleaning blade, and the foreign matter is sucked by negative pressure through the suction port of the air vacuum means, Or since it is collected in the foreign matter storage box, there is no possibility that the foreign matter will contaminate the periphery of the metal roller. In particular, when a foreign matter storage box is disposed, the foreign matter can be collected in the foreign matter storage box without newly providing power.

The guide roller is disposed on the opposite side of the cleaning roller with the cleaning material interposed therebetween, and the cleaning roller adheres to the surface of the cleaning material. It is also possible to increase the electric field strength for adsorbing foreign matter by electrostatic force.

In this way, the two rollers are opposed to each other with the material to be cleaned interposed therebetween, and the material to be cleaned is supported from above and below at a position where the cleaning roller and the guide roller are in contact with each other. Foreign matter on the surface of the material to be cleaned is removed.

In addition, the cleaning roller has an electric field strength for adsorbing foreign matter adhering to the surface of the material to be cleaned by electrostatic force by the guide roller, and charged foreign matter on the material to be cleaned is applied according to the applied electric field. Adsorbed to the cleaning roller and efficiently removed.

According to an eighth aspect of the present invention, the cleaning roller includes a cleaning roller that moves while rotating while being in contact with the surface of the material to be cleaned, and the foreign material such as dust adhering to the surface of the material to be cleaned is subjected to electrostatic force by the cleaning roller. A cleaning system that uses and removes the cleaning roller, and a transfer roller that rotates while contacting the surface of the cleaning roller is provided for the cleaning roller, and the cleaning roller is a foreign matter that adheres to the surface of the material to be cleaned. The surface of the transfer roller can be charged with an electrostatic force to adsorb foreign matter adhering to the surface of the cleaning roller by the electrostatic force. And an external power supply voltage is directly or indirectly applied to the transfer roller. The cleaning roller is grounded via a first voltage stabilization circuit that controls the voltage of the cleaning roller to be equal to or lower than a set voltage, and between the cleaning roller and the transfer roller, A second voltage stabilization circuit for generating a potential difference between them is provided.

In this way, as in the above-described invention, the cleaning roller can charge the surface with a charge for adsorbing foreign matter adhering to the surface of the material to be cleaned by electrostatic force. The foreign matter is adsorbed by the cleaning roller. Further, since the transfer roller can charge the surface with a charge for adsorbing foreign matter adhering on the surface of the cleaning roller by electrostatic force, the foreign matter adsorbed on the cleaning roller is adsorbed on the transfer roller. Therefore, it is not necessary to perform maintenance work such as periodically removing (cleaning) or periodically replacing the cleaning roller. Therefore, as in the conventional cleaning system that uses the adhesive force of the adhesive roller, the foreign matter adhering to the roller surface of the cleaning roller is periodically removed (cleaned) or the cleaning roller to which the foreign matter is attached is removed. There is no need to perform maintenance work for periodic replacement, and a cleaning system with excellent maintainability can be obtained.

In particular, by changing the set voltage value of the voltage stabilization circuit connected to the cleaning roller, it is possible to suppress the voltage generated on the roller surface from becoming higher than necessary in order to adsorb foreign matter by electrostatic force, The charged voltage can be stabilized. In addition, electrostatic breakdown of electronic components such as semiconductors that are sensitive to static electricity can be prevented.

In addition, by changing the set voltage value of the first voltage stabilizing circuit, it is possible to weaken the attractive force of the cleaning roller with respect to the foreign matter adsorbed on the cleaning roller. For example, if the set voltage value of the first voltage stabilizing circuit is set to a positive / negative polarity, the charge for adsorbing foreign matter adhering to the surface of the cleaning roller by electrostatic force is reversed, and the cleaning roller The cleaning roller can lose the attracting force for the attracted foreign matter. As a result, the foreign matter adsorbed on the cleaning roller is adsorbed on the transfer roller. Therefore, the maintenance work as described above becomes easy.

In this case, as described in claim 9, the transfer roller rotates while contacting the surface of the cleaning roller, so that the surface characteristics of the transfer roller and the cleaning roller are between the cleaning roller and the surface. It is desirable to generate a potential difference according to the difference (for example, charging order).

In addition, as described in claim 10, a cleaning brush is provided so as to rotate in the follower direction or the reverse direction with respect to the transfer roller, and so as to rotate in the follower direction or the reverse direction with respect to the cleaning brush. A metal roller is provided, and the external power source is connected to the metal roller, and a third voltage stabilization that causes a potential difference between the transfer roller and the cleaning brush between the transfer roller and the cleaning brush. It is preferable that a fourth voltage stabilizing circuit for generating a potential difference between the cleaning brush and the metal roller is provided between the cleaning brush and the metal roller.

In this case, the foreign matter is removed from the transfer roller by the cleaning brush, and it is transferred to the metal roller by electrostatic force, and the voltage of the metal roller is changed by the fourth voltage stabilizing circuit, and the metal roller is attracted to the metal roller. When the adsorbing power against the foreign matter is lost, the foreign matter is more efficiently removed from the metal roller. In particular, the potential difference between the transfer roller and the transfer roller, which is generated by an external power source connected to the metal roller, can be changed, and foreign matters can be effectively conveyed to the metal roller.

