CN108698091A

CN108698091A - Cleaning device and clean method

Info

Publication number: CN108698091A
Application number: CN201780015294.7A
Authority: CN
Inventors: 三桥浩; 金子加津寛; 谷新太; 松本英树
Original assignee: Bando Chemical Industries Ltd
Current assignee: Bando Chemical Industries Ltd
Priority date: 2016-03-09
Filing date: 2017-03-09
Publication date: 2018-10-23
Anticipated expiration: 2037-03-09
Also published as: JPWO2017155075A1; TW201832835A; JP7316346B2; JP6383872B2; KR20180120745A; JP2022034005A; CN108698091B; JP7019527B2; JP2018164909A; TWI762481B; KR102338895B1; WO2017155075A1

Abstract

The present invention provides a kind of cleaning device and clean method that both bigger foreign matter and fine foreign matter can be expeditiously removed from the surface of object.The present invention is a kind of cleaning device, and the foreign matter on surface is removed when transporting plate or membranaceous object, it is characterised in that:Including the 1st brush roll, driving is rotated by rotary shaft substantially vertical with conveyance direction and substantially parallel with conveyance plane;Clearer rotates driving by rotary shaft substantially vertical with conveyance direction and substantially parallel with conveyance plane;A pair of opposite roller, it is opposite with the 1st brush roll and clearer by the object, together driving is rotated up in the side of the conveyance direction rotating forward relative to the object;And one or more voltage applying mechanisms, voltage is applied to the 1st brush roll and the clearer;One or more of voltage applying mechanisms apply and the clearer same polarity and the high voltage of absolute value the 1st brush roll.

Description

Cleaning device and clean method

Technical field

The present invention relates to a kind of cleaning device and clean methods.

Background technology

In recent years, exploitation has a kind of cleaning device, the cleaning device to be attached to flat-panel monitor (Flat to remove Panel Display, FPD) glass substrate or resin substrate or electronic component mounting printed base plate or to forming layer The ceramic green sheet (ceramic green sheet) of folded ceramic capacitor etc. or the objects such as resin sheet or strip film surface On the foreign matters such as dust.

As such cleaning device, such as propose there is following cleaning device:It is brushed away except object surface using electrification Foreign matter, and using electric field force (electric field force) and transport and recycle using clearer and is described through the different of removal Object (with reference to Japanese Patent Laid-Open 2011-92846 bulletins).

But in the cleaning device, the bigger foreign matter of mm size can be removed using band brush, but may Generate the part with brush not contact object object surface, thus exist remove with being unable to fully it is existing on the non-contact part Foreign matter (especially fine foreign matter) anxiety.In addition, in the cleaning device, do not brushed as described above from right merely with electrification Efficiency as removing foreign matter on object surface is felt embarrassed to mention fully, is also felt embarrassed to mention and is filled using the conveyance efficiency and organic efficiency of the foreign matter of clearer Point.Therefore, there are rooms for improvement in removal efficiency of foreign matter etc. for the cleaning device.

Existing technical literature

Patent document

Patent document 1:Japanese Patent Laid-Open 2011-92846 bulletins

Invention content

Problem to be solved by the invention

The present invention be based on such as the above situation and winner, its purpose is to provide it is a kind of can be from the surface of object efficiently Remove to rate the cleaning device and clean method of both bigger foreign matter and fine foreign matter.

Technical means to solve problem

Invention made of in order to solve the problem is a kind of cleaning device, and one side transports plate or membranaceous object The foreign matter on surface is removed on one side, it is characterised in that:Including the 1st brush roll, by it is substantially vertical with conveyance direction and with conveyance plane it is big Parallel rotary shaft is caused to rotate driving;Clearer passes through the rotation substantially vertical and substantially parallel with conveyance plane with conveyance direction Shaft drives to rotate;A pair of opposite roller, it is opposite with the 1st brush roll and clearer by the object, together in phase The side rotated forward for the conveyance direction of the object rotates up driving;And one or more voltage applying mechanisms, to institute It states the 1st brush roll and the clearer applies voltage;One or more of voltage applying mechanisms apply to the 1st brush roll and institute State clearer same polarity and the high voltage of absolute value.

The cleaning device removes bigger foreign matter from object using the 1st brush roll, and using cleaning Roller and fine foreign matter is removed from object.In addition, by having a pair opposite roller opposite with the 1st brush roll and clearer, 1st brush roll and clearer can effectively be pressed on object, therefore can be improved using the 1st brush roll and clearer from object The efficiency of upper removal foreign matter.In turn, apply voltage using the 1st brush roll of voltage applying mechanism pair and clearer, it thus can be further Improve the efficiency for removing foreign matter from object using the 1st brush roll and clearer.In particular, by applying to the 1st brush roll and cleaning Roller same polarity and the high voltage of absolute value can make the removal using the bigger foreign matter of the 1st brush roll and utilize the micro- of clearer The removal of thin foreign matter becomes efficient.In this way, in the cleaning device, it not only can be from high efficiency on the surface of object Ground removes bigger foreign matter, also expeditiously can remove fine foreign matter simultaneously.

Preferably described 1st brush roll rotates up driving in the side of the conveyance direction reversion relative to the object, institute It states clearer and rotates up driving in the side of the conveyance direction rotating forward relative to the object.In this way, by the 1st brush roll in phase Driving is rotated up for the side of the conveyance direction reversion of object, can effectively sweep and remove the surface for being attached to object On bigger foreign matter.In addition, driving is rotated up in the side of the conveyance direction rotating forward relative to object by clearer, The fine foreign matter being attached on its surface can be effectively removed when transporting object.

Preferably one or more of voltage applying mechanisms are to the 1st brush roll application -800V or more, less than -200V Voltage, to the voltage of the clearer application -200V or more, less than 0V.In this way, passing through the 1st brush roll of voltage applying mechanism pair And clearer applies the voltage of the range, the current potential of the 1st brush roll and clearer respectively becomes the current potential for being suitable for removing foreign matter, Therefore bigger foreign matter and fine foreign matter can more effectively be removed.

Preferably one or more of voltage applying mechanisms assign absolute value to the 1st brush roll and the clearer 100V or more, 500V potential difference below.In this way, being become with the potential difference of the 1st brush roll and clearer by voltage applying mechanism The mode of the range applies voltage, and the current potential of clearer and brush roll can be made to respectively become the current potential for being suitable for removing foreign matter, As a result, bigger foreign matter and fine foreign matter can be removed more effectively.

The current potential of preferably the pair of opposite roller is defined fixed current potential.In this way, by by the electricity of a pair of opposite roller Current potential is fixed in position as defined in being set as, and can divide between the 1st brush roll and an opposite roller and between clearer and another opposite roller It is not effectively formed electric field, therefore can further promote the efficiency for removing foreign matter from object using the 1st brush roll and clearer.

The preferably described cleaning device has the foreign matter for recycling the 1st brush roll and being removed from the object 1st recycling roll, and one or more of voltage applying mechanisms apply and the 1st brush roll same polarity the 1st recycling roll And the voltage that absolute value is high.In this way, have the 1st recycling roll by the cleaning device, and the 1st recycling roll is applied and the 1 brush roll same polarity and the high voltage of absolute value recycle the 1st brush roll using the 1st recycling roll and are removed from object Foreign matter.As a result, the spatter property and charge of the 1st brush roll can be maintained, and inhibit the decline of the removal efficiency of foreign matter.

Preferably one or more of voltage applying mechanisms assign the 1st recycling roll and the 1st brush roll absolute Value is 200V or more, 600V potential difference below.In this way, the current potential by assigning the range to the 1st recycling roll and the 1st brush roll Difference using the foreign matter that the 1st recycling roll effectively recycles the 1st brush roll and is removed from object, therefore can be tieed up effectively The spatter property and charge of the 1st brush roll are held, and the removal efficiency for effectively inhibiting foreign matter declines.

The direction of rotation of preferably described 1st recycling roll is the direction inverted relative to the direction of rotation of the 1st brush roll, And relative to the rotary speed of the 1st brush roll, the rotary speed of the 1st recycling roll is 1.0 times or more, 1.5 times or less.Such as This, by setting the rotating condition of the 1st recycling roll as described, can be improved recycled from the 1st brush roll using the 1st recycling roll it is different The efficiency of object, therefore the spatter property and charge of the 1st brush roll can be more effectively maintained, and more effectively inhibit the removal efficiency of foreign matter Decline.

The preferably described cleaning device has in turn to be recycled the clearer and is removed from the object different 2nd brush roll of object, and the 2nd brush roll rotates up driving in the side inverted relative to the clearer, as its rotation speed Degree, relative to the rotary speed of the clearer, preferably 1.0 times or more, 1.5 times or less.In this way, passing through the cleaning device Have the 2nd brush roll, the foreign matter removed using clearer and from object is removed using the 2nd brush roll.In this way, passing through automatically cleaning Foreign matter is removed on roller, can maintain the spatter property and charge of cleaning roller surface, and the removal efficiency of foreign matter is inhibited to decline.In addition, logical The rotating condition for crossing the 2nd brush roll of setting as described can further improve and utilize recycling foreign matter on the 2nd brush roll automatically cleaning roller Efficiency.

The preferably described cleaning device has in turn to be recycled the 2nd brush roll and is removed from the clearer different 2nd recycling roll of object, and the 2nd recycling roll rotates up driving in the side inverted relative to the 2nd brush roll, as its rotation Rotary speed, relative to the rotary speed of the 2nd brush roll, preferably 1.0 times or more, 1.5 times or less.In this way, by described clear Clean device has the 2nd recycling roll, the foreign matter removed on automatically cleaning roller using the 2nd recycling roll the 2nd brush roll of recycling.It is tied Fruit can maintain the 2nd brush roll, or even the spatter property and charge of cleaning roller surface, and inhibit the efficiency using clearer removal foreign matter Decline.In addition, the rotating condition by setting the 2nd recycling roll as described, can be improved using the 2nd recycling roll from the 2nd brush roll The efficiency of upper recycling foreign matter, or even can be improved and utilize the efficiency for recycling foreign matter on the 2nd brush roll automatically cleaning roller.

In addition, another invention made of in order to solve the problem is a kind of clean method, one side transports plate or film The object one side of shape removes the foreign matter on surface, including makes opposite on the direction that conveyance direction inverts, by with conveyance side To substantially vertical and be connected to the object transported with the substantially parallel rotary shaft of conveyance plane to rotate the brush roll of driving On process;And make to rotate rotation driving by rotary shaft substantially vertical with conveyance direction and substantially parallel with conveyance plane Clearer be connected to the process on the object, and the clean method applies voltage to the clearer, and to institute It states brush roll and applies and apply voltage same polarity and the high voltage of absolute value with towards in the clearer.

According to the clean method, bigger foreign matter is removed from object using brush roll, and using clear Clean roller and fine foreign matter is removed from object.In addition, by applying voltage to brush roll and clearer, can further improve certainly The efficiency of foreign matter is removed on the object.In particular, by brush roll apply with clearer same polarity and the high voltage of absolute value, It can further improve the efficiency that foreign matter is removed from the object.In this way, in the clean method, it not only can be from object Surface on expeditiously remove bigger foreign matter, also can expeditiously remove fine foreign matter.

Preferably brush roll is made to be connected in the process on the object, by the brush roll towards in the object fall into Enter amount and be set to defined value, and clearer is made to be connected in the process on the object, with using defined pressure come The mode that the clearer presses on the object is set.In this way, by by the pressure of the amount of being absorbed in of brush roll and clearer Power is set as the range, can carry out to higher efficiency the removal using the bigger foreign matter of brush roll and utilize the micro- of clearer The removal of thin foreign matter.

It, will be in the fortune relative to object or other rollers furthermore in the explanation of the direction of rotation of each roller of this specification The case where side of the dynamic related rotation in direction rotates up is known as " being rotated in forward direction ", otherwise is known as " in reverse directions Rotation ".Refer to being relative to the intersecting angle of vertical line within ± 10 ° in addition, so-called " substantially vertical ", or it is vertical.Into And it is so-called " substantially parallel ", refer to that acute angle that two straight lines are formed by angle is more than 0 ° and is within 10 °, or be parallel. In this specification, " table side " and " back side " of object differentiation merely for convenience, when not necessarily corresponding to using object Table side and back side.

The effect of invention

The cleaning device and clean method of the present invention can expeditiously remove bigger foreign matter from the surface of object And fine both foreign matters.

Description of the drawings

[Tu1 ]Indicate the stereogram of the cleaning device of one embodiment of the invention.

[Tu2 ]The constructed profile of cleaning device shown in Fig. 1.

[Tu3 ]The constructed profile of the brush roll of cleaning device shown in Fig. 1.

[Tu4 ]The constructed profile of the recycling roll of cleaning device shown in Fig. 1.

[Tu5 ]The schematic front figure of the carrying roller of cleaning device shown in Fig. 1.

[Tu6 ]Constructed profile at the X-X lines of Fig. 5.

[Tu7 ]Expression can be applied to the signal of an example of the height adjustment mechanism of the cleaning device of one embodiment of the invention Sectional view.

[Tu8 ]Indicate the constructed profile for the process that the height using the height adjustment mechanism of Fig. 7 is adjusted.

[Tu9 ]Indicate the schematic isometric of the height adjustment mechanism of Fig. 8.

[Tu10 ]The constructed profile of the clearer of cleaning device shown in Fig. 1.

[Tu11 ]Expression can be applied to the schematic isometric of the unit side terminal of the cleaning device of one embodiment of the invention.

[Tu12 ]Expression can be applied to the schematic perspective of the fixator side terminal of the cleaning device of one embodiment of the invention Figure.

[Tu13 ]Expression can be applied to the schematic section of the voltage applying mechanism of the cleaning device of one embodiment of the invention Figure.

[Tu14 ]Indicate the figure with electric array of object, brush and foreign matter.

[Tu15 ]To illustrate the brush roll in brush roll unit the experimental method for applying alive optimum schematic diagram.

[Tu16 ]Indicate the chart of the measurement result of the absorption width for applying alive foreign matter relative to brush roll.

[Tu17 ]Indicate the image pickup result on the object surface of the confirmation result of clean-up performance.

[Tu18 ]Indicate the image pickup result on the object surface of the confirmation result of clean-up performance.

[Tu19 ]Indicate the image pickup result on the object surface of the confirmation result of clean-up performance.

Specific implementation mode

Hereinafter, one side carries out specifically suitable for an example with reference to attached drawing one in face of cleaning device and clean method of the invention It is bright.It, certainly can be in the range using the essence of the present invention suitable for change about the specific composition and details of the present invention.

Fig. 1 and the cleaning device shown in Fig. 2 are to transport flat object S on conveyance direction D on one side, one Face removes the foreign matter person on its surface (table side surface S1 and back surface S2).The cleaning device mainly has fixator 1, outside Transport mechanism (transport mechanism 2A and downstream side outside transport mechanism 2B outside upstream side) and cleaning mechanism 3.In addition, described clear Clean device has the voltage applying mechanism of application that voltage is carried out to aftermentioned brush roll 41, clearer 51 etc. etc. (in Fig. 1 and Fig. 2 Middle omission).In turn, the cleaning device has the control machine of the external transport mechanism of control, cleaning mechanism 3 and voltage applying mechanism Structure.Conventionally known various control mechanisms can be used in the control mechanism, such as may include personal computer etc..

(object)

Object S is in fig. 2 flat component, but as long as being plate or membranaceous component, then there is no particular restriction. Specifically, the surface of object can be flat as illustrated in fig. 2, but recess also may be present.In turn, also may be used in object There are holes etc..

As the object of plate, such as can enumerate:The glass substrate or resin substrate or electronic component of FPD, which carries, to be used Printed base plate or ceramic green sheet or resin sheet etc. to form laminated ceramic capacitor etc..As membranaceous object, Such as resin film can be enumerated etc..

The average thickness of object is not particularly limited, but as its lower limit, preferably 30 μm, more preferably 50 μm.If Then there is the anxiety for being difficult to transport object in the less than lower limit of average thickness of object.On the other hand, as the flat of object The upper limit of equal thickness, for example, 5mm.

[Gu Dingqi ]

Fixator 1 is to maintain cleaning mechanism.The fixator 1 is to utilize more sticks 11 and axis 12 by opposite a pair The person of linking between tabular component 10.

[External Ban Songjigou ]

External transport mechanism is that the propulsive force person for being used for conveyance is assigned to object S, is set to the outer of cleaning mechanism 3 Portion.The external transport mechanism, which has to be configured at, is more located at conveyance outside the upstream side of conveyance direction upstream side than cleaning mechanism 3 It mechanism 2A and is configured at and is more located at transport mechanism 2B outside the downstream side in conveyance direction downstream side than cleaning mechanism 3.Using described As long as the conveyance speed of the object S of external transport mechanism removes the model of foreign matter using cleaning mechanism 3 from object S It encloses, then there is no particular restriction.The lower limit of conveyance speed as object S, preferably 5m/min, more preferably 10m/min.Separately On the one hand, the upper limit as the conveyance speed of object S, preferably 30m/min, more preferably 20m/min.If object S's The less than lower limit of speed is transported, then the time existed needed for foreign matter removal is elongated, the anxiety of the removal efficiency decline of foreign matter.On the contrary Ground, if the conveyance speed of object S is more than the upper limit, presence can not fully remove object S using cleaning mechanism 3 Surface foreign matter anxiety.

<Ban Songjigou &gt outside upstream side;

Transport mechanism 2A is that object S is moved in the person into cleaning mechanism 3 outside upstream side, with multiple band conveying units 20A.It is to be wrapping with endless belt 22A between a pair of rolls 21A for separating configuration along conveyance direction D and winner with conveying unit 20A.One Among two pairs of rollers 21A, one is to be endowed the driven roller of rotary force, another one be by the rotation of driven roller with endless belt 22A The driven voller rotated together with.It is multiple with conveying unit 20A with fixed intervals configure the horizontal direction orthogonal with conveyance direction D (with Under, also referred to as " conveyance width side ") on.

<Ban Songjigou &gt outside downstream side;

Transport mechanism 2B is that self-cleaning mechanism 3 moves out object S person outside downstream side, with multiple band conveying unit 20B. It will be set as composition identical with multiple band conveying unit 20A of transport mechanism 2A outside upstream side with conveying unit 20B.That is, multiple bands It includes to be wrapping with ring-type between driven roller and a pair of rolls 21B of driven voller that conveying unit 20B, which is separate configuration along conveyance direction D, The winner with 22B.Multiple band conveying unit 20B are also configured at fixed intervals in conveyance width direction.

[Qing Jiejigou ]

Cleaning mechanism 3 is the clean mechanism on the two sides of the table side surface S1 and back surface S2 that can carry out object S, With table side cleaning mechanism 3A and back side cleaning mechanism 3B.

Table side cleaning mechanism 3A is the unit of the foreign matter for the table side surface S1 for removing the object S transported.The table side Cleaning mechanism 3A has table side brush roll unit 4, table side cleaning roller unit 5 and the opposite roller unit of back side 6.The cleaning device is by table Set fixator 1 on the pedestal on the ground that side brush roller unit 4 and table side cleaning roller unit 5 are releasably installed on factory etc. On.Fixator 1 can be fixed on using the fixed tool such as screw rod on the pedestal, but preferably without using fixed tool and with can Mobile state mounting.Table side brush roll unit 4 and table side cleaning roller unit 5 are disposed in the top (conveyance of the object S transported The top in path), and be releasably held on fixator 1.

(table side brush roll unit)

Table side brush roll unit 4 be using be contained in brush roll 41 in framework 40 remove object S table side surface S1 it is different The unit of object is suitable for removing the bigger foreign matter of mm size.In the framework 40 of the table side brush roll unit 4, except brush Other than roller 41, recycling roll 42, blade 43, foreign matter recoverer 44 and carrying roller 45 are contained, it is whole through blocking.In this way, passing through The releasably blocking on fixator 1 by table side brush roll unit 4 can easily unload table side brush roll unit on self-retaining device 1 4.As a result, can together be replaced together with unit in the case where brush roll 41 must be replaced in conjunction with the type of object S or foreign matter, Therefore the effective removal of foreign matter can easily be carried out.In addition, by unloading table side brush roll unit 4 on self-retaining device 1, can make with The opposite aftermentioned opposite metallic roll 60 of brush roll 41 is exposed and is easy to carry out replacement or cleaning, therefore maintainability is excellent.In addition, About the brush roll 41 etc. being contained in framework 40, compared with the situation that assembling is fixed on fixator 1, maintenance also becomes easy.

(framework)

Framework 40 is receiving brush roll 41 etc. to carry out blocking, and can on fixator 1 handling person.The framework 40 is wrapped It includes:Upstream plate and downstream plate, are arranged in opposite directions in a manner of substantially vertical with conveyance plane;A pair of side plates, by upstream plate and downstream plate Side end be connected to each other;Top plate is connected to the upper end of upstream plate, downstream plate and a pair of side plates;And bottom plate, it is connected to Swim the lower end of plate, downstream plate and a pair of side plates.A pair of of the grip part 40A separated in the direction of the width is provided in top plate. A pair of of grip part 40A is the user in the handling of table side brush roll unit 4.It is provided with opening portion 40B, aftermentioned brush in the soleplate The front end of the bristle 41C of roller 41 is protruded from the opening portion 40B.Furthermore as the material for constituting framework 40, have no special limit System, such as stainless steel can be enumerated etc..

(brush roll)

Brush roll 41 is to be connected on the object S transported and remove the foreign matter of table side surface S1, particularly bigger 1st brush roll of the table side of foreign matter (such as foreign matter of mm size).The brush roll 41 is in the band by the voltage applying mechanism In the state of electricity, by the power from external drive source, in the direction (rotation clockwise of Fig. 2 inverted relative to conveyance direction D Turn direction) on, driving is rotated by rotary shaft substantially vertical with conveyance direction D and substantially parallel with conveyance plane.Furthermore it brushes Roller 41 preferably in the energized state, rotates up driving, but also can be in uncharged shape in the side inverted relative to conveyance direction D Driving is rotated under state.

As shown in figure 3, such brush roll 41 has columned plug 41A and is implanted into plug 41A via following layer 41B Peripheral surface on multiple bristle 41C.

Plug 41A is formed such as conductive material by metal, carbon material, synthetic resin composite material.As The upper limit of the volume resistivity of the conductive material, for example, 10⁵Ωcm.By aftermentioned voltage applying mechanism come Voltage is applied to the plug 41A.In addition, compared with aftermentioned table side cleans the clearer 51 of roller unit 5, it is applied to plug Voltage in 41A is set in a manner of becoming same polarity and absolute value becomes larger.

As the lower limit for the voltage being applied in plug 41A, preferably -800V, more preferably -600V.On the other hand, make For the upper limit of the voltage, preferably -200V, more preferably -300V.

As bristle 41C, preferably foreign matter is easy physically attachment person, such as the person that can enumerate synthetic resin fiber. In addition, as bristle 41C, can preferably carry to adsorb the charge for the foreign matter being attached on the table side surface S1 of object S Person, such as the synthetic resin fiber containing conductive materials such as carbon black, carbon fiber, metal powder, metal whiskers can be properly used Person processed.

The section shape of bristle 41C is not particularly limited, such as can be enumerated:Round, elliptical shape, star shapes etc.. In addition, the shape of bristle 41C is also not particularly limited, such as can enumerate:Linearly, wave shape, by curve and Straight Combination The shape etc. constituted.Furthermore the surface area of bristle 41C is bigger, easier adsorption of foreign matter.Therefore, as bristle 41C, can make With the section shape that can ensure greatly by the surface area person that is singular configuration, such as star shapes person.

Brush roll 41 rotates driving in a manner of becoming the direction relative to the conveyance direction D reversion of object S, thus can be The foreign matter of attachment is swept on the table side surface S1 of object S and it is made to be attached on bristle 41C.In addition, applying electricity to brush roll 41 It presses to make its electrification, thus the adsorption capacity caused by electric field force can be made to play a role, and effectively make the table side table of object S The foreign matter of face S1 is adsorbed on bristle 41C.In particular, by making brush roll 41 charge, even if there are hole or surfaces on object S In the case of recess, the foreign matter in the hole or recess also can be efficiently removed.In turn, by applying to plug 41A The voltage of the range can more effectively be such that bigger foreign matter is adsorbed on brush roll 41 from the table side surface S1 of object S.

In turn, the brush roll 41 of table side brush roll unit 4 by with bristle 41C, in the direction inverted relative to conveyance direction D It upper rotation and is applied in and is comparably same polarity and the big voltage of absolute value with clearer 51, it can be from the table side surface S1 of object S The upper millimetre-sized bigger foreign matter of removal.

As brush roll 41 towards the lower limit of the average crimping amount in object S, preferably 0.3mm, more preferably 0.5mm.Separately On the one hand, the upper limit as the average crimping amount, preferably 1.5mm, more preferably 1mm.If the average crimping amount is less than Then there is the anxiety of the foreign matter of sweep object S table side surface S1 with being unable to fully in the lower limit.If on the contrary, described average Crimping amount is more than the upper limit, then the resistance between the table side surface S1 of bristle 41C and object S becomes larger, therefore there are objects The anxiety of the conveyance speed decline of object S, and there is the anxiety of the table side surface S1 of damage object S.Furthermore " crimping amount " is bristle 41 towards the amount of being absorbed in object S, and refers to the table on surface and object S that plug 41A is subtracted from the average length of bristle 41C Value obtained by the minimum range of side surface S1.