In addition, as described in claim 11, the first to fourth voltage stabilizing circuits include first to fourth resistors, respectively, and the first to fourth resistors A voltage applied between the rollers or the brushes in contact with each other may be divided. Here, the resistor may be a fixed resistor or a variable resistor.

According to this configuration, the first to fourth voltage stabilizing circuits constitute a voltage-divided circuit by the resistor, so that desired first to fourth voltages are respectively generated between the roller and the brush. Can be obtained.

As described in claim 12, it is desirable that the first to fourth resistors are set to have a resistance value smaller than a contact resistance between the roller or the brush in contact.

In this way, by dividing the voltage with a resistor having a resistance value smaller than the contact resistance between the contacting rollers or brushes, the error or change in contact resistance between the contacting rollers or cleaning brushes can be reduced. In contrast, a stable voltage can be obtained.

According to a thirteenth aspect of the present invention, the first to third voltage stabilizing circuits include a constant voltage diode or a varistor (nonlinear resistance element), and the fourth voltage stabilizing circuit includes: It is desirable to have a fixed resistor or a variable resistor.

According to this configuration, the first to third voltage stabilization circuits include the constant voltage diode or the varistor, and the fourth voltage stabilization circuit includes the fixed resistor or the variable resistor. A stable voltage can be obtained.

As described in claim 14, it is desirable that the constant voltage diodes of the first to third voltage stabilizing circuits are connected in series or back to back.

In this way, a constant voltage difference can be maintained regardless of polarity by connecting constant voltage diodes having a Zener effect in series or back to back.

In this case, as described in claim 15, it is desirable to provide means for switching the polarity of the voltage applied to the roller or the brush by the external power source.

This makes it possible to freely reverse the positive and negative polarities of the external power supply.

According to a sixteenth aspect of the present invention, a cleaning blade can be disposed in the vicinity of the surface of the metal roller to scrape foreign matter adhering to the surface of the metal roller with a tip scraping portion.

In this case, as described in claim 17, in order to collect and accumulate the foreign matter scraped by the suction port of the air vacuum means capable of sucking foreign matter by vacuum pressure or the cleaning blade in the vicinity of the cleaning blade. It is desirable that a foreign matter storage box is disposed.

The guide roller is disposed on the opposite side of the cleaning roller with the material to be cleaned interposed therebetween, and the cleaning roller adheres to the surface of the material to be cleaned. It is also possible to increase the electric field strength for adsorbing foreign matter by electrostatic force.

Since the present invention is configured as described above, it is possible to change the suction force for the foreign matter adsorbed on the surface of the cleaning roller, and the foreign matter can be stably transferred to the transfer roller side. As in the conventional cleaning system that uses the adhesive force of the adhesive roller, the foreign matter adhering to the surface of the cleaning roller is periodically removed (cleaned), or the cleaning roller to which the foreign matter is attached is periodically Therefore, there is no need to perform maintenance work for replacement, and a cleaning system with excellent maintainability can be obtained.

In particular, according to the first aspect of the present invention, by changing the set voltage value of the voltage stabilizing circuit connected to the cleaning roller, the suction force of the foreign matter adsorbed on the cleaning roller is weakened with respect to the cleaning roller. Therefore, the foreign matter adsorbed on the cleaning roller can be adsorbed on the transfer roller.

In the invention according to claim 8, since the charging voltage for adsorbing the foreign matter by electrostatic force of the cleaning roller can be changed, the voltage applied by an external power source connected to the transfer roller can be changed without changing the voltage applied. With respect to the cleaning roller, it is possible to weaken the suction force with respect to the foreign matter adsorbed on the cleaning roller. As a result, the foreign matter adsorbed on the cleaning roller is adsorbed on the transfer roller. Therefore, the maintenance work as described above becomes easy.

In this case as well, by changing the set voltage value of the voltage stabilization circuit connected to the cleaning roller, it is possible to prevent the charged voltage generated on the roller surface from becoming higher than necessary in order to attract foreign matter by electrostatic force. In addition, the charged voltage can be stabilized. In addition, electrostatic breakdown of electronic components such as semiconductors that are sensitive to static electricity can be prevented.

(A) (b) is explanatory drawing of the operation principle of 1st Embodiment of the cleaning system which concerns on this invention, respectively. It is explanatory drawing which shows an example of the said 1st Embodiment. It is a figure which shows the 1st modification of embodiment shown in FIG. It is a figure which shows the 2nd modification of embodiment shown in FIG. It is a figure which shows the 3rd modification of embodiment shown in FIG. It is a figure which shows the 4th modification of embodiment shown in FIG. (A) (b) (c) (d) is explanatory drawing of the operation principle of 2nd Embodiment of the cleaning system which concerns on this invention. (A) (b) is explanatory drawing which shows an example of the said 2nd Embodiment. It is a figure which shows the 1st modification of embodiment shown in FIG. It is a figure which shows the 2nd modification of embodiment shown in FIG. It is a figure which shows the 3rd modification of embodiment shown in FIG. (A) and (b) are figures which show the 4th modification of embodiment shown in FIG. It is a figure similar to FIG. 2 which shows the 5th modification of embodiment shown in FIG. It is a figure which shows embodiment which has arrange | positioned two cleaning units.

Hereinafter, embodiments of the present invention will be described with reference to the drawings.
(First embodiment)
FIGS. 1A and 1B are explanatory views of the operating principle of the cleaning system according to the first embodiment of the present invention.

As shown in FIG. 1A, the cleaning system 1 includes a cleaning roller 11 and a transfer roller 21 that rotates while contacting the surface of the cleaning roller 11 with respect to the cleaning roller 11.

The cleaning roller 11 moves relative to the surface of the material to be cleaned S while rotating, and can remove foreign matters such as dust adhering to the surface of the material to be cleaned S by using electrostatic force. It can be done. The cleaning roller 11 is capable of charging the outer peripheral surface with a charge that adsorbs foreign matter adhering to the surface of the material to be cleaned S by electrostatic force. The cleaning roller 11 uses the charging property of the roller surface (outer peripheral surface) of the cleaning roller. It adsorbs foreign matter.

The transfer roller 21 rotates while being in contact with the surface of the cleaning roller 11, thereby causing a potential difference between the transfer roller 21 and the cleaning roller 11 according to a difference in surface characteristics (for example, charging sequence) between the transfer roller 21 and the cleaning roller 11. It will occur. Contact peeling due to rotation of the cleaning roller 11 and the transfer roller 21 causes a potential difference in the transfer roller 21 according to a difference in surface characteristics (for example, charging sequence) from the cleaning roller 11 and adheres to the surface of the material to be cleaned S. The charge for adsorbing the foreign matter by electrostatic force is charged.

In this way, by providing the transfer roller 21 in contact with the cleaning roller 11 on the side opposite to the cleaning material S of the cleaning roller 11, foreign matter adhering to the cleaning roller 11 due to electrostatic force is transferred to the transfer roller 21 side. Can be transferred (moved). As a result, the cleaning roller 11 comes into contact with the material to be cleaned S in a state where the foreign matter attached to the outer peripheral surface of the cleaning roller 11 is transferred to the transfer roller 21. Accordingly, the foreign matter on the outer peripheral surface of the cleaning roller 11 is continuously transferred to the transfer roller 21 side, and the cleaning roller 11 is always in a state where it can exhibit the cleaning effect. The adsorption operation can be continued. As a result, maintenance work for periodically removing foreign matters on the outer peripheral surface of the cleaning roller 11 or replacing the cleaning roller 11 is not necessary, which is advantageous in improving maintainability.

A constant voltage is applied to the core of the transfer roller 21 by an external power supply 31. The cleaning roller 11 is grounded via the first voltage stabilization circuit 12 and can stably charge the roller surface with charges for adsorbing foreign matter adhering on the surface of the cleaning material S by electrostatic force. It is like that. The first stabilization circuit 12 includes a variable resistor 12a (see FIG. 1A). Needless to say, the first stabilization circuit 12 may be a fixed resistor 12b as shown in FIG. 1B (the same applies hereinafter).

As described above, the cleaning roller 11 can charge the surface with a charge for adsorbing the foreign matter adhering on the surface of the material to be cleaned S by electrostatic force. Adsorbed on the surface. Further, since the transfer roller 21 can charge the roller surface with charges for adsorbing foreign matter adhering to the surface of the cleaning roller 11 by electrostatic force, the foreign matter adsorbed on the surface of the cleaning roller 11 is transferred to the transfer roller 21. It is attracted to the surface and moves from the cleaning roller 11 to the transfer roller 21. Therefore, it is not necessary to perform maintenance work such as periodically removing (cleaning) or periodically replacing the cleaning roller 11, and a cleaning system having excellent maintainability can be obtained.

Further, since the first voltage stabilization circuit 12 connected to the cleaning roller 11 is provided, the resistance value of the first voltage stabilization circuit 12 (variable resistor 12a) is changed, and the foreign matter of the cleaning roller is changed. Since the electrostatic voltage for adsorbing the toner can be changed by the electrostatic force, the adsorbing force of the foreign matter adsorbed on the cleaning roller 11 can be changed. Therefore, even if a voltage is applied to the transfer roller 21 from the external power supply 31, the suction force of the foreign matter attracted to the cleaning roller 11 can be changed for the cleaning roller 11 without changing the applied voltage. . For example, if the resistance value of the variable resistor 12a connected to the cleaning roller 11 is reduced as much as possible, the charge for adsorbing foreign matter adhering to the surface of the cleaning roller 11 by electrostatic force is reduced, and the cleaning roller 11 It is possible for the cleaning roller 11 to lose the adsorption force for the foreign matter adsorbed on the cleaning roller 11. As a result, the foreign matter adsorbed on the cleaning roller 11 is adsorbed on the transfer roller 21. Therefore, the maintenance work as described above becomes easy.