The lower limit of peripheral speed as brush roll 41, preferably 1m/min, more preferably 2m/min.On the other hand, as The upper limit of the peripheral speed of brush roll 41, preferably 30m/min, more preferably 15m/min.If the less than institute of the peripheral speed of brush roll 41 Lower limit is stated, then there is the anxiety of the foreign matter of sweep object S table side surface S1 with being unable to fully.If on the contrary, the circle of brush roll 41 Circular velocity is more than the upper limit, then the resistance between the table side surface S1 of bristle 41C and object S becomes larger, therefore there are objects The anxiety of the conveyance speed decline of object S, and there are the anxieties that the table side surface S1 of object S is damaged.In addition, the circumference speed of brush roll 41 It is preferably 25% to spend B relative to the upper limit of the ratio (B/W) of the conveyance speed W of object S.If the conveyance relative to object S The peripheral speed B of speed W, brush roll 41 are excessive, then exist and brush roll 41 is difficult to be utilized to sweep the anxiety of bigger foreign matter.

(recycling roll)

Recycling roll 42 is substantially parallel with brush roll 41 and is abutted with bristle 41C, and recycling is attached on the bristle 41C 1st recycling roll of the table side of foreign matter.The diameter of the recycling roll 42 is smaller than brush roll 41, in the top of brush roll 41, is configured at than brush Roller 41 is more located at conveyance direction upstream side.By configured in this way, the foreign matter scraped using aftermentioned blade 43 can be reduced again It is attached to the first-class harmful effect of the equal components of recycling roll 42.

As shown in figure 4, recycling roll 42 has:It the roller body 42A that is formed by conductive material and is laminated on its peripheral surface Corrosion resistant layer 42B.As the material of roller body 42A, as long as conductive material, then be not particularly limited, such as can enumerate The metal materials such as stainless steel, copper, aluminium, or electric conductivity tree made of the conductive materials such as electroconductive stuffing are allocated into synthetic resin Fat material etc., among these, preferably metal material.As corrosion resistant layer 42B, can be set as by nickel plating or gold-plated equal platings Reason is formed by metallization layer.But as recycling roll 42, it is possible to use whole to be difficult to the electric conductivity aoxidized by stainless steel etc. Material is formed, and does not have corrosion resistant layer 42B person.

The recycling roll 42 by the voltage applying mechanism in the state of being charged, what is inverted relative to brush roll 41 On direction (Fig. 2's rotates clockwise direction), driving is rotated by the power from external drive source.In this way, by that will return The direction of rotation for receiving roller 42 is set as the direction inverted relative to brush roll 41, and the organic efficiency of foreign matter can be improved.As relative to brush The lower limit of the multiplying power of the rotary speed of the recycling roll 42 of the rotary speed of roller 41, preferably 1.0 times.On the other hand, as described The upper limit of the multiplying power of rotary speed, preferably 1.5 times.Foreign matter can be effectively set to be moved in recycling roll 42 from brush roll 41 as a result,. But the direction of rotation of recycling roll 42 is alternatively the direction rotated forward relative to brush roll 41.

Relative to towards the application voltage in brush roll 41, making to become same polarity and absolute value towards the application voltage in recycling roll 42 It gets higher.As towards in recycling roll 42 application voltage with towards the lower limit for applying alive absolute value of the difference in brush roll 41, preferably For 200V, more preferably 300V.On the other hand, the upper limit as the absolute value of the difference, preferably 600V, more preferably 500V.In addition, applying alive lower limit as towards in recycling roll 42, preferably -1,500V, more preferably -1,200V.It is another Aspect applies the alive upper limit, preferably -400V, more preferably -600V as described.By relative to towards in brush roll 41 Apply voltage, makes to become same polarity towards the application voltage in recycling roll 42 and absolute value is got higher, the bristle 41C relative to brush roll 41 Current potential, the current potential of the peripheral surface of recycling roll 42 is same polarity and absolute value is got higher, therefore can make to be attached to different on brush roll 41 Object is adsorbed on the peripheral surface of recycling roll 42.In particular, by the way that the alive difference of applying of recycling roll 42 and brush roll 41 is set as described Range, and then it will be set as the range towards the application voltage in recycling roll 42, the foreign matter being attached on brush roll 41 can be made effectively It is adsorbed on the peripheral surface of recycling roll 42.The upper limit of resistance as recycling roll 42, preferably 10⁸Ω.By by recycling roll 42 Resistance be set as 10⁸Even if Ω hereinafter, the case where being surface-treated to recycling roll 42 or formed envelope in the case of, It can be made effectively to charge by the application of voltage.

(blade)

Blade 43 is the 1st blade that foreign matter is scraped and removed from recycling roll 42.The blade 43 is, for example, to have elasticity Rectangular plate-like component.

Front end is set as free end by the blade 43, and base end part is fixed on blade support 43a.Blade 43 The front end as free end be connected on the peripheral surface of recycling roll 42 throughout the axis direction of recycling roll 42.Blade 43 is preferred To be connected in a slanted state on the peripheral surface of recycling roll 42.In blade 43 and the junction of recycling roll 42, as blade 43 With the lower limit at the inclination angle of the imaginary tangent line of the periphery of recycling roll 42, preferably 5 °, more preferably 15 °.On the other hand, as institute State the upper limit at inclination angle, preferably 30 °, more preferably 25 °.In the case of the angle less than lower limit, exist as follows Anxiety:Foreign matter can not be fully scraped using blade 43 due to the deficiency of crimp force, and generate the foreign matter for the blade 43 that nuzzles up again Secondary be attached on object S transfers phenomenon again.On the other hand, in the case where the inclination angle is more than the upper limit, exist Blade 43 is involved in the anxiety crispaturaed into the rotation of recycling roll 42.Therefore, in such a way that the inclination angle becomes the range So that blade 43 is connected in recycling roll 42, thus effectively can scrape foreign matter from recycling roll 42.In addition, blade 43 is configured at ratio Recycling roll 42 is more located at conveyance direction upstream side, that is, is configured at the top of carrying roller 45.Carrying roller 45 can be effectively applied flexibly as a result, Top space, and can make table side brush roll unit 4 minimize.In addition, can be used aftermentioned towards the extraction of conveyance direction upstream side The composition of foreign matter recoverer 44, and promote convenience.

It as the material of blade 43, is not particularly limited, but preferably there is elastic, more preferably synthetic resin.Tool For body, in order to assign appropriate elasticity, preferably formed by synthetic resin such as such as thermoset polyurethanes.In addition, In order to mitigate with the friction of the recycling roll 42 abutted, among blade 43, at least front end can utilize fluororesin etc. contain fluorine Compound carries out fluorine coating.The lower limit of average thickness as fluorine coating, preferably 5 μm.On the other hand, as described average The upper limit of thickness, preferably 15 μm.If the less than lower limit of average thickness, there is friction mitigation effect and be unable to fully ground Show, blade 43 is easy the anxiety being involved in in the rotation of recycling roll 42.On the other hand, it is more than on described in the average thickness In the case of limit, there is the anxiety for the breakage for generating fluorine coating.Furthermore the shape of blade 43 is not limited to the rectangular plate-like of Fig. 2, Or it bends until the base end part to front end or the shape of bending.

(foreign matter recoverer)

Foreign matter recoverer 44 is recycling and accommodates the 1st foreign matter recycling of the foreign matter scraped from recycling roll 42 using blade 43 Portion.The foreign matter recoverer 44 is disposed in the lower section of the front end of blade 43 and is more located at conveyance direction upstream side than brush roll 41. Moreover, foreign matter recoverer 44 is embedded in the opening portion of the upstream plate of framework 40, and can be from the opening portion towards conveyance direction on Swim side extraction.The upstream side of foreign matter recoverer 44 is provided with grip part 44A, so that foreign matter is recycled using the grip part 44A The disengaging in portion 44 facilitates.In addition, foreign matter recoverer 44 is towards conveyance direction upstream side because can extract out, therefore can maintain table side brush roll State that unit 4 is fixed on fixator 1 and recycling foreign matter of releasing, convenience are excellent.

(carrying roller)

Carrying roller 45 is to guide to move in into cleaning mechanism 3 together with the help roll 62 of the opposite roller unit of aftermentioned back side 6 Object S mobile person.In addition, in order to make object S enter to the brush roll relative to conveyance direction D reversions with power appropriate 41 lower section, carrying roller 45 and help roll 62 also have to assign the function of propulsive force to object S.The carrying roller 45 with The help roll 62 of the opposite roller unit of aftermentioned back side 6 configures in opposite directions.Carrying roller 45 is in the direction rotated forward relative to conveyance direction D It is rotated on (direction of rotation counterclockwise of Fig. 2).Herein, when sandwiching the power mistake of object S using help roll 62 and carrying roller 45 Qiang Shi is squeezed on object S there are foreign matter and is difficult to the anxiety removed or the anxiety of damage object S.In view of these feelings Condition, carrying roller 45 are arranged in the way of pressing help roll 62 by the power of 0.49N or so.But the pressing force is contemplated that The material of object S or thickness etc. and suitable for adjustment.In addition, the hardness as object S is relatively high, it can be merely with help roll 62 When making it into the lower section of brush roll 41, carrying roller 45 can be also omitted from the cleaning device.

As shown in Figures 5 and 6, carrying roller 45 has mandrel 45A and multiple resin portion 45B, and the resin portion 45B is layer The annular component being laminated on the periphery of the mandrel 45A, and separate along the axis direction of mandrel 45A and configure.Such as Fig. 5 and Fig. 6 institutes Show, resin portion 45B has bumps on peripheral surface.In this way, by that will have irregular multiple resin portion 45B points on peripheral surface Every configuration, the contact area of the table side surface S1 of carrying roller 45 and object S can be reduced.As a result, when by object S move in When in cleaning mechanism 3, it can inhibit object S and blocked between carrying roller 45 and help roll 62.

Mandrel 45A is formed such as the metal by stainless steel, copper, aluminium.Resin portion 45B is such as the shape by polyurethanes At.As the polyurethanes, such as can enumerate:Acrylic acid mixed amino formic acid esters, fluorine mixed amino formic acid esters etc..This Place, " acrylic acid mixed amino formic acid esters " is using polyester polyurethane or polyether polyurethane as the tree of principal component Fat, and refer to the mixture of (1) thermoplastic polyurethanes and silica acrylic acid copolymer resins, (2) include acrylic resin (such as comprising EUDRAGIT L100 chemical combination is grafted made of grafted amino group ethyl on main chain Object) and thermoplastic polyurethanes mixture, or (3) include that acrylic resin, polyurethanes and fluorine system surface apply The mixture of cloth agent." fluorine mixed amino formic acid esters " is using polyurethanes as the resin of principal component, and refers to by thermoplastic Property polyurethanes and the carbamate fluo-copolymer person of mixing.So-called " principal component ", refer to content it is most at Divide, for example, the ingredient containing 50 mass % or more.

(height adjustment mechanism)

Table side brush roll unit 4 is preferably constituted by available height regulating mechanism in a manner of adjusting height.In this way, can profit The height of table side brush roll unit 4 is adjusted with height adjustment mechanism, and crimping amount of the brush roll 41 for object S is thus adjusted, And the removal of big foreign matter is efficiently compared using brush roll 41.

Fig. 7~Fig. 9 indicates that table side brush roll unit 4 is disposed in fixation via the height adjustment mechanism of table side brush roll unit 4 State on the tabular component 10 of device 1 an example (fixator 1, height adjustment mechanism and table side brush roll unit 4 framework 40 top Component illustration omitted other than plate 103).The height adjustment mechanism of Fig. 7~Fig. 9 mainly has:Generally plate like fixing component 101, it is fixed on the tabular component 10 of fixator 1;Sliding component 102 is placed on the upper surface of the fixing component 101, It can be moved horizontally and moved up and down along conveyance direction D;And lid 104, component 101 is coated and fixed.Table side brush roll unit 4 top plate 103 supports long side direction end using sliding component 102, and is moved up and down with sliding component 102.In Fig. 7 In the height adjustment mechanism of~Fig. 9, can be arranged in turn be fixed on tabular component 10, and sliding component 102 can be measured etc. hang down The gauge of straight position, or horizontal position to stationary slide 102 adjustment tool.Fig. 7 is indicated with table side brush roll unit 4 Height become least way adjusting state.Fig. 8 and Fig. 9 indicates to become maximum side with the height of table side brush roll unit 4 The state that formula is adjusted.