Therefore, as in the conventional cleaning system that uses the adhesive force of the adhesive roller, the foreign matter adhering to the roller surface of the cleaning roller is periodically removed (cleaned) or the cleaning roller to which the foreign matter is attached is removed. There is no need to perform maintenance work for periodic replacement, and a cleaning system with excellent maintainability can be obtained. In addition, since the voltage applied by the external power supply 31 connected to the transfer roller 21 does not need to be frequently controlled, the design of the external power supply 31 can be made compact.

Subsequently, the cleaning roller 11 and the transfer roller 21 will be described.

The cleaning roller 11 includes a cored bar (core bar) 11a that is a conductive shaft member, an inner layer part 11b that is provided on the outer periphery of the cored bar 11a, and an inner layer part that is provided outside the inner layer part 11b. And a thin cylindrical outer layer portion 11c made of a material having a higher resistance than 11b, and has a two-layer structure.

As the material for forming the outer layer portion 11c of the cleaning roller 11, a material capable of charging a charge that adsorbs foreign matter such as dust adhering to the surface of the cleaning material S by electrostatic force is selected.

The thickness of the outer layer portion 11c of the cleaning roller 11 is preferably 2 to 500 μm (more preferably 5 to 50 μm). This is because if the thickness of the outer layer portion 11c is less than 2 μm, the roller surface (outer layer surface) tends to be less likely to be charged. On the other hand, the thickness exceeding 500 μm is not industrially efficient. In place of the cored bar 11a, a cored bar made of a conductive carbon material, synthetic resin composite, or the like can be used. The core bar (core bar) 11a preferably has a resistance value of 10 ⁵ Ω or less as the resistance value between the middle part of the core bar and the end of the core bar.

The inner layer portion 11b is made of a conductive elastic material (for example, polyester urethane containing carbon (conductive material)), and has a lower hardness or substantially the same hardness as the outer layer portion 11c. The inner layer portion 11b is not particularly limited as long as it has a lower resistance than the outer layer portion 11c, but the volume resistivity is preferably about 10 ⁴ to 10 ¹² Ωcm.

The material used for the outer layer portion 11c has a hardness (JIS-A) of 50 ° or more (desirably 50 ° or more and less than 100 °, more desirably 55 ° or more and less than 100 °, and further desirably 65 ° or more and less than 100 °). . The outer layer portion 11c has a higher volume resistivity than the inner layer portion 11b. The outer layer portion 11c is desirably a volume resistivity of 10 ⁸ Ωcm or more, more desirably 10 ¹⁰ Ωc.
The volume resistivity is m or more.

Preferable examples of the material forming the outer layer portion 11c of the cleaning roller 11 include urethane resin, and further acrylic mixed urethane or fluorine mixed urethane. Here, “acrylic mixed urethane” is mainly composed of polyester polyurethane or polyether polyurethane, and (i) a mixture of thermoplastic urethane resin and silicon / acrylic copolymer resin, (ii) acrylic resin (for example, methacrylic acid-methacrylic acid). A mixture consisting of a graft compound in which an aminoethyl group is grafted to the main chain consisting of an acid methyl copolymer) and a thermoplastic urethane resin, and (iii) a mixture consisting of an acrylic resin / urethane resin / fluorinated surface coating agent. The “fluorine-mixed urethane” is a polyurethane-based component, which means a mixture of a urethane / fluorine copolymer with a thermoplastic urethane resin.

As with the cleaning roller 11, the transfer roller 21 includes a conductive metal core 21a, a cylindrical inner layer portion 21b provided outside the metal core 21a, and an outer layer portion 21c provided outside the inner layer portion 21b. (Elastic layer portion), and the outer layer portion 21c may have a higher volume resistivity than the inner layer portion 21b. However, the transfer roller 21 may also have a structure in which the core metal 21a is directly provided with a cylindrical outer layer portion (elastic layer portion). Further, the outer layer portion 21c of the transfer roller 21 is selected to have a volume resistivity higher than that of the core metal 21a, and can charge a charge that adsorbs foreign matter adhering to the outer peripheral surface of the cleaning roller 11 to the outer peripheral surface by electrostatic force. The

The transfer roller 21 rotates with the cleaning roller 11 and is charged by contact peeling, and adheres to the outer peripheral surface of the cleaning roller 11 between the outer peripheral surface of the transfer roller 21 and the outer peripheral surface of the cleaning roller 11. A potential difference is generated so as to transfer (move) the foreign matter on the outer peripheral surface of the transfer roller 21 by electrostatic force. That is, the transfer roller 21 has the same sign as the charge (positive charge or negative charge) charged on the roller 11 with respect to the cleaning roller 11 due to the difference in roller surface characteristics (for example, charging order), and the absolute value of the charged voltage. Is larger than the roller 11 and has a potential difference capable of attracting foreign matter. For this reason, as a material for forming the outer layer portion 21c of the transfer roller 21, a material having the same polarity as the cleaning roller 11 and a potential difference that is as large as possible is selected as long as stable adsorbability is not impaired. Is desirable.