In a part for the upper surface of fixing component 101, it is formed near the substantial middle of conveyance direction D to downstream The inclined-plane highly gradually increased until side (being right side in Fig. 7 and Fig. 8).On the other hand, the upper surface of sliding component 102 becomes big Horizontal plane is caused, but is formed in a part for lower surface near the substantial middle of conveyance direction D until downstream side height The inclined-plane gradually increased.The inclined-plane of the upper surface of fixing component 101 and the inclined-plane of the lower surface of sliding component 102 are having the same Gradient is simultaneously docked.It therefore, can be on one side by sliding component 102 by making sliding component 102 be moved horizontally along conveyance direction D Upper surface maintains to make height relief on one side at approximate horizontal surface state.The top plate supported by sliding component 102 is changed as a result, 103 height (the upper end distance L1 and distance L2 of the upper surface of top plate 103 and tabular component 10), and pass through the top plate 103 height is changed is adjusted to desired height by table side brush roll unit 4.

In the height adjustment mechanism of Fig. 7~Fig. 9, the bigger of sliding component 102 can be moved horizontally infinitely (steplessly) it is converted into the finer of top plate 103 to move up and down, therefore can correspond to the type or thickness of object S And the infinitely height of fine adjustment brush roll unit 4.In addition, the height adjustment mechanism of Fig. 7~Fig. 9 is because that can be disposed in fixator 1 Near upper end, therefore the space of fixator 1 can be effectively applied flexibly, and workability when height adjusting is excellent.

But mode or structure of the height adjustment mechanism of brush roll unit 4 etc. are not limited by Fig. 7~Fig. 9.As other The method that height is adjusted, such as can enumerate:By consolidating for brush roll unit 4 that the spacer of defined height is configured in fixator 1 Determine the method in portion, or protruding portion is set in table side brush roll unit 4, and will be chimeric with the protruding portion along upper and lower directions Rail-like component be configured on fixator 1, and can infinitely adjust the method etc. of the mounting height of table side brush roll unit 4.

(table side cleaning roller unit)

It is the table side surface that object S is removed using the clearer 51 being contained in framework 50 that table side, which cleans roller unit 5, The unit of the foreign matter of S1.In the framework 50 that the table side cleans roller unit 5, in addition to clearer 51, brush roll is mainly contained 52, recycling roll 53, blade 54 and foreign matter recoverer 55, it is whole through blocking.Table side cleaning roller unit 5 is suitable for comparing mm size The removal of small fine foreign matter is more adjacent on the position in conveyance direction downstream side than table side brush roll unit 4, can load and unload Ground is disposed on fixator 1.Herein, clearer 51 is to effectively make fine foreign matter move on the surface thereof, with it is aftermentioned Opposite resin roll 61 apply stressed mode from the two sides of object S together and set.Therefore, if by table side clearer list In the case of the upstream side of table side brush roll unit 4, there are clearers 51 to squeeze bigger foreign matter and be crimped on 5 configuration of member On object S, even if can not also remove the anxiety of foreign matter described in light using brush roll 41.Therefore, table side cleaning roller unit 5 is preferably matched It is placed in the downstream side of table side brush roll unit 4.

In this way, by the way that table side is cleaned the releasably blocking on fixator 1 of roller unit 5, can be easy on self-retaining device 1 Unload table side cleaning roller unit 5 in ground.As a result, changing clearer 51 necessarily corresponding to the type of object S or foreign matter In the case of can together be replaced together with unit, therefore can easily carry out the effective removal of foreign matter.In addition, passing through self-retaining device 1 On unload table side cleaning roller unit 5, can make with the opposite aftermentioned opposite resin roll 61 of clearer 51 equal expose and easily into Row is replaced or cleaning, therefore maintainability is excellent.In addition, about the clearer 51 etc. being contained in framework 50, by being contained in frame Blocking is carried out in body 50, compared with the situation that assembling is fixed on device, maintenance also becomes easy.

(framework)

Framework 50 is receiving clearer 51 etc. to carry out blocking, and can on fixator 1 handling person.With table side brush roll list Similarly, the framework 50 has upstream plate, downstream plate, a pair of side plates, top plate and bottom plate to member 4.It is provided with and is removing in top plate Send a pair of of the grip part 50A separated in width direction.A pair of of grip part 50A is utilized when table side cleans the handling of roller unit 5 Person.It is provided with opening portion 50B in the soleplate, a part for clearer 51 is protruded from the opening portion 50B.Downstream plate from top extremely It is bent until lower section.Furthermore there is no particular restriction for the material of composition framework 50, such as can properly use the metals such as stainless steel.

(clearer)

Clearer 51 be the table side surface S1 for removing object S foreign matter, particularly finer foreign matter (such as than milli The small foreign matter of meter ruler cun) person, in the state that peripheral surface is charged by the voltage applying mechanism, relative to conveyance side On the direction (direction of rotation counterclockwise of Fig. 2) rotated forward to D, by it is substantially vertical with conveyance direction D and with conveyance plane it is substantially flat Capable rotary shaft drives to rotate.As shown in Figure 10, the clearer 51 has plug 51A, is formed in the plug 51A The resilient roller of the outer layer portion 51C of the peripheral surface of internal layer portion 51B and the cladding internal layer portion 51B on peripheral surface.

Plug 51A is formed as cylindric by conductive material.As the conductive material for plug 51A, such as Metal material etc. can be enumerated, specifically, in the same manner as the roller body 42A of the recycling roll 42 of table side brush roll unit 4, can be enumerated not Become rusty steel, copper, aluminium etc..

Internal layer portion 51B is to ensure that the consolidating for object S caused by clearer 51 and aftermentioned opposite resin roll 61 Fixed pressing force or gripping width person.That is, internal layer portion 51B is to ensure that desired contiguity power or contact width for object S Degree, and help efficiently to remove finer foreign matter person from its table side surface S1.As the formation internal layer portion 51B Material, it is however preferred to have the resin material of elasticity and electric conductivity, more preferably polyurethanes, silicone resin, natural rubber The resin material containing resin component and carbon such as glue, synthetic rubber.As the polyurethanes, can properly use and institute State the identical person of polyurethanes of the resin portion 45B of carrying roller 45.As the material for forming internal layer portion 51B, and then more preferably For the conductive elastomer containing Polyester polyurethanes and carbon black.Using these materials, clearer can be fully ensured 51 elasticity avoids that foreign matter being exceedingly extruded on object S due to clearer 51, and inhibits under the removal efficiency of foreign matter Drop.

Outer layer portion 51C is to play following actor:The adhesion with object S is ensured on one side, or is not hindered appropriate The imparting of surface potential, and ensure the soil resistance or abrasion performance of clearer 51, it is avoided on one side by bad caused by moisture etc. It influences.As the material of the outer layer portion 51C, as long as in order to adsorb the table side table for being attached to object S by electric field force Foreign matter on the S1 of face and can the person of electrification, such as acrylic acid mixing polyurethanes or fluorine mixing polyurethane can be enumerated The polyurethanes such as ester or silicone resin, natural rubber, synthetic rubber etc., among these, preferably polyurethanes. In this way, form outer layer portion 51C by polyurethanes, thus with by silicone resin or butyl rubber etc. come phase the case where formation Than abrasion performance is promoted, in addition, the dirt of the clearer 51 caused by the addition by plasticiser or low molecular weight compound can be reduced Dye.In addition, outer layer portion 51C is preferably hardness than internal layer portion 51B high, specifically, it is preferable that being Japanese Industrial Standards (Japanese Industrial Standards, JIS)-A hardness be 50 ° or more.JIS-A hardness by outer layer portion 51C is 50 ° or more, can Fully ensure the abrasion performance of clearer 51.

Material by using acrylic acid mixing polyurethanes as outer layer portion 51C is easy the table side from object S Electronegative foreign matter is removed on the S1 of surface.On the other hand, the material by using fluorine mixing polyurethanes as outer layer portion 51C Matter is easy to keep clearer 51 negatively charged, and is easy to remove positively charged foreign matter from object S.

Furthermore if the adhesion strength of outer layer portion 51C is too strong, when the thickness of object S is thin, it is involved in pair there are clearer 51 As the anxiety of object S.Therefore, object S is involved in order to prevent, is preferably formed on the surface of clearer 51 (outer layer portion 51C) There is microspike.As the specific method for forming the microspike, the preferably thermoplastic in the formation for outer layer portion 51C Property the resin materials such as polyurethanes in allotment as the particle of the raw material of the microspike method.As the grain Son can be amorphous particles or unsetting particle, but for making the viewpoint that the protrusion shape of microspike homogenizes, excellent It is selected as the spherical particle of setting.The lower limit of average grain diameter as the spherical particle, preferably 2 μm, more preferably 2.5 μm. On the other hand, the upper limit as the average grain diameter, preferably 5 μm, more preferably 4.5 μm.In addition, in the spherical particle In, as utilization and the coefficient of alteration (CV calculated by the relevant standard deviation of average grain diameter (σ) divided by average grain diameter (Coefficient of Variation) value) lower limit, preferably 3.0%, more preferably 3.5%.On the other hand, as institute State the upper limit of coefficient of alteration, preferably 5.0%, more preferably 4.5%.Herein, so-called " average grain diameter ", refers to being spread out using laser Penetrate the volume average particle size (Mv) calculated by scattering method.

The spherical particle preferably more hard than thermoplastic polyurethanes.But the spherical particle is if such as Exceedingly hard person, then presence damage the anxiety of object S, therefore preferably resin person like that for bead or ceramic bead.As Form the resin of the hard of the spherical particle, such as melmac or acrylic resin can be enumerated etc., wherein preferably Melmac.

The lower limit of average thickness as outer layer portion 51C, preferably 2 μm, more preferably 5 μm.On the other hand, as outer layer The upper limit of the average thickness of portion 51C, preferably 500 μm, more preferably 300 μm.If the average thickness of outer layer portion 51C is less than described Lower limit, then presence can not be such that the surface of clearer 51 fully charges, and obtain the anxiety of the adsorption effect of foreign matter with being unable to fully. On the contrary, if the average thickness of outer layer portion 51C is more than the upper limit, in the presence of the good band that can not be obtained to adsorption of foreign matter The anxiety of electrical characteristics.

Clearer 51 is charged by using the voltage applying mechanism, and is endowed surface potential (surface charge).That is, Clearer 51 is connected in the state of so that surface is charged on the table side surface S1 of object S, is adsorbed and is gone using electric field force Except the finer foreign matter being attached on the table side surface S1 of object S.In this way, by making clearer 51 charge, even if On object S there are hole or depression in the surface in the case of, also can efficiently remove in the hole or recess in foreign matter.

Relative to the application voltage in the brush roll 41 towards table side brush roll unit 4, make to become towards the application voltage in clearer 51 It is lower at same polarity and absolute value.Alive lower limit, for example, -400V are applied as towards in clearer 51, preferably - 200V.On the other hand, for example less than 0V of application voltage, preferably -50V or less.In this way, by relative to towards table side brush roll Application voltage in the brush roll 41 of unit 4 makes to become same polarity towards the application voltage in clearer 51 and absolute value is lower, can be certainly Finer foreign matter is removed on the table side surface S1 of object S.In particular, by will be set as towards the application voltage in clearer 51 The range can efficiently remove finer foreign matter from the table side surface S1 of object S.Furthermore as clearer The upper limit of 51 resistance, preferably 10⁸Ω.Resistance by clearer 51 is 10⁸Ω hereinafter, can be such that it has upon application of a voltage The electrification of effect ground.

Furthermore in order to improve the organic efficiency of fine foreign matter, clearer 51 be preferably set to opposite resin roll Apply discharge head appropriate to object S between 61.It is applied to object S using clearer 51 and opposite resin roll 61 In pressure can for example be set as line pressure:2.4kg/250mm.Herein, 250mm is the outer layer portion of the clearer 51 in present embodiment The axis direction length of 51C.In addition, clearer 51 also has both assigns propulsion appropriate with 61 1 object S in the same direction of opposite resin roll The function of power.It is easy that object S is made to enter to the aftermentioned back of the body rotated up in the side inverted relative to conveyance direction D as a result, The lower section of the brush roll 71 of side brush roller unit 7.

(brush roll)

Brush roll 52 is the 2nd brush roll of the table side for recycling the foreign matter that clearer 51 is removed from object S, in clearer 51 Surface, be arranged in a manner of substantially parallel with clearer 51 and abut.The brush roll 52 in the energized state, relative to On the direction (direction of rotation counterclockwise of Fig. 2) that clearer 51 inverts, driving is rotated by the power from external drive source. Such brush roll 52 has columned plug 52A and is implanted into more on the peripheral surface of the plug 52A via following layer 52B A bristle 52C (with reference to Fig. 3), details is identical as the plug 41A of the brush roll 41 of table side brush roll unit 4 and bristle 41C, because This omits repeated explanation.In addition, relative to towards the application voltage in clearer 51, make (to apply towards the application voltage in brush roll 52 Voltage into plug 52A) become same polarity and absolute value is got higher.As specifically towards applying in brush roll 52 it is alive under Limit, in the same manner as the brush roll 41 of table side brush roll unit 4, preferably -800V, more preferably -600V.On the other hand, as described Apply the alive upper limit, preferably -200V, more preferably -300V.