The foreign matter transferred to the transfer roller 21 side due to the potential difference caused by the contact peeling between the cleaning roller 11 and the transfer roller 21 stops the rotation of the transfer roller 21, so that the transfer roller 21 itself loses the adsorbing force due to electrostatic force. Therefore, it can be removed from the transfer roller 21 relatively easily.

In addition to the above, as shown in FIG. 2, the transfer roller 21 is provided with a cleaning brush 41 that rotates in a direction opposite to the rotation direction, and the metal roller 42 is rotated so as to rotate in the rotation direction with respect to the cleaning brush 41. It can also be installed. In this case, the external power supply 31 is connected to the metal roller 42. In this case, as shown in FIG. 3, instead of the variable resistor,
It is also possible to use the switchable resistor 43 that has a plurality of fixed resistors 43a and changes the resistance value by switching the fixed resistor 43a to be used by the changeover switch 43b, and can be used as the first voltage stabilizing circuit 12A. .

Also, as shown in FIG. 4, a cleaning freight 44 is disposed on the upper surface of the metal roller 42 and in the vicinity of the surface so as to scrape off foreign matter adhering to the surface of the metal roller 42 with a tip scraping portion. A suction port 45 of an air vacuum means (not shown) that is capable of sucking foreign matter by negative pressure near the metal roller 42 can also be disposed. As a result, the foreign matter scraped off by the tip scraping portion of the cleaning blade 44 is sucked by negative pressure through the suction port 45 of the air vacuum means, so that there is no possibility that the foreign matter will contaminate the periphery of the metal roller 42.

As shown in FIG. 5, a foreign matter storage box 46 for collecting and accumulating foreign matter scraped by the cleaning blade 44 installed on the surface of the metal roller 42 can be provided, and the foreign matter scattered by the rotation of the brush can be provided. It is also possible to provide a foreign substance storage box for collecting and accumulating.

As shown in FIG. 6, a guide roller 51 is disposed on the opposite side of the cleaning roller 11 with the material to be cleaned S interposed therebetween, and the guide roller 51 is a foreign material that adheres to the surface of the material to be cleaned. It is possible to increase the electric field strength for adsorbing the liquid by electrostatic force.
(Method)
In the cleaning system shown in FIG. 2, the cleaning roller 11 and the transfer roller 21 held by an insulating member (not shown) are brought into contact with each other and rotated together at a peripheral speed of 5 m / min. The earth | ground via the variable resistor 12a was installed in the gold | metal | money 11a. An external power source 31 was connected to a metal roller 42 provided to the transfer roller 21 via a cleaning brush 41. The cleaning brush 41 is provided so as to rotate in the direction opposite to the rotation direction with respect to the transfer roller 21, and the metal roller 42 is installed so as to rotate in the rotation direction with respect to the cleaning brush 41.

In the above state, the surface potential of each member with respect to the change in the resistance value of the variable resistor 12a is measured by a surface potential meter (Mode 1 manufactured by Trek)
341B).

From this measurement result, by adjusting the resistance value of the variable resistor 12a, the surface potential of the cleaning roller 11 can be adjusted, and the adsorption force for the foreign matter adsorbed on the cleaning roller 11 can be changed. I understand.
(Second Embodiment)
As shown in FIG. 7A, the cleaning roller 11 can charge the surface with a charge for adsorbing foreign matter adhering to the surface of the material to be cleaned by electrostatic force. It is grounded through a voltage stabilizing circuit 13 having it. The cleaning roller 11 is provided with a transfer roller 21 that rotates while being in contact with the surface of the cleaning roller 11. An external power supply 31 is connected to the transfer roller 21, and foreign matter adhering to the surface of the cleaning roller is subjected to electrostatic force. The surface can be charged with a charge for adsorption.

As described above, since the first and second

voltage stabilizing circuits

13 and 14 are configured by the variable resistor 14a and the constant voltage diode 13a having a Zener effect, a stable voltage can be obtained. Of course, instead of the variable resistor 14a, a fixed resistor 14b may be used as shown in FIG. 7B.

As shown in FIGS. 7C and 7D, the first voltage stabilization circuit 13 has a structure having a pair of constant voltage diodes 13a and 13a (zener diodes) provided facing each other (or back to back). It is also possible to do. When the constant voltage diodes having the Zener effect are connected in series or back to back in this way, a stable charged voltage can be obtained regardless of the polarity.

The second voltage stabilizing circuit 14 is provided between the cleaning roller 11 and the transfer roller 21 so that a potential difference is generated between the cleaning roller 11 and the transfer roller 21. The second stabilization circuit 14 includes a variable resistor 14a, but can of course be a fixed resistor 14b.

In particular, by changing the set voltage value of the constant voltage diode 13a (first voltage stabilizing circuit 13), it is possible to weaken the attractive force of the cleaning roller 11 with respect to the foreign matters adsorbed on the cleaning roller 11. For example, if the set voltage value of the first voltage stabilizing circuit 13 is set to the polarity of positive and negative, the charge for adsorbing the foreign matter adhering on the surface of the cleaning roller 11 by electrostatic force is reversed, and the cleaning roller 11 It is possible to cause the cleaning roller 11 to lose the adsorption force for the adsorbed foreign matter. As a result, the foreign matter adsorbed on the cleaning roller 11 is adsorbed on the transfer roller 21. Therefore, the maintenance work as described above becomes easy.

Therefore, similarly to the first embodiment, it is not necessary to perform maintenance work such as periodically removing (cleaning) or periodically replacing the cleaning roller 11.

Also in the case of the second embodiment, as in the first embodiment, as shown in FIG. 8A, the cleaning brush 41 that rotates in the direction opposite to the follow-up direction with respect to the transfer roller 21 is provided. It is also possible to provide the metal roller 42 so as to rotate in the rotational direction with respect to the cleaning brush 41.

In this case, a second voltage stabilization circuit 15 (constant voltage diode 15a) is connected between the cleaning roller 11 and the transfer roller 21, and a third voltage stabilization circuit is provided between the transfer roller 21 and the cleaning brush 41. Circuit 16 (constant voltage diode 16a) is connected, and a fourth voltage stabilizing circuit 17 (variable resistor 17a) is connected between the cleaning brush 41 and the metal roller 42, and the transfer roller 21, cleaning brush 41, and A potential difference is generated between the metal rollers 42. As shown in FIG. 8B, the fourth voltage stabilization circuit 17 may be a fixed resistor 17b instead of the variable resistor 17a (the same applies hereinafter).

In this way, the foreign matter is removed from the transfer roller 21 by the cleaning brush 41, and it is transferred to the metal roller 42 by electrostatic force. Then, when the voltage of the metal roller 42 is changed by the fourth voltage stabilizing circuit 17 and the metal roller 42 loses the attractive force to the foreign matter adsorbed thereto, the foreign matter is more efficiently removed from the metal roller 42. Can be done. In particular, the potential difference between the external roller 31 and the transfer roller 21 generated by the external power source 31 connected to the metal roller 42 can be changed, and foreign matters can be effectively conveyed to the metal roller 42.

Further, the first to fourth

voltage stabilizing circuits

13 and 15 to 17 are constituted by the constant voltage diodes 13a, 15a and 16a having the Zener effect and the variable resistor 17a, thereby obtaining a stable voltage. be able to.

Further, as shown in FIG. 9, a cleaning freight 44 is disposed on the upper surface of the metal roller 42 and in the vicinity of the surface so as to scrape off foreign matter adhering to the surface of the metal roller 42 by a tip scraping portion. A suction port 45 of air vacuum means that is capable of sucking foreign matter by negative pressure near the metal roller 42 can also be disposed.

In this way, the foreign matter adsorbed on the surface of the metal roller 42 by the electrostatic force is scraped off by the tip scraping portion of the cleaning blade 44. As described above, the foreign matter adsorbed on the surface of the metal roller 42 by the electrostatic force is scraped off by the tip scraping portion of the cleaning blade 44, so that the foreign matter is efficiently removed from the metal roller 42. Further, since the foreign matter is sucked by negative pressure through the suction port 45 of the air vacuum means, there is no possibility that the foreign matter will contaminate the periphery of the metal roller 45.

As shown in FIG. 10, it is also possible to provide a foreign matter storage box 46 for collecting and accumulating foreign matter scraped by a cleaning blade 44 installed on the side of the metal roller 42.

In this way, foreign matter can be collected in the foreign matter storage box 46 without newly providing power. The foreign substance storage box 46 can also be provided at a position where foreign substances scattered by the rotation of the brush 41 can be collected and accumulated.

As shown in FIG. 11, a guide roller 51 can be disposed on the opposite side of the cleaning roller 11 with the material to be cleaned S interposed therebetween. The guide roller 51 increases the electric field strength for the cleaning roller 11 to adsorb foreign matter adhering to the surface of the material to be cleaned S by electrostatic force.

In this way, the two

rollers

11 and 51 are opposed to each other with the material to be cleaned S interposed therebetween, and the material to be cleaned S is supported from above and below at the position where the cleaning roller 11 and the guide roller 51 are in contact with each other. The foreign matter on the surface of the material to be cleaned S is removed while being well supported.

Also, the cleaning roller 11 has an electric field strength for adsorbing foreign matter adhering to the surface of the material to be cleaned S by electrostatic force by the guide roller 51, and the surface of the material to be cleaned S according to the applied electric field. Charged foreign matter is adsorbed by the cleaning roller 11 and efficiently removed.

Further, as shown in FIG. 12A, the first, second, third and fourth voltage stabilizing circuits 13B, 15B, 16B, and 17 are also configured by variable resistors 13b, 15b, 16b, and 17a. The first to fourth voltages can be stably obtained by configuring a voltage-divided circuit using the variable resistors 13b, 15b, 16b, and 17a. Also in this case, as shown in FIG. 12B, the fixed resistors 13c, 15c, 16c, and 17b are used as the first, second, third, and fourth voltage stabilizing circuits 13B, 15B, 16B, and 17, respectively. It is also possible to use it.