(recycling roll)

Recycling roll 53 is the 2nd recycling roll of the table side for recycling the foreign matter recycled on 52 automatically cleaning roller 51 of brush roll, in brush roll 52 top is arranged in a manner of substantially parallel with brush roll 52 and abut with bristle 52C.The recycling roll 53 is passing through the electricity Pressure applying mechanism and in the state of charging, on the direction (direction of rotation counterclockwise of Fig. 2) inverted relative to brush roll 52, pass through Power from external drive source drives to rotate.The details of recycling roll 53 can be set as and the table side brush roll unit 4 Recycling roll 42 is identical, therefore omits repeated explanation.

Relative to towards the application voltage in brush roll 52, making to become same polarity and absolute value towards the application voltage in recycling roll 53 It gets higher.As towards in recycling roll 53 application voltage with towards the lower limit for applying alive absolute value of the difference in brush roll 52, preferably For 200V, more preferably 300V.On the other hand, the upper limit as the absolute value of the difference, preferably 600V, more preferably 500V.In addition, applying alive lower limit as towards in recycling roll 53, preferably -1,500V, more preferably -1,200V.It is another Aspect applies the alive upper limit, preferably -400V, more preferably -600V as described.By relative to towards in brush roll 52 Apply voltage, makes to become same polarity towards the application voltage in recycling roll 53 and absolute value is got higher, the electricity with the bristle 52C of brush roll 52 Position is compared, and the current potential of the peripheral surface of recycling roll 53 is same polarity and absolute value is got higher, therefore can make to be attached to different on brush roll 52 Object is adsorbed on the peripheral surface of recycling roll 53.In particular, by the way that the alive difference of applying of recycling roll 53 and brush roll 52 is set as described Range, and then it will be set as the range towards the application voltage in recycling roll 53, the foreign matter being attached on brush roll 52 can be made effectively It is adsorbed on the peripheral surface of recycling roll 53.

Recycling roll 53 is configured at more is located at conveyance direction downstream side than brush roll 52.Even if the diameter ratio of recycling roll 53 as a result, Brush roll 52 is small, and aftermentioned blade 53 can also be used and scrape foreign matter to conveyance direction downstream side, and can inhibit foreign matter and inhale again It invests on brush roll 52.

The direction of rotation of recycling roll 53 can be the either direction in the direction in the direction and reversion that are rotated forward relative to brush roll 52, excellent It is selected as being set as the easy direction of rotation for recycling foreign matter from peripheral surface using aftermentioned blade 54.In the present embodiment, such as Shown in Fig. 2, the direction (direction of rotation counterclockwise of Fig. 2) that the direction of rotation of recycling roll 53 is set as inverting relative to brush roll 52, The organic efficiency of the foreign matter using blade 54 can be improved.The rotation speed of recycling roll 53 as the rotary speed relative to brush roll 52 The lower limit of the multiplying power of degree, preferably 1.0 times.On the other hand, the upper limit as the multiplying power of the rotary speed, preferably 1.5 times. Foreign matter can be effectively set to be moved in recycling roll 53 from brush roll 52 as a result,.

(blade)

Blade 54 is the 2nd blade that taking foreign body is scraped from recycling roll 53.The blade 54 and the blade support for supporting it The details of 53a is identical as the blade 43 of the table side brush roll unit 4 and blade support 43a.

(foreign matter recoverer)

Foreign matter recoverer 55 is the foreign matter person that recycling and receiving are scraped using blade 54 from recycling roll 53.The foreign matter Recoverer 55 is disposed in the lower section of the front end of blade 54 and is more located at conveyance direction downstream side than brush roll 52.Moreover, foreign matter returns In the opening portion for receiving the downstream plate that object 55 is embedded in framework 50, and it can be taken out towards conveyance direction downstream side via the opening portion Go out.The downstream side of foreign matter recoverer 55 is provided with grip part 55A, makes foreign matter recoverer 55 using the grip part 55A Disengaging facilitates.In addition, foreign matter recoverer 55 is towards conveyance direction downstream side because can extract out, therefore can maintain that roller unit 5 will be cleaned The state that is fixed on fixator 1 and for recycling foreign matter this point of releasing, convenience is excellent.

(height adjustment mechanism)

Table side cleaning roller unit 5 is preferably constituted by available height regulating mechanism in a manner of adjusting height.In this way, sharp The height that table side cleans roller unit 5 is adjusted with height adjustment mechanism, pressing of the clearer 51 for object S is thus adjusted Power (gripping width), as a result, the removal of fine foreign matter can be carried out expeditiously.

As table side clean roller unit 5 height adjustment mechanism concrete example, such as can be used with as table side brush roll list Identical mechanism of person etc. illustrated in the height adjustment mechanism of member 4.

As described above, table side brush roll unit 4 and table side cleaning roller unit 5 can load and unload, therefore can be independent in each unit Height adjustment mechanism is arranged in ground.Therefore, even if the optimum crimping condition of the 41 object S of brush roll in table side brush roll unit 4 With table side clean roller unit 5 clearer 51 for object S it is optimum crimp condition difference in the case of, the cleaning Device can also make respective crimped status optimum.

(the opposite roller unit of back side)

The opposite roller unit of back side 6 is the clearer 51 1 that roller unit 5 is cleaned with the brush roll 41 of table side brush roll unit 4 and table side With the transport path person of regulation object S, it is disposed in the back side (lower section of transport path) of object S.The back side is opposite Roller unit 6 mainly has:Including the opposite metallic roll 60 of the 1st opposite roller as back side and the 2nd opposite roller as back side The opposite roller of a pair and help roll 62 of opposite resin roll 61.For the viewpoint of maintainability, the opposite roller unit of back side 6 is preferably It is releasably installed on fixator 1.

Herein, in order to accurately control crimping amounts of the bristle 41C for object S of brush roll 41, it is advantageous that in object The hardness of the 1st opposite roller of the lower surface holding object S of object S is high.Therefore, it is to compare the gold of hard by opposite metallic roll 60 Belong to roller, the bristle 41C of the brush roll 41 of table side brush roll unit 4 can be made suitably to be connected on object S, and from its table side surface S1 On be effectively removed bigger foreign matter.On the other hand, clearer 51 is in order to make fine foreign matter expeditiously be adsorbed in its table On face, it is necessary to apply pressure appropriate to object S between the 2nd opposite roller, if but excessively apply pressure, by foreign matter pressure It is connected on object S, thus there is the anxiety for being difficult to recycle.Therefore, as the 2nd opposite roller, such as the hardness as metal is high Roller be not appropriate for, it is however preferred to have the resin roll of substantially same hardness with clearer 51.Therefore, pass through opposite resin roll 61 For flexible resin roll (resilient roller), it can apply to object S between the clearer 51 that table side cleans roller unit 5 and fit When pressure improve adhesion, and ensure suitable gripping width, therefore using clearer 51 and from the table of object S Fine foreign matter is efficiently removed on the S1 of side surface.

(opposite metallic roll)

Opposite metallic roll 60 is opposite with the brush roll 41 of table side brush roll unit 4 via object S, and to be connected to object Mode on object S is disposed in the 1st opposite roller of back side of the underface of brush roll 41.The opposite metallic roll 60 is relative to object Driving is rotated on the direction (Fig. 2's rotates clockwise direction) that the conveyance direction D of S is rotated forward.That is, opposite metallic roll 60 relative to The side that the brush roll 41 of table side brush roll unit 4 inverts rotates up driving.The details and table side brush roll list of opposite metallic roll 60 The recycling roll 42 of member 4 is identical.But opposite metallic roll 60 is electrically connected by the voltage applying mechanism with ground, as a result, The electric field for being suitable for removing foreign matter can be generated when brush roll 41 charges.

The back surface S2 of damage object S in order to prevent, can also be coated with amino first on the surface of opposite metallic roll 60 Acid ester resin etc..When carrying out surface treatment to opposite metallic roll 60 or when being formed with envelope, the resistance of opposite metallic roll 60 Preferably 10⁸Ω or less.Resistance by opposite metallic roll 42 is 10⁸Ω is hereinafter, be easy to keep opposite metallic roll 42 and ground electrical Connection.

As described above, brush roll 41 must accurately pilot brush towards the amount of being absorbed in object S.Therefore, opposite with brush roll 41 The 1st opposite roller of back side must steadily support object S.Therefore, as the 1st opposite roller of back side, the preferably high person of hardness, tool For body, preferably opposite metallic roll 60 as in the present embodiment.But the 1st opposite roller of back side is not necessarily required to be metallic roll, Also electroconductive resin roller with high hardness etc. can be used in the range of controllable brush is towards the amount of being absorbed in object S.

(opposite resin roll)

The clearer 51 that opposite resin roll 61 cleans roller unit 5 with table side via object S is opposite, and to be connected to pair As the mode on object S is disposed in the underface of clearer 51.The opposite resin roll 61 is in the conveyance direction relative to object S Driving is rotated on the direction (Fig. 2's rotates clockwise direction) that D is rotated forward.That is, opposite resin roll 61 relative to clearer 51 just The side turned rotates up driving.The details of opposite resin roll 61 is roughly the same with the table side cleaning clearer 51 of roller unit 5. But when forming the outer layer portion of opposite resin roll 61, as the raw material as microspike for being used to form microspike Particle preferably allocates titanium oxide, barium titanate etc..The particle is used as by using titanium oxide, barium titanate etc., microspike Density becomes larger, and can suitably transport object S.In addition, opposite resin roll 61 is by the voltage applying mechanism and ground It is electrically connected, the electric field for being suitable for removing foreign matter can be generated between the clearer 51 of electrification.

As described above, in order to improve the organic efficiency of fine foreign matter, clearer 51 is between opposite resin roll 61 The mode for applying pressure appropriate to object S is set.If the pressure is excessively weak, in the presence of can not utilize clearer 51 with it is opposite Resin roll 61 and fully assign that object S is made to charge into the anxiety of the propulsive force in the brush roll 71 of back side brush unit 7, if mistake By force, then there is foreign matter to be extruded and be bonded on object S, and the anxiety that can not be recycled.Therefore, in order to adjust the pressure, It can be set as that the structure of opposite resin roll 61 can be pressed towards the direction of clearer 51 using elastomer etc..

(help roll)

Help roll 62 is the mobile person for guiding object S together with the carrying roller 45 of table side brush roll unit 4, the object S is moved in by upstream side outside transport mechanism 2A into cleaning mechanism 3.Layer structure of the help roll 62 etc. can be set as and phase It is identical to resin roll 61.

< back side cleaning mechanisms >

Back side cleaning mechanism 3B is the foreign matter person for the back surface S2 for removing object S.The back side cleaning mechanism 3B is big It generally is set as making the composition of table side cleaning mechanism 3A spun upside down, there is back side brush roll unit 7, back side cleaning roller unit 8 and table The opposite roller unit in side 9.

(back side brush roll unit)

Back side brush roll unit 7 is the foreign matter person that the back surface S2 of object S is removed using brush roll 71, in object The back side (lower section of transport path) of S, the opposite roller unit of back side than table side cleaning mechanism 3A 6 are more adjacent to conveyance direction downstream Side is arranged.The back side brush roll unit 7 mainly has brush roll 71, recycling roll 72 and blade 73, constitutes and the table substantially The table side brush roll unit 4 of side cleaning mechanism 3A is identical.But compared with table side brush roll unit 4, back side brush roll unit 7 is not being set Set the upper difference such as component this point for being equivalent to carrying roller 45 and foreign matter recoverer 44.Furthermore it is not set in back side brush roll unit 7 The reasons why setting the component for being equivalent to carrying roller 45 is:Although brush roll 71 is rotated up in the side inverted relative to conveyance direction D Driving, but in order to enter towards the lower section of brush roll 71, it is configured at the clearer 51 and phase for being more located at conveyance direction upstream than brush roll 71 Propulsive force appropriate is imparted to resin roll 61 to object S.In addition, although back side brush roll unit 7, which is not arranged, is equivalent to foreign matter The component of recoverer 44, but by its bottom opening, foreign matter can be discharged outside towards unit.It is discharged from back side brush roll unit 7 Foreign matter is returned together with the foreign matter being discharged from aftermentioned back side cleaning roller unit 8 by the foreign matter for being set to the lowest part of fixator 1 It recycles in receipts portion 13.For the viewpoint of maintainability, back side brush roll unit 7 is preferably releasably installed on fixator 1.

(brush roll)

Brush roll 71 is the 1st brush roll of back side, and object S is connected to the state charged by the voltage applying mechanism Back surface S2 on, and on the direction (direction of rotation counterclockwise of Fig. 2) of the conveyance direction D reversion relative to object S Rotation driving, thus removes on the back surface S2 of object S and the bigger foreign matter of mm size.Such brush roll 71 has Columned plug 71A and it is implanted into multiple bristle 71C (references on the peripheral surface of the plug 71A via following layer 71B Fig. 3), details is identical as the plug 41A of the brush roll 41 of table side brush roll unit 4 and bristle 41C, therefore omits and repeat to say It is bright.In addition, relative to the application voltage in the clearer 80 for cleaning roller unit 8 towards aftermentioned back side, make towards applying in brush roll 71 Making alive (voltage being applied in plug 71A) becomes same polarity and absolute value is got higher.As specifically towards applying in brush roll 71 Alive lower limit, in the same manner as the brush roll 41 of table side brush roll unit 4, preferably -800V, more preferably -600V.Another party The alive upper limit, preferably -200V, more preferably -300V are applied in face as described.

(recycling roll)

Recycling roll 72 is the 1st recycling of the back side for recycling the foreign matter that brush roll 71 is removed from the back surface S2 of object S Roller, it is substantially parallel with brush roll 71 and abutted with bristle 71C to be arranged further below than brush roll 71.The recycling roll 72 is logical In the state of crossing the voltage applying mechanism and charging, in direction (the rotation side counterclockwise of Fig. 2 inverted relative to brush roll 71 To) on, driving is rotated by the power from external drive source.The details of recycling roll 72 can be set as and the table side brush The recycling roll 42 of roller unit 4 is identical, therefore omits repeated explanation.

Relative to towards the application voltage in brush roll 71, making to become same polarity and absolute value towards the application voltage in recycling roll 72 It gets higher.As towards in recycling roll 72 application voltage with towards the lower limit for applying alive absolute value of the difference in brush roll 71, preferably For 200V, more preferably 300V.On the other hand, the upper limit as the absolute value of the difference, preferably 600V, more preferably 500V.In addition, applying alive lower limit as towards in recycling roll 72, preferably -1,500V, more preferably -1,200V.It is another Aspect applies the alive upper limit, preferably -400V, more preferably -600V as described.By relative to towards in brush roll 71 Apply voltage, makes to become same polarity towards the application voltage in recycling roll 72 and absolute value is got higher, the bristle 71C relative to brush roll 71 Current potential, the current potential of the peripheral surface of recycling roll 72 is same polarity and absolute value is got higher, therefore can make to be attached to different on brush roll 71 Object is adsorbed on the peripheral surface of recycling roll 72.In particular, by the way that the alive difference of applying of recycling roll 72 and brush roll 71 is set as described Range, and then it will be set as the range towards the application voltage in recycling roll 72, the foreign matter being attached on brush roll 71 can be made effectively It is adsorbed on the peripheral surface of recycling roll 72.

The direction of rotation of recycling roll 72 can be the either direction in the direction in the direction and reversion that are rotated forward relative to brush roll 71, excellent It is selected as being easy to be driven on the direction of rotation using aftermentioned blade 73 to recycle the foreign matter of peripheral surface.In present embodiment In, as shown in Fig. 2, direction (the rotation side counterclockwise of Fig. 2 that the direction of rotation of recycling roll 72 is set as inverting relative to brush roll 71 To), the organic efficiency of the foreign matter using blade 73 can be improved.The rotation of recycling roll 72 as the rotary speed relative to brush roll 71 The lower limit of the multiplying power of rotary speed, preferably 1.0 times.On the other hand, the upper limit as the multiplying power of the rotary speed, preferably 1.5 again.Foreign matter can be effectively set to be moved in recycling roll 72 from brush roll 71 as a result,.

(blade)

Blade 73 is the 3rd blade that taking foreign body is scraped from recycling roll 72.The blade 73 and the blade support for supporting it The details of 73a is identical as the blade 43 of the table side brush roll unit 4 of the table side cleaning mechanism 3A and blade support 43a.

(back side cleaning roller unit)

It is the fine foreign matter person that the back surface S2 of object S is removed using clearer 80 that back side, which cleans roller unit 8, It is more adjacent to conveyance direction downstream side to match in the back side (lower section of transport path) of object S than back side brush roll unit 7 If.The back side cleaning roller unit 8 mainly has clearer 80, brush roll 81, recycling roll 82, blade 83 and carrying roller 85, base This composition is identical as the table side of table side cleaning mechanism 3A cleaning roller unit 5.But compared with table side brush roll unit 4, back side Brush roll unit 7, which has 85 this point of carrying roller and is not arranged, is equivalent to the differences such as the component this point of foreign matter recoverer 55.Back side The component for being equivalent to foreign matter recoverer 55 is not arranged for brush roll unit 7, instead its bottom opening, and foreign matter can be discharged outside towards unit. The foreign matter being discharged in roller unit 8 is cleaned together with the foreign matter being discharged from back side brush roll unit 7 from back side, by being set to fixator The foreign matter recoverer 13 of 1 lowest part recycles.For the viewpoint of maintainability, back side cleans roller unit 8 preferably releasably It is installed on fixator 1.

(clearer)

Clearer 80 is the back side clearer of the fine foreign matter for the back surface S2 for removing object S, is disposed in pair As the back side (lower section of transport path) of object S.The clearer 80 is charged in peripheral surface by the voltage applying mechanism Under state, on the direction (Fig. 2's rotates clockwise direction) rotated forward relative to conveyance direction D, by with conveyance direction D substantially The vertical and rotary shaft substantially parallel with conveyance plane drives to rotate.The details of clearer 80 can be set as clear with the table side The clearer 51 of clean roller unit 5 is identical, therefore omits repeated explanation.

Relative to the application voltage in the brush roll 71 towards back side brush roll unit 7, make to become towards the application voltage in clearer 80 It is lower at same polarity and absolute value.Alive lower limit, for example, -400V are applied as towards in clearer 80, preferably - 200V.On the other hand, as the application voltage, such as less than 0V, preferably -50V or less.In this way, by relative to towards the back of the body Application voltage in the brush roll 71 of side brush roller unit 7 makes to become same polarity towards the application voltage in clearer 80 and absolute value becomes It is low, finer foreign matter can be removed from the back surface S2 of object S.In particular, by will be towards the application in clearer 80 Voltage is set as the range, can efficiently remove finer foreign matter from the back surface S2 of object S.

(brush roll)

Brush roll 81 is recycle the back side of fine foreign matter that clearer 80 is removed from the back surface S2 of object S the 2 brush rolls are connected on clearer 80 and are disposed in the lower section of clearer 80.The brush roll 81 is applying machine by the voltage Structure and in the state of charging, on the direction (Fig. 2's rotates clockwise direction) inverted relative to clearer 80, by with conveyance Rotary shaft substantially vertical and substantially parallel with conveyance plane direction D drives to rotate.With the brush roll 41 of the table side brush roll unit 4 Similarly, the brush roll 81 be via following layer 81B by multiple bristle 81C implantation plug 81A is upper and winner, details and The brush roll 41 of table side brush roll unit 4 is identical.

Relative to towards the application voltage in clearer 80, making (to be applied in plug 81A towards the application voltage in brush roll 81 Voltage) become same polarity and absolute value is got higher.As specifically alive lower limit is applied towards in brush roll 81, with table side brush roll list Member 4 brush roll 41 similarly, preferably -800V, more preferably -600V.On the other hand, the alive upper limit is applied as described, Preferably -200V, more preferably -300V.

(recycling roll)

Recycling roll 82 is the 2nd recycling roll of the back side for recycling the fine foreign matter recycled on 81 automatically cleaning roller 80 of brush roll, It is substantially parallel with brush roll 81 and abutted with bristle 81C to be arranged in the lower section of brush roll 81.The recycling roll 82 is passing through the electricity Pressure applying mechanism and in the state of charging, on the direction (Fig. 2's rotates clockwise direction) inverted relative to brush roll 81, pass through Power from external drive source drives to rotate.The details of recycling roll 82 can be set as and the table side brush roll unit 4 Recycling roll 42 is identical, therefore omits repeated explanation.

Relative to towards the application voltage in brush roll 81, making to become same polarity and absolute value towards the application voltage in recycling roll 82 It gets higher.As towards in recycling roll 82 application voltage with towards the lower limit for applying alive absolute value of the difference in brush roll 81, preferably For 200V, more preferably 300V.On the other hand, the upper limit as the absolute value of the difference, preferably 600V, more preferably 500V.In addition, applying alive lower limit as towards in recycling roll 82, preferably -1,500V, more preferably -1,200V.It is another Aspect applies the alive upper limit, preferably -400V, more preferably -600V as described.By relative to towards in brush roll 81 Apply voltage, makes to become same polarity towards the application voltage in recycling roll 82 and absolute value is got higher, the electricity with the bristle 81C of brush roll 81 Position is compared, and the current potential of the peripheral surface of recycling roll 82 is same polarity and absolute value is got higher, therefore can make to be attached to different on brush roll 81 Object is adsorbed on the peripheral surface of recycling roll 82.In particular, by the way that the alive difference of applying of recycling roll 82 and brush roll 81 is set as described Range, and then it will be set as the range towards the application voltage in recycling roll 82, the foreign matter being attached on brush roll 81 can be made effectively It is adsorbed on the peripheral surface of recycling roll 82.

The direction of rotation of recycling roll 82 can be the either direction in the direction in the direction and reversion that are rotated forward relative to brush roll 81, excellent It is selected as being easy to be driven from peripheral surface on the direction of rotation of recycling foreign matter using aftermentioned blade 83.In this embodiment party In formula, as shown in Fig. 2, the direction of rotation of recycling roll 82 is set as the direction inverted relative to brush roll 81, (Fig. 2's rotates clockwise Direction), the organic efficiency of the foreign matter using blade 83 can be improved.Recycling roll 82 as the rotary speed relative to brush roll 81 The lower limit of the multiplying power of rotary speed, preferably 1.0 times.On the other hand, the upper limit as the multiplying power of the rotary speed, preferably 1.5 again.Foreign matter can be effectively set to be moved in recycling roll 82 from brush roll 81 as a result,.

(blade)

Blade 83 is the 4th blade that taking foreign body is scraped from recycling roll 81.The blade 83 and the blade support for supporting it The details of 83a is identical as the blade 43 of the table side brush roll unit 4 of the table side cleaning mechanism 3A and blade support 43a.

(carrying roller)

Carrying roller 85 is the conveyance person for guiding object S, is disposed in and is more located at conveyance direction downstream than clearer 800 Side.As the carrying roller 85, person identical as opposite resin roll 61 can be properly used.

(the opposite roller unit of table side)

The opposite roller unit of table side 9 is the clearer 80 1 that roller unit 8 is cleaned with the brush roll 71 of back side brush roll unit 7 and back side With the transport path person of regulation object S, it is disposed in the table side (top of transport path) of object S.The table side is opposite Roller unit 9 mainly has framework 90, the opposite metallic roll 91 as the 1st opposite roller of table side and the phase as the 2nd opposite roller of table side To resin roll 92, and releasably it is disposed on fixator 1.The cleaning device releasably matches the opposite roller unit of table side 9 On the device body that the pedestal on the ground relative to factory etc. is fixedly installed.In this way, by by the opposite roller unit of table side 9 It is releasably disposed on fixator 1, can easily unload the opposite roller unit 9 of table side on self-retaining device 1, and make back side brush roll list The clearer 80 of brush roll 71 and back side the cleaning roller unit 8 of member 7 exposes.Therefore, brush roll 71 or clearer 80 can be easy to carry out Replacement or cleaning, therefore maintainability is excellent.In addition, about the opposite metallic roll 91 and opposite resin roll that are contained in framework 90 92, compared with the situation that assembling is fixed on fixator 1, maintenance also becomes easy.

(framework)

Framework 90 is to accommodate opposite metallic roll 91 and opposite resin roll 92 to carry out blocking, and can be filled on fixator 1 The person of unloading.In the top plate of the framework 90, separates in the horizontal direction vertical with conveyance direction D and be provided with a pair of of grip part 90A.A pair of of grip part 90A is the user in the handling of the opposite roller unit of table side 9.Framework 90 is provided with opening portion in the soleplate A part for 90B, opposite metallic roll 91 or opposite resin roll 92 is protruded from the opening portion 90B.Furthermore constitute the material of framework 90 There is no particular restriction for material, such as can properly use the metals such as stainless steel.