In this case, the contacting rollers are divided by the variable resistors 13b, 15b, 16b, and 17a having a resistance value smaller than the contact resistance between the contacting

rollers

11, 21, 42 or the brush 41. A stable voltage can be obtained regardless of errors or changes in the contact resistance between 11, 21, 42 or the cleaning brush 41.

As shown in FIG. 13, the polarity can be easily switched by providing a polarity switching circuit 61 that can switch the polarity of the voltage applied by the external power supply 31. In this case, the first to third voltage stabilizing circuits 13A, 15A, and 16A are configured by two constant voltage diodes 13a, 15a, and 16a that are in contact with each other, and a stable voltage can be obtained regardless of polarity. So that you can get.

Next, in the cleaning system shown in FIG. 13, the cleaning roller 11 and the transfer roller 21 held by an insulating member (not shown) are brought into contact with each other and rotated together at a peripheral speed of 5 m / min. A grounding via a first voltage stabilizing circuit 13 (constant voltage diode 13a) composed of a constant voltage diode 13a (zener diode) was installed on the core metal. In addition, a cleaning brush 41 and a metal roller 42 are provided for the transfer roller 21, and a second voltage stabilization circuit 15 (constant voltage diode 15 a) is connected between the core of the cleaning roller 11 and the transfer roller 21. The third voltage stabilizing circuit 16 (constant voltage diode 16 a) is disposed between the core metal of the cleaning brush 41 and the cleaning brush 41, and the fourth voltage stabilization circuit 17 is disposed between the metal core of the cleaning brush 41 and the metal roller 42. (Variable resistor 17a) was installed. The cleaning brush 41 is provided so as to rotate in the direction opposite to the rotation direction with respect to the transfer roller 21, and the metal roller 42 is installed so as to rotate in the rotation direction with respect to the cleaning brush 41.

In the above state, the surface potentials of the cleaning roller 11, the transfer roller 21, the cleaning brush 41, and the metal roller 42 by the

voltage stabilization circuits

13, 15 to 17 were measured using a surface potential meter (Model 341B, manufactured by Trek).

From this result, it can be seen that the potentials of the cleaning roller 11, the transfer roller 21, the cleaning brush 41, and the metal roller 42 can be maintained at arbitrary values without causing dielectric breakdown. Accordingly, it is possible to stabilize the adsorption force of the foreign matter adsorbed on the surface of the cleaning roller 11 and stably transfer the foreign matter to the transfer roller 21, the cleaning brush 41, and the metal roller 42 side.

In addition to the above, the present invention can be implemented with the following modifications.

(i) As shown in FIG. 14, the cleaning unit U1 (cleaning roller 11, transfer roller 21, cleaning brush 41, metal roller 42) and the cleaning unit U2 (cleaning roller 11 ′, transfer roller 21 ′, cleaning brush 41 ′, Two metal rollers 42 ′) are arranged, and in each of the units U1 and U2, the sign of the electric charge charged on the outer peripheral surface of the cleaning

rollers

11 and 11 ′ can be reversed with respect to the

cleaning rollers

11 and 11 ′. . In this way, the cleaning roller 11 (cleaning unit U1) that negatively charges the positively charged foreign matter adhering to the surface of the cleaning material S and the cleaning roller 11 ′ (cleaning) that positively charges the negatively charged foreign matter. Each unit U2) can be removed, and the range of foreign matter that can be removed is increased. Although FIG. 14 shows a double arrangement of what is shown in FIG. 2, the other embodiments can be similarly arranged in a similar manner to increase the range of foreign matter that can be removed. Not too long.

(Ii) The present invention is suitable when the material to be cleaned is a thin material such as a film, a sheet, and a printed circuit board (PCB, PCBA), but is not limited thereto.

S Cleaning material 11 Cleaning roller 12, 12A Voltage stabilization circuit 12a Variable resistor 12b Fixed resistor 13, 13A, 13B First voltage stabilization circuit 13a, 15a, 16a

Constant voltage diodes

14, 15, 15A, 15B Voltage stabilizing circuits 14a, 17a, 13b, 15b, 16b Variable resistors 14b, 17b, 13c, 15c, 16c Fixed resistors 16, 16A, 16B Third voltage stabilizing circuit 17 Fourth voltage stabilizing circuit 21 Transfer roller 31 External power supply 41 Cleaning brush 42 Metal roller 43 Switchable resistor 44 Cleaning blade 45 Suction port 46 Foreign matter storage box 51 Guide roller 61 Polarity switching circuit

Claims

A cleaning system that includes a cleaning roller that moves while rotating while being in contact with the surface of the material to be cleaned, and that removes foreign matters such as dust adhering to the surface of the material to be cleaned using electrostatic force by the cleaning roller. Because
A transfer roller that rotates while contacting the surface of the cleaning roller is provided for the cleaning roller,
The cleaning roller is capable of charging the surface with a charge for adsorbing foreign matter adhering to the surface of the material to be cleaned by electrostatic force,
The transfer roller is capable of charging the surface with a charge for adsorbing foreign matter adhering to the surface of the cleaning roller by electrostatic force,
The cleaning roller is grounded via a voltage stabilizing circuit, and an external power source is directly or indirectly connected to the transfer roller,
The cleaning system according to claim 1, wherein the voltage stabilizing circuit is capable of changing a voltage applied to the transfer roller for attracting the foreign matter by electrostatic force.
The voltage stabilization circuit is a fixed resistor, a variable resistor, or a switchable resistor that has a plurality of fixed resistors and switches a fixed resistor to be used to change a resistance value. The cleaning system according to 1.
The transfer roller rotates while being in contact with the surface of the cleaning roller, thereby generating a potential difference between the transfer roller and the cleaning roller according to a difference in charging characteristics of the surface of the transfer roller and the cleaning roller. The cleaning system according to claim 1, wherein the cleaning system is provided.
A cleaning brush that rotates in the revolving direction or the reverse direction is provided for the transfer roller, and a metal roller is installed to rotate in the revolving direction or the reverse direction with respect to the cleaning brush,
The cleaning system according to claim 1, wherein the external power source is connected to the metal roller to generate a potential difference among the transfer roller, the cleaning brush, and the metal roller.
The cleaning system according to claim 4, wherein a cleaning blade is disposed in the vicinity of the surface of the metal roller to scrape foreign matter adhering to the surface of the metal roller with a tip scraping portion.
In the vicinity of the cleaning blade, a suction port of an air vacuum means capable of sucking foreign matter by vacuum pressure, or a foreign matter storage box for collecting and accumulating foreign matter scraped by the cleaning blade is arranged. The cleaning system according to claim 5.
A guide roller is disposed on the opposite side of the cleaning roller across the cleaning material, and the guide roller is for the cleaning roller to adsorb foreign matter adhering to the surface of the cleaning material by electrostatic force. The cleaning system according to claim 1, wherein the cleaning system increases the electric field strength.
A cleaning system that includes a cleaning roller that moves while rotating while being in contact with the surface of the material to be cleaned, and that removes foreign matters such as dust adhering to the surface of the material to be cleaned using electrostatic force by the cleaning roller. Because
A transfer roller that rotates while contacting the surface of the cleaning roller is provided for the cleaning roller,
The cleaning roller is capable of charging the surface with a charge for adsorbing foreign matter adhering to the surface of the material to be cleaned by electrostatic force,
The transfer roller is capable of charging the surface with a charge for adsorbing foreign matter adhering to the surface of the cleaning roller by electrostatic force,
The transfer roller is configured to be directly or indirectly applied with an external power supply voltage,
The cleaning roller is grounded via a first voltage stabilization circuit that controls the voltage of the cleaning roller to be equal to or lower than a set voltage, while the cleaning roller and the transfer roller are between them. A cleaning system, wherein a second voltage stabilization circuit for generating a potential difference is provided.
The transfer roller rotates while being in contact with the surface of the cleaning roller, thereby generating a potential difference between the transfer roller and the cleaning roller according to a difference in charging characteristics of the surface of the transfer roller and the cleaning roller. 9. The cleaning system according to claim 8, wherein the cleaning system is provided.
A cleaning brush is provided to rotate in the follower direction or the reverse direction with respect to the transfer roller,
A metal roller is provided so as to rotate in the rotational direction or the reverse direction with respect to the cleaning brush,
The external power supply is connected to the metal roller,
Between the transfer roller and the cleaning brush, a third voltage stabilizing circuit that generates a potential difference between the transfer roller and the cleaning brush, and between the cleaning brush and the metal roller, 9. The cleaning system according to claim 8, further comprising a fourth voltage stabilization circuit for generating a potential difference between the cleaning brush and the metal roller.
The first to fourth voltage stabilization circuits have first to fourth resistors, respectively.
The cleaning system according to claim 10, wherein the first to fourth resistors divide a voltage applied between the rollers or the brushes in contact with each other.
12. The cleaning system according to claim 11, wherein the first to fourth resistors are set to have a resistance value smaller than a contact resistance between the roller or the brush in contact with each other.
The first to third voltage stabilizing circuits have constant voltage diodes or varistors,
The cleaning system according to claim 10, wherein the fourth voltage stabilization circuit includes a fixed resistor or a variable resistor.
14. The cleaning system according to claim 13, wherein the constant voltage diodes of the first to third voltage stabilizing circuits are connected in series or back to back.
15. The cleaning system according to claim 14, further comprising means for switching between positive and negative polarities of a voltage applied to the roller or the brush by the external power source.
The cleaning system according to claim 10, wherein a cleaning blade is disposed in the vicinity of the surface of the metal roller to scrape foreign matter adhering to the surface of the metal roller with a tip scraping portion.
In the vicinity of the cleaning blade, a suction port of an air vacuum means capable of sucking foreign matter by vacuum pressure, or a foreign matter storage box for collecting and accumulating foreign matter scraped by the cleaning blade is arranged. The cleaning system according to claim 16.
A guide roller is disposed on the opposite side of the cleaning roller across the cleaning material, and the guide roller is for the cleaning roller to adsorb foreign matter adhering to the surface of the cleaning material by electrostatic force. 9. The cleaning system according to claim 8, wherein the cleaning system increases the electric field strength.