(opposite metallic roll)

Opposite metallic roll 91 is opposite with the brush roll 71 of back side brush roll unit 7 via object S, and to be connected to object Mode on S is disposed in the surface of brush roll 71.The opposite metallic roll 91 is rotation driver, relative to back side brush roll list It is rotated on the direction (direction of rotation counterclockwise of Fig. 2) that the brush roll 71 of member 7 inverts.The details and table side of opposite metallic roll 91 The recycling roll 42 of brush roll unit 4 is identical.But opposite metallic roll 91 is electrically connected by the voltage applying mechanism with ground It connects, the electric field for being suitable for removing foreign matter can be generated between brush roll 71.

It is to compare the metallic roll of hard by opposite metallic roll 91, the bristle 71C of the brush roll 71 of back side brush roll unit 7 can be made It is suitably connected on object S, therefore is effectively removed and compares from the back surface S2 of object S using brush roll 71 Big foreign matter.But the opposite roller of table side is not necessarily required to be metallic roll, it is possible to use electroconductive resin roller etc..

(opposite resin roll)

The clearer 80 that opposite resin roll 92 cleans roller unit 8 with back side via object S is opposite, and to be connected to pair As the mode on object S is disposed in the surface of clearer 80.The opposite resin roll 92 is rotation driver, relative to cleaning It is rotated on the direction (direction of rotation counterclockwise of Fig. 2) that roller 80 rotates forward.The details and the opposite roller of table side of opposite resin roll 92 The opposite resin roll 61 of unit 6 is identical.But opposite resin roll 92 is electrically connected by the voltage applying mechanism with ground It connects, the electric field for being suitable for removing foreign matter can be generated between clearer 80.

It is flexible resin roll by opposite resin roll 92, between the clearer 80 that back side cleans roller unit 8 Can ensure that suitable gripping width, therefore the adhesion of clearer 80 and object S can be improved, and using clearer 80 and from It is effectively removed fine foreign matter on the back surface S2 of object S.Furthermore in the back side brush roll unit of back side cleaning mechanism 3B 7 and back side cleaning roller unit 8 in have adjust respective height height adjustment mechanism it is also identical as table side cleaning mechanism 3A.

As described above, it is preferred to make recycling roll 42, recycling roll 53, recycling roll 72, recycling roll 82 and clearer 51, clearer 80 and brush roll 52, brush roll 81 peripheral surface electrification, and brush roll 41, brush roll 71 is made also to charge.Additionally, it is preferred that make help roll 62, Opposite metallic roll 60, opposite metallic roll 91, opposite resin roll 61, opposite resin roll 92 and ground are electrically connected.To make these Known circuit can be used in roller strap electricity or the alive circuit that (also including to be fixed into 0V) is electrically connected with ground.Not as potential difference Security Countermeasures of the 2 same rollers via foreign conducting matter of strip etc. and when short circuit, the alive circuit for example can be by 500 μ A Electric current be set as threshold value, and while having an electric current flowing more than threshold value, blocks the mechanism (such as fuse etc.) of circuit.

[The Duan Zi &#93 of unit and fixator;

Hereinafter, to for by the terminal of the unit of the electric connections such as each unit and external power supply or ground and fixator 1 An example illustrates.Figure 11 indicates an end for being disposed in the conveyance width direction of each unit or the cell side on two ends Terminal 110 indicates.Figure 12 indicates the fixator side terminal 120 being disposed on the inner surface of fixator 1.Furthermore the sanitizer cartridge Set preferably whole units by the connection structure with the electric connections such as external power supply, but some or all of unit Can by conventionally known connection structure with the electric connections such as external power supply.

The unit side terminal 110 of Figure 11 mainly has:2 be parallelly arranged along the axis Z parallel with conveyance direction D Cell side metallic plate 111 and 2 lids 112 being arranged in a manner of surrounding each unit side metallic plate 111 respectively under vertical view.It is single First side metallic plate 111 is electrically connected through not shown wiring with roller possessed by each unit.Furthermore the unit side of Figure 11 The piece number of cell side metallic plate 111 possessed by son 110 is 2, but the piece number of cell side metallic plate 111 can correspond to each unit Roller number etc. and suitable for change.In addition, the shape about lid 112, can also correspond to the piece number of cell side metallic plate 111 etc. and fits Preferably change.

The fixator side terminal 120 of Figure 12 is respectively provided with:Base portion 121, is formed by insulating component;2 fixator side gold Belong to plate 122, be disposed on the upper surface of the base portion 121, and with can be inserted into from top the cell side metallic plate 111 and The mode that be inserted into cell side metallic plate 111 can be held from two sides is bent;And portion 123 is surrounded, it is formed by insulating component, and It is arranged in a manner of surrounding each fixator side metallic plate 122.Fixator side metallic plate 122 through not shown wiring etc. and with it is outer The electric connections such as portion's power supply.Its outer surface is set as by 2 around portion 123 to support with the inner surface of the lid 112 of unit side terminal 110 The shape connect.Furthermore the piece number of fixator side metallic plate 122 possessed by the fixator side terminal 120 of Figure 12 surrounds portion 123 Shape, can correspond to the piece number of the cell side metallic plate 111 in unit side terminal 110 or the shape of lid 112 etc. and suitable for becoming More.

Each unit is installed on fixator 1, thus the fixator side terminal of the unit side terminal 110 of Figure 11 and Figure 12 120 are electrically connected.Specifically, each unit side metallic plate 111 of unit side terminal 110 is inserted into each fixator side terminal In 120 fixator side metallic plate 122, thus two metallic plates are electrically connected, and the lid of unit side terminal 110 112 is covered In make lid 112 in portion 123 and around portion 123 it is chimeric.In this way, lid 112 and becoming unit side terminal around portion 123 110 and guiding element of the fixator side terminal 120 when connecting, therefore easily two-terminal can be made to connect, and can firmly fix through even The two-terminal connect.Therefore, by the way that the unit side terminal 110 and fixator side terminal 120 are used for the cleaning device, installation Also it can be easy to carry out electric connection while each unit, therefore convenience can be promoted, and firm connection structure can be formed, because Even if this generates vibration etc. in the running, also it is easy the voltage being applied in each roller being kept into fixation.

[For the voltage Shi Jiajigou &#93 of roller;

In each unit, voltage applying mechanism is set usually near an end of each roller (comprising electrically connecting with ground The mechanism connect), and be electrically connected using wiring between the unit side terminal 110 and the voltage applying mechanism.From outer The supply such as portion's power supply is to the voltage in each unit via the unit side terminal 110, the wiring and the voltage applying mechanism And it supplies into each roller.In the case, to driving mechanisms such as the gears that drives each roller preferably in use by insulating materials After the component of formation, it is set near another end of each roller.Figure 13 indicates following voltage applying mechanism as the electricity An example of applying mechanism, the voltage applying mechanism is pressed to have:Coniform recess 130a is set to an end face of roller 130 On;Framework lateral electrode 131 has hemispherical front end, and the front end is connected to the coniform recess 130a of roller 130 Inner peripheral surface on;And metal flat spring 132, link with the framework lateral electrode 131, and towards 130 side of roller to framework side Electrode 131 presses.When being observed on transporting width direction, the vertex and framework of the central shaft of roller 130 and coniform recess The center of the hemisphere of the front end of lateral electrode 131 is roughly the same.Furthermore it can also be in profit between roller 130 and framework lateral electrode 131 With under the grease lubrication of electroconductive grease.

In the voltage applying mechanism, sent a telegram here using wiring (not shown) between unit side terminal 110 and flat spring 132 Property connection, via the wiring, flat spring 132, framework lateral electrode 131 and recess 130a and two pairs of rollers 130 apply voltage.The electricity Pressure applying mechanism makes framework lateral electrode 131 be connected near the central shaft of roller 130, i.e., the peripheral speed in roller 130 is smaller On position, the abrasion of roller 130 and framework lateral electrode 131 are thus can inhibit.In addition, make framework lateral electrode 131 it is hemispherical before End contact is set to the coniform recess in roller 130, and using 130 side of flat spring 132 tomorrow of roller to framework lateral electrode 131 Even if pressure is also easy to remain in electrical contact thus in the case where roller 130 vibrates.In turn, framework lateral electrode 131 is made to abut It presses to framework lateral electrode 131 on the end face of roller 130, and using flat spring 132 and in conveyance width direction, even if thus 130 up-down vibration of roller, the bending of flat spring 132 is also inhibited, therefore readily and stably presses.In turn, make coniform recessed The hemispherical front end of the inner peripheral surface and framework lateral electrode 131 that fall into 130a abuts, and is consequently formed by 130a and the framework side of being recessed The space that the front end of electrode 101 is surrounded, therefore it can will be inhibited to disperse in the space.But In order to further suppress dispersing for lubricating grease, optionally also can lid etc. be set on the periphery of voltage applying mechanism.

But the voltage applying mechanism in each unit is not limited to person shown in described Figure 13, such as can enumerate:In frame The electric conductivity sliding components such as conductive brush, electric conductivity bearing are set in body, and make each roller of electric conductivity contact with sliding members, by This applies alive method etc..

[Qing Jiefangfa ]

The clean method for using the cleaning device of Fig. 1 and Fig. 2 to remove foreign matter from object S is illustrated.It is described clear Clean method includes:Make on the direction inverted relative to conveyance direction D, passes through and and conveyance plane substantially vertical with conveyance direction D Substantially parallel rotary shaft rotates the process that the brush roll 41 of driving is connected on the object S transported;And make by with Rotary shaft substantially vertical and substantially parallel with conveyance plane conveyance direction D is connected to and brush roll 41 come the clearer 51 rotated The process on object S after abutting.In turn, the clean method includes:Make in the direction inverted relative to conveyance direction D On, it is connected to by rotary shaft substantially vertical with conveyance direction D and substantially parallel with conveyance plane to rotate the brush roll 71 of driving The process on object S after being abutted with clearer 51;And make by it is substantially vertical with conveyance direction and with conveyance plane substantially Parallel rotary shaft contacts the process on the object S after being abutted with brush roll 71 clearer 80 that is rotated.Described clear In clean method, apply 51 same polarity of clearer and absolute value that roller unit 5 is cleaned with table side to the brush roll 41 of table side brush roll unit 4 High voltage.In addition, for the brush roll 71 of back side brush roll unit 7, similarly apply the clearer with back side cleaning roller unit 8 80 same polarities and the high voltage of absolute value.In this way, by applying compared with clearer 51, clearer 80 to brush roll 41, brush roll 71 Same polarity and the high voltage of absolute value, can remove the bigger foreign matter of millimeter level, and can using brush roll 41, brush roll 71 Fine foreign matter is removed using clearer 51, clearer 80.About in the clean method towards in each roller application voltage, The various conditions of rotation etc., can be identical as the cleaning device, therefore the repetitive description thereof will be omitted.

(other embodiment)

The present invention is not limited to the embodiments, can be to be applied with various changes, improvement in addition to the form Form implement.In particular, Fig. 1 and Fig. 2 is only to indicate an example person of the cleaning device, such as the layer structure of each roller also can be with Fig. 2 is different.

Among each roller of the cleaning device, the roller other than the 1st brush roll, clearer and a pair of opposite roller is alternatively driven Roller.Even if in this way, a part for the roller of the cleaning device is set as driven voller, because of other of the driven voller and rotation driving Roller or transport object abut, therefore can also carry out driven playing its function.In addition, the direction of rotation of the 1st brush roll preferably relative to The direction of the conveyance direction reversion of object, but it is alternatively the direction rotated forward.In turn, the direction of rotation of clearer is preferably opposite In the direction that the conveyance direction of object rotates forward.

As long as the cleaning device at least has the 1st brush roll, a clearer, a pair of opposite roller and a voltage Applying mechanism, other constitute arbitrary.In addition, the 1st brush roll, clearer and a pair of opposite roller also can be and straight without blocking It connects and is fixed on the fixator of the cleaning device.

In addition, in said embodiment, can be also respectively set in back side cleans roller unit and back side brush roll unit different Object recoverer, and replace that opening is arranged in the bottom that back side cleans roller unit and back side brush roll unit.

In turn, in an example of present embodiment, a pair of opposite roller is made to be electrically connected with ground, but other can also be used It constitutes.For example, a pair of opposite roller can be fixed into 0V, it also can be according to the charged state of foreign matter, and it is fixed into defined positive electricity Position.The condition that should meet is the clearer 51 of the brush roll 41 and electrification relative to electrification, and applying into a pair of opposite roller becomes base Accurate fixation current potential.Therefore, optionally also it can apply different fixation current potentials into each roller of a pair of opposite roller.If fixed current potential It is too small with the voltage difference of the clearer 51 of electrification, then the enough electric fields for removing foreign matter can not be generated, therefore described in conduct The lower limit of potential difference, preferably 50V.

Furthermore under foreign matter terrifically electronegative situation etc., brush roll 41, brush roll 71, clearer 51, clearer 80 are set Also be certainly for positive potential the present invention thought in the range of.In the case, about a pair of opposite roller, can electrically connect with ground Fixation current potential on the basis of connecing or being also applied to.Can be 0V as the fixed current potential, according to the charged state of foreign matter, Can be defined negative potential or positive potential.

[Shi Shili ]

Hereinafter, the present invention is illustrated by embodiment, but the present invention is not limited by embodiment below.

<The optimum &gt of brush roll (bristle);

As a purpose by the material of the selected bristle for being suitable for removing foreign matter for tribocharging viewpoint, work is evaluated The charging property of part (object) and bristle simultaneously determines band electric array.

As bristle, the material person with characteristic shown in following table 1 is used.In following table 1, "-" indicates undetermined Corresponding characteristic.

[Table 1]

As object and foreign matter, become the foreign matter of problem using the object of target market and in the market.Tool For body, as object, acrylic panel, glass plate, raw cook and polyethylene terephthalate (Polyethylene are used Terephthalate, PET) film uses acrylic acid cutting slag, copper powder, ceramic slag (ceramics dregs), glass as foreign matter Glass cuts slag, polyester granules and fiber.

It is tribocharging be directed to object and bristle, by using surface potential meter measurement make object each other, object Polarity when object and bristle or bristle are charged by friction separately from each other is evaluated.In addition, the electrification relationship of foreign matter and object By using object foreign matter to be added and after so that it is charged by friction, attract foreign matter and using digital electrometer measurement carried charge come It is evaluated.It is shown in Figure 14 using these evaluation result as band electric array.

In general, in band electric array, it is being positioned at as far as possible for reversed polarity to use relative to object and foreign matter From place material bristle, the adsorption capacity of foreign matter becomes higher.Therefore, according to the result of Figure 14, thus it is speculated that as electric conductivity The material 1 and material 4 of polyester are suitable for removing foreign matter.

Then, about the electric conductivity polyester for being speculated as being best suited for removal foreign matter, implement using the different of material 1 and material 4 The evaluation of the removal capacity of object.In the evaluation, the foreign matter of object S is carried out using Fig. 1 and cleaning device shown in Fig. 2 Removal, and calculate when the material of bristle 41C possessed by the brush roll 41 of table side brush roll unit 4 is set as material 1 or material 4 Towards the foreign matter rate of recovery in foreign matter recoverer 44.As object S, the raw cook for being attached with ceramic slag is used.As a result, foreign matter The rate of recovery is 86.6% using material 1, in contrast, being 26.7% using material 4.Therefore, Judge to be used as bristle, fiber preferably bigger as fiber number, i.e., the material 1 of thicker fiber.Furthermore use material 4 When the rate of recovery speculated as described below than the reason for using rate of recovery when tribocharging same material 1 low.That is, It is believed that its reason is:Material 4 be the rigidity of the smaller fiber of fiber number, i.e., thinner fiber, therefore bristle 41C not Foot, can not move the bigger ceramic slag being attached on object S.

<Alive optimum is applied towards in brush roll;

Alive optimum is applied as shown in Figure 15 (A) towards in brush roll, makes the brush of voltage as defined in being applied with Roller is connected on the object for being attached with dust, and the state for being applied with the assigned voltage is kept for 10 seconds.Then, such as Figure 15 (B) shown in like that, brush roll is detached from object, regard the width for being formed by belt-like zone by the removal of dust as dust Absorption width (electric field action width) evaluated.

As the bristle of brush roll, the electric conductivity polyester for the material 1 that suitable result is obtained in existing evaluation is used.Make For object, the PET film for the use of thickness being 50 μm.As foreign matter, the polyester granules for the use of grain size being 50 μm~150 μm.It will apply The assigned voltage added in brush roll is set as 0V, -100V, -400V, -800V or -1,600V.By the evaluation of the absorption width of dust As a result it is shown in Figure 16.

As according to Figure 16 and, when the application voltage for confirming in present dynasty brush roll is -400V, dirt attraction width is most Greatly, i.e. absorption property highest.In addition, according to shown in Figure 16 as a result, apply alive lower limit as towards in brush roll, can be with Say preferably -800V, more preferably -600V.On the other hand, the alive upper limit is applied as described, it may be said that preferably- 200V, more preferably -300V.

<The peripheral speed and crimping Liang Yanjiu &gt of brush;

Using Fig. 1 and cleaning device shown in Fig. 2, make on one side the peripheral speed of the brush roll 41 of table side brush roll unit 4 with Change towards the crimping amount in object, carries out the foreign matter removal of object on one side.As a result, to the peripheral speed of brush roll and brush Roller influences to study caused by removing foreign matter towards the crimping amount in object.

Influence caused by peripheral speed by brush roll is to make the peripheral speed B of brush roll for the conveyance speed W of object Ratio (B/W) and change, and evaluated as the relationship of the removal with ceramic slag.As a result, when B/W is 50% When (such as the conveyance speed relative to object is 12m/min, and the peripheral speed of brush roll is 6m/min), towards the entrance side of workpiece Bullet flies ceramic slag.On the other hand, B/W is made to become 25% if the peripheral speed of brush roll is altered to 3m/min, the bullet flies It is inhibited.In general, small foreign matter is easier to be flown by bullet than big foreign matter, therefore judge that B/W is preferably 25% or less.

Crimping quantitative change is melted into 0.3mm or 0.6mm by the influence of brush roll towards the crimping amount in object by one side, real on one side The removal of ceramic slag is applied to be evaluated.If as a result, crimping amount is set as 0.3mm, the part of ceramic slag is nuzzled up brush roll And it remains on object.On the other hand, if crimping amount is set as 0.6mm, it can remove ceramics slag.Herein, crimping amount is bigger, The removal of foreign matter is more promoted, if but it is excessive, generate scratch because of the type of object or state.But crimping amount is upper Limit is different in each object.Therefore, the height that brush roll unit is adjusted by using height adjustment mechanism, even if in object In the case that thickness, type, state etc. are different, it can also make the crimping amount optimum of brush roll.

<The confirmation of clean-up performance;

The clean-up performance of the cleaning device is evaluated.Specifically, for the combination of various foreign matters and object, Using Fig. 1 and cleaning device shown in Fig. 2, the peripheral speed of each roller and application voltage are set as table 2, and to cleaning Front and back object surface is imaged, and is thus evaluated.

By foreign matter and object it is specific combine be set as ceramic punch slag and raw cook, sebum and polarizer, cotton fiber and Acrylic panel, polyester fiber and raw cook or polyester granules and PET film.In addition, the conveyance speed of object is set to 10m/ min.The image pickup result of each combination is shown in (A)~(F) of Figure 17~Figure 19.(A) of Figure 17~Figure 19~(F) is left figure Before mud of crying, right figure is the image pickup result after cleaning.The combination of (A) of Figure 17 is that object Sa is raw cook, and foreign matter Xa is ceramics Punch slag (4mm, thickness are 120 μm).The combination of (B) of Figure 17 is that object Sb is raw cook, and foreign matter Xb is various sizes shape The ceramic slag of shape (length is 0.1mm~3mm, and thickness is 170 μm).The combination of (C) of Figure 18 is that object Sc is deflecting plate, different Object Xc is sebum.The combination of (D) of Figure 18 is that object Sd is acrylic panel, and foreign matter Xd is cotton fiber.The combination of (E) of Figure 19 Be object Se be raw cook, foreign matter Xe is polyester fiber (length is 2mm~15mm).The combination of (F) of Figure 19 is object Sf For PET film, foreign matter Xf is polyester granules (grain size is 50 μm~150 μm).

[Table 2]

Such as Figure 17~as shown in Figure 19, it can confirm that any combination suitably removes foreign matter from object.

Industrial availability

The explanation of symbol

1:Fixator

2A:Transport mechanism outside upstream side

2B:Transport mechanism outside downstream side

3:Cleaning mechanism

4:Table side brush roll unit

41:Brush roll

42:Recycling roll

43:Blade

45:Carrying roller

5:Table side cleans roller unit

51:Clearer

51A:Plug

51B:Internal layer portion

51C:Outer layer portion

52:Brush roll

53:Recycling roll

54:Blade

6:The opposite roller unit of back side

60:Opposite metallic roll

61:Opposite resin roll

62:Help roll

7:Back side brush roll unit

71:Brush roll

72:Recycling roll

73:Blade

8:Back side cleans roller unit

80:Clearer

81:Brush roll

81A:Plug

81B:Following layer

81C:Bristle

82:Recycling roll

83:Blade

9:The opposite roller unit of table side

91:Opposite metallic roll

92:Opposite resin roll

101:Fixing component

102:Sliding component

103:Top plate

104:Lid

110:Unit side terminal

111:Cell side electrode plate

112:Lid

120:Fixator side terminal

121:Base portion

122:Fixator lateral electrode plate

123:Around portion

130:Roller

130a:Recess

131:Framework lateral electrode

132:Flat spring

S:Object

S1:Table side surface

S2:Back surface

D:Conveyance direction

Claims

1. a kind of cleaning device removes the foreign matter on surface when transporting plate or membranaceous object, it is characterised in that: Including

1st brush roll rotates driving by rotary shaft substantially vertical with conveyance direction and substantially parallel with conveyance plane;

Clearer rotates driving by rotary shaft substantially vertical with conveyance direction and substantially parallel with conveyance plane;

A pair of opposite roller, it is opposite with the 1st brush roll and clearer by the object, together relative to the object The side that the conveyance direction of object rotates forward rotates up driving;And

One or more voltage applying mechanisms apply voltage to the 1st brush roll and the clearer,

One or more of voltage applying mechanisms to the 1st brush roll apply with the clearer same polarity and absolute value it is high Voltage.

2. cleaning device according to claim 1, wherein the 1st brush roll is in the conveyance direction relative to the object The side of reversion rotates up driving, and the clearer rotates up drive in the side of the conveyance direction rotating forward relative to the object It is dynamic.

3. cleaning device according to claim 1 or 2, wherein one or more of voltage applying mechanisms are to the described 1st The voltage of brush roll application -800V or more, less than -200V, to the voltage of the clearer application -200V or more, less than 0V.

4. cleaning device according to claim 1,2 or 3, wherein one or more of voltage applying mechanisms are to described It is 100V or more, 500V potential difference below that 1 brush roll and the clearer, which assign absolute value,.

5. cleaning device according to any one of claim 1 to 4, wherein the current potential of the pair of opposite roller is defined Fixed current potential.

6. cleaning device according to any one of claim 1 to 5 comprising recycle the 1st brush roll and from institute The 1st recycling roll of the foreign matter removed on object is stated, and

One or more of voltage applying mechanisms apply and the 1st brush roll same polarity and absolute value the 1st recycling roll High voltage.

7. cleaning device according to claim 6, wherein one or more of voltage applying mechanisms are to the 1st recycling It is 200V or more, 600V potential difference below that roller and the 1st brush roll, which assign absolute value,.

8. the cleaning device described according to claim 6 or 7, wherein the direction of rotation of the 1st recycling roll is relative to described The direction of the direction of rotation reversion of 1st brush roll, and

Relative to the rotary speed of the 1st brush roll, the rotary speed of the 1st recycling roll is 1.0 times or more, 1.5 times or less.

9. cleaning device according to any one of claim 1 to 8, further include recycle the clearer and from institute The 2nd brush roll of the foreign matter removed on object is stated,

2nd brush roll rotates up driving in the side inverted relative to the clearer, and relative to the rotation of the clearer Rotary speed, rotary speed are 1.0 times or more, 1.5 times or less.

10. cleaning device according to claim 9, further include recycle the 2nd brush roll and from the clearer 2nd recycling roll of the foreign matter of upper removal,

2nd recycling roll rotates up driving in the side inverted relative to the 2nd brush roll, and relative to the 2nd brush roll Rotary speed, rotary speed be 1.0 times or more, 1.5 times or less.

11. a kind of clean method, the foreign matter on surface is removed when transporting plate or membranaceous object, feature exists In:Including

Make to be connected to rotate the brush roll of driving by rotary shaft substantially vertical with conveyance direction and substantially parallel with conveyance plane The process on the object transported;And

Make by substantially vertical with conveyance direction and abutted with the substantially parallel rotary shaft of conveyance plane to rotate the clearer of driving Process on the object;And

Voltage applied to the clearer, and to the brush roll apply with towards the application voltage same polarity in the clearer and The high voltage of absolute value.

12. clean method according to claim 11, wherein making brush roll be connected in the process on the object, it will The brush roll is set to defined value towards the amount of being absorbed in the object, and

Clearer is set to be connected in the process on the object, to press on the clearer using defined pressure Mode on the object is set